WO2008151705A1 - Composant comprenant un élément oscillant - Google Patents

Composant comprenant un élément oscillant Download PDF

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Publication number
WO2008151705A1
WO2008151705A1 PCT/EP2008/003970 EP2008003970W WO2008151705A1 WO 2008151705 A1 WO2008151705 A1 WO 2008151705A1 EP 2008003970 W EP2008003970 W EP 2008003970W WO 2008151705 A1 WO2008151705 A1 WO 2008151705A1
Authority
WO
WIPO (PCT)
Prior art keywords
component according
vibration element
frame
drive device
vibration
Prior art date
Application number
PCT/EP2008/003970
Other languages
German (de)
English (en)
Inventor
Heinrich GRÜGER
Jens Knobbe
Original Assignee
Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. filed Critical Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.
Publication of WO2008151705A1 publication Critical patent/WO2008151705A1/fr

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/101—Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners

Definitions

  • the present invention relates to components having a vibration element, such as those used as two-dimensionally deflectable micromirrors.
  • a variant is the drive via electrostatic forces, which are generated between capacitor plates on the back of the mirror element and counter-electrodes on a correspondingly positioned holder typically on the back of the chip.
  • electrostatic forces which are generated between capacitor plates on the back of the mirror element and counter-electrodes on a correspondingly positioned holder typically on the back of the chip.
  • the deflection in such an arrangement can be both resonant and quasi-static. Disadvantageous are the deflection angles which are severely limited by the counterelectrodes and, in the case of quasi-static deflection, the high voltages for the drive.
  • EP 1123526 Bl Another drive variant, which allows high deflection angle is described in EP 1123526 Bl.
  • a resonant drive is achieved via comb structures on the sides of the scanner mirrors.
  • a disadvantage is that due to the technological boundary conditions, no slow movement of the scanner mirror is possible, so that the superimposition of the two movements does not lead to a line by line scanning of the image or detection area leads. Instead, a Lissajoux figure is described, which reaches different points with different frequencies. This will limit the image quality or resolution.
  • Another drive method uses the thermal actuation of structures of layers of different expansion coefficients. As a result, a mechanical movement is generated. This variant is comparatively slow.
  • One-dimensional scanner mirrors with a resonantly operated variant of this type of drive are described, for example, in US 2005/0063038 A1.
  • An embodiment of the present invention provides a device with a vibration element; a first suspension via which the vibration member is swingably suspended in a first direction; a second suspension via which the vibration member is swingably suspended in a second direction; a first drive device for setting the vibration element into resonant vibration in the first direction; and a second drive device for setting the vibration element into vibration in the second direction based on a thermal deformation, a magnetorestriction or a piezoelectric deformation.
  • Embodiments of the device enable to provide a highly deflectable scanner mirror that is slowly deflected in one direction or axis and deflected much faster in a second direction or second axis.
  • a frequency ratio of 1 to 20 can be named as the minimum, but significantly higher ratios in the range of 1: 500 or even 1: 1000 are possible.
  • scanner mirrors can therefore be provided which enable high deflection angles with moderate voltages in two axes or directions.
  • one axis by means of a resonant drive can be deflected quickly, the other axis by means of a thermal, magnetostrictive or piezoelectric drive slowly.
  • An advantage over known scanner mirrors is the ability to produce images in which scanning is performed line by line.
  • the image resolution is improved in comparison to a purely resonant excitation, since no pixel is approached unnecessarily several times.
  • the electronic effort required to drive correlation between position and light source modulation is significantly reduced.
  • the required ratio of the speeds depends on the number of pixels in the respective directions. With low pixel counts, for example, from a ratio of 1:20 can be expected with advantages, in high-resolution images, this ratio is wider.
  • image acquisition systems or the like can be realized with the solution according to the invention where the image fields are scanned line by line. This also leads to significant improvements in terms of the system overhead in the control and evaluation.
