WO2008041431A1 - Method for resin seal molding, and resin seal molding apparatus for use in the method - Google Patents

Method for resin seal molding, and resin seal molding apparatus for use in the method Download PDF

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Publication number
WO2008041431A1
WO2008041431A1 PCT/JP2007/066716 JP2007066716W WO2008041431A1 WO 2008041431 A1 WO2008041431 A1 WO 2008041431A1 JP 2007066716 W JP2007066716 W JP 2007066716W WO 2008041431 A1 WO2008041431 A1 WO 2008041431A1
Authority
WO
WIPO (PCT)
Prior art keywords
resin
mold
cavity
substrate
pot
Prior art date
Application number
PCT/JP2007/066716
Other languages
French (fr)
Japanese (ja)
Inventor
Keiji Maeda
Hideki Tokuyama
Original Assignee
Towa Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Towa Corporation filed Critical Towa Corporation
Publication of WO2008041431A1 publication Critical patent/WO2008041431A1/en

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C45/00Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
    • B29C45/02Transfer moulding, i.e. transferring the required volume of moulding material by a plunger from a "shot" cavity into a mould cavity
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C45/00Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
    • B29C45/14Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor incorporating preformed parts or layers, e.g. injection moulding around inserts or for coating articles
    • B29C45/14639Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor incorporating preformed parts or layers, e.g. injection moulding around inserts or for coating articles for obtaining an insulating effect, e.g. for electrical components
    • B29C45/14655Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor incorporating preformed parts or layers, e.g. injection moulding around inserts or for coating articles for obtaining an insulating effect, e.g. for electrical components connected to or mounted on a carrier, e.g. lead frame
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C45/00Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
    • B29C45/17Component parts, details or accessories; Auxiliary operations
    • B29C45/38Cutting-off equipment for sprues or ingates
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/50Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • H01L21/56Encapsulations, e.g. encapsulation layers, coatings
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Definitions

  • the present invention relates to a resin sealing molding method of an electronic component for sealing and molding an electronic component such as an IC (Integrated Circuit) mounted on a substrate with a resin material and a resin sealing molding apparatus used therefor. is there.
  • a resin-sealed molding apparatus in which mold assemblies having an upper mold and a lower mold are stacked in the vertical direction has been used.
  • a resin injection mechanism is provided on the side of the mold assembly laminated structure stacked in the vertical direction. This resin injecting mechanism can contact the mold assembly layered structure or leave the mold assembly layered structure.
  • the resin injection mechanism has a pot and a plunger extending in the horizontal direction.
  • the above-described resin injection mechanism is connected to the side surface of the mold assembly laminated structure. Thereafter, the resin material is melted by heating in the pot and pressurized by the plunger. As a result, the fluid resin is injected into the cavity through the resin passage (gate) provided in the upper mold.
  • the resin injection mechanism is separated from the mold assembly laminated structure.
  • the upper mold and the lower mold are opened with the plate set in the lower mold.
  • the gate resin 81 is ejected by a release eject pin provided at the upper mold gate position.
  • a molded product 80 is obtained in which a predetermined number of electronic components are integrally sealed with a resin material.
  • the molded product 80 includes a substrate 1, a cavity resin 18 having a shape corresponding to the shape of the aforementioned cavity, and a gate having a shape corresponding to the aforementioned resin passage.
  • the resin 81 unnecessary cured resin
  • a pot resin 82 having a shape corresponding to a part of the pot described above are included.
  • the unnecessary gate resin 81 and pot resin 82 cured in the pot and resin passage of the resin injection mechanism remain together with the package resin 18 constituting the finished product.
  • the gate resin 81 and the pot resin 82 are removed from the molded product 80.
  • a removal method for example, a method of removing the gate resin 81 by rotating it in the direction indicated by the arrow in FIG. This is called a gate break. According to this method, as shown in FIG. 13, a sealed substrate 83 is obtained.
  • the sealed substrate 83 is cut by a rotary cutting blade (blade) or the like. Thereby, the sealed substrate 83 is divided into individual packages.
  • a structure using a stacked mold assembly laminated structure and a pot provided outside the mold assembly laminated structure is a multi-layer structure or a PM (Pure Malt) structure. Called s fc.
  • Patent Document 1 Japanese Unexamined Patent Application Publication No. 2007-095803
  • Patent Document 2 JP 2007-095802 A
  • the damaged portion 84 may be formed in the package resin 18 as shown in FIG.
  • the gate resin 81 residues may adhere to the surface of the substrate 1.
  • some measures are required to remove the gate resin 81 from the substrate 1 without forming a defective portion in the molded product 80.
  • this measure it is conceivable to perform a staking process to prevent the gate resin 81 from adhering to the position where the gate resin 81 adheres to the substrate 1 and the position in the vicinity thereof.
  • the thickness of only the portion subjected to the gold plating process increases. For this reason, the thickness of the substrate 1 becomes uneven. As a result, when the upper mold and the lower mold are closed, a gap is easily formed between the mold surface of the upper mold and the surface of the substrate. Therefore, when the resin enters the gap, the resin beam remains on the substrate.
  • the problem that occurs when removing the gate resin from the substrate is not limited to the case of using a resin sealing molding apparatus in which a pot is provided outside the mold assembly, but a pot is provided inside the mold assembly. This also occurs when the resin sealing molding apparatus is used. Next, this will be explained.
  • a pot In a resin sealing molding apparatus in which a pot is provided inside a mold assembly, a pot extending in the vertical direction having an opening on the mold surface is provided in the lower mold. In the pot, the resin material is melted by heating. This fluid resin is pushed out through the resin passage (mold gate) into the upper mold cavity by the pressurizing plunger. As a result, a molded product 85 is obtained as shown in FIG.
  • the damaged portion 84 is formed in the package resin 18 of the sealed substrate 83, and the gate resin 81 not shown in the figure. Residue remains on the substrate 1.
  • the gate resin 81 is projected by the release eject pin. According to this, it is possible to remove the package resin 18 from the upper mold cavity without forming a defect in the molded product. However, it is impossible to take out the gate resin 81 from the upper mold without forming a defect in the molded product. Therefore, an eject pin is provided on the mold gate. Therefore, the resin sealing molding apparatus having the above-described multilayer structure is increased in size because it is necessary to provide an eject pin for each mold assembly.
  • the present invention has been made in view of the above-described problems, and an object of the present invention is to remove the gate resin from the substrate without forming a defective portion in the molded product, and to reduce the size of the apparatus.
  • the present invention provides a resin sealing molding method and a resin sealing molding apparatus used therefor.
  • the resin sealing molding method of the present invention first, a first mold and a second mold facing the first mold are formed. Next, a substrate on which electronic components are mounted on the first mold is set. Then, by closing the first mold and the second mold, the electronic component is inserted into the second mold cavity. Next, by connecting a resin injection mechanism having a pot to the side surface of the second mold, the resin passage that communicates with the cavity but does not face the substrate communicates with the pot. Further, by pressurizing the resin material in the pot, the fluid resin is injected into the cavity from the resin injection mechanism through the resin passage. Thereafter, the fluid resin is cured. Next, the resin injection mechanism is separated from the second mold, and the cured resin in the resin passage and the cured resin in the cavity are separated.
  • the fluid resin is injected into the cavity from the resin passage through a resin injection portion provided between the cavity and the resin passage.
  • the resin sealing molding apparatus of the present invention is the first in which a substrate on which an electronic component is mounted can be mounted.
  • a mold and a second mold that is opposed to the first mold and has a cavity into which an electronic component can be inserted and a resin passage that communicates the cavity with the outside are provided.
  • the resin injection mechanism is connected to the side surface of the second mold in a state where the first mold and the second mold are closed. Also, the resin material in the pot can be injected into the cavity without contacting the substrate in the resin passage.
  • the gate resin can be removed from the substrate without forming a defective portion in the molded product, and the apparatus can be miniaturized. I'll do it.
  • FIG. 1 is a longitudinal sectional view schematically showing a resin sealing molding apparatus of Example 1, and shows a state where each of a plurality of mold assemblies is opened.
  • FIG. 2 is a side view schematically showing the resin sealing molding apparatus shown in FIG. 1.
  • FIG. 3 is a longitudinal sectional view schematically showing a main part of the resin sealing molding apparatus shown in FIG. 1, showing a state where a pot of a resin injection mechanism is connected to a side surface of the mold assembly laminated structure. ing.
  • FIG. 4 is a longitudinal sectional view schematically showing the main part of the resin sealing molding apparatus of Example 1, in which the fluid resin passes from the pot of the resin injection mechanism to the upper mold cavity of the mold assembly through the resin passage. Show the state of being injected!
  • FIG. 5 is a longitudinal sectional view schematically showing a main part of the resin sealing molding apparatus of Example 1, in which the gate resin cured in the resin passage by separating the resin injection mechanism from the mold assembly is resin. Show the state of being pulled out of the aisle!
  • FIG. 6 is a longitudinal sectional view schematically showing a main part of the resin sealing molding apparatus of Example 1, and shows a state in which the molded product is removed from the upper mold cavity by opening the mold assembly. Show
  • FIG. 7 is a longitudinal sectional view schematically showing a main part of a resin sealing molding apparatus of Example 2, and includes a bra The state immediately before the plunger pushes out the resin material is shown.
  • FIG. 8 is a longitudinal sectional view schematically showing the main part of the resin sealing molding apparatus of Example 2, showing the state when the plunger pushes out the resin material! / .
  • FIG. 9 is a longitudinal sectional view schematically showing a main part of the resin sealing molding apparatus of Example 2, in which the gate resin cured in the resin passage when the resin injection mechanism is pulled away from the mold assembly is resin. Show the state of being pulled out of the aisle!
  • FIG. 10 is a longitudinal sectional view schematically showing a main part of the resin sealing molding apparatus of Example 2, and shows a state where the molded product is removed from the upper mold cavity by opening the mold assembly. It shows.
  • FIG. 11 is a longitudinal sectional view schematically showing a molded product sealed with resin using a conventional resin sealing molding apparatus.
  • FIG. 12 is a longitudinal sectional view schematically showing a molded product sealed with resin using another conventional resin sealing molding apparatus.
  • FIG. 13 is a longitudinal sectional view schematically showing a sealed substrate after unnecessary cured resin is removed from a molded product formed using a conventional resin sealing molding apparatus.
  • the resin seal molding apparatus for electronic parts of Example 1 includes a mold assembly 4.
  • a predetermined number of electronic components 23 mounted on a single substrate 1 are sealed with resin.
  • a predetermined number of electronic components 23 are integrally molded on one main surface of the substrate 1.
  • the mold assembly 4 includes a lower mold 1 as an example of the first mold of the present invention and an upper mold 2 as an example of the second mold of the present invention that faces the lower mold 3.
  • the mold assembly laminated structure 5 is formed.
  • a predetermined number for example, four electronic components 23 mounted on one substrate 1 are integrally sealed with resin.
  • the mold assembly laminated structure 5 includes two sets of mold assemblies 4 having a mold assembly 4a and a mold assembly 4b.
  • the resin sealing molding apparatus includes a substrate supply / extraction mechanism (not shown), a mold opening / closing mechanism 7, and a mold clamping mechanism 8 (press frame mechanism).
  • the substrate supply / extraction mechanism supplies the unmolded substrate 1 to the mold assembly 4 and takes out the molded substrate 6 from the mold assembly 4.
  • Mold assembly 4 consists of mold assemblies 4a and 4b.
  • the mold opening / closing mechanism 7 opens and closes the upper mold 2a and the lower mold 3a in the mold assembly 4a, and opens and closes the upper mold 2b and the lower mold 3b in the mold assembly 4b.
  • the mold clamping mechanism 8 adds a predetermined mold clamping force to the upper mold 2a and the lower mold 3a, and adds a predetermined mold clamping force to the upper mold 2b and the lower mold 3b.
  • the mold opening / closing mechanism 7 is provided between the mold assembly 4a and the mold assembly 4b.
  • the body 7a of the mold opening / closing mechanism 7 includes a lower mold 3a in the upper mold assembly structure 4a and an upper mold 2b in the lower mold assembly 4b.
  • the resin sealing molding apparatus includes a resin injection mechanism 9 provided outside the mold assembly 4.
  • the resin injection mechanism 9 is a resin material that is melted by heating into the mold assembly 4.
  • a pot block having a pot 12 and a plunger 13 extending in the horizontal direction is included for injecting the movable resin.
  • a fluid resin in which a solid resin is melted by heating is used! /, A liquid resin melted without heating! /, A liquid resin that is melted without heating is used as the fluid resin. It can be used.
  • the resin sealing molding apparatus is provided with a reciprocating drive mechanism as shown in the figure.
  • the reciprocating drive mechanism reciprocates in the horizontal direction to bring the resin injecting mechanism 9 into contact with the side surface 5a of the mold assembly laminated structure 5 or to separate it from the side surface 5a of the mold assembly laminated structure 5.
  • the pot tip opening 12a of the resin injection mechanism 9 comes into contact with the side surface 5a or separates from the side surface 5a.
  • the resin injection mechanism 9 is arranged on the side of the mold assembly laminated structure 5 and has two pots 12. Therefore, if the resin injection mechanism 9 is brought into contact with the side surface 5a of the mold assembly laminated structure 5 by the reciprocating drive mechanism, each of the mold assemblies 4a and 4b from the opening 12a formed at the tip of each pot of the resin injection mechanism 9 Fluidity resin can be supplied to Cavity 16.
  • the mold opening / closing mechanism 7 has a rack and pinion mechanism. It has a pinion gear 7b and rack gears 7c and 7d.
  • the pinion gear 7b is rotatably provided on the main body 7a of the mold opening / closing mechanism 7.
  • the upper rack gear 7c is fixed to the upper mold 2a on the upper side, and meshes with the pinion gear 7b.
  • the lower rack gear 7d is fixed to the lower lower mold 3b and meshes with the pinion gear 7b. Therefore, by rotating the pinion gear 7b in the forward direction and the reverse direction, the force S for opening and closing each of the mold assemblies 4a and 4b is used.
  • the mold clamping mechanism 8 includes a hold frame 10 and a pressing means 11.
  • the hold frame 10 is a cylindrical body extending in the horizontal direction, and is provided so as to surround the die assembly laminated structure 5.
  • the pressing means 11 is provided below the mold assembly laminated structure 5 in the hold frame 10, that is, below the lower mold 3b, and the mold assembly laminated structure 5 is directed upward. That is, it presses in the closing direction.
  • rectangular openings 10 a are provided at both ends of the hold frame 10.
  • the upper mold 2a in the upper mold assembly 4a is fixed to the upper inner surface of the hold frame 10.
  • the pressing means 11 and the mold clamping mechanism 8 are fixed to the inner surface of the lower side of the hold frame 10.
  • the upper mold 2a and the lower mold 3a on the upper side of the mold opening / closing mechanism 7 are closed, and the upper mold 2b and the lower mold 3b on the lower side of the mold opening / closing mechanism 7 are Closed.
  • the two mold assemblies 4 a and 4 b are pressed upward and downward by the pressing means 11, and are sandwiched by the pressing means 11 and the hold frame 10, respectively.
