WO2009062641A1 - Dispositif de mesure, tête de mesure et support de tête de mesure - Google Patents

Dispositif de mesure, tête de mesure et support de tête de mesure Download PDF

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Publication number
WO2009062641A1
WO2009062641A1 PCT/EP2008/009434 EP2008009434W WO2009062641A1 WO 2009062641 A1 WO2009062641 A1 WO 2009062641A1 EP 2008009434 W EP2008009434 W EP 2008009434W WO 2009062641 A1 WO2009062641 A1 WO 2009062641A1
Authority
WO
WIPO (PCT)
Prior art keywords
measuring
measuring head
optical
transmission
measuring device
Prior art date
Application number
PCT/EP2008/009434
Other languages
German (de)
English (en)
Inventor
Armin Muth
Martin SCHÖNLEBER
Original Assignee
Precitec Optronik Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Precitec Optronik Gmbh filed Critical Precitec Optronik Gmbh
Publication of WO2009062641A1 publication Critical patent/WO2009062641A1/fr

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
    • G01B11/005—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines
    • G01B11/007—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines feeler heads therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
    • G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
    • G01B21/047—Accessories, e.g. for positioning, for tool-setting, for measuring probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2210/00—Aspects not specifically covered by any group under G01B, e.g. of wheel alignment, caliper-like sensors
    • G01B2210/50—Using chromatic effects to achieve wavelength-dependent depth resolution

