WO2008155241A2 - Dispositif permettant d'usiner une pièce au moyen d'un faisceau laser - Google Patents

Dispositif permettant d'usiner une pièce au moyen d'un faisceau laser Download PDF

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Publication number
WO2008155241A2
WO2008155241A2 PCT/EP2008/057052 EP2008057052W WO2008155241A2 WO 2008155241 A2 WO2008155241 A2 WO 2008155241A2 EP 2008057052 W EP2008057052 W EP 2008057052W WO 2008155241 A2 WO2008155241 A2 WO 2008155241A2
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WO
WIPO (PCT)
Prior art keywords
mirror
laser beam
focusing mirror
focusing
optical
Prior art date
Application number
PCT/EP2008/057052
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German (de)
English (en)
Other versions
WO2008155241A3 (fr
Inventor
Steffen Walter
Original Assignee
Scansonic Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Scansonic Gmbh filed Critical Scansonic Gmbh
Publication of WO2008155241A2 publication Critical patent/WO2008155241A2/fr
Publication of WO2008155241A3 publication Critical patent/WO2008155241A3/fr

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/03—Observing, e.g. monitoring, the workpiece
    • B23K26/032—Observing, e.g. monitoring, the workpiece using optical means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0643—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/0665—Shaping the laser beam, e.g. by masks or multi-focusing by beam condensation on the workpiece, e.g. for focusing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • B23K26/142—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor for the removal of by-products

