WO2008110721A2 - Systeme de metrologie optique - Google Patents
Systeme de metrologie optique Download PDFInfo
- Publication number
- WO2008110721A2 WO2008110721A2 PCT/FR2008/050178 FR2008050178W WO2008110721A2 WO 2008110721 A2 WO2008110721 A2 WO 2008110721A2 FR 2008050178 W FR2008050178 W FR 2008050178W WO 2008110721 A2 WO2008110721 A2 WO 2008110721A2
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- slot
- signal
- beams
- positioning
- laser
- Prior art date
Links
- 230000003287 optical effect Effects 0.000 title claims description 25
- 238000001514 detection method Methods 0.000 claims abstract description 13
- 230000001360 synchronised effect Effects 0.000 claims abstract description 13
- 238000000034 method Methods 0.000 claims description 7
- 230000035945 sensitivity Effects 0.000 claims description 7
- 230000000737 periodic effect Effects 0.000 claims description 6
- 238000000926 separation method Methods 0.000 claims description 2
- 239000013307 optical fiber Substances 0.000 description 13
- 238000006073 displacement reaction Methods 0.000 description 7
- 238000009826 distribution Methods 0.000 description 7
- 239000013078 crystal Substances 0.000 description 4
- 239000000835 fiber Substances 0.000 description 4
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000000386 microscopy Methods 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000002360 explosive Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/342—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells the sensed object being the obturating part
Definitions
- the present invention relates to metrology systems and more particularly to optical metrology systems.
- Fiber optic displacement sensors use a set of optical fibers to emit a light beam that is reflected on an object or on a part of the object to be located. Other optical fibers guide the reflected or scattered light to a photocell that emits a measurement signal. The positioning of the object is determined by its nature and the amount of light received by the photocell relative to the amount of light emitted.
- Capacitive sensors are based on a capacitive coupling between the object to be positioned and a reference armature. The intensity of the coupling makes it possible to determine the distance between the armature and the object.
- Interferometric sensors have a very good sensitivity but are only suitable for identifying relative displacements.
- the object of the invention is to provide a metrology system which makes it possible to obtain a sub-nanometric precision achieved only by the interferometric systems, in a compact arrangement and therefore a system combining precision, compactness and low cost.
- the invention therefore relates to an optical positioning device comprising a laser, associated with an acousto-optical modulator for emitting at least two parallel laser beams modulated in phase opposition, said beams being focused on a slot integral with the object to position and perpendicular to the positioning direction, and a photodiode adapted to collect the beams from the slot and associated with a synchronous detection amplifier for providing a signal reflecting the position of the slot relative to the reference position.
- the positioning device may further comprise an optical system capable of collimating, focusing and collecting the laser beams.
- the positioning device may also comprise an electrical function generator and an oscillator, the oscillator emitting at its output a radio frequency signal having a frequency modulation by a periodic electrical signal, in particular by a rectangular-shaped signal of lower frequency emitted by the electrical function generator, the radio frequency periodic signal being sent to the acousto-optic modulator to control the separation of the laser beams.
- the electrical signal delivered by the electrical function generator may be a reference signal for the synchronous detection amplifier.
- Another object of the invention is a method of positioning an object with respect to a reference position in which the variation of position of the object relative to the reference is detected as a function of the variation.
- IEC 60050 International Electrotechnical Vocabulary - Details for IEV number 845-28-55 Printed on 6-12-10 12:03:20
- EDT Optical fiber intensity of two modulated laser beams in phase opposition emerging from a slot integral with the object to
- the sensitivity of the device can be adjusted by changing the width of the hardware slot. It is still possible to detect the variation of intensity of the laser beams emerging from the slot by means of a photodiode.
- a synchronously detecting position signal can be obtained from the signal from the photodiode collecting the emerging laser beams.
- An error signal can be obtained in parallel with a position signal after the synchronous detection.
- FIG. 1 depicts an embodiment of the optical positioning device according to the invention
- FIG. 1b describes another embodiment of the optical positioning device according to the invention.