  • the mold clamping mechanism 8 applies a clamping force to each of the two mold assemblies 4.
  • the resin injection mechanism 9 includes a pot 12 extending in the horizontal direction for supplying a resin material, a plunger 13 extending in the horizontal direction for pressurizing the resin provided in the pot 12, and a resin supplied into the pot 12. Heating means (not shown) for heating the resin tablet 14 as a material. Note that a tip opening 12a of the pot 12 is provided on the side surface of the pot assembly 12 extending in the horizontal direction on the side of the mold assembly layered structure 5 side (two sets of mold assembly 4 side).
  • the resin sealing molding apparatus includes a resin tablet supply mechanism or a resin material transport supply mechanism, and a reciprocating drive mechanism.
  • the resin tablet supply mechanism supplies the resin tablet 14 from the pot tip opening 12a to the pot 12 in a state of being separated from the mold assembly laminated structure 5.
  • the reciprocating drive mechanism brings the resin injection mechanism 9 into contact with the side surface 5a of the mold assembly layered structure 5 or pulls it away from the side surface 5a. As a result, the pot tip opening 12 a of the pot 12 comes into contact with the side surface 5 a of the mold assembly laminated structure 5.
  • the resin tablet 14 is supplied to the pot 12 from the resin tablet supply mechanism. Thereafter, the plunger 13 is pressed in the horizontal direction (from right to left in the figure). At this time, the resin material is melted by heating in the pot 12. Therefore, the fluidized resin material is supplied to each mold assembly 4 through the resin passage.
  • Fig. 1, Fig. 5 and Fig. 6 show a state where the mold assembly laminated structure 5 and the resin injection mechanism 9 are separated from each other, and Fig. 3 and Fig. 4 show the mold assembly laminated structure 5 and The state where the resin injection mechanism 9 is in contact is shown.
  • a substrate setting surface 15 on which the substrate 1 is set is provided on the mold surface of the lower mold 3 in the mold assembly 4. Further, when the substrate 1 is set on the substrate setting surface 15, it is positioned in the same plane as the end surface 1 a of the substrate 1 and the side surface 5 a of the die assembly laminated structure 5.
  • the substrate setting surface 15 is provided with a substrate fixing mechanism.
  • the substrate fixing mechanism is for fixing the substrate 1 set on the substrate setting surface 15 to the substrate setting surface 15.
  • the substrate fixing mechanism includes, for example, a predetermined number of suction holes extending from the substrate setting surface 15, a vacuum mechanism such as a vacuum pump, and a vacuum nozzle that communicates the suction holes and the vacuum mechanism.
  • the vacuum suction mechanism forcibly sucks air through the suction hole and the vacuum pipe.
  • the substrate 1 is attracted to the substrate setting surface 15.
  • the end face la of the substrate 1 is positioned in the same plane as the side face 5a.
  • the substrate fixing mechanism provided on the substrate setting surface 15 is not limited to one using an adsorption action, and may use a fixture such as a metal fitting.
  • the package resin 18 in the cavity 16 and the gate resin 19 that is a cured resin in the resin passage 17 are cut.
  • the sealed substrate 6 including the package resin 18, the substrate 1, and the gate resin 19
  • the sealed substrate 6 is removed from the sealed substrate 6 (the package resin 18 and the substrate 1).
  • the upper mold 2 is provided with a single resin molding cavity 16.
  • the cavity 16 is a space having a size capable of receiving a predetermined number of electronic components 23 mounted on the board 1. Therefore, after the substrate supply / extraction mechanism sets the substrate 1 on the substrate setting surface 15 of the lower mold 3, the mold opening / closing mechanism 7 closes the upper mold 2 and the lower mold 3, so that a predetermined number of electronic components are placed in the cavity 16. 23 is purchased.
  • the upper mold cavity 16 includes a cavity top surface and a cavity side surface, and a cavity opening is formed in the mold surface of the upper mold 2.
  • the upper cavity 16 has a cavity top surface between the cavity top surface and the cavity side surface. Edge portion 16a. The edge portion 16a constitutes one side of the cavity top surface. The upper cavity 16 has an edge portion on the side surface of the cavity between the side surface of the cavity and the side surface of the cavity. The edge portion of the cavity side surface constitutes one side of the cavity side surface. The contact point between the two edges of the edge 16a of the cavity top surface and one side of the edge of the cavity side surface constitutes a corner of the cavity top surface.
  • a resin passage for resin transfer is provided between the side surface 5a on the resin injection mechanism 9 side of the upper mold 2 and the upper mold cavity 16 so as to penetrate the upper mold 2.
  • the resin passage 17 is configured as, for example, a conical through hole, and has an opening on each of the side surface 5a of the upper mold 2 and the inner surface of the upper mold cavity 16.
  • a conical apex-side portion constituting the resin passage 17 is positioned on the upper mold cavity 16 side. Therefore, the opening on the inner surface of the upper mold 16 is as small as the mold gate opening. Further, the conical bottom surface portion constituting the resin passage 17 is positioned on the side surface 5 a side of the upper mold 2.
  • the fluid resin 20 can be injected into the cavity 16 from the conical bottom side opening in the resin passage 17 through the apex side opening (Gutro).
  • the electronic component 23 mounted on the substrate 1 can be encapsulated in the package resin 18 corresponding to the shape of the cavity. As a result, a molded product 21 is obtained in the upper mold 2 and the lower mold 3.
  • the resin passage 17 is separated from the substrate 1. Therefore, the fluid resin can be injected into the upper mold cavity 16 without bringing the fluid resin 20 passing through the resin passage 17 into contact with the substrate 1.
  • the package resin 18 that is the cured resin in the cavity 16 and the gate resin 19 that is the cured resin in the resin passage 17 can be easily cut at the connecting portion. Therefore, by removing the gate resin 19 including the resin 22 cured in the pot 12 from the resin passage 17, that is, by separating the gate resin 19 cured in the resin passage 17 from the package resin 18, the gate resin 19 And the package resin 18 are separated from each other. That Thus, the molded product 21 is obtained.
  • the position where the resin passage 17 and the cavity 16 communicate with each other is such that the fluid resin 20 passing through the resin passage 17 does not come into contact with the substrate 1 set on the substrate setting surface 15; It may be a position.
  • the mold gate 17 as a resin passage communicates with the edge portion 16a of the cavity top surface so that an edge gate as a small opening is formed.
  • the resin passage 17 and the cavity 16 are provided at any position of the edge portion of the cavity top surface, the edge portion of the cavity side surface, the cavity top surface, the cavity side surface, and the cavity corner portion.
  • the resin passage 17 is a mold gate as a through hole.
  • the force resin passage 17 can include a part of the configuration of the mold for molding the molded product 21.
  • a part of a mold such as a mold runner and a mold pot may be included.
  • the molded product 21 includes a sealed substrate 6 having a substrate 1 and a package resin 18, a gate resin 19 cured in the resin passage 17, and a resin 22 cured in the pot 12 or the like.
  • the gate resin 19 is formed so as not to be pulled by the pulling force on the inner wall surface of the resin passage 17 when being pulled out from the resin passage 17. Therefore, by pulling the pot 12 of the resin injection mechanism 9 away from the upper mold 3 and the lower mold 2, the force S for easily extracting the gate resin 19 cured in the resin path 17 from the resin path 17 can be obtained.
  • the substrate supply / extraction mechanism sets one substrate 1 on the substrate setting surface 15 of the lower mold 3.
  • the mold opening / closing mechanism 7 closes the upper mold 3 and the lower mold 2.
  • a predetermined number of electronic components 23 on the substrate 1 are inserted into the upper mold cavity 16.
  • the substrate 1 is set on the lower die 2 with the side surface 5a of the mold assembly 4 and the end face la of the substrate 1 positioned in the same plane.
  • the resin injection mechanism 9 is moved by the reciprocating drive mechanism, and the pot tip opening 12 a of the pot 12 extending in the horizontal direction comes into contact with the side surface 5 a of the mold assembly 5. At this time, the tip opening 12 a of the pot 12 coincides with the opening of the resin passage 17.
  • the resin tablet 14 is pressurized by the resin pressurizing plunger 13 while being melted by heating in the pot 12 of the resin tablet.
  • the fluid resin 20 is injected into the cavity 16 through the resin passage 17.
  • the resin injection mechanism 9 is pulled away from the mold assembly 4. As a result, the gate resin 19 cured in the resin passage 17 and the package resin 18 cured in the cavity 16 are separated from each other at the connecting portion. Further, when the substrate assembly 1 is adsorbed to the lower mold 3 and the mold assembly 4 is opened, the package resin 18 is separated from the cavity 16 by the bow I.
  • the resin 22 cured in the pot 12 of the resin injection mechanism 9 is pressed by the plunger. Thereby, the gate resin 19 and the resin 22 that are cured resins can be extruded from the inside of the pot 12 to the outside.
  • the gate resin 19 is attached to the surface of the substrate 1.
  • the fluid resin 20 can be injected into the cavity 16 without contacting the surface of the substrate 1. Therefore, it is possible to prevent the gate resin 19 from adhering to the substrate 1.
  • the gate resin 19 can be extracted from the resin passage 17 when the resin injection mechanism 9 is separated from the mold assembly 4. Thereby, the goat resin 19 and the package resin 18 can be separated from each other at the connection portion. For this reason, it is not necessary to provide an ejection pin for the mold gate. Therefore, the resin sealing molding device can be reduced in size by the space for installing the ejector pin. [0076] Further, in the resin sealing molding method of this embodiment, if the resin is cured in the mold assembly 4! /, The resin injection mechanism 9 is changed from the mold assembly 4. Mold assembly 4 may be opened before pulling apart.
  • the step of separating the resin injection mechanism 9 from the mold assembly 4 and the step of opening the mold assembly 4 may be performed simultaneously.
  • the gate resin 19 cured in the resin passage and the package resin 18 cured in the cavity 16 can be separated from each other at the connection portion.
  • FIGS. 7 to 10 the same components as those of the resin sealing molding apparatus described with reference to FIGS. 1 to 6 in Example 1 described above are denoted by the same reference numerals. The description will not be repeated unless otherwise required.
  • the overall configuration of the resin sealing molding apparatus shown in FIGS. 7 to 10 is basically the same as the overall configuration of the resin sealing molding apparatus of Example 1 shown in FIGS. The explanation will not be repeated.
  • a resin locking portion 31 for locking the resin hardened in the pot 12 is provided on the inner surface of the pot 12.
  • the resin locking portion 31 is formed of a concave portion as a circumferential groove. Therefore, when the fluid resin is cured in the resin locking portion 31, the resin cured in the pot 12 is locked by the pot 12.
  • the resin tablet 14 is supplied into the pot 12.
  • the pot tip opening 12 a of the resin injection mechanism 9 is connected to the side surface 5 a of the mold assembly 4.
  • the resin material melted by heating in the pot 12 is pressurized by the plunger 13.
  • the fluid resin 32 is injected into the cavity 16 of the mold assembly 4.
  • the resin injection mechanism 9 is pulled away from the mold assembly 4.
  • the resin 33 cured in the pot 12 is locked by the resin locking portion 31.
  • the pot 12 and the cured resin 33 in the pot 22 are separated from the mold assembly 4 in an integrated state.
  • a substrate setting recess 34 is provided in the lower mold 3 of the mold assembly 4.
  • the board 1 having the predetermined number of electronic components 23 mounted thereon is set in the board setting recess 34.
  • the end face la is positioned in the same plane as the side surface 5 a of the mold structure 4.
  • the upper mold 2 in the mold assembly 4 is provided with a resin molding cavity 16 and a resin transfer resin passage 17 in the same manner as the resin sealing molding apparatus of the first embodiment described above. It has been. Further, a resin injection portion 35 for guiding the fluid resin 32 injected into the resin passage 17 to the cavity 16 is provided between the cavity 16 on the side of the cavity 16 and the resin passage 17.
  • the resin injection part 35 is a recess provided in the upper mold 2.
  • the resin injection portion 35 performs the same function as the mold gate, and the size of the injection port on the cavity 16 side of the resin injection portion 35 is substantially the same as the size of the mold gate port.
  • a fin gate structure may be adopted.
  • the fluid resin 32 injected from the resin passage 17 into the resin injection part 35 can be injected into the cavity 16 through the resin injection part 35.
  • the fin gate resin 36 cured in the resin injection portion 35 is formed adjacent to the package resin 18 on the surface of the substrate 1.
  • the mold surface opening of the resin injection portion 35 is provided in the mold surface of the upper mold 2.
  • the mold surface opening of the resin injecting portion 35 is positioned so as to coincide with the surface of the substrate 1 set in the substrate setting concave portion 34 in a state where the upper die 3 and the lower die 2 are closed.
  • the resin injecting portion 35 is positioned so as to come into contact with a side frame portion as an edge portion of the substrate 1.
  • the opening of the resin passage 17 and the opening of the mold surface of the upper mold 2 are provided in a state of being separated from each other with the space in the resin injection portion 35 as a medium.
  • the opening of the resin passage 17 has a small size about the gate opening.
  • the fluid resin 32 passing through the resin passage 17 is injected into the resin injection portion 35 without contacting the surface of the substrate 1.
  • the packaged resin 18 having a shape corresponding to the shape of the cavity 16 is sealed as a molded product 37 in which the electronic component 23 on the substrate 1 is included.
  • a substrate 38 is obtained.
  • the pot 12 together with the resin injection mechanism 9 can be obtained by pulling the resin injection mechanism 9 away from the mold assembly 4.
  • the resin 33 cured inside and the gate resin 19 cured in the resin passage 17 can be pulled away from the mold assembly 4.
  • the gate resin 19 and the fin gate resin 36 cured in the resin injection portion 35 can be separated from each other at the connection portion.
  • the substrate 1 on which a predetermined number of electronic components 23 are mounted is set in the substrate setting recess 34 of the lower mold 3.
  • each of the two mold assemblies 4 lined up and down is closed.
  • a predetermined number of electronic components 23 are included in the cavity 16.
  • the resin tablet 14 is supplied into the pot 12 of the resin injection mechanism 9.
  • the pot tip opening 12 a is connected to the side surface 5 a of the mold assembly 4 by moving the resin injection mechanism 9.
  • the resin material melted by heating in the pot 12 is pressurized by the plunger 13.
  • the fluid resin 32 is injected into the cavity 16 through the resin passage 17 and the resin injection portion 35.
  • a molded product 37 is obtained in which the electronic component 23 on the substrate 1 is enclosed in the package resin 18 having a shape corresponding to the shape of the cavity 16 in the cavity 16.
  • the resin injection mechanism 9 is pulled away from the mold assembly 4 in the same manner as the resin sealing molding method of Example 1. As a result, the gate resin 19 is extracted from the resin passage 17. As a result, the gate resin 19 in the resin passage 17 and the fin gate resin 36 cured in the resin injection portion 35 are separated from each other at the connection portion. After that, the sealed substrate 38 is taken out from the mold assembly 4 with the upper mold 3 and the lower mold 2 opened.
