WO2008102339A1 - Eclairage par led pour une caméra de balayage en ligne - Google Patents

Eclairage par led pour une caméra de balayage en ligne Download PDF

Info

Publication number
WO2008102339A1
WO2008102339A1 PCT/IL2008/000182 IL2008000182W WO2008102339A1 WO 2008102339 A1 WO2008102339 A1 WO 2008102339A1 IL 2008000182 W IL2008000182 W IL 2008000182W WO 2008102339 A1 WO2008102339 A1 WO 2008102339A1
Authority
WO
WIPO (PCT)
Prior art keywords
light
light emitting
concentrating
lens
emitting diode
Prior art date
Application number
PCT/IL2008/000182
Other languages
English (en)
Inventor
Diana Shapirov
Original Assignee
Camtek Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Camtek Ltd. filed Critical Camtek Ltd.
Priority to CN2008800120398A priority Critical patent/CN101675330B/zh
Priority to IL189491A priority patent/IL189491A/en
Publication of WO2008102339A1 publication Critical patent/WO2008102339A1/fr

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V5/00—Refractors for light sources
    • F21V5/04—Refractors for light sources of lens shape
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V7/00—Reflectors for light sources
    • F21V7/0091—Reflectors for light sources using total internal reflection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/255—Details, e.g. use of specially adapted sources, lighting or optical systems
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0004—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed
    • G02B19/0028—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed refractive and reflective surfaces, e.g. non-imaging catadioptric systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0033—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use
    • G02B19/0047—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source
    • G02B19/0061—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source the light source comprising a LED
    • G02B19/0066—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source the light source comprising a LED in the form of an LED array
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21Y—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES F21K, F21L, F21S and F21V, RELATING TO THE FORM OR THE KIND OF THE LIGHT SOURCES OR OF THE COLOUR OF THE LIGHT EMITTED
    • F21Y2115/00—Light-generating elements of semiconductor light sources
    • F21Y2115/10—Light-emitting diodes [LED]

