WO2009019765A1 - 冷陰極電離真空計 - Google Patents

冷陰極電離真空計 Download PDF

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Publication number
WO2009019765A1
WO2009019765A1 PCT/JP2007/065503 JP2007065503W WO2009019765A1 WO 2009019765 A1 WO2009019765 A1 WO 2009019765A1 JP 2007065503 W JP2007065503 W JP 2007065503W WO 2009019765 A1 WO2009019765 A1 WO 2009019765A1
Authority
WO
WIPO (PCT)
Prior art keywords
cathode
anode
cold
ionization gauge
space
Prior art date
Application number
PCT/JP2007/065503
Other languages
English (en)
French (fr)
Inventor
Takahiro Chiba
Original Assignee
Diavac Limited
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Diavac Limited filed Critical Diavac Limited
Priority to PCT/JP2007/065503 priority Critical patent/WO2009019765A1/ja
Publication of WO2009019765A1 publication Critical patent/WO2009019765A1/ja

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G01L21/30—Vacuum gauges by making use of ionisation effects
    • G01L21/34—Vacuum gauges by making use of ionisation effects using electric discharge tubes with cold cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/02—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas
    • H01J41/06—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas with ionisation by means of cold cathodes

Abstract

　放電が生じやすく、また冷陰極電離真空計に対して高電圧をかけた時刻と、放電して電流が流れ始める時刻との間の時間の遅れが小さく、更に、陽極の取り付けの方向性がなく、容易に陽極を交換することができる冷陰極電離真空計を提供する。 　圧力を測定するチャンバーと連通した空間に設けられた筒状の陰極２３と、前記筒状の陰極２３の内部空間に配置された棒状の陽極５と、前記陽極５と陰極２３との間の電界にほぼ直交する磁界を形成し、前記陽極５と陰極２３との間に放電を起こす磁性手段２５ａ，２５ｂとを備え、前記陽極５の先端部に螺子部５ｂが形成され、陰極２３の筒内の空間に配置されている。
PCT/JP2007/065503 2007-08-08 2007-08-08 冷陰極電離真空計 WO2009019765A1 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PCT/JP2007/065503 WO2009019765A1 (ja) 2007-08-08 2007-08-08 冷陰極電離真空計

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2007/065503 WO2009019765A1 (ja) 2007-08-08 2007-08-08 冷陰極電離真空計

Publications (1)

Publication Number Publication Date
WO2009019765A1 true WO2009019765A1 (ja) 2009-02-12

Family

ID=40341013

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2007/065503 WO2009019765A1 (ja) 2007-08-08 2007-08-08 冷陰極電離真空計

Country Status (1)

Country Link
WO (1) WO2009019765A1 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018111684A1 (en) * 2016-12-13 2018-06-21 Mks Instruments, Inc. Anode electrode shield for inverted magnetron cold cathode ionization gauge

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0922678A (ja) * 1995-07-03 1997-01-21 Commiss Energ Atom 放電を開始及び／又は維持するための装置、及びかかる装置を含む冷陰極真空計
JP2002296243A (ja) * 2001-03-29 2002-10-09 Kumamoto Technopolis Foundation 管内被膜欠陥検査装置および管内被膜欠陥検査方法
JP2007155669A (ja) * 2005-12-08 2007-06-21 Dia Shinku Kk 冷陰極電離真空計
JP2007218619A (ja) * 2006-02-14 2007-08-30 Dia Shinku Kk 冷陰極電離真空計

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0922678A (ja) * 1995-07-03 1997-01-21 Commiss Energ Atom 放電を開始及び／又は維持するための装置、及びかかる装置を含む冷陰極真空計
JP2002296243A (ja) * 2001-03-29 2002-10-09 Kumamoto Technopolis Foundation 管内被膜欠陥検査装置および管内被膜欠陥検査方法
JP2007155669A (ja) * 2005-12-08 2007-06-21 Dia Shinku Kk 冷陰極電離真空計
JP2007218619A (ja) * 2006-02-14 2007-08-30 Dia Shinku Kk 冷陰極電離真空計

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018111684A1 (en) * 2016-12-13 2018-06-21 Mks Instruments, Inc. Anode electrode shield for inverted magnetron cold cathode ionization gauge
CN110192265A (zh) * 2016-12-13 2019-08-30 万机仪器公司 用于倒置磁控管冷阴极电离计的阳极电极屏蔽件
JP2020502543A (ja) * 2016-12-13 2020-01-23 エム ケー エス インストルメンツ インコーポレーテッドＭｋｓ Ｉｎｓｔｒｕｍｅｎｔｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ 逆マグネトロン冷陰極電離真空計に用いられるアノード電極シールド
US10969290B2 (en) 2016-12-13 2021-04-06 Mks Instruments, Inc. Anode electrode shield for inverted magnetron cold cathode ionization gauge
CN110192265B (zh) * 2016-12-13 2021-10-08 万机仪器公司 用于倒置磁控管冷阴极电离计的阳极电极屏蔽件
JP6990251B2 (ja) 2016-12-13 2022-01-12 エム ケー エス インストルメンツ インコーポレーテッド 逆マグネトロン冷陰極電離真空計に用いられるアノード電極シールド

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