  • the gate resin 19 adheres to the surface of the substrate 1 according to a conventional resin sealing molding apparatus. However, according to the resin sealing molding apparatus of Example 2, since the fluid resin 32 is injected into the cavity 16 so as not to contact the surface of the substrate 1, the gate resin 19 adheres to the surface of the substrate 1. do not do.
  • the resin-sealing molding of the electronic component is performed by the space where the ejection pin is provided.
  • the size of the device can be reduced.
  • the mold assembly 4 after resin injection may be opened before the step of separating the resin injection mechanism 9 from the mold assembly 4. Further, the step of separating the resin injection mechanism 9 from the mold assembly 4 and the step of opening the mold assembly 4 after resin injection may be performed simultaneously.
  • the gate resin 19 cured in the resin passage 17 and the fin gate resin 36 cured in the resin injection portion 35 can be separated from each other at the connection portion.
  • the package resin 18 in the cavity 16 and the gate resin 19 in the resin passage 17 are mutually connected.
  • the fin gate resin 36 hardened in the resin injection portion 35 and the gate resin 19 in the resin passage 17 are separated from each other instead of being separated at the connection portion V. Therefore, when the gate resin 19 is pulled away from the package resin 18, the force S can easily prevent the package resin 18 from being damaged.
  • a mold assembly 4 in which a plurality of resin passages 17 are provided in one cavity 16 may be employed.
  • a mold assembly 4 in which two resin passages 17 are provided for one cavity 16 may be employed.
  • one pot 12 communicates with each of the two resin passages 17, and fluid resin is injected from one pot 12 into one of the cavities 16 through each of the two resin passages 17.
  • the upper mold 2 is provided with a plurality of cavities, and the resin passage 17 has a plurality of cavities.
  • a mold assembly 4 connected to each of the cavities may be employed.
  • two resin passages 17 respectively corresponding to two cavities 16 are provided, and the fluid resin is injected through a mold runner branched from one pot 12 to two resin passages 17.
  • Each of the resin passages 17 may be poured into two cavities 17.
  • the force with which one substrate 1 is set in the mold assembly 4 A plurality of substrates 1 may be set in the mold assembly 4.
  • a plurality of electronic components 23 mounted on a single substrate 1 are covered with resin as a single body.
  • 1S A plurality of electronic components 23 mounted on a single substrate 1 are provided.
  • the resin may be coated individually or by gnolep.
  • the force cavity 16 provided in the upper mold 2 may be provided in the lower mold 3.
  • a cavity may be provided in each of the upper mold 3 and the lower mold 2.
  • the mold assembly 4 is closed after the two substrates 1 are set in the mold assembly 4 in a state where the electronic component non-mounting surfaces of the two substrates 1 are in contact with each other.
  • the electronic component 23 can be inserted into each of the upper mold 3 and lower mold 2 cavities. Accordingly, the force S can be poured from the pot 12 into the upper mold 3 cavity and the lower mold 2 cavity through the resin passage 17 and the resin injection portion 35, respectively.

Abstract

A substrate (1) with an electronic component mounted thereon is first set in a lower die (3). The lower die (3) and an upper die (2) are closed, and the electronic component is inserted into a cavity (16) provided in the upper die (2). A resin pouring mechanism (9) is then connected to a die assembly (4), whereby a pot (12) is connected to a resin passage (17) in communication with the cavity (16). In this state, the resin material is melted by heating in the pot (12) and is poured from the pot (12) into the cavity (16) through the resin passage (17). The resin supply or pouring mechanism (9) is removed from the die assembly (4), whereby the pot (12) is removed from the resin passage (17). As a result, a package resin (18) within the cavity (16) is separated from a resin (19) cured within the resin passage (17).

Description

明 細 書  Specification
樹脂封止成形方法およびそれに用いられる樹脂封止成形装置  Resin sealing molding method and resin sealing molding apparatus used therefor
技術分野  Technical field
[0001] 本発明は、基板に装着された IC (Integrated Circuit)等の電子部品を樹脂材料に よって封止成形する電子部品の樹脂封止成形方法およびそれに用いられる樹脂封 止成形装置に関するものである。  TECHNICAL FIELD [0001] The present invention relates to a resin sealing molding method of an electronic component for sealing and molding an electronic component such as an IC (Integrated Circuit) mounted on a substrate with a resin material and a resin sealing molding apparatus used therefor. is there.
背景技術  Background art
[0002] 従来から、上型と下型とを有する型組品が上下方向に積み重ねられた樹脂封止成 形装置が用いられている。この樹脂封止成形装置においては、上下方向に積み重 ねられた型組品積層構造の側方に樹脂注入機構が設けられている。この樹脂注入 機構は、型組品積層構造に接触したり、型組品積層構造から離れたりすることができ る。樹脂注入機構は、水平方向に延びるポットとプランジャとを有している。この樹脂 封止成形装置が使用されるときには、流動性樹脂が、水平方向に延びるポットから型 組品積層構造のそれぞれへ、プランジャによって押し込まれる。それにより、複数の 型組品のそれぞれの内で、基板に装着された電子部品が樹脂材料によって封止成 形される。  Conventionally, a resin-sealed molding apparatus in which mold assemblies having an upper mold and a lower mold are stacked in the vertical direction has been used. In this resin sealing molding apparatus, a resin injection mechanism is provided on the side of the mold assembly laminated structure stacked in the vertical direction. This resin injecting mechanism can contact the mold assembly layered structure or leave the mold assembly layered structure. The resin injection mechanism has a pot and a plunger extending in the horizontal direction. When this resin sealing molding apparatus is used, the fluid resin is pushed by a plunger from the pot extending in the horizontal direction to each of the mold assembly laminated structures. Thereby, in each of the plurality of mold assemblies, the electronic component mounted on the board is sealed with the resin material.
[0003] 前述の樹脂封止成形装置を用いる電子部品の樹脂封止成形方法が以下に具体 的に説明される。  [0003] A resin seal molding method of an electronic component using the above-described resin seal molding apparatus will be specifically described below.
[0004] まず、所定数の電子部品が装着された 1枚の基板が型組品のそれぞれの下型にセ ットされる。その後、上型と下型とが閉じられる。それにより、上型に設けられたキヤビ ティ内に所定数の電子部品が揷入される。  [0004] First, one board on which a predetermined number of electronic components are mounted is set in each lower mold of the mold assembly. Thereafter, the upper mold and the lower mold are closed. As a result, a predetermined number of electronic components are inserted into the cavity provided in the upper mold.
[0005] 次に、前述の樹脂注入機構が型組品積層構造の側面に接続される。その後、樹脂 材料がポット内で加熱によって溶融され、プランジャによって加圧される。それにより、 流動性樹脂が、上型に設けられた樹脂通路 (ゲート)を通じてキヤビティへ注入される  [0005] Next, the above-described resin injection mechanism is connected to the side surface of the mold assembly laminated structure. Thereafter, the resin material is melted by heating in the pot and pressurized by the plunger. As a result, the fluid resin is injected into the cavity through the resin passage (gate) provided in the upper mold.
[0006] その後、流動性樹脂が硬化するために必要な時間が経過すれば、樹脂注入機構 が型組品積層構造から引き離される。次に、複数の型組品のそれぞれにおいて、基 板が下型にセットされた状態で上型と下型とが開かれる。これと同時に、ゲート樹脂 8 1が上型のゲート位置に設けられた離型用イジェクトピンで突き出される。それにより、 図 11に示されるように、所定数の電子部品が樹脂材料によって一体的に封止成形さ れた成形品 80が得られる。 [0006] Thereafter, when the time necessary for the fluid resin to harden elapses, the resin injection mechanism is separated from the mold assembly laminated structure. Next, in each of the plurality of mold assemblies, The upper mold and the lower mold are opened with the plate set in the lower mold. At the same time, the gate resin 81 is ejected by a release eject pin provided at the upper mold gate position. As a result, as shown in FIG. 11, a molded product 80 is obtained in which a predetermined number of electronic components are integrally sealed with a resin material.
[0007] なお、図 11に示されるように、成形品 80は、基板 1と、前述のキヤビティの形状に対 応する形状を有するキヤビティ樹脂 18と、前述の樹脂通路に対応する形状を有する ゲート樹脂 81 (不要な硬化樹脂)と、前述のポットの一部に対応する形状を有するポ ット樹脂 82とを有している。図 11から分かるように、樹脂注入機構のポットおよび樹脂 通路内で硬化した不要なゲート樹脂 81およびポット樹脂 82が完成品を構成するパッ ケージ樹脂 18と一体となって残存している。  As shown in FIG. 11, the molded product 80 includes a substrate 1, a cavity resin 18 having a shape corresponding to the shape of the aforementioned cavity, and a gate having a shape corresponding to the aforementioned resin passage. The resin 81 (unnecessary cured resin) and a pot resin 82 having a shape corresponding to a part of the pot described above are included. As can be seen from FIG. 11, the unnecessary gate resin 81 and pot resin 82 cured in the pot and resin passage of the resin injection mechanism remain together with the package resin 18 constituting the finished product.
[0008] その後、ゲート樹脂 81およびポット樹脂 82が成形品 80から除去される。除去の方 法としては、例えば、ゲート樹脂 81を図 11に矢印で示される方向に回動させることに よって除去する方法が考えられる。これは、ゲートブレイクと呼ばれる。この方法によ れば、図 13に示されるように、封止済基板 83が得られる。  Thereafter, the gate resin 81 and the pot resin 82 are removed from the molded product 80. As a removal method, for example, a method of removing the gate resin 81 by rotating it in the direction indicated by the arrow in FIG. This is called a gate break. According to this method, as shown in FIG. 13, a sealed substrate 83 is obtained.
[0009] その後、封止済基板 83が回転切断刃(ブレード)等によって切断される。それにより 、封止済基板 83から個々のパッケージに分割される。  Thereafter, the sealed substrate 83 is cut by a rotary cutting blade (blade) or the like. Thereby, the sealed substrate 83 is divided into individual packages.
[0010] なお、積み重ねられた型組品積層構造と型組品積層構造の外部に設けられたポッ トとを用いる構造は、多層(Multi-Layer)構造、または、 PM (Pure Malt)構造と呼ば れること力 sfcる。 [0010] It should be noted that a structure using a stacked mold assembly laminated structure and a pot provided outside the mold assembly laminated structure is a multi-layer structure or a PM (Pure Malt) structure. Called s fc.
特許文献 1 :特開 2007— 095803号公報  Patent Document 1: Japanese Unexamined Patent Application Publication No. 2007-095803
特許文献 2 :特開 2007— 095802号公報  Patent Document 2: JP 2007-095802 A
発明の開示  Disclosure of the invention
発明が解決しょうとする課題  Problems to be solved by the invention
[0011] 前述の成形品 80のゲートブレイクにおいて、ゲート樹脂 81が基板 1に固着している ため、成形品 80に不良部を形成することなぐ基板 1からゲート樹脂 81を除去するこ とは非常に困難である。 [0011] In the gate break of the molded product 80 described above, since the gate resin 81 is fixed to the substrate 1, it is very difficult to remove the gate resin 81 from the substrate 1 without forming a defective portion in the molded product 80. It is difficult to.
[0012] たとえば、前述のゲートブレイクによれば、図 13に示されるように、破損部 84がパッ ケージ樹脂 18に形成されてしまうことがある。また、図示されていないが、ゲート樹脂 81の残滓が基板 1の表面に付着してしまうことがある。 [0012] For example, according to the gate break described above, the damaged portion 84 may be formed in the package resin 18 as shown in FIG. Although not shown, the gate resin 81 residues may adhere to the surface of the substrate 1.
[0013] したがって、成形品 80に不良部を形成することなぐ基板 1からゲート樹脂 81を除 去するための何らかの対策が必要とされている。この対策の一例として、基板 1のゲ ート樹脂 81が付着している位置およびその近傍の位置にゲート樹脂 81の付着を防 止するための金めつき処理を施すことが考えられる。  Therefore, some measures are required to remove the gate resin 81 from the substrate 1 without forming a defective portion in the molded product 80. As an example of this measure, it is conceivable to perform a staking process to prevent the gate resin 81 from adhering to the position where the gate resin 81 adheres to the substrate 1 and the position in the vicinity thereof.
[0014] しかしながら、金めつき処理が基板 1に施される場合、金めつき処理を部分的に施 すために、コストアップを余儀なくされてしまう。また、たとえ、金めつき処理が基板に 施されたとしても、必ずしも、成形品 80に不良部を形成することなぐ基板 1に付着し たゲート樹脂 81を除去することができると!/、うものではな!/、。  [0014] However, when the gold plating process is performed on the substrate 1, the cost is inevitably increased because the gold plating process is partially performed. In addition, even if gold plating is performed on the substrate, the gate resin 81 adhering to the substrate 1 without necessarily forming a defective portion in the molded product 80 can be removed! / Not a thing!
[0015] また、金めつき処理が基板の一部にのみ施されるため、金めつき処理が施された部 分のみの厚さが大きくなつてしまう。そのため、基板 1の厚さが不均一になる。その結 果、上型と下型とが閉じられるときに、上型の型面と基板の表面との間に隙間が形成 され易くなる。したがって、樹脂が前述の隙間に浸入することによって、樹脂ばりが基 板上に残存してしまう。  [0015] Further, since the gold plating process is performed only on a part of the substrate, the thickness of only the portion subjected to the gold plating process increases. For this reason, the thickness of the substrate 1 becomes uneven. As a result, when the upper mold and the lower mold are closed, a gap is easily formed between the mold surface of the upper mold and the surface of the substrate. Therefore, when the resin enters the gap, the resin beam remains on the substrate.
[0016] また、基板からゲート樹脂を除去するときに生じる問題は、型組品の外部にポットが 設けられた樹脂封止成形装置を用いる場合に限らず、型組品の内部にポットが設け られた樹脂封止成形装置を用いる場合にも生じる。次に、そのことが説明される。  [0016] The problem that occurs when removing the gate resin from the substrate is not limited to the case of using a resin sealing molding apparatus in which a pot is provided outside the mold assembly, but a pot is provided inside the mold assembly. This also occurs when the resin sealing molding apparatus is used. Next, this will be explained.
[0017] 型組品の内部にポットが設けられた樹脂封止成形装置においては、型面に開口を 有する鉛直方向に延びるポットが下型に設けられている。ポット内においては、樹脂 材料が加熱によって溶融されている。この流動性樹脂が加圧用プランジャによって上 型のキヤビティ内に樹脂通路 (金型ゲート)を通じて押し出される。それにより、図 12 示されるように、成形品 85が得られる。  [0017] In a resin sealing molding apparatus in which a pot is provided inside a mold assembly, a pot extending in the vertical direction having an opening on the mold surface is provided in the lower mold. In the pot, the resin material is melted by heating. This fluid resin is pushed out through the resin passage (mold gate) into the upper mold cavity by the pressurizing plunger. As a result, a molded product 85 is obtained as shown in FIG.
