WO2008117082A1 - Pompe à vide - Google Patents

Pompe à vide Download PDF

Info

Publication number
WO2008117082A1
WO2008117082A1 PCT/GB2008/050128 GB2008050128W WO2008117082A1 WO 2008117082 A1 WO2008117082 A1 WO 2008117082A1 GB 2008050128 W GB2008050128 W GB 2008050128W WO 2008117082 A1 WO2008117082 A1 WO 2008117082A1
Authority
WO
WIPO (PCT)
Prior art keywords
pump
component
rotor
simo
ductile iron
Prior art date
Application number
PCT/GB2008/050128
Other languages
English (en)
Inventor
Emmanuel Uzoma Okoroafor
Original Assignee
Edwards Limited
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edwards Limited filed Critical Edwards Limited
Priority to EP08709648A priority Critical patent/EP2126361A1/fr
Priority to JP2010500363A priority patent/JP2010522843A/ja
Priority to US12/530,601 priority patent/US20100178187A1/en
Publication of WO2008117082A1 publication Critical patent/WO2008117082A1/fr

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/02—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/02—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
    • F04C18/0207—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form
    • F04C18/0215—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form where only one member is moving
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/123—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially or approximately radially from the rotor body extending tooth-like elements, co-operating with recesses in the other rotor, e.g. one tooth
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05C—INDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
    • F05C2201/00—Metals
    • F05C2201/04—Heavy metals
    • F05C2201/0433—Iron group; Ferrous alloys, e.g. steel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05C—INDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
    • F05C2201/00—Metals
    • F05C2201/04—Heavy metals
    • F05C2201/0433—Iron group; Ferrous alloys, e.g. steel
    • F05C2201/0436—Iron
    • F05C2201/0439—Cast iron
    • F05C2201/0442—Spheroidal graphite cast iron, e.g. nodular iron, ductile iron
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05C—INDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
    • F05C2201/00—Metals
    • F05C2201/90—Alloys not otherwise provided for

