WO2009040161A1 - Sonde et dispositif pour le contrôle optique d'objets à mesurer - Google Patents

Sonde et dispositif pour le contrôle optique d'objets à mesurer Download PDF

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Publication number
WO2009040161A1
WO2009040161A1 PCT/EP2008/059723 EP2008059723W WO2009040161A1 WO 2009040161 A1 WO2009040161 A1 WO 2009040161A1 EP 2008059723 W EP2008059723 W EP 2008059723W WO 2009040161 A1 WO2009040161 A1 WO 2009040161A1
Authority
WO
WIPO (PCT)
Prior art keywords
probe
optical element
optical
rotatable
tube
Prior art date
Application number
PCT/EP2008/059723
Other languages
German (de)
English (en)
Inventor
Tobias Gnausch
David Rychtarik
Original Assignee
Robert Bosch Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch Gmbh filed Critical Robert Bosch Gmbh
Publication of WO2009040161A1 publication Critical patent/WO2009040161A1/fr

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/954—Inspecting the inner surface of hollow bodies, e.g. bores
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B23/00—Telescopes, e.g. binoculars; Periscopes; Instruments for viewing the inside of hollow bodies; Viewfinders; Optical aiming or sighting devices
    • G02B23/24—Instruments or systems for viewing the inside of hollow bodies, e.g. fibrescopes
    • G02B23/2407—Optical details
    • G02B23/2423—Optical details of the distal end
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B23/00—Telescopes, e.g. binoculars; Periscopes; Instruments for viewing the inside of hollow bodies; Viewfinders; Optical aiming or sighting devices
    • G02B23/24—Instruments or systems for viewing the inside of hollow bodies, e.g. fibrescopes
    • G02B23/2476—Non-optical details, e.g. housings, mountings, supports
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/0087—Simple or compound lenses with index gradient