[0018] ゲート樹脂 86 (不要な硬化樹脂)とポットに対応する形状を有する不要ポット樹脂 8 7とを成形品 85から除去するために、ゲート樹脂 86および硬化樹脂 87が、図 12に 矢印で示される方向に回動される。これが、ゲートブレイクと呼ばれる。  [0018] In order to remove the gate resin 86 (unnecessary cured resin) and the unnecessary pot resin 87 having a shape corresponding to the pot from the molded product 85, the gate resin 86 and the cured resin 87 are indicated by arrows in FIG. It is rotated in the direction shown. This is called a gate break.
[0019] このとき、成形品 85のゲートブレイクにおいても、図 13に示されるように、破損部 84 が封止済基板 83のパッケージ樹脂 18に形成されてしまうとともに、図示されていない ゲート樹脂 81の残滓が基板 1上に残存してしまう。 [0020] また、多層構造を有する電子部品の樹脂封止成形装置においては、前述のように 、ゲート樹脂 81が離型用イジェクトピンで突き出される。これによれば、成形品に不良 を形成することなぐパッケージ樹脂 18を上型のキヤビティから取り外すことが可能で ある。し力もながら、成形品に不良を形成することなぐゲート樹脂 81を上型から取り 出すことができない。そのため、イジェクトピンが金型ゲートに設けられている。したが つて、前述の多層構造を有する樹脂封止成形装置は、型組品ごとにイジェクトピンを 設けることを必要とされるため、大型化してしまう。 At this time, also in the gate break of the molded article 85, as shown in FIG. 13, the damaged portion 84 is formed in the package resin 18 of the sealed substrate 83, and the gate resin 81 not shown in the figure. Residue remains on the substrate 1. [0020] Further, in the resin sealing molding apparatus for an electronic component having a multilayer structure, as described above, the gate resin 81 is projected by the release eject pin. According to this, it is possible to remove the package resin 18 from the upper mold cavity without forming a defect in the molded product. However, it is impossible to take out the gate resin 81 from the upper mold without forming a defect in the molded product. Therefore, an eject pin is provided on the mold gate. Therefore, the resin sealing molding apparatus having the above-described multilayer structure is increased in size because it is necessary to provide an eject pin for each mold assembly.
[0021] しかしながら、近年、工場における樹脂封止成形装置の設置面積の低減が求めら れている。すなわち、樹脂封止成形装置を小型化することが求められている。したが つて、多層構造を有する樹脂封止成形装置を小型化するために、ゲート樹脂用のィ ジェタトピンを用いなレ、構造の採用が検討されて!/、る。  However, in recent years, there is a demand for a reduction in the installation area of the resin sealing molding apparatus in a factory. That is, it is required to reduce the size of the resin sealing molding apparatus. Therefore, in order to reduce the size of the resin sealing molding device having a multilayer structure, the adoption of a structure and a structure using an ejector pin for gate resin is being considered!
[0022] 本発明は、上述の問題に鑑みてなされたものであり、その目的は、成形品に不良部 を形成することなぐ基板からゲート樹脂を除去することができ、かつ装置を小型化す ることができる樹脂封止成形方法およびそれに用いられる樹脂封止成形装置を提供 することである。  The present invention has been made in view of the above-described problems, and an object of the present invention is to remove the gate resin from the substrate without forming a defective portion in the molded product, and to reduce the size of the apparatus. The present invention provides a resin sealing molding method and a resin sealing molding apparatus used therefor.
課題を解決するための手段  Means for solving the problem
[0023] 本発明の樹脂封止成形方法においては、まず、第 1の型および第 1の型に対向す る第 2の型がされる。次に、第 1の型に電子部品が装着された基板がセットされる。そ の後、第 1の型と第 2の型とを閉じることによって第 2の型のキヤビティに電子部品が 揷入される。次に、第 2の型の側面にポットを有する樹脂注入機構を接続することに よって、キヤビティに連通するが基板に面していない樹脂通路とポットとが連通する。 さらに、ポット内の樹脂材料を加圧することにより、樹脂注入機構から樹脂通路を通じ てキヤビティへ流動性樹脂が注入される。その後、流動性樹脂が硬化する。次に、樹 脂注入機構を第 2の型から弓 Iき離すことにより、樹脂通路内の硬化樹脂とキヤビティ 内の硬化樹脂とが分離される。  [0023] In the resin sealing molding method of the present invention, first, a first mold and a second mold facing the first mold are formed. Next, a substrate on which electronic components are mounted on the first mold is set. Then, by closing the first mold and the second mold, the electronic component is inserted into the second mold cavity. Next, by connecting a resin injection mechanism having a pot to the side surface of the second mold, the resin passage that communicates with the cavity but does not face the substrate communicates with the pot. Further, by pressurizing the resin material in the pot, the fluid resin is injected into the cavity from the resin injection mechanism through the resin passage. Thereafter, the fluid resin is cured. Next, the resin injection mechanism is separated from the second mold, and the cured resin in the resin passage and the cured resin in the cavity are separated.
[0024] 流動性樹脂がキヤビティと樹脂通路との間に設けられた樹脂注入部を通じて樹脂 通路からキヤビティへ注入される。  [0024] The fluid resin is injected into the cavity from the resin passage through a resin injection portion provided between the cavity and the resin passage.
[0025] 本発明の樹脂封止成形装置は、電子部品が搭載された基板が装着され得る第 1の 型と、第 1の型に対向しており、かつ、電子部品が揷入され得るキヤビティと、キヤビテ ィと外部とを連通させる樹脂通路とを有する第 2の型と備えている。また、この装置に おいては、第 1の型と第 2の型とが閉じられた状態で第 2の型の側面には、樹脂注入 機構が接続される。また、ポット内の樹脂材料が、樹脂通路内で基板に接触すること なぐキヤビティへ注入され得る。 [0025] The resin sealing molding apparatus of the present invention is the first in which a substrate on which an electronic component is mounted can be mounted. A mold and a second mold that is opposed to the first mold and has a cavity into which an electronic component can be inserted and a resin passage that communicates the cavity with the outside are provided. In this apparatus, the resin injection mechanism is connected to the side surface of the second mold in a state where the first mold and the second mold are closed. Also, the resin material in the pot can be injected into the cavity without contacting the substrate in the resin passage.
[0026] 前述の装置において、キヤビティと樹脂通路との間に樹脂注入部が設けられている ことが望ましい。 In the above-described apparatus, it is desirable that a resin injection portion is provided between the cavity and the resin passage.
[0027] 上記の樹脂封止成形装置および樹脂封止成形方法によれば、成形品に不良部を 形成することなぐ基板からゲート樹脂を除去することができ、かつ装置を小型化する こと力 Sでさる。  [0027] According to the above resin sealing molding apparatus and resin sealing molding method, the gate resin can be removed from the substrate without forming a defective portion in the molded product, and the apparatus can be miniaturized. I'll do it.
[0028] この発明の上記および他の目的、特徴、局面および利点は、添付の図面と関連し て理解されるこの発明に関する次の詳細な説明から明らかとなるであろう。  [0028] The above and other objects, features, aspects and advantages of the present invention will become apparent from the following detailed description of the present invention taken in conjunction with the accompanying drawings.
図面の簡単な説明  Brief Description of Drawings
[0029] [図 1]実施例 1の樹脂封止成形装置を概略的に示す縦断面図であって、複数の型組 品のそれぞれが開かれた状態を示してレ、る。  [0029] FIG. 1 is a longitudinal sectional view schematically showing a resin sealing molding apparatus of Example 1, and shows a state where each of a plurality of mold assemblies is opened.
[図 2]図 1に示された樹脂封止成形装置を概略的に示す側面図である。  FIG. 2 is a side view schematically showing the resin sealing molding apparatus shown in FIG. 1.
[図 3]図 1に示された樹脂封止成形装置の要部を概略的に示す縦断面図であって、 型組品積層構造の側面に樹脂注入機構のポットが接続された状態を示している。  FIG. 3 is a longitudinal sectional view schematically showing a main part of the resin sealing molding apparatus shown in FIG. 1, showing a state where a pot of a resin injection mechanism is connected to a side surface of the mold assembly laminated structure. ing.
[図 4]実施例 1の樹脂封止成形装置の要部を概略的に示す縦断面図であって、流動 性樹脂が樹脂注入機構のポットから樹脂通路を通じて型組品の上型のキヤビティへ 注入されてレ、る状態を示して!/、る。  FIG. 4 is a longitudinal sectional view schematically showing the main part of the resin sealing molding apparatus of Example 1, in which the fluid resin passes from the pot of the resin injection mechanism to the upper mold cavity of the mold assembly through the resin passage. Show the state of being injected!
[図 5]実施例 1の樹脂封止成形装置の要部を概略的に示す縦断面図であって、樹脂 注入機構が型組品から引き離されることによって樹脂通路内で硬化したゲート樹脂 が樹脂通路から抜き取られた状態を示して!/、る。  FIG. 5 is a longitudinal sectional view schematically showing a main part of the resin sealing molding apparatus of Example 1, in which the gate resin cured in the resin passage by separating the resin injection mechanism from the mold assembly is resin. Show the state of being pulled out of the aisle!
[図 6]実施例 1の樹脂封止成形装置の要部を概略的に示す縦断面図であって、型組 品が開かれることにより、成形品が上型のキヤビティから取り外された状態を示してい  FIG. 6 is a longitudinal sectional view schematically showing a main part of the resin sealing molding apparatus of Example 1, and shows a state in which the molded product is removed from the upper mold cavity by opening the mold assembly. Show
[図 7]実施例 2の樹脂封止成形装置の要部を概略的に示す縦断面図であって、ブラ ンジャが樹脂材料を押し出す直前の状態を示している。 FIG. 7 is a longitudinal sectional view schematically showing a main part of a resin sealing molding apparatus of Example 2, and includes a bra The state immediately before the plunger pushes out the resin material is shown.
[図 8]実施例 2の樹脂封止成形装置の要部を概略的に示す縦断面図であって、ブラ ンジャが樹脂材料を押し出して!/、るときの状態を示して!/、る。  FIG. 8 is a longitudinal sectional view schematically showing the main part of the resin sealing molding apparatus of Example 2, showing the state when the plunger pushes out the resin material! / .
[図 9]実施例 2の樹脂封止成形装置の要部を概略的に示す縦断面図であって、樹脂 注入機構が型組品から引き離されることによって樹脂通路内で硬化したゲート樹脂 が樹脂通路から抜き取られた状態を示して!/、る。  FIG. 9 is a longitudinal sectional view schematically showing a main part of the resin sealing molding apparatus of Example 2, in which the gate resin cured in the resin passage when the resin injection mechanism is pulled away from the mold assembly is resin. Show the state of being pulled out of the aisle!
[図 10]実施例 2の樹脂封止成形装置の要部を概略的に示す縦断面図であって、型 組品が開かれることにより、成形品が上型のキヤビティから取り外された状態を示して いる。  FIG. 10 is a longitudinal sectional view schematically showing a main part of the resin sealing molding apparatus of Example 2, and shows a state where the molded product is removed from the upper mold cavity by opening the mold assembly. It shows.
[図 11]従来の樹脂封止成形装置を用いて樹脂によって封止成形された成形品を概 略的に示す縦断面図である。  FIG. 11 is a longitudinal sectional view schematically showing a molded product sealed with resin using a conventional resin sealing molding apparatus.
[図 12]従来の他の例の樹脂封止成形装置を用いて樹脂によって封止成形された成 形品を概略的に示す縦断面図である。  FIG. 12 is a longitudinal sectional view schematically showing a molded product sealed with resin using another conventional resin sealing molding apparatus.
[図 13]従来の樹脂封止成形装置を用いて形成された成形品から不要な硬化樹脂が 除去された後の封止済基板を概略的に示す縦断面図である。  FIG. 13 is a longitudinal sectional view schematically showing a sealed substrate after unnecessary cured resin is removed from a molded product formed using a conventional resin sealing molding apparatus.
符号の説明  Explanation of symbols
[0030] 1 基板、 la 端面、 2 上型、 2a 上側の上型、 2b 下側の上型、 3 下型、 3a 上 側の下型、 3b 下側の下型、 4 型組品、 4a 上側の型組品、 4b 下側の型組品、 5 型組品積層構造、 5a 側面、 6 封止済基板、 7 型開閉機構、 7a 本体、 7b ピニ オンギヤ、 7c 上側のラックギヤ、 7d 下側のラックギヤ、 8 型締機構、 9 樹脂注入 機構、 10 ホールドフレーム、 10a 開口、 11 押圧機構、 12 ポット、 12a ポット先 端開口、 13 プランジャ、 14 樹脂タブレット(樹脂材料)、 15 基板セット面、 16 キ ャビティ、 16a エッジ部、 17 樹脂通路(貫通孔)、 18 ノ ッケージ樹脂、 19 ゲート 樹脂、 20 流動性樹脂、 21 成形品、 22 硬化樹脂 (ポット)、 23 電子部品、 31 樹脂係止部 (周溝)、 32 流動性樹脂、 33 硬化樹脂 (ポット)、 34 基板セット用凹 部、 35 樹脂注入部、 36 フィンゲート樹脂、 37 成形品、 38 封止済基板。  [0030] 1 substrate, la end face, 2 upper mold, 2a upper mold, 2b lower mold, 3 lower mold, 3a upper mold, 3b lower mold, 4 mold assembly, 4a Upper mold assembly, 4b Lower mold assembly, 5 mold assembly laminate structure, 5a side, 6 Sealed board, 7 mold opening / closing mechanism, 7a body, 7b pinion gear, 7c Upper rack gear, 7d Lower Rack gear, 8 mold clamping mechanism, 9 resin injection mechanism, 10 hold frame, 10a opening, 11 pressing mechanism, 12 pot, 12a pot end opening, 13 plunger, 14 resin tablet (resin material), 15 substrate set surface, 16 Cavity, 16a edge, 17 resin passage (through hole), 18 knock resin, 19 gate resin, 20 fluid resin, 21 molded product, 22 cured resin (pot), 23 electronic component, 31 resin locking part ( Circumferential groove), 32 flowable resin, 33 cured resin (pot), 34 concave for substrate setting, 35 resin injection part, 36 Fingate resin, 37 molded product, 38 encapsulated substrate.
発明を実施するための最良の形態  BEST MODE FOR CARRYING OUT THE INVENTION
[0031] 以下、図面を用いて、本発明の実施例の電子部品の樹脂封止成形方法およびそ れに用いられる樹脂封止成形装置を説明する。 [0031] Hereinafter, with reference to the drawings, a method for resin-sealing molding an electronic component according to an embodiment of the present invention and the The resin sealing molding apparatus used for this will be described.
実施例 1  Example 1
[0032] 以下、図 1〜図 6を参照しながら、本発明の実施の形態 1の電子部品の樹脂封止成 形方法およびそれに用いられる樹脂封止成形装置が説明される。  Hereinafter, with reference to FIGS. 1 to 6, a method for resin-sealing and molding an electronic component according to Embodiment 1 of the present invention and a resin-sealing molding apparatus used therefor will be described.