  • Fig. 1 shows a plan view of a first embodiment of a device with a bending spring as a second suspension.
  • FIG. 2 shows an exemplary embodiment according to FIG. 1, wherein the second drive device is based on a thermal deformation.
  • FIG. 3 shows a three-dimensional representation of an exemplary embodiment according to FIG. 2.
  • FIGS. 1 to 3 shows a three-dimensional representation of an embodiment according to FIGS. 1 to 3, in which the second suspension is in a deflected state.
  • Fig. 5 shows a top view of a second embodiment of a component with two bending springs as a second suspension, wherein the second drive device is based on a thermal deformation.
  • Fig. 6 shows a three-dimensional representation of
  • FIG. 7 shows a plan view of a third exemplary embodiment of a component with two torsion springs as a second suspension, wherein the second driving device based on a magnetostriction.
  • Fig. 8 shows a three-dimensional representation of an embodiment of FIG. 7 with additional lever arms.
  • Fig. 9 shows a block diagram of an embodiment of a laser projector.
  • the basic structure of a laser projector using PHg of deflectable or tiltable scanner mirrors in two directions is known.
  • the heart of the projector is the deflection unit.
  • the light of one or more laser light sources is modulated to match the current position of the deflection unit and thus produces pixels of different brightness or color.
  • FIG. 1 shows a plan view of a first exemplary embodiment of a component 100 with a vibration element 1, a frame 4, a first suspension 2a, 2b, via which the vibration element is suspended in the frame 4 swingably, a second suspension 6, via which the frame 4 is swingably suspended from a holder 7, such as a mounted chip, a first drive device for setting the vibration element 1 into a resonant vibration, and a second drive device for deflecting the frame 4 based on a thermal deformation, a magnetostriction or a piezoelectric deformation.
  • the oscillation element 1 is suspended by two torsion springs 2 a, 2 b, wherein the two torsion springs 2 a, 2 b define a torsion axis 10 (see dotted line) around which the oscillation element 1 rotates or is deflected.
  • the frame 4 itself is swingably suspended by the bending spring 6 (see hatched area) so that the frame is moved in the z, y direction, or in other words in the plane passing through the axes z and y is stretched, is deflected.
  • the two torsion springs define a first fast moving direction and the bending springs define a second slow moving direction, wherein the two directions of movement are perpendicular to each other.
  • the corresponding coordinate system x, y, z is shown in FIG.
  • FIG. 2 shows a plan view of an exemplary embodiment according to FIG. 1, in which the bending spring 6 has a meandering structure 8, which is electrically conductive.
  • the region of the spiral spring 6 is delimited as in FIG. 1 by the hatching with respect to the holder 7 or the frame 4.
  • FIG. 3 shows a three-dimensional view of an exemplary embodiment according to FIG. 2.
  • Fig. 4 shows a three-dimensional representation of an embodiment according to FIGS. 1 to 3, wherein the Frame 4 and thus also the vibration element 1 is deflected by the bending spring 6.
  • the deflection of the bending spring 6 and the second suspension 6 can be based for example on a thermal deformation, a magnetostriction or a piezoelectric deformation.
  • FIGS. 2 and 3 show an embodiment in which the frame 4 is deflected based on a thermal deformation, wherein the bending spring 6 is a double-layered membrane, wherein the two layers have different thermal expansion properties, and so depending on the current flow through the meandering structure. 8 expand differently and thus produce a certain deflection of the spring portion 6 depending on the current.
  • FIG. 5 shows an exemplary embodiment of a component 200 with the oscillation element 1, the frame 4, a first suspension 2a, 2b, via which the oscillation element 1 is suspended in the frame 4 in a swingable manner, a second suspension consisting of the beams 5a, 5b and the actuators 6a, 6b, via which the frame 4 is suspended in the holder 7 in a swingable manner, a first drive device for setting the vibration element into a resonant oscillation, and a second drive device for deflecting the frame 4 based on a thermal deformation.
  • the oscillation element 1 is suspended by way of the torsion springs 2 a, 2 b, wherein the torsion springs 2 a, 2 b define a torsion axis 10 about which the oscillation element 1 is deflected or moved.
  • the frame 4 is suspended by means of two bending springs or actuators 6a and 6b so as to be able to deflect the frame 4 in a similar manner as described with reference to FIGS. 1 and 4.
