WO2009033986A1 - Vacuum pump and method for controlling a gas ballast supply to a vacuum pump - Google Patents

Vacuum pump and method for controlling a gas ballast supply to a vacuum pump Download PDF

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Publication number
WO2009033986A1
WO2009033986A1 PCT/EP2008/061575 EP2008061575W WO2009033986A1 WO 2009033986 A1 WO2009033986 A1 WO 2009033986A1 EP 2008061575 W EP2008061575 W EP 2008061575W WO 2009033986 A1 WO2009033986 A1 WO 2009033986A1
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WO
WIPO (PCT)
Prior art keywords
pressure
vacuum pump
gas
chamber
pump
Prior art date
Application number
PCT/EP2008/061575
Other languages
German (de)
French (fr)
Inventor
Jean-Luc Abraham
Richard Louis Rogers
Original Assignee
Oerlikon Leybold Vacuum Gmbh
Macher,Sabine
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Leybold Vacuum Gmbh, Macher,Sabine filed Critical Oerlikon Leybold Vacuum Gmbh
Priority to EP08803546.4A priority Critical patent/EP2191137B1/en
Publication of WO2009033986A1 publication Critical patent/WO2009033986A1/en

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/30—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members
    • F04C18/34—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members
    • F04C18/344—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/28—Safety arrangements; Monitoring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/50—Pumps with means for introducing gas under pressure for ballasting

Definitions

  • the invention relates to a vacuum pump, in particular a rotary vane pump or screw pump. Furthermore, the invention relates to a method for controlling a gas baliast feed to a vacuum pump, in particular a rotary vane pump or screw pump.
  • Such vacuum pumps have a compression chamber r in which a compression element is arranged.
  • the compression element has a plurality of slides, wherein by rotating the relative to the compression chamber eccentrically mounted slide compressing and conveying the gas present in the compression chamber, in particular the air takes place.
  • a screw pump has rotating screw elements, by means of which the gas and the air are conveyed or compressed.
  • the compression chamber has a chamber inlet which is connected to the space to be vacuumed.
  • the compression chamber has a chamber outlet, from which the conveyed gas, in particular the air is ejected.
  • the Gasbaliasteinlass is usually provided with a check valve, so that in the compression chamber gas is sucked as long as the pressure in the compression chamber is lower than atmospheric pressure overall.
  • Vacuum pumps are divided into different classes for the use of vacuum pumps that are exposed to the risk of fire in critical processes.
  • the classes are specified in the Artex standard. For example, vacuum pumps are classified in class T3 if it is ensured that the pump can not heat above 200 ° C. in all areas. For class T4 the limit is 135 ° C
  • a temperature increase occurs due to the compression sound.
  • the temperature increase can be done in a few seconds.
  • a temperature increase to about 170 0 C - 180 0 C arise within a few seconds.
  • the object of the invention is to provide a vacuum pump and a method for controlling a gas ballast supply to a vacuum pump, in which heating above a limit temperature, in particular beyond the limit temperature of the Artex standard T4 is avoided.
  • the object is achieved according to the invention by a vacuum pump according to claim 1 or a method according to claim 9.
  • the vacuum pump according to the invention which is in particular a rotary vane pump or a screw pump, has a compression chamber which has a chamber inlet and a chamber outlet. Further, the compression chamber for supplying gas ballast, such as air, nitrogen or dg !, is connected to a gas-building inlet. According to the gas ballast inlet with a According to the invention, the gas in the gas ballast space is kept under a pressure which is higher than the atmospheric pressure or higher than the pressure in the compression chamber. This ensures that in each operating state of the vacuum pump, gas flows through the gas ballast inlet into the compression chamber. Due to this gas supply, the heating of the vacuum pump can be reduced due to the compression of the gas in the compression chamber. According to the invention, this makes it possible to easily create a vacuum pump whose temperature does not exceed predetermined limit temperatures. It is particularly advantageous that it is thus possible to implement the Artex standard T4, so that corresponding vacuum pumps can also be used in temperature-critical devices or environments.
  • the vacuum pump has a control device. With the aid of the control device, it is possible to regulate the gas pressure in the gas ballast chamber.
  • the regulation preferably takes place as a function of the pressure at the chamber inlet of the compression chamber.
  • a pressure sensor which is preferably connected to the control device. Measuring the pressure within the compression chamber would be considerably more expensive. Since, starting from the pressure measured at the chamber inlet, the pressure conditions of the compression chamber are known, or can be determined in sufficient approximation, a corresponding regulation of the pressure in the gas ballast space can take place.
  • a pressure sensor is also arranged within the gas ballast space in a preferred embodiment, or connected to the gas ballast space.
  • the vacuum pump is connected to a flow regulator for controlling the volume of gas supplied via the gas bailaste inlet of the compression chamber or gas weight.
  • a corresponding quantity regulator is preferably arranged between the gas bubble compartment and the gas bailaste inlet.
  • a flow regulator for example, a relaxation nozzle can be provided. This is a simple mechanical quantity control, which, however, in order always to supply a constant Gasvoiumen, requires that a pressure ratio of the pressures before and after the expansion nozzle is maintained.
