WO2008143259A1 - スリットコータ - Google Patents
スリットコータ Download PDFInfo
- Publication number
- WO2008143259A1 WO2008143259A1 PCT/JP2008/059247 JP2008059247W WO2008143259A1 WO 2008143259 A1 WO2008143259 A1 WO 2008143259A1 JP 2008059247 W JP2008059247 W JP 2008059247W WO 2008143259 A1 WO2008143259 A1 WO 2008143259A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- transfer
- work
- transfer path
- slit coater
- transferring
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
- B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
- B05C5/0254—Coating heads with slot-shaped outlet
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
- B65G49/064—Transporting devices for sheet glass in a horizontal position
- B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Coating Apparatus (AREA)
- Manipulator (AREA)
Abstract
ワーク受け渡し用の接触式搬送ロボットアームを用いることなく、一連の製造工程における搬送経路上もしくは搬送経路に隣接して表面処理工程を行うことができるスリットコータを提供する。 ワークWの搬送経路の一部を構成する浮上搬送部兼表面処理部としての浮上搬送フレーム102にワークWが直接搬送されるため、ワークWの受け渡し用の接触式搬送ロボットアームを用いることなく、一連の製造工程における搬送経路上もしくは搬送経路に隣接して表面処理工程を行う。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007-135980 | 2007-05-22 | ||
JP2007135980A JP2008289966A (ja) | 2007-05-22 | 2007-05-22 | スリットコータ |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2008143259A1 true WO2008143259A1 (ja) | 2008-11-27 |
Family
ID=40031955
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2008/059247 WO2008143259A1 (ja) | 2007-05-22 | 2008-05-20 | スリットコータ |
Country Status (2)
Country | Link |
---|---|
JP (1) | JP2008289966A (ja) |
WO (1) | WO2008143259A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113365741A (zh) * | 2019-02-25 | 2021-09-07 | 东丽工程株式会社 | 涂布装置 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108480140A (zh) * | 2018-05-30 | 2018-09-04 | 青岛北洋天青数联智能股份有限公司 | 干衣机门体涂胶设备及其涂胶工艺 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05198657A (ja) * | 1992-01-23 | 1993-08-06 | Hitachi Ltd | 基板搬送装置 |
JP2002346463A (ja) * | 2001-05-24 | 2002-12-03 | Toppan Printing Co Ltd | 単板塗布装置 |
JP2003037145A (ja) * | 2001-07-23 | 2003-02-07 | Nec Kansai Ltd | ウエハ搬送装置 |
WO2006003876A1 (ja) * | 2004-06-30 | 2006-01-12 | Hirata Corporation | 基板塗布装置 |
JP2006281091A (ja) * | 2005-03-31 | 2006-10-19 | Toray Eng Co Ltd | 塗布装置 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI226303B (en) * | 2002-04-18 | 2005-01-11 | Olympus Corp | Substrate carrying device |
JP2006186251A (ja) * | 2004-12-28 | 2006-07-13 | Kumamoto Technology & Industry Foundation | 塗布装置 |
-
2007
- 2007-05-22 JP JP2007135980A patent/JP2008289966A/ja active Pending
-
2008
- 2008-05-20 WO PCT/JP2008/059247 patent/WO2008143259A1/ja active Application Filing
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05198657A (ja) * | 1992-01-23 | 1993-08-06 | Hitachi Ltd | 基板搬送装置 |
JP2002346463A (ja) * | 2001-05-24 | 2002-12-03 | Toppan Printing Co Ltd | 単板塗布装置 |
JP2003037145A (ja) * | 2001-07-23 | 2003-02-07 | Nec Kansai Ltd | ウエハ搬送装置 |
WO2006003876A1 (ja) * | 2004-06-30 | 2006-01-12 | Hirata Corporation | 基板塗布装置 |
JP2006281091A (ja) * | 2005-03-31 | 2006-10-19 | Toray Eng Co Ltd | 塗布装置 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113365741A (zh) * | 2019-02-25 | 2021-09-07 | 东丽工程株式会社 | 涂布装置 |
Also Published As
Publication number | Publication date |
---|---|
JP2008289966A (ja) | 2008-12-04 |
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