Definitions

  • the invention relates to a device for processing a workpiece by means of a laser beam according to the preamble of claim 1.
  • the damage threshold of the optical components is a problem which is often further reduced by application-related contamination of the surfaces.
  • laser-induced thermal influences cause the laser focus to change in shape and position.
  • the dependence of the refractive index of all transparent materials on the temperature and the thermal expansion coefficient of importance are described by way of example in: RJ. Tangeider, L.H.J.F. Beckmann, J. Meijer: "Fnfiuence of Temperature Gradients on the Performance of ZnSe-Lenses", EOS / SPIE Conference on Lens and Optica! Systems Design, Berlin, 14.-18. September 1992, SPIE Proceedings vol. 1780th
  • the divergent laser beam emerging from the fiber is usually first collimated and then refocused in order to obtain the best possible combinability of the optical components, in Paraileistrahlabêt is then also a Umienkung, beam splitting or Strahiauskoppiung for observation or analysis purposes possible.
  • the use of transmissive elements has hitherto been customary. Individual applications also used metallic mirrors,
  • cooled mirrors in processing optics is possible and is used in particular in CO 2 laser processing optics, in DE 20 2006 015 539 U1, for example, water-cooled deflecting mirrors for CO 2 and solid-state lasers are proposed.
  • DE 10 2004 007 178 B4 discloses a laser treatment head whose laser beam inlet is formed by a light exit surface of an optical fiber is.
  • the laser processing head contains a collimation mirror and a focusing mirror.
  • the Kollimationsspiege! collimates the laser beam coupled in via the optical fiber and deflects it onto the focusing mirror, which finally focuses the laser beam into the working focus.
  • both the Koilimationstik and the sierspiegei each about an axis of rotation, which is coaxial with a respective optical axis of the incident beam path, wherein the siersspiege!
  • the imaging quality will be very low and the achievable foci will be highly asymmetric due to the small number of Spiegeleiementen and the large deflection angles for optical reasons.
  • transmissive optical elements lead to dispersion, since the refractive index of the materials used is wavelength-dependent.
  • suitable optical glasses By selecting suitable optical glasses, these effects could theoretically be compensated, in practice such glasses are not suitable for use with laser power of several Kitowatt due to their residual absorption, thermal expansion or temperature response. This is particularly true in the context of high power diode lasers, which due to their color coupling to the Power scaling several times lengths that vary up to about 100 nm from each other. Mirrors, however, have no dispersion.
  • Metal mirrors with integrated cooling also have a temperature response due to thermal expansion. This is significantly smaller in the effect on the laser radiation compared to lenses.
  • mirror systems offer fewer degrees of freedom for correcting optical errors.
  • Optical imaging systems with spherical mirrors suitable for material processing are therefore expensive for a very good imaging quality, often unfavorably folded, large and sometimes contain considerable residual errors for the typical fiber-side numerical apertures of about 0.1-0.2. These disadvantages are to be avoided by the invention.
  • the present invention has for its object to provide a reliable, inexpensive device that focuses regardless of Laserieistung, Laserwelienin and temperature emerging from an optical fiber laser radiation with good imaging quality for material processing purposes. This object is achieved by the Merkmaie of claim 1 having device. Advantageous embodiments of the device according to the invention are specified in the subclaims.
  • the device according to the invention for processing a workpiece by means of a laser beam thus comprises an optical housing through which a laser beam path is guided by an optical fiber to a Laserstrahlauslass, attached to the optical housing Lichtieitmaschineability for coupling a laser radiation transmitting optical fiber, arranged in the optical housing collimating mirror and a arranged in the optical housing focusing mirror, wherein the collimating mirror directs the coupled via an optical fiber into the optical housing laser beam to the focusing mirror.
  • the collimating mirror and the focusing mirror each have a mirror surface in the form of an off-axis parabola.
  • the Lichtieitmaschineme is arranged and / or formed such that the center of the end face of the coupled or couplable optical fiber is at or near the focal point of Kollimalss Georgegels, wherein the center of the end face of the optical fiber not more than 15%, preferably not more than 5% of the central radius of curvature of the collimating mirror is spaced from the focal point of the collimating mirror. Accordingly, the focusing mirror focuses the laser beam on or near the focus of the focusing mirror, the laser beam focus being no further than 15%, preferably not more than 5%, of the central radius of curvature of the focusing mirror from the focus of the focusing chip.
  • the focal point of the collimation mirror or focusing mirror lies at a distance of half the central radius of curvature from the vertex of a parabola defining the off-axis paraboloid on the axis of symmetry of the paraboloid.
