WO2009060762A1 - 電子線源、該電子線源を用いた電子線照射装置及びｘ線管、該ｘ線管が配置されたｘ線照射装置、並びに電子線源の製造方法 - Google Patents

電子線源、該電子線源を用いた電子線照射装置及びｘ線管、該ｘ線管が配置されたｘ線照射装置、並びに電子線源の製造方法 Download PDF

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Publication number
WO2009060762A1
WO2009060762A1 PCT/JP2008/069553 JP2008069553W WO2009060762A1 WO 2009060762 A1 WO2009060762 A1 WO 2009060762A1 JP 2008069553 W JP2008069553 W JP 2008069553W WO 2009060762 A1 WO2009060762 A1 WO 2009060762A1
Authority
WO
WIPO (PCT)
Prior art keywords
electron beam
beam source
irradiator
ray tube
ray
Prior art date
Application number
PCT/JP2008/069553
Other languages
English (en)
French (fr)
Inventor
Koji Kawai
Original Assignee
Hamamatsu Photonics K.K.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2007287678A external-priority patent/JP2009117134A/ja
Priority claimed from JP2007287676A external-priority patent/JP2009117133A/ja
Application filed by Hamamatsu Photonics K.K. filed Critical Hamamatsu Photonics K.K.
Publication of WO2009060762A1 publication Critical patent/WO2009060762A1/ja

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/13—Solid thermionic cathodes
    • H01J1/14—Solid thermionic cathodes characterised by the material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/13—Solid thermionic cathodes
    • H01J1/15—Cathodes heated directly by an electric current
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/065—Construction of guns or parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/04—Manufacture of electrodes or electrode systems of thermionic cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/06—Cathode assembly
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/061—Construction
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/30—Electron or ion beam tubes for processing objects
    • H01J2237/31—Processing objects on a macro-scale

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Solid Thermionic Cathode (AREA)

Abstract

　本発明は、電子線照射装置、Ｘ線照射装置、電子顕微鏡等の線源として用いられる電子線源及びその製造方法に関する。 カソード（１５３）は、タングステンで形成された給電部材（１５８）と、タンタルで形成された線材である電子放出部材（１５９）と、を備えている。また、隣接する電子放出部材（１５９）の外周面が互いに接触するように、電子放出部材（１５９）が給電部材（１５８）に巻き回されている。また、タンタルを含む合金からなる線材を、タングステンを含む合金からなる基材に当該基材が覆われるように巻き回し、複合構造体を形成する。そして、複合構造体の線材に炭化処理を施すことで、基材を給電部材として形成すると共に線材を電子放出部材として形成する。
PCT/JP2008/069553 2007-11-05 2008-10-28 電子線源、該電子線源を用いた電子線照射装置及びｘ線管、該ｘ線管が配置されたｘ線照射装置、並びに電子線源の製造方法 WO2009060762A1 (ja)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2007-287676 2007-11-05
JP2007-287678 2007-11-05
JP2007287678A JP2009117134A (ja) 2007-11-05 2007-11-05 電子線源の製造方法
JP2007287676A JP2009117133A (ja) 2007-11-05 2007-11-05 電子線源

Publications (1)

Publication Number Publication Date
WO2009060762A1 true WO2009060762A1 (ja) 2009-05-14

Family

ID=40625656

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/069553 WO2009060762A1 (ja) 2007-11-05 2008-10-28 電子線源、該電子線源を用いた電子線照射装置及びｘ線管、該ｘ線管が配置されたｘ線照射装置、並びに電子線源の製造方法

Country Status (2)

Country Link
TW (1) TW200931486A (ja)
WO (1) WO2009060762A1 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012054045A (ja) * 2010-08-31 2012-03-15 Hamamatsu Photonics Kk Ｘ線照射装置
GB2585158A (en) * 2018-06-01 2020-12-30 Micromass Ltd Filament assembly

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62206737A (ja) * 1986-03-07 1987-09-11 Futaba Corp 傍熱形陰極
JPH01151143A (ja) * 1987-12-08 1989-06-13 Toshiba Corp 電子銃のフィラメント
JPH0864110A (ja) * 1994-08-25 1996-03-08 Ulvac Japan Ltd 炭化物膜被覆電子放射材料およびその製造方法
JP2005183382A (ja) * 2003-12-19 2005-07-07 Samsung Electronics Co Ltd イオンソース及びこれを有するイオン注入装置
WO2006009053A1 (ja) * 2004-07-15 2006-01-26 Hitachi Medical Corporation 固定陽極x線管とそれを用いたx線検査装置及びx線照射装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62206737A (ja) * 1986-03-07 1987-09-11 Futaba Corp 傍熱形陰極
JPH01151143A (ja) * 1987-12-08 1989-06-13 Toshiba Corp 電子銃のフィラメント
JPH0864110A (ja) * 1994-08-25 1996-03-08 Ulvac Japan Ltd 炭化物膜被覆電子放射材料およびその製造方法
JP2005183382A (ja) * 2003-12-19 2005-07-07 Samsung Electronics Co Ltd イオンソース及びこれを有するイオン注入装置
WO2006009053A1 (ja) * 2004-07-15 2006-01-26 Hitachi Medical Corporation 固定陽極x線管とそれを用いたx線検査装置及びx線照射装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012054045A (ja) * 2010-08-31 2012-03-15 Hamamatsu Photonics Kk Ｘ線照射装置
GB2585158A (en) * 2018-06-01 2020-12-30 Micromass Ltd Filament assembly
GB2585158B (en) * 2018-06-01 2021-07-28 Micromass Ltd Filament assembly
US11972937B2 (en) 2018-06-01 2024-04-30 Micromass Uk Limited Filament assembly

Also Published As

Publication number Publication date
TW200931486A (en) 2009-07-16

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