[0033] (電子部品の樹脂封止成形装置の全体構成)  [0033] (Overall configuration of resin sealing molding apparatus for electronic parts)
図 1および図 2に示されるように、実施例 1の電子部品の樹脂封止成形装置は、型 組品 4を備えている。型組品 4は、一枚の基板 1に装着された所定数の電子部品 23 を樹脂によって封止成形する。所定数の電子部品 23は、基板 1の一方の主表面上 で一体的に封止成形される。また、型組品 4は、本発明の第 1の型の一例の下型 1と 、下型 3に対向する本発明の第 2の型の一例の上型 2とを備えている。  As shown in FIG. 1 and FIG. 2, the resin seal molding apparatus for electronic parts of Example 1 includes a mold assembly 4. In the mold assembly 4, a predetermined number of electronic components 23 mounted on a single substrate 1 are sealed with resin. A predetermined number of electronic components 23 are integrally molded on one main surface of the substrate 1. The mold assembly 4 includes a lower mold 1 as an example of the first mold of the present invention and an upper mold 2 as an example of the second mold of the present invention that faces the lower mold 3.
[0034] また、樹脂封止成形装置においては、型組品 4が上下方向、すなわち型の開閉方 向において、所定数だけ積み重ねられている。これにより、型組品積層構造 5が形成 されている。型組品積層構造 5における複数の型組品 4のそれぞれにおいて、一枚 の基板 1に装着された所定数、たとえば、 4個の電子部品 23が樹脂によって一体的 に封止成形される。本実施例においては、図 1に示されるように、型組品積層構造 5 は、型組品 4aと型組品 4bとを有する二組の型組品 4を備えて!/、る。  [0034] In the resin sealing molding apparatus, a predetermined number of mold assemblies 4 are stacked in the vertical direction, that is, in the mold opening / closing direction. As a result, the mold assembly laminated structure 5 is formed. In each of the plurality of mold assemblies 4 in the mold assembly laminated structure 5, a predetermined number, for example, four electronic components 23 mounted on one substrate 1 are integrally sealed with resin. In this embodiment, as shown in FIG. 1, the mold assembly laminated structure 5 includes two sets of mold assemblies 4 having a mold assembly 4a and a mold assembly 4b.
[0035] また、樹脂封止成形装置は、図示されていない基板供給取出機構、型開閉機構 7 、および型締機構 8 (プレスフレーム機構)を備えている。基板供給取出機構は、成形 前の基板 1を型組品 4に供給し、成形済の基板 6を型組品 4から取り出す。型組品 4 は、型組品 4aおよび 4bからなる。型開閉機構 7は、型組品 4aにおける上型 2aと下型 3aを開閉するとともに、型組品 4bにおける上型 2bと下型 3bを開閉する。型締機構 8 は、上型 2aと下型 3aとに所定の型締カを加えるとともに、上型 2bと下型 3bとに所定 の型締カを加える。  The resin sealing molding apparatus includes a substrate supply / extraction mechanism (not shown), a mold opening / closing mechanism 7, and a mold clamping mechanism 8 (press frame mechanism). The substrate supply / extraction mechanism supplies the unmolded substrate 1 to the mold assembly 4 and takes out the molded substrate 6 from the mold assembly 4. Mold assembly 4 consists of mold assemblies 4a and 4b. The mold opening / closing mechanism 7 opens and closes the upper mold 2a and the lower mold 3a in the mold assembly 4a, and opens and closes the upper mold 2b and the lower mold 3b in the mold assembly 4b. The mold clamping mechanism 8 adds a predetermined mold clamping force to the upper mold 2a and the lower mold 3a, and adds a predetermined mold clamping force to the upper mold 2b and the lower mold 3b.
[0036] 本実施例においては、型組品 4aと型組品 4bとの間に型開閉機構 7が設けられてい る。また、型開閉機構 7の本体 7aは、上側の型組品構 4aにおける下型 3aと下側の型 組品 4bにおける上型 2bと備えている。  In the present embodiment, the mold opening / closing mechanism 7 is provided between the mold assembly 4a and the mold assembly 4b. The body 7a of the mold opening / closing mechanism 7 includes a lower mold 3a in the upper mold assembly structure 4a and an upper mold 2b in the lower mold assembly 4b.
[0037] また、樹脂封止成形装置は、型組品 4の外部に設けられた樹脂注入機構 9を備え ている。樹脂注入機構 9は、型組品 4へ加熱によって溶融した樹脂材料すなわち流 動性樹脂を注入するために、水平方向に延びるポット 12とプランジャ 13と有するポッ トブロックを含んでいる。なお、本実施の形態においては、固形の樹脂が加熱によつ て溶融された流動性樹脂が用いられて!/、る力 加熱なしに溶融して!/、る液体樹脂が 流動性樹脂として用いられてもよレ、。 Further, the resin sealing molding apparatus includes a resin injection mechanism 9 provided outside the mold assembly 4. The resin injection mechanism 9 is a resin material that is melted by heating into the mold assembly 4. A pot block having a pot 12 and a plunger 13 extending in the horizontal direction is included for injecting the movable resin. In the present embodiment, a fluid resin in which a solid resin is melted by heating is used! /, A liquid resin melted without heating! /, A liquid resin that is melted without heating is used as the fluid resin. It can be used.
[0038] また、樹脂封止成形装置は、図示されてレ、な!/、往復駆動機構を備えてレ、る。往復 駆動機構は、水平方向に往復運動することにより、樹脂注入機構 9を、型組品積層 構造 5の側面 5aに接触させたり、型組品積層構造 5の側面 5aから引き離したりする。 これにより、樹脂注入機構 9のポット先端開口 12aが、側面 5aに接触したり、側面 5a 力、ら離れたりする。 [0038] Further, the resin sealing molding apparatus is provided with a reciprocating drive mechanism as shown in the figure. The reciprocating drive mechanism reciprocates in the horizontal direction to bring the resin injecting mechanism 9 into contact with the side surface 5a of the mold assembly laminated structure 5 or to separate it from the side surface 5a of the mold assembly laminated structure 5. As a result, the pot tip opening 12a of the resin injection mechanism 9 comes into contact with the side surface 5a or separates from the side surface 5a.
[0039] なお、図 1に示されるように、樹脂注入機構 9は、型組品積層構造 5の側方に配置さ れており、二つのポット 12を有している。したがって、往復駆動機構によって、型組品 積層構造 5の側面 5aに樹脂注入機構 9を接触させれば、樹脂注入機構 9の各ポット 先端に形成された開口 12aから型組品 4aおよび 4bのそれぞれキヤビティ 16へ流動 性樹脂を供給することができる。  As shown in FIG. 1, the resin injection mechanism 9 is arranged on the side of the mold assembly laminated structure 5 and has two pots 12. Therefore, if the resin injection mechanism 9 is brought into contact with the side surface 5a of the mold assembly laminated structure 5 by the reciprocating drive mechanism, each of the mold assemblies 4a and 4b from the opening 12a formed at the tip of each pot of the resin injection mechanism 9 Fluidity resin can be supplied to Cavity 16.
[0040] (型開閉機構及び型締機構の構成)  [0040] (Configuration of mold opening / closing mechanism and mold clamping mechanism)
また、型開閉機構 7はラック'ピニオン機構を有している。ピニオンギヤ 7bとラックギ ャ 7cおよび 7dとを有している。ピニオンギヤ 7bは、型開閉機構 7の本体 7aに回転可 能に設けられている。上側のラックギヤ 7cは、上側の上型 2aに固定されており、ピニ オンギヤ 7bと嚙合している。また、下側のラックギヤ 7dは、下側の下型 3bに固定され ており、ピニオンギヤ 7bと嚙合している。したがって、ピニオンギヤ 7bを正方向および 逆方向のそれぞれに回転させることにより、型組品 4aおよび 4bのそれぞれを開閉す ること力 Sでさる。  The mold opening / closing mechanism 7 has a rack and pinion mechanism. It has a pinion gear 7b and rack gears 7c and 7d. The pinion gear 7b is rotatably provided on the main body 7a of the mold opening / closing mechanism 7. The upper rack gear 7c is fixed to the upper mold 2a on the upper side, and meshes with the pinion gear 7b. The lower rack gear 7d is fixed to the lower lower mold 3b and meshes with the pinion gear 7b. Therefore, by rotating the pinion gear 7b in the forward direction and the reverse direction, the force S for opening and closing each of the mold assemblies 4a and 4b is used.
[0041] また、型締機構 8は、ホールドフレーム 10と押圧手段 11とを備えている。ホールドフ レーム 10は、水平方向に延びる筒状体であって、型組品積層構造 5を囲むように設 けられている。押圧手段 11は、図 2に示されるように、ホールドフレーム 10内におけ る型組品積層構造 5の下方、すなわち下型 3bの下方に設けられ、かつ、型組品積層 構造 5を上方向すなわち閉じる方向に押圧する。なお、図 2に示されるように、ホール ドフレーム 10の両端には矩形状の開口 10aが設けられている。 [0042] また、上側の型組品 4aにおける上型 2aはホールドフレーム 10の上側の内面に固 定されている。また、押圧手段 11および型締機構 8はホールドフレーム 10の下側の 内面に固定されている。 In addition, the mold clamping mechanism 8 includes a hold frame 10 and a pressing means 11. The hold frame 10 is a cylindrical body extending in the horizontal direction, and is provided so as to surround the die assembly laminated structure 5. As shown in FIG. 2, the pressing means 11 is provided below the mold assembly laminated structure 5 in the hold frame 10, that is, below the lower mold 3b, and the mold assembly laminated structure 5 is directed upward. That is, it presses in the closing direction. As shown in FIG. 2, rectangular openings 10 a are provided at both ends of the hold frame 10. The upper mold 2a in the upper mold assembly 4a is fixed to the upper inner surface of the hold frame 10. The pressing means 11 and the mold clamping mechanism 8 are fixed to the inner surface of the lower side of the hold frame 10.
[0043] 樹脂封止成形装置が使用されるときには、型開閉機構 7の上側の上型 2aおよび下 型 3aが閉じられるとともに、型開閉機構 7の下側の上型 2bと下型 3bとが閉じられる。 このとき、二組の型組品 4aおよび 4bは、それぞれ、押圧手段 11によって上方向およ び下方向に押圧され、押圧手段 11およびホールドフレーム 10によって挟持される。 それにより、型締機構 8が二組の型組品 4のそれぞれに締付力を加える。  [0043] When the resin sealing molding apparatus is used, the upper mold 2a and the lower mold 3a on the upper side of the mold opening / closing mechanism 7 are closed, and the upper mold 2b and the lower mold 3b on the lower side of the mold opening / closing mechanism 7 are Closed. At this time, the two mold assemblies 4 a and 4 b are pressed upward and downward by the pressing means 11, and are sandwiched by the pressing means 11 and the hold frame 10, respectively. Thereby, the mold clamping mechanism 8 applies a clamping force to each of the two mold assemblies 4.
[0044] (樹脂注入機構の構成)  [0044] (Configuration of resin injection mechanism)
また、樹脂注入機構 9は、樹脂材料を供給するための水平方向に延びるポット 12と 、ポット 12内に設けられた樹脂加圧用の水平方向に延びるプランジャ 13と、ポット 12 内に供給された樹脂材料としての樹脂タブレット 14を加熱する加熱手段(図示なし) とを備えている。なお、水平方向に延びるポット 12における型組品積層構造 5側(二 組の型組品 4側)の側面には、ポット 12の先端開口 12aが設けられている。  The resin injection mechanism 9 includes a pot 12 extending in the horizontal direction for supplying a resin material, a plunger 13 extending in the horizontal direction for pressurizing the resin provided in the pot 12, and a resin supplied into the pot 12. Heating means (not shown) for heating the resin tablet 14 as a material. Note that a tip opening 12a of the pot 12 is provided on the side surface of the pot assembly 12 extending in the horizontal direction on the side of the mold assembly layered structure 5 side (two sets of mold assembly 4 side).
[0045] また、樹脂封止成形装置は、図示されていないが、樹脂タブレット供給機構または 樹脂材料搬送供給機構と、往復駆動機構とを備えている。樹脂タブレット供給機構 は、型組品積層構造 5から離れた状態において、ポット先端開口 12aからポット 12へ 樹脂タブレット 14を供給する。また、往復駆動機構は、樹脂注入機構 9を、型組品積 層構造 5の側面 5aに接触させたり、その側面 5aから引き離したりする。それにより、ポ ット 12のポット先端開口 12aが型組品積層構造 5の側面 5aに接触する。  [0045] Although not shown, the resin sealing molding apparatus includes a resin tablet supply mechanism or a resin material transport supply mechanism, and a reciprocating drive mechanism. The resin tablet supply mechanism supplies the resin tablet 14 from the pot tip opening 12a to the pot 12 in a state of being separated from the mold assembly laminated structure 5. Further, the reciprocating drive mechanism brings the resin injection mechanism 9 into contact with the side surface 5a of the mold assembly layered structure 5 or pulls it away from the side surface 5a. As a result, the pot tip opening 12 a of the pot 12 comes into contact with the side surface 5 a of the mold assembly laminated structure 5.
[0046] したがって、樹脂タブレット 14は、樹脂タブレット供給機構からポット 12へ供給され る。その後、プランジャ 13が水平方向に(図においては、右側から左側へ)押圧され る。このとき、樹脂材料はポット 12内で加熱によって溶融している。そのため、流動化 された樹脂材料が型組品 4のそれぞれに樹脂通路を通じて供給される。  Therefore, the resin tablet 14 is supplied to the pot 12 from the resin tablet supply mechanism. Thereafter, the plunger 13 is pressed in the horizontal direction (from right to left in the figure). At this time, the resin material is melted by heating in the pot 12. Therefore, the fluidized resin material is supplied to each mold assembly 4 through the resin passage.
[0047] なお、図 1、図 5および図 6は、型組品積層構造 5と樹脂注入機構 9とが離れた状態 を示しており、図 3および図 4は、型組品積層構造 5と樹脂注入機構 9とが接触してい る状態を示している。  [0047] Fig. 1, Fig. 5 and Fig. 6 show a state where the mold assembly laminated structure 5 and the resin injection mechanism 9 are separated from each other, and Fig. 3 and Fig. 4 show the mold assembly laminated structure 5 and The state where the resin injection mechanism 9 is in contact is shown.
[0048] (型組品の構成) また、型組品 4における下型 3の型面には、基板 1がセットされる基板セット面 15が 設けられている。また、基板 1が基板セット面 15にセットされたときに、基板 1の端面 1 aと型組品積層構造 5の側面 5aと同一平面内に位置付けられる。 [0048] (Configuration of mold assembly) A substrate setting surface 15 on which the substrate 1 is set is provided on the mold surface of the lower mold 3 in the mold assembly 4. Further, when the substrate 1 is set on the substrate setting surface 15, it is positioned in the same plane as the end surface 1 a of the substrate 1 and the side surface 5 a of the die assembly laminated structure 5.
[0049] また、図示されていないが、基板セット面 15には基板固定機構が設けられている。 Although not shown, the substrate setting surface 15 is provided with a substrate fixing mechanism.