  • the invention thus provides a reliable, inexpensive realizable device for material processing by means of fiber-coupled high-power laser available, which focuses regardless of the laser power and temperature emanating from an optical fiber laser radiation with good imaging quality for Materiaibearbeitungs- purposes.
  • the device according to the invention also makes it possible, by varying the firing betting of individual elements, to adapt to the requirements of the respective machining process within a modular system.
  • An advantageous embodiment of the device according to the invention is characterized in that the focusing mirror with respect to the incident laser beam path is arranged so that lying in a mirror symmetry plane of the KoliimationsLites individual rays of the incident on the Koilimationsacious laser beam are in a mirror symmetry plane of the focusing mirror and the rotational symmetry axis of the mirror surface of the colimony mirror from the counted order of the points of incidence of the collimated mirrors on the Koilimationsspiegel, beginning with the closest to the rotational symmetry axis of the mirror surface of the collimating mirror, with the counted from the rotational symmetry axis of the mirror surface of the sierspiegels order of impingement of the individual rays on the focusing mirror, starting with the rotational symmetry axis of the mirror surface of the focusing mirror closest impact point matches.
  • optical errors of the imaging mirror system can be completely or almost completely compensated.
  • At least one further optical element for shaping and / or deflection of the laser beam can be arranged in front of the Koilimationstik, after ⁇ ierspiegei or between these Spiegelin.
  • the further optical element for forming and / or deflecting the laser beam can be used in particular as a lens for adapting the overall imaging ratio, as a deformable, adaptive mirror for axial focus shift, as a translationally or rotationally movable mirror in at least one direction for lateral focus shift or as a be formed the intensity distribution of the laser spot influencing element.
  • the mirrors of the device according to the invention are preferably water-cooled. Air cooling is also possible.
  • the deflection angles at the mirrors are in the preferred embodiment 90 degrees, but may also deviate therefrom.
  • the Umlenkwinke! in the range of 0 degrees to 180 degrees, in mirrors with central bore or grazing incidence lie.
  • the focal length of the off-axis paraboloid varies with the same central curvature.
  • the embodiment of the device with deflection angles of 90 degrees allows the use of prismatic optical housing or housing parts, which is advantageous in terms of a modular design of the device.
  • the center of the end face of the optical fiber is preferably located exactly at the focal point of the focusing mirror and the focus center at the focal point of the focusing mirror.
  • the divergent laser beam emerging from the optical fiber strikes the collimation mirror, is deflected and parallelized.
  • the focusing mirror arranged at a distance from it deflects the parallelized laser beam and collects it in focus.
  • the focusing mirror can have an arbitrary angle of rotation about the axis of the laser beam between the mirrors with respect to the collimation mirror.
  • the preferred orientation of the mirrors is such that the beam axis of the laser beam at the fiber exit and the beam axis of the focusing mirror! outgoing laser beam are parallel and have the same beam direction.
  • the arrangement of the mirrors, in which the errors cancel, is unsuitable for most applications because fiber end and focus are on the same side of the processing optics and the accessibility to the workpiece is limited.
  • the compensation effect can also be realized for arrangements with good accessibility.
  • These one or more plane mirrors must be arranged with their deflection directions so that lying in the mirror symmetry plane of the KoilimationsLites beams of the axial beam at the focusing mirror are also in the mirror symmetry plane of the focusing mirror and counted from the rotational symmetry axis of the KoilimationsLites from order of impingement of the beams of the axial bundle on the Koilimationsacious coincides with the counted from the rotational symmetry axis of the focusing mirror from the order of the impact points on the focusing mirror.
  • the compensation also takes place for Umlenkwinkei not equal to 90 degrees when the deflection angle of the paraboloid are the same size.
  • the mirrors and optionally further components For operation in an industrial environment, it is preferable to cool the mirrors and optionally further components, and protective measures such as crossjet and / or optical rinsing, e.g. provided by clean air. Coatings of the mirrors allow easy cleaning. Depending on the process conditions can therefore be dispensed with protective glasses and other thermal influences are avoided.
  • protective measures such as crossjet and / or optical rinsing, e.g. provided by clean air.
  • Figure 1 shows the structure of a Laserbearbeitungsopiik with two Paraboloidspiegefn in uncompensated arrangement, each with 90 degrees of deflection to the Paraboloidspieg ⁇ in.
  • FIG. 2 shows the functional principle of the invention in a simple embodiment with a 90-degree angle of deflection to the paraboioid level
  • FIG. 3 shows the functional principle of the invention in a weathered embodiment with an additional plane mirror for correcting the orientation of the paraboloid mirror towards one another;