Definitions

  • the invention relates to systems and method for automatic optical inspection and verification and especially to systems and method for generating a line of light. [004] Background of the invention
  • Objects such as but not limited to printed circuit boards (PCBs), wafers and HDI can be inspected by an inspection system that illuminates portions of the object by a spot of light, by a line of light or be so called area illumination.
  • an inspection system that illuminates portions of the object by a spot of light, by a line of light or be so called area illumination.
  • Light reflected, scattered and optionally transmitted through the object is detected
  • an object can be illuminated by area illumination, spot illumination or line illumination.
  • the spot or a line of line can scan the object and allow the inspection system to acquire images of the object.
  • the line of light should be homogeneous in order not to introduce errors in inspection or evaluation process, especially when a comparison based inspection is used.
  • the illuminating optics should comply with the following (non-trivial) demands: (i) spatial uniformity of light intensity over the line of light; (ii) angular uniformity of light Intensity over the line of light; (iii) wide angular range illumination (also referred to as high numerical aperture Illumination); (iv) ability to control the angular coverage (can depend upon the application), spectral control (can depend upon the application), (v) high efficiency, (vi) robust, and (vii) low cost.
  • a line of light can be provided by using imaging illumination optics that may include reflective optics (converging mirrors) or refractive (converging lenses) optics. [0010] Referring to figure 1 a imaging illumination optics
  • imaging optics 14 transform linear light source 12 to a line of light (denoted “focus line”) 16 on an object (not shown).
  • the imaging optics may either refractive (lenses) or reflective (converging mirror). Imaging with refractive optics is less efficient, restricted in numerical aperture and can not produce uniform angular pattern without lacunose. This is illustrated by a two dimensional map of light intensity 20 of Figure 1 b that includes three spaced apart coverage areas 26, 24 and 22. Reflective optics (elliptical or more complicate form mirror) is free of the disadvantages mentioned above. This is illustrated by the two dimensional map of light intensity 30 that includes a single continuous coverage area 32 of Figure 1 c.
  • Non-imaging approaches involve projecting a linear light source with or without mixing on large area.
  • Figures 2a-2c illustrate various system configurations.
  • Figure 2a illustrates two linear light sources 42 and 44 that are parallel to each other.
  • Each liner light source emits light over a large angular range (52 and 54 respectively) in a manner that result in a partial overlap 60 between these angular ranges. This configuration is simple but it is very restricted by the performance design.
  • Figure 2 illustrates a single liner light source 72 that is followed by an integrated cavity that includes an upper convex portion 74 and a lower concave portion 76. Light is reflected from these portions and impinges onto illuminated region 78. This configuration is characterized by excellent mixing, low efficiency, and lacks angular control.
  • Figure 2c illustrates two linear light sources 82 and 84 that are parallel to each other. They are followed by diffuser 86 that is followed by an object on which a rectangular illumination pattern 88 is formed. This configuration is characterized by good mixing, low efficiency, and lacks angular control.
  • An illumination system that includes: (i) a first rectangular light emitting diode array that emits quasi-collimated light; and (ii) first concentrating optics that comprises at least one total internal reflection lens portion and at least one refractive lens portion.
  • the quasi-collimated light from the first rectangular light emitting diode array is directed by the first concentrating optics towards an object to form a line of light on the object.
  • a method for providing a line of light includes: emitting, by a first rectangular light emitting diode array, quasi-collimated light; and concentrating the quasi-collimated light to form a line of light on an object, by first concentrating optics that comprises at least one total internal reflection lens portion and at least one refractive lens portion.
  • Figures 1 a-1 c illustrates a prior art imaging illumination optics and two dimensional angular intensity maps
  • Figures 2a-2c illustrates prior art non-imaging illumination optics
  • Figure 3a illustrates illumination optics according to an embodiment of the invention
  • Figure 3b illustrates a two angular dimensional intensity map of the illumination optics of figure 3a;
  • Figures 4a and 4b illustrates illumination optics according to various embodiments of the invention;
  • Figure 5a illustrates a rectangular LED array in which
  • LEDs are arranged in a rectangular manner and an intensity map;
  • Figure 5b illustrates a rectangular LED array in which
  • LEDs are arranged in a hexagonal manner and an dimensional intensity map according to an embodiment of the invention.
  • Figure 5c illustrates a relationship between a gap, working distance and a LED pitch according to an embodiment of the invention
  • Figure 6 illustrates illumination optics a controller and an intensity modulation curve according to various embodiments of the invention
  • Figure 7a illustrates illumination optics according to various embodiments of the invention
  • Figures 7b-7d illustrate concentrating lenses according to various embodiments of the invention
