WO2008154907A2 - Procédé et dispositif de transfert de micro- ou de nanostructures par poinçons de contact - Google Patents
Procédé et dispositif de transfert de micro- ou de nanostructures par poinçons de contact Download PDFInfo
- Publication number
- WO2008154907A2 WO2008154907A2 PCT/DE2008/001002 DE2008001002W WO2008154907A2 WO 2008154907 A2 WO2008154907 A2 WO 2008154907A2 DE 2008001002 W DE2008001002 W DE 2008001002W WO 2008154907 A2 WO2008154907 A2 WO 2008154907A2
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- stamp
- substrate
- structural membrane
- stamp device
- punch
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41F—PRINTING MACHINES OR PRESSES
- B41F17/00—Printing apparatus or machines of special types or for particular purposes, not otherwise provided for
- B41F17/001—Pad printing apparatus or machines
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
Definitions
- the invention relates to a stamping device for transferring substances from a source by means of a finely structured stamping surface of a stamp on a substrate (slide or biochip) by contact stamping.
- WO 2005/061237 A1 discloses a method for producing microstructures on a substrate by stamping.
- the stamp with the fine structures is produced by casting an elastic polymer, for example polydimethylsiloxane (PDMS), on a master structure and, after curing by heat, is released therefrom and fixed to a support. Thereafter, the material to be stamped is applied to the stamp surface and dried. Subsequently, the transfer of the material to be printed on the substrate. For contact formation with the substrate, a pressure on the inside of the stamp surface is generated, which leads to a convex deformation of the stamp and thus to the contact with the substrate (balloon effect).
- PDMS polydimethylsiloxane
- US Pat. No. 6,984,445 B2 discloses a stamp device which, in addition to the device known from WO 2005/061237 A1, contains a positioning mechanism for contacting the substrate.
- the stamping devices used hitherto show problems with regard to the reproducibility of the printing results. This is on the one hand by the mechanical stress after the creation of the stamp, which occurs during the attachment of this on the carrier of the punch device and thereby leads to impairment of the fine structures to be printed explains and on the other by the non-automated processes of transfer of the substance to be printed on the stamp (Inken) and the subsequent drying given.
- stamps with different insets must be used. Since a stamp can always be inked uniformly only with a sample, this means that a multip ⁇ les array prepared by multi-step stamping by means of different stamp who can ⁇ .
- the change between different stamps with different fine structures To produce different structures on the substrate surface is only possible by costly disassembly of the carrier from the positioning mechanism, whereby an efficient flow of transmission is not guaranteed.
- the object of the present invention is to provide a stamping device for the contact printing of fine structures on a substrate, which overcomes the known disadvantages.
- the object is achieved by a method and an apparatus for contact-stamping of micro- or nanostructures on a substrate surface according to the present invention.
- the contact stamping is carried out by a stamping device with a stamp, which consists of a stamp base and a stamp holder.
- the stamp lower part comprises a frame and a structural membrane whose surface is designed as a stamp surface.
- the structural membrane on the pressure side either over the entire surface equipped with micro or nanostructures or is provided with a plurality of adjacent structure fields on which the micro or nanostructures are located.
- a chamber is formed by the structural membrane and the punch holder.
- this chamber is provided with a media connection, via which a gas or a fluid can be introduced in such a way that the structure membrane is deformed convexly.
- the structural membrane is convexly deformed by increasing the internal pressure of the chamber, so that upon placement of the structural membrane, which has been previously occupied by a sample, on the surface to be printed of the substrate by increasingly increasing areal contact an ideal transfer of the micro- and Nanostructures biological substances is guaranteed even if no optimal parallelism of both surfaces is guaranteed or if the stamp is not exactly perpendicular to the surface of the substrate touches.
- the convex deformation meaning a convex deformation of the structural membrane in the direction of the surface of the substrate, can be effected by pneumatic, hydraulic or mechanical means, or combinations thereof.
- Hydraulic or pneumatic means are liquids or gases which are introduced into the chamber via the medium connection and with which an overpressure is generated which leads to the desired convex deformation of the structure membrane.
- a mechanical means for realizing the convex deformation of the structural membrane a stamp / pin or the like. which may also have a convex or spherical surface which is pressed in the chamber against the inner surface of the structural membrane and thus deformed convexly.
