WO2009040158A1 - Sonde et dispositif pour la vérification optique d'objets à mesurer - Google Patents

Sonde et dispositif pour la vérification optique d'objets à mesurer Download PDF

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Publication number
WO2009040158A1
WO2009040158A1 PCT/EP2008/059695 EP2008059695W WO2009040158A1 WO 2009040158 A1 WO2009040158 A1 WO 2009040158A1 EP 2008059695 W EP2008059695 W EP 2008059695W WO 2009040158 A1 WO2009040158 A1 WO 2009040158A1
Authority
WO
WIPO (PCT)
Prior art keywords
probe
grin lens
inclined surface
lens
measurement
Prior art date
Application number
PCT/EP2008/059695
Other languages
German (de)
English (en)
Inventor
David Rychtarik
Original Assignee
Robert Bosch Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch Gmbh filed Critical Robert Bosch Gmbh
Publication of WO2009040158A1 publication Critical patent/WO2009040158A1/fr

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/0001—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems
    • G02B6/0005—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems the light guides being of the fibre type
    • G02B6/0006—Coupling light into the fibre
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02049—Interferometers characterised by particular mechanical design details
    • G01B9/0205—Interferometers characterised by particular mechanical design details of probe head
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/0001—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems
    • G02B6/0005—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems the light guides being of the fibre type
    • G02B6/0008—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems the light guides being of the fibre type the light being emitted at the end of the fibre
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/32—Optical coupling means having lens focusing means positioned between opposed fibre ends