- FIG. 2 schematically describes the positioning of the laser beams and of the slot
- the metrology device essentially comprises a laser 1 whose beam enters an acousto-optical modulator 3 and also comprises a periodic function generator 7 connected to a synchronous detection amplifier 9. a connection 8 and a radio frequency oscillator 5 which communicates with the periodic function generator 7 via the connection 6 and with the acousto-optical modulator 3 via the connection 4.
- the acousto-optical modulator 3 is connected by at least two of its outputs to two single-mode fibers 10, themselves connected to collimators 11.
- the collimators 11 are positioned in an optical system comprising a lens L 1 followed by a lens L 2 and a multimode fiber 12.
- the output of the multimode fiber 12 is connected to a photodiode 13 itself connected to the synchronous detection amplifier 9 via the connection 14.
- FIG. 1a shows the general structure of a positioning device according to the invention. It is intended to position an object OBJ with respect to the optical part OPT of the optical positioning device.
- the laser 1 is configured to emit a Gaussian type wave having an electromagnetic transverse mode of (0; 0) type.
- Figure 3 shows the intensity profile 19 of such a wave in the direction x.
- the acousto-optic modulator 3 is based on the principle of Bragg diffraction.
- a sound wave is generated in a crystal by a radiofrequency wave which generates a deformation of the crystal showing a network type structure.
- a diffraction intervenes separating the laser beam into two beams.
- the distribution of the total intensity between the two beams depends on the angle between the incident beam and the sound wave in the crystal, in agreement with the Bragg equations.
- the sound wave of the acoustooptic modulator 3 is modulated by a low frequency signal from the low frequency generator 7.
- the distribution of the intensity between the two beams will be modulated by the energy modulation of the sound wave, thus according to the power of the radiofrequency wave injected into the acousto - optic modulator.
- the two emerging beams of the acousto-optic modulator 3 are then in phase opposition.
- Figure Ib shows another embodiment of the invention.
- the acousto-optic modulator 3 has been removed in favor of two lasers Ia and Ib.
- the laser is connected by the link 4a to the low frequency generator 7.
- the laser I b is connected by the link 4b to the low frequency generator 7. At the output, they are connected to the monomode optical fibers 10.
- Both lasers 1a and 1b are controlled by the low frequency generator 7 so as to emit alternately. We obtain two beams modulated in opposition of phase. The rest of the device is identical to the device described in FIG.
- Each of these two beams is guided by a monomode optical fiber 10 followed by a collimator 1 1.
- the collimators 1 1 make it possible to align the beams with each other, with respect to the optical axis formed by the lenses L1 and L2 and with respect to at the slot F.
- the beams are then focused by the lens L1 upstream of the slot F.
- the emerging beams converge through the lens L2 to the input of the multimode optical fiber 12 which opens on the photodiode 13.
- the photodiode 13 emits an electrical signal to the synchronous detection amplifier 9.
- the synchronous detection amplifier 9 receives on its reference input the low frequency signal coming from the low frequency generator 7 which was used to modulate the incident wave on the acousto-optical modulator 3.
- the synchronous detection amplifier 9 isolates the signals having the same frequency as the low frequency signal among all the signals coming from the photodiode 13. The isolated signals are then emitted by the link 15.
- a Gaussian wave has the intensity distribution 19 of FIG. 3, ie a Gaussian type distribution passing through a maximum and tending towards a minimum along the two directions of the abscissa axis. Because of the shape of the intensity curve as a function of position, a given intensity can correspond to two positions. One can not determine the absolute position of the obj and.
- the intensity distribution 21 of FIG. 3 is obtained at the output of slot F.
- the slot F moves in the plane formed by the two beams along the axis 18, the slot F being perpendicular to said plane.
- the little side of the slot is in the direction of displacement 18 and the long side is perpendicular to the direction of movement 18.
- the extreme positions are the positions where the overlap between the beams is zero.
- a forbidden position exists at the point of convergence of the beams, where the intensity profile at the exit of the slot F does not make it possible to determine the position of the slot F.
- the slot F is equivalent in size to the width of the focusing spot of a laser beam, the dimensions of which are equal to or greater than the square of the wavelength of the laser beam.
- the slot F moves, it occultly conceals a laser beam and the other.