Definitions

  • the invention relates to a measuring device for carrying out a non-contact optical measuring method, comprising a measuring head holder, which is equipped with a Meßköpfaufnähme for interchangeable attachment of a measuring head, and with an attachable to the measuring head holder measuring head, which has a Meßkopfaufnähme corresponding measuring head cutting parts, and a measuring head and a measuring head holder ,
  • Measuring devices for carrying out measuring methods, in particular for determining surface geometries are known from the prior art and are also referred to as measuring machines.
  • a known measuring machine has a measuring head holder, which is movably mounted in at least one spatial direction on a stand or a base plate and to which a measuring head can be attached.
  • the measuring head holder serves to bring the measuring head in the vicinity of the surface to be scanned and to allow the desired determination of surface geometries with knowledge of the position of the measuring head holder and the attached measuring head via a touch contact or with a non-contact optical measuring method.
  • the measuring head holder is equipped with a measuring head holder and the measuring head with a measuring head interface, which enables a detachable and reproducible attachment of the measuring head to the measuring head holder with high mechanical accuracy.
  • different measuring heads can be attached to the measuring head holder, which are tuned to different measuring ranges and / or measuring methods are.
  • measuring heads which are designed for tactile methods, thus a rapid and possibly also automated change between the measuring heads can be made.
  • a measuring head set up for an optical measuring method is to be used, then the measuring head change can not be automated in known measuring devices, since the optical measuring head requires the provision of measuring light and optionally a coupling out of signal light.
  • the necessary Lichtleit Anlagenen which are designed for example as optical fibers, must be manually attached by an operator, as they can not be automated with reasonable effort attach to the probe holder.
  • the object of the invention is to provide a measuring device which enables an automated change of measuring heads.
  • a measuring device of the aforementioned type in which the measuring head receptacle and the measuring head interface form an optical transmission path for a free jet transmission.
  • a measuring light beam and / or a signal light beam is guided over a certain length only in air, before it enters an optically denser medium such as a Optical fiber coupled or deflected by a mirror assembly in its direction.
  • the length of the free jet path is a few 1/10 mm to a few mm and is chosen so that taking into account optical parameters as large a mechanical tolerance between each arranged at the end of the free-jet optics, in particular optical fibers, lenses or mirrors, can be allowed.
  • the measuring light beam and / or the signal light beam are processed by means of optical elements for the free-jet path between the measuring head holder and the measuring head that disturbances of the free jet, as they occur by misalignment and / or tilting of optical axes and / or contamination, only to a reduction the transmission rate for the free jet route lead.
  • impairment of the accuracy of the measurement result determined with the aid of the measuring light beam and the signal light beam takes place only in the case of massive disruptions of the free jet route.
  • the measuring head holder and the measuring head each contain an optical signal conductor, in particular a flexible optical fiber.
  • the optical signal conductor is preferably fixed or integrated on or in the measuring head holder or measuring head. If an optical measuring head is attached to the measuring head holder, then no complex and fault-prone opto-mechanical coupling of optical fibers is necessary. An attachment of a continuous optical fiber, which is guided in one piece from a light source to the measuring head, is eliminated. Rather, only the measuring head holder associated Light source activated and provides over the optical signal conductor, the measuring light.
  • the optical signal conductor is preferably designed as an optical fiber or as an optical mirror arrangement.
  • the Meßköpfaufnähme and / or the measuring head interface have at least one optical element which is set up for a light transmission by means of free jet.
  • the optical element may be integrally formed on the optical signal conductor, in particular as a dome-shaped machined end face of an optical fiber or bonded as a material fit on an optical fiber ball lens.
  • a separate optical element in particular a spherical or aspherical lens, an achromatic lens, a ball lens, a gradient index lens (GRIN lens) or a cylindrical lens is arranged at a distance from the optical signal conductor.
  • the optical element preferably serves to collimate the light beams to be coupled out of the optical signal conductor and to focus the light beams to be coupled into the optical signal conductor.
  • the measuring light beams and signal light beams emerging from the optical signal conductors are aligned in the area of the free beam path as parallel beams, whereby the desired insensitivity of the transmission path can be ensured.
  • the measuring head is equipped with a measuring optics for carrying out a confocal chromatic thickness measurement.
  • This optical measurement method is also called a longitudinal chromatic aberration. Ration is based on the use of measuring light with a broadband wavelength spectrum. Starting from a light source, the measuring light is coupled via the transmission path into the measuring head, which carries the measuring optics, which has a structurally conditioned, pronounced longitudinal color error. The measuring light is wavelength-dependent focused on the surface to be scanned. A sharp image of the end surface of the optical signal conductor on the surface to be scanned results only for a single wavelength, all other wavelengths of the measuring light beam are imaged only blurred on the surface to be scanned.
  • the measuring head Based on the surface to be scanned, only the portion of the measuring light that has been sharply imaged on the surface is coupled into the measuring optics and the signal conductors with high efficiency. Measuring light components with other wavelengths are coupled with the optical system due to the blurred image only with low efficiency and thus strongly suppressed.
  • the reflected signal light is provided to an evaluation device, where the wavelength with the highest intensity can be determined on the basis of the spectral intensity distribution.
  • the searched distance between the measuring head and the surface to be scanned can be determined from the found wavelength.
  • the measuring head is preferably realized as a purely passive optics without electronic or moving parts in a compact design.