- the punch / pin can be driven by a linear drive, which can be a stepper drive or designed as a hydraulic or pneumatic piston drive.
- the stamp for the realization of the contact pressure is u.a. characterized in that the punch bottom part can be released from the punch holder and thus a change of the fine structure applied to the structure membrane can take place.
- the change of the stamp base is carried out automatically by the stamp device, whereby no manual manipulation for loosening and changing the stamp base is necessary and consequently no impairment of the fine structure can arise.
- Another advantage of the automated change of the punch base is the lack of mechanical stress on the structural membrane that would result from re-clamping to the positioning mechanism.
- the combination of punch holder and punch base is preferably pressure-tight in order to subsequently ensure generation of an overpressure in the chamber by supplying liquids or gases through the media connection into the chamber.
- the connection of stamp lower part and Stempelauf- would take place by mechanical means.
- the connection by means of a locking mechanism with locking tabs on the punch receiving and corresponding locking lugs on the punch base. It can be provided that the locking tabs are released by the positioning mechanism of the locking lugs, for example, by the locking mechanism is pressed by the positioning mechanism down, causing the locking lugs slide along a recess in the locking tabs from the recesses, thereby pressing the locking tabs apart and thus the locking tabs release the locking lugs.
- the connection by means of a locking mechanism with locking tabs on the punch receiving and corresponding locking lugs on the punch base.
- the latching tabs are pressed together by the action of the latching lugs and thereby release the latching lugs, so that the punched base can be exchanged.
- a connection of punch holder and punch base can be made by magnetic means.
- the structure structure containing the fine structure is provided in the printing direction of the stamp, ie towards the substrate, the nano / microstructure side, with spaced-apart structure fields, which have been transferred by embossing or molding of a Strukturmaster on the structural membrane and on which the micro- or Nanostructures.
- the nano- or microstructures are arranged on the structural membrane in such a way that they are located in the pressure direction on the structured outer side of the convexly deformable structural membrane.
- the nano / microstructures can also be applied over the entire surface.
- stamp can also be designed over the entire surface without nano or microstructures.
- the structure to be transferred is then determined by the design of the stamp surface, for example in a circular or square shape.
- the structure pattern on the nano / microstructure side can be provided with a coating in the range of a few atomic layers or nanometers (Inkung).
- coating can have antistatic properties, for example, so that the electrostatic properties are compensated in particular by PDMS. These electrostatic properties of the PDMS quickly lead to contamination of the nano / microstructure side.
- the structural membrane containing the fine structure is preferably a pourable and crosslinkable polymer suitable for contract printing such as polydimethylsiloxane (PDMS).
- PDMS polydimethylsiloxane
- other suitable materials such as agarose (a polysaccharide of D-galactose and 3,6-anhydrogalactose) or thermally-switchable hydrogels may be used.
- a permeable structure for the molecules of the substance to be transferred membrane for example, the aforementioned agarose membrane, which are loaded in the chamber for the purpose of convex deformation gas or liquid specifically loaded with the molecules.
- the molecules in the chamber can diffuse through the structural membrane at the moment of contact pressure of the structural membrane and substrate or slide surface. The transfer of the substances is dependent on both the contact time and the molecular size and the composition of the agarose.
- the transfer of the substances to the substrate takes place by changing the temperature, as a result of which the substances stored in the hydrogel are liberated and thus can be transferred to the substrate.
- the contact time of the substances with the substrate is dependent on the duration of the temperature change.
- the temperature can be adjusted by suitable means on the substrate support or on the stamp base. In the case of adjusting the temperature on the stamp base, this is advantageously designed as a heat-conducting metal.
- the structural membrane may also be formed as a crystalline or amorphous solid of silicon, glass or metal, which is tightly attached to the rigid frame.
- the micro- or nanostructures are located here on the later convex to be deformed finely structured outside of the structural membrane.
- the fine structuring can be easily realized by means of photolithographic processes in conjunction with etching techniques.
- Such a structure consisting of a solid structure membrane can be permanently connected to the frame, which can be realized by gluing, welding, seam welding, bonding, anodic bonding or other joining methods.
- the structural membrane consisting of a solid can also be detachably connected to the frame.
- the coating may also consist of a suitable metal which has been applied by sputtering on the nano / microstructure side.
- the coating of the structural membrane may consist of gold. This creates the possibility of using a thiol chemistry with SH compounds which allows the attachment of biomolecules.