- the two laser beams being in phase opposition and spatially shifted at the slot, the contribution of each laser beam to the total intensity at the exit of the slot can be determined. It can be shown that the intensity profile at the exit of the slot as a function of the position describes a Gaussian shape curve canceling at the origin of the abscissae and presenting a minimum and a maximum on both sides of the 'origin.
- the optical wave positioning device makes it possible to position, relative to the optical part OPT of the device and with precision, an object integral with a slot F whose small width corresponds to the positioning direction.
- the mass of the slot F can be considered negligible compared to the mass of the OBJ object.
- the optical positioning device can be broken down into a frame 16 and an optical part OPT connected by optical fibers.
- the optical positioning device thus has the particularity of being able to operate with the OPT optical part operating in various media including vacuum and liquids.
- the optical portion OPT being connected by optical fibers, its location is limited only by the absorption of said optical fibers due to the length of said optical fibers. It is thus possible to design applications in hostile environments, for example for the measurement of elements or cracks in the nucleus of a nuclear power plant.
- the OPT optical part has no electrical or electronic system, it has no sensitivity to electromagnetic waves, allowing it to operate in harsh environments, such as power plants, radar radomes or explosive atmospheres.
- the optical positioning device could also find an application in ultrasensitive seismology, thanks to its high sensitivity, or in the application of metrology in microscopy, such as near-field microscopy. It may be envisaged to integrate the various elements of the device by microelectronic techniques using, for example, VECSEL type lasers and waveguides to replace the optical fibers. Likewise, a large part of the totality of the control electronics can be integrated, making it possible to obtain a compact positioning device with a high degree of accuracy.
- a device comprising a higher number of laser beams.
- four laser beams could control the movement of an object in two distinct directions.
- the slot would be replaced by a hole, each pair of beams to determine the displacement of the hole in a direction within the diameter of said hole.
- optical fibers could be removed.
- the laser beams would be directly collimated at the output of the acousto-optic modulator and the photodiode disposed directly at the output of the optical system. This approach could also be combined with the use of two lasers instead of the acousto-optic modulator as described in the alternative embodiment to reduce costs even more drastically.
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
Description
Claims
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AU2008224807A AU2008224807A1 (en) | 2007-03-09 | 2008-02-05 | Optical metrology system |
US12/530,258 US20100149552A1 (en) | 2007-03-09 | 2008-02-05 | Optical metrology system |
EP08762037A EP2132522A2 (fr) | 2007-03-09 | 2008-02-05 | Systeme de metrologie optique |
CA002680015A CA2680015A1 (fr) | 2007-03-09 | 2008-02-05 | Systeme de metrologie optique |
JP2009552250A JP2010520994A (ja) | 2007-03-09 | 2008-02-05 | 光学計測システム |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0753748A FR2913492B1 (fr) | 2007-03-09 | 2007-03-09 | Systeme de metrologie optique |
FR0753748 | 2007-03-09 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2008110721A2 true WO2008110721A2 (fr) | 2008-09-18 |
WO2008110721A3 WO2008110721A3 (fr) | 2008-11-27 |
Family
ID=38510447
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/FR2008/050178 WO2008110721A2 (fr) | 2007-03-09 | 2008-02-05 | Systeme de metrologie optique |
Country Status (8)
Country | Link |
---|---|