  • Figure 8 illustrates a two dimensional intensity map of the illumination optics of figure 7 according to various embodiments of the invention
  • Figure 9 illustrates illumination optics according to various embodiments of the invention
  • Figure 10 illustrates illumination optics according to an embodiment of the invention
  • Figure 11 illustrates illumination optics and collection optics according to an embodiment of the invention
  • Figure 12 is a flow chart of a method according to an embodiment of the invention. Detailed description of the drawings
  • FIG 3a illustrates illumination optics 102 (also referred to as illumination system) according to an embodiment of the invention.
  • Illumination optics 102 includes non-imaging optics. It includes rectangular (sheet-like) light source array 100 that is followed by concentrating optics (either reflective or refractive) that concentrates light emitted by rectangular (sheet-like) light source array 100 within narrow line of light 120.
  • Figure 3b illustrates the continuous coverage obtained by illumination optics 102 - a two dimensional map of light intensity 130 includes a single continuous coverage area 132.
  • Figure 4a illustrates illumination optics166 according to embodiment of the invention.
  • Multiple collimated light sources 150- 156 are arranged along a curved plane (can be connected to or integrated with a convex sheet) in a manner than all light beams (140 - 146) omitted from these collimated light sources point towards the same area to provide a line of light 160.
  • This configuration does not include concentrating optics. In spite of its apparent simplicity, this approach requires very sophisticated technology to achieve the acceptable level of light uniformity.
  • FIG. 4b illustrates illumination optics199 according to embodiment of the invention.
  • Multiple quasi-collimated light sources 170-178 are arranged in a planner manner to form a flat extended quasi- collimated light source.
  • This flat extended quasi-collimated light source is followed by a cylindrical flat TIR (Total Internal Reflection) lens 202 that acts as concentrating optics.
  • the angular coverage produced by cylindrical flat TIR lens 202 is wide and free of aberration featured the conventional refractive optics.
  • the central portion of TIR lens 202 is refractive.
  • Light beams 180-188 generated by quasi-collimated light sources 170-178 pass through TIR lens 202 to be directed towards line of light 200, as illustrated by light beams 190 - 198.
  • the extended quasi-collimated light source can include an array of multiple singular light sources. These light sources should emit narrow beams of light and be substantially equal to each other in terms of radiation pattern and intensity.
  • a light emitting diode (LED) array is used as a quasi-collimated light source and should meet at least some of the following requirements: viewing angle (of each LED) should not exceed ten degrees, the LED array should be arranged in a dense hexagonal packaging ("Honey Comb") manner (as illustrated in figure 5b), light emitted by the LEDs should have a high Luminous energy - of about 1000 Lumens/100 mm, the LEDs should be multi-color LEDs (can emit, for example red light, amber light, blue/cyan light and the like), the color of light emitted by the LED array can be electronically controlled, the Illumination angular coverage should be electronically controlled by the LED positions, the LED array should have an efficient cooling mechanism. It is noted that the LED array should be arranged in a dense hexagonal packaging ("Honey Comb") manner
  • the LED array includes LEDs with narrow emitting angle so as to provide a quasi-collimated light source.
  • a LED emitting angle has straightforward impact on the concentrating efficiency of the illumination optics as narrower light source can be concentrated within the narrower light strip and with higher efficiency.
  • the following table illustrates some simulation results:
  • the LEDs of the LED array are arranged in a dense hexagonal packaging.
  • Figure 5a illustrates a rectangular LED array in which
  • LEDs 210-218 are arranged in a rectangular manner and intensity map 219 formed by that array.
  • Figure 5b illustrates a rectangular LED array in which LEDs 220-237 are arranged in a hexagonal manner (also referred to as hexagonal packaging of LEDs) and intensity map 239 formed by such an array according to an embodiment of the invention.
  • Figure 5c illustrates a relationship between an "invisible" gap 265, working distance D 252 and a LED pitch 250 according to an embodiment of the invention. The gap is invisible in the sense that is does not cause a gap in the angular coverage of line of light 270.
  • the LED array of figure 5b provides (in relation to the LED array of figure 5b) more spatial and angular light uniformity within the line of light in relation.
  • the minimal acceptable LED array pitch is a function of concentration geometry (working distance, individual LED size) and Numerical aperture of the concentrating optics, as illustrated in figure 5c.
  • Longer working distances (252 in figure 5c), lower NA and larger LED sizes can tolerate larger pitches (250).
  • a working distance of 17 millimeter, a led diameter of 5 millimeters and a pitch of 1 millimeters can form a gap (265) of about one degrees between adjacent light beams 263 and 264 (omitted from adjacent LEDs 243 and 244) but this gap will not be noticed in the line of light 270.
  • each LED of the array includes multiple light emitting components and each component can emit light of a different color.
  • the light emitted by each LED can be electronically controlled by determining which light emitting component to activate.
  • the color of each group of LEDs can be electronically controlled.
