WO2009051234A1 - カラーフィルタ及びその製造方法並びに固体撮像装置 - Google Patents

カラーフィルタ及びその製造方法並びに固体撮像装置 Download PDF

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Publication number
WO2009051234A1
WO2009051234A1 PCT/JP2008/068878 JP2008068878W WO2009051234A1 WO 2009051234 A1 WO2009051234 A1 WO 2009051234A1 JP 2008068878 W JP2008068878 W JP 2008068878W WO 2009051234 A1 WO2009051234 A1 WO 2009051234A1
Authority
WO
WIPO (PCT)
Prior art keywords
color filter
solid
imaging device
state imaging
producing
Prior art date
Application number
PCT/JP2008/068878
Other languages
English (en)
French (fr)
Inventor
Tomoyuki Kikuchi
Mitsuji Yoshibayashi
Original Assignee
Fujifilm Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujifilm Corporation filed Critical Fujifilm Corporation
Publication of WO2009051234A1 publication Critical patent/WO2009051234A1/ja

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/201—Filters in the form of arrays
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144—Devices controlled by radiation
    • H01L27/146—Imager structures
    • H01L27/14601—Structural or functional details thereof
    • H01L27/1462—Coatings
    • H01L27/14621—Colour filter arrangements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144—Devices controlled by radiation
    • H01L27/146—Imager structures
    • H01L27/14683—Processes or apparatus peculiar to the manufacture or treatment of these devices or parts thereof
    • H01L27/14685—Process for coatings or optical elements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02—Details
    • H01L31/0216—Coatings
    • H01L31/02161—Coatings for devices characterised by at least one potential jump barrier or surface barrier
    • H01L31/02162—Coatings for devices characterised by at least one potential jump barrier or surface barrier for filtering or shielding light, e.g. multicolour filters for photodetectors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/0006—Arrays
    • G02B3/0037—Arrays characterized by the distribution or form of lenses
    • G02B3/0056—Arrays characterized by the distribution or form of lenses arranged along two different directions in a plane, e.g. honeycomb arrangement of lenses

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Optics & Photonics (AREA)
  • Solid State Image Pick-Up Elements (AREA)
  • Optical Filters (AREA)
  • Color Television Image Signal Generators (AREA)

Abstract

　支持体１２上に、Ｔｉ、Ｔａ、Ｚｎ、及びＺｒから選ばれる少なくとも一種の金属の酸化物を含む層１６を形成し、前記金属酸化物を含む層上に着色層１８を形成し、前記着色層の一部をドライエッチングして除去することによりカラーフィルタのパターンを形成する。これにより、支持体上に、Ｔｉ、Ｔａ、Ｚｎ、及びＺｒから選ばれる少なくとも一種の金属の酸化物を含む層が設けられており、前記金属酸化物を含む層を介して着色層が形成されていることを特徴とするカラーフィルタ及びそれを備えた固体撮像装置１０が提供される。
PCT/JP2008/068878 2007-10-19 2008-10-17 カラーフィルタ及びその製造方法並びに固体撮像装置 WO2009051234A1 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-272913 2007-10-19
JP2007272913A JP2009103746A (ja) 2007-10-19 2007-10-19 カラーフィルタ及びその製造方法並びに固体撮像装置

Publications (1)

Publication Number Publication Date
WO2009051234A1 true WO2009051234A1 (ja) 2009-04-23

Family

ID=40567495

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/068878 WO2009051234A1 (ja) 2007-10-19 2008-10-17 カラーフィルタ及びその製造方法並びに固体撮像装置

Country Status (3)

Country Link
JP (1) JP2009103746A (ja)
TW (1) TWI444673B (ja)
WO (1) WO2009051234A1 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7477443B2 (ja) 2020-12-24 2024-05-01 東京応化工業株式会社 硬化性樹脂組成物、その硬化物、硬化膜の製造方法、及びマイクロレンズの製造方法

