WO2008032591A1 - Appareils de transfert de pièces à travailler - Google Patents

Appareils de transfert de pièces à travailler Download PDF

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Publication number
WO2008032591A1
WO2008032591A1 PCT/JP2007/067028 JP2007067028W WO2008032591A1 WO 2008032591 A1 WO2008032591 A1 WO 2008032591A1 JP 2007067028 W JP2007067028 W JP 2007067028W WO 2008032591 A1 WO2008032591 A1 WO 2008032591A1
Authority
WO
WIPO (PCT)
Prior art keywords
arm
workpiece
gripping device
robot
axis
Prior art date
Application number
PCT/JP2007/067028
Other languages
English (en)
Japanese (ja)
Inventor
Takahiro Maeda
Michiharu Tanaka
Original Assignee
Kabushiki Kaisha Yaskawa Denki
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kabushiki Kaisha Yaskawa Denki filed Critical Kabushiki Kaisha Yaskawa Denki
Priority to JP2008534291A priority Critical patent/JP5120258B2/ja
Priority to KR1020087027431A priority patent/KR101310003B1/ko
Publication of WO2008032591A1 publication Critical patent/WO2008032591A1/fr

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/16—Programme controls
    • B25J9/1628—Programme controls characterised by the control loop
    • B25J9/1638—Programme controls characterised by the control loop compensation for arm bending/inertia, pay load weight/inertia
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J11/00—Manipulators not otherwise provided for
    • B25J11/0095—Manipulators transporting wafers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041—Cylindrical coordinate type
    • B25J9/042—Cylindrical coordinate type comprising an articulated arm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/106—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/067—Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/068—Stacking or destacking devices; Means for preventing damage to stacked sheets, e.g. spaces
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67766—Mechanical parts of transfer devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/02—Controlled or contamination-free environments or clean space conditions

Definitions

  • the present invention relates to a work transfer device that transfers a work gripped by a work gripping device by horizontally moving an arm that is cantilevered with respect to a support portion, and in particular, a control point that is shifted due to the stagnation of the arm.
  • the present invention relates to a work transfer device capable of correcting a position.
  • a processing unit is arranged for each processing step, and the substrate is sequentially transported to these processing units. A series of treatments are performed on the substrate.
  • Figure 7 shows the configuration of the workpiece transfer device.
  • a state is shown in which a robot 102 composed of a plurality of axes inserts a glass substrate 107 into a substrate capacity setting set 100 for temporarily storing a plurality of substrates after a series of processing steps.
  • the robot 102 operates by being supplied with motor driving power from the control device 104 via the cable 103.
  • the control device 104 is connected to the teaching means 106 via a cable 105.
  • the teaching means 106 has a plurality of buttons, and outputs an instruction to the control device 104 via the cable 105 by pressing each button.
  • the control device 104 outputs motor driving power to the robot 102 via the cable 103 in accordance with the above instructions.
  • the teaching means 106 may be a general-purpose computer or a personal computer, for example.
  • the substrate capacity setting set 100 includes support pins 101 for holding or supporting the glass substrate 107.
  • FIG. 8 shows the configuration of the robot 102.
  • the first arm link 108 is supported by the turning unit 129 via the first arm shaft 114.
  • the first arm link 108 includes an arm shaft motor 115 and is connected to the arm shaft speed reducer 116.
  • the arm shaft motor 115 rotates, the first arm link 108 is supported by the turning force 129 and the force S to rotate the first arm shaft 114 connected to the arm shaft speed reducer 116.
  • the first arm link 108 is provided with a first link belt 117 inside the first arm link 108 to reduce the arm axis speed. Power is transmitted from the machine 116 to the second arm shaft speed reducer 119 connected to the second arm shaft 118.
  • the second arm shaft reducer 119 has a characteristic of rotating in the opposite direction to the arm shaft reducer 116. That is, when the arm shaft motor 115 rotates, the first link belt 117 is driven, the second arm shaft speed reducer 119 rotates, the connected second arm shaft 118 rotates, and the second arm link 109 rotates. It turns in the opposite direction to the first arm axis 114 around the two arm axis 118.
  • a second link belt 120 is provided inside the second arm link 109, and power is transmitted from the second arm shaft speed reducer 119 to the flange speed reducer 121.
  • the flange reducer 121 has a characteristic of rotating in the opposite direction to the second arm shaft reducer 119.