  • the measuring optics can be calibrated independently of the transmission path for the free jet transmission.
  • the transmission link in which the measurement light beam and / or the signal light beam are transmitted in the free jet, serves only for Transmission of light.
  • the light is not modified in the transmission path as a function of the surface to be scanned, nor is there any change in the characteristic of the measuring light or of the signal light in the transmission path.
  • only the measuring optics arranged in the measuring head serves for the preparation of the measuring light for the distance measurement and the corresponding coupling of the signal light into the optical signal conductor. This makes it possible to calibrate the measuring optics independently of the transmission path.
  • At least one further optical device in particular a mirror, a lens, an optical fiber or a combination thereof, is arranged between the transmission path and the measuring optics arranged in the measuring head.
  • the signal conductor and the optical element are arranged in a fixed predeterminable position relative to a positioning device formed in the measuring head receptacle or the measuring head interface.
  • the attachment of the measuring head to the measuring head holder takes place with suitable mechanical positioning means, in particular with a plug-in coupling, which ensures a highly precise and reproducible alignment between the components to be connected.
  • the signal conductor and the optical element which may be provided on the measuring head holder and on the measuring head, are preferably arranged in the measuring head receptacle or in the measuring head interface such that the positioning accuracy of the mechanical positioning means also applies to them.
  • the transmission path for the free jet transmission is set up for a light transmission in the forward and reverse direction.
  • a simple construction of the transmission path is made possible, since the same optical devices as signal conductors and optical elements are used both for the measuring light and for the signal light.
  • a first transmission path for the free jet transmission for a light transmission in the forward direction and a second, structurally separated executed transmission path for the optical free jet transmission for the light transmission in the reverse direction is provided. In this way, an optical system adapted to the respective light transmission (measuring light / signal light) can be provided in each case in order to ensure a particularly low-loss light transmission.
  • the optical element is designed as a rotationally symmetrical transmission element.
  • Spherical or aspherical lenses, achromats, spherical lenses, gradient index lenses (GRIN lenses), cylindrical lenses, which can be produced inexpensively, are used as rotationally symmetrical transmission elements.
  • the measuring head receptacle and / or the measuring head interface are associated with an at least partially paraboloidally shaped mirror and a plane mirror as optical elements, wherein the plane mirror is arranged eccentrically in the paraboloidally shaped mirror.
  • This can be constructed with simple means a turret arrangement for receiving a plurality of measuring heads. With the aid of the mirror arrangement, the measuring light beam and the signal light beam can be coupled into or out of the respectively active measuring head.
  • the intermediate plate in a further embodiment of the invention is an on the Meßköpfaufnähme and the Meßkopfsammlungsmaschine adapted intermediate plate provided, which serves for receiving the Meßkopfhal- ter mineralen signal conductor and the at least one associated optical element.
  • the intermediate plate allows the attachment of an optical signal conductor to a probe holder, which is not equipped for optical signal transmission per se.
  • the intermediate plate is arranged between the measuring head holder and the measuring head and carries the measuring head side signal conductor. Since the intermediate plate is equipped with the positioning devices of the measuring head holder and the measuring head, no structural changes have to be made to the measuring head holder and the measuring head.
  • the intermediate plate is designed such that it also allows the inclusion of other measuring heads, so that the measuring head holder can be calibrated together with the intermediate plate.
  • a measuring head which has a measuring head section and a measuring optics for performing a non-contact optical measuring method, in particular for confocal chromatic thickness measurement, in which the measuring head section is equipped with at least one optical element, which is for coupling a measuring light beam and / or a coupling out of a signal light beam in the free jet is formed.
  • the measuring head section is equipped with at least one optical element, which is for coupling a measuring light beam and / or a coupling out of a signal light beam in the free jet is formed.
  • a measuring head holder is provided with a measuring head receptacle for interchangeable mounting of a measuring head, in which the measuring head receptacle is equipped with at least one optical element which is designed for coupling out a measuring light beam and / or coupling in a free-jet signal light beam.
  • the probe holder is tailored to the use of an optical probe, which can be replaced automatically and ensures high measurement accuracy even with a large number of replacement cycles.
  • 1 is a schematic representation of a measuring device
  • FIG. 3 shows a schematic detail of optical elements of the measuring head receptacle
  • FIG. 5 shows a schematic representation of a turret arrangement for a plurality of measuring heads
  • Fig. 6 is a schematic representation of an intermediate plate for coupling an optical measuring head to a conventional measuring head holder.
  • a measuring device 10 shown in FIG. 1 comprises a multi-axis robot arm to which a measuring head holder 12 and a measuring head 14 are attached.
  • the robot arm comprises a plurality of articulated arms 20 connected in an articulated manner, to each of which drive motors 22 are assigned, which can be controlled by a control device (not shown).
  • the measuring head 14 can be guided in an adjustable manner over the measuring table 16 by means of the robot arm in several spatial directions, on which a measuring object 18 is deposited, which has a surface geometry to be scanned.
  • the measuring head holder 12 has a measuring head interface, which essentially consists of an arrangement of a plurality of precisely placed and dimensioned bores 24, 26, 28.
  • the central bore 24 is provided with a clamping device, not shown, which can clamp a arranged on the measuring head 14 clamping pin 30 to set the measuring head 14 on the measuring head holder 12.
  • a positioning hole 26 ensures a rotational position of the measuring head 14 relative to the measuring head holder 12.
  • the measuring head section of the measuring head 14 has a dowel pin 32 corresponding to the positioning bore 26.
