WO2009025335A1 - 感放射線性組成物及び化合物 - Google Patents
感放射線性組成物及び化合物 Download PDFInfo
- Publication number
- WO2009025335A1 WO2009025335A1 PCT/JP2008/064948 JP2008064948W WO2009025335A1 WO 2009025335 A1 WO2009025335 A1 WO 2009025335A1 JP 2008064948 W JP2008064948 W JP 2008064948W WO 2009025335 A1 WO2009025335 A1 WO 2009025335A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- compound
- radiation
- sensitive composition
- general formula
- integer
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C39/00—Compounds having at least one hydroxy or O-metal group bound to a carbon atom of a six-membered aromatic ring
- C07C39/12—Compounds having at least one hydroxy or O-metal group bound to a carbon atom of a six-membered aromatic ring polycyclic with no unsaturation outside the aromatic rings
- C07C39/17—Compounds having at least one hydroxy or O-metal group bound to a carbon atom of a six-membered aromatic ring polycyclic with no unsaturation outside the aromatic rings containing other rings in addition to the six-membered aromatic rings, e.g. cyclohexylphenol
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C69/00—Esters of carboxylic acids; Esters of carbonic or haloformic acids
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
- G03F7/0392—Macromolecular compounds which are photodegradable, e.g. positive electron resists the macromolecular compound being present in a chemically amplified positive photoresist composition
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C2603/00—Systems containing at least three condensed rings
- C07C2603/56—Ring systems containing bridged rings
- C07C2603/58—Ring systems containing bridged rings containing three rings
- C07C2603/70—Ring systems containing bridged rings containing three rings containing only six-membered rings
- C07C2603/74—Adamantanes
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C2603/00—Systems containing at least three condensed rings
- C07C2603/92—Systems containing at least three condensed rings with a condensed ring system consisting of at least two mutually uncondensed aromatic ring systems, linked by an annular structure formed by carbon chains on non-adjacent positions of the aromatic system, e.g. cyclophanes
Abstract
下記一般式(1)で表される化合物を提供する。
(前記一般式(1)において、Rは水素原子等、Yはアルキル基等、qは0または1、nは0以上の整数である。)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009529061A JP5304648B2 (ja) | 2007-08-23 | 2008-08-21 | 感放射線性組成物及び化合物 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007-216978 | 2007-08-23 | ||
JP2007216978 | 2007-08-23 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2009025335A1 true WO2009025335A1 (ja) | 2009-02-26 |
Family
ID=40378235
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2008/064948 WO2009025335A1 (ja) | 2007-08-23 | 2008-08-21 | 感放射線性組成物及び化合物 |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP5304648B2 (ja) |
TW (1) | TW200916964A (ja) |
WO (1) | WO2009025335A1 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007009082A (ja) * | 2005-06-30 | 2007-01-18 | Jsr Corp | カリックスアレーン系ポリマー及びその製造方法 |
JP2008280415A (ja) * | 2007-05-09 | 2008-11-20 | Univ Kanagawa | ラダーポリマー誘導体およびその製造方法、並びに低屈折率材料 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1995019974A2 (en) * | 1994-01-24 | 1995-07-27 | Harris Stephen J | Calixarene-based compounds having antibacterial, antifungal, anticancer-hiv activity |
WO2005075398A1 (ja) * | 2004-02-04 | 2005-08-18 | Jsr Corporation | カリックスアレーン系化合物、その製造方法、その中間体及びその組成物 |
JP2006091658A (ja) * | 2004-09-27 | 2006-04-06 | Fuji Photo Film Co Ltd | 電子線、euv又はx線用ポジ型レジスト組成物及びそれを用いたパターン形成方法 |
JP2007008875A (ja) * | 2005-06-30 | 2007-01-18 | Jsr Corp | カリックスアレーン系誘導体及びそれを含有する組成物 |
JP2007009082A (ja) * | 2005-06-30 | 2007-01-18 | Jsr Corp | カリックスアレーン系ポリマー及びその製造方法 |
-
2008
- 2008-08-21 WO PCT/JP2008/064948 patent/WO2009025335A1/ja active Application Filing
- 2008-08-21 JP JP2009529061A patent/JP5304648B2/ja not_active Expired - Fee Related
- 2008-08-22 TW TW097132209A patent/TW200916964A/zh unknown
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1995019974A2 (en) * | 1994-01-24 | 1995-07-27 | Harris Stephen J | Calixarene-based compounds having antibacterial, antifungal, anticancer-hiv activity |
WO2005075398A1 (ja) * | 2004-02-04 | 2005-08-18 | Jsr Corporation | カリックスアレーン系化合物、その製造方法、その中間体及びその組成物 |
JP2006091658A (ja) * | 2004-09-27 | 2006-04-06 | Fuji Photo Film Co Ltd | 電子線、euv又はx線用ポジ型レジスト組成物及びそれを用いたパターン形成方法 |
JP2007008875A (ja) * | 2005-06-30 | 2007-01-18 | Jsr Corp | カリックスアレーン系誘導体及びそれを含有する組成物 |
JP2007009082A (ja) * | 2005-06-30 | 2007-01-18 | Jsr Corp | カリックスアレーン系ポリマー及びその製造方法 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007009082A (ja) * | 2005-06-30 | 2007-01-18 | Jsr Corp | カリックスアレーン系ポリマー及びその製造方法 |
JP2008280415A (ja) * | 2007-05-09 | 2008-11-20 | Univ Kanagawa | ラダーポリマー誘導体およびその製造方法、並びに低屈折率材料 |
Also Published As
Publication number | Publication date |
---|---|
JPWO2009025335A1 (ja) | 2010-11-25 |
TW200916964A (en) | 2009-04-16 |
JP5304648B2 (ja) | 2013-10-02 |
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