  • the two torsion springs define a first fast direction of movement and the two torsion springs a second Slow direction of movement, the two directions of movement are perpendicular to each other.
  • the exemplary embodiment according to FIG. 5 has two two-layered membranes 6 a, 6 b, which each have an electrically conductive meandering structure 8 a, 8 b around the Frame 4 depending on a current flow through the electrically conductive meander structures 8a, 8b deflect in the second direction of movement.
  • one or both membranes themselves may be electrically conductive and the current passed through the one or both membranes themselves to effect the deflection.
  • the exemplary embodiment according to FIG. 5 thus has two two-layered membranes 6a, 6b instead of one two-layered membrane 6, one of the two-layered membranes 6a, 6b one of the frame webs 5a, 5b of the frame 4 connected to one side of the frame.
  • the two-ply membranes 6a, 6b and the frame webs 5a, 5b form the second suspension.
  • diffraction of the two-layer membranes 6a, 6b causes the frame 4 correspondingly in the y, z plane by corresponding current flow through the meander structures 8a, 8b move while the vibration member 1 can be rotated about the rotation axis 10.
  • FIG. 6 shows a three-dimensional representation of the exemplary embodiment according to FIG. 5.
  • the deflection unit is realized as a mirror such that the actual mirror 1 or the Vibration element 1 is mounted on twistable suspensions 2a, 2b in a frame 4, in turn, for example, against the fixed chip or generally a holder 7, along a second axis which is perpendicular to the first axis of movement 10 (see Figs. 1 and 5) is, or along a second direction of movement, which is perpendicular to the first direction of motion, tilt.
  • the deflection of the mirror 1 takes place, for example, in a resonant capacitive manner via comb structures 3a, 3b at the edge of the mirror surface 1, as described in EP 1123526 B1.
  • This drive mode allows a very fast movement of the mirror, depending on the mirror surface of 10 to 50 kHz, in one axis, namely the first axis 10.
  • the mirror frame is deflected in the second direction (in the y, z plane) by a thermally driven actuator ,
  • This consists of a two-layered membrane 6 and an electrically conductive meandering structure 8.
  • the two layers or layers of the membrane 6 have a different coefficient of thermal expansion and, when the temperature changes, generate a force which is used to change the position.
  • a temperature change and thus a change in position can be adjusted in a targeted manner. Because of the low heat capacity, the deflection takes place in a few milliseconds. Thus, a 35-50 Hz movement can be achieved, which is sufficiently slow for the purpose of deflecting the frame.
  • the drive of the frame can also be done instead of the thermal expansion of a layer structure, as shown in FIGS. 1 to 6, on the magnetic field-induced change in length of an actuator, via the so-called magnetostriction.
  • FIG. 7 shows a plan view of a third exemplary embodiment
  • FIG. 8 shows a three-dimensional view of the exemplary embodiment according to FIG. 7, in which the force is transmitted via additional lever arms 9a, 9b between the actuators 6a and 6b and the holders or holding webs 5a, 5b is coupled.
  • FIGS. 7 and 8 show a component 300 with a vibration element 1, a frame 4, a first suspension 2a, 2b, via which the vibration element 1 is suspended in the frame in a swingable manner, a second suspension 5a, 5b, via which the frame is suspended in an oscillatory manner is, a first drive device 3a, 3b for putting the vibration element 1 in a resonant vibration, and a second drive device 6a, 6b in connection with 9a, 9b for deflecting the frame 4 based on a magnetostriction.
  • the vibration element 1 is in the frame 4 about the torsion axis 10, which is defined by the suspension 2a, 2b moves, and the frame 4 within the bracket 7 via the frame webs 5a, 5b suspended and about a second torsion axis 12 through the Frame webs 5a, 5b is defined, rotated.
  • the first torsion axis 10 is orthogonal to the second torsion axis 12.
  • the magnetic field generating device for example, causes a dependent of the applied magnetic field change in length of the actuators 6a, 6b and thus rotation of the frame 4 is not shown in Figs. 7 and 8.
  • the additional lever arms 9a, 9b are arranged between the holding webs 5a, 5b and the actuators 6a, 6b in order to convert the changes in length of the actuators 6a, 6b into a corresponding torsion or rotation about the second torsion axis 12 (see arrow in FIG. 8th).
  • the actuators 6a, 6b are shown hatched in FIGS. 7 and 8.
  • the vibration member suspended by the first suspension in the frame is vibrated by the first drive means whose frequency is in the resonance frequency range of the first suspension and in the resonance frequency range of the unit of the first suspension and the vibration member, respectively .
