WO2009031502A1 - 半導体装置及びその製造方法 - Google Patents

半導体装置及びその製造方法 Download PDF

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Publication number
WO2009031502A1
WO2009031502A1 PCT/JP2008/065688 JP2008065688W WO2009031502A1 WO 2009031502 A1 WO2009031502 A1 WO 2009031502A1 JP 2008065688 W JP2008065688 W JP 2008065688W WO 2009031502 A1 WO2009031502 A1 WO 2009031502A1
Authority
WO
WIPO (PCT)
Prior art keywords
metal
semiconductor device
manufacturing
same
ohmic contact
Prior art date
Application number
PCT/JP2008/065688
Other languages
English (en)
French (fr)
Inventor
Akira Toriumi
Tomonori Nishimura
Original Assignee
The University Of Tokyo
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by The University Of Tokyo filed Critical The University Of Tokyo
Priority to US12/676,353 priority Critical patent/US20100176478A1/en
Publication of WO2009031502A1 publication Critical patent/WO2009031502A1/ja

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
    • H01L21/28008—Making conductor-insulator-semiconductor electrodes
    • H01L21/28255—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor belonging to Group IV and not being elemental silicon, e.g. Ge, SiGe, SiGeC
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof  ; Multistep manufacturing processes therefor
    • H01L29/40—Electrodes ; Multistep manufacturing processes therefor
    • H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
    • H01L29/45—Ohmic electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof  ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76—Unipolar devices, e.g. field effect transistors
    • H01L29/772—Field effect transistors
    • H01L29/78—Field effect transistors with field effect produced by an insulated gate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof  ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76—Unipolar devices, e.g. field effect transistors
    • H01L29/772—Field effect transistors
    • H01L29/78—Field effect transistors with field effect produced by an insulated gate
    • H01L29/7839—Field effect transistors with field effect produced by an insulated gate with Schottky drain or source contact

Abstract

本発明の目的は、Ｇｅ又はＳｉＧｅ化合物と金属とをオーミック接触させるための新規な手法、新規な構造を提供することにある。本発明は、ｉ）Ｇｅ又はＳｉＧｅ化合物；ｉｉ）金属；及びｉｉｉ）　ｉ）の物質とｉｉ）金属との間に配置される絶縁体又は半導体；のみからなる部位、を有する半導体装置であって、Ａ）　ｉ）の物質について正孔が多数キャリアの場合、該ｉ）の物質とｉｉ）金属とがショットキー接合であるか、及び／又は、Ｂ）　ｉ）の物質について電子が多数キャリアの場合、該ｉ）の物質とｉｉ）金属とがオーミック接触である、上記半導体装置を提供する。
PCT/JP2008/065688 2007-09-03 2008-09-01 半導体装置及びその製造方法 WO2009031502A1 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US12/676,353 US20100176478A1 (en) 2007-09-03 2008-09-01 Semiconductor device and method for manufacturing the same

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-227480 2007-09-03
JP2007227480A JP2009059996A (ja) 2007-09-03 2007-09-03 半導体装置及びその製造方法

Publications (1)

Publication Number Publication Date
WO2009031502A1 true WO2009031502A1 (ja) 2009-03-12

Family

ID=40428818

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/065688 WO2009031502A1 (ja) 2007-09-03 2008-09-01 半導体装置及びその製造方法

Country Status (3)

Country Link
US (1) US20100176478A1 (ja)
JP (1) JP2009059996A (ja)
WO (1) WO2009031502A1 (ja)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101677968B1 (ko) * 2012-08-24 2016-11-21 고쿠리츠켄큐카이하츠호진 카가쿠기쥬츠신코키코 게르마늄 층 상에 산화 게르마늄을 포함하는 막을 구비하는 반도체 구조 및 그 제조방법
JP6778957B2 (ja) * 2016-09-01 2020-11-04 国立研究開発法人科学技術振興機構 半導体装置

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09129901A (ja) * 1995-08-25 1997-05-16 Agency Of Ind Science & Technol 電極構造および電極作成方法
JP2000216241A (ja) * 1999-01-20 2000-08-04 Applied Materials Inc 半導体装置の製造方法
JP2005536047A (ja) * 2002-08-12 2005-11-24 エイコーン・テクノロジイズ・インコーポレーテッド チャネルに対するパッシブト・ショットキー障壁を有する絶縁ゲート型電界効果トランジスタ
JP2006054423A (ja) * 2004-07-13 2006-02-23 Toshiba Corp 半導体装置及びその製造方法
JP2007103897A (ja) * 2005-09-09 2007-04-19 Fujitsu Ltd 電界効果トランジスタおよびその製造方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7176483B2 (en) * 2002-08-12 2007-02-13 Acorn Technologies, Inc. Method for depinning the Fermi level of a semiconductor at an electrical junction and devices incorporating such junctions
US7382021B2 (en) * 2002-08-12 2008-06-03 Acorn Technologies, Inc. Insulated gate field-effect transistor having III-VI source/drain layer(s)
US7902029B2 (en) * 2002-08-12 2011-03-08 Acorn Technologies, Inc. Process for fabricating a self-aligned deposited source/drain insulated gate field-effect transistor
US7084423B2 (en) * 2002-08-12 2006-08-01 Acorn Technologies, Inc. Method for depinning the Fermi level of a semiconductor at an electrical junction and devices incorporating such junctions

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09129901A (ja) * 1995-08-25 1997-05-16 Agency Of Ind Science & Technol 電極構造および電極作成方法
JP2000216241A (ja) * 1999-01-20 2000-08-04 Applied Materials Inc 半導体装置の製造方法
JP2005536047A (ja) * 2002-08-12 2005-11-24 エイコーン・テクノロジイズ・インコーポレーテッド チャネルに対するパッシブト・ショットキー障壁を有する絶縁ゲート型電界効果トランジスタ
JP2006054423A (ja) * 2004-07-13 2006-02-23 Toshiba Corp 半導体装置及びその製造方法
JP2007103897A (ja) * 2005-09-09 2007-04-19 Fujitsu Ltd 電界効果トランジスタおよびその製造方法

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
AKIRA TORIUMI: "Ge-MOSFET no kanosei to kadai", OYO BUTSURI, vol. 75, no. 12, 2006, pages 1453 - 1460 *

Also Published As

Publication number Publication date
US20100176478A1 (en) 2010-07-15
JP2009059996A (ja) 2009-03-19

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