WO2009037949A1 - 計測装置およびその計測方法 - Google Patents

計測装置およびその計測方法 Download PDF

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Publication number
WO2009037949A1
WO2009037949A1 PCT/JP2008/065368 JP2008065368W WO2009037949A1 WO 2009037949 A1 WO2009037949 A1 WO 2009037949A1 JP 2008065368 W JP2008065368 W JP 2008065368W WO 2009037949 A1 WO2009037949 A1 WO 2009037949A1
Authority
WO
WIPO (PCT)
Prior art keywords
subject
light
image sensor
light receiving
intensity
Prior art date
Application number
PCT/JP2008/065368
Other languages
English (en)
French (fr)
Inventor
Takashi Shinomiya
Muneki Hamashima
Masashi Tanaka
Nobuyuki Miyake
Original Assignee
Nikon Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2007243109A external-priority patent/JP2009074875A/ja
Priority claimed from JP2007243110A external-priority patent/JP2009074876A/ja
Priority claimed from JP2007242916A external-priority patent/JP2009074867A/ja
Application filed by Nikon Corporation filed Critical Nikon Corporation
Publication of WO2009037949A1 publication Critical patent/WO2009037949A1/ja

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/2509—Color coding
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/50—Depth or shape recovery
    • G06T7/55—Depth or shape recovery from multiple images
    • G06T7/586—Depth or shape recovery from multiple images from multiple light sources, e.g. photometric stereo

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Theoretical Computer Science (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

　本発明に係る計測装置（６０）は、平面状に並んだ複数の画素領域（２１）を有したイメージセンサー（２０）と、被検物（６２）の表面からの光を入射させてイメージセンサー上に被検物の表面の像を結像させる色出しレンズ（１１）と、イメージセンサーを構成する複数の画素のそれぞれが受光した光の強度に基づいて、被検物の表面の高さを算出して被検物の３次元形状を測定する演算処理部（３０）とを備えて構成されている。複数の画素は受光した光を少なくとも２つの波長毎に分けて波長毎の受光強度を検出し、演算処理部は複数の画素において検出された波長毎の受光強度のうち、２つの波長の受光強度から強度レベルの差を検出し、強度レベルの差を基に被検物の表面の垂直方向距離を測定して被検物の３次元形状を求める。
PCT/JP2008/065368 2007-09-19 2008-08-28 計測装置およびその計測方法 WO2009037949A1 (ja)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP2007243109A JP2009074875A (ja) 2007-09-19 2007-09-19 計測装置およびその計測方法
JP2007-243110 2007-09-19
JP2007-243109 2007-09-19
JP2007243110A JP2009074876A (ja) 2007-09-19 2007-09-19 計測装置およびその計測方法
JP2007242916A JP2009074867A (ja) 2007-09-19 2007-09-19 計測装置およびその計測方法
JP2007-242916 2007-09-19

Publications (1)

Publication Number Publication Date
WO2009037949A1 true WO2009037949A1 (ja) 2009-03-26

Family

ID=40467769

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/065368 WO2009037949A1 (ja) 2007-09-19 2008-08-28 計測装置およびその計測方法

Country Status (1)

Country Link
WO (1) WO2009037949A1 (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012011186A1 (ja) * 2010-07-23 2012-01-26 トヨタ自動車 株式会社 距離測定装置および距離測定方法
US9451213B2 (en) 2010-07-23 2016-09-20 Toyota Jidosha Kabushiki Kaisha Distance measuring apparatus and distance measuring method
EP2763508A3 (de) * 2013-01-31 2017-04-19 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren und System zur Erkennung einer Position oder Form eines Leuchtelements
CN111220090A (zh) * 2020-03-25 2020-06-02 宁波五维检测科技有限公司 一种线聚焦差动彩色共焦三维表面形貌测量系统及方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06307858A (ja) * 1993-04-23 1994-11-04 Ricoh Co Ltd 光学式変位計
JPH109827A (ja) * 1996-06-24 1998-01-16 Omron Corp 高さ判別装置および方法
JP2005221451A (ja) * 2004-02-09 2005-08-18 Mitsutoyo Corp レーザ変位計
JP2007017401A (ja) * 2005-07-11 2007-01-25 Central Res Inst Of Electric Power Ind 立体画像情報取得方法並びに装置
JP2007147299A (ja) * 2005-11-24 2007-06-14 Kobe Steel Ltd 変位測定装置及び変位測定方法

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06307858A (ja) * 1993-04-23 1994-11-04 Ricoh Co Ltd 光学式変位計
JPH109827A (ja) * 1996-06-24 1998-01-16 Omron Corp 高さ判別装置および方法
JP2005221451A (ja) * 2004-02-09 2005-08-18 Mitsutoyo Corp レーザ変位計
JP2007017401A (ja) * 2005-07-11 2007-01-25 Central Res Inst Of Electric Power Ind 立体画像情報取得方法並びに装置
JP2007147299A (ja) * 2005-11-24 2007-06-14 Kobe Steel Ltd 変位測定装置及び変位測定方法

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012011186A1 (ja) * 2010-07-23 2012-01-26 トヨタ自動車 株式会社 距離測定装置および距離測定方法
JP5354105B2 (ja) * 2010-07-23 2013-11-27 トヨタ自動車株式会社 距離測定装置および距離測定方法
US9451213B2 (en) 2010-07-23 2016-09-20 Toyota Jidosha Kabushiki Kaisha Distance measuring apparatus and distance measuring method
EP2763508A3 (de) * 2013-01-31 2017-04-19 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren und System zur Erkennung einer Position oder Form eines Leuchtelements
CN111220090A (zh) * 2020-03-25 2020-06-02 宁波五维检测科技有限公司 一种线聚焦差动彩色共焦三维表面形貌测量系统及方法

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