  • the flow regulator can therefore also have a flow measuring device, such as a mass flow sensor. This can then be connected to a controllable passage valve. Since usually at the Gasbaliastetnlass a check valve is provided to prevent the escape of lubricant from the compression chamber, it is possible in a preferred embodiment, the check valve in addition to design as a controllable valve to control the amount of gas supplied to the compression chamber.
  • the inventive method for controlling a Gasbaliastzuschreib to a vacuum pump is particularly suitable for the vacuum pump according to the invention described above. As described above with reference to the vacuum pump, the method according to the invention can be developed advantageously.
  • a regulation of a gas ballast pressure takes place.
  • additional flow regulators may be provided in the region of the gas bubble inlet.
  • the amount of gas ballast supplied, d. H. the supplied volume and / or the added weight can be determined, for example, via a flow-through measuring device.
  • a flow measuring device is preferably arranged in the region of the gas bailaste inlet.
  • control of the gas ballast pressure is such that the gas ballast pressure is higher than the measured inlet pressure.
  • a regulation of the Gasbaliastikis or Gasballastmenge for example by means of the control device described above, in a preferred embodiment from reaching, in particular exceeding a limit pressure of the Einiasstiks.
  • a control takes place from a limiting pressure of 500 mbar (500 Pa).
  • the figure shows a schematic sectional view of a schematic diagram of a rotary vane pump with gas ballast supply.
  • a rotary vane pump has a housing 10.
  • a shaft 12 is arranged eccentrically to the cylindrically shaped housing.
  • slide 16 are arranged in three slots 14 in the illustrated embodiment.
  • the sliders 16 are designed, for example, spring-loaded, that they always rest against an inner wall 18 of the compression chamber.
  • the compression chamber 20 is located " * D""
  • the housing has a chamber inlet 22, which is connected to a space to be vacuumed. Through the inlet 22, the air is sucked in the direction of an arrow 24 in the compression chamber 20.
  • a chamber outlet 26 is connected to the housing 10.
  • the compression chamber 20 is further provided with a GasbalSasteinlass 32.
  • a gasbalSasteinlass 32 In the illustrated embodiment, a gearschtagventi in the Gasbaüasteinlass 32! 34, through which leakage of medium from the compression chamber 20 through the gas ballast inlet 32 is avoided.
  • the gas ballast inlet 32 is connected to a gas ballast chamber 36.
  • Gas in the gas ballast chamber 36 for example, air, nitrogen or other suitable gas is arranged and pressurized.
  • the gas ballast space can be filled via a line 38 with gas.
  • gas flows against the closing direction of the check valve 34 through the gas ballast inlet 32 into the space 40.
  • a control device 42 is provided.
  • the control device 42 is connected in the illustrated embodiment via an electrical line 44 to a first pressure sensor 46.
  • the pressure sensor 46 is in the range of Kammereiniasses 22 arranged and rnisst the inlet pressure.
  • Via a further electrical line 48 the control device 42 is connected to a second pressure sensor 50.
  • the pressure sensor 50 measures the pressure prevailing in the gas ballast chamber 36.
  • the control device 42 is further connected to a device, not shown, for pressure control, which may be, for example, a piston connected.
  • control device 42 is connected to a flow measuring device 52 via an electrical line 54.
  • a flow measuring device 52 With the help of Naturalfiu ⁇ smess owned 52, the amount of gas, d. H. the weight or volume flowing into the chamber 40 from the gas ballast space is measured.
  • a flash nozzle 56 is disposed between the gas ballast space 36 and the gas ballast inlet 32.
  • an inlet pressure which is greater than 500 mbar is measured by means of the first pressure sensor 36
  • the pressure in the gas ballast space 36 is increased by corresponding signals from the control device 42.
  • This measure according to the invention ensures that a defined amount of gas ballast always flows through the inlet Gas building throat 32 flows into the chamber 40. This ensures that there is no critical temperature during the compression of the gas, in particular immediately before the compression outlet 26. It can thus be ensured, for example, that even in this temperature-critical region of the vacuum pump, a temperature of less than 135 ° C. always prevails and the vacuum pump thus fulfills the Artex standard T 4.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Abstract

A vacuum pump, which in particular is a vane-type rotary pump or a screw-type pump, comprises a compression chamber (20). The compression chamber (20) is provided with a chamber inlet (22) and a chamber outlet (26). Furthermore, the compression chamber (20) is connected to a gas ballast inlet (32). In order to ensure consistent gas flow through the gas ballast inlet (32) when the pressures within the compression chamber (20) vary, the gas ballast inlet (32) is connected to a gas ballast chamber (36). Gas is stored under pressure in the gas ballast chamber (36). The pressure is higher than the atmospheric pressure and/or higher than the pressure in the compression chamber (20). Thus, excess heating of the vacuum pump can be prevented.

