WO2008065703A1 - Unité de chauffage électrique pour four de traitement thermique, et four de traitement thermique - Google Patents

Unité de chauffage électrique pour four de traitement thermique, et four de traitement thermique Download PDF

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Publication number
WO2008065703A1
WO2008065703A1 PCT/JP2006/323609 JP2006323609W WO2008065703A1 WO 2008065703 A1 WO2008065703 A1 WO 2008065703A1 JP 2006323609 W JP2006323609 W JP 2006323609W WO 2008065703 A1 WO2008065703 A1 WO 2008065703A1
Authority
WO
WIPO (PCT)
Prior art keywords
heat treatment
base material
furnace
coating layer
treatment furnace
Prior art date
Application number
PCT/JP2006/323609
Other languages
English (en)
Japanese (ja)
Inventor
Susumu Uemori
Original Assignee
Koyo Thermo Systems Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koyo Thermo Systems Co., Ltd. filed Critical Koyo Thermo Systems Co., Ltd.
Priority to PCT/JP2006/323609 priority Critical patent/WO2008065703A1/fr
Publication of WO2008065703A1 publication Critical patent/WO2008065703A1/fr

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D1/00—Casings; Linings; Walls; Roofs
    • F27D1/0003—Linings or walls
    • F27D1/0006—Linings or walls formed from bricks or layers with a particular composition or specific characteristics
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D99/00—Subject matter not provided for in other groups of this subclass
    • F27D99/0001—Heating elements or systems
    • F27D99/0006—Electric heating elements or system

