WO2008110721A3 - Systeme de metrologie optique - Google Patents

Systeme de metrologie optique Download PDF

Info

Publication number
WO2008110721A3
WO2008110721A3 PCT/FR2008/050178 FR2008050178W WO2008110721A3 WO 2008110721 A3 WO2008110721 A3 WO 2008110721A3 FR 2008050178 W FR2008050178 W FR 2008050178W WO 2008110721 A3 WO2008110721 A3 WO 2008110721A3
Authority
WO
WIPO (PCT)
Prior art keywords
slot
beams
metrology system
optical metrology
reference position
Prior art date
Application number
PCT/FR2008/050178
Other languages
English (en)
Other versions
WO2008110721A2 (fr
Inventor
Patrick Juncar
Darine Haddad
Gerard Geneves
Original Assignee
Nat De Metrologie Et D Essais
Conservatoire Nat Arts
Patrick Juncar
Darine Haddad
Gerard Geneves
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nat De Metrologie Et D Essais, Conservatoire Nat Arts, Patrick Juncar, Darine Haddad, Gerard Geneves filed Critical Nat De Metrologie Et D Essais
Priority to JP2009552250A priority Critical patent/JP2010520994A/ja
Priority to CA002680015A priority patent/CA2680015A1/fr
Priority to AU2008224807A priority patent/AU2008224807A1/en
Priority to US12/530,258 priority patent/US20100149552A1/en
Priority to EP08762037A priority patent/EP2132522A2/fr
Publication of WO2008110721A2 publication Critical patent/WO2008110721A2/fr
Publication of WO2008110721A3 publication Critical patent/WO2008110721A3/fr

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/342—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells the sensed object being the obturating part

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

Dispositif de positionnement d'un objet par rapport à une position de référence, caractérisé par le fait qu' il comprend un laser (1), associé à un modulateur acousto-optique (3) pour émettre au moins deux faisceaux lasers parallèles et modulés en opposition de phase, lesdits faisceaux étant focalisés sur une fente (F) solidaire de l'objet (OBJ) à positionner, le grand coté de ladite fente (F) étant perpendiculaire à la direction de positionnement, et une photodiode (13) adaptée pour collecter les faisceaux issus de la fente (F) et associée à un amplificateur à détection synchrone (9) pour délivrer un signal traduisant la position de la fente (F) par rapport à la position de référence.
PCT/FR2008/050178 2007-03-09 2008-02-05 Systeme de metrologie optique WO2008110721A2 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2009552250A JP2010520994A (ja) 2007-03-09 2008-02-05 光学計測システム
CA002680015A CA2680015A1 (fr) 2007-03-09 2008-02-05 Systeme de metrologie optique
AU2008224807A AU2008224807A1 (en) 2007-03-09 2008-02-05 Optical metrology system
US12/530,258 US20100149552A1 (en) 2007-03-09 2008-02-05 Optical metrology system
EP08762037A EP2132522A2 (fr) 2007-03-09 2008-02-05 Systeme de metrologie optique

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR0753748A FR2913492B1 (fr) 2007-03-09 2007-03-09 Systeme de metrologie optique
FR0753748 2007-03-09

Publications (2)

Publication Number Publication Date
WO2008110721A2 WO2008110721A2 (fr) 2008-09-18
WO2008110721A3 true WO2008110721A3 (fr) 2008-11-27

Family

ID=38510447

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/FR2008/050178 WO2008110721A2 (fr) 2007-03-09 2008-02-05 Systeme de metrologie optique

Country Status (8)

Country Link
US (1) US20100149552A1 (fr)
EP (1) EP2132522A2 (fr)
JP (1) JP2010520994A (fr)
KR (1) KR20090122239A (fr)
AU (1) AU2008224807A1 (fr)
CA (1) CA2680015A1 (fr)
FR (1) FR2913492B1 (fr)
WO (1) WO2008110721A2 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102680402B (zh) * 2011-11-15 2015-08-19 北京遥测技术研究所 石英音叉增强型光声谱气体池
CN103795367B (zh) * 2014-01-14 2016-06-01 北京航天时代光电科技有限公司 一种增强型石英音叉的封装装置

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3795449A (en) * 1973-01-11 1974-03-05 Lockheed Missiles Space Cutter monitor
US5657125A (en) * 1992-06-30 1997-08-12 Canon Kabushiki Kaisha Apparatus including a light-detecting element having a photo-electric conversion surface and an integral light blocking member
EP0990870A1 (fr) * 1998-04-17 2000-04-05 Mitsubishi Denki Kabushiki Kaisha Detecteur de position
GB2357334A (en) * 1999-12-15 2001-06-20 Peter Bryan Webster Opto-electronic position sensor
US6496273B1 (en) * 1999-05-05 2002-12-17 Renishaw Plc Position determining apparatus for coordinate positioning machine