Definitions

  • This invention relates to a dry vacuum pump.
  • Dry vacuum pumps are widely used in industrial processes to provide a clean and/or low -pressure environment for the manufacture of products. Applications include the pharmaceutical, semiconductor and flat panel manufacturing industries. Such pumps include an essentially dry (or oil free) pumping mechanism, but generally also include some components, such as bearings and transmission gears, for driving the pumping mechanism that require lubrication in order to be effective. Examples of dry pumps include Roots, Northey (or "claw"), screw and scroll pumps. Dry pumps incorporating Roots and/or Northey rotor components are commonly multi-stage positive displacement pumps comprising a stator component defining a plurality of pumping chambers each housing a respective pair of intermeshing rotor components. The rotor components are located on contra-rotating shafts, and may have the same type of profile in each chamber or the profile may change from chamber to chamber.
  • Iron castings have for a long time been used in the manufacture of stator and rotor components for dry vacuum pumps.
  • relatively corrosive gases such as chlorine, boron trichloride, hydrogen bromide, fluorine and chlorine trifluoride
  • Such corrosion can lead to equipment failure, leakage of process gases and possible process contamination, in addition to the costs associated with the replacement of the pump or the corroded parts and consequential process downtime.
  • the present invention provides at least one dry vacuum pump stator component, wherein the stator component is formed from silicon-molybdenum (SiMo) ductile iron alloy.
  • the present invention also provides at least one dry vacuum pump rotor component, wherein the rotor component is formed from silicon-molybdenum (SiMo) ductile iron alloy.
  • the present invention also provides a dry vacuum pump comprising a stator component and at least one rotor component, wherein the stator component and/or said at least one rotor component are formed from silicon-molybdenum (SiMo) ductile iron alloy.
  • SiMo silicon-molybdenum
  • the alloy may contain silicon in an amount from about 3.5 to about 5 wt %.
  • the alloy may contain molybdenum in an amount from about 0.4 to about 1 wt %.
  • the stator component may house first and second intermeshing rotor components adapted for counter-rotation within the stator component.
  • the rotor components have a Roots profile, although they could have a Northey or screw profile as required.
  • the pump may be in the form of a multi-stage pump in which the stator component defines a plurality of interconnected pumping chambers arranged in series and each housing respective rotor components formed from SiMo ductile iron alloy.
  • the intermeshing rotor components may be located on respective shafts, with the pump comprising a gear assembly for transmitting torque from one shaft to another, with at least one gear of the gear assembly preferably being formed from SiMo ductile iron alloy.
  • the pump may be in the form of a scroll pump in which the stator component comprises a fixed scroll member having an end plate with a first spiral wrap extending therefrom, and said at least one rotor component comprises an orbital scroll member having an end plate with a second spiral wrap extending therefrom to intermesh with the first spiral wrap.
  • the scroll members is preferably formed from SiMo iron alloy.
  • Figure 1 is a cross-section through a multi-stage dry vacuum pump
  • Figure 2 is a view along line A-A in Figure 1.
  • a multi-stage dry vacuum pump 10 comprises a stator component 12, preferably formed from silicon-molybdenum (SiMo) ductile iron alloy, having a series of walls that define a plurality of pumping chambers 14, 16, 18, 20, 22.
  • An inlet conduit 24 for conveying gas to be pumped to the inlet pumping chamber 14, and an exhaust conduit 26 for exhausting pumped gas from the exhaust pumping chamber 22, are also formed in the stator 12.
  • Passages 28, 30, 32 and 34 formed in the stator 12 connect the pumping chambers 14, 16, 18, 20, 22 in series.
  • the stator 12 houses a first shaft 36 and, spaced therefrom and parallel thereto, a second shaft 38. Bearings 40 for supporting the shafts 36, 38 are provided in the end plates 42, 44 of the stator 12.
  • One of the shafts 36 is connected to a drive motor 46, the shafts being coupled together by means of timing gears 47 so that in use the shafts 36,38 rotate at the same speed but in opposite directions, as indicated by arrows 48 and 50 in Figure 2.
  • a gear box 52 attached to the side of the pump 10 contains oil 54 for lubricating the timing gears 47.
  • the timing gears 47 may be formed from SiMo ductile iron alloy.
  • the shafts 36, 38 support respective rotor components 56, 58, which may also be formed from SiMo ductile iron alloy.
  • the rotors 56, 58 have a Roots-type profile within each pumping chamber, although a mixture of Roots and Northey-type profiles may be provided within the pump 10.
  • the rotors 56, 58 are located in each pumping chamber relative to an internal surface of the stator 12 such that the rotors 56, 58 can act in an intermeshing manner known per se.
  • gas is urged into the pump 10 through the inlet conduit 24 and passes into the inlet pumping chamber 14.
  • the gas is compressed by the rotors 56, 58 located within the inlet pumping chamber 14, and is fed by passage 28 into the next pumping chamber 16.
  • the gas fed in the pumping chamber 16 is similarly compressed by the rotors 56, 58 therein, and fed by the passage 30 to the next pumping chamber 18. Similar gas compressions take place in the pumping chambers 18, 20 and 22, with the pumped gas finally being exhaust from the pump 10 through exhaust conduit 26.
  • the SiMo ductile iron alloy preferably contains silicon from about 3.5 to about 5 wt %, and/or molybdenum in an amount from about 0.4 to about 1 wt %.
  • SiMo ductile iron alloy to manufacture the stator component 12 and/or the rotor components 56, 58 of the pump 10 makes the pump 10 particularly suitable for pumping corrosive gases such as chlorine, boron trichloride, hydrogen bromide, fluorine and chlorine trifluoride.
  • SiMo ductile iron alloy has superior hardness, specific strength ratio and F 2 corrosion susceptibility. This can enable the stator and rotor components, and the timing gears, to have relatively high wear and corrosion resistance with reduced component weight and costs for equivalent or improved performances.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Abstract

L'invention concerne une pompe à vide sèche qui comprend un élément stator et au moins un élément rotor. Pour améliorer la tolérance de la pompe aux gaz corrosifs traversant celle-ci, l'élément stator et/ou le(s) élément(s) rotor sont formés à partir de fonte ductile au silicium-molybdène (SiMo).
PCT/GB2008/050128 2007-03-28 2008-02-26 Pompe à vide WO2008117082A1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
EP08709648A EP2126361A1 (fr) 2007-03-28 2008-02-26 Pompe à vide
JP2010500363A JP2010522843A (ja) 2007-03-28 2008-02-26 真空ポンプ
US12/530,601 US20100178187A1 (en) 2007-03-28 2008-02-26 Vacuum pump