  • each reducer (arm shaft reducer 116, second arm shaft reducer 119, flange reducer 121) is set so that the rotation angle of the first arm shaft 114 and the rotation angle of the flange 122 are equal. It has been. Also, the distance from the turning center of the first arm shaft 114 to the turning center of the second arm shaft 118 and the distance from the turning center of the second arm shaft 118 to the turning center of the flange 122 are set to be equal. It is.
  • the connected flange 122 rotates in the opposite direction to the second arm shaft 118, that is, in the same direction as the first arm shaft 114. Further, the rotation angle of the first arm shaft 114 and the rotation angle of the flange 122 are equal to each other. The distance from the rotation center of the first arm shaft 114 to the rotation center of the second arm shaft 118 and the rotation center of the second arm shaft 118 are the same. Since the distance from the center of rotation to the rotation center of the flange 122 is equal, the workpiece gripping device 110, the glass substrate 10 7 gripped or placed by the workpiece gripping device 110, and the control device 104 are subject to motion control. The control point 123 that is a virtual point to be moved is linearly moved in the X-axis direction.
  • FIGS. 9 and 10 show a state where the arms (first arm link and second arm link) of the robot 102 are extended and contracted.
  • 9 and 10 are views of the robot shown in FIG. 8 as viewed from the positive direction of the Z-axis.
  • a indicates the distance from the turning center of the first arm shaft 114 to the turning center of the second arm shaft 118. Since a is equal to the distance from the turning center of the second arm shaft 118 to the turning center of the flange 122, the turning center of the first arm shaft 114, the turning center of the second arm shaft 118, and the turning center of the flange 122 are
  • a triangle formed by connecting line segments is an isosceles triangle shown in the figure.
  • the bases rl and r2 of the isosceles triangle are distances from the pivot center of the first arm shaft 114 to the pivot center of the flange 122 (arm expansion / contraction length). For example, when the first arm shaft 114 rotates ⁇ 1 times, the angle formed by the line connecting the first arm shaft 114 to the second arm shaft 118 and the line connecting the first arm shaft 114 to the flange 122 is / 3 1 Since the flange 122 pivots from the mechanism described above in the opposite direction to the second arm shaft 118 by the same angle as the first arm shaft, the direction of the cake gripping device 110 is from the second arm shaft 118 to the flange 122. The direction is an angle / 3 1 counterclockwise from the extended line (see Fig. 9).
  • the lifting shaft motor 124 is connected to a reduction gear (not shown), and is driven to a reduction gear (not shown) connected to the lifting installation unit 125 by a belt (not shown) provided inside the lower lifting link 1 12.
  • a speed reducer (not shown) connected to the lift shaft motor 124 and a speed reducer (not shown) connected to the lifting support 126 are not shown in the upper lifting link 111, and are driven by a belt. Being! /
  • a speed reducer (not shown) connected to the lift installation part 125 and a speed reducer (not shown) connected to the lift support part 126 have a characteristic of rotating in the opposite direction to the speed reducer connected to the lift shaft motor 124.
  • the distance to the turning center is equal.
  • a belt (not shown) provided in each of them is driven, and a speed reducer (not shown) connected to the lifting / lowering mounting part 125 and a speed reducer connected to the lifting / lowering support part 126 are connected to the lifting / lowering shaft motor 124.
  • the workpiece gripping device 110, the gripped glass substrate 107, and the control point 123 move in the Z-axis linear direction in accordance with the operation of the lifting support unit 126.
  • b indicates the distance from the rotation center of the lifting shaft motor 124 to the rotation center of a reduction gear (not shown) connected to the lifting support 126.
  • b is equal to the distance from the center of rotation of the lifting / lowering mounting part 125 to the center of rotation of the speed reducer (not shown) connected to the lifting / lowering shaft motor 124.
  • the triangle formed by the line connecting the rotation centers of the lift installation part 125 is an isosceles triangle.
  • the base z of the isosceles triangle is the distance from the center of rotation of the lift installation part 125 to the center of rotation of the lift support part 126.
  • the lifting shaft motor 1 24 forces ⁇ rotation
  • the angle formed by the lower lifting link 112 and the shaft zero reference 127 and the angle formed on the extension line of the upper lifting link 111 from the shaft is ⁇ .
  • the elevation amount ⁇ is obtained by the equation (2).
  • FIG. 12 shows a state where the robot 102 shown in FIG. 8 is viewed from the positive direction of the Z axis.