  • the second suspension or the second unit of the second suspension, the frame and the first unit has a second resonant frequency.
  • the second drive device is designed not to deflect this second unit at a frequency which is in the range of the second resonance frequency of the second unit, but to deflect at a frequency which is less than the second resonance frequency and, for example, more than 10 times lower as the second resonance frequency.
  • the second drive device or the corresponding operating principle for example based on a thermal deformation, a Magnetostriction or a piezoelectric change, too slow to excite the second unit in the resonant frequency range, or in that it is controlled by other measures so that the second Resonanzfre- frequency is not achieved.
  • Exemplary embodiments of the components can be used, for example, in miniaturized laser projectors.
  • the light is monochrome images of a, in colors such.
  • FIG. 9 shows a block diagram of an exemplary embodiment of an RGB laser projector 900 with a projection module 910, a digital controller 930, which are connected via an interface 940, for example, to a PC (personal computer).
  • the interface may be, for example, a USB (Universal Serial Bus) interface.
  • the projection module 910 comprises a two-dimensional micromirror 920, a blue light laser diode 974 and a red light laser diode 976, a first collimator 982, a second collimator 984 and a third collimator 986, and a first beam splitter 992 and a second beam splitter
  • the first collimator 982 parallelizes the beam path of the green light component of a green laser 972, the second collimator 984 the beam path of the blue light component of the laser diode 974 and the third collimator 986 the beam path of the red component the laser diode 976.
  • the correspondingly modulated red, green and blue light components are projected via the beam splitters 992 and 994 onto the two-dimensional micromirror 920 and deflected from there, for example, such that a line-by-line projection of the image signals received by the PC is achieved ,
  • the digital controller 930 controls the two-dimensional displacement of the micromirror depending on the image signal that the digital controller receives via the interface 940 from, for example, the PC 920. Further, the digital controller 930 controls, via a first laser driver for the green laser 972, as well as the modulation of the green portion of the signal, via a second laser driver 964 the laser diodes 974 for the blue portion of the signal as well as its modulation and over third laser driver 966 the laser diode for the red portion of the signal or its modulation.
  • the digital control can be realized, for example, as an FPGA (Field Programmable Gate Array).
  • the two-dimensional micromirror 920 can be a component, as described above, for example, with reference to FIGS. 1 to 8.
  • the exemplary embodiments of the component or two-dimensional micromirror make it possible to carry out only a very slight movement with the slow axis in one direction. while the fast or high-frequency axis travels an entire line. As a result, a particularly favorable image structure is achieved, which allows a high number of pixels. In addition, image disturbances are suppressed by so-called motion artifacts, since no two-dimensional Lissajoux figure is traversed. The high deflection of the mirror ensures a large field of view at close range.
  • the scanner mirror shown in FIG. 9 is moved, for example, in the thermally driven axis (see FIGS. 1 to 6) at 35 Hz, in the electrically driven axle about 1,000 times faster.
  • three lasers 972, 974, 976 are used for red light (635 nanometers), green light (532 nanometers), and blue light (450 nanometers).
  • the light is electronically modulated by means of the laser drivers 962, 964 and 966, the referencing takes place via the zero position passage of the mirror in the respective axes.
  • the two-dimensional micromirror can, for example, have a diameter of one millimeter and be moved or deflected mechanically in one or both directions by +/- 10 ° from the rest position.
  • the opening angle of the two-dimensional micromirror 920 is for example 40 °.
  • the system achieves, for example, in a first embodiment, a resolution of 640 x 480 pixels in color (VGA - Video Graphics Array), but technically are other computer graphics standards or standards with higher resolutions such.
  • XGA Extended Graphics Array
  • SXGA Super Extended Graphics Array
  • WGA Wide Graphics Array
  • the size of the scanning unit or of the component is for example about 30 x 15 x 15 mm 3.
  • a two-dimensional scanner mirror based on the combination of a frame with electrostatic drive of the frame in quasi-static design and resonant drive of the mirror inside is alternatively possible, but leads to low deflection angles in at least one direction and also electrical influences can not be excluded.