Description

Vakuumpumpe sowie Verfahren zur Steuerung einer Gasbatlastzufuhr zu einer Vakuumpumpe Vacuum pump and method for controlling a Gasbatlastzufuhr to a vacuum pump
Die Erfindung betrifft eine Vakuumpumpe, insbesondere eine Drehschieberpumpe oder Schraubenpumpe, Femer betrifft die Erfindung ein Verfahren zur Steuerung einer Gasbaliastzufuhr zu einer Vakuumpumpe, insbesondere einer Drehschieberpumpe oder Schraubenpumpe,The invention relates to a vacuum pump, in particular a rotary vane pump or screw pump. Furthermore, the invention relates to a method for controlling a gas baliast feed to a vacuum pump, in particular a rotary vane pump or screw pump.
Derartige Vakuumpumpen weisen eine Kompressionskammer aufr in der ein Kompressionselement angeordnet ist. Bei einer Drehschieberpumpe weist das Kompressionselement mehrere Schieber auf, wobei durch Drehen der bezogen auf die Kompressionskammer exzentrisch gelagerten Schieber ein Komprimieren und Fördern des in der Kompressionskammer vorhandenen Gases, insbesondere der Luft erfolgt. Entsprechend weist als Kompressionselement eine Schraubenpumpe rotierende Schraubenelemente auf, durch die ein Fördern bzw. Komprimieren des Gases sowie der Luft erfolgt. Die Kompressionskammer weist einen Kammereinlass auf, der mit dem zu vakuumierenden Raum verbunden ist. Ferner weist die Kompressionskammer einen Kammerauslass auf, aus dem das geförderte Gas, insbesondere die Luft ausgestoßen wird. Bei derartigen Vakuumpumpen ist es bekannt, einen Gasbaliasteinlass vorzusehen, durch den Gas, üblicherweise Luft eingesaugt wird. Der Gasbaliasteinlass ist üblicherweise mit einem Rückschlagventil versehen, so dass in die Kompressionskammer Gas eingesaugt wird, solange der Druck in der Kompressionskammer insgesamt niedriger als Atmosphärendruck ist.Such vacuum pumps have a compression chamber r in which a compression element is arranged. In a rotary vane pump, the compression element has a plurality of slides, wherein by rotating the relative to the compression chamber eccentrically mounted slide compressing and conveying the gas present in the compression chamber, in particular the air takes place. Accordingly, as a compression element, a screw pump has rotating screw elements, by means of which the gas and the air are conveyed or compressed. The compression chamber has a chamber inlet which is connected to the space to be vacuumed. Furthermore, the compression chamber has a chamber outlet, from which the conveyed gas, in particular the air is ejected. In such vacuum pumps, it is known to provide a Gasbaliasteinlass through which gas, usually air is sucked. The Gasbaliasteinlass is usually provided with a check valve, so that in the compression chamber gas is sucked as long as the pressure in the compression chamber is lower than atmospheric pressure overall.
Zum Einsatz von Vakuumpumpen, die bei kritischen Prozessen der Brandgefahr ausgesetzt sind, werden Vakuumpumpen in unterschiedliche Klassen eingeteilt. Die Klassen sind in der Artex-Norm festgelegt. Beispielsweise werden Vakuumpumpen in die Klasse T3 eingeteilt, wenn sichergestellt ist, dass sich die Pumpe in allen Bereichen nicht über 2000C erhitzen kann. Bei der Klasse T4 liegt die Grenze bei 135°CVacuum pumps are divided into different classes for the use of vacuum pumps that are exposed to the risk of fire in critical processes. The classes are specified in the Artex standard. For example, vacuum pumps are classified in class T3 if it is ensured that the pump can not heat above 200 ° C. in all areas. For class T4 the limit is 135 ° C
Bei Vakuumpumpen, in denen das zu fördernde Medium, üblicherweise Luft, komprimiert wird, entsteht aufgrund der Kompresston eine Temperaturerhöhung. Die Temperaturerhöhung kann in wenigen Sekunden erfolgen. Beispielsweise kann bei einer Drehschieberpumpe, die ca. 75 mal pro Sekunde Medium aus der Kompressionskammer fördert, eine Temperaturerhöhung auf ca. 1700C - 1800C innerhalb weniger Sekunden entstehen.In vacuum pumps in which the medium to be pumped, usually air, is compressed, a temperature increase occurs due to the compression sound. The temperature increase can be done in a few seconds. For example, in a rotary vane pump, which promotes about 75 times per second medium from the compression chamber, a temperature increase to about 170 0 C - 180 0 C arise within a few seconds.
Aufgabe der Erfindung ist es, eine Vakuumpumpe sowie ein Verfahren zur Steuerung einer Gasballastzufuhr zu einer Vakuumpumpe zu schaffen, bei der ein Erwärmen über eine Grenztemperatur, insbesondere über die Grenztemperatur der Artex-Norm T4 vermieden ist.The object of the invention is to provide a vacuum pump and a method for controlling a gas ballast supply to a vacuum pump, in which heating above a limit temperature, in particular beyond the limit temperature of the Artex standard T4 is avoided.
Die Lösung der Aufgabe erfolgt erfindungsgemäß durch eine Vakuumpumpe gemäß Anspruch 1 bzw. ein Verfahren gemäß Anspruch 9.The object is achieved according to the invention by a vacuum pump according to claim 1 or a method according to claim 9.
