WO2008081530A8 - エントランス絞り溝付微小流量制御装置の設計方法 - Google Patents

エントランス絞り溝付微小流量制御装置の設計方法 Download PDF

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Publication number
WO2008081530A8
WO2008081530A8 PCT/JP2006/326205 JP2006326205W WO2008081530A8 WO 2008081530 A8 WO2008081530 A8 WO 2008081530A8 JP 2006326205 W JP2006326205 W JP 2006326205W WO 2008081530 A8 WO2008081530 A8 WO 2008081530A8
Authority
WO
WIPO (PCT)
Prior art keywords
throttle groove
flow rate
fluid
rate controller
designing
Prior art date
Application number
PCT/JP2006/326205
Other languages
English (en)
French (fr)
Other versions
WO2008081530A1 (ja
Inventor
言彦 世古口
Original Assignee
株式会社フジキン
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社フジキン filed Critical 株式会社フジキン
Priority to DE112006004184T priority Critical patent/DE112006004184T5/de
Priority to CN2006800568278A priority patent/CN101568754B/zh
Priority to PCT/JP2006/326205 priority patent/WO2008081530A1/ja
Priority to US12/448,569 priority patent/US8718984B2/en
Publication of WO2008081530A1 publication Critical patent/WO2008081530A1/ja
Publication of WO2008081530A8 publication Critical patent/WO2008081530A8/ja

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/0218—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with only one sealing face
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/30—Details
    • F16K3/32—Means for additional adjustment of the rate of flow

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Flow Control (AREA)
  • Lift Valve (AREA)
  • Sliding Valves (AREA)

Abstract

　流体の微小流量を正確に制御し、流体流動の不安定を誘起することなく所望の弁特性を実現し、前記流体流量を制御する絞り溝が簡単な形状を有する微小流量制御装置の設計方法を提供する。　本発明は、流体を導入する流入路１２と、導入された流体を始端から終端に向けて流動させるメイン絞り溝６が形成された弁体２と、流量調整部材により任意断面で開口される流体流出口２０と、この流体流出口２０から流出する流体を導出する流出路１４から構成される微小流量制御装置において、前記メイン絞り溝６の始端位置に連通的に先行するエントランス絞り溝８を設け、前記エントランス絞り溝８及びメイン絞り溝６を流動する流体の運動量方程式から導出された関係式に基づいて所望の流動抵抗を発揮するようにエントランス絞り溝８の寸法を決定するエントランス絞り溝付微小流量制御装置の設計方法である。
PCT/JP2006/326205 2006-12-28 2006-12-28 エントランス絞り溝付微小流量制御装置の設計方法、 WO2008081530A1 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
DE112006004184T DE112006004184T5 (de) 2006-12-28 2006-12-28 Verfahren zum Herstellen eines Kleinstmengen-Durchflussreglers mit einer Eingangsdrosselnut
CN2006800568278A CN101568754B (zh) 2006-12-28 2006-12-28 带入口节流槽的微小流量控制装置的设计方法
PCT/JP2006/326205 WO2008081530A1 (ja) 2006-12-28 2006-12-28 エントランス絞り溝付微小流量制御装置の設計方法、
US12/448,569 US8718984B2 (en) 2006-12-28 2006-12-28 Minute flow rate controller with entrance throttle groove

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2006/326205 WO2008081530A1 (ja) 2006-12-28 2006-12-28 エントランス絞り溝付微小流量制御装置の設計方法、

Publications (2)

Publication Number Publication Date
WO2008081530A1 WO2008081530A1 (ja) 2008-07-10
WO2008081530A8 true WO2008081530A8 (ja) 2010-12-09

Family

ID=39588221

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2006/326205 WO2008081530A1 (ja) 2006-12-28 2006-12-28 エントランス絞り溝付微小流量制御装置の設計方法、

Country Status (4)

Country Link
US (1) US8718984B2 (ja)
CN (1) CN101568754B (ja)
DE (1) DE112006004184T5 (ja)
WO (1) WO2008081530A1 (ja)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4884758B2 (ja) * 2005-12-12 2012-02-29 株式会社フジキン エントランス絞り溝付微小流量制御装置の設計方法、
DE102009026554A1 (de) * 2009-05-28 2010-12-02 Robert Bosch Gmbh Drosselventil für flüssige und/oder gasförmige Stoffe
US9454158B2 (en) 2013-03-15 2016-09-27 Bhushan Somani Real time diagnostics for flow controller systems and methods
CN103591325B (zh) * 2013-10-24 2016-08-17 燕山大学 非全周开口滑阀u型阀口设计方法
JP6577404B2 (ja) 2016-04-05 2019-09-18 ファナック株式会社 絞りユニット及びこれを備えた静圧軸受装置並びに溝付きブロックの製造方法
US10983538B2 (en) 2017-02-27 2021-04-20 Flow Devices And Systems Inc. Systems and methods for flow sensor back pressure adjustment for mass flow controller
KR102051438B1 (ko) * 2017-08-09 2019-12-02 씨케이디 가부시키 가이샤 유량계

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4011893A (en) * 1975-02-03 1977-03-15 Clarence Bentley Flow control valve
KR950001119B1 (ko) * 1986-07-17 1995-02-11 가부시끼가이샤 미야와끼 혼합 밸브장치
US4860594A (en) * 1988-03-01 1989-08-29 Gmi Engineering & Management Institute Apparatus and method for measuring mass flow and density
JP4466888B2 (ja) 1999-12-28 2010-05-26 株式会社鷺宮製作所 電動膨張弁
JP3986860B2 (ja) 2002-03-26 2007-10-03 太平洋工業株式会社 電動流量制御弁
CN101158695A (zh) * 2002-12-04 2008-04-09 斯宾克斯公司 流体的可程控微量控制用方法
JP2006153141A (ja) * 2004-11-29 2006-06-15 Fujikin Inc エントランスチャンネル付微小流量制御装置。
JP2006153140A (ja) 2004-11-29 2006-06-15 Fujikin Inc 微小流量制御装置

Also Published As

Publication number Publication date
DE112006004184T5 (de) 2009-10-22
US20090294720A1 (en) 2009-12-03
US8718984B2 (en) 2014-05-06
WO2008081530A1 (ja) 2008-07-10
CN101568754A (zh) 2009-10-28
CN101568754B (zh) 2011-05-25

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