WO2009015615A8 - A device providing a live three-dimensional image of a specimen - Google Patents

A device providing a live three-dimensional image of a specimen Download PDF

Info

Publication number
WO2009015615A8
WO2009015615A8 PCT/CZ2008/000050 CZ2008000050W WO2009015615A8 WO 2009015615 A8 WO2009015615 A8 WO 2009015615A8 CZ 2008000050 W CZ2008000050 W CZ 2008000050W WO 2009015615 A8 WO2009015615 A8 WO 2009015615A8
Authority
WO
WIPO (PCT)
Prior art keywords
tilting
scanning
source
signal
specimen
Prior art date
Application number
PCT/CZ2008/000050
Other languages
French (fr)
Other versions
WO2009015615A1 (en
Inventor
Martin Zadrazil
Josef Rysávka
Tomás Smíd
Vojtech Filip
Original Assignee
Tescan, S.R.O.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tescan, S.R.O. filed Critical Tescan, S.R.O.
Priority to DE112008002044T priority Critical patent/DE112008002044T5/en
Priority to GB0922723A priority patent/GB2464010A/en
Publication of WO2009015615A1 publication Critical patent/WO2009015615A1/en
Publication of WO2009015615A8 publication Critical patent/WO2009015615A8/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
    • H01J37/1478—Beam tilting means, i.e. for stereoscopy or for beam channelling
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/15—Means for deflecting or directing discharge
    • H01J2237/1506—Tilting or rocking beam around an axis substantially at an angle to optical axis
    • H01J2237/1507—Tilting or rocking beam around an axis substantially at an angle to optical axis dynamically, e.g. to obtain same impinging angle on whole area
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/2611—Stereoscopic measurements and/or imaging
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/28—Scanning microscopes
    • H01J2237/2813—Scanning microscopes characterised by the application
    • H01J2237/2814—Measurement of surface topography

Abstract

The beam of particles from the primary source is led to the secondary source (1) and a tilting and simultaneously scanning unit (2) placed above the objective (3) is inserted to the path of the output beam of particles with an axis (5). The tilting and scanning unit (2), seen in the direction from the viewed specimen (4) upwards, consists of a bottom stage (2.2) and a top stage (2.1). The top stage (2.1) and the bottom stage (2.2) consist of at least two tilting and scanning elements (6, 7) arranged to create fields orthogonal to each other in the area where the beam of particles with the axis (5) passes through them. Both the output of the first adjustable source (6.1) of a direct tilting signal and the first adjustable source (6.2) of an alternating scanning signal are connected to the first tilting and scanning element (6). Both the output of the second adjustable source (7.1) of a direct tilting signal and the second adjustable source (7.2) of an alternating scanning signal are connected to the second tilting and scanning element (7).
PCT/CZ2008/000050 2007-07-30 2008-04-28 A device providing a live three-dimensional image of a speciment WO2009015615A1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
DE112008002044T DE112008002044T5 (en) 2007-07-30 2008-04-28 Device for the spatial representation of samples in real time
GB0922723A GB2464010A (en) 2007-07-30 2008-04-28 A device providing a live three-dimensional image of a speciment

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CZ20070510A CZ298798B6 (en) 2007-07-30 2007-07-30 Device for spatial real time representation of a sample
CZPV2007-510 2007-07-30

Publications (2)

Publication Number Publication Date
WO2009015615A1 WO2009015615A1 (en) 2009-02-05
WO2009015615A8 true WO2009015615A8 (en) 2011-05-26

Family

ID=38973036

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/CZ2008/000050 WO2009015615A1 (en) 2007-07-30 2008-04-28 A device providing a live three-dimensional image of a speciment

Country Status (4)

Country Link
CZ (1) CZ298798B6 (en)
DE (2) DE112008002044T5 (en)
GB (1) GB2464010A (en)
WO (1) WO2009015615A1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5259688B2 (en) 2010-12-09 2013-08-07 本田技研工業株式会社 Scanning electron microscope
JP5364112B2 (en) * 2011-01-25 2013-12-11 株式会社日立ハイテクノロジーズ Charged particle beam equipment
CN111508807B (en) * 2020-04-26 2022-11-25 北京工业大学 Scanning electron microscope stereo imaging system