Die erfindungsgemäße Vakuumpumpe, bei der es sich insbesondere um eine Drehschieberpumpe oder um eine Schraubenpumpe handelt, weist eine Kompressionskammer auf, die einen Kammereinlass und einen Kammerauslass aufweist. Ferner ist die Kompressionskammer zur Zufuhr von Gasballast wie Luft, Stickstoff oder dg!, mit einem Gasbaüasteinlass verbunden. Erfindungsgemäß ist der Gasballasteinlass mit einem Gasballastraum verbunden, in dem Luft oder ein anderes Gas bevorratet ist Erfindungsgemäß wird das Gas in dem Gasballastraum unter einem Druck gehalten, der höher ist als der Atmosphärendruck oder höher ist als der Druck in der Kompressionskammer. Hierdurch ist sichergestellt, dass in jedem Betriebszustand der Vakuumpumpe Gas durch den Gasballasteinlass in die Kompressionskammer strömt Aufgrund dieser Gaszufuhr kann die Erwärmung der Vakuumpumpe aufgrund der Kompression des sich in der Kompressionskammer befindenden Gases verringert werden. Erfindungsgemäß ist es hierdurch möglich, auf einfache Weise eine Vakuumpumpe zu schaffen, deren Temperatur vorgegebene Grenztemperaturen nicht überschreitet. Besonders vorteilhaft ist, dass es hierdurch möglich ist, die Artex-Norm T4 zu realisieren, so dass entsprechende Vakuumpumpen auch in temperaturkritischen Vorrichtungen bzw. Umgebungen eingesetzt werden können.The vacuum pump according to the invention, which is in particular a rotary vane pump or a screw pump, has a compression chamber which has a chamber inlet and a chamber outlet. Further, the compression chamber for supplying gas ballast, such as air, nitrogen or dg !, is connected to a gas-building inlet. According to the gas ballast inlet with a According to the invention, the gas in the gas ballast space is kept under a pressure which is higher than the atmospheric pressure or higher than the pressure in the compression chamber. This ensures that in each operating state of the vacuum pump, gas flows through the gas ballast inlet into the compression chamber. Due to this gas supply, the heating of the vacuum pump can be reduced due to the compression of the gas in the compression chamber. According to the invention, this makes it possible to easily create a vacuum pump whose temperature does not exceed predetermined limit temperatures. It is particularly advantageous that it is thus possible to implement the Artex standard T4, so that corresponding vacuum pumps can also be used in temperature-critical devices or environments.
In einer besonders bevorzugten Weiterbildung der Erfindung weist die Vakuumpumpe eine Steuereinrichtung auf. Mit Hilfe der Steuereinrichtung ist es möglich, den Gasdruck in der Gasballastkammer zu regeln. Vorzugsweise erfolgt die Regelung in Abhängigkeit des Drucks am Kammereiniass der Kompressionskammer. Dies ist insbesondere vorteilhaft, da der Druck am Kammereiniass auf einfache Weise mit Hilfe eines Drucksensors, der vorzugsweise mit der Steuereinrichtung verbunden ist, gemessen werden kann. Das Messen des Drucks innerhalb der Kompressionskammer wäre erheblich aufwendiger. Da ausgehend von dem am Kammereiniass gemessenen Druck die Druckverhältnisse der Kompressionskammer bekannt sind, bzw. in ausreichender Näherung bestimmt werden können, kann eine entsprechende Regelung des Drucks in dem Gasballastraum erfolgen. Hierzu ist in bevorzugter Ausführungsform innerhalb des Gasballastraums ebenfalls ein Drucksensor angeordnet, bzw. mit dem Gasballastraum verbunden.In a particularly preferred development of the invention, the vacuum pump has a control device. With the aid of the control device, it is possible to regulate the gas pressure in the gas ballast chamber. The regulation preferably takes place as a function of the pressure at the chamber inlet of the compression chamber. This is particularly advantageous because the pressure at Kammereiniass can be measured in a simple manner by means of a pressure sensor, which is preferably connected to the control device. Measuring the pressure within the compression chamber would be considerably more expensive. Since, starting from the pressure measured at the chamber inlet, the pressure conditions of the compression chamber are known, or can be determined in sufficient approximation, a corresponding regulation of the pressure in the gas ballast space can take place. For this purpose, a pressure sensor is also arranged within the gas ballast space in a preferred embodiment, or connected to the gas ballast space.