基板固定機構は基板セット面 15にセットされた基板 1を基板セット面 15に固定するた めのものである。基板固定機構は、例えば、基板セット面 15から延びる所定数の吸 引孔と、真空ポンプ等の真空引き機構と、吸引孔と真空引き機構とを連通させる真空 ノ イブとを備えている。  The substrate fixing mechanism is for fixing the substrate 1 set on the substrate setting surface 15 to the substrate setting surface 15. The substrate fixing mechanism includes, for example, a predetermined number of suction holes extending from the substrate setting surface 15, a vacuum mechanism such as a vacuum pump, and a vacuum nozzle that communicates the suction holes and the vacuum mechanism.
[0050] したがって、真空引き機構が吸引孔および真空パイプを通じて空気を強制的に吸 引する。それにより、基板 1が基板セット面 15に吸着される。この状態で、基板 1の端 面 laが側面 5aと同一平面内に位置付けられる。なお、基板セット面 15に設けられた 基板固定機構は、吸着作用を利用するもの限定されず、金具等の固定具を利用す るものであってもよい。  [0050] Therefore, the vacuum suction mechanism forcibly sucks air through the suction hole and the vacuum pipe. Thereby, the substrate 1 is attracted to the substrate setting surface 15. In this state, the end face la of the substrate 1 is positioned in the same plane as the side face 5a. Note that the substrate fixing mechanism provided on the substrate setting surface 15 is not limited to one using an adsorption action, and may use a fixture such as a metal fitting.
[0051] また、型組品 4が開かれるときには、基板 1が下型 3の基板セット面 15に固定されて いる。したがって、パッケージ樹脂 18は、基板 1と一体化されているので、上型キヤビ ティ 16内力ゝら引き離される。  [0051] When the mold assembly 4 is opened, the substrate 1 is fixed to the substrate setting surface 15 of the lower mold 3. Therefore, since the package resin 18 is integrated with the substrate 1, it is separated from the internal mold force 16 internal force.
[0052] また、型組品 4が開かれるときに、キヤビティ 16内のパッケージ樹脂 18と樹脂通路 1 7内の硬化樹脂であるゲート樹脂 19とが切断される。それにより、型組品 4内に存在 する成形品から封止済基板 6 (パッケージ樹脂 18、基板 1、およびゲート樹脂 19を含 む)から封止済基板 6 (パッケージ樹脂 18および基板 1)を得ることができる。  [0052] When the mold assembly 4 is opened, the package resin 18 in the cavity 16 and the gate resin 19 that is a cured resin in the resin passage 17 are cut. As a result, the sealed substrate 6 (including the package resin 18, the substrate 1, and the gate resin 19) from the molded product existing in the mold assembly 4 is removed from the sealed substrate 6 (the package resin 18 and the substrate 1). Obtainable.
[0053] また、上型 2には一個の樹脂成形用のキヤビティ 16が設けられている。キヤビティ 1 6は、基板 1に装着された所定数の電子部品 23を受け入れることができる大きさを有 する空間である。そのため、基板供給取出機構が下型 3の基板セット面 15に基板 1を セットした後、型開閉機構 7が上型 2と下型 3とを閉じることにより、キヤビティ 16内に 所定数の電子部品 23が揷入される。  Further, the upper mold 2 is provided with a single resin molding cavity 16. The cavity 16 is a space having a size capable of receiving a predetermined number of electronic components 23 mounted on the board 1. Therefore, after the substrate supply / extraction mechanism sets the substrate 1 on the substrate setting surface 15 of the lower mold 3, the mold opening / closing mechanism 7 closes the upper mold 2 and the lower mold 3, so that a predetermined number of electronic components are placed in the cavity 16. 23 is purchased.
[0054] なお、上型キヤビティ 16は、キヤビティ天面およびキヤビティ側面を備えており、上 型 2の型面にキヤビティ開口を形成している。  Note that the upper mold cavity 16 includes a cavity top surface and a cavity side surface, and a cavity opening is formed in the mold surface of the upper mold 2.
[0055] また、上型キヤビティ 16は、キヤビティ天面とキヤビティ側面との間にキヤビティ天面 のエッジ部 16aを備えている。エッジ部 16aは、キヤビティ天面の一辺を構成する。ま た、上型キヤビティ 16は、キヤビティ側面とキヤビティ側面との間にキヤビティ側面の エッジ部を備えている。キヤビティ側面のエッジ部は、キヤビティ側面の一辺を構成し ている。キヤビティ天面のエッジ部 16aの二辺とキヤビティ側面のエッジ部の一辺との 接点は、キヤビティ天面の角部を構成している。 [0055] Further, the upper cavity 16 has a cavity top surface between the cavity top surface and the cavity side surface. Edge portion 16a. The edge portion 16a constitutes one side of the cavity top surface. The upper cavity 16 has an edge portion on the side surface of the cavity between the side surface of the cavity and the side surface of the cavity. The edge portion of the cavity side surface constitutes one side of the cavity side surface. The contact point between the two edges of the edge 16a of the cavity top surface and one side of the edge of the cavity side surface constitutes a corner of the cavity top surface.
(樹脂通路'貫通孔の構成)  (Configuration of resin passage 'through hole)
樹脂移送用の樹脂通路が、上型 2における樹脂注入機構 9側の側面 5aと上型キヤ ビティ 16と間において、上型 2を貫通するように設けられている。  A resin passage for resin transfer is provided between the side surface 5a on the resin injection mechanism 9 side of the upper mold 2 and the upper mold cavity 16 so as to penetrate the upper mold 2.
[0056] また、樹脂通路 17は、例えば、円錐状の貫通孔として構成されるととともに、上型 2 における側面 5aと、上型キヤビティ 16の内面とのそれぞれに開口を有している。  [0056] The resin passage 17 is configured as, for example, a conical through hole, and has an opening on each of the side surface 5a of the upper mold 2 and the inner surface of the upper mold cavity 16.
[0057] なお、例えば、樹脂通路 17 (スプル)を構成する円錐状の頂点側の部分が、上型キ ャビティ 16側に位置付けられている。そのため、上型キヤビティ 16の内面の開口は 金型ゲート口程度の小さいサイズを有している。また、樹脂通路 17を構成する円錐 形状の底面側の部分が、上型 2の側面 5a側に位置付けられている。  Note that, for example, a conical apex-side portion constituting the resin passage 17 (sprue) is positioned on the upper mold cavity 16 side. Therefore, the opening on the inner surface of the upper mold 16 is as small as the mold gate opening. Further, the conical bottom surface portion constituting the resin passage 17 is positioned on the side surface 5 a side of the upper mold 2.
[0058] したがって、樹脂通路 17における円錐状の底面側の開口から頂点側の開口(グー トロ)を通じてキヤビティ 16内に流動性樹脂 20を注入することができる。  Accordingly, the fluid resin 20 can be injected into the cavity 16 from the conical bottom side opening in the resin passage 17 through the apex side opening (Gutro).
[0059] また、キヤビティの形状に対応したパッケージ樹脂 18内で基板 1に装着された電子 部品 23を封止成形することができる。それにより、上型 2および下型 3内で成形品 21 が得られる。  [0059] In addition, the electronic component 23 mounted on the substrate 1 can be encapsulated in the package resin 18 corresponding to the shape of the cavity. As a result, a molded product 21 is obtained in the upper mold 2 and the lower mold 3.
[0060] また、基板 1が基板セット面 15にセットされた状態で上型 2および下型 3が閉じられ た場合に、樹脂通路 17は基板 1から引き離れている。したがって、基板 1に樹脂通路 17内を通過している流動性樹脂 20を接触させずに、上型キヤビティ 16内に流動性 樹脂を注入することができる。  In addition, when the upper mold 2 and the lower mold 3 are closed while the substrate 1 is set on the substrate setting surface 15, the resin passage 17 is separated from the substrate 1. Therefore, the fluid resin can be injected into the upper mold cavity 16 without bringing the fluid resin 20 passing through the resin passage 17 into contact with the substrate 1.
[0061] また、キヤビティ 16内の硬化樹脂であるパッケージ樹脂 18と樹脂通路 17内の硬化 樹脂であるゲート樹脂 19とは、互いの接続部において、容易に切断され得る。したが つて、樹脂通路 17からポット 12内で硬化した樹脂 22を含むゲート樹脂 19を抜き取る ことにより、つまり、樹脂通路 17内で硬化したゲート樹脂 19をパッケージ樹脂 18から 引き離すことにより、ゲート樹脂 19とパッケージ樹脂 18とが互いに分離される。それ により、成形品 21が得られる。 [0061] Further, the package resin 18 that is the cured resin in the cavity 16 and the gate resin 19 that is the cured resin in the resin passage 17 can be easily cut at the connecting portion. Therefore, by removing the gate resin 19 including the resin 22 cured in the pot 12 from the resin passage 17, that is, by separating the gate resin 19 cured in the resin passage 17 from the package resin 18, the gate resin 19 And the package resin 18 are separated from each other. That Thus, the molded product 21 is obtained.
[0062] また、樹脂通路 17とキヤビティ 16とが連通する位置は、樹脂通路 17内を通過する 流動性樹脂 20が基板セット面 15にセットされた基板 1に接触しないのであれば、い 力、なる位置であってもよい。本実施例においては、樹脂通路としての金型ゲート 17は 、小さな開口としてのエッジゲートが形成されるように、キヤビティ天面のエッジ部 16a に連通している。 [0062] Further, the position where the resin passage 17 and the cavity 16 communicate with each other is such that the fluid resin 20 passing through the resin passage 17 does not come into contact with the substrate 1 set on the substrate setting surface 15; It may be a position. In this embodiment, the mold gate 17 as a resin passage communicates with the edge portion 16a of the cavity top surface so that an edge gate as a small opening is formed.
[0063] また、樹脂通路 17とキヤビティ 16とは、キヤビティ天面のエッジ部、キヤビティ側面 のエッジ部、キヤビティ天面、キヤビティ側面、およびキヤビティ角部のうちのいずれの 位置に設けられてレ、てもよレ、。  [0063] Further, the resin passage 17 and the cavity 16 are provided at any position of the edge portion of the cavity top surface, the edge portion of the cavity side surface, the cavity top surface, the cavity side surface, and the cavity corner portion. Anyway.
[0064] なお、本実施の形態においては、樹脂通路 17は、貫通孔としての金型ゲートである 力 樹脂通路 17は、成形品 21を成形する金型の構成の一部を含むことができるもの であり、例えば、金型ランナおよび金型ポット等の金型の一部を含んでいてもよい。  In the present embodiment, the resin passage 17 is a mold gate as a through hole. The force resin passage 17 can include a part of the configuration of the mold for molding the molded product 21. For example, a part of a mold such as a mold runner and a mold pot may be included.
[0065] なお、成形品 21は、基板 1とパッケージ樹脂 18とを有する封止済基板 6と、樹脂通 路 17内で硬化したゲート樹脂 19と、ポット 12内等で硬化した樹脂 22とを備えている  Note that the molded product 21 includes a sealed substrate 6 having a substrate 1 and a package resin 18, a gate resin 19 cured in the resin passage 17, and a resin 22 cured in the pot 12 or the like. Have
[0066] また、ゲート樹脂 19は、樹脂通路 17から引き抜かれるときに、樹脂通路 17の内壁 面に引つ力、からないように形成されている。したがって、上型 3および下型 2から樹脂 注入機構 9のポット 12を引き離すことにより、樹脂通路 17内で硬化したゲート樹脂 19 を樹脂通路 17から容易に抜き取ること力 Sできる。 In addition, the gate resin 19 is formed so as not to be pulled by the pulling force on the inner wall surface of the resin passage 17 when being pulled out from the resin passage 17. Therefore, by pulling the pot 12 of the resin injection mechanism 9 away from the upper mold 3 and the lower mold 2, the force S for easily extracting the gate resin 19 cured in the resin path 17 from the resin path 17 can be obtained.
[0067] (電子部品の樹脂封止成形方法)  [0067] (Resin sealing molding method for electronic parts)
次に、電子部品 23の樹脂封止成形装置を用いて基板 1に装着された所定数の電 子部品 23を一体的に被覆する方法が説明される。  Next, a method of integrally covering a predetermined number of electronic components 23 mounted on the substrate 1 using a resin sealing molding apparatus for the electronic components 23 will be described.
[0068] まず、型組品 4のそれぞれにおいて、基板供給取出機構が下型 3の基板セット面 1 5に一枚の基板 1をセットする。次に、型開閉機構 7が上型 3および下型 2を閉じる。そ れにより、基板 1上の所定数の電子部品 23が上型キヤビティ 16内に挿入される。この とき、基板 1は、型組品 4の側面 5aと基板 1の端面 laとが同一平面内に位置付けられ た状態で下型 2にセットされている。  First, in each of the mold assemblies 4, the substrate supply / extraction mechanism sets one substrate 1 on the substrate setting surface 15 of the lower mold 3. Next, the mold opening / closing mechanism 7 closes the upper mold 3 and the lower mold 2. As a result, a predetermined number of electronic components 23 on the substrate 1 are inserted into the upper mold cavity 16. At this time, the substrate 1 is set on the lower die 2 with the side surface 5a of the mold assembly 4 and the end face la of the substrate 1 positioned in the same plane.
[0069] 次に、固形の樹脂材料である樹脂タブレット 14が、 2つのポット先端開口 12aからそ れぞれ 2つの水平方向に延びるポット 12内へ供給される。次に、樹脂注入機構 9が 往復駆動機構によって移動され、水平方向に延びるポット 12のポット先端開口 12a が型組品 5の側面 5aに接触する。このとき、ポット 12の先端開口 12aは樹脂通路 17 の開口と一致している。 [0069] Next, the resin tablet 14, which is a solid resin material, is inserted into the two pot tip openings 12a. Each is fed into two horizontally extending pots 12. Next, the resin injection mechanism 9 is moved by the reciprocating drive mechanism, and the pot tip opening 12 a of the pot 12 extending in the horizontal direction comes into contact with the side surface 5 a of the mold assembly 5. At this time, the tip opening 12 a of the pot 12 coincides with the opening of the resin passage 17.
[0070] 次に、型組品 4aおよび 4bのそれぞれにおいて、樹脂タブレット 14力 ポット 12内で 加熱によって溶融された状態で、樹脂加圧用のプランジャ 13によって加圧される。そ れにより、樹脂通路 17を通じてキヤビティ 16内に流動性樹脂 20が注入される。  [0070] Next, in each of the mold assemblies 4a and 4b, the resin tablet 14 is pressurized by the resin pressurizing plunger 13 while being melted by heating in the pot 12 of the resin tablet. As a result, the fluid resin 20 is injected into the cavity 16 through the resin passage 17.
[0071] このとき、基板 1の表面に樹脂通路 17を通過する流動性樹脂 20を接触させることな ぐキヤビティ 16内に流動性樹脂 20をキヤビティ天面のエッジ部 16aから注入するこ と力 Sできる。  [0071] At this time, the force of injecting the fluid resin 20 from the edge 16a of the cavity top surface into the cavity 16 without bringing the fluid resin 20 passing through the resin passage 17 into contact with the surface of the substrate 1 S it can.
