WO2008152702A1 - 鍍金層の研磨方法および磁気記録ヘッドの製造方法 - Google Patents

鍍金層の研磨方法および磁気記録ヘッドの製造方法 Download PDF

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Publication number
WO2008152702A1
WO2008152702A1 PCT/JP2007/061889 JP2007061889W WO2008152702A1 WO 2008152702 A1 WO2008152702 A1 WO 2008152702A1 JP 2007061889 W JP2007061889 W JP 2007061889W WO 2008152702 A1 WO2008152702 A1 WO 2008152702A1
Authority
WO
WIPO (PCT)
Prior art keywords
layer
plating layer
stopper
polishing
recording head
Prior art date
Application number
PCT/JP2007/061889
Other languages
English (en)
French (fr)
Inventor
Kentaro Suzuki
Masanori Tachibana
Tamotsu Yamamoto
Hiroto Takeshita
Original Assignee
Fujitsu Limited
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Limited filed Critical Fujitsu Limited
Priority to PCT/JP2007/061889 priority Critical patent/WO2008152702A1/ja
Publication of WO2008152702A1 publication Critical patent/WO2008152702A1/ja

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3163—Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers
    • G11B5/3169—Working or finishing the interfacing surface of heads, e.g. lapping of heads
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/1278—Structure or manufacture of heads, e.g. inductive specially adapted for magnetisations perpendicular to the surface of the record carrier
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3109—Details
    • G11B5/3116—Shaping of layers, poles or gaps for improving the form of the electrical signal transduced, e.g. for shielding, contour effect, equalizing, side flux fringing, cross talk reduction between heads or between heads and information tracks
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3163—Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/48—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed
    • G11B5/58—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed with provision for moving the head for the purpose of maintaining alignment of the head relative to the record carrier during transducing operation, e.g. to compensate for surface irregularities of the latter or for track following
    • G11B5/60—Fluid-dynamic spacing of heads from record-carriers
    • G11B5/6005—Specially adapted for spacing from a rotating disc using a fluid cushion
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/10—Structure or manufacture of housings or shields for heads
    • G11B5/102—Manufacture of housing

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Magnetic Heads (AREA)

Abstract

　主磁極等の鍍金層の高さを、研磨を用いて正確に設定することの可能な鍍金層の研磨方法、および、それを用いて主磁極の高さを正確に設定することの可能な磁気記録ヘッドの製造方法を提供する。 　基板上にパターニングされた鍍金層８０ａの上面および側面に第１のストッパ層８３を形成する工程と、第１のストッパ層８３上から鍍金層８０ａを覆う、鍍金層８０ａの高さとほぼ同じ層厚の絶縁層８１を形成する工程と、鍍金層８０ａ上を除く絶縁層８１の表面に、第２のストッパ層８６を形成する工程と、第２のストッパ層８６から露出した、鍍金層８０ａ上の絶縁層８１を、第１のストッパ層８３の上部および第２のストッパ層８６と同じ高さにまで平坦化する工程と、鍍金層８０ａ上面の第１のストッパ層８３、および、第２のストッパ層８６を除去する工程と、絶縁層８１および鍍金層８０ａを研磨して平坦化する工程とを含む。  
PCT/JP2007/061889 2007-06-13 2007-06-13 鍍金層の研磨方法および磁気記録ヘッドの製造方法 WO2008152702A1 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PCT/JP2007/061889 WO2008152702A1 (ja) 2007-06-13 2007-06-13 鍍金層の研磨方法および磁気記録ヘッドの製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2007/061889 WO2008152702A1 (ja) 2007-06-13 2007-06-13 鍍金層の研磨方法および磁気記録ヘッドの製造方法

Publications (1)

Publication Number Publication Date
WO2008152702A1 true WO2008152702A1 (ja) 2008-12-18

Family

ID=40129319

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2007/061889 WO2008152702A1 (ja) 2007-06-13 2007-06-13 鍍金層の研磨方法および磁気記録ヘッドの製造方法

Country Status (1)

Country Link
WO (1) WO2008152702A1 (ja)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005038576A (ja) * 2003-06-24 2005-02-10 Tdk Corp 薄膜磁気ヘッドの製造方法
JP2005235316A (ja) * 2004-02-20 2005-09-02 Alps Electric Co Ltd 磁気ヘッド、およびその製造方法
JP2005293693A (ja) * 2004-03-31 2005-10-20 Alps Electric Co Ltd 垂直磁気記録ヘッド及びその製造方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005038576A (ja) * 2003-06-24 2005-02-10 Tdk Corp 薄膜磁気ヘッドの製造方法
JP2005235316A (ja) * 2004-02-20 2005-09-02 Alps Electric Co Ltd 磁気ヘッド、およびその製造方法
JP2005293693A (ja) * 2004-03-31 2005-10-20 Alps Electric Co Ltd 垂直磁気記録ヘッド及びその製造方法

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