Insbesondere im Grenzbereich der Vakuumpumpe kann das Problem auftreten, dass durch eine zu große Menge an zugefύhrtem Gasballast der gewünschte Enddruck in dem zu vakuumierenden Raum bzw. am Kammereiπlass nicht erzielt werden kann. In bevorzugter Ausfuhrungsform ist die Vakuumpumpe mit einem Mengenregier zur Regelung des über den Gasbailasteinlass der Kompressionskammer zugefuhrten Gasvolumens bzw. Gasgewichts verbunden. Ein entsprechender Mengenregler ist vorzugsweise zwischen dem Gasbaliastraum und dem Gasbailasteinlass angeordnet. Als Mengenregler kann beispielsweise eine Entspannungsdüse vorgesehen sein. Hierbei handelt es sich um eine einfache mechanische Mengenreglung, die jedoch, um stets ein konstantes Gasvoiumen zuzuführen, voraussetzt, dass ein Druckverhäitnis der Drücke vor und nach der Entspannungsdüse eingehalten wird. Zusätzlich oder anstatt einer Entspannungsdüse kann der Mengenregler daher auch eine Durchfluss-Messeinrichtung, wie einen Massenstromsensor aufweisen. Dieser kann sodann mit einem regelbaren Durchlassventil verbunden sein. Da üblicherweise am Gasbaliastetnlass ein Rückschlagventil vorgesehen ist, um das Austreten von Schmiermitteln aus der Kompressionskammer zu vermeiden, ist es in bevorzugter Ausführungsform möglich, dass Rückschlagventil zusätzlich als regelbares Ventil auszugestalten, um die der Kompressionskammer zugeführte Menge an Gas zu regeln.In particular, in the boundary region of the vacuum pump, the problem may arise that due to an excessive amount of supplied gas ballast the desired final pressure in the space to be vacuumed or at Kammereiπlass can not be achieved. In a preferred embodiment, the vacuum pump is connected to a flow regulator for controlling the volume of gas supplied via the gas bailaste inlet of the compression chamber or gas weight. A corresponding quantity regulator is preferably arranged between the gas bubble compartment and the gas bailaste inlet. As a flow regulator, for example, a relaxation nozzle can be provided. This is a simple mechanical quantity control, which, however, in order always to supply a constant Gasvoiumen, requires that a pressure ratio of the pressures before and after the expansion nozzle is maintained. In addition or instead of a relaxation nozzle, the flow regulator can therefore also have a flow measuring device, such as a mass flow sensor. This can then be connected to a controllable passage valve. Since usually at the Gasbaliastetnlass a check valve is provided to prevent the escape of lubricant from the compression chamber, it is possible in a preferred embodiment, the check valve in addition to design as a controllable valve to control the amount of gas supplied to the compression chamber.
Das erfindungsgemäße Verfahren zur Steuerung einer Gasbaliastzufuhr zu einer Vakuumpumpe ist insbesondere für die vorstehend beschriebene erfindungsgemäße Vakuumpumpe geeignet. Das erfindungsgemäße Verfahren kann, wie vorstehend anhand der Vakuumpumpe beschrieben, vorteilhaft weitergebildet sein.The inventive method for controlling a Gasbaliastzufuhr to a vacuum pump is particularly suitable for the vacuum pump according to the invention described above. As described above with reference to the vacuum pump, the method according to the invention can be developed advantageously.
Erfindungsgemäß wird ein Einlassdruck an einem Kammereinlass der Vakuumpumpe, d, h. an einem Einlass zu der Kompressionskammer der Vakuumpumpe gemessen. In Abhängigkeit des gemessenen Einlassdrucks erfolgt ein Regeln eines Gasballastdrucks. In Abhängigkeit der Höhe des Gasballastdrucks und des Drucks im Innern der Kompressionskammer wird somit eine vorgegebene Menge an Gasballast der Kompressionskammer der Vakuumpumpe zugeführt. Hierbei können, wie vorstehend anhand der erfinduπgsgemäßen Vakuumpumpe beschrieben, zusätzlich Mengenregler im Bereich des Gasbaliasteinlass vorgesehen sein. Zusätzlich oder alternativ zu der Regelung des Gasbailastdrucks kann eine Regelung der zugeführten Gasballastmenge erfolgen.According to the invention, an inlet pressure at a chamber inlet of the vacuum pump, d, h. measured at an inlet to the compression chamber of the vacuum pump. Depending on the measured inlet pressure, a regulation of a gas ballast pressure takes place. Depending on the height of the gas ballast pressure and the pressure in the interior of the compression chamber thus a predetermined amount of gas ballast of the compression chamber of the Vacuum pump supplied. In this case, as described above with reference to the vacuum pump according to the invention, additional flow regulators may be provided in the region of the gas bubble inlet. In addition or as an alternative to the regulation of the gas bailast pressure, it is possible to regulate the amount of gas ballast supplied.
Die zugeführte Gasballast-Menge, d. h. das zugeführte Volumen und/ oder das zugeführte Gewicht können beispielsweise über eine Durchfiuss- Messeinrichtung bestimmt werden. Eine derartige Durchfluss-Messeinrichtung ist vorzugsweise im Bereich des Gasbailasteinlasses angeordnet.The amount of gas ballast supplied, d. H. the supplied volume and / or the added weight can be determined, for example, via a flow-through measuring device. Such a flow measuring device is preferably arranged in the region of the gas bailaste inlet.
In bevorzugter Ausführungsform erfolgt die Regelung des Gasballastdrucks derart, dass der Gasballastdruck höher als der gemessene Einlassdruck ist.In a preferred embodiment, the control of the gas ballast pressure is such that the gas ballast pressure is higher than the measured inlet pressure.
