WO2008081706A1 - 圧力波発生装置及びその温度調整方法 - Google Patents

圧力波発生装置及びその温度調整方法 Download PDF

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Publication number
WO2008081706A1
WO2008081706A1 PCT/JP2007/074248 JP2007074248W WO2008081706A1 WO 2008081706 A1 WO2008081706 A1 WO 2008081706A1 JP 2007074248 W JP2007074248 W JP 2007074248W WO 2008081706 A1 WO2008081706 A1 WO 2008081706A1
Authority
WO
WIPO (PCT)
Prior art keywords
insulating layer
heat
wave generator
pressure wave
silicon
Prior art date
Application number
PCT/JP2007/074248
Other languages
English (en)
French (fr)
Inventor
Masato Hayashi
Masami Yakabe
Nobuyoshi Koshida
Original Assignee
Tokyo Electron Limited
National University Corporation, Tokyo University Of Agriculture And Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Limited, National University Corporation, Tokyo University Of Agriculture And Technology filed Critical Tokyo Electron Limited
Priority to US12/521,120 priority Critical patent/US8130593B2/en
Publication of WO2008081706A1 publication Critical patent/WO2008081706A1/ja

Links

Classifications

    • G—PHYSICS
    • G10—MUSICAL INSTRUMENTS; ACOUSTICS
    • G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
    • G10K15/00—Acoustics not otherwise provided for
    • G10K15/04—Sound-producing devices

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Acoustics & Sound (AREA)
  • Multimedia (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
  • Thermotherapy And Cooling Therapy Devices (AREA)

Abstract

　圧力波発生装置（１）は、熱伝導性の基板（２）と、基板（２）の一方の主面に形成された断熱層（３）と、断熱層（３）の上に形成された絶縁体層（５）と、絶縁体層（５）の上に形成され、交流成分を含む電流が印加されて発熱する発熱体（４）と、を備える。断熱層（３）は、ナノ結晶シリコンである。絶縁体層（５）は、窒化珪素（Ｓｉ3Ｎ4）、２酸化珪素（ＳｉＯ2）、酸化アルミニウム（Ａｌ2Ｏ3）、酸化マグネシウム（ＭｇＯ）、ダイヤモンド結晶炭素（Ｃ）、窒化アルミニウム（ＡｌＮ）又は炭化珪素（ＳｉＣ）のいずれか１つを含んで形成される。発熱体４は、例えば、金（Ａｕ）又はタングステン（Ｗ）を含んで形成される。
PCT/JP2007/074248 2006-12-28 2007-12-17 圧力波発生装置及びその温度調整方法 WO2008081706A1 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US12/521,120 US8130593B2 (en) 2006-12-28 2007-12-17 Pressure wave generator and temperature controlling method thereof

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2006-355625 2006-12-28
JP2006355625A JP4974672B2 (ja) 2006-12-28 2006-12-28 圧力波発生装置

Publications (1)

Publication Number Publication Date
WO2008081706A1 true WO2008081706A1 (ja) 2008-07-10

Family

ID=39588390

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2007/074248 WO2008081706A1 (ja) 2006-12-28 2007-12-17 圧力波発生装置及びその温度調整方法

Country Status (4)

Country Link
US (1) US8130593B2 (ja)
JP (1) JP4974672B2 (ja)
TW (1) TWI401122B (ja)
WO (1) WO2008081706A1 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012020600A1 (ja) * 2010-08-10 2012-02-16 株式会社村田製作所 音波源および超音波発生装置
CN109622347A (zh) * 2018-12-26 2019-04-16 浙江清华柔性电子技术研究院 柔性mems超声波换能器及其制作方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102014101287B4 (de) * 2014-02-03 2017-09-21 Bundesrepublik Deutschland, Vertreten Durch Den Bundesminister Für Wirtschaft Und Energie, Dieser Vertreten Durch Den Präsidenten Der Bundesanstalt Für Materialforschung Und -Prüfung (Bam) Thermoakustischer Ultraschallwandler

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005269745A (ja) * 2004-03-17 2005-09-29 Nokodai Tlo Kk 超音波音源および超音波センサ
JP2005313086A (ja) * 2004-04-28 2005-11-10 Matsushita Electric Works Ltd 圧力波発生素子
JP2006013961A (ja) * 2004-06-25 2006-01-12 Matsushita Electric Works Ltd 圧力波発生素子およびその製造方法
JP2007144406A (ja) * 2005-10-26 2007-06-14 Matsushita Electric Works Ltd 圧力波発生装置およびその製造方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2447593A2 (fr) * 1978-08-11 1980-08-22 Thomson Csf Dispositif autoregule en temperature et son application a la mesure de temperature par couple thermo-electrique
JP3705926B2 (ja) 1998-04-23 2005-10-12 独立行政法人科学技術振興機構 圧力波発生装置
JP3798302B2 (ja) * 2001-11-20 2006-07-19 独立行政法人科学技術振興機構 熱誘起圧力波発生装置
SG114589A1 (en) * 2001-12-12 2005-09-28 Semiconductor Energy Lab Film formation apparatus and film formation method and cleaning method
KR20060095582A (ko) * 2003-02-28 2006-08-31 노우코우다이 티엘오 가부시키가이샤 열 여기음파 발생장치
JP3845077B2 (ja) 2003-08-28 2006-11-15 農工大ティー・エル・オー株式会社 音波発生装置の製造方法
KR100855788B1 (ko) * 2004-04-28 2008-09-01 마츠시다 덴코 가부시키가이샤 압력파 발생장치 및 그 제조방법
US8130986B2 (en) * 2006-01-23 2012-03-06 The Regents Of The University Of Michigan Trapped fluid microsystems for acoustic sensing

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005269745A (ja) * 2004-03-17 2005-09-29 Nokodai Tlo Kk 超音波音源および超音波センサ
JP2005313086A (ja) * 2004-04-28 2005-11-10 Matsushita Electric Works Ltd 圧力波発生素子
JP2006013961A (ja) * 2004-06-25 2006-01-12 Matsushita Electric Works Ltd 圧力波発生素子およびその製造方法
JP2007144406A (ja) * 2005-10-26 2007-06-14 Matsushita Electric Works Ltd 圧力波発生装置およびその製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012020600A1 (ja) * 2010-08-10 2012-02-16 株式会社村田製作所 音波源および超音波発生装置
CN109622347A (zh) * 2018-12-26 2019-04-16 浙江清华柔性电子技术研究院 柔性mems超声波换能器及其制作方法

Also Published As

Publication number Publication date
US8130593B2 (en) 2012-03-06
TWI401122B (zh) 2013-07-11
JP2008161816A (ja) 2008-07-17
JP4974672B2 (ja) 2012-07-11
TW200841941A (en) 2008-11-01
US20100025145A1 (en) 2010-02-04

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