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB0705971.0 2007-03-28
GBGB0705971.0A GB0705971D0 (en) 2007-03-28 2007-03-28 Vacuum pump

Publications (1)

Publication Number Publication Date
WO2008117082A1 true WO2008117082A1 (fr) 2008-10-02

Family

ID=38050354

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/GB2008/050128 WO2008117082A1 (fr) 2007-03-28 2008-02-26 Pompe à vide

Country Status (6)

Country Link
US (1) US20100178187A1 (fr)
EP (1) EP2126361A1 (fr)
JP (1) JP2010522843A (fr)
KR (1) KR20100014610A (fr)
GB (1) GB0705971D0 (fr)
WO (1) WO2008117082A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010125368A3 (fr) * 2009-04-29 2010-12-23 Edwards Limited Pompe à vide

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6472653B2 (ja) * 2014-03-17 2019-02-20 株式会社荏原製作所 除害機能付真空ポンプ
DE202017003212U1 (de) * 2017-06-17 2018-09-18 Leybold Gmbh Mehrstufige Wälzkolbenpumpe

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5277562A (en) * 1991-09-17 1994-01-11 Matsushita Electric Industrial Co., Ltd. Scroll fluid machine and producing method for the same
EP1519045A2 (fr) * 2003-09-25 2005-03-30 Aisin Seiki Kabushiki Kaisha Pompe à vide multi-étagée avec compression à sec

Family Cites Families (13)

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Publication number Priority date Publication date Assignee Title
US4432812A (en) * 1980-04-21 1984-02-21 Caterpillar Tractor Co. Drive train gear of lower bainite alloy steel
US20020150481A1 (en) * 1996-11-01 2002-10-17 Medis El Ltd. Toroidal compressor
JP3831115B2 (ja) * 1998-04-06 2006-10-11 大晃機械工業株式会社 ドライ真空ポンプ
EP1061260A1 (fr) * 1999-05-18 2000-12-20 Sterling Fluid Systems (Germany) GmbH Machine à déplacement positif pour des fluides compressibles
US6508639B2 (en) * 2000-05-26 2003-01-21 Industrial Technology Research Institute Combination double screw rotor assembly
DE20013338U1 (de) * 2000-08-02 2000-12-28 Rietschle Werner Gmbh & Co Kg Verdichter
JP3936849B2 (ja) * 2001-05-16 2007-06-27 スズキ株式会社 フェライト系球状黒鉛鋳鉄及びこれを用いた排気系部品
US6638040B2 (en) * 2001-12-31 2003-10-28 Industrial Technology Research Institute Dry vacuum pump
US6705848B2 (en) * 2002-01-24 2004-03-16 Copeland Corporation Powder metal scrolls
JP2003343469A (ja) * 2002-03-20 2003-12-03 Toyota Industries Corp 真空ポンプ
JP2004293377A (ja) * 2003-03-26 2004-10-21 Aisin Seiki Co Ltd 多段式ドライポンプ
ATE395515T1 (de) * 2004-10-01 2008-05-15 Lot Vacuum Co Ltd Mehrstufige trockenverdichtende vakuumpumpe mit einem roots-rotor und einem schraubenrotor
GB0518995D0 (en) * 2005-09-16 2005-10-26 Boc Group Plc Vacuum pump

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5277562A (en) * 1991-09-17 1994-01-11 Matsushita Electric Industrial Co., Ltd. Scroll fluid machine and producing method for the same
EP1519045A2 (fr) * 2003-09-25 2005-03-30 Aisin Seiki Kabushiki Kaisha Pompe à vide multi-étagée avec compression à sec

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
"Ductile Iron Data for Design Engineers (Section V)- Alloy ductile irons", 1 January 1990 (1990-01-01), Montreal, Canada, XP002489766, Retrieved from the Internet <URL:http://www.ductile.org/didata/pdf/data5.pdf> [retrieved on 20080724] *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010125368A3 (fr) * 2009-04-29 2010-12-23 Edwards Limited Pompe à vide

Also Published As

Publication number Publication date
EP2126361A1 (fr) 2009-12-02
KR20100014610A (ko) 2010-02-10
JP2010522843A (ja) 2010-07-08
GB0705971D0 (en) 2007-05-09
US20100178187A1 (en) 2010-07-15

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