WO2008156018A1 - 静電容量型加速度センサ - Google Patents

静電容量型加速度センサ Download PDF

Info

Publication number
WO2008156018A1
WO2008156018A1 PCT/JP2008/060670 JP2008060670W WO2008156018A1 WO 2008156018 A1 WO2008156018 A1 WO 2008156018A1 JP 2008060670 W JP2008060670 W JP 2008060670W WO 2008156018 A1 WO2008156018 A1 WO 2008156018A1
Authority
WO
WIPO (PCT)
Prior art keywords
weight
long portion
acceleration sensor
capacitance type
type acceleration
Prior art date
Application number
PCT/JP2008/060670
Other languages
English (en)
French (fr)
Inventor
Manabu Tamura
Original Assignee
Alps Electric Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alps Electric Co., Ltd. filed Critical Alps Electric Co., Ltd.
Publication of WO2008156018A1 publication Critical patent/WO2008156018A1/ja

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/084—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)

Abstract

　他軸加速度の成分を抑えて、検出誤差を低減することができる静電容量型加速度センサを提供すること。ガラス基板（１１）の一方の主面上には、前記固定電極（１２）との間に測定対象の容量を形成する可動電極となる略直方体形状の錘（１５）、及びこの錘（１５）を支持する梁（１４）を有する第２基板であるシリコン基板（１３）が接合されている。梁（１４）は、平面視において錘（１５）から所定の間隔をおいて錘（１５）の周囲に沿う長尺部（１４ａ）と、この長尺部（１４ａ）及び錘（１５）を連結する連結部（１４ｂ）とで構成されている。錘（１５）と長尺部（１４ａ）との間にはスペース（１７）が設けられている。そして、ガラス基板（１１）上に設けられた固定電極（１２）が錘（１５）と長尺部（１４ａ）との間のスペース（１７）に延在している。
PCT/JP2008/060670 2007-06-18 2008-06-11 静電容量型加速度センサ WO2008156018A1 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-160559 2007-06-18
JP2007160559 2007-06-18

Publications (1)

Publication Number Publication Date
WO2008156018A1 true WO2008156018A1 (ja) 2008-12-24

Family

ID=40156175

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/060670 WO2008156018A1 (ja) 2007-06-18 2008-06-11 静電容量型加速度センサ

Country Status (1)

Country Link
WO (1) WO2008156018A1 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2498454A (en) * 2012-01-13 2013-07-17 Secr Defence Accelerometer

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0394168A (ja) * 1989-09-07 1991-04-18 Hitachi Ltd 半導体容量式加速度センサとその製造方法
JPH04225166A (ja) * 1990-12-27 1992-08-14 Hitachi Ltd 加速度センサ
JPH08240609A (ja) * 1995-03-02 1996-09-17 Fuji Electric Co Ltd 静電容量式加速度センサ
JPH09113534A (ja) * 1995-10-23 1997-05-02 Yoshinobu Matsumoto 加速度センサー

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0394168A (ja) * 1989-09-07 1991-04-18 Hitachi Ltd 半導体容量式加速度センサとその製造方法
JPH04225166A (ja) * 1990-12-27 1992-08-14 Hitachi Ltd 加速度センサ
JPH08240609A (ja) * 1995-03-02 1996-09-17 Fuji Electric Co Ltd 静電容量式加速度センサ
JPH09113534A (ja) * 1995-10-23 1997-05-02 Yoshinobu Matsumoto 加速度センサー

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2498454A (en) * 2012-01-13 2013-07-17 Secr Defence Accelerometer
GB2498520A (en) * 2012-01-13 2013-07-24 Secr Defence Accelerometer
GB2498454B (en) * 2012-01-13 2016-06-22 Secr Defence Improvements in accelerometers
US9470527B2 (en) 2012-01-13 2016-10-18 The Secretary Of State For Defence Accelerometers

Similar Documents

Publication Publication Date Title
EP3248936B1 (en) Mems pressure sensor and mems inertial sensor integration structure
WO2010110989A3 (en) Vertically integrated mems acceleration transducer
WO2012170123A3 (en) Platform perturbation compensation
WO2008063314A3 (en) Device and method for measuring gap between members of a structure for manufacture of a shim
WO2009006186A3 (en) Multi-offset die head
WO2008099817A1 (ja) 可変分光素子
WO2009028283A1 (ja) 半導体歪みセンサー
WO2008080683A3 (de) Mehrachsiger mikromechanischer beschleunigungssensor
CA2595755A1 (en) A tri-axis accelerometer
WO2013142185A8 (en) Foldable substrate
WO2007087121A3 (en) Arrangements for an integrated sensor
ATE503988T1 (de) Spannungsisolierter drucksensorchip
WO2008030913A3 (en) Method and apparatus for controlling the sensitivity and value of a capacitive humidity sensor
WO2011042004A3 (de) Sensoranordnung
WO2009044113A3 (en) Semiconductor wafer metrology apparatus and method
CN103534561B (zh) 力传感装置、尤其是电容性的称重单元
WO2011135599A3 (en) Active platform for the landing of an aircraft on an access facility
WO2009055355A3 (en) Improved structure for capacitive balancing of integrated relative humidity sensor
JP2018536160A (ja) ロードセル
WO2007011558A3 (en) Reflector for a double-pass photodetector
WO2011141530A3 (en) A luminescence based sensor
WO2009020069A1 (ja) 静電容量式センサー
WO2013032699A3 (en) Solid state transducers with state detection, and associated systems and methods
WO2012087003A3 (en) Touch panel and method for manufacturing electrode member
CN102374912A (zh) 压力测定器

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 08765449

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 08765449

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: JP