Definitions

  • the invention relates to an optical probe for the optical testing of test objects according to the preamble of claim 1 and to an apparatus for the interferometric measurement of test objects with the probe.
  • optical probes have been used which have a
  • the hitherto known optical probes with a rotatable probe part therefore have the disadvantage that in the case of components to be measured with different dimensions, replacement of the entire probe is necessary.
  • the optical probe according to the invention or the device according to the invention with the probe has the advantage that a very flexible use of the probe is made possible.
  • a part or only certain parts of the probe needs to be replaced, namely only the optically relevant elements of the probe.
  • Figure 2 shows the basic optical structure of an embodiment of the probe according to the invention.
  • FIGS. 3a to 3e each show an exchange unit for the probe according to the invention.
  • FIG. 1 shows the basic mechanical structure of the probe 1
  • Fig. 2 shows the basic optical structure of the same probe 1
  • the probe 1 has a fixed probe part 10 and a mechanically and optically coupled rotatable probe part 20.
  • the two probe parts 10, 20 are mechanically coupled to each other via a bearing 14. Therefore, an air gap 9 with a thickness approximately equal to the diameter of the bearing balls is formed between the two probe parts 10, 20.
  • the bearing 14 may be disposed at a different position of the probe 1.
  • the air gap 9 may be significantly smaller than the diameter of the bearing balls, in particular, there may be almost a physical contact between the two probe parts 10, 20. However, since there should still be enough space to adjust the optics in both probe parts 10, 20, the distance is typically a few 100 ⁇ m.
  • An input beam is introduced by means of an optical fiber 11 via an input 5 in the probe 1, wherein the input beam first in the fixed Probe part 10 is introduced.
  • the collimating optics 12 is arranged, which collimates the input beam.
  • the thus collimated beam 13 is further supplied to the rotatable probe part 20.
  • the rotatable probe part 20 is mounted so that it can rotate about a rotation axis 31.
  • At least one optical element 25 is provided in the rotatable probe part 20.
  • the at least one optical element 25 may be a focusing lens 25a or a deflecting unit 25b.
  • the focusing lens 25a is advantageously formed by a so-called GRIN lens, which is a short form of "Graduate
  • the refractive index of a GRIN lens changes continuously and steplessly in the material of the lens, for example, a curved surface shape such as be dispensed with in the case of conventional lenses.
  • the beam deflection unit 25b is formed in FIG. 2 by a prism. However, the beam deflecting unit 25b can also be formed by a mirror as needed.
  • the measuring beam focused by the focusing lens 25a is deflected by the beam deflecting unit 25b in a direction perpendicular to the rotation axis 31 and exits from an exit 30 of the probe 1.
  • the focus 32 of the measuring beam strikes the surface of the measuring object in the ideal case.
  • the rotatable probe part 20 now comprises a means 21 for exchanging the at least one optical element 25.
  • the rotatable probe part 20 itself comprises two subunits: In addition to a first solid subunit, a second subunit of the rotatable probe part 20 - a so-called exchange unit 26 - is provided.
  • the replacement unit 26 comprises at least the at least one optical element 25.
  • the means 21 for exchanging the at least one optical element 25 in this example is itself an element of the first, massive subunit. Deviating from this, however, the means 21 may be an element of the exchange unit 26 if necessary.
  • the probe 1 is fixed to a holder when a measurement object is to be measured. If, during use, an optical element 25 such as the focusing lens 25a or the deflection unit 25b is damaged, because e.g. the probe 1 collides unplanned with the measurement object or other objects and suffers a shock, the optical element 25 must be replaced. Previously, this meant replacing the entire probe 1, even though only one or a few elements were damaged. The probe 1 must then be removed from the holder and a new probe 1 to be reinstalled. In addition, the new probe 1 must be gauged, i. be reset to the target.
  • an optical element 25 such as the focusing lens 25a or the deflection unit 25b
  • the probe 1 With the probe 1 according to the invention, it is now possible to replace only the optically relevant element 25, without at the same time having to remove the probe 1 from the holder and, later, to mount a new probe 1 again.
  • the invention is based on the finding that even with probes 1 with different optics and optionally the mechanics, many of the remaining elements of the probe 1 have the same dimension and design. These did not really need to be replaced. Therefore, it is proposed to collect such elements in the fixed probe part 10.
  • the means 21 may be designed in the form of a closure.
  • a closure offers the possibility of easy replacement by simply loosening and closing the closure.
  • the means 21 is a bayonet 21a.
  • the bayonet closure 21a ensures a constant contact force and prevents the replacement unit 26 from falling out.
  • the bayonet lock 21a ensures a defined position of the exchange unit 26 in the vertical direction.
  • this tube 27 serves as a protective cover for the one or more optical elements 25.
  • the tube 27 also serves to guide the optics and is important for determining the opto-mechanical axis of the optics. This tube 27 corresponds to the actual probe arm of the probe. 1
  • the replacement unit 26 further includes an alignment pin 28.
  • This alignment pin 28 encloses the tube 27 in plan view and fits snugly into a corresponding recess of the solid subunit. As a result, the angle of view of the focus 32 is defined very precisely.
  • a liesferrule 29 may be provided for guiding the tube 27 in the exchange unit 26.
  • the tube 27 must be mounted in a very precise Systemssferrule 29 so that a change of the exchange unit 26 can always be made reproducible and there is no play between the tube 27 and the Systemssferrule 29. It is of fundamental importance in optical metrology that the individual elements of the probe 1 have no play. The position of the focus 32 must be reproducible to within a few micrometres.
  • the Stanfordsferrule 29 may consist of either a ceramic, stainless steel or other material that allows a multiple change without wear and is made very precisely.
  • the means 21 is a screw cap. An exchange then takes place through simply unscrewing the replacement unit 26 and then screwing another replacement unit 26. All other features of the probe 1 are the same as described in the first embodiment.
  • the means 21 may in a further embodiment of the probe 1 by a
  • Raster closure be formed.
  • the replacement unit 26 can be mounted by snapping into the solid subunit of the probe 1.
  • FIGS. 3 a to 3 e each show a replacement unit 26 for the inventive probe 1 described so far
  • Exchange unit 26 as needed a tube 27 with at least one optical element 25, a suitssferrule 29 and an alignment pin 28 include.
  • the 5 examples of the exchange units 26 in FIGS. 3a to 3e have different optics from each other. Comparing the first two exchange units 26 according to FIGS. 3a and 3b, it can be seen that the second
  • Exchange unit 26 according to FIG. 3b has a longer tube 27 than the first exchange unit 26 according to FIG. 3a.
  • a longer feeler arm is achieved for e.g. Measurement of very deep holes.
  • the third exchange unit 26 according to FIG. 3c has a focus 32, which is arranged further from the exit 30 of the probe 1.
  • an exchange unit 26 which comprises a plurality of outlets 30.
  • the outputs 30 may have different exit angles.
  • the exchange unit 26, as in FIG. 3e, has only one exit 30, which provides a very specific exit angle.
  • the exchange units 26 thus differ only by thinner or thicker tubes 27 from each other.
  • the replacement units 26 have different types of feeler arms.
  • a Fasertastarm be part of a replacement unit 26.
  • the small hole 27 is often missing in the exchange unit 26.
  • the probe arm is not formed by the tube 27 but by an optical fiber. Accordingly, the leadership leadership leads
  • the optical fiber is partially disposed in the istsferrule 29, partially protruding from the istsferrule 29 out.
  • Such replacement units 26 with a Fasertastarm are particularly suitable when the bore to be measured is very small.
  • the Fasertastarm is also designed so that the measuring beam emerges perpendicular to the axis of rotation 31 of the probe 1.
  • the measurement beam reflected on the surface of the measurement object is picked up again by the probe 1.
  • the reflected measuring beam now passes through the previous beam path in reverse
  • Evaluation unit is connected. Thus, an analysis of the illuminated with the probe 1 measurement objects is possible.
  • the interferometer is connected to the probe 1 by means of the already mentioned optical fiber 11.
  • the structure of a typical interferometer will not be further explained, since this has already been described in detail, for example, in the initially cited document DE 100 57 540 A1. It should only be emphasized that the interferometer can comprise an evaluation unit in addition to a detection unit.
  • an optical probe 1 has been described with a fixed probe part 10 and a rotatable probe part 20, in which a flexible replacement of at least one optical element 25 of the probe 1 is made possible.
  • a means 21 for exchanging the at least one optical element 25 is provided in the rotatable probe part 20.
  • a device has been proposed which comprises a per se known interferometer and the probe 1 described. Overall, this achieves a very versatile optical probe 1 which can be used with different measuring objects.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Astronomy & Astrophysics (AREA)
  • General Health & Medical Sciences (AREA)
  • Biochemistry (AREA)
  • Analytical Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