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8277698B2 (en) * 2009-07-10 2012-10-02 Lg Chem, Ltd. Infrared curable ink composition for color filter and color filter
JP5894445B2 (ja) * 2012-01-23 2016-03-30 東京エレクトロン株式会社 エッチング方法及びエッチング装置
CN104428714A (zh) * 2012-07-04 2015-03-18 富士胶片株式会社 微透镜的制造方法
KR101678473B1 (ko) * 2013-01-18 2016-11-22 후지필름 가부시키가이샤 컬러 필터의 제조 방법
CN108352391B (zh) 2015-11-16 2023-01-03 凸版印刷株式会社 固态成像器件的制造方法及固态成像器件、以及彩色滤光片的制造方法及彩色滤光片
JPWO2019111919A1 (ja) * 2017-12-06 2020-12-24 凸版印刷株式会社 固体撮像素子およびその製造方法

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52115120A (en) * 1976-03-23 1977-09-27 Toshiba Corp Image-pickup use filter
JPS52136525A (en) * 1976-05-11 1977-11-15 Toshiba Corp Stripe filter and its manufacture
JPS63208803A (ja) * 1987-02-26 1988-08-30 Mitsubishi Electric Corp カラ−フイルタの製造方法
JPH02151804A (ja) * 1988-12-05 1990-06-11 Toppan Printing Co Ltd 多層パターン膜の製造方法
JPH085816A (ja) * 1994-06-21 1996-01-12 Toray Ind Inc カラーフィルタ
JPH10177102A (ja) * 1996-12-18 1998-06-30 Dainippon Printing Co Ltd カラーフィルタ付マイクロレンズ構体
JP2001166126A (ja) * 1999-09-30 2001-06-22 Toray Ind Inc カラーフィルターおよび液晶表示装置
JP2001314761A (ja) * 2000-05-09 2001-11-13 Natl Inst Of Advanced Industrial Science & Technology Meti 光触媒発色部材とその製造方法
JP2002348664A (ja) * 2001-03-19 2002-12-04 Fuji Xerox Co Ltd 基材上に結晶性半導体薄膜を形成する方法、結晶性半導体薄膜を形成した積層体およびカラーフィルター

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52115120A (en) * 1976-03-23 1977-09-27 Toshiba Corp Image-pickup use filter
JPS52136525A (en) * 1976-05-11 1977-11-15 Toshiba Corp Stripe filter and its manufacture
JPS63208803A (ja) * 1987-02-26 1988-08-30 Mitsubishi Electric Corp カラ−フイルタの製造方法
JPH02151804A (ja) * 1988-12-05 1990-06-11 Toppan Printing Co Ltd 多層パターン膜の製造方法
JPH085816A (ja) * 1994-06-21 1996-01-12 Toray Ind Inc カラーフィルタ
JPH10177102A (ja) * 1996-12-18 1998-06-30 Dainippon Printing Co Ltd カラーフィルタ付マイクロレンズ構体
JP2001166126A (ja) * 1999-09-30 2001-06-22 Toray Ind Inc カラーフィルターおよび液晶表示装置
JP2001314761A (ja) * 2000-05-09 2001-11-13 Natl Inst Of Advanced Industrial Science & Technology Meti 光触媒発色部材とその製造方法
JP2002348664A (ja) * 2001-03-19 2002-12-04 Fuji Xerox Co Ltd 基材上に結晶性半導体薄膜を形成する方法、結晶性半導体薄膜を形成した積層体およびカラーフィルター

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7477443B2 (ja) 2020-12-24 2024-05-01 東京応化工業株式会社 硬化性樹脂組成物、その硬化物、硬化膜の製造方法、及びマイクロレンズの製造方法

Also Published As

Publication number Publication date
TW200925670A (en) 2009-06-16
JP2009103746A (ja) 2009-05-14
TWI444673B (zh) 2014-07-11

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