  • a group of LEDS can include a row, a column, a two dimensional sub array of LEDs, a portion of a row, a portion of a column of a combination thereof.
  • the manner in which group of LEDs of an array are controlled can be tradeoff between the complexity of the controlling mechanism and the controllability of the LED array.
  • controlling each single LED is characterized by maximal controllability but can require very complex control mechanisms and complex wiring.
  • each LED (or even each group of LEDS) can be monochromatic (and emit light from ultra violet to infra red).
  • the color light can be controlled by using color filters and especially configurable color filters.
  • a multi-color LED array can emit red blue greed light, white light or other color combinations. Conveniently, the LED array should be able to emit red light, and/or amber light and/or blue light.
  • Figure 6 illustrates LED array 300, controller 310 and an intensity modulation curve 330 according to an embodiment of the invention.
  • LED array 300 includes (M+1 ) rows and N columns. It includes LED 300(0,1 ) - 300(M, N).
  • Controller 310 can control various characteristics of each group of LEDs of LED array 300. As indicated above controller 310 can control each group of LEDs.
  • the controlling can include determining at least one of the following or a combination thereof: (i) LED angular coverage (the angular coverage refers to an viewing angle that extends outside and is normal to the paper of figure 8), the LED can be set to emit light in one out of multiple viewing angles (for example- large, medium and narrow); (ii) intensity (selecting an intensity out of multiple (two or more) intensity levels, intensity modulation curve 330 provides a non-limiting example of the different intensity levels of different pixels of LED array 300 - it has a peak at the central row of LED array 300 and is of minimal value at the edges of LED array 300, this intensity modulation curve can compensate for intensity non-uniformities caused by both illumination and imaging optics; (Mi) color.
  • controller 310 can control the intensity of each column, and the angular coverage of each row. The angular coverage can vary along the scan direction. Controller 310 can also control the color and dimming of the entire array.
  • Figure 7a illustrates illumination optics 500 according to an embodiment of the invention.
  • Illumination optics 500 includes hybrid lens 550 and rectangular LED array 570.
  • Figure 7a also illustrates beams of light 541 , 542, 543, 551 and 552.
  • Rectangular LED array 570 is parallel to hybrid lens 500 and both are perpendicular to line of light 560. Line of light 560 is normal to the page of figure 7a. [0057] Rectangular LED array 570 emits quasi-collimated light toward hybrid lens 550. For simplicity of explanation only few light beams that are emitted towards hybrid lens 550 are shown. The quasi-collimated light from rectangular LED array 550 is directed by hybrid lens 550 an object to form line of light 560 on the object. [0058] Hybrid lens 550 acts as a concentrating optics. A central portion (central part facets) 520 of hybrid lens 550 is a refractive lens (such as but not limited by a Fresnel lens).
  • hybrid lens 550 One or more peripheral portions (external facets that provide both TIR and refraction mechanism) of hybrid lens 550 is a total internal reflection lens as illustrated by TIR lenses 510 and 530. It is noted that hybrid lens 550 extends outside the paper of figure 7a.
  • Light beam 552 forms a small angle 559 with normal 580.
  • Light beams that define a large angle in relation to normal 580 propagate through a total internal reflection lens portion, as illustrated by light beam 541 that is reflected to form light beam 542 that is then refracted to provide light beam 543.
  • Light beam 543 forms a small angle 549 with normal 580.
  • FIG. 8 illustrates two dimensional angular intensity map 666 of illumination optics 500 of figure 7a (9) according to various embodiments of the invention. A relatively continuous coverage is obtained.
  • Hybrid lens 550 facilitates an achievement of angular uniformity within the wide angular coverage.
  • hybrid lens 550 can be replaced by multiple lenses that can be spaced apart from each other, as illustrated by figures 7b, 7c, 7d, 9, 10 and 1 1 .
  • Figures 7b - 7d illustrate concentrating lenses according to various embodiments of the invention.
  • Figure 7b illustrates refractive lens 52O 1 and two FIR lenses 510' and 530'.
  • Figure 7c illustrates central lens 522 that includes a refractive portion 522(2) that is surrounded by FIR portions 522(1 ) and 522(3) as well as two FIR lenses 512 and 532, each corresponding to a portion of FIR lenses 510 and 530 of figure 7a.
  • Figure 7d illustrates central lens 524 that includes a refractive portion that corresponds to a portion of refractive lens 520 of figure 7a and two other lenses 514 and 534, each including a refractive portion 514(1) and 534(1 ) and a FIR portion 514(2) and
  • these different lenses can be parallel to each other, and additionally or alternatively proximate to each, but this is not necessarily so.
  • these lenses can be positioned in a non-parallel manner, as illustrated by figures 9, 10 and 1 1 .
  • Illumination optics 600 includes: first rectangular light emitting diode array 690, first concentrating lens 680, beam splitter
  • first LED diode array 690 passes through first concentrating lens 680 to be directed by beam splitter 670 (as illustrated by light beam 602) towards object 610 to form line of light 620 while propagating through space 635 defined between second and third concentrating lenses 630 and 640.
  • Light emitted by second rectangular LED array 650 passes through second concentrating lens 630 to be directed towards line of light 620, as illustrated by light beam 601 .