- a contacting of the same with the ground potential of the device can be made and thus prevents electrostatic charging of the structural membrane.
- a multiple array is produced by multi-step stamping using different stamps.
- the connection of the stamp receiver with the stamp base is achieved and a change is made between different punches having different fine structures for producing different structures on the substrate surface.
- the solution of the stamp lower part of the punch receiving takes place by the positioning mechanism. This results in a contactless change of the stamp unit.
- the replacement of the stamp base may be performed by other suitable means.
- multiple sources (ink pads) with different materials may be used to insure different punches.
- different fine structures with different materials can be transferred to a substrate by means of contact pressure within a stamping process. This arrangement allows efficient transfer of various micro and nanostructures in a very short time.
- a continuous positioning of the stamp on the substrate surface takes place by appropriate positioning of the substrate support.
- a fine adjustment device is used for positioning.
- the substrate support can be moved in the substrate plane in the X and Y directions.
- the positioning can be done by movement of the punch to the substrate surface.
- an automatic positioning mechanism is used, which allows the exact positioning of the stamp on the substrate surface.
- a suitable reference system can be used for this purpose, and a previously defined pattern of several microstructures or nanostructures can be applied to the same substrate surface.
- a reference mark is applied to the substrate surface, which then serves as a reference for the reference system.
- the marking is carried out with suitable optical means, such as a light spot, which can subsequently be detected via an optical device of the stamping device, such as a camera. Based on this reference, complex patterns of fine structures can be designed at positions defined via the reference system by means of the positioning mechanism.
- This automatic positioning mechanism is particularly advantageous for the design of micro or nano arrays.
- the sample holder is made of suitable transparent materials and allows the use of a microscope for optical monitoring of the current contact stamping process.
- a UV source is used to illuminate the substrate.
- the stamping device may be coupled to a laser source to excite appropriate materials coupled with fluorescent dyes. For example, this can be done by an argon or helium neon laser.
- FIG. 2 (a, b) is a schematic representation of a cross section of the punch before and during the contact printing process
- Fig. 3 is a schematic representation of a stamp device according to the invention.
- the stamp 1 of the stamping device according to the invention is shown in Fig. 1, wherein the punch 1 consists of two parts, namely the punch base 6, consisting of the structural membrane 2 and a frame 3 as a receptacle for the structural membrane. 2 and a punch holder 7 (stamp upper part), which are firmly and tightly connected to each other. For this purpose, located on the punch holder 7, a seal 10.
- the connection of the punch holder 7 with the punch base 6 is made by mechanical or magnetic means.
- the punch holder 7 and the structural membrane 2 form a pressurizable chamber 4, which is provided with a media connection 5 via which a gas or a fluid can be introduced in such a way that the structure membrane 2 is deformed convexly.
- the contact pressure by means of the punch 1 subsequently starting with a central initial contact area 8 in the center of the structure membrane 2 increases concentrically and causes no entrapped air, in intimate contact with the substrate surface to be printed, until finally the structure membrane 2 covers the entire surface with the substrate Substrate surface is in contact.
- the stamp 1 described above forms part of the stamping device according to the invention (Rq. 3), which are clamped with one or more punches 1 in a vertically movable mechanical recording and held in this and alternately on a source 11 (ink pad) for example biological Material (molecules, nanoparticles) is moved. Thereafter, the transfer of the biological material to be printed on the provided with micro- or nanostructures outside 9 of the structural membrane 2 by wetting the outside with the material to be printed. The thus loaded punch 1 is then moved to the drying station 12, where the punch is dried pneumatically.
- a source 11 in example biological Material (molecules, nanoparticles)
- the stamp 1 is moved by a positioning mechanism to a defined position of the substrate surface to be printed, eg a biochip, in such a way that a defined pattern can be generated on the substrate surface and there the molecules or nanoparticles previously applied on the outside 9 of the structure membrane 2 To be stamped.
- a positioning mechanism eg a biochip
- the over the media connection 5 by introducing gas or Josstechnik an overpressure in the chamber 4 is generated and the convexity of the structure described above membrane 2 produced, whereby the stamp 1 is put into the printing mode.
- the punch 1 is moved to the cleaning station 13 of the stamp device, where the structured outer side 9 of the structural membrane 2 is cleaned by means of ultrasound.