  • the deflection in the second direction of movement or the deflection of the frame regardless of whether the second drive device for deflecting the frame based on a thermal deformation, a magnetostriction or a piezoelectric deformation, in the form of a bending, torsion or a different kind of change of the second suspension take place.
  • Embodiments of the present components and projectors or scanners are not limited to the aforementioned information.
  • spectral imaging systems for spectrally resolved image recognition, so-called “spectral imaging”, can also be made possible.
  • Components for deflecting electromagnetic radiation with at least one at least partially reflecting surface which is characterized in that the deflection in one direction by means of a resonant electrostatic electromagnetic drive quickly and in a second direction by a thermal or magnetorestrictive or piezoelectric principle at least slower by a factor of 1/20.
  • exemplary embodiments of the component may have an additional position sensor for detecting information about the position and / or frequency and / or phase position of the mirror movements.
  • exemplary embodiments for the deflection of electromagnetic radiation may be light in the visible spectral range but also between ultraviolet, visible or infrared.
  • Alternative embodiments include a vibrating element having a surface that is a highly reflective mirror of a layer or a layer stack.
  • Further embodiments have a mirror as a dielectric mirror for the realization of particularly high reflectance.
  • the surface of the vibrating element has diffractive properties.
  • the surface of the vibration element is a reflection grating with or without optimized reflection properties, so-called blaze structures.
  • the surface of the vibrating element has a diffractive structure imaging properties, a so-called Fresnel structure on.
  • the at least partially reflecting surface of the vibration element has wavelength-dependent and / or location-dependent selectively reflecting or partially transparent properties and / or influence on the polarization of the electromagnetic radiation.
  • the reflective surface of the vibration element may also be non-planar.
  • comb structures are used at the edge of the mirror or vibration element for driving in the first, fast movement direction or as the first drive device.
  • the drive in the second, slow direction of movement is achieved thermally by means of a layer stack of at least two materials of different expansion coefficients.
  • the drive in the second, slow direction of movement is achieved by a magnetic field-induced change in length of a material.
  • piezoelectric changes e.g. piezoelectric length, thickness or volume changes or combinations of these are used.
  • a "forward movement” and “backward movement” of the oscillation or a deflection from the rest position and a corresponding return to the rest position in or along the second direction can be uniform or carried out according to other patterns, for example according to a sawtooth pattern.
  • the "forward movement” in or along the second direction may, for example, slow down the lines from top to bottom according to a The ramping of the sawtooth pattern occurs slowly, and the "backward" movement in or along the second direction from bottom to top is faster according to a steep slope of the sawtooth pattern, for example, to quickly return to the top home position before the next image is generated.
  • the frame 4 - and thus also the vibration element 1 - is set in the second direction in a slower vibration, and the vibration element 1 additionally within the frame 4 in a second direction in a faster, resonant oscillation is offset, so the embodiments are not limited thereto. Rather, in alternative embodiments, for example, the frame 4 - and thus the vibration element 1 - are offset in the first direction in the faster, resonant oscillation and the vibration element are additionally offset within the frame in the second direction in a slower vibration.
  • first direction associated with the first vibration and the second direction associated with the second vibration may be perpendicular to each other, but in alternative embodiments, depending on the requirements of the two-dimensional vibration, but also any other angle to each other.
  • embodiments of the components for image generation, image capture can be used and / or used for spectrally resolved image recognition.
  • Embodiments of the present components can also be referred to as two-dimensional scanner mirrors with a combined drive or in English also as a "2D combi drive scanner”.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)