  • the pivot 130 is connected to a reduction gear (not shown).
  • the reduction gear is connected to a turning shaft motor 128 shown in FIG.
  • the turning shaft 130 is connected to the turning portion 129, and the turning portion 129 is connected to the main body arm support portion 113.
  • the connected reduction gear (not shown) rotates, and the turning shaft 130 rotates.
  • the connected turning unit 129 turns in the turning positive direction 131 or the turning negative direction 132.
  • FIGS. Figure 13 shows the robot that inserts the workpiece gripping device into the board capacity set as seen from the Z-axis direction.
  • the first arm shaft 114 is rotated to move the arm to the board holding power set 100 in the positive X-axis direction.
  • the cake gripping device 110 can be inserted between the support pins 101.
  • Substrate housing with multiple support pins 134 similar to support pins 101 When inserting the workpiece gripping device 110 into the cassette 133, the workpiece gripping device 110 must be in a state where it can be inserted into the board capacity setting set 133. If the swivel unit 130 is turned with the workpiece gripping device 110 inserted into the substrate holding force set 100, the substrate holding force set 100 and the workpiece gripping device 110 interfere with each other. Rotate and move the arm in the negative direction of the X-axis until the board capacity setting set 100 and workpiece gripping device 110 do not interfere. Next, the turning shaft motor 128 is rotated to rotate the turning shaft 130 and the turning portion 129 is turned.
  • FIG. 14 is a view in which the arm is contracted by the above-described operation, the turning portion 129 is turned, and the workpiece gripping device 110 is directed toward the board accommodation force set 133.
  • the workpiece gripping device 110 is rotated in the negative swing direction 132, and the arm is moved in the negative Y-axis direction to the board holding force set 133, the workpiece is held in the board holding force set 133.
  • Device 110 can be inserted.
  • FIGS. 15 to 16 show a state in which the glass substrate 107 is transported and inserted into an arbitrary substrate capacity set 100 of the substrate capacity sets 100 in which a plurality of robots 102 are stacked.
  • a plurality of substrate capacity sets 100 are stacked in order to accommodate more glass substrates 107 in a limited area. If the stacked board capacity set 100 is counted as one stage from the bottom, two stages and one n stage, the board capacity set is placed above the nth board capacity set 135, for example, the second stage.
  • the board capacity set is n + second stage board capacity set 136.
  • the robot 102 is in a state where the arm gripping device 110 can be inserted into the nth-stage substrate capacity setting set 135 by performing an operation of extending the arm.
  • the elevator shaft motor 124 is rotated, the elevator installation part 125 and the elevator support part 126 are rotated, and the n + second stage substrate is inserted. It moves to the Z-axis direction position where the workpiece gripping device 110 can be inserted into the holding force set 136 (see Fig. 16).
  • FIG. 16 shows a state after the glass substrate is transferred and inserted into the N + second stage substrate capacity set with respect to the substrate capacity set in which a plurality of robots are stacked in the state of FIG. [0011]
  • the arm first arm link 108, second arm link 109
  • the arm is cantilevered with respect to the main body arm support 113, so that the weight of the arm and the workpiece grip Under the influence of the weight of the device 110 and the glass substrate 107, the arm stagnates in the direction of gravity.
  • the conventional workpiece transfer device corrects the stagnation due to gravity of the glass substrate, the arm, and the workpiece gripping device.
  • Patent Document 1 Japanese Patent Laid-Open No. 2000-183128
  • Patent Document 1 corrects static stagnation due to the gravity of the substrate and the arm.
  • many robots produce a stagnation that is larger than a static sag due to the moment of inertia that is applied when the arm extends or contracts.
  • FIG. 17 shows the shape of the center of gravity when the robot grips the glass substrate on the workpiece gripping device.
  • M represents the center of gravity including the workpiece gripping device 110 and the glass substrate 107, and the weight is m [kg].
  • Xg represents the distance in the X-axis direction from the arm shaft motor 115 to the center of gravity M
  • Zg represents the distance in the Z-axis direction from the arm shaft motor 115 to the center of gravity M.
  • FIG. 18 shows the relationship between the arm shaft motor 115 and the center of gravity M in FIG. 17 as a simple model.
  • the translation force F1 [N] is generated when the arm moves in the positive direction of the X axis at an acceleration a [m / s 2 ].
  • F1 is determined by equation (3),
  • F2 shows the translational force due to the reaction that the center of gravity receives by Fl.