L'invention concerne une sonde optique (1) pour le contrôle optique d'objets à mesurer, cette sonde comprenant : une partie de sonde fixe (10); et une partie de sonde rotative (20), couplée mécaniquement et optiquement à la précédente, sachant que la partie de sonde rotative (20) comprend au moins un élément optique (25) et un moyen (21) pour remplacer le ou les éléments optiques (25). L'invention concerne en outre un dispositif de mesure interférométrique d'objets, dans lequel un interféromètre est relié à la sonde optique (1).
PCT/EP2008/059723 2007-09-24 2008-07-24 Sonde et dispositif pour le contrôle optique d'objets à mesurer WO2009040161A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102007045569.2 2007-09-24
DE200710045569 DE102007045569A1 (de) 2007-09-24 2007-09-24 Sonde und Vorrichtung zum optischen Prüfen von Messobjekten

Publications (1)

Publication Number Publication Date
WO2009040161A1 true WO2009040161A1 (fr) 2009-04-02

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ID=40013565

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PCT/EP2008/059723 WO2009040161A1 (fr) 2007-09-24 2008-07-24 Sonde et dispositif pour le contrôle optique d'objets à mesurer

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DE (1) DE102007045569A1 (fr)
WO (1) WO2009040161A1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113916124B (zh) * 2021-10-09 2024-03-15 中国测试技术研究院机械研究所 具有管状基准照明系统的菲索干涉仪及管状基准照明系统用于移相技术的方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4561776A (en) * 1981-03-25 1985-12-31 Diffracto Ltd. Electro-optical sensors for tool and robotic inspection
DE10057539A1 (de) * 2000-11-20 2002-05-23 Bosch Gmbh Robert Interferometrische Messvorrichtung
US20050168751A1 (en) * 1998-09-21 2005-08-04 Olympus Corporation Optical imaging apparatus
WO2005098398A1 (fr) * 2004-04-05 2005-10-20 Robert Bosch Gmbh Systeme interferometrique pour l'utilisation d'optiques speciales

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10057540A1 (de) 2000-11-20 2002-06-06 Bosch Gmbh Robert Interferometrische Messvorrichtung

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4561776A (en) * 1981-03-25 1985-12-31 Diffracto Ltd. Electro-optical sensors for tool and robotic inspection
US20050168751A1 (en) * 1998-09-21 2005-08-04 Olympus Corporation Optical imaging apparatus
DE10057539A1 (de) * 2000-11-20 2002-05-23 Bosch Gmbh Robert Interferometrische Messvorrichtung
WO2005098398A1 (fr) * 2004-04-05 2005-10-20 Robert Bosch Gmbh Systeme interferometrique pour l'utilisation d'optiques speciales

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DE102007045569A1 (de) 2009-04-02

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