  • Light emitted by third rectangular LED array 660 passes through third concentrating lens 640 to be directed towards object 610 as illustrated by light beam 603.
  • First concentrating lens 680 is a refractive lens (or at least includes portion of such a refractive lens).
  • Second concentrating lens 650 and third concentrating lens 640 are TIR lens (or at least include portion of such TIR lens) .
  • Each of the rectangular LED arrays (650, 660 and 690) can be a LED array as illustrated in figure 8, it can emit quasi- collimated light, can be controlled in various manners (color, intensity, light pattern, or a combination thereof).
  • the Illumination layout is designed to provide overlap between off-axis (emitted from rectangular LED array 690) and on- axis (emitted from rectangular LED arrays 650 or 660) concentrated beams.
  • Figure 10 illustrates illumination optics 888 according to an embodiment of the invention.
  • Illumination optics 888 of figure 10 differs from illumination optics 600 of figure 9 by including linear diffusers 790,
  • the beam splitter (670 of figure 9 or 750 of figure 10 can be with gradient beam-splitting coating (100%
  • Illumination optics 900 includes beam splitter 930 concentrating optics 920 and rectangular LED array 910. Quasi collimated light from rectangular LED array 910 passes through concentrating optics 920 and beam splitter 930 to form a line of light 950 on object 960. Light reflected from object 960 propagates towards beam splitter 930 and is directed by beam splitter to image sensor 940.
  • Figure 12 illustrates method 900 according to an embodiment of the invention.
  • Method 900 includes stage 910 of emitting, by a first rectangular light emitting diode array, quasi-collimated light.
  • Stage 910 is followed by stage 920 of concentrating the quasi-collimated light to form a line of light on an object, by first concentrating optics that comprises at least one total internal reflection lens portion and at least one refractive lens portion.
  • Stage 920 conveniently includes allowing light beams that are substantially normal to the line of light and light beams that define a small angle in relation to the normal to the line of light propagate through a refractive lens portion and allowing light beams that define a large angle in relation to the normal to the line of light propagate through a total internal reflection lens portion.
  • Stage 920 conveniently includes concentrating the light by concentrating optics that includes a hybrid lens. A central portion of the hybrid lens comprises a refractive lens and wherein a peripheral portion of the hybrid lens comprises a total internal reflection lens.
  • Stage 920 can be preceded by stage 915 of passing the quasi-collimated light through diffusing element located between the first rectangular light emitting diode array and the first concentrating optics.
  • method 900 includes the following stages: stage 930 of emitting, by a second rectangular light emitting diode array quasi-collimated light; stage 940 of concentrating the quasi-collimated light from the second rectangular light emitting diode array by a second concentrating optics to form a line of light on an object; stage 950 of emitting, by a third rectangular light emitting diode array quasi-collimated light; stage 960 of concentrating the quasi-collimated light from the third rectangular light emitting diode array by a third concentrating optics to form the line of light on an object; and stage 970 of directing quasi-collimated light from the first concentrating lens by a beam splitter towards the object while propagating through a space defined between the second and third concentrating lenses.
  • Method 900 can conveniently include diffusing quasi- collimated light from each rectangular light emitting diode array.
  • Method 900 conveniently includes stage 905 of applying a control scheme. Stage 905 can include at least one of the following or a combination thereof: (i) controlling an intensity of each group of light emitting diodes of the first rectangular light emitting diode array; (ii) controlling a color of each group of light emitting diodes of the first rectangular light emitting diode array; (iii) controlling a radiation pattern of each group of light emitting diodes of the first rectangular light emitting diode array.
  • stage 910 includes emitting quasi- collimated light by a first rectangular light emitting diode array that includes multiple diodes that are arranged in a honeycomb manner.
  • stage 910 includes emitting quasi- collimated light by a first rectangular light emitting diode array that includes multiple diodes that are arranged in a honeycomb manner.
  • the present invention can be practiced by employing conventional tools, methodology and components. Accordingly, the details of such tools, component and methodology are not set forth herein in detail. In the previous descriptions, numerous specific details are set forth, in order to provide a thorough understanding of the present invention. However, it should be recognized that the present invention might be practiced without resorting to the details specifically set forth. [0090] Only exemplary embodiments of the present invention and but a few examples of its versatility are shown and described in the present disclosure. It is to be understood that the present invention is capable of use in various other combinations and environments and is capable of changes or modifications within the scope of the inventive concept as expressed herein.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pathology (AREA)
  • Biochemistry (AREA)
  • Immunology (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Non-Portable Lighting Devices Or Systems Thereof (AREA)
  • Led Device Packages (AREA)

