WO2008149972A1 - 水素センサー、及びその製造方法 - Google Patents

水素センサー、及びその製造方法 Download PDF

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Publication number
WO2008149972A1
WO2008149972A1 PCT/JP2008/060438 JP2008060438W WO2008149972A1 WO 2008149972 A1 WO2008149972 A1 WO 2008149972A1 JP 2008060438 W JP2008060438 W JP 2008060438W WO 2008149972 A1 WO2008149972 A1 WO 2008149972A1
Authority
WO
WIPO (PCT)
Prior art keywords
manufacturing
hydrogen sensor
same
substrate
hydrogen
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2008/060438
Other languages
English (en)
French (fr)
Inventor
Katsuhiko Fukui
Mikio Maeda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mikuni Corp
Original Assignee
Mikuni Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mikuni Corp filed Critical Mikuni Corp
Priority to JP2009517906A priority Critical patent/JP5052607B2/ja
Publication of WO2008149972A1 publication Critical patent/WO2008149972A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004—Gaseous mixtures, e.g. polluted air
    • G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
    • G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
    • G01N33/0036—General constructional details of gas analysers, e.g. portable test equipment concerning the detector specially adapted to detect a particular component
    • G01N33/005—H2

Landscapes

  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Medicinal Chemistry (AREA)
  • Food Science & Technology (AREA)
  • Combustion & Propulsion (AREA)
  • Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)

Abstract

　本発明により、基板２と、該基２板上に形成された希土類金属層６に水素透過性金属８を微細分散させた複合検知膜４と、該複合検知膜４上に形成されたセラミックス材料１５中に水素透過性金属粒子１３を分散してなる保護膜１０とを有することを特徴とする水素センサーが開示される。
PCT/JP2008/060438 2007-06-08 2008-06-06 水素センサー、及びその製造方法 Ceased WO2008149972A1 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009517906A JP5052607B2 (ja) 2007-06-08 2008-06-06 水素センサー、及びその製造方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-153153 2007-06-08
JP2007153153 2007-06-08

Publications (1)

Publication Number Publication Date
WO2008149972A1 true WO2008149972A1 (ja) 2008-12-11

Family

ID=40093776

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/060438 Ceased WO2008149972A1 (ja) 2007-06-08 2008-06-06 水素センサー、及びその製造方法

Country Status (2)

Country Link
JP (1) JP5052607B2 (ja)
WO (1) WO2008149972A1 (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010210468A (ja) * 2009-03-11 2010-09-24 Mikuni Corp 水素センサ及びその製造方法
JP2015197343A (ja) * 2014-03-31 2015-11-09 国立大学法人岩手大学 水素センサ
JP2022012739A (ja) * 2020-07-02 2022-01-17 パナソニックＩｐマネジメント株式会社 ガスセンサ装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3732076A (en) * 1971-06-21 1973-05-08 Mc Donnell Douglas Corp Rare earth hydrogen detector
JP2002535651A (ja) * 1999-01-15 2002-10-22 アドバンスド．テクノロジー．マテリアルス．インコーポレイテッド 微細加工薄膜水素ガスセンサーおよびその製造方法および使用方法
JP2004519683A (ja) * 2001-04-06 2004-07-02 アドバンスド．テクノロジー．マテリアルス．インコーポレイテッド Ｈ２、ｎｈ３及び硫黄含有ガスを検知する微細加工薄膜センサーアレイ、並びにその製造及び使用方法
JP2005274559A (ja) * 2004-02-27 2005-10-06 Mikuni Corp 水素センサー及びその製造方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3732076A (en) * 1971-06-21 1973-05-08 Mc Donnell Douglas Corp Rare earth hydrogen detector
JP2002535651A (ja) * 1999-01-15 2002-10-22 アドバンスド．テクノロジー．マテリアルス．インコーポレイテッド 微細加工薄膜水素ガスセンサーおよびその製造方法および使用方法
JP2004519683A (ja) * 2001-04-06 2004-07-02 アドバンスド．テクノロジー．マテリアルス．インコーポレイテッド Ｈ２、ｎｈ３及び硫黄含有ガスを検知する微細加工薄膜センサーアレイ、並びにその製造及び使用方法
JP2005274559A (ja) * 2004-02-27 2005-10-06 Mikuni Corp 水素センサー及びその製造方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010210468A (ja) * 2009-03-11 2010-09-24 Mikuni Corp 水素センサ及びその製造方法
JP2015197343A (ja) * 2014-03-31 2015-11-09 国立大学法人岩手大学 水素センサ
JP2022012739A (ja) * 2020-07-02 2022-01-17 パナソニックＩｐマネジメント株式会社 ガスセンサ装置
JP7486123B2 (ja) 2020-07-02 2024-05-17 パナソニックＩｐマネジメント株式会社 ガスセンサ装置

Also Published As

Publication number Publication date
JPWO2008149972A1 (ja) 2010-08-26
JP5052607B2 (ja) 2012-10-17

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