WO2009008517A1 - プラズマ形成領域の制御装置及びプラズマ処理装置 - Google Patents

プラズマ形成領域の制御装置及びプラズマ処理装置 Download PDF

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Publication number
WO2009008517A1
WO2009008517A1 PCT/JP2008/062635 JP2008062635W WO2009008517A1 WO 2009008517 A1 WO2009008517 A1 WO 2009008517A1 JP 2008062635 W JP2008062635 W JP 2008062635W WO 2009008517 A1 WO2009008517 A1 WO 2009008517A1
Authority
WO
WIPO (PCT)
Prior art keywords
plasma
formation region
microwave oscillator
controller
antenna
Prior art date
Application number
PCT/JP2008/062635
Other languages
English (en)
French (fr)
Inventor
Yuji Ikeda
Original Assignee
Imagineering, Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Imagineering, Inc. filed Critical Imagineering, Inc.
Priority to EP08791116.0A priority Critical patent/EP2178350B1/en
Priority to US12/668,787 priority patent/US8552650B2/en
Publication of WO2009008517A1 publication Critical patent/WO2009008517A1/ja

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
    • F02P—IGNITION, OTHER THAN COMPRESSION IGNITION, FOR INTERNAL-COMBUSTION ENGINES; TESTING OF IGNITION TIMING IN COMPRESSION-IGNITION ENGINES
    • F02P23/00—Other ignition
    • F02P23/04—Other physical ignition means, e.g. using laser rays
    • F02P23/045—Other physical ignition means, e.g. using laser rays using electromagnetic microwaves
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32192—Microwave generated discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32798—Further details of plasma apparatus not provided for in groups H01J37/3244 - H01J37/32788; special provisions for cleaning or maintenance of the apparatus
    • H01J37/32816—Pressure
    • H01J37/32825—Working under atmospheric pressure or higher
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
    • F02P—IGNITION, OTHER THAN COMPRESSION IGNITION, FOR INTERNAL-COMBUSTION ENGINES; TESTING OF IGNITION TIMING IN COMPRESSION-IGNITION ENGINES
    • F02P3/00—Other installations
    • F02P3/02—Other installations having inductive energy storage, e.g. arrangements of induction coils
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
    • F02P—IGNITION, OTHER THAN COMPRESSION IGNITION, FOR INTERNAL-COMBUSTION ENGINES; TESTING OF IGNITION TIMING IN COMPRESSION-IGNITION ENGINES
    • F02P9/00—Electric spark ignition control, not otherwise provided for
    • F02P9/002—Control of spark intensity, intensifying, lengthening, suppression
    • F02P9/007—Control of spark intensity, intensifying, lengthening, suppression by supplementary electrical discharge in the pre-ionised electrode interspace of the sparking plug, e.g. plasma jet ignition

Abstract

高圧力下において、大規模なプラズマを、容易、かつ、低コストで得ることができるプラズマの存在領域の制御装置を提供する。 マイクロ波発振器と、マイクロ波発振器に接続されたアンテナと、マイクロ波発振器及びアンテナの位置を制御する制御手段とを備え、制御手段は、各時刻におけるプラズマの形成領域の指定に基づいてプラズマの形成領域に向けてアンテナを配置し、指定されたプラズマの温度状態に基づいてマイクロ波発振器の駆動シーケンスを設定し、この駆動シーケンスにしたがいマイクロ波発振器を駆動する。
PCT/JP2008/062635 2007-07-12 2008-07-12 プラズマ形成領域の制御装置及びプラズマ処理装置 WO2009008517A1 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP08791116.0A EP2178350B1 (en) 2007-07-12 2008-07-12 Controller of plasma formation region and plasma processor
US12/668,787 US8552650B2 (en) 2007-07-12 2008-07-12 Plasma formation region control apparatus and plasma processing apparatus

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007183751 2007-07-12
JP2007-183751 2007-07-12

Publications (1)

Publication Number Publication Date
WO2009008517A1 true WO2009008517A1 (ja) 2009-01-15

Family

ID=40228687

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/062635 WO2009008517A1 (ja) 2007-07-12 2008-07-12 プラズマ形成領域の制御装置及びプラズマ処理装置

Country Status (4)

Country Link
US (1) US8552650B2 (ja)
EP (1) EP2178350B1 (ja)
JP (1) JP5716181B2 (ja)
WO (1) WO2009008517A1 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2478955A1 (en) * 2009-09-17 2012-07-25 Imagineering, Inc. Plasma-generation device
US9709019B2 (en) 2011-01-18 2017-07-18 Imagineering, Inc. Plasma generation device and internal combustion engine