Definitions

  • the present invention relates to a heat treatment furnace heat insulating material used as a furnace wall of a heat treatment furnace such as a firing furnace, an electric heating unit for a heat treatment furnace in which a heating element is embedded in the heat insulating material, and the heat insulating material. It relates to the heat treatment furnace used.
  • a heat insulating material made of a ceramic fiber having a low cost and a low thermal conductivity is used for a furnace wall of a heat treatment furnace such as a firing furnace.
  • Thermal insulation made of ceramic fiber generates a lot of dust. For this reason, for example, when cleanliness is required as in a heat treatment furnace for electronic parts, a heat-resistant glass ceramic plate is placed inside the furnace wall, and the heat insulating material is exposed in the space where the workpiece is transported. (For example, see Patent Document 1.) 0
  • the surface of the insulation ceramic fiber, powdered refractory materials 60 to 90 weight 0/0, 5-30% inorganic binder, and a heat-resistant coating layer consists of thickener mosquitoes also coatings.
  • a method of infiltrating the sewage is also proposed.
  • Patent Document 1 Japanese Patent Laid-Open No. 5-330836
  • Patent Document 2 Japanese Patent Laid-Open No. 2003-192472
  • the surface of the heat insulating material is completely covered with the heat-resistant coating layer, and at first glance, it is excellent in low dust generation.
  • the heat-resistant coating layer has a weak bond with the surface of the heat insulating material. Due to the difference in expansion coefficient from the heat insulating material, it is difficult to maintain low dust generation over a long period of time when cracking due to thermal stress is likely to occur when heating and cooling are repeated.
  • the film does not crack due to thermal stress, but the surface of the heat insulating material cannot be reliably covered, so it is impossible to completely prevent dust generation!
  • An object of the present invention is to fix a ceramic fiber sheet-like heat insulating material on the surface of the ceramic fiber heat insulating material, and then form a coating layer with a coating agent having a composition having a strong bonding force with the ceramic fiber. Accordingly, an object of the present invention is to provide an electric heating unit for a heat treatment furnace and a heat treatment furnace capable of preventing the occurrence of defective insulation while maintaining the low dust generation property of the heat insulating material over a long period of time.
  • the electric heating unit for a heat treatment furnace of the present invention constitutes a furnace wall of the heat treatment furnace and heats the inside of the heat treatment furnace, and includes a base material, a heating element, a sheet-like heat insulating material, and a coating layer.
  • the base material is a ceramic fiber molded body containing alumina and silica.
  • the heating element is embedded near one surface in the base material and generates heat when energized.
  • the sheet-like heat insulating material is formed by compressing a ceramic fiber containing alumina and silica and forming it into a sheet shape.
  • the coating layer is formed by applying a coating agent comprising a base containing water and water-soluble aluminum phosphate and a pigment that is silicon carbide on the surface of the sheet-like heat insulating material and then drying.
  • the heat treatment furnace of the present invention is used for firing electronic components and the like, and is constituted by a furnace wall provided with a base material, a heating element, a sheet-like heat insulating material, and a coating layer.
  • the base material is a ceramic fiber molded body containing alumina and silica.
  • the heating element is embedded near one surface in the base material and generates heat when energized.
  • the sheet-like heat insulating material is formed by compressing a ceramic fiber containing alumina and silica into a sheet shape.
  • the coating layer is formed by applying a coating agent comprising a base containing water and water-soluble aluminum phosphate and a pigment that is silicon carbide on the surface of the sheet-like heat insulating material and then drying it.
  • the core containing aluminum phosphate is used.
  • a coating layer is formed by the one-tipping agent.
  • Aluminum phosphate is considered to have a high affinity with alumina that forms the sheet-like heat insulating material.
  • the surface of the base material is covered with a sheet-like heat insulating material and then dried and baked, so that the coating layer is formed with a strong bonding force, and the base layer does not crack when repeated heating and cooling. Dust generation into the furnace is also prevented for a long time.
  • the surface of the base material is coated with a black coating layer containing silicon carbide contained as a pigment, and heat generated from the heating element embedded in the base material is efficiently radiated.
  • a sheet-like heat insulating material with few voids is disposed between the base material and the coating layer, and the penetration of silicon carbide, which is a good conductor at high temperatures, into the base material is prevented. Insulation failure does not occur in the heating element embedded in the base material.
  • the coating layer is formed by the coating agent containing aluminum phosphate, so that the coating layer is formed on the surface of the base material.
  • the coating agent containing aluminum phosphate can be formed with strong bond strength. Even when the temperature rise and fall is repeated, the surface of the base material, which does not crack the coating layer, can prevent dust from entering the furnace for a long period of time.
  • the surface of the base material can be covered with a black coating layer, and the heat generated from the heat generator embedded in the base material can be efficiently radiated.
  • FIG. 1 is a cross-sectional view showing a configuration of a heat treatment furnace of the present invention.
  • FIG. 2 is a partially enlarged sectional view of an electric heating unit for a heat treatment furnace according to the present invention.
  • FIG. 3 is a diagram showing experimental results of an example and a conventional example of an electric heating unit for a heat treatment furnace according to the present invention.
  • FIG. 1 is a cross-sectional view showing a configuration of a heat treatment furnace 100 according to an embodiment of the present invention.
  • the heat treatment furnace 100 performs a setterless heat treatment on the glass substrate for plasma display, which is the workpiece 200.
  • the heat treatment furnace 100 includes furnace walls 101 to 104, a conveyance roller 120, and a conveyance motor 124.
  • the furnace walls 101 to 104 respectively cover the left and right side surfaces, the upper surface, and the lower surface of the conveyance path through which the workpiece 20 is conveyed.
  • the left and right side furnace walls 101 and 102 are constituted by a heat treatment furnace heat insulating material 10
  • the upper and lower side furnace walls 103 and 104 are constituted by a heat treatment furnace electric heating unit 20.
