WO2009008258A1 - Sensor device and method for manufacturing the same - Google Patents

Sensor device and method for manufacturing the same Download PDF

Info

Publication number
WO2009008258A1
WO2009008258A1 PCT/JP2008/061446 JP2008061446W WO2009008258A1 WO 2009008258 A1 WO2009008258 A1 WO 2009008258A1 JP 2008061446 W JP2008061446 W JP 2008061446W WO 2009008258 A1 WO2009008258 A1 WO 2009008258A1
Authority
WO
WIPO (PCT)
Prior art keywords
sensor device
board
manufacturing
section
thermistor
Prior art date
Application number
PCT/JP2008/061446
Other languages
French (fr)
Japanese (ja)
Inventor
Hajime Yamada
Yoshimitsu Ushimi
Tomoyuki Kuro
Takahiro Oguchi
Naoko Aizawa
Original Assignee
Murata Manufacturing Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co., Ltd. filed Critical Murata Manufacturing Co., Ltd.
Publication of WO2009008258A1 publication Critical patent/WO2009008258A1/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/14—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature
    • G01N27/16—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature caused by burning or catalytic oxidation of surrounding material to be tested, e.g. of gas
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/02—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/02—Details
    • G01J1/0252—Constructional arrangements for compensating for fluctuations caused by, e.g. temperature, or using cooling or temperature stabilization of parts of the device; Controlling the atmosphere inside a photometer; Purge systems, cleaning devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Electromagnetism (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Thermistors And Varistors (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)

Abstract

Provided is a sensor device, which has stable characteristics and high sensitivity and is easily manufactured with low cost. A method for manufacturing such sensor device is also provided. A sensor device (10) is provided with at least one reaction detecting element. The reaction detecting element has a detection layer (18) for detecting a specific subject, and a temperature detecting section, which has the detection layer (18) arranged thereon and detects temperature changes. The temperature detecting section is provided with a thermistor board (12) composed of thinned bulk material, and an electrode (14), which is formed on the thermistor board (12) and detects electrical resistance changes of the thermistor board (12). The temperature detecting section is bonded to a supporting board (22) through a supporting section (20) and has a membrane structure.
PCT/JP2008/061446 2007-07-09 2008-06-24 Sensor device and method for manufacturing the same WO2009008258A1 (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2007-180267 2007-07-09
JP2007180267 2007-07-09
JP2008-035336 2008-02-15
JP2008035336 2008-02-15

Publications (1)

Publication Number Publication Date
WO2009008258A1 true WO2009008258A1 (en) 2009-01-15

Family

ID=40228437

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/061446 WO2009008258A1 (en) 2007-07-09 2008-06-24 Sensor device and method for manufacturing the same

Country Status (1)

Country Link
WO (1) WO2009008258A1 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009157123A1 (en) * 2008-06-26 2009-12-30 株式会社 村田製作所 Sensor device and method for manufacturing the same
WO2013125734A1 (en) * 2012-02-24 2013-08-29 Nec Corporation Bolometer and manufacturing method thereof

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06160177A (en) * 1992-11-20 1994-06-07 Tdk Corp Infrared ray detector
JP2000009672A (en) * 1998-06-26 2000-01-14 Yazaki Corp Gas sensor of contact combustion type
JP2000121431A (en) * 1998-10-14 2000-04-28 Mitsubishi Materials Corp Pyroelectric infrared sensor
JP2002168818A (en) * 2000-12-01 2002-06-14 Yazaki Corp Gas detector and gas detection method
JP2004093470A (en) * 2002-09-03 2004-03-25 Ngk Spark Plug Co Ltd Microsensor made of silicon
JP2005098846A (en) * 2003-09-25 2005-04-14 Tdk Corp Gas sensor
JP2005098742A (en) * 2003-09-22 2005-04-14 Oizumi Seisakusho:Kk Catalytic combustion type hydrogen sensor
JP2005539218A (en) * 2002-09-16 2005-12-22 コミサリア、ア、レネルジ、アトミク Electromagnetic radiation detection device having an integrated housing with two overlapping detectors
JP2006047276A (en) * 2004-07-07 2006-02-16 National Institute Of Advanced Industrial & Technology Fine pattern forming method
WO2007129547A1 (en) * 2006-05-10 2007-11-15 Murata Manufacturing Co., Ltd. Infrared sensor and method for manufacturing the same

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06160177A (en) * 1992-11-20 1994-06-07 Tdk Corp Infrared ray detector
JP2000009672A (en) * 1998-06-26 2000-01-14 Yazaki Corp Gas sensor of contact combustion type
JP2000121431A (en) * 1998-10-14 2000-04-28 Mitsubishi Materials Corp Pyroelectric infrared sensor
JP2002168818A (en) * 2000-12-01 2002-06-14 Yazaki Corp Gas detector and gas detection method
JP2004093470A (en) * 2002-09-03 2004-03-25 Ngk Spark Plug Co Ltd Microsensor made of silicon
JP2005539218A (en) * 2002-09-16 2005-12-22 コミサリア、ア、レネルジ、アトミク Electromagnetic radiation detection device having an integrated housing with two overlapping detectors
JP2005098742A (en) * 2003-09-22 2005-04-14 Oizumi Seisakusho:Kk Catalytic combustion type hydrogen sensor
JP2005098846A (en) * 2003-09-25 2005-04-14 Tdk Corp Gas sensor
JP2006047276A (en) * 2004-07-07 2006-02-16 National Institute Of Advanced Industrial & Technology Fine pattern forming method
WO2007129547A1 (en) * 2006-05-10 2007-11-15 Murata Manufacturing Co., Ltd. Infrared sensor and method for manufacturing the same

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009157123A1 (en) * 2008-06-26 2009-12-30 株式会社 村田製作所 Sensor device and method for manufacturing the same
WO2013125734A1 (en) * 2012-02-24 2013-08-29 Nec Corporation Bolometer and manufacturing method thereof

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