  • F1 and F2 are in the relationship of equation (4).
  • F1 F2 (4)
  • the arm shaft motor shaft center position 137 indicates the center position of the arm shaft motor 115, N indicates the moment of inertia N [Nm] generated around the arm shaft motor shaft center position 137 by F2, and is obtained by equation (5). .
  • N F2-Zg (5)
  • Figure 19 shows the stagnation of each part of the arm and the workpiece gripping device when the arm is extended in the positive direction of the X axis.
  • the moment of inertia is applied counterclockwise in the figure around the first arm axis 114.
  • the first arm link 108 swung counterclockwise in the figure due to the moment of inertia.
  • the second arm shaft 118 is deviated counterclockwise in the figure around the first arm shaft 114 from the position when it is a complete rigid body.
  • the second arm link 109 is swung counterclockwise around the second arm shaft 118 by the moment of inertia.
  • the flange 122 deviates counterclockwise in the figure around the second arm shaft 118 from the position when it is a complete rigid body.
  • the workpiece gripping device 110 is swung counterclockwise around the flange 122 by the moment of inertia.
  • the ideal control point 139 shows the control point position when the arm is a perfect rigid body, but the position of the center of gravity is stagnated due to the influence of the above moment of inertia, and as a result the control point is also shifted The position indicated by control point 138 Thus, the amount of deviation in the Z-axis direction is ⁇ 1.
  • FIG. 20 shows a simple model of the relationship between the arm shaft motor 115 and the center of gravity M shown in FIG. 17, and the translational force F3 [N] when the X axis negative direction is contracted with acceleration a [m / s 2 ]. This shows how this occurred.
  • the translational force F3 is obtained by equation (6) as in equation (3).
  • F4 shows the translational force due to the reaction that the center of gravity receives by F3.
  • F3 and F4 are in the relationship of equation (7).
  • the arm shaft motor shaft center position 137 indicates the center position of the arm shaft motor 115, N indicates the moment of inertia N [Nm] generated around the arm shaft motor shaft center position 137 by F4, and is obtained by equation (8). .
  • N F4 -Zg (8)
  • FIG. 21 shows the stagnation of each part of the arm and the workpiece gripping device when the arm is contracted in the negative X-axis direction.
  • the moment of inertia is applied clockwise with the first arm shaft 114 as the center.
  • the first arm link 108 crawls clockwise in the figure due to the moment of inertia.
  • the second arm shaft 118 is deviated clockwise from the position of the complete rigid body around the first arm shaft 114 in the drawing.
  • the second arm link 109 is swung clockwise around the second arm shaft 118 by the moment of inertia.
  • the flange 122 is deviated clockwise from the position of the complete rigid body around the second arm shaft 118 in the drawing.
  • the workpiece gripping device 110 is pinched clockwise around the flange 122 by the moment of inertia.
  • the ideal control point 139 is the force indicating the control point position when the arm is a perfect rigid body, and the center of gravity position is stagnated due to the influence of the above inertial moment, and as a result, the control point 140 is also shifted.
  • the Z axis displacement is ⁇ ⁇ 2.
  • FIG. 22 shows the relationship between the speed of the arm axis motor and the amount of stagnation of the control point position and time when the robot moves the arm in the positive direction of the X axis.
  • the horizontal axis t indicates time
  • the vertical axis V indicates speed
  • the vertical axis Z indicates the amount of stagnation in the Z-axis direction at the control point position.
  • the arm axis motor has the speed waveform indicated by the arm axis motor speed 143.
  • the arm-axis motor 115 accelerates as indicated by the arm-axis motor speed 143, the moment of inertia is generated as described above, and the control point is shifted in the Z-axis positive direction.
  • the amount of shift over time at this time is shown as the amount of stagnation 144 in the control point position during acceleration.
  • the arm shaft motor 115 decelerates from the steady speed as indicated by the arm shaft motor speed 143, the inertia moment is generated as described above, and the control point is Shifts in the negative Z-axis direction.
  • the amount of shift over time at this time is shown in Stagnation amount 145 of control point position during deceleration.
  • the workpiece gripping device of the robot is put in and out of the substrate stored in the substrate capacity setting and is gripped by the workpiece gripping device.
  • the substrate is taken in and out, and when the substrate is taken in and out of the processing unit, interference occurs in each part, and the substrate and the like may be damaged.