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8890410B2 (en) 2009-09-17 2014-11-18 Imagineering, Inc. Plasma generation device
WO2011043399A1 (ja) 2009-10-06 2011-04-14 イマジニアリング株式会社 内燃機関
EP2578854A4 (en) 2010-06-02 2017-02-22 Imagineering, Inc. Control device for internal combustion engine
JP5786145B2 (ja) * 2011-01-25 2015-09-30 イマジニアリング株式会社 電源制御装置
WO2012105568A2 (ja) 2011-01-31 2012-08-09 イマジニアリング株式会社 プラズマ装置
WO2012105569A2 (ja) * 2011-01-31 2012-08-09 イマジニアリング株式会社 プラズマ生成装置
EP2677163A4 (en) * 2011-02-15 2018-08-08 Imagineering, Inc. Internal combustion engine
WO2012124671A2 (ja) * 2011-03-14 2012-09-20 イマジニアリング株式会社 内燃機関
EP2760259B1 (en) * 2011-09-22 2016-12-28 Imagineering, Inc. Plasma generating device, and internal combustion engine
WO2014115707A1 (ja) 2013-01-22 2014-07-31 イマジニアリング株式会社 プラズマ生成装置、及び内燃機関
US20140202634A1 (en) * 2013-01-23 2014-07-24 Applied Materials, Inc. Radial transmission line based plasma source
JP5725574B2 (ja) * 2013-03-05 2015-05-27 東京エレクトロン株式会社 マイクロ波導波装置、プラズマ処理装置及びプラズマ処理方法
JP6082881B2 (ja) 2013-08-21 2017-02-22 イマジニアリング株式会社 内燃機関の点火装置及び内燃機関
CN103758678B (zh) * 2013-12-18 2015-12-30 安徽理工大学 一种脉冲谐振电火花触发微波放电体模点火助燃装置
WO2016006714A1 (ja) * 2014-07-11 2016-01-14 イマジニアリング株式会社 点火装置
US10036361B2 (en) 2014-08-12 2018-07-31 Imagineering, Inc. Ignition device
JP2022039820A (ja) * 2020-08-28 2022-03-10 東京エレクトロン株式会社 プラズマ処理装置およびプラズマ処理方法

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JP2000133494A (ja) * 1998-10-23 2000-05-12 Mitsubishi Heavy Ind Ltd マイクロ波プラズマ発生装置及び方法
JP2001527300A (ja) * 1997-12-31 2001-12-25 アクセリス テクノロジーズ インコーポレーティッド プラズマ放電装置
JP2004363089A (ja) * 2003-05-09 2004-12-24 Japan Science & Technology Agency タップ付きアンテナを有する高周波プラズマ装置
JP2006274322A (ja) * 2005-03-28 2006-10-12 Univ Nagoya 撥水処理方法
JP2006278643A (ja) * 2005-03-29 2006-10-12 Advanced Lcd Technologies Development Center Co Ltd プラズマ処理装置及びプラズマ処理方法
JP2006302652A (ja) * 2005-04-20 2006-11-02 Univ Nagoya プラズマ処理装置
JP2007026981A (ja) * 2005-07-20 2007-02-01 Iwasaki Electric Co Ltd プラズマ処理装置

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Publication number Priority date Publication date Assignee Title
JP2001527300A (ja) * 1997-12-31 2001-12-25 アクセリス テクノロジーズ インコーポレーティッド プラズマ放電装置
JP2000133494A (ja) * 1998-10-23 2000-05-12 Mitsubishi Heavy Ind Ltd マイクロ波プラズマ発生装置及び方法
JP2004363089A (ja) * 2003-05-09 2004-12-24 Japan Science & Technology Agency タップ付きアンテナを有する高周波プラズマ装置
JP2006274322A (ja) * 2005-03-28 2006-10-12 Univ Nagoya 撥水処理方法
JP2006278643A (ja) * 2005-03-29 2006-10-12 Advanced Lcd Technologies Development Center Co Ltd プラズマ処理装置及びプラズマ処理方法
JP2006302652A (ja) * 2005-04-20 2006-11-02 Univ Nagoya プラズマ処理装置
JP2007026981A (ja) * 2005-07-20 2007-02-01 Iwasaki Electric Co Ltd プラズマ処理装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2478955A1 (en) * 2009-09-17 2012-07-25 Imagineering, Inc. Plasma-generation device
EP2478955A4 (en) * 2009-09-17 2014-10-01 Imagineering Inc PLASMA GENERATION DEVICE
US9709019B2 (en) 2011-01-18 2017-07-18 Imagineering, Inc. Plasma generation device and internal combustion engine

Also Published As

Publication number Publication date
JP2009038025A (ja) 2009-02-19
EP2178350B1 (en) 2016-04-13
EP2178350A4 (en) 2014-08-06
US8552650B2 (en) 2013-10-08
JP5716181B2 (ja) 2015-05-13
EP2178350A1 (en) 2010-04-21
US20100186670A1 (en) 2010-07-29

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