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4834111A (en) * 1987-01-12 1989-05-30 The Trustees Of Columbia University In The City Of New York Heterodyne interferometer
KR940007618B1 (ko) * 1991-03-26 1994-08-22 가부시키가이샤 도시바 주사광학 장치
JP2792315B2 (ja) * 1992-03-10 1998-09-03 松下電器産業株式会社 複屈折測定装置
US5680111A (en) * 1994-02-05 1997-10-21 Baxter International Inc. Dual sensor air-in-line detector
US5867261A (en) * 1997-04-28 1999-02-02 International Business Machines Corporation Surface inspection tool
US6947131B2 (en) * 2002-05-07 2005-09-20 Chf Solutions, Inc. Blood leak detector for extracorporeal treatment system
WO2003104767A2 (fr) * 2002-06-10 2003-12-18 William Marsh Rice University Spectroscopie photoacoustique renforcee par du quartz
JP2005069900A (ja) * 2003-08-25 2005-03-17 Seiko Epson Corp 集光点位置検出方法、集光点位置検出装置、液滴観測方法、液滴観測装置および液滴吐出装置
WO2006092751A1 (fr) * 2005-03-04 2006-09-08 Koninklijke Philips Electronics N.V. Detecteur spectroscopique photo-acoustique et systeme

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3795449A (en) * 1973-01-11 1974-03-05 Lockheed Missiles Space Cutter monitor
US5657125A (en) * 1992-06-30 1997-08-12 Canon Kabushiki Kaisha Apparatus including a light-detecting element having a photo-electric conversion surface and an integral light blocking member
EP0990870A1 (fr) * 1998-04-17 2000-04-05 Mitsubishi Denki Kabushiki Kaisha Detecteur de position
US6496273B1 (en) * 1999-05-05 2002-12-17 Renishaw Plc Position determining apparatus for coordinate positioning machine
GB2357334A (en) * 1999-12-15 2001-06-20 Peter Bryan Webster Opto-electronic position sensor

Also Published As

Publication number Publication date
FR2913492B1 (fr) 2009-04-24
JP2010520994A (ja) 2010-06-17
AU2008224807A1 (en) 2008-09-18
CA2680015A1 (fr) 2008-09-18
WO2008110721A2 (fr) 2008-09-18
FR2913492A1 (fr) 2008-09-12
US20100149552A1 (en) 2010-06-17
KR20090122239A (ko) 2009-11-26
EP2132522A2 (fr) 2009-12-16

Similar Documents

Publication Publication Date Title
WO2008063437A3 (fr) Système de regroupement d'informations agricoles
WO2008105974A3 (fr) Capteur de pression ultrasonore, et procédé d'actionnement de celui-ci
GB2484646B (en) Device for optically scanning and measuring an environment
AU2014203774B2 (en) Apparatus for remotely controlling a materials handling vehicle
WO2006044599A3 (fr) Architecture d'un systeme d'impression
HK1078651A1 (en) Distance measurement sensor
WO2006053273A3 (fr) Procede et systeme de detection a fibre optique
WO2008008611A3 (fr) Système de mesure monté sur un véhicule ferroviaire
WO2012156071A8 (fr) Système de traitement de matériau au laser à l'aide d'au moins un capteur inertiel, et procédé de traitement au laser correspondant
EP2520978A3 (fr) Appareil de détection de position de surface, appareil d'exposition et procédé d'exposition
WO2006094021A3 (fr) Metrologie d'acquisition et de superposition de cibles basee sur une imagerie obtenue a l'aide deux ordres diffractes
TW200628963A (en) Screen and image display apparatus
WO2004032046A3 (fr) Procede et dispositif de detection de la charge d'un outil de levage
WO2007069165A3 (fr) Système et procédé de scanner mems
WO2011153989A3 (fr) Système de caméra stéréo
MX2010004142A (es) Sensor de geometria de tuberia.
EP2428308A3 (fr) Systèmes et procédés de soudage
WO2008110721A3 (fr) Systeme de metrologie optique
WO2009131875A3 (fr) Système de vision pour le déploiement de systèmes de sécurité
WO2008018909A3 (fr) Calibrage d'énergie au laser basé sur une mesure optique
WO2009011031A1 (fr) Système de navigation, dispositif de navigation et procédé de navigation
EP1225420A3 (fr) Appareil et méthode de mesure interférométrique à laser
MY153834A (en) Die bonding process incorporating infrared vision system
EP1193204A3 (fr) Détecteur de lumière pour produits en feuille
PT1169673E (pt) Processo para a determinacao da posicao de um veiculo

Legal Events

Date Code Title Description
WWE Wipo information: entry into national phase

Ref document number: 2008762037

Country of ref document: EP

WWE Wipo information: entry into national phase

Ref document number: 2680015

Country of ref document: CA

WWE Wipo information: entry into national phase

Ref document number: 2008224807

Country of ref document: AU

WWE Wipo information: entry into national phase

Ref document number: 2009552250

Country of ref document: JP

NENP Non-entry into the national phase

Ref country code: DE

WWE Wipo information: entry into national phase

Ref document number: 1020097019327

Country of ref document: KR

ENP Entry into the national phase

Ref document number: 2008224807

Country of ref document: AU

Date of ref document: 20080205

Kind code of ref document: A

121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 08762037

Country of ref document: EP

Kind code of ref document: A2

WWE Wipo information: entry into national phase

Ref document number: 12530258

Country of ref document: US