Eine Regelung des Gasbaliastdrucks bzw. der Gasballastmenge erfolgt beispielsweise mit Hilfe der vorstehend beschriebenen Steuereinrichtung, in bevorzugter Ausführungsform ab Erreichen, insbesondere Überschreiten eines Grenzdrucks des Einiassdrucks. Beispielsweise erfolgt eine Regelung ab einem Grenzdruck von 500 mbar (500 Pa).A regulation of the Gasbaliastdrucks or Gasballastmenge for example by means of the control device described above, in a preferred embodiment from reaching, in particular exceeding a limit pressure of the Einiassdrucks. For example, a control takes place from a limiting pressure of 500 mbar (500 Pa).
Nachfolgend wird die Erfindung anhand einer bevorzugten Ausführungsform einer als Drehschieberpumpe ausgebildeten Vakuumpumpe näher erläutert.The invention will be explained in more detail below with reference to a preferred embodiment of a vacuum pump designed as a rotary vane pump.
Die Figur zeigt eine schematische Schnittansicht einer Prinzipskizze einer Drehschieberpumpe mit Gasballastzufuhr.The figure shows a schematic sectional view of a schematic diagram of a rotary vane pump with gas ballast supply.
Eine Drehschieberpumpe weist ein Gehäuse 10 auf. In dem Gehäuse 10 ist exzentrisch zu dem zylindrisch ausgebildeten Gehäuse eine Welle 12 angeordnet. In der Welle 12 sind im dargestellten Ausführungsbeispiel in drei Schlitzen 14 jeweils Schieber 16 angeordnet. Die Schieber 16 sind derart ausgebildet, beispielsweise federbelastet, dass sie stets an einer Innenwand 18 der Kompressionskammer anliegen. Die Kompressionskammer 20 befindet "* D ""A rotary vane pump has a housing 10. In the housing 10, a shaft 12 is arranged eccentrically to the cylindrically shaped housing. In the shaft 12 in each case slide 16 are arranged in three slots 14 in the illustrated embodiment. The sliders 16 are designed, for example, spring-loaded, that they always rest against an inner wall 18 of the compression chamber. The compression chamber 20 is located " * D""
sich in dem Bereich zwischen der Weile und der Innenwand 18 des Gehäuses 10,in the area between the shaft and the inner wall 18 of the housing 10,
Ferner weist das Gehäuse einen Kammereinlass 22 auf, der mit einem zu vakuumierenden Raum verbunden wird. Durch den Einlass 22 wird die Luft in Richtung eines Pfeils 24 in die Kompressionskammer 20 gesaugt.Further, the housing has a chamber inlet 22, which is connected to a space to be vacuumed. Through the inlet 22, the air is sucked in the direction of an arrow 24 in the compression chamber 20.
Femer ist mit dem Gehäuse 10 ein Kammerausiass 26 verbunden. Durch das Drehen der WeNe 12 in Richtung eines Pfeiis 28 wird das eingesaugte Medium vom Einlass 22, im dargestellten Ausfϋhrungsbeispiel im Uhrzeigersinn zum Auslass 26 transportiert und in Richtung des Pfeils 30 ausgestoßen.Furthermore, a chamber outlet 26 is connected to the housing 10. By turning the WeNe 12 in the direction of a Pfeiis 28, the sucked medium from the inlet 22, in the illustrated Ausf imhrungsbeispiel transported in the clockwise direction to the outlet 26 and ejected in the direction of the arrow 30.
Die Kompressionskammer 20 ist ferner mit einem GasbalSasteinlass 32 versehen. Im dargestellten Ausfuhrungsbeispiel ist in dem Gasbaüasteinlass 32 ein Rückschtagventi! 34 angeordnet, durch das ein Austreten von Medium aus der Kompressionskammer 20 durch den Gasballasteinlass 32 vermieden ist.The compression chamber 20 is further provided with a GasbalSasteinlass 32. In the illustrated embodiment, a Rückschtagventi in the Gasbaüasteinlass 32! 34, through which leakage of medium from the compression chamber 20 through the gas ballast inlet 32 is avoided.
Der Gasballasteinlass 32 ist mit einem Gasballastraum 36 verbunden. Im Gasballastraum 36 ist Gas, beispielsweise Luft, Stickstoff oder anderes geeignetes Gas angeordnet und mit Druck beaufschlagt. Der Gasballastraum kann über eine Leitung 38 mit Gas befüllt werden.The gas ballast inlet 32 is connected to a gas ballast chamber 36. Gas in the gas ballast chamber 36, for example, air, nitrogen or other suitable gas is arranged and pressurized. The gas ballast space can be filled via a line 38 with gas.
In Abhängigkeit der Druckverhältnisse in dem Bereich 40 der Kompressionskammer 20 und dem Druck in dem Gasballastraum 36, strömt Gas entgegen der Schließrichtung des Rückschlagventils 34 durch den Gasballasteinlass 32 in den Raum 40.Depending on the pressure conditions in the region 40 of the compression chamber 20 and the pressure in the gas ballast chamber 36, gas flows against the closing direction of the check valve 34 through the gas ballast inlet 32 into the space 40.