  • it is possible to increase the space between the substrates in the board capacity set and to reduce the acceleration / deceleration speed of the arm to reduce the moment of inertia. There are adverse effects such as a decrease in the number of sheets and the time required for substrate transfer.
  • the present invention has been made in view of such problems, and includes a substrate capacity setting without lowering the acceleration / deceleration speed of the arm's expansion / contraction operation, and the insertion / extraction of the glass substrate into / from the processing portion of the substrate.
  • An object of the present invention is to provide a robot apparatus that can be used without interference. Means for solving the problem
  • the present invention is configured as follows.
  • the invention described in claim 1 includes an arm having a workpiece gripping device for gripping or placing a workpiece at a tip thereof, an arm shaft motor that extends and contracts the arm in a horizontal direction, and a lifting shaft motor that lifts and lowers the arm.
  • a workpiece transfer device comprising a control device that drives and controls the arm axis motor and the lifting axis motor of the robot, and the arm when the arm is extended and contracted by driving the arm axis motor.
  • the workpiece gripping device or the arm, the workpiece gripping device, and the inertia moment based on the horizontal movement acceleration / deceleration of the workpiece, the amount of vertical stagnation of the control point position of the robot is obtained. It is characterized by having correction means for driving and correcting in the vertical direction.
  • control device includes storage means, and the robot mouth bot information, the workpiece gripping device information of the workpiece gripping device, and the workpiece information of the workpiece in advance. Information and other parameters are registered, and the amount of stagnation is obtained based on the parameters.
  • the workpiece gripping device information is registered in association with the gripping device identifier, and when the amount of stagnation is obtained, The amount of stagnation is obtained based on the workpiece gripping device information searched by the gripping device identifier.
  • a work identifier is assigned to each of the plurality of works, the work information is registered in association with the work identifier, and when the amount of stagnation is obtained, the work identifier is searched. The amount of stagnation is obtained based on work information.
  • the invention according to claim 5 is characterized in that the robot is a horizontal articulated robot for transporting a liquid crystal glass substrate.
  • the control device of the present invention calculates the sag of the arm due to the moment of inertia when the robot having the arm and the lifting shaft expands and contracts, and the control point position shifts due to the sag.
  • the vertical trajectory of the control point can be kept constant.
  • FIG. 1 is a flowchart of the present invention.
  • Fig. 15 Before inserting the workpiece gripping device into the ⁇ stage of multiple substrate capacity sets. 16) Inserting the workpiece gripping device into the ⁇ + 2 stage of multiple substrate capacity sets. 17] Schematic diagram of the center of gravity when a glass substrate is gripped by a workpiece gripping device
  • a workpiece transfer device that applies the present invention to a horizontal articulated mouth bot having a vertical lifting shaft having the configuration shown in FIGS. 7 and 8 will be described.
  • the parameters of the robot 102 are input in advance to storage means (not shown) provided in the control device 104.
  • the storage means includes a distance [m] from the first arm shaft 114 to the second arm shaft 118, a distance [m] from the second arm shaft 118 to the flange 122, and an arm shaft motor 115 to the flange 122 shown in FIG.
  • identifiers such as unique numbers are assigned to each, and the aforementioned parameters are registered for each identifier. These parameters are searched by the force identifier used for calculation during operation.
  • the various parameters are stored in the storage means of the control device 104 via a force input by pressing a button provided on the teaching means 106, communication means from an external storage device (not shown). It should be noted that force S, which requires other parameters for the desired operation and control of the workpiece transfer device, is omitted because it is not related to the present invention.
  • the robot 102 inputs an operation command to the control device 104 via the cable 105 in accordance with an operation program stored in the storage means in advance or by pressing a plurality of buttons provided in the teaching means 106, and the cable 103 It operates by giving to each motor via.
  • the operation program describes the number (identifier) of the workpiece gripping device provided during operation and the number (identifier) of the workpiece being gripped.
  • the work program is selected in preparation for the operation of reproducing the designated operation program, and a parameter referred to by an identifier included in the work program is retrieved and read.
  • the robot 102 in the teaching mode in which the robot 102 is operated by operating the teaching means, when the operation command is input to the control device 104 via the cable 105 by pressing the button provided on the teaching means 106, the workpiece gripping device provided.
  • the identifier (number) of the robot and the identifier (number) of the workpiece gripped during operation are transmitted.