[0072] 流動性樹脂 20がキヤビティ 16内で硬化するために必要な所要時間が経過した後、 樹脂注入機構 9を型組品 4から引き離させる。それにより、樹脂通路 17内で硬化した ゲート樹脂 19とキヤビティ 16内で硬化したパッケージ樹脂 18とは、互!/、の接続部で 分離される。また、基板 1が下型 3に吸着された状態で、型組品 4を開くことにより、パ ッケージ樹脂 18がキヤビティ 16から弓 Iき離される。  [0072] After the time required for the fluid resin 20 to cure in the cavity 16 elapses, the resin injection mechanism 9 is pulled away from the mold assembly 4. As a result, the gate resin 19 cured in the resin passage 17 and the package resin 18 cured in the cavity 16 are separated from each other at the connecting portion. Further, when the substrate assembly 1 is adsorbed to the lower mold 3 and the mold assembly 4 is opened, the package resin 18 is separated from the cavity 16 by the bow I.
[0073] また、図 5に示されるように、樹脂注入機構 9のポット 12内で硬化した樹脂 22がブラ ンジャによって押圧される。それにより、硬化樹脂であるゲート樹脂 19および樹脂 22 をポット 12の内部から外部へ押し出すことができる。  Further, as shown in FIG. 5, the resin 22 cured in the pot 12 of the resin injection mechanism 9 is pressed by the plunger. Thereby, the gate resin 19 and the resin 22 that are cured resins can be extruded from the inside of the pot 12 to the outside.
[0074] 従来技術の樹脂封止成形装置によれば、ゲート樹脂 19が基板 1の表面に付着して いる。し力、しながら、実施例 1の樹脂封止成形装置によれば、流動性樹脂 20を、基板 1の表面に接触させずに、キヤビティ 16内に注入することができる。したがって、ゲー ト樹脂 19が基板 1に付着することを防止することができる。  According to the conventional resin sealing molding apparatus, the gate resin 19 is attached to the surface of the substrate 1. However, according to the resin sealing molding apparatus of Example 1, the fluid resin 20 can be injected into the cavity 16 without contacting the surface of the substrate 1. Therefore, it is possible to prevent the gate resin 19 from adhering to the substrate 1.
[0075] また、実施例 1の樹脂封止成形装置によれば、樹脂注入機構 9を型組品 4から引き 離すときに、樹脂通路 17からゲート樹脂 19を抜き取ることができる。それにより、グー ト樹脂 19とパッケージ樹脂 18とを互いの接続部で分離することができる。そのため、 金型ゲートに離型用ェジェタトピンを設けることが必要でなくなる。したがって、ェジェ タトピンを設けるためのスペース分だけ、樹脂封止成形装置を小型化することができ [0076] また、本実施例の樹脂封止成形方法におレ、ては、樹脂が型組品 4内で硬化して!/、 るのであれば、樹脂注入機構 9を型組品 4から引き離す前に、型組品 4を開いてもよ い。また、本実施例の樹脂封止成形装置によれば、樹脂注入機構 9を型組品 4から 引き離す工程と型組品 4を開く工程とを同時に行ってもよい。いずれの方法によって も、樹脂通路内で硬化したゲート樹脂 19と、キヤビティ 16内で硬化したパッケージ樹 脂 18とを、互いの接続部で分離することができる。 In addition, according to the resin sealing molding apparatus of Example 1, the gate resin 19 can be extracted from the resin passage 17 when the resin injection mechanism 9 is separated from the mold assembly 4. Thereby, the goat resin 19 and the package resin 18 can be separated from each other at the connection portion. For this reason, it is not necessary to provide an ejection pin for the mold gate. Therefore, the resin sealing molding device can be reduced in size by the space for installing the ejector pin. [0076] Further, in the resin sealing molding method of this embodiment, if the resin is cured in the mold assembly 4! /, The resin injection mechanism 9 is changed from the mold assembly 4. Mold assembly 4 may be opened before pulling apart. Further, according to the resin sealing molding apparatus of the present embodiment, the step of separating the resin injection mechanism 9 from the mold assembly 4 and the step of opening the mold assembly 4 may be performed simultaneously. By either method, the gate resin 19 cured in the resin passage and the package resin 18 cured in the cavity 16 can be separated from each other at the connection portion.
実施例 2  Example 2
[0077] 図 7〜図 10を用いて実施例 2の樹脂封成形方法およびそれに用いられる樹脂封止 成形装置が説明される。  [0077] The resin sealing molding method of Example 2 and the resin sealing molding apparatus used therefor will be described with reference to Figs.
[0078] なお、図 7〜図 10において、前述された実施例 1において図 1〜図 6を用いて説明 された樹脂封止成形装置の構成部材と同一の構成部材には同一の参照符号が付さ れており、特に必要がなければ、その説明は繰り返さない。  In FIGS. 7 to 10, the same components as those of the resin sealing molding apparatus described with reference to FIGS. 1 to 6 in Example 1 described above are denoted by the same reference numerals. The description will not be repeated unless otherwise required.
[0079] (電子部品の樹脂封止成形装置の全体構成)  [0079] (Overall configuration of resin sealing molding apparatus for electronic parts)
また、図 7〜図 10に示された樹脂封止成形装置の全体構成は、図 1および図 2に 示された実施例 1の樹脂封止成形装置の全体構成と基本的に同一であるので、その 説明は繰り返さない。  Further, the overall configuration of the resin sealing molding apparatus shown in FIGS. 7 to 10 is basically the same as the overall configuration of the resin sealing molding apparatus of Example 1 shown in FIGS. The explanation will not be repeated.
[0080] (ポット内の樹脂係止部)  [0080] (resin locking part in the pot)
また、図 7〜図 10に示されるように、ポット 12の内面には、ポット 12内で硬化した樹 脂を係止する樹脂係止部 31が設けられている。樹脂係止部 31は、周溝としての凹 部からなっている。したがって、流動性樹脂が樹脂係止部 31内において硬化すれば 、ポット 12内で硬化した樹脂がポット 12によって係止される。  As shown in FIGS. 7 to 10, a resin locking portion 31 for locking the resin hardened in the pot 12 is provided on the inner surface of the pot 12. The resin locking portion 31 is formed of a concave portion as a circumferential groove. Therefore, when the fluid resin is cured in the resin locking portion 31, the resin cured in the pot 12 is locked by the pot 12.
[0081] まず、樹脂タブレット 14がポット 12内に供給される。次に、樹脂注入機構 9のポット 先端開口 12aが型組品 4の側面 5aに接続される。その後、ポット 12内で加熱によつ て溶融した樹脂材料がプランジャ 13によって加圧される。それにより、型組品 4のキヤ ビティ 16内に流動性樹脂 32が注入される。次に、樹脂注入機構 9が型組品 4から引 き離される。このとき、ポット 12内で硬化した樹脂 33が樹脂係止部 31によって係止さ れる。それにより、ポット 12とポット 22内の硬化樹脂 33とが、一体となっている状態で 、型組品 4から引き離される。 [0082] (基板セット用凹部と樹脂注入部) First, the resin tablet 14 is supplied into the pot 12. Next, the pot tip opening 12 a of the resin injection mechanism 9 is connected to the side surface 5 a of the mold assembly 4. Thereafter, the resin material melted by heating in the pot 12 is pressurized by the plunger 13. As a result, the fluid resin 32 is injected into the cavity 16 of the mold assembly 4. Next, the resin injection mechanism 9 is pulled away from the mold assembly 4. At this time, the resin 33 cured in the pot 12 is locked by the resin locking portion 31. As a result, the pot 12 and the cured resin 33 in the pot 22 are separated from the mold assembly 4 in an integrated state. [0082] (Recesses for substrate set and resin injection part)
また、図 7〜図 10に示された樹脂封止成形装置においては、基板セット用凹部 34 が型組品 4の下型 3に設けられている。基板セット用凹部 34が所定数の電子部品 23 が装着された基板 1がセットされる。なお、基板 1が基板セット用凹部 34内にセットさ れると、その端面 laは型構造単 4の側面 5aと同一平面内に位置付けられる。  Further, in the resin sealing molding apparatus shown in FIGS. 7 to 10, a substrate setting recess 34 is provided in the lower mold 3 of the mold assembly 4. The board 1 having the predetermined number of electronic components 23 mounted thereon is set in the board setting recess 34. When the substrate 1 is set in the substrate setting recess 34, the end face la is positioned in the same plane as the side surface 5 a of the mold structure 4.
[0083] また、型組品 4における上型 2には、前述された実施例 1の樹脂封止成形装置と同 様に、樹脂成形用のキヤビティ 16と樹脂移送用の樹脂通路 17とが設けられている。 また、キヤビティ 16の側方のキヤビティ 16と樹脂通路 17との間においては、樹脂通 路 17へ注入された流動性樹脂 32をキヤビティ 16へ導くための樹脂注入部 35が設け られている。樹脂注入部 35は、上型 2に設けられた凹部である。また、樹脂注入部 3 5は金型ゲートと同一の機能を果たすものであって、樹脂注入部 35のキヤビティ 16 側の注入口の大きさは金型ゲート口の大きさとほぼ同じである。なお、樹脂注入部 35 として、例えば、フィンゲート構造が採用されてもよい。  [0083] Also, the upper mold 2 in the mold assembly 4 is provided with a resin molding cavity 16 and a resin transfer resin passage 17 in the same manner as the resin sealing molding apparatus of the first embodiment described above. It has been. Further, a resin injection portion 35 for guiding the fluid resin 32 injected into the resin passage 17 to the cavity 16 is provided between the cavity 16 on the side of the cavity 16 and the resin passage 17. The resin injection part 35 is a recess provided in the upper mold 2. The resin injection portion 35 performs the same function as the mold gate, and the size of the injection port on the cavity 16 side of the resin injection portion 35 is substantially the same as the size of the mold gate port. As the resin injection part 35, for example, a fin gate structure may be adopted.
[0084] したがって、樹脂通路 17から樹脂注入部 35に注入された流動性樹脂 32が樹脂注 入部 35を通じてキヤビティ 16へ注入され得る。また、樹脂注入部 35内で硬化したフ インゲート樹脂 36は、基板 1の表面上のパッケージ樹脂 18に隣接するように形成さ れている。  Accordingly, the fluid resin 32 injected from the resin passage 17 into the resin injection part 35 can be injected into the cavity 16 through the resin injection part 35. Further, the fin gate resin 36 cured in the resin injection portion 35 is formed adjacent to the package resin 18 on the surface of the substrate 1.
[0085] なお、上型 2の型面には樹脂注入部 35の型面開口が設けられている。また、樹脂 注入部 35の型面開口は、上型 3および下型 2が閉じられた状態で、基板セット用凹 部 34内にセットされた基板 1の表面と一致するように位置付けられている。本実施の 形態においては、樹脂注入部 35は、基板 1の縁部としてのサイドフレーム部に接触 するように位置付けられて!/、る。  It should be noted that the mold surface opening of the resin injection portion 35 is provided in the mold surface of the upper mold 2. In addition, the mold surface opening of the resin injecting portion 35 is positioned so as to coincide with the surface of the substrate 1 set in the substrate setting concave portion 34 in a state where the upper die 3 and the lower die 2 are closed. . In the present embodiment, the resin injecting portion 35 is positioned so as to come into contact with a side frame portion as an edge portion of the substrate 1.
[0086] また、樹脂通路 17の開口と上型 2の型面の開口とは、樹脂注入部 35内の空間を媒 介として互いに離された状態で設けられている。樹脂通路 17の開口は、ゲート口程 度の小さなサイズを有している。また、実施例 1の樹脂封止成形装置と同様に、樹脂 通路 17内を通過している流動性樹脂 32が、基板 1の表面に接触することなぐ樹脂 注入部 35に注入される。これにより、キヤビティ 16の形状に対応した形状を有するパ ッケージ樹脂 18内に基板 1上の電子部品 23が内包された成形品 37としての封止済 基板 38が得られる。 In addition, the opening of the resin passage 17 and the opening of the mold surface of the upper mold 2 are provided in a state of being separated from each other with the space in the resin injection portion 35 as a medium. The opening of the resin passage 17 has a small size about the gate opening. Further, like the resin sealing molding apparatus of the first embodiment, the fluid resin 32 passing through the resin passage 17 is injected into the resin injection portion 35 without contacting the surface of the substrate 1. As a result, the packaged resin 18 having a shape corresponding to the shape of the cavity 16 is sealed as a molded product 37 in which the electronic component 23 on the substrate 1 is included. A substrate 38 is obtained.
[0087] 本実施例の樹脂封止成形装置によれば、実施例 1の樹脂封止成形装置と同様に、 樹脂注入機構 9を型組品 4から引き離すことにより、樹脂注入機構 9とともにポット 12 内で硬化した樹脂 33および樹脂通路 17内で硬化したゲート樹脂 19を型組品 4から 引き離すこと力できる。それにより、ゲート樹脂 19と樹脂注入部 35内で硬化したフィ ンゲート樹脂 36とを互いの接続部で分離することができる。  [0087] According to the resin sealing molding apparatus of the present embodiment, as in the resin sealing molding apparatus of Example 1, the pot 12 together with the resin injection mechanism 9 can be obtained by pulling the resin injection mechanism 9 away from the mold assembly 4. The resin 33 cured inside and the gate resin 19 cured in the resin passage 17 can be pulled away from the mold assembly 4. As a result, the gate resin 19 and the fin gate resin 36 cured in the resin injection portion 35 can be separated from each other at the connection portion.
[0088] なお、実施例 2の樹脂封止成形装置は、キヤビティ 16へ流動性樹脂を導くために、 金型ゲートを樹脂通路 (金型ゲート) 17および樹脂注入部(フィンゲート) 35とからな る 2つのゲートを有して!/、る。  In addition, in the resin sealing molding apparatus of Example 2, in order to guide the flowable resin to the cavity 16, the mold gate is separated from the resin passage (mold gate) 17 and the resin injection portion (fin gate) 35. Have two gates!
[0089] (電子部品の樹脂封止成形方法)  [0089] (Method of resin sealing molding of electronic parts)
実施例 1の樹脂封止成形方法と同様に、まず、下型 3の基板セット用凹部 34に所 定数の電子部品 23が装着された基板 1がセットされる。次に、上下に並ぶ 2つの型組 品 4のそれぞれが閉じられる。それにより、所定数の電子部品 23がキヤビティ 16に内 包される。その後、樹脂注入機構 9のポット 12内に樹脂タブレット 14が供給される。 次に、樹脂注入機構 9を移動させることより、ポット先端開口 12aが型組品 4の側面 5a に接続される。  Similar to the resin sealing molding method of the first embodiment, first, the substrate 1 on which a predetermined number of electronic components 23 are mounted is set in the substrate setting recess 34 of the lower mold 3. Next, each of the two mold assemblies 4 lined up and down is closed. As a result, a predetermined number of electronic components 23 are included in the cavity 16. Thereafter, the resin tablet 14 is supplied into the pot 12 of the resin injection mechanism 9. Next, the pot tip opening 12 a is connected to the side surface 5 a of the mold assembly 4 by moving the resin injection mechanism 9.