Zur Regelung des Drucks in dem Gasballstraum 36 ist eine Steuereinrichtung 42 vorgesehen. Die Steuereinrichtung 42 ist im dargestellten Ausführungsbeispiel über eine elektrische Leitung 44 mit einem ersten Drucksensor 46 verbunden. Der Drucksensor 46 ist im Bereich des Kammereiniasses 22 angeordnet und rnisst den Einlassdruck. Über eine weitere elektrische Leitung 48 ist die Steuereinrichtung 42 mit einem zweiten Drucksensor 50 verbunden. Der Drucksensor 50 misst den in dem Gasballastraum 36 herrschenden Druck. Die Steuereinrichtung 42 ist ferner mit einer nicht dargestellten Einrichtung zur Druckregelung, bei der es sich beispielsweise um einen Kolben handeln kann, verbunden.To regulate the pressure in the gas ball dream 36, a control device 42 is provided. The control device 42 is connected in the illustrated embodiment via an electrical line 44 to a first pressure sensor 46. The pressure sensor 46 is in the range of Kammereiniasses 22 arranged and rnisst the inlet pressure. Via a further electrical line 48, the control device 42 is connected to a second pressure sensor 50. The pressure sensor 50 measures the pressure prevailing in the gas ballast chamber 36. The control device 42 is further connected to a device, not shown, for pressure control, which may be, for example, a piston connected.
Ferner ist die Steuereinrichtung 42 mit einer Durchflussmesseinrichtung 52 über eine elektrische Leitung 54 verbunden. Mit Hilfe der DurchfiuΞsmesseinrichtung 52 kann die Gasmenge, d. h. das Gewicht oder das Volumen gemessen werden, die aus dem Gasballastraum in die Kammer 40 strömt.Furthermore, the control device 42 is connected to a flow measuring device 52 via an electrical line 54. With the help of DurchfiuΞsmesseinrichtung 52, the amount of gas, d. H. the weight or volume flowing into the chamber 40 from the gas ballast space is measured.
Im dargestellten Ausführungsbeispiel ist zusätzlich zu der Durchfluss- Messeinrichtung 52 eine Entspannungsdüse 56 zwischen dem Gasballastraum 36 und im Gasballasteinlass 32 angeordnet.In the illustrated embodiment, in addition to the flow meter 52, a flash nozzle 56 is disposed between the gas ballast space 36 and the gas ballast inlet 32.
Wird beispielsweise mittels des ersten Drucksensors 36 ein Einlassdruck gemessen, der größer als 500 mbar ist, erfolgt eine Erhöhung des Drucks in dem Gasballastraum 36 durch entsprechende Signale der Steuereinrichtung 42. Durch diese erfindungsgemäße Maßnahme ist gewährleistet, dass stets eine definierte Menge an Gasballast durch den Gasbaüasteϊnlass 32 in die Kammer 40 strömt. Dadurch ist gewährleistet, dass es sich bei der Komprimierung des Gases, insbesondere unmittelbar vor dem Kompressionsauslass 26 keine kritische Temperatur ergibt. Es kann so beispielsweise gewährleistet werden, dass auch in diesem mit temperaturkritischen Bereich der Vakuumpumpe stets eine Temperatur von weiniger als 135°C herrscht und die Vakuumpumpe somit die Artex-Norm T4 erfüllt. If, for example, an inlet pressure which is greater than 500 mbar is measured by means of the first pressure sensor 36, the pressure in the gas ballast space 36 is increased by corresponding signals from the control device 42. This measure according to the invention ensures that a defined amount of gas ballast always flows through the inlet Gas building throat 32 flows into the chamber 40. This ensures that there is no critical temperature during the compression of the gas, in particular immediately before the compression outlet 26. It can thus be ensured, for example, that even in this temperature-critical region of the vacuum pump, a temperature of less than 135 ° C. always prevails and the vacuum pump thus fulfills the Artex standard T 4.

Claims

«. Q - ". Q -
Patentansprücheclaims
1. Vakuumpumpe, insbesondere Drehschieberpumpe oder Schraubenpumpe, mit1. Vacuum pump, in particular rotary vane pump or screw pump, with
einer Kompressionskammer (20), die einen Kammereinlass (22) und einen Kammerauslass (26) aufweist,a compression chamber (20) having a chamber inlet (22) and a chamber outlet (26),
einem mit der Kompressionskammer (26) verbundenen Gasballasteiniass (32) undone with the compression chamber (26) connected Gasballasteiniass (32) and
einem mit dem GasbaNasteiniass (32) verbundenen Gasballastraum (36), in dem Gas mit einem Druck höher als der Atmosphärendruck und/ oder höher als der Druck in der Kompressionskammer (20) vorhanden ist.a gas ballast space (36) connected to the gas turbine oil inlet (32), in which gas is present at a pressure higher than the atmospheric pressure and / or higher than the pressure in the compression chamber (20).