  • the distance in the X-axis direction [m] from the flange 122 to the workpiece center of gravity M and the distance in the Z-axis direction [m] are the distance in the X-axis direction from the workpiece gripper flange 122 to the workpiece center of gravity M
  • the distance [m], the Z-axis direction distance [m] from the workpiece gripping device flange 122 to the workpiece center of gravity M in operation, and the X axis from the workpiece flange 122 to the workpiece center of gravity M in operation It can be obtained using the direction distance [m] and the Z-axis direction distance [m] from the flange 122 of the workpiece gripped during operation to the center of gravity M of the workpiece.
  • the X-axis direction distance from the first arm shaft 114 to the flange 122 after giving an operation command for one predetermined control cycle from the controller to each motor is the first arm stored in the storage means in advance. It can be obtained geometrically using the distance [m] from the axis 114 to the second arm axis 118 and the distance [m] from the second arm axis 118 to the flange 122. For example, in the case of an arm having the mechanism shown in FIGS. 8, 9, and 10, the distance in the X-axis direction from the first arm shaft 114 to the flange 122 is obtained by the equation (1) as described above.
  • the first arm shaft 114 and the arm shaft motor 115 are arranged at the same position in the X-axis direction, the first arm shaft 1 14 force and the X-axis direction distance [m] to the flange 122 are It is equal to the distance [m] in the X-axis direction from the shaft motor 115 to the flange 12 2.
  • Step 1 Add the X-axis direction distance [m] from the flange 122 to the workpiece center of gravity M and the X-axis direction distance [m] from the arm axis motor 115 to the flange 122.
  • the X-axis direction distance [m] from the arm shaft motor 115 to the workpiece center of gravity M after giving an operation command for one cycle, and the Z-axis direction distance [m] from the flange 122 to the workpiece center of gravity M and the storage means Calculate the distance [m] in the Z-axis direction from the stored arm axis motor 115 to the flange 122, and give an operation command for one cycle from the controller to each motor. From arm axis motor 11 5 to workpiece center of gravity M Find the distance [m] in the Z-axis direction.
  • Step 2 The distance in the X-axis direction from the first arm shaft 114 to the flange 122 before giving an operation command for one cycle from the controller to each motor is the first arm shaft 114 stored in the storage means in advance. Can be obtained geometrically using the distance [m] from the second arm shaft 118 to the second arm shaft 118 and the distance [m] from the second arm shaft 118 to the flange 122. For example, in the case of an arm having the mechanism shown in FIGS. 8, 9, and 10, the distance in the X-axis direction from the first arm shaft 114 to the flange 122 is obtained by the equation (1) as described above.
  • the X-axis direction distance [m] from the flange 122 to the workpiece center of gravity M and the X-axis direction distance [m] from the arm shaft motor 115 to the flange 122 are added, and one cycle of operation from the controller to each motor. Obtain the distance [m] in the X-axis direction from the arm shaft motor 115 before giving the command to the workpiece center of gravity M
  • Step 3 The difference in the X-axis direction distance from the arm shaft motor 115 obtained in Step 1 and Step 2 to the workpiece center of gravity M is calculated. In other words, the X axis movement distance of the workpiece center of gravity Ask.
  • Step 4 By dividing the movement distance in the X-axis direction of the center of gravity obtained in Step 3 by the square of the periodic time [s] for which the control device previously stored in the storage means outputs the operation command to each motor. Acceleration / deceleration a [m / s 2 ] is calculated.
  • Step 5 Add the weight [kg] of the workpiece gripping device registered in the control device! /, And the weight [kg] of the workpiece gripping device in operation. Then, the total weight of the tip portion is obtained from the flange 122, and the translational force F [N] is obtained from the acceleration / deceleration a [m / s 2 ] obtained in step 4 by the equation (9).
  • Step 6 The Z-axis direction distance [m] from the arm shaft motor 115 to the center of gravity M after giving an operation command for one cycle from the control device obtained in Step 1 to each motor.
  • the reaction force of the translational force F [N] obtained (the value is equal to the translational force F)
  • Step 7 Using the stiffness value K [Nm / rad] applied to the workpiece gripping device gripped during operation and the moment of inertia N [Nm] obtained in Step 6, it is possible to Find the angle ⁇ [rad].
  • FIGS. Figure 2 shows the stagnation angle ⁇ 1 when the arm is moved in the positive direction of the X axis.
  • Figure 3 shows the stagnation angle ⁇ 2 when the arm is moved in the negative direction of the X axis.