Abstract

Système d'éclairage comprenant : (i) une première rangée de diodes à électroluminescence qui émet une lumière quasi collimatée ; et (ii) un premier bloc optique à concentration qui comprend au moins une portion de lentille de réflexion interne totale et au moins une portion de lentille de réfraction. La lumière quasi collimatée provenant de la première rangée de diodes électroluminescentes rectangulaire est dirigée par le premier bloc optique à concentration vers un objet pour former une ligne de lumière sur ledit objet.
PCT/IL2008/000182 2007-02-20 2008-02-12 Eclairage par led pour une caméra de balayage en ligne WO2008102339A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
CN2008800120398A CN101675330B (zh) 2007-02-20 2008-02-12 用于线扫描相机的led照明
IL189491A IL189491A (en) 2007-02-20 2008-02-12 Illuminated LED Work Camera Line Scan

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US89062707P 2007-02-20 2007-02-20
US60/890,627 2007-02-20

Publications (1)

Publication Number Publication Date
WO2008102339A1 true WO2008102339A1 (fr) 2008-08-28

Family

ID=39471760

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/IL2008/000182 WO2008102339A1 (fr) 2007-02-20 2008-02-12 Eclairage par led pour une caméra de balayage en ligne

Country Status (4)

Country Link
CN (1) CN101675330B (fr)
IL (1) IL189491A (fr)
TW (1) TWI400441B (fr)
WO (1) WO2008102339A1 (fr)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9645097B2 (en) 2014-06-20 2017-05-09 Kla-Tencor Corporation In-line wafer edge inspection, wafer pre-alignment, and wafer cleaning
US9885671B2 (en) 2014-06-09 2018-02-06 Kla-Tencor Corporation Miniaturized imaging apparatus for wafer edge
US9946055B2 (en) 2014-03-04 2018-04-17 Philips Lighting Holding B.V. Beam shaping system and an illumination system using the same
US11313532B2 (en) * 2017-04-10 2022-04-26 Ideal Industries Lighting Llc Optic assemblies and applications thereof

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2295274A (en) * 1994-11-17 1996-05-22 Teledyne Ind Optical lens system for light emitting diodes
WO1998033007A1 (fr) * 1997-01-23 1998-07-30 Koninklijke Philips Electronics N.V. Luminaire
US5898267A (en) * 1996-04-10 1999-04-27 Mcdermott; Kevin Parabolic axial lighting device
WO2000024062A1 (fr) * 1998-10-21 2000-04-27 Koninklijke Philips Electronics N.V. Module a diode luminescente et luminaire
US20060034097A1 (en) * 2004-08-11 2006-02-16 Samsung Electro-Mechanics Co., Ltd. Light emitting diode lens and backlight apparatus having the same
EP1696171A1 (fr) * 2005-02-28 2006-08-30 Osram Opto Semiconductors GmbH Dispositif d'affichage à DEL

