WO2008096710A1 - 液晶の供給装置 - Google Patents

液晶の供給装置 Download PDF

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Publication number
WO2008096710A1
WO2008096710A1 PCT/JP2008/051771 JP2008051771W WO2008096710A1 WO 2008096710 A1 WO2008096710 A1 WO 2008096710A1 JP 2008051771 W JP2008051771 W JP 2008051771W WO 2008096710 A1 WO2008096710 A1 WO 2008096710A1
Authority
WO
WIPO (PCT)
Prior art keywords
light
liquid crystal
nozzle
substrate
drops
Prior art date
Application number
PCT/JP2008/051771
Other languages
English (en)
French (fr)
Inventor
Isao Ichio
Original Assignee
Shibaura Mechatronics Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shibaura Mechatronics Corporation filed Critical Shibaura Mechatronics Corporation
Priority to CN2008800002122A priority Critical patent/CN101542371B/zh
Publication of WO2008096710A1 publication Critical patent/WO2008096710A1/ja

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1341—Filling or closing of cells
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67253—Process monitoring, e.g. flow or thickness monitoring
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1341—Filling or closing of cells
    • G02F1/13415—Drop filling process

Abstract

　基板に液晶を液滴にして供給する液晶の供給装置であって、先端が基板の板面に対向するノズル（８）を有し、ノズルの先端から液晶の液滴が吐出される液晶供給手段（６）と、ノズルを挟んで離間対向して配置された投光器（２１）と受光器（２２）を有し、投光器から出射される検出光を受光する受光器の受光量によってノズルから液滴が吐出されたか否かを検出する光検出手段（１５）と、基板の板面と光検出手段との間に配置され投光器から出射された検出光から生じる拡散光が基板の板面で反射して受光器に入射するのを阻止する遮光部材（２４）を具備する。
PCT/JP2008/051771 2007-02-05 2008-02-04 液晶の供給装置 WO2008096710A1 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2008800002122A CN101542371B (zh) 2007-02-05 2008-02-04 液晶的供给装置

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007025937A JP4119932B1 (ja) 2007-02-05 2007-02-05 液晶の供給装置
JP2007-025937 2007-02-05

Publications (1)

Publication Number Publication Date
WO2008096710A1 true WO2008096710A1 (ja) 2008-08-14

Family

ID=39681619

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/051771 WO2008096710A1 (ja) 2007-02-05 2008-02-04 液晶の供給装置

Country Status (4)

Country Link
JP (1) JP4119932B1 (ja)
KR (1) KR100957085B1 (ja)
CN (1) CN101542371B (ja)
WO (1) WO2008096710A1 (ja)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101033119B1 (ko) * 2003-12-30 2011-05-11 엘지디스플레이 주식회사 라인 온 글래스형 액정표시장치
KR101471356B1 (ko) * 2008-07-28 2014-12-10 주식회사 탑 엔지니어링 액정방울 토출여부 확인방법 및 이를 실행하는 액정디스펜서
KR100964949B1 (ko) * 2008-07-30 2010-06-21 주식회사 탑 엔지니어링 액정방울수 카운팅 방법
JP5246039B2 (ja) * 2009-05-26 2013-07-24 株式会社島津製作所 液体注入装置
KR101675102B1 (ko) * 2009-10-09 2016-11-10 주식회사 탑 엔지니어링 헤드장치 및 이를 구비한 액정디스펜서
KR101147660B1 (ko) * 2009-11-26 2012-05-23 세메스 주식회사 노즐 검사 유닛과, 이를 구비한 액정 토출 장치
KR200473351Y1 (ko) * 2009-12-03 2014-08-07 주식회사 탑 엔지니어링 액정디스펜서의 헤드장치
KR101288988B1 (ko) * 2010-12-30 2013-07-23 에이피시스템 주식회사 적하 장치
JP6199968B2 (ja) 2013-06-20 2017-09-20 堺ディスプレイプロダクト株式会社 ノズルヘッド及び液体滴下装置
CN105093711B (zh) * 2015-08-25 2017-12-01 武汉华星光电技术有限公司 液晶滴下装置及液晶滴下方法
US10562054B2 (en) * 2016-03-11 2020-02-18 Precision Valve & Automation, Inc. Automatically controlling a liquid spray pattern
CN108776415B (zh) * 2018-06-04 2021-06-18 信利（惠州）智能显示有限公司 液晶滴灌装置和多向滴灌器

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05281562A (ja) * 1992-04-01 1993-10-29 Matsushita Electric Ind Co Ltd 液晶パネルの製造方法
JP2006058607A (ja) * 2004-08-20 2006-03-02 Seiko Epson Corp 液晶表示素子の製造方法、液晶表示素子、液晶表示素子の製造装置および電気光学装置並びに電子機器

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100488535B1 (ko) * 2002-07-20 2005-05-11 엘지.필립스 엘시디 주식회사 액정토출장치 및 토출방법
KR100750939B1 (ko) * 2006-10-27 2007-08-22 주식회사 탑 엔지니어링 액정적하장치

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05281562A (ja) * 1992-04-01 1993-10-29 Matsushita Electric Ind Co Ltd 液晶パネルの製造方法
JP2006058607A (ja) * 2004-08-20 2006-03-02 Seiko Epson Corp 液晶表示素子の製造方法、液晶表示素子、液晶表示素子の製造装置および電気光学装置並びに電子機器

Also Published As

Publication number Publication date
CN101542371B (zh) 2011-04-13
JP4119932B1 (ja) 2008-07-16
JP2008191408A (ja) 2008-08-21
CN101542371A (zh) 2009-09-23
KR20090010046A (ko) 2009-01-28
KR100957085B1 (ko) 2010-05-13

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