  • P the point of intersection between the turning center line of the first arm axis 114 and a straight line that passes through the control points when each part of the arm and the workpiece gripping device 110 are completely rigid and is parallel to the workpiece gripping device 110 is P
  • Each angle is an angle formed by a straight line that passes through the point P and the control point, and a straight line that connects the control point 138 and the point P that are displaced by the gripping of each part of the arm and the workpiece gripping device 110.
  • the stagnation angle ⁇ is also defined as point P when the intersection point of each arm part and a straight line passing through the center of gravity and parallel to the work gripping device 110 when the work gripping device 110 is a complete rigid body is point P.
  • point P When the straight line passing through the center of gravity position 141, the arm parts, and the workpiece gripping device 110 It is equal to the angle formed by the straight line connecting the displaced center of gravity 142 and point P.
  • Step 8 The distance [m] from the first arm axis 114 to the second arm axis 118, the distance [m] from the second arm axis 118 to the flange 122 stored in the storage means in advance, and the arm axis Using the angle of the motor 115, geometrically determine the distance in the X-axis direction (arm expansion / contraction length) from the first arm shaft 114 to the flange 122 after giving an operation command for one cycle from the controller to each motor. .
  • the distance in the X-axis direction from the first arm shaft 114 to the flange 122 is obtained by the equation (1) as described above.
  • Step 9 The distance from the first arm axis 114 to the control point by adding the arm expansion / contraction length obtained in Step 8 and the X-axis direction distance [m] from the flange 122 of the workpiece gripping device to the control point Find R [m] and use the stagnation angle ⁇ [rad] found in step 7 to find the stagnation amount AZ [m].
  • the amount of stagnation A Z [m] is obtained by equation (12).
  • Step 10 Assuming that each part of the arm is a complete rigid body, geometrically obtain the lift amount [m] of the lift shaft after giving an operation command for one cycle from the controller to each motor, The Z-axis direction distance [m] from the workpiece gripping device flange 122 to the control point is added to the lift [m], and the control point after the operation command for one cycle is given from the control device to each motor. Calculate the Z-axis direction position [m], subtract the stagnation amount AZ [m] obtained in Step 9, and use this as the corrected target control point Z-axis direction position Zc [m].
  • Step 11 After giving an operation command for one cycle from the control device to each motor, the distance [m] from the lifting / lowering installation part 125 to the lifting / lowering axis motor 124 stored in the storage means in advance, Each motor of the lift shaft to operate with only the lift shaft to the target control point Z-axis direction position [m] corrected in step 10 using the distance [m] from the motor 124 to the lift support portion 126 Find the angle geometrically.
  • the distance [m] from the lifting mounting portion 125 to the lifting shaft motor 124 stored in the storage means in advance and the distance from the lifting shaft motor 124 to the lifting support portion 126.
  • Step 12 An operation command corresponding to the lifting axis motor angle ⁇ obtained in Step 11 is newly output to each axis motor of the robot 102 via the cable 103 as an operation command to the lifting axis motor.
  • Fig. 4 shows the speed 143 of the arm axis motor when the robot shown in Fig. 22 moves the arm in the positive direction of the X axis, the relationship between the control point position and time, and the correction amount.
  • the horizontal axis t indicates time
  • the vertical axis V indicates speed
  • the vertical axis Z indicates the amount of stagnation 144, 145 in the Z-axis direction of the control point position.
  • the correction amount is equal to that obtained by inverting the sign of the stagnation amount ⁇ obtained in step 9.
  • the correction amount when the arm accelerates in the X-axis positive direction is correction 13 during acceleration, and the arm moves in the X-axis positive direction.
  • the correction amount when decelerating is correction 14 when decelerating.
  • FIG. 5 shows a state in which the amount of sag ⁇ ⁇ is corrected when the robot accelerates the arm in the positive direction of the X axis.
  • the sum of the amount of stagnation ⁇ ⁇ and the correction amount is zero, so the corrected control point 15 and the ideal control point 138 have the same Z-axis position, and the Z-axis position of the control point is kept constant.
  • Fig. 6 shows how the robot corrects the sag amount ⁇ ⁇ when the robot accelerates the arm in the negative direction of the X axis. Since the added value of the stagnation amount ⁇ and the correction amount is zero, the corrected control point 16 and the ideal control point 139 have the same Z-axis position, and the control point Z-axis position is kept constant. Be drunk.
  • the arm is a linear motion shaft composed of, for example, a motor, a rack & pinion, or a ball screw, or a linