WO2009050836A1 - 振動型アクチュエータ - Google Patents

振動型アクチュエータ Download PDF

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Publication number
WO2009050836A1
WO2009050836A1 PCT/JP2008/002017 JP2008002017W WO2009050836A1 WO 2009050836 A1 WO2009050836 A1 WO 2009050836A1 JP 2008002017 W JP2008002017 W JP 2008002017W WO 2009050836 A1 WO2009050836 A1 WO 2009050836A1
Authority
WO
WIPO (PCT)
Prior art keywords
main body
actuator main
actuator
drivers
leaf spring
Prior art date
Application number
PCT/JP2008/002017
Other languages
English (en)
French (fr)
Inventor
Masaru Higashionji
Hideaki Mukae
Eiichi Nagaoka
Yusuke Adachi
Original Assignee
Panasonic Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Panasonic Corporation filed Critical Panasonic Corporation
Priority to JP2009537887A priority Critical patent/JP5202538B2/ja
Priority to US12/738,353 priority patent/US8314533B2/en
Publication of WO2009050836A1 publication Critical patent/WO2009050836A1/ja

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/202—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/001—Driving devices, e.g. vibrators
    • H02N2/003—Driving devices, e.g. vibrators using longitudinal or radial modes combined with bending modes
    • H02N2/004—Rectangular vibrators
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/005—Mechanical details, e.g. housings
    • H02N2/0055—Supports for driving or driven bodies; Means for pressing driving body against driven body
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/026—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors by pressing one or more vibrators against the driven body
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/103—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors by pressing one or more vibrators against the rotor
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/202—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement
    • H10N30/2023—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement having polygonal or rectangular shape
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/88—Mounts; Supports; Enclosures; Casings

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

　アクチュエータ本体の振動を阻害することなく且つ、駆動子が被当接体から反力を受けても該駆動子と被当接体との間の当接状態を安定的に維持するアクチュエータ本体の支持構造を実現する。 　超音波アクチュエータ（２）は、振動を発生させるアクチュエータ本体（４）と、アクチュエータ本体（４）の設置面（４０ａ）に設けられて駆動力を出力する駆動子（８，８）と、アクチュエータ本体（４）をステージ（１１）へ押圧するための押圧ゴム（６２）と、アクチュエータ本体（４）が実装されるケース（５）と、アクチュエータ本体（４）をケース（５）に対して弾性的に支持する板ばね（６１）とを備えている。板ばね（６１）は、アクチュエータ本体（４）における、駆動子（８，８）が設けられている設置面（４０ａ）を支持している。
PCT/JP2008/002017 2007-10-18 2008-07-29 振動型アクチュエータ WO2009050836A1 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2009537887A JP5202538B2 (ja) 2007-10-18 2008-07-29 振動型アクチュエータ
US12/738,353 US8314533B2 (en) 2007-10-18 2008-07-29 Vibratory actuator

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-271707 2007-10-18
JP2007271707 2007-10-18

Publications (1)

Publication Number Publication Date
WO2009050836A1 true WO2009050836A1 (ja) 2009-04-23

Family

ID=40567127

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/002017 WO2009050836A1 (ja) 2007-10-18 2008-07-29 振動型アクチュエータ

Country Status (3)

Country Link
US (1) US8314533B2 (ja)
JP (1) JP5202538B2 (ja)
WO (1) WO2009050836A1 (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011135693A (ja) * 2009-12-24 2011-07-07 Taiheiyo Cement Corp 圧電バイモルフ素子
RU2596177C2 (ru) * 2013-12-27 2016-08-27 Кэнон Кабусики Кайся Ультразвуковой двигатель
JP2018019529A (ja) * 2016-07-28 2018-02-01 セイコーエプソン株式会社 圧電アクチュエーター、圧電モーター、ロボットおよび電子部品搬送装置

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9048758B2 (en) * 2009-11-11 2015-06-02 Piezomotor Uppsala Ab Provision of a normal force to electromechanical motor
US8957567B2 (en) * 2012-08-24 2015-02-17 Uchicago Argonne, Llc Mechanical design of deformation compensated flexural pivots structured for linear nanopositioning stages
USD865824S1 (en) * 2018-08-22 2019-11-05 Lofelt Gmbh Compact vibration actuator

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0795781A (ja) * 1993-09-21 1995-04-07 Matsushita Electric Ind Co Ltd 超音波アクチュエータ
JPH10285962A (ja) * 1997-04-10 1998-10-23 Nikon Corp 駆動装置及び薄板状部材搬送装置
JP2000134961A (ja) * 1998-10-27 2000-05-12 Nikon Corp 振動アクチュエータ装置及び発券装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11155290A (ja) * 1997-09-22 1999-06-08 Nikon Corp 振動アクチュエータ
JP4395052B2 (ja) * 2004-11-10 2010-01-06 太陽誘電株式会社 駆動装置
JP2006333571A (ja) 2005-05-24 2006-12-07 Konica Minolta Opto Inc 振動アクチュエータ及びレンズ鏡胴
JP2008178250A (ja) * 2007-01-19 2008-07-31 Olympus Corp 超音波振動子の押圧機構および超音波モータ
JP2012178947A (ja) * 2011-02-28 2012-09-13 Ngk Insulators Ltd 圧電アクチュエータ及び圧電アクチュエータアレイ

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0795781A (ja) * 1993-09-21 1995-04-07 Matsushita Electric Ind Co Ltd 超音波アクチュエータ
JPH10285962A (ja) * 1997-04-10 1998-10-23 Nikon Corp 駆動装置及び薄板状部材搬送装置
JP2000134961A (ja) * 1998-10-27 2000-05-12 Nikon Corp 振動アクチュエータ装置及び発券装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011135693A (ja) * 2009-12-24 2011-07-07 Taiheiyo Cement Corp 圧電バイモルフ素子
RU2596177C2 (ru) * 2013-12-27 2016-08-27 Кэнон Кабусики Кайся Ультразвуковой двигатель
JP2018019529A (ja) * 2016-07-28 2018-02-01 セイコーエプソン株式会社 圧電アクチュエーター、圧電モーター、ロボットおよび電子部品搬送装置

Also Published As

Publication number Publication date
JP5202538B2 (ja) 2013-06-05
US8314533B2 (en) 2012-11-20
JPWO2009050836A1 (ja) 2011-02-24
US20100301704A1 (en) 2010-12-02

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