- the punch 1 After completion of the cleaning in the ultrasonic bath, the punch 1 is moved back to the drying station 12, where the punch 1 is again pneumatically dried.
- the stamp 1 is available for further printing operations with the same material or another material from another source 11. Furthermore, it is also possible to change the stamp lower part, as a result of which another outside 9 provided with other micro- or nanostructures can be used.
- the structural membrane 2 is formed from agarose, which is permeable to molecules of the substances to be transferred.
- the molecules of the substances to be transferred are transported via the media connection 5 into the chamber 4 and can there pass through the permeable structure membrane 2 and thus wet the fine-structure-carrying outside 9. Due to the distribution equilibrium a uniform wetting of the structural membrane 2 is ensured, whereby reproducible printing results can be achieved.
- the structure membrane is formed by a hydrogel, which was loaded with the substances to be transferred before the start of the contact printing process.
- a thermal circuit of the hydrogel By changing the temperature at the substrate support a thermal circuit of the hydrogel, whereby the stored substances are released from the hydrogel and can be transferred to the substrate.
- renewed temperature change is a closure of the hydrogel, whereby the materials contained therein are stored again. These can be dispensed when the temperature changes again.
- Rq. 4a is an embodiment of the releasable connection of punch holder 7 and punch base 6 is shown.
- two attached to a latching mechanism 19, by spring elements 20 under tension latching tabs 21 each have a latching nose 22 of the punch base 6 from the outside.
- Rq. 4c is carried out by the positioning mechanism lowering the locking mechanism 19, whereby a release of the locking tab 21 from the locking lugs 22 by a sliding movement of the locking lugs 22 along the recesses in the locking tab 23 and consequently in RJL 4d a release of the lower punch part 6 of the punch holder 7 possible is.
- Fig. 4e a new punch base 6 are added.
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- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Nanotechnology (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Mathematical Physics (AREA)
- Theoretical Computer Science (AREA)
- Micromachines (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
Abstract
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE112008001634T DE112008001634A5 (de) | 2007-06-21 | 2008-06-23 | Verfahren und Vorrichtung zur Übertragung von Mikro- oder Nanostrukturen durch Kontaktstempeln |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102007029078.2 | 2007-06-21 | ||
DE102007029078 | 2007-06-21 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2008154907A2 true WO2008154907A2 (fr) | 2008-12-24 |
WO2008154907A3 WO2008154907A3 (fr) | 2009-03-19 |
Family
ID=39767040
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/DE2008/001002 WO2008154907A2 (fr) | 2007-06-21 | 2008-06-23 | Procédé et dispositif de transfert de micro- ou de nanostructures par poinçons de contact |
Country Status (2)
Country | Link |
---|---|
DE (1) | DE112008001634A5 (fr) |
WO (1) | WO2008154907A2 (fr) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2366547A1 (fr) * | 2010-03-16 | 2011-09-21 | Villeroy & Boch AG | Dispositif et procédé de transfert d'images d'une surface contenant des particules de couleur sur un objet en trois dimensions |
Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB187495A (en) * | 1921-11-29 | 1922-10-26 | George Thomas Pritchard | Improvements in or relating to stencil hand stamps |
US4963921A (en) * | 1985-06-24 | 1990-10-16 | Canon Kabushiki Kaisha | Device for holding a mask |
EP1341042A2 (fr) * | 2002-02-22 | 2003-09-03 | ASML Netherlands B.V. | Système et procédé comprenant un couvercle en deux parties destiné à protéger un réticule |
US20040137338A1 (en) * | 2002-09-17 | 2004-07-15 | Canon Kabushiki Kaisha | Mask, exposure apparatus, and exposure method |