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5895267A (en) * 1997-07-09 1999-04-20 Lsi Logic Corporation Method to obtain a low resistivity and conformity chemical vapor deposition titanium film
US6741351B2 (en) * 2001-06-07 2004-05-25 Koninklijke Philips Electronics N.V. LED luminaire with light sensor configurations for optical feedback

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2295274A (en) * 1994-11-17 1996-05-22 Teledyne Ind Optical lens system for light emitting diodes
US5898267A (en) * 1996-04-10 1999-04-27 Mcdermott; Kevin Parabolic axial lighting device
WO1998033007A1 (fr) * 1997-01-23 1998-07-30 Koninklijke Philips Electronics N.V. Luminaire
WO2000024062A1 (fr) * 1998-10-21 2000-04-27 Koninklijke Philips Electronics N.V. Module a diode luminescente et luminaire
US20060034097A1 (en) * 2004-08-11 2006-02-16 Samsung Electro-Mechanics Co., Ltd. Light emitting diode lens and backlight apparatus having the same
EP1696171A1 (fr) * 2005-02-28 2006-08-30 Osram Opto Semiconductors GmbH Dispositif d'affichage à DEL

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9946055B2 (en) 2014-03-04 2018-04-17 Philips Lighting Holding B.V. Beam shaping system and an illumination system using the same
US9885671B2 (en) 2014-06-09 2018-02-06 Kla-Tencor Corporation Miniaturized imaging apparatus for wafer edge
US9645097B2 (en) 2014-06-20 2017-05-09 Kla-Tencor Corporation In-line wafer edge inspection, wafer pre-alignment, and wafer cleaning
US11313532B2 (en) * 2017-04-10 2022-04-26 Ideal Industries Lighting Llc Optic assemblies and applications thereof

Also Published As

Publication number Publication date
IL189491A (en) 2016-09-29
TWI400441B (zh) 2013-07-01
CN101675330B (zh) 2013-01-02
CN101675330A (zh) 2010-03-17
IL189491A0 (en) 2008-11-03
TW200842399A (en) 2008-11-01

Similar Documents

Publication Publication Date Title
JP5508712B2 (ja) 平面的に配列された光源により放出される収束光線の実現
JP4788577B2 (ja) ライトガイド、光源装置及び電子機器
CN109804238B (zh) 光学检查装置
EP2389536B1 (fr) Éclairage linéaire par diode électroluminescente pour vision artificielle
EP2495682B1 (fr) Système optique d'éclairage de dispositif de capture d'image
US9632035B2 (en) Light emitting diode linear light with uniform far field
JP5911865B2 (ja) 照明システム
US8077307B2 (en) Illumination system for optical inspection
KR101517354B1 (ko) 픽셀형 조명을 위한 조명 장치
CN103907337A (zh) 照明单元以及使用该照明单元的图像读取装置
KR100561156B1 (ko) 관측장치
JP2010277070A (ja) 照明装置及びそれを用いた分光装置及び画像読取装置
JP2016024195A (ja) テレセントリック明視野および環状暗視野のシームレス融合型照明
EP3983843A1 (fr) Éclairage à grand angle multimodal utilisant un combinateur de faisceaux composés
WO2008102339A1 (fr) Eclairage par led pour une caméra de balayage en ligne
JP2009225414A (ja) 照明装置および画像読取装置
KR20110016922A (ko) 이색성 필터를 사용하는 조명 각도 제어
JP4281495B2 (ja) 照明装置
US11251347B2 (en) Semiconductor light source
JPH11249020A (ja) 光路調整部材及びそれを備えた照明装置
JP2005311662A (ja) 原稿照明装置、画像読み取り装置、カラー原稿読み取り装置、および画像形成装置
JP2024065760A (ja) ライン光照射装置及び検査システム
JP2013081075A (ja) 読取装置
JP2013081074A (ja) 読取装置

Legal Events

Date Code Title Description
WWE Wipo information: entry into national phase

Ref document number: 200880012039.8

Country of ref document: CN

121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 08710182

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 08710182

Country of ref document: EP

Kind code of ref document: A1