  • a coupling bore 28 is also provided, are received in the optical elements, as shown in more detail in FIG.
  • an optical connector 34 is inserted when attaching the measuring head 14, which in the same way with optical elements as shown in Fig. 3 in more detail measuring head holder 12 is equipped.
  • an air space which serves as a free-jet transmission path 35 for the measuring light and the signal light remains between the optical elements of the measuring head holder 12 and the measuring head 14.
  • a receiving sleeve 36 is arranged in the coupling bore 28, which can be adjusted in the axial direction of the coupling bore 28 by means of a fine thread, not shown, provided in the coupling bore 28.
  • the receiving sleeve 36 serves to define a fiber connector 38, which forms the termination of an optical fiber 40, which is provided for the coupling of measuring light in the direction of the measuring head 14 and for the coupling of signal light in the direction of an evaluation unit, not shown.
  • a collimator lens 42 is arranged below the fiber connector 38, which is accommodated in a lens holder 44 arranged adjustably in the receiving sleeve 36.
  • the fiber peg 38 is received obliquely to the central longitudinal axis of the receiving sleeve 36 in an adjustment sleeve 37. Due to the inclination of the fiber connector 38, a low-loss coupling of signal light is ensured in the optical fiber 40.
  • optical connector 34 of the measuring head 14 is a mirror image identical arrangement of optical components as provided in the coupling bore 28.
  • the collimator lenses 42 are the closest to each other arranged optical elements.
  • the collimator lenses 42 each ensure that the light coupled out of the fiber connectors 38 is emitted in the direction of the opposite collimator lens as a parallel beam.
  • differences in position and slight tilting and axial displacements between the collimator lenses 42 do not impair the transmission path 35 in which the measuring light and the signal light are present as a free jet.
  • FIG. 4 shows in more detail the measuring principle of the chromatically confocal distance measurement and the optical components necessary for this purpose.
  • measuring light is coupled into an optical fiber 52, which is connected to a fiber coupler 54.
  • the measuring light is coupled into the optical fiber 40 associated with the measuring head holder 12 and transmitted in the free jet to the measuring head 14 via the transmission path 35 shown in enlarged form, where it is coupled into the optical fiber 48.
  • the measuring light is coupled out of the optical fiber 48 as a free jet and impinges on a first lens 56 and then on a second lens 58.
  • These two lenses 56 and 58 essentially form an object lens. tively with a pronounced longitudinal chromatic aberration which reduces the proportions of laser light with different wavelengths. different strong breaks.
  • the portion of the measuring light which has a short wavelength ⁇ m i n is more strongly refracted than the portion of the measuring light which has longer wavelengths X n ⁇ x .
  • the portion of the measuring light with the wavelength ⁇ i, which lies between A m i n and A n ⁇ x is focused on the surface of the measuring object 18 and is therefore coupled back into the measuring head 14 with a high degree of efficiency.
  • portions of the measuring light that are not focused on the surface of the measuring object 18 are coupled into the measuring head 14 only with significantly lower efficiency.
  • the signal light coupled into the measuring head 14 is coupled back into the optical fiber 48 via the lenses 56, 58 and coupled via the transmission path into the optical fiber 40 in the measuring head holder.
  • the signal light is coupled into an optical fiber 60, which is connected to a spectrometer (not shown).
  • a wavelength-related intensity evaluation of the signal light takes place. As shown schematically in FIG. 4, this results in a high intensity level for the signal light with the wavelength ⁇ i, while signal light with other wavelengths does not produce a relevant intensity level.
  • a distance between the measuring head 14 and the measuring object 18 can thus be determined from the determined intensity maximum.
  • an arrangement of partially paraboloidally shaped mirrors 62, 64 and Plan mirrors 66, 68 provided instead of the opposing collimator lenses 42.
  • the measurement light coupled out of an optical fiber, not shown, is emitted through a bore 70 in the upper parabolic mirror section 62 onto the upper plane mirror 66 and from there onto the mirrored surface of the parabolic mirror section 62.
  • By its surface curvature of diverging light beams parallel light rays, which are emitted in the direction of the lower parabolic mirror 64.
  • the light rays are coupled by means of the lower plane mirror 68 through the bore 72 into the measuring head-side optical fiber (not shown).
  • the measuring head-side parabolic mirror 64 is rotationally symmetrical and provided with a total of four holes, of which only three holes 72, 74, 76 are visible due to the Thomasdar- position. Below the holes each have a measuring head 14 is attached. Each of the measuring heads 14 is designed for a different measuring range and can be brought by rotation of the parabolic mirror 64 in the position in which the measuring light beam is coupled and the signal light beam is coupled out. Thus, in the embodiment according to FIG. 5, a rapid change of measuring heads 14 for adaptation to different measuring tasks can take place by rotation of the parabolic mirror 64 carrying the measuring heads 14.
  • an intermediate plate 78 is shown, which can be arranged between a conventional measuring head holder 80 without optical elements and an optical measuring head, not shown, which is set up for chromatic confocal distance measurement.
  • the task of the intermediate plate 78 is a recording tactile and optical probes on the probe holder 80, without having to make modifications to the probe holder 80.
  • the intermediate plate 78 has a measuring head interface in the direction of the measuring head holder 80 without optical elements and a measuring head receptacle with optical elements facing the measuring head (not shown).
  • the optical elements are formed in the same way as in the measuring head holder 12 shown in more detail in FIG. 3.
  • a separate optical fiber 82 ensures the provision of measurement light and the extraction of signal light.
  • Both optical and tactile measuring heads can be coupled to the intermediate plate 78.
  • a calibration of the measuring device takes place with built-in intermediate plate 78. Due to the high precision of the measuring head cut parts and the Meßkopfaufnähme on the intermediate plate 78 results in the use of the intermediate plate 78 only a slightly deteriorated accuracy of the measuring method. Depending on the application, this is compensated by the advantage of being able to automatically replace the measuring heads in rapid succession.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