US (1) | US20100149552A1 (fr) |
EP (1) | EP2132522A2 (fr) |
JP (1) | JP2010520994A (fr) |
KR (1) | KR20090122239A (fr) |
AU (1) | AU2008224807A1 (fr) |
CA (1) | CA2680015A1 (fr) |
FR (1) | FR2913492B1 (fr) |
WO (1) | WO2008110721A2 (fr) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102680402B (zh) * | 2011-11-15 | 2015-08-19 | 北京遥测技术研究所 | 石英音叉增强型光声谱气体池 |
CN103795367B (zh) * | 2014-01-14 | 2016-06-01 | 北京航天时代光电科技有限公司 | 一种增强型石英音叉的封装装置 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3795449A (en) * | 1973-01-11 | 1974-03-05 | Lockheed Missiles Space | Cutter monitor |
US5657125A (en) * | 1992-06-30 | 1997-08-12 | Canon Kabushiki Kaisha | Apparatus including a light-detecting element having a photo-electric conversion surface and an integral light blocking member |
EP0990870A1 (fr) * | 1998-04-17 | 2000-04-05 | Mitsubishi Denki Kabushiki Kaisha | Detecteur de position |
GB2357334A (en) * | 1999-12-15 | 2001-06-20 | Peter Bryan Webster | Opto-electronic position sensor |
US6496273B1 (en) * | 1999-05-05 | 2002-12-17 | Renishaw Plc | Position determining apparatus for coordinate positioning machine |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4834111A (en) * | 1987-01-12 | 1989-05-30 | The Trustees Of Columbia University In The City Of New York | Heterodyne interferometer |
KR940007618B1 (ko) * | 1991-03-26 | 1994-08-22 | 가부시키가이샤 도시바 | 주사광학 장치 |
JP2792315B2 (ja) * | 1992-03-10 | 1998-09-03 | 松下電器産業株式会社 | 複屈折測定装置 |
US5680111A (en) * | 1994-02-05 | 1997-10-21 | Baxter International Inc. | Dual sensor air-in-line detector |
US5867261A (en) * | 1997-04-28 | 1999-02-02 | International Business Machines Corporation | Surface inspection tool |
US6947131B2 (en) * | 2002-05-07 | 2005-09-20 | Chf Solutions, Inc. | Blood leak detector for extracorporeal treatment system |
WO2003104767A2 (fr) * | 2002-06-10 | 2003-12-18 | William Marsh Rice University | Spectroscopie photoacoustique renforcee par du quartz |
JP2005069900A (ja) * | 2003-08-25 | 2005-03-17 | Seiko Epson Corp | 集光点位置検出方法、集光点位置検出装置、液滴観測方法、液滴観測装置および液滴吐出装置 |
EP1859252A1 (fr) * | 2005-03-04 | 2007-11-28 | Koninklijke Philips Electronics N.V. | Detecteur spectroscopique photo-acoustique et systeme |
-
2007
- 2007-03-09 FR FR0753748A patent/FR2913492B1/fr active Active
-
2008
- 2008-02-05 US US12/530,258 patent/US20100149552A1/en not_active Abandoned
- 2008-02-05 WO PCT/FR2008/050178 patent/WO2008110721A2/fr active Application Filing
- 2008-02-05 AU AU2008224807A patent/AU2008224807A1/en not_active Abandoned
- 2008-02-05 CA CA002680015A patent/CA2680015A1/fr not_active Abandoned
- 2008-02-05 JP JP2009552250A patent/JP2010520994A/ja active Pending
- 2008-02-05 EP EP08762037A patent/EP2132522A2/fr not_active Withdrawn
- 2008-02-05 KR KR1020097019327A patent/KR20090122239A/ko not_active Application Discontinuation
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3795449A (en) * | 1973-01-11 | 1974-03-05 | Lockheed Missiles Space | Cutter monitor |
US5657125A (en) * | 1992-06-30 | 1997-08-12 | Canon Kabushiki Kaisha | Apparatus including a light-detecting element having a photo-electric conversion surface and an integral light blocking member |
EP0990870A1 (fr) * | 1998-04-17 | 2000-04-05 | Mitsubishi Denki Kabushiki Kaisha | Detecteur de position |
US6496273B1 (en) * | 1999-05-05 | 2002-12-17 | Renishaw Plc | Position determining apparatus for coordinate positioning machine |
GB2357334A (en) * | 1999-12-15 | 2001-06-20 | Peter Bryan Webster | Opto-electronic position sensor |
Also Published As
Publication number | Publication date |
---|---|
WO2008110721A3 (fr) | 2008-11-27 |
EP2132522A2 (fr) | 2009-12-16 |
FR2913492B1 (fr) | 2009-04-24 |
KR20090122239A (ko) | 2009-11-26 |
FR2913492A1 (fr) | 2008-09-12 |
CA2680015A1 (fr) | 2008-09-18 |
JP2010520994A (ja) | 2010-06-17 |
AU2008224807A1 (en) | 2008-09-18 |
US20100149552A1 (en) | 2010-06-17 |
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