US20050139103A1 (en) * | 2003-12-24 | 2005-06-30 | Cracauer Raymond F. | Method and apparatus for micro-contact printing |
US20050284320A1 (en) * | 2003-09-30 | 2005-12-29 | Kabushiki Kaisha Toshiba | Imprint apparatus and method for imprinting |
EP1669196A1 (fr) * | 2004-12-10 | 2006-06-14 | ESSILOR INTERNATIONAL (Compagnie Générale d'Optique) | Tampon pour former un motif, méthode de fabrication dudit tampon et méthode de fabrication d'un objet à l'aide dudit tampon |
WO2006067694A2 (fr) * | 2004-12-23 | 2006-06-29 | Koninklijke Philips Electronics N.V. | Nanofabrication fondee sur le developpement de nanocouches a autoassemblage |
WO2006117745A2 (fr) * | 2005-05-03 | 2006-11-09 | Koninklijke Philips Electronics N.V. | Procede et dispositif de transfert d'un motif d'un tampon sur un substrat |
-
2008
- 2008-06-23 DE DE112008001634T patent/DE112008001634A5/de not_active Ceased
- 2008-06-23 WO PCT/DE2008/001002 patent/WO2008154907A2/fr active Application Filing
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB187495A (en) * | 1921-11-29 | 1922-10-26 | George Thomas Pritchard | Improvements in or relating to stencil hand stamps |
US4963921A (en) * | 1985-06-24 | 1990-10-16 | Canon Kabushiki Kaisha | Device for holding a mask |
EP1341042A2 (fr) * | 2002-02-22 | 2003-09-03 | ASML Netherlands B.V. | Système et procédé comprenant un couvercle en deux parties destiné à protéger un réticule |
US20040137338A1 (en) * | 2002-09-17 | 2004-07-15 | Canon Kabushiki Kaisha | Mask, exposure apparatus, and exposure method |
US20050284320A1 (en) * | 2003-09-30 | 2005-12-29 | Kabushiki Kaisha Toshiba | Imprint apparatus and method for imprinting |
US20050139103A1 (en) * | 2003-12-24 | 2005-06-30 | Cracauer Raymond F. | Method and apparatus for micro-contact printing |
EP1669196A1 (fr) * | 2004-12-10 | 2006-06-14 | ESSILOR INTERNATIONAL (Compagnie Générale d'Optique) | Tampon pour former un motif, méthode de fabrication dudit tampon et méthode de fabrication d'un objet à l'aide dudit tampon |
WO2006067694A2 (fr) * | 2004-12-23 | 2006-06-29 | Koninklijke Philips Electronics N.V. | Nanofabrication fondee sur le developpement de nanocouches a autoassemblage |
WO2006117745A2 (fr) * | 2005-05-03 | 2006-11-09 | Koninklijke Philips Electronics N.V. | Procede et dispositif de transfert d'un motif d'un tampon sur un substrat |
Non-Patent Citations (5)
Title |
---|
CAO TINGBING ET AL: "Fabrication of thin, metallic films along the sidewalls of a topographically patterned stamp and their application in charge printing" SMALL, WILEY VCH, WEINHEIM, DE, Bd. 1, Nr. 12, 28. Oktober 2005 (2005-10-28), Seiten 1191-1195, XP002414949 ISSN: 1613-6810 * |
KLAJN R ET AL: "Multicolour micropatterning of thin films of dry gels" NATURE MATERIALS NATURE PUBLISHING GROUP UK, Bd. 3, Nr. 10, Oktober 2004 (2004-10), Seiten 729-735, XP002499217 ISSN: 1476-1122 * |
LOUNACI ET AL: "Microfluidic device for protein crystallization under controlled humidity" MICROELECTRONIC ENGINEERING, ELSEVIER PUBLISHERS BV., AMSTERDAM, NL, Bd. 84, Nr. 5-8, 6. Mai 2007 (2007-05-06), Seiten 1758-1761, XP022062111 ISSN: 0167-9317 * |
MARTIN B D ET AL: "Direct Protein Microarray Fabrication Using a Hydrogel Stamper" LANGMUIR, ACS, WASHINGTON, DC, US, Bd. 14, Nr. 15, 21. Juli 1998 (1998-07-21), Seiten 3971-3975, XP002200398 ISSN: 0743-7463 * |
STEVENS ET AL: "Direct patterning of mammalian cells onto porous tissue engineering substrates using agarose stamps" BIOMATERIALS, ELSEVIER SCIENCE PUBLISHERS BV., BARKING, GB, Bd. 26, Nr. 36, 1. Dezember 2005 (2005-12-01), Seiten 7636-7641, XP005035485 ISSN: 0142-9612 * |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2366547A1 (fr) * | 2010-03-16 | 2011-09-21 | Villeroy & Boch AG | Dispositif et procédé de transfert d'images d'une surface contenant des particules de couleur sur un objet en trois dimensions |
Also Published As
Publication number | Publication date |
---|---|
DE112008001634A5 (de) | 2010-04-01 |
WO2008154907A3 (fr) | 2009-03-19 |
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