L'invention concerne un dispositif de mesure (10) utilisable dans un procédé de mesure optique sans contact, comprenant un support de tête de mesure (12, 80) qui est équipé d'un logement de tête de mesure pour la mise en place interchangeable d'une tête de mesure (14), et une tête de mesure (14) pouvant être appliquée sur ledit support de tête de mesure (12, 80), ladite tête de mesure présentant une interface correspondant au logement de la tête de mesure. L'invention est caractérisée en ce que le logement de tête de mesure et l'interface de tête de mesure forment un parcours de transmission optique (35) pour une transmission d'un rayonnement libre.
PCT/EP2008/009434 2007-11-15 2008-11-08 Dispositif de mesure, tête de mesure et support de tête de mesure WO2009062641A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102007054915A DE102007054915A1 (de) 2007-11-15 2007-11-15 Messvorrichtung, Messkopf und Messkopfhalter
DE102007054915.8 2007-11-15

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Publication Number Publication Date
WO2009062641A1 true WO2009062641A1 (fr) 2009-05-22

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Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8736817B2 (en) 2012-05-25 2014-05-27 Mitutoyo Corporation Interchangeable chromatic range sensor probe for a coordinate measuring machine
US8817240B2 (en) 2012-05-25 2014-08-26 Mitutoyo Corporation Interchangeable optics configuration for a chromatic range sensor optical pen
DE102013105753B3 (de) * 2013-06-04 2014-10-02 Carl Zeiss Industrielle Messtechnik Gmbh Verfahren zum automatischen Aufnehmen eines Sensorkopfs und Koordinatenmessgerät
DE102013104363A1 (de) 2013-04-29 2014-10-30 Carl Zeiss Industrielle Messtechnik Gmbh Optische Sensoreinrichtung zur Kopplung an eine Dreh-Schwenk-Einheit
CN104279953A (zh) * 2013-07-03 2015-01-14 株式会社三丰 光学元件和检测色谱测距传感器系统的脱离状况的方法
CN108759751A (zh) * 2018-06-09 2018-11-06 袁美华 一种胶丝宽度大小及弹性检测装置
EP4015986A1 (fr) 2020-12-18 2022-06-22 TESA Sàrl Unité de capteur sans contact pour une machine de mesure de coordonnées