  • FIG. 4 shows the operating principle of the invention in a further embodiment with two additional plane mirrors and a few supplementary assemblies
  • Fig. 5 shows the principle of operation of the invention starting from Fig. 3 with
  • Fig. 6 shows the principle of operation of the invention starting from Fig. 4 wherein the plane mirror is replaced by a deformable mirror.
  • FIG. 1 shows the construction of a laser processing optical system with two paraboioid mirrors for imaging an end face 7 of an optical fiber into a focal plane 6.
  • An optical housing 1 contains fixedly connected mirrors 3 and 4 and an optical fiber receiver 2 for coupling a laser radiation transmitting optical fiber.
  • the mirror 3 acts as Kollimalsspiegei, while the mirror 4 serves as sierspiegei.
  • the Kollimalsspiegei 3 parallelizes the emerging from the Faserend constitutional 7 laser beam.
  • the deflection angle 9 are both 90 degrees.
  • the focusing mirror 4 spaced apart from the collimating mirror 3 as shown in FIG. 1 collects the laser beam in laser focus.
  • Kollimalsspiegei 3 and sierspiegei 4 are formed as off-axis paraboloids.
  • the respective rotational symmetry axis of the rotated parabola 12 of the mirror surfaces is shown to clarify the mirror shape.
  • the levels in which the parabolas 12 for both the Koliimationsspiegei 3 and for the focusing mirror 4, describe the planes in which there is a mirror symmetry of the off-axis paraboloid, ideally the center of the end face 7 of the optical fiber is on the rotational symmetry axis 10 and the focal point of the collimating mirror 3 and the center of the focal plane 6 on the rotational symmetry axis 11 and the focal point of the focusing mirror 4.
  • the image of the axial point is diffraction-limited.
  • a recalculation shows, however, that as imaging aberration for the field points at the edge of the fiber end face even at fiber diameters of 100 ⁇ m and fiber-side numerical aperture (NA) of only 0.1, no diffraction-limited image is present at 200 ⁇ m and numerical aperture of 0.15 not negligible astigmatism, coma and tympanic predisposition. That is, the image of the fiber edge is out of focus and the focal plane / image plane 6 is at an angle to the beam axis.
  • the mirror also occurs, depending on the NA, a (not asymmetric Strahlkegei from the Heidelbergsoptäk, which can interfere with an orientation-independent material processing.
  • FIG. 2 shows a first, relatively simple embodiment of a device according to the invention, whose paraboloidal mirrors are arranged such that optical errors of the mirrors are compensated.
  • the device consists of the components optics housing 1, optical fiber receptacle 2 and mounted in the optical housing 1 mirrors 3 and 4.
  • a first mirror with the shape of an off-axis paraboloid serves as a collimation mirror 3 for collimating the laser radiation and a second mirror having the shape of an off-axis paraboloid as the focusing mirror 4 for focusing the laser beam.
  • the center of the end surface 7 of the optical fiber lies on the rotational symmetry axis 10 and the focal point of the collimation mirror 3, so that a deflection angle S 9 at the collimation mirror 3 of 90 degrees results.
  • the laser radiation emerging from the optical fiber at the fiber end surface 7 is thereby deflected and collimated into one of the rotational symmetry axes of the co-illumination mirror 10.
  • This collimated laser beam in turn strikes the focusing mirror 4 at a distance such that the deflection angle 9 at the focusing mirror 4 is also 90 degrees and the laser beam is focused in such a way that the center of the focal plane lies on the rotational symmetry axis and the focal point of the focusing mirror 4.
  • the Strahi ⁇ chtung the laser beam at the Faserend Chemistry 7 and the focus are opposite.
  • By varying the angle of the rotational symmetry axis 10 of the KoHimationsLites 3 to the optical axis of the fiber end face 7 and the angle of the rotational symmetry axis 11 of the focusing mirror 4 to the optical axis of the focal plane 6 and deviating deflection angle 9 are adjustable.
  • the focusing mirror 4 is arranged with respect to the incident beam such that the rays of the axial bundle 8 extending in the mirror symmetry plane of the collimation mirror 3 are also in the mirror symmetry plane of the focusing mirror 4 and those of the rotational symmetry axis 10 of the co-illumination mirror 3 Counted order of the impact points 8a to 8e of the rays on the concave mirror surface of the KoHimationsspiegels 3 coincides with the counted by the rotational symmetry axis 11 of the focusing mirror 4 order of the impact points 8a to 8e of the rays on the concave mirror surface of the focusing mirror 4.
  • the focal lengths of the two mirrors 3 and 4 and their deflection angle 9 are the same.
  • the same sequence of impact points, the same focal length and the same deflection angles are conditions for the complete or almost complete compensation of the optical errors of the paraboloid surfaces. Will a reduction in imaging quality tolerated, one or more of these conditions may be compromised.
  • the correct order also compensates for unequal focal lengths and unequal deflection angles, so that the correct sequence of impact points and thus the correct orientation of the paraboloidal mirrors should be maintained.
  • Fig. 3 shows a further advantageous embodiment of the device according to the invention.
  • the addition of a plane mirror 13 leads to improved accessibility of the machining head to the workpiece.