Abstract

L'invention concerne un composant (100; 200; 300) comprenant un élément oscillant (1), une première suspension (2a, 2b), par l'intermédiaire de laquelle l'élément oscillant est suspendu dans une première direction, de manière à pouvoir osciller, une seconde suspension (6; 6a, 6b; 5a, 5b), par l'intermédiaire de laquelle l'élément oscilla nt (1) est suspendu dans une seconde direction, de manière à pouvoir osciller, un premier dispositif d'entraînement (3a, 3b) destiné à faire osciller l'élément oscillant dans une première direction; et un second dispositif d'entraînement (6, 8; 6a, 6b, 8a, 8b; 6a, 6b, 9a, 9b) destiné à faire osciller l'élément oscillant (1) dans la seconde direction, sur la base d'une déformation thermique, une magnétorestriction ou une déformation piézo-électrique.
PCT/EP2008/003970 2007-06-14 2008-05-16 Composant comprenant un élément oscillant WO2008151705A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102007027428A DE102007027428A1 (de) 2007-06-14 2007-06-14 Bauelement mit einem Schwingungselement
DE102007027428.0 2007-06-14

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Publication Number Publication Date
WO2008151705A1 true WO2008151705A1 (fr) 2008-12-18

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Publication number Priority date Publication date Assignee Title
JP6349229B2 (ja) 2014-10-23 2018-06-27 スタンレー電気株式会社 二軸光偏向器及びその製造方法

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EP1201602A2 (fr) * 2000-10-31 2002-05-02 Microsoft Corporation Actionneur thermique à fléchissement de poutre hors-plan
WO2003089957A2 (fr) * 2002-04-17 2003-10-30 M2N Inc. Microactionneur piezoelectrique et son procede de fabrication
WO2005006052A1 (fr) * 2003-07-14 2005-01-20 Koninklijke Philips Electronics N.V. Dispositif de balayage par faisceaux laser
KR100682958B1 (ko) * 2006-01-10 2007-02-15 삼성전자주식회사 2축 마이크로 스캐너

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JPH07335491A (ja) * 1994-06-06 1995-12-22 Murata Mfg Co Ltd 可変容量素子
EP1123526B1 (fr) 1998-10-28 2002-07-24 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Composant micromecanique a corps oscillant
US6629461B2 (en) * 2000-03-24 2003-10-07 Onix Microsystems, Inc. Biased rotatable combdrive actuator methods
US20010051014A1 (en) * 2000-03-24 2001-12-13 Behrang Behin Optical switch employing biased rotatable combdrive devices and methods
US6647164B1 (en) * 2000-10-31 2003-11-11 3M Innovative Properties Company Gimbaled micro-mirror positionable by thermal actuators
US7443569B2 (en) * 2003-04-24 2008-10-28 Jds Uniphase Corporation Micro-electro-mechanical-system two dimensional mirror with articulated suspension structures for high fill factor arrays
FR2859542B1 (fr) 2003-09-08 2005-11-04 Commissariat Energie Atomique Micro-miroir oscillant a actionnement bimorphe

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Publication number Priority date Publication date Assignee Title
EP1201602A2 (fr) * 2000-10-31 2002-05-02 Microsoft Corporation Actionneur thermique à fléchissement de poutre hors-plan
WO2003089957A2 (fr) * 2002-04-17 2003-10-30 M2N Inc. Microactionneur piezoelectrique et son procede de fabrication
WO2005006052A1 (fr) * 2003-07-14 2005-01-20 Koninklijke Philips Electronics N.V. Dispositif de balayage par faisceaux laser
KR100682958B1 (ko) * 2006-01-10 2007-02-15 삼성전자주식회사 2축 마이크로 스캐너
EP1806613A1 (fr) * 2006-01-10 2007-07-11 Samsung Electronics Co., Ltd. Lecteur optique avec micro à deux axes

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