[0090] 次に、実施例 1の樹脂封止成形方法と同様に、ポット 12内で加熱によって溶融した 樹脂材料がプランジャ 13によって加圧される。その結果、樹脂通路 17と樹脂注入部 35とを通じてキヤビティ 16内に流動性樹脂 32が注入される。それにより、キヤビティ 1 6内で基板 1上の電子部品 23がキヤビティ 16の形状に対応した形状を有するパッケ ージ樹脂 18に内包された成形品 37が得られる。  Next, similarly to the resin sealing molding method of Example 1, the resin material melted by heating in the pot 12 is pressurized by the plunger 13. As a result, the fluid resin 32 is injected into the cavity 16 through the resin passage 17 and the resin injection portion 35. As a result, a molded product 37 is obtained in which the electronic component 23 on the substrate 1 is enclosed in the package resin 18 having a shape corresponding to the shape of the cavity 16 in the cavity 16.
[0091] さらに、樹脂の硬化のために必要な所要時間が経過した後、実施例 1の樹脂封止 成形方法と同様に、樹脂注入機構 9を型組品 4から引き離す。それによつて、樹脂通 路 17内からゲート樹脂 19を抜き取られる。その結果、樹脂通路 17のゲート樹脂 19と 樹脂注入部 35内で硬化したフィンゲート樹脂 36とが互いの接続部で分離される。そ の後、上型 3と下型 2とが開かれた状態で、封止済基板 38が型組品 4から取り出され  Furthermore, after the time necessary for curing the resin has elapsed, the resin injection mechanism 9 is pulled away from the mold assembly 4 in the same manner as the resin sealing molding method of Example 1. As a result, the gate resin 19 is extracted from the resin passage 17. As a result, the gate resin 19 in the resin passage 17 and the fin gate resin 36 cured in the resin injection portion 35 are separated from each other at the connection portion. After that, the sealed substrate 38 is taken out from the mold assembly 4 with the upper mold 3 and the lower mold 2 opened.
[0092] なお、最後に、図 10に示されるように、ポット 12内の硬化樹脂 22がプランジャ 13に よって押圧される。それによつて、硬化樹脂であるゲート樹脂 19および樹脂 33が除 去される。 [0092] Finally, as shown in FIG. 10, the cured resin 22 in the pot 12 is transferred to the plunger 13. Therefore, it is pressed. As a result, the gate resin 19 and the resin 33, which are cured resins, are removed.
[0093] ゲート樹脂 19は、従来の樹脂封止成形装置によれば、基板 1の表面に付着してい る。し力もながら、実施例 2の樹脂封止成形装置によれば、流動性樹脂 32が基板 1の 表面に接触しないようにキヤビティ 16へ注入されるため、ゲート樹脂 19が基板 1の表 面に付着しない。  [0093] The gate resin 19 adheres to the surface of the substrate 1 according to a conventional resin sealing molding apparatus. However, according to the resin sealing molding apparatus of Example 2, since the fluid resin 32 is injected into the cavity 16 so as not to contact the surface of the substrate 1, the gate resin 19 adheres to the surface of the substrate 1. do not do.
[0094] また、従来技術のように、金型ゲート位置に設けられた離型用イジェクトピンを用い ることが必要でなくなるため、イジェクトピンを設けるスペース分だけ、電子部品の樹 脂封止成形装置の大きさを小型化することができる。  [0094] Further, since it is not necessary to use the ejection pin provided at the mold gate position as in the prior art, the resin-sealing molding of the electronic component is performed by the space where the ejection pin is provided. The size of the device can be reduced.
[0095] また、本実施例においても、樹脂注入機構 9が型組品 4から引き離される工程の前 に、樹脂注入後の型組品 4が開かれてもよい。また、樹脂注入機構 9が型組品 4から 引き離される程と、樹脂注入後の型組品 4が開かれる工程とが同時に行われてもよい  Also in this embodiment, the mold assembly 4 after resin injection may be opened before the step of separating the resin injection mechanism 9 from the mold assembly 4. Further, the step of separating the resin injection mechanism 9 from the mold assembly 4 and the step of opening the mold assembly 4 after resin injection may be performed simultaneously.
[0096] いずれの場合においても、樹脂通路 17内で硬化したゲート樹脂 19と、樹脂注入部 35内で硬化したフィンゲート樹脂 36とを、互いの接続部で分離することができる。 In any case, the gate resin 19 cured in the resin passage 17 and the fin gate resin 36 cured in the resin injection portion 35 can be separated from each other at the connection portion.
[0097] また、実施例 2の樹脂封止成形装置によれば、実施例 1の樹脂封止成形装置とは 異なり、キヤビティ 16内のパッケージ樹脂 18と樹脂通路 17内のゲート樹脂 19とを互 V、の接続部で分離するのではなぐ樹脂注入部 35で硬化したフィンゲート樹脂 36と 樹脂通路 17内のゲート樹脂 19とを分離する。そのため、ゲート樹脂 19をパッケージ 樹脂 18から引き離すときに、パッケージ樹脂 18に損傷を与えることを容易に防止す ること力 Sでさる。  Further, according to the resin sealing molding apparatus of the second embodiment, unlike the resin sealing molding apparatus of the first embodiment, the package resin 18 in the cavity 16 and the gate resin 19 in the resin passage 17 are mutually connected. The fin gate resin 36 hardened in the resin injection portion 35 and the gate resin 19 in the resin passage 17 are separated from each other instead of being separated at the connection portion V. Therefore, when the gate resin 19 is pulled away from the package resin 18, the force S can easily prevent the package resin 18 from being damaged.
[0098] また、前述の実施例 1および 2のそれぞれにおいては、一個のキヤビティ 16に複数 の樹脂通路 17が設けられている型組品 4が採用されてもよい。例えば、一個のキヤビ ティ 16に対して二個の樹脂通路 17が設けられている型組品 4が採用されてもよい。 この場合、一個のポット 12が二個の樹脂通路 17のそれぞれに連通しており、流動性 樹脂が一個のポット 12から二個の樹脂通路 17のそれぞれを通じて一個のキヤビティ 16へ注入される。  In each of the above-described first and second embodiments, a mold assembly 4 in which a plurality of resin passages 17 are provided in one cavity 16 may be employed. For example, a mold assembly 4 in which two resin passages 17 are provided for one cavity 16 may be employed. In this case, one pot 12 communicates with each of the two resin passages 17, and fluid resin is injected from one pot 12 into one of the cavities 16 through each of the two resin passages 17.
[0099] また、上型 2に複数のキヤビティが設けられているとともに、樹脂通路 17が複数のキ ャビティのそれぞれに接続されている型組品 4が採用されてもよい。例えば、二個の キヤビティ 16にそれぞれ対応する二個の樹脂通路 17が設けられており、流動性樹脂 は、一個のポット 12から二個の樹脂通路 17へ分岐した金型ランナを通じて注入され 、二個の樹脂通路 17からそれぞれ二個のキヤビティ 17に注入されてもよい。 [0099] Further, the upper mold 2 is provided with a plurality of cavities, and the resin passage 17 has a plurality of cavities. A mold assembly 4 connected to each of the cavities may be employed. For example, two resin passages 17 respectively corresponding to two cavities 16 are provided, and the fluid resin is injected through a mold runner branched from one pot 12 to two resin passages 17. Each of the resin passages 17 may be poured into two cavities 17.
[0100] また、実施例 1および 2においては、一枚の基板 1が型組品 4にセットされている力 複数枚の基板 1が型組品 4にセットされてもよい。また、実施例 1および 2においては 、一枚の基板 1に装着された複数の電子部品 23がー体として樹脂に被覆されている 1S 一枚の基板 1に装着された複数の電子部品 23が、個々にまたはグノレープごとに 樹脂に被覆されてもよい。また、実施例 1および 1においては、キヤビティ 16が上型 2 に設けられている力 キヤビティ 16が下型 3に設けられてもよい。  Further, in Examples 1 and 2, the force with which one substrate 1 is set in the mold assembly 4 A plurality of substrates 1 may be set in the mold assembly 4. In Examples 1 and 2, a plurality of electronic components 23 mounted on a single substrate 1 are covered with resin as a single body. 1S A plurality of electronic components 23 mounted on a single substrate 1 are provided. The resin may be coated individually or by gnolep. Further, in Examples 1 and 1, the force cavity 16 provided in the upper mold 2 may be provided in the lower mold 3.
[0101] また、実施例 1および 2においては、キヤビティが上型 3および下型 2のそれぞれに 設けられていてもよい。この場合、二枚の基板 1の電子部品非装着面同士が接触し ている状態で、二枚の基板 1が型組品 4にセットされた後、型組品 4が閉じられる。こ れによれば、上型 3のキヤビティおよび下型 2のキヤビティのそれぞれに電子部品 23 を揷入すること力できる。したがって、ポット 12から上型 3のキヤビティおよび下型 2の キヤビティのそれぞれへ樹脂通路 17および樹脂注入部 35を通じて流動性樹脂を注 人すること力 Sでさる。  [0101] In Examples 1 and 2, a cavity may be provided in each of the upper mold 3 and the lower mold 2. In this case, the mold assembly 4 is closed after the two substrates 1 are set in the mold assembly 4 in a state where the electronic component non-mounting surfaces of the two substrates 1 are in contact with each other. According to this, the electronic component 23 can be inserted into each of the upper mold 3 and lower mold 2 cavities. Accordingly, the force S can be poured from the pot 12 into the upper mold 3 cavity and the lower mold 2 cavity through the resin passage 17 and the resin injection portion 35, respectively.
[0102] この場合、実施例 1および 2の樹脂封止成形装置によって得られる効果と同様の効 果を得ること力 Sできる。さらに、従来の樹脂封止成形装置との比較において、封止済 基板 6または 38 (製品)の生産性を実質的に二倍にすることができる。したがって、製 品の生産性を向上させることができる。  [0102] In this case, it is possible to obtain the same effect S as the effects obtained by the resin sealing molding apparatuses of Examples 1 and 2. Furthermore, the productivity of the sealed substrate 6 or 38 (product) can be substantially doubled in comparison with a conventional resin sealing molding apparatus. Therefore, product productivity can be improved.
[0103] この発明を詳細に説明し示してきたが、これは例示のためのみであって、限定ととつ てはならず、発明の範囲は添付の請求の範囲によってのみ限定されることが明らか に理解されるであろう。  [0103] Although the invention has been described and illustrated in detail, this is for purposes of illustration only and not as a limitation, the scope of the invention is limited only by the appended claims. It will be clearly understood.

Claims

請求の範囲 The scope of the claims
[1] 互いに対向する第 1の型(3)および第 2の型(2)を準備するステップと、  [1] providing a first mold (3) and a second mold (2) facing each other;
前記第 1の型(3)に電子部品(23)が装着された基板(1)をセットするステップと、 前記第 1の型(3)と前記第 2の型(2)とを閉じることによって前記第 2の型(2)のキヤ ビティ(16)に前記電子部品(23)を揷入するステップと、  Setting the board (1) on which the electronic component (23) is mounted on the first mold (3), and closing the first mold (3) and the second mold (2) Inserting the electronic component (23) into the cavity (16) of the second mold (2);
前記第 2の型(2)の側面にポット(12)を有する樹脂注入機構(9)を接続することに よって、前記キヤビティ(16)に連通するが基板(1)に面していない樹脂通路(17)と 前記ポット(12)とを連通させるステップと、  A resin passage that communicates with the cavity (16) but does not face the substrate (1) by connecting a resin injection mechanism (9) having a pot (12) to the side surface of the second mold (2) (17) and a step of communicating the pot (12);
前記ポット( 12)内の樹脂材料(14)を加圧することにより、前記樹脂注入機構(9か ら前記樹脂通路(17)を通じて前記キヤビティ(16)へ流動性樹脂(20)を注入するス 前記流動性樹脂(20)を硬化させるステップと、  By pressurizing the resin material (14) in the pot (12), a fluid resin (20) is injected from the resin injection mechanism (9 through the resin passage (17) into the cavity (16). Curing the flowable resin (20);
前記樹脂注入機構 (9)を前記第 2の型 (2)から引き離すことにより、前記樹脂通路( 17)内の硬化樹脂(19)と前記キヤビティ(16)内の硬化樹脂 (18)とを分離させるステ ップとを備えた、電子部品の樹脂封止成形方法。  By separating the resin injection mechanism (9) from the second mold (2), the cured resin (19) in the resin passage (17) and the cured resin (18) in the cavity (16) are separated. And a resin sealing molding method for an electronic component.
[2] 前記流動性樹脂(20)が前記キヤビティ(16)と前記樹脂通路(17)との間に設けら れた樹脂注入部(35)を通じて前記樹脂通路(17)からキヤビティ(16)へ注入される 、請求の範囲第 1項に記載の電子部品の樹脂封止成形方法。  [2] The fluid resin (20) passes from the resin passage (17) to the cavity (16) through a resin injection part (35) provided between the cavity (16) and the resin passage (17). The resin sealing molding method for an electronic component according to claim 1, wherein the molding is performed.
[3] 電子部品(23)が搭載された基板(1)が装着され得る第 1の型 (3)と、  [3] a first mold (3) on which a substrate (1) on which an electronic component (23) is mounted can be mounted;
前記第 1の型(3)に対向しており、かつ、前記電子部品(23)が揷入され得るキヤビ ティ(16)と、前記キヤビティ(16)と外部とを連通させる樹脂通路(17)とを有する第 2 の型と、  A cavity (16) facing the first mold (3) and into which the electronic component (23) can be inserted, and a resin passage (17) communicating the cavity (16) with the outside A second mold having
前記第 1の型(3)と前記第 2の型(2)とが閉じられた状態で前記第 2の型(2)の側面 に接続される樹脂注入機構 (9)とを備え、  A resin injection mechanism (9) connected to a side surface of the second mold (2) in a state where the first mold (3) and the second mold (2) are closed,
前記ポット(12)内の樹脂材料(14)が、前記樹脂通路(17)内で前記基板(1)に接 触することなぐ前記キヤビティ(16)へ注入され得る、樹脂封止成形装置。  A resin sealing molding apparatus in which the resin material (14) in the pot (12) can be poured into the cavity (16) without contacting the substrate (1) in the resin passage (17).
[4] 前記キヤビティ(16)と前記樹脂通路(17)との間に樹脂注入部(35)が設けられた 、請求の範囲第 3項に記載の樹脂封止成形装置。 [4] The resin sealing molding apparatus according to claim 3, wherein a resin injection part (35) is provided between the cavity (16) and the resin passage (17).
PCT/JP2007/066716 2006-10-03 2007-08-29 Method for resin seal molding, and resin seal molding apparatus for use in the method WO2008041431A1 (en)

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KR101600170B1 (en) * 2014-03-03 2016-03-07 하이디스 테크놀로지 주식회사 Sealant injection apparatus
CN105216237A (en) * 2015-10-31 2016-01-06 重庆市博平液压机械有限公司 The transfer mould of sealing ring on hydraulic press

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Publication number Priority date Publication date Assignee Title
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