  • the furnace walls 103 and 104 are provided with a heater (not shown) on the inner surface.
  • the transport roller 120 is provided at each of a plurality of positions along the transport path. Both ends of the transport roller 120 pass through the furnace walls 101 and 102, and are rotatably supported by bearings 121 and 122 outside the furnace on the left side and right side. A sprocket 123 is fixed to the conveying roller 120 at the end exposed to the outside of the furnace on the right side surface side. The rotation of the transport motor 124 is transmitted to the sprocket 123 via the chain 125.
  • FIG. 2 is a partially enlarged cross-sectional view of the electric heating unit 10 for a heat treatment furnace of the present invention.
  • the electric heating unit 10 for the heat treatment furnace is used as the upper and lower furnace walls 103 and 104 in the heat treatment furnace 100.
  • the electric heating unit 10 for a heat treatment furnace includes a base material coating layer 2, a heating element 3, and a sheet-like heat insulating material 4.
  • Base material 1 is a ceramic fiber molded body containing alumina and silica, and is generally used as a material for furnace walls 101-104.
  • the base material 1 is formed by a known method such as a vacuum forming method in accordance with the size of the furnace walls 103 and 104.
  • the coil-shaped one is illustrated as the heating element 3, not limited to this, for example, a wave-shaped one can be suitably used.
  • the sheet-like heat insulating material 4 is formed by compressing a ceramic fiber containing alumina and silica. As an example, a lmm-thick one is commercially available. The sheet-like heat insulating material 4 has less voids than the base material 1 due to the high degree of compression of the ceramic fiber. The sheet-like heat insulating material 4 is fixed to a surface that becomes at least the inner surface of the furnace when used as the furnace walls 101 and 102 in the base material 1. For example, when the base material 1 is manufactured by a vacuum forming method, the sheet is first placed on a suction screen of the mold (mold), for example, by sticking with a ceramic fiber coating cement diluted with an inorganic binder.
  • the heat insulating material 4 is set, and then the heating element 3 is positioned and set thereon, and vacuum forming is integrally performed with the base material 1.
  • the sheet-like heat insulating material 4 is firmly fixed to the base material 1 by the chemical bonding force of the inorganic binder through the processes of drying and firing.
  • the coating layer 2 is formed by applying a liquid coating agent kneaded with silicon carbide as a pigment in a base containing water and water-soluble aluminum phosphate to the surface of the base material 1 and then drying it.
  • the coating agent contains 50% of the base and the pigment.
  • the base contains water and aluminum phosphate as main components in a weight ratio of about 2: 1, and can also contain small amounts of amorphous silica, alcohol, nitric acid, aluminum hydroxide, and the like.
  • the composition is not limited to this, and can be changed as appropriate.
  • the coating layer 2 is applied with a coating agent on the surface of the sheet-like heat insulating material 4, and then dried and fired at an appropriate temperature of 300 ° C to 600 ° C for about 3 hours. ⁇ 1. Made to Omm thickness.
  • the covering layer 2 may be formed on the entire surface of the base material 1 or on two or more surfaces.
  • the aluminum phosphate contained in the coating layer 2 composed of the coating agent has a high affinity with the alumina contained in the sheet-like heat insulating material 4. For this reason, the coating layer 2 is formed on the surface of the sheet-like heat insulating material 4 with a strong bonding force.
  • the temperature rise and fall is repeated between the normal temperature and the heat treatment temperature of the workpiece.
  • the sheet-like heat insulating material 4 and the coating layer 2 made of different materials have different expansion coefficients.
  • the force by which thermal stress acts on the interface between the sheet-like insulation 4 and the coating layer 2 due to the temperature rise and fall in the furnace The bonding force of the coating layer 2 to the surface of the sheet-like insulation 4 is strong. There is no breakage.
  • Base material 1 is formed by molding a ceramic fiber containing alumina and silica. There are many fine voids. When the coating agent is applied directly to the surface of the base material 1, the coating agent penetrates into the base material 1. Silicon carbide contained in the coating agent becomes a good conductor at high temperatures. The heating element 3 embedded in the base material 1 may cause insulation failure due to the coating agent silicon carbide that has penetrated into the base material 1.
  • FIG. 3 is a diagram showing experimental results of examples and comparative examples of the electric heating unit 10 for heat treatment furnace.
  • Furnace walls 103 and 104 are made from the base material 1 in which the heating element 3 is embedded, and in the embodiment of the electric heating unit 10 for heat treatment furnace, the sheet-like heat insulating material 4 is fixed to the inner side surface, and then the coating layer 12 is formed.
  • the sheet-like heat insulating material 4 was not fixed to the inner side surface of the comparative example, and the coating layer 12 was not formed, but was strong.
  • These examples and comparative examples were individually made as heat treatment furnaces with the upper and lower furnace walls 103, 104, the furnace temperature was controlled at 700 ° C, and 150 liters of air was introduced into the furnace per minute, The number of dust was measured.
  • any dust of 0.3 / z m was slightly detected, but in the comparative example, the number of dust was too large to be measured. From this result, it can be seen that the coating layer 2 realizes the low dust generation property of the electric heating unit 10 for the heat treatment furnace.
  • the electric heating unit 10 for the heat treatment furnace as the furnace walls 103 and 104 on the upper and lower surfaces of the heat treatment furnace 100, a furnace that does not generate dust in the base material 1 even when the temperature in the furnace is repeatedly raised and lowered Dust is not scattered inside. Even when cleanliness is required, such as when heat treating electronic parts, the heat treatment furnace 100 can be manufactured at low cost without the need to partition the space in the furnace where the workpiece is transported by expensive heat-resistant glass ceramic plates. . In addition, it is not necessary to replace the heat-resistant glass ceramic plate, and maintenance can be simplified.
  • the coating layer 2 exhibits a black color due to silicon carbide contained as a pigment in the coating agent. For this reason, it has excellent heat dissipation, can prevent abnormal heating of the heating element 13, and can efficiently heat the inside of the furnace to reduce power consumption.
  • the present invention can be used to prevent dust generation from the furnace wall in a heat treatment furnace such as a firing furnace.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Furnace Housings, Linings, Walls, And Ceilings (AREA)