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3986027A (en) * 1975-04-07 1976-10-12 American Optical Corporation Stereo scanning microprobe
JPH0233843A (en) * 1988-07-25 1990-02-05 Hitachi Ltd Scanning electronic microscope
US6614026B1 (en) * 1999-04-15 2003-09-02 Applied Materials, Inc. Charged particle beam column
JP2001273861A (en) * 2000-03-28 2001-10-05 Toshiba Corp Charged beam apparatus and pattern incline observation method
US6930308B1 (en) * 2002-07-11 2005-08-16 Kla-Tencor Technologies Corporation SEM profile and surface reconstruction using multiple data sets
JP2004214060A (en) * 2003-01-06 2004-07-29 Hitachi High-Technologies Corp Scanning electron microscope, and testpiece observation method using it
DE60332808D1 (en) * 2003-03-24 2010-07-15 Integrated Circuit Testing Charged particle beam device
JP4316394B2 (en) * 2004-01-21 2009-08-19 株式会社東芝 Charged beam equipment
JP4620981B2 (en) * 2004-08-10 2011-01-26 株式会社日立ハイテクノロジーズ Charged particle beam equipment

Also Published As

Publication number Publication date
DE112008002044T5 (en) 2010-12-30
GB2464010A (en) 2010-04-07
WO2009015615A1 (en) 2009-02-05
CZ2007510A3 (en) 2008-01-30
GB0922723D0 (en) 2010-02-17
DE202008018179U1 (en) 2012-01-16
CZ298798B6 (en) 2008-01-30

Similar Documents

Publication Publication Date Title
TW200728108A (en) Methods of forming sheeting with a composite image that floats and sheeting with a composite image that floats
WO2008131887A3 (en) Multiple-spot laser refractive ophthalmic surgery
DE502006002088D1 (en) DEVICE FOR INSPECTION OF A SURFACE
EP2051061A3 (en) Optical measuring device, optical measuring apparatus and fine particle measuring apparatus using optical measuring device
WO2010108125A3 (en) Psma-targeting compounds and uses thereof
WO2006093731A3 (en) Apparatus and method for improving marker identification within a motion capture system
WO2008002689A3 (en) Modular radiation beam analyzer
JP2014528060A5 (en)
EP1674937A3 (en) Lithographic apparatus with two-dimensional alignment measurement arrangement and two-dimensional alignment measurement method
EP2311092A4 (en) Light field image sensor, method and applications
DE502005010250D1 (en) DEVICE FOR HOMOGENIZING LIGHT
WO2007106382A3 (en) Optical scanning system
WO2009015615A8 (en) A device providing a live three-dimensional image of a specimen
EP2620799A3 (en) Optical unit, illumination optical apparatus, exposure apparatus, and device manufacturing method
TW200734934A (en) Counting device for small series
EP2090918A8 (en) Calibrating device and laser scanning microscope with such a calibrating device
WO2007059197A3 (en) Technique for shaping a ribbon-shaped ion beam
DE50013432D1 (en) ARRANGEMENT FOR THE OPTICAL EVALUATION OF A SUBJECT ARRAY
ATE470882T1 (en) TELESCOPE WITH LARGE FIELD OF VIEW AND VARIABLE MAGNIFICATION
EP3018404A8 (en) Lens system for an led luminaire
ATE395580T1 (en) SPECTRA ANALYTICAL UNIT WITH A DIFFRACTION GRIDING
ATE398788T1 (en) COMPACT LENS WITH THREE INDIVIDUAL LENSES
WO2005040890A3 (en) Catadioptric projection objective with real intermediate images
PL2309293T3 (en) Fibre optic scanner
ATE432483T1 (en) OPTICAL DEVICE AND INSPECTION MODULE

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 08748687

Country of ref document: EP

Kind code of ref document: A1

ENP Entry into the national phase

Ref document number: 0922723

Country of ref document: GB

Kind code of ref document: A

Free format text: PCT FILING DATE = 20080428

122 Ep: pct application non-entry in european phase

Ref document number: 08748687

Country of ref document: EP

Kind code of ref document: A1

RET De translation (de og part 6b)

Ref document number: 112008002044

Country of ref document: DE

Date of ref document: 20101230

Kind code of ref document: P