  • the inventive order and location of the impact points on the respective mirrors with respect to the rotational axis of symmetry and beam axis is also given in this embodiment.
  • the focusing mirror 4 with respect to the incident beam is arranged so that the running in the mirror symmetry plane of the KoilimationsLites 3 beams of the axial fret 8 are also in the mirror symmetry plane of the focusing mirror 4 and counted by the rotational symmetry axis 10 of the KoliimationsLites 3 order of the impact points 8a to 8e of the beams on the Koilimationsapt 3 with the counted from the rotational symmetry axis 11 of the focusing mirror 4 from order of the points of impingement 8a to 8e of the beams on the focusing mirror 4 matches. If the plane mirror 13 deflected the laser beam 5 into the other direction, rotated by 180 degrees with respect to the incident beam, at 90 degrees, the conditions for compensating the optical errors would not exist. The image quality would then be comparable to the arrangement according to FIG. 1.
  • Fig. 4 shows a further advantageous embodiment of the device according to the invention.
  • the addition of a partially transparent plane mirror 14 leads to an arrangement with an extended design; at the same time, a metrological detection of the processing space by means of a sensor device 15 is possible by the partially transparent plane mirror 14.
  • This sensor Direction 15 may consist of one and / or more sensors that detect physical properties of the process or the process environment via the sensor beam path 16.
  • this sensor device may also be a simple observation camera.
  • the sensor device 15 can also be arranged in continuation of the incident laser beam 5 in order to detect properties of the laser radiation. This variant is not shown, in Fig. 4 protective measures or protective devices are also shown schematically.
  • a purging device 18 generates a positive pressure in the interior of the optical housing 1 by means of clean air or another gas, thus reducing the risk of the penetration of smoke and other contaminants.
  • a Crossjet device 17 protects the interior of the optical housing from spatters by a gas jet arranged transversely to the laser beam direction. Alternatively or additionally, as an additional protective measure, an axial gas jet can also take place through a preferably coaxial nozzle.
  • processing optics of the type according to the invention it is possible to achieve laser radiation with very high power after a fiber transmission without or with reduced influences on the beam properties both for welding and soldering processes but also, for example. for coating and cutting.
  • the particular form of compensation for the optical errors of the beam-forming individual elements is particularly advantageous for welding and cutting.
  • optical Abbiidungssch By adding further optical elements, the application possibilities of the basic arrangement can be further increased.
  • optical Abbiidungs thesis can be changed with minimal influence on the temperature and wavelength dependence, the position of the laser spot or laser focus affect both laterally and in the beam direction or adjust the intensity distribution in the laser spot the machining processes.
  • refractive, reflective and / or diffractive beam shaping techniques in optical elements in front of the collimation mirror, behind the focusing mirror and / or in between a multiplicity of permutations and also combinatons are possible, so that only a few are shown below by way of example.
  • FIG. 5 shows by way of example a possible embodiment in which, by adding a weak, thin lens 19 as an optical element after the focusing mirror!
  • the lens may also be arranged in front of the Koilimations- mirror.
  • the additional lenses in front of the Koilimationsspiegel 3 and / or after the focusing mirror 4 are Faserend compounds and / or focus for the off-axis Parabo! Oid mirror surfaces to virtual, lying on the respective rotational symmetry axes points 20. Zur Compensation of the optical errors of the mirror surfaces, the conditions mentioned can be met.
  • the thermal stability of the processing optics with respect to the focus shift is largely achieved by the fact that the transmitting elements have only large focal lengths with respect to the mirrors and the thickness is only slight.
  • the lens 19 is weakly negative and shifts the focus in the beam direction and thus increases the imaging ratio. A positive lens would reduce the imaging ratio.
  • Fig. 6 shows an example of a possible embodiment in which the further optical element is designed as a so-called adaptive mirror.
  • adaptive mirror are constructed so that their surface can be deformed by pressure or other actuators, so that they can be used as a mirror with adjustable curvature for the axial displacement of the laser focus.
  • This arrangement is comparable to that of FIG. 4, wherein the plane mirror 13 is replaced by the deformable mirror 21. With a convex deformation of the mirror surface, the laser beam becomes more divergent; the focus shifts in the beam direction.
  • any other mirror can be arranged for beam shaping.
  • any other mirror can be arranged for beam shaping.
  • DachspiegeJ facet mirror or a mirror array.
  • diffractive elements could be used on a mirror surface instead of the deformable mirror 21.
  • the intensity distribution in Laserspot can be influenced specifi cally, for example a Doppeifocus or Unienfokus or to achieve a particularly homogeneous intensity distribution.