Abstract

Unité de chauffage électrique (10) pour fours de traitement thermique, qui comprend: un matériau de base (1) pour moulage de fibres de céramique comprenant de l'alumine et de la silice; une couche de revêtement (2) obtenue par application d'un matériau de revêtement constitué d'un ingrédient de base constitué d'eau, d'un phosphate d'aluminium et d'un pigment comprenant un carbure de silicium, ceci sur la surface du matériau de base (1), formant la face intérieure de la paroi du four, puis par séchage du matériau de revêtement. Comme le phosphate d'aluminium contenu dans la couche de revêtement a une grande affinité pour l'alumine du matériau de base (1), la couche de revêtement (2) formée à la surface du matériau de base (1) y est fixée par une force d'adhésion élevée. De cette manière, la surface du matériau de base (1) ne peut pas produire de poussière dans le four pendant une période prolongée.
PCT/JP2006/323609 2006-11-27 2006-11-27 Unité de chauffage électrique pour four de traitement thermique, et four de traitement thermique WO2008065703A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PCT/JP2006/323609 WO2008065703A1 (fr) 2006-11-27 2006-11-27 Unité de chauffage électrique pour four de traitement thermique, et four de traitement thermique

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2006/323609 WO2008065703A1 (fr) 2006-11-27 2006-11-27 Unité de chauffage électrique pour four de traitement thermique, et four de traitement thermique

Publications (1)

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WO2008065703A1 true WO2008065703A1 (fr) 2008-06-05

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Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5273191A (en) * 1975-12-17 1977-06-18 Hitachi Metals Ltd Painting agent for preventing oxidation decarbonization
JPS5395336A (en) * 1977-02-01 1978-08-21 Nippon Asbestos Co Ltd Method of producing fibrous heat insulating body having built in heating unit
JPS63303870A (ja) * 1987-06-04 1988-12-12 Idemitsu Kosan Co Ltd コ−ティング材
JPH05301779A (ja) * 1992-04-24 1993-11-16 Shinagawa Refract Co Ltd 表面硬化型断熱モジュールおよびその製造方法
JPH06287864A (ja) * 1993-04-02 1994-10-11 Toshiba Monofrax Co Ltd 無機質繊維成形体
JPH10318681A (ja) * 1997-05-16 1998-12-04 Murata Mfg Co Ltd 断熱カバーおよび熱処理炉
JPH11211357A (ja) * 1998-01-20 1999-08-06 Toshiba Monofrax Co Ltd 無機繊維ブロックおよび炉

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5273191A (en) * 1975-12-17 1977-06-18 Hitachi Metals Ltd Painting agent for preventing oxidation decarbonization
JPS5395336A (en) * 1977-02-01 1978-08-21 Nippon Asbestos Co Ltd Method of producing fibrous heat insulating body having built in heating unit
JPS63303870A (ja) * 1987-06-04 1988-12-12 Idemitsu Kosan Co Ltd コ−ティング材
JPH05301779A (ja) * 1992-04-24 1993-11-16 Shinagawa Refract Co Ltd 表面硬化型断熱モジュールおよびその製造方法
JPH06287864A (ja) * 1993-04-02 1994-10-11 Toshiba Monofrax Co Ltd 無機質繊維成形体
JPH10318681A (ja) * 1997-05-16 1998-12-04 Murata Mfg Co Ltd 断熱カバーおよび熱処理炉
JPH11211357A (ja) * 1998-01-20 1999-08-06 Toshiba Monofrax Co Ltd 無機繊維ブロックおよび炉

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