Definitions

  • the invention relates to an optical probe for the optical testing of test objects according to the preamble of claim 1 and to an apparatus for the interferometric measurement of test objects with the probe.
  • an optical probe can be used.
  • Probe 1 has an input 10 for introducing an input beam into the probe 1, a lens 8 for focusing the input beam to a measuring beam and an output 20 for illuminating the measured objects to be tested.
  • the input beam is introduced through an optical fiber 11 in the probe 1, wherein for the coupling of the optical fiber 11 in the probe 1, a ferrule 2 is provided. Between the ferrule 2 and the lens 8 for focusing a spacer 4 (“spacer”) can be arranged.
  • spacer spacer
  • the lens for focusing the input beam into a measuring beam is often a so-called GRIN lens 8, which is a short form of "graduate index lens”, “graded index lens” or “gradient index lens.”
  • GRIN lens 8 is a short form of "graduate index lens”, “graded index lens” or “gradient index lens.”
  • the refractive index of a GRIN lens changes continuously and steplessly in the material of the lens be dispensed with a curved surface shape as in the case of conventional lenses.
  • the focused measurement beam is finally deflected from its original direction to the side via a prism 3, which is arranged at the output 20, and thus illuminates the surface of the measurement object.
  • an interferometric measuring device which is connected to an optical probe part. It is proposed to also provide a GRIN lens as an optical element in the probe. Further, its front, the measuring object facing area is designed as a measuring head.
  • the measuring head is provided with a thin, designed as a measuring fiber optical fiber whose free end portion is designed as an end piece for illuminating a measuring point of the measurement object and receiving reflected measurement light. For the deflection of the measuring light, the tail is bevelled and mirrored.
  • An optical probe with a GRIN lens is also known from EP 1 222 486 B1.
  • a probe for use as a medical device for example an endoscope.
  • an endoscope for example an endoscope
  • GRIN lens provided a separate mirror for beam deflection.
  • the hitherto known optical probes with a GRIN lens have the disadvantage that a separate beam deflection unit, such as a mirror or prism, is necessary for illuminating the measurement object.
  • the inventive optical probe or the device according to the invention with the probe has the advantage that the GRIN lens allows both the focusing of the input beam to a measuring beam and the deflection of the measuring beam to illuminate the measured object.
  • the GRIN lens allows both the focusing of the input beam to a measuring beam and the deflection of the measuring beam to illuminate the measured object.
  • Bonding process is about 20 times lower than the angular accuracy of the ground plasma itself.
  • the disadvantages described above are abruptly eliminated by the probe according to the invention, since both the preparation of the prism and the assembly of the prism to the lens is unnecessary.
  • the advantage is achieved by an optical probe in which the GRIN lens has at least one surface inclined with respect to the direction of the input beam for deflecting the measuring beam.
  • FIG. 1 shows an example of a known probe from the prior art
  • FIG. 2 shows an embodiment of a probe according to the invention
  • 3a shows a first embodiment of the GRIN lens
  • Figure 3b shows a second embodiment of the GRIN lens.
  • FIG. 1 shows an example of an optical probe 1 known from the prior art. The structure of the known probe 1 has already been explained above.
  • FIG. 2 A first embodiment of the probe according to the invention is shown in FIG. 2.
  • FIG Probe 1 an input 10 for introducing an input beam into the probe 1, a GRIN lens 8 for focusing the input beam to a measuring beam and an output 20 for illuminating the measured objects to be tested.
  • the input beam is introduced through an optical fiber 11 in the probe 1, wherein for the coupling of the optical fiber 11 in the probe 1, a ferrule 2 is provided.
  • a spacer 4 "C" can be placed between the ferrule 2 and the GRIN lens 8.
  • Such optical probes 1 are also called probe arms in certain applications because they optically scan measured objects, for example when scanning components of an automobile ,
  • the essential components of the probe 1 according to the invention include the input 10 for introducing an input beam into the probe 1, the GRIN lens 8 for focusing the input beam into a measuring beam and the output 20 for illuminating the test objects to be tested.
  • the GRIN lens 8 has at least one surface 9 inclined with respect to the direction 7 of the input beam for deflecting the measuring beam. Since a beam is reflected on the inclined surface 9 and thereby deflected in a desired direction, a hitherto provided separate deflection unit such as a mirror or a prism is superfluous. The oblique surface necessary for the reflection is therefore already present in the GRIN lens 8.
  • the GRIN lens 8 has exactly one inclined surface 9. Thus, additional operations on the GRIN lens 8 are reduced as much as possible.
  • the GRIN lens 8 advantageously has a totally reflecting, inclined surface 9. Thus, no beam intensity is lost, but the entire beam intensity remains the measurement process.
  • the inclined surface 9 is arranged at the outlet 20 of the probe 1. This ensures direct illumination of the measurement objects. However, if desired, the inclined surface 9 may be slightly away from the exit 20 of the Probe 1 are arranged, for example, when a plurality of inclined surfaces 9 are provided on the GRIN lens 8, but fewer exits 20 of the probe 1. It is then to ensure by appropriate measures such as the arrangement of deflection that all measuring beams at the exit of the probe 1 can escape.
  • the inclined surface 9 may have an arbitrary inclination angle with respect to the direction 7 of the input beam as needed. However, practical inclination angles are 40 ° to 50 °, in particular 45 °.
  • Figures 3a and 3b show two variants of the GRIN lens 8 with a tilted
  • the GRIN lens 8 in Fig. 3a has a circular shape in plan view.
  • the measuring beam reflected at the inclined surface 9 is registered by the cylindrically curved outer surface.
  • such a curved exit surface 15 for the measurement beam can be accepted if the measurement beam has, for example, a low beam diameter. Then namely the distortion of the measuring beam through the curved exit surface 15 is negligibly small. But in other applications, especially with a long working distance between the probe and the DUT, the effect of distortion may not be neglected.
  • a second variant of the GRIN lens 8 is proposed, as shown in FIG. 3b, according to which the GRIN lens 8 has a plane exit face 16 for the measuring beam. Since the exit surface 16 is flat, the measuring beam occurs almost perpendicular to
  • the generation of the inclined surface 9 and / or the plane exit surface 16 on the GRIN lens 8 is simpler and more accurate than the production of the prisms of the prior art, because the GRIN lens 8 is typically larger than a prism in a same probe 1.
  • the GRIN lens 8 is typically a few millimeters long. This considerably simplifies handling. It is proposed to grind and / or polish the GRIN lens 8 to produce the desired shapes.
  • the inclined surface 9 and / or the flat exit surface 16 is then ground and / or polished after processing in the desired shape. In this grinding to obtain the inclined surface 9, a tapered end surface of the GRIN lens 8 is formed, so that two sides of different length are formed.
  • a relatively low gradient refractive index material may be selected for the lens.
  • the GRIN lens 8 thus produced would then be longer overall without this measure to compensate for the low gradient refractive index.
  • the inclined surface 9 and / or the flat exit surface 16 may be provided with a protective layer. These externally accessible surfaces are thus e.g. Specially protected against dirt.
  • the measurement beam reflected on the surface of the measurement object is picked up again by the probe 1.
  • the reflected measuring beam now passes through the previous beam path in the opposite direction, i. it is reintroduced into the probe 1 at the exit 20 of the probe 1 and leaves the probe 1 at the entrance 10.
  • the terms "input” and “output” do not refer to the reflected measuring beam as is familiar to a person skilled in the art.
  • the measuring beam fed out again from the probe 1 is then fed to a detection unit to which an evaluation unit is connected. Thus, an analysis of the illuminated with the probe 1 measurement objects is possible.
  • the interferometer is connected to the probe 1 by means of the already mentioned optical fiber 11.
  • the interferometer can comprise an evaluation unit in addition to a detection unit.
  • an optical probe 1 has been described in which the focusing lens 8 has at least one surface 9 inclined with respect to the direction 7 of the input beam for deflecting the measuring beam. This eliminates the need for a separate deflection unit such as a mirror or prism. Furthermore, a device has been proposed which comprises a per se known interferometer and the probe 1 described. Overall, this achieves a very simplified and precise production of an optical probe 1.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)