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)
  • Lenses (AREA)
  • Optical Couplings Of Light Guides (AREA)

Abstract

L'invention concerne un dispositif permettant d'usiner une pièce au moyen d'un faisceau laser. Ce dispositif comprend un boîtier optique (1), un logement (2) fixé au boîtier pour l'accouplement d'un guide d'ondes optiques émettant un rayonnement laser, un miroir de collimation (3) et un miroir de focalisation (4). Selon invention, le miroir de collimation (3) et le miroir de focalisation (4) comprennent chacun une surface de miroir présentant la forme d'une parabole hors axe. Le point central de la surface d'extrémité (7) du guide d'ondes optiques se trouve sur le foyer du miroir de collimation (3) ou près de ce foyer. Par conséquent, le miroir de focalisation (4) focalise le faisceau laser (5) sur le foyer du miroir focalisation (4) ou près de ce foyer. De préférence, le miroir de focalisation (4) est agencé de sorte que, les faisceaux individuels du trajet du faisceau laser arrivant sur le miroir de collimation (3) qui sont situés dans un plan de symétrie spéculaire du miroir de collimation (3) se trouvent dans un plan de symétrie spéculaire du miroir de focalisation (4) et que la série des points d'incidence (8a..8e) des faisceaux individuels arrivant sur le miroir de collimation (3), laquelle séries étant décomptée à partir de l'axe de symétrie de rotation (10) du miroir de collimation (3), coïncide avec la série des points d'incidence (8a..8e) des faisceaux individuels arrivant sur le miroir de focalisation (4) décomptée depuis l'axe de symétrie de rotation (11) du miroir de focalisation.
PCT/EP2008/057052 2007-06-18 2008-06-06 Dispositif permettant d'usiner une pièce au moyen d'un faisceau laser WO2008155241A2 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102007028504.5 2007-06-18
DE102007028504A DE102007028504B4 (de) 2007-06-18 2007-06-18 Vorrichtung zum Bearbeiten eines Werkstücks mittels eines Laserstrahls

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WO2008155241A2 true WO2008155241A2 (fr) 2008-12-24
WO2008155241A3 WO2008155241A3 (fr) 2009-02-19

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CN113355492A (zh) * 2021-06-04 2021-09-07 哈尔滨工业大学 一种火炮身管自动激光淬火装置
CN113702007A (zh) * 2021-09-02 2021-11-26 孝感华中精密仪器有限公司 一种离轴光束轴差的标定装置及其标定方法

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DE102009044751B4 (de) 2008-12-04 2014-07-31 Highyag Lasertechnologie Gmbh Spiegel-Objektiv für Laserstrahlung
DE102009047105B4 (de) * 2009-11-25 2015-02-05 Trumpf Laser Gmbh Abbildungsvorrichtung mit reflektiver Fokussieroptik, Laserbearbeitungseinheit und reflektives Fokussierspiegelelement
DE102010028179A1 (de) * 2010-04-26 2011-10-27 Trumpf Werkzeugmaschinen Gmbh + Co. Kg Laserbearbeitungsmaschine mit Prozesslichtüberwachung
DE102011121697B4 (de) * 2011-12-16 2016-04-14 Precitec Kg Laserbearbeitungsvorrichtung zur Bearbeitung eines Werkstücks mittels eines Laserstrahls
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