2. Vakuumpumpe, insbesondere Drehschieberpumpe oder Schraubenpumpe nach Anspruch 1, gekennzeichnet durch eine Steuereinrichtung (42) zur Steuerung des Gasdrucks in dem Gasballastraum (36) in Abhängigkeit des Drucks am Kammereinlass (22).2. Vacuum pump, in particular rotary vane pump or screw pump according to claim 1, characterized by a control device (42) for controlling the gas pressure in the gas ballast chamber (36) in dependence of the pressure at the chamber inlet (22).
3. Vakuumpumpe, insbesondere Drehschieberpumpe oder Schraubenpumpe nach Anspruch 2, dadurch gekennzeichnet, dass die Steuereinrichtung (42) mit einem am Kammereinlass (22) angeordneten Drucksensor (46) verbunden ist.3. Vacuum pump, in particular rotary vane pump or screw pump according to claim 2, characterized in that the control device (42) with a at the chamber inlet (22) arranged pressure sensor (46) is connected.
4. Vakuumpumpe, insbesondere Drehschieberpumpe oder Schraubenpumpe nach Anspruch 2 oder 3, dadurch gekennzeichnet, dass die Steuereinrichtung (42) mit einem am Gasbailastraum (36) angeordneten Drucksensor verbunden Ist.4. Vacuum pump, in particular rotary vane pump or screw pump according to claim 2 or 3, characterized in that the control device (42) is connected to a Gasbailastraum (36) arranged pressure sensor.
5. Vakuumpumpe, insbesondere Drehschieberpumpe oder Schraubenpumpe nach einem der Ansprüche 1 - 4, gekennzeichnet durch einen zwischen dem Gasbaiiastraurn (36) und dem Gasballasteinlass (32) angeordneten Mengenregier (52, 56) zur Regelung der der Kompressionskammer (20) zugeführten Gasmenge. , Vakuumpumpe, insbesondere Drehschieberpumpe oder Schraubenpumpe nach Anspruch 5, dadurch gekennzeichnet, dass der Mengenregler eine Entspannungsdüse (56) aufweist. , Vakuumpumpe, insbesondere Drehschϊeberpumpe oder Schraubenpumpe nach Anspruch 5 oder 6, dadurch gekennzeichnet, dass der Mengenregler eine Durchfluss-Messeinrichtung (52), insbesondere einen Massenstromsensor aufweist.5. Vacuum pump, in particular rotary vane pump or screw pump according to one of claims 1 - 4, characterized by an intermediate the Gasbaiiastraurn (36) and the Gasballasteinlass (32) arranged Mengenregier (52, 56) for controlling the compression chamber (20) supplied amount of gas. , Vacuum pump, in particular rotary vane pump or screw pump according to claim 5, characterized in that the flow regulator has a relaxation nozzle (56). , Vacuum pump, in particular Drehschϊeberpumpe or screw pump according to claim 5 or 6, characterized in that the flow regulator has a flow-measuring device (52), in particular a mass flow sensor.
8, Vakuumpumpe, insbesondere Drehschieberpumpe oder Schraubenpumpe nach einem der Ansprüche 5 - 7, dadurch gekennzeichnet, dass der Mengenregler, insbesondere die Durchfluss-Messeinrichtung (52) mit der Steuereinrichtung (42) verbunden ist.8, vacuum pump, in particular rotary vane pump or screw pump according to one of claims 5 - 7, characterized in that the flow regulator, in particular the flow-measuring device (52) with the control device (42) is connected.
9« Verfahren zur Steuerung einer GasbaNastzufuhr zu einer Vakuumpumpe, insbesondere einer Vakuumpumpe gemäß einem der Ansprüche 1 - 9, mit den Schritten;9 «A method for controlling a GasbaNastzufuhr to a vacuum pump, in particular a vacuum pump according to one of claims 1-9, comprising the steps;
Messen eines Einlassdrucks an einem Kammereinlass (22) derMeasuring an inlet pressure at a chamber inlet (22) of
Vakuumpumpe undVacuum pump and
Regeln eines Gasbailastdrucks und/ oder einer derRules of a gas bailast pressure and / or one of
Kompressionskammer (20) der Vakuumpumpe zugefuhrtenCompression chamber (20) of the vacuum pump zugefuhrten
Gasbailastmenge.Gasbailastmenge.
10. Verfahren nach Anspruch 9, bei welchem der Gasballastdruck derart geregelt wird, dass er höher als der Einlassdruck, insbesondere um einen Faktor von mindestens 1,5 - 2,5 höher ist. Verfahren nach Anspruch 9 oder 10, bei welchem eine Regelung des Gasballastdrucks und/ oder der Gasballastmenge ab Erreichen, insbesondere Überschreiten eines Grenzdrucks am Kammereinlass (22) erfolgt. 10. The method of claim 9, wherein the gas ballast pressure is controlled so that it is higher than the inlet pressure, in particular by a factor of at least 1.5 - 2.5 higher. A method according to claim 9 or 10, wherein a regulation of the gas ballast pressure and / or the Gasballastmenge from reaching, in particular exceeding a limit pressure at the chamber inlet (22).
PCT/EP2008/061575 2007-09-12 2008-09-02 Vacuum pump and method for controlling a gas ballast supply to a vacuum pump WO2009033986A1 (en)

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DE102007043350B3 (en) 2009-05-28
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