Abstract

L'invention concerne une sonde optique (1) pour la vérification optique d'objets à mesurer, cette sonde comprenant : une entrée (10) pour introduire un faisceau d'entrée dans la sonde (1), une lentille à indice gradué GRIN (8) pour focaliser le faisceau d'entrée en un faisceau de mesure et une sortie (20) pour éclairer les objets à mesurer qui doivent être vérifiés, la lentille GRIN (8) comportant au moins une surface (9) inclinée par rapport à la direction (7) du faisceau d'entrée afin de dévier le faisceau de mesure. Par ailleurs, il est décrit un dispositif destiné à la mesure interférométrique d'objets à mesurer, un interféromètre étant relié à la sonde optique (1) à l'intérieur dudit dispositif.
PCT/EP2008/059695 2007-09-24 2008-07-24 Sonde et dispositif pour la vérification optique d'objets à mesurer WO2009040158A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102007045570.6 2007-09-24
DE102007045570A DE102007045570A1 (de) 2007-09-24 2007-09-24 Sonde und Vorrichtung zum optischen Prüfen von Messobjekten

Publications (1)

Publication Number Publication Date
WO2009040158A1 true WO2009040158A1 (fr) 2009-04-02

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Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2008/059695 WO2009040158A1 (fr) 2007-09-24 2008-07-24 Sonde et dispositif pour la vérification optique d'objets à mesurer

Country Status (2)

Country Link
DE (1) DE102007045570A1 (fr)
WO (1) WO2009040158A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8509577B2 (en) 2010-07-02 2013-08-13 St. Jude Medical, Inc. Fiberoptic device with long focal length gradient-index or grin fiber lens

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10057539A1 (de) * 2000-11-20 2002-05-23 Bosch Gmbh Robert Interferometrische Messvorrichtung
US20030004412A1 (en) * 1999-02-04 2003-01-02 Izatt Joseph A. Optical imaging device
US20030165291A1 (en) * 2002-03-04 2003-09-04 Bhagavatula Venkata A. Beam bending apparatus and method of manufacture
US20040227059A1 (en) * 2003-05-14 2004-11-18 Spears Kurt E. Compact integrated optical imaging assembly

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6445939B1 (en) 1999-08-09 2002-09-03 Lightlab Imaging, Llc Ultra-small optical probes, imaging optics, and methods for using same
US6654518B1 (en) 1999-10-28 2003-11-25 Oplink Communications, Inc. Tap output collimator

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030004412A1 (en) * 1999-02-04 2003-01-02 Izatt Joseph A. Optical imaging device
DE10057539A1 (de) * 2000-11-20 2002-05-23 Bosch Gmbh Robert Interferometrische Messvorrichtung
US20030165291A1 (en) * 2002-03-04 2003-09-04 Bhagavatula Venkata A. Beam bending apparatus and method of manufacture
US20040227059A1 (en) * 2003-05-14 2004-11-18 Spears Kurt E. Compact integrated optical imaging assembly

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8509577B2 (en) 2010-07-02 2013-08-13 St. Jude Medical, Inc. Fiberoptic device with long focal length gradient-index or grin fiber lens

Also Published As

Publication number Publication date
DE102007045570A1 (de) 2009-04-02

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