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WO2013091697A1 (fr) * 2011-12-21 2013-06-27 Carl Zeiss Industrielle Messtechnik Gmbh Procédé de couplage de deux composants de système d'un appareil de mesure, en particulier d'un appareil de mesure de coordonnées
DE102015217637C5 (de) * 2015-09-15 2023-06-01 Carl Zeiss Industrielle Messtechnik Gmbh Betreiben eines konfokalen Weißlichtsensors an einem Koordinatenmessgerät und Anordnung
DE102019122049B4 (de) * 2019-08-16 2021-09-09 Hexagon Metrology Gmbh Verfahren zur Aufnahme oder zum Wechsel eines Tastkopfes oder Sensors an einer Pinole oder an einem an der Pinole angeordneten Interface eines Koordinatenmessgerätes
US11118896B2 (en) 2019-11-27 2021-09-14 Mitutoyo Corporation Configuration for coupling chromatic range sensor optical probe to coordinate measurement machine
DE102021132660A1 (de) 2021-12-10 2023-06-15 Hexagon Metrology Gmbh Koordinatenmessgerät

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EP1580521A2 (fr) * 2004-03-23 2005-09-28 IBTL - Ing. Büro Lang & Armlich GmbH Appareil de mesure de coordonnées à lentilles interchangeables

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EP0362625A2 (fr) * 1988-10-07 1990-04-11 Firma Carl Zeiss Appareil pour mesurer des coordonnées avec tête de palpage optique
EP1580521A2 (fr) * 2004-03-23 2005-09-28 IBTL - Ing. Büro Lang & Armlich GmbH Appareil de mesure de coordonnées à lentilles interchangeables

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8817240B2 (en) 2012-05-25 2014-08-26 Mitutoyo Corporation Interchangeable optics configuration for a chromatic range sensor optical pen
US8736817B2 (en) 2012-05-25 2014-05-27 Mitutoyo Corporation Interchangeable chromatic range sensor probe for a coordinate measuring machine
US9115982B2 (en) 2012-05-25 2015-08-25 Mitutoyo Corporation Interchangeable chromatic range sensor probe for a coordinate measuring machine
DE102013104363A1 (de) 2013-04-29 2014-10-30 Carl Zeiss Industrielle Messtechnik Gmbh Optische Sensoreinrichtung zur Kopplung an eine Dreh-Schwenk-Einheit
DE102013104363B4 (de) * 2013-04-29 2015-03-26 Carl Zeiss Industrielle Messtechnik Gmbh Optische Sensoreinrichtung zur Kopplung mit einer Dreh-Schwenk-Einheit und Koordinatenmessgerät
US9964391B2 (en) 2013-06-04 2018-05-08 Carl Zeiss Industrielle Messtechnik Gmbh Method for automatically receiving a sensor head and coordinate measuring machine
DE102013105753B3 (de) * 2013-06-04 2014-10-02 Carl Zeiss Industrielle Messtechnik Gmbh Verfahren zum automatischen Aufnehmen eines Sensorkopfs und Koordinatenmessgerät
US10365080B2 (en) 2013-06-04 2019-07-30 Carl Zeiss Industrielle Messtechnik Gmbh Coordinate measuring machine having a carrier structure for coupling with a sensor head
US9068822B2 (en) 2013-07-03 2015-06-30 Mitutoyo Corporation Chromatic range sensor probe detachment sensor
CN104279953B (zh) * 2013-07-03 2018-10-19 株式会社三丰 光学元件和检测色谱测距传感器系统的脱离状况的方法
CN104279953A (zh) * 2013-07-03 2015-01-14 株式会社三丰 光学元件和检测色谱测距传感器系统的脱离状况的方法
CN108759751A (zh) * 2018-06-09 2018-11-06 袁美华 一种胶丝宽度大小及弹性检测装置
CN108759751B (zh) * 2018-06-09 2020-12-15 日照市睿尔泽新材料科技有限公司 一种胶丝宽度大小及弹性检测装置
EP4015986A1 (fr) 2020-12-18 2022-06-22 TESA Sàrl Unité de capteur sans contact pour une machine de mesure de coordonnées

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