WO2009048051A1 - 照明光学装置、並びに露光方法及び装置 - Google Patents
照明光学装置、並びに露光方法及び装置 Download PDFInfo
- Publication number
- WO2009048051A1 WO2009048051A1 PCT/JP2008/068206 JP2008068206W WO2009048051A1 WO 2009048051 A1 WO2009048051 A1 WO 2009048051A1 JP 2008068206 W JP2008068206 W JP 2008068206W WO 2009048051 A1 WO2009048051 A1 WO 2009048051A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- polarization
- illuminating
- optical apparatus
- illuminating light
- illuminating optical
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
- G03F7/7055—Exposure light control in all parts of the microlithographic apparatus, e.g. pulse length control or light interruption
- G03F7/70566—Polarisation control
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F21—LIGHTING
- F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
- F21V9/00—Elements for modifying spectral properties, polarisation or intensity of the light emitted, e.g. filters
- F21V9/14—Elements for modifying spectral properties, polarisation or intensity of the light emitted, e.g. filters for producing polarised light
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70058—Mask illumination systems
- G03F7/70141—Illumination system adjustment, e.g. adjustments during exposure or alignment during assembly of illumination system
Abstract
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009536994A JPWO2009048051A1 (ja) | 2007-10-12 | 2008-10-07 | 照明光学装置、並びに露光方法及び装置 |
EP08837855A EP2200070A4 (en) | 2007-10-12 | 2008-10-07 | OPTICAL LIGHTING APPARATUS, AND EXPOSURE METHOD AND APPARATUS |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007267256 | 2007-10-12 | ||
JP2007-267256 | 2007-10-12 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2009048051A1 true WO2009048051A1 (ja) | 2009-04-16 |
Family
ID=40549195
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2008/068206 WO2009048051A1 (ja) | 2007-10-12 | 2008-10-07 | 照明光学装置、並びに露光方法及び装置 |
Country Status (6)
Country | Link |
---|---|
US (2) | US8300213B2 (ja) |
EP (1) | EP2200070A4 (ja) |
JP (1) | JPWO2009048051A1 (ja) |
KR (1) | KR20100085974A (ja) |
TW (1) | TW200928607A (ja) |
WO (1) | WO2009048051A1 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101526755B (zh) * | 2009-04-21 | 2011-01-05 | 清华大学 | 一种193nm浸没式光刻照明系统 |
WO2012046541A1 (ja) * | 2010-10-06 | 2012-04-12 | 株式会社ブイ・テクノロジー | 露光装置 |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101295439B1 (ko) * | 2004-01-16 | 2013-08-09 | 칼 짜이스 에스엠티 게엠베하 | 편광변조 광학소자 |
US8270077B2 (en) * | 2004-01-16 | 2012-09-18 | Carl Zeiss Smt Gmbh | Polarization-modulating optical element |
US20070019179A1 (en) | 2004-01-16 | 2007-01-25 | Damian Fiolka | Polarization-modulating optical element |
JPWO2009048051A1 (ja) * | 2007-10-12 | 2011-02-17 | 株式会社ニコン | 照明光学装置、並びに露光方法及び装置 |
WO2018151295A1 (ja) * | 2017-02-17 | 2018-08-23 | 富士フイルム株式会社 | 液晶表示装置 |
DE102018218064B4 (de) * | 2018-10-22 | 2024-01-18 | Carl Zeiss Smt Gmbh | Optisches System, insbesondere für die Mikrolithographie |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6063751A (ja) * | 1983-09-19 | 1985-04-12 | Olympus Optical Co Ltd | 光磁気ピツクアツプ装置 |
WO2004051717A1 (ja) * | 2002-12-03 | 2004-06-17 | Nikon Corporation | 照明光学装置、露光装置および露光方法 |
WO2005076045A1 (ja) * | 2004-02-06 | 2005-08-18 | Nikon Corporation | 偏光変換素子、照明光学装置、露光装置、および露光方法 |
JP2007263897A (ja) * | 2006-03-29 | 2007-10-11 | Nikon Corp | 偏光計測装置の校正方法及び装置、偏光計測装置及び該装置を備えた露光装置、並びに位相遅れ量の計測方法及び波長板 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
AU2747999A (en) | 1998-03-26 | 1999-10-18 | Nikon Corporation | Projection exposure method and system |
WO2005005694A1 (ja) * | 2003-07-10 | 2005-01-20 | Nikon Corporation | 人工水晶部材、露光装置、及び露光装置の製造方法 |
WO2005036619A1 (ja) * | 2003-10-09 | 2005-04-21 | Nikon Corporation | 照明光学装置、露光装置および露光方法 |
US7345740B2 (en) * | 2004-12-28 | 2008-03-18 | Asml Netherlands B.V. | Polarized radiation in lithographic apparatus and device manufacturing method |
TW200923418A (en) * | 2005-01-21 | 2009-06-01 | Nikon Corp | Exposure device, exposure method, fabricating method of device, exposure system, information collecting device, and measuring device |
JPWO2009048051A1 (ja) * | 2007-10-12 | 2011-02-17 | 株式会社ニコン | 照明光学装置、並びに露光方法及び装置 |
-
2008
- 2008-10-07 JP JP2009536994A patent/JPWO2009048051A1/ja not_active Withdrawn
- 2008-10-07 EP EP08837855A patent/EP2200070A4/en not_active Withdrawn
- 2008-10-07 WO PCT/JP2008/068206 patent/WO2009048051A1/ja active Application Filing
- 2008-10-07 KR KR1020107010394A patent/KR20100085974A/ko not_active Application Discontinuation
- 2008-10-08 US US12/287,497 patent/US8300213B2/en active Active
- 2008-10-08 TW TW097138772A patent/TW200928607A/zh unknown
-
2012
- 2012-10-30 US US13/664,185 patent/US20130114058A1/en not_active Abandoned
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6063751A (ja) * | 1983-09-19 | 1985-04-12 | Olympus Optical Co Ltd | 光磁気ピツクアツプ装置 |
WO2004051717A1 (ja) * | 2002-12-03 | 2004-06-17 | Nikon Corporation | 照明光学装置、露光装置および露光方法 |
WO2005076045A1 (ja) * | 2004-02-06 | 2005-08-18 | Nikon Corporation | 偏光変換素子、照明光学装置、露光装置、および露光方法 |
JP2007263897A (ja) * | 2006-03-29 | 2007-10-11 | Nikon Corp | 偏光計測装置の校正方法及び装置、偏光計測装置及び該装置を備えた露光装置、並びに位相遅れ量の計測方法及び波長板 |
Non-Patent Citations (1)
Title |
---|
See also references of EP2200070A4 * |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101526755B (zh) * | 2009-04-21 | 2011-01-05 | 清华大学 | 一种193nm浸没式光刻照明系统 |
WO2012046541A1 (ja) * | 2010-10-06 | 2012-04-12 | 株式会社ブイ・テクノロジー | 露光装置 |
JP2012083383A (ja) * | 2010-10-06 | 2012-04-26 | V Technology Co Ltd | 露光装置 |
Also Published As
Publication number | Publication date |
---|---|
EP2200070A4 (en) | 2012-11-21 |
EP2200070A1 (en) | 2010-06-23 |
US20130114058A1 (en) | 2013-05-09 |
KR20100085974A (ko) | 2010-07-29 |
JPWO2009048051A1 (ja) | 2011-02-17 |
US8300213B2 (en) | 2012-10-30 |
US20090128796A1 (en) | 2009-05-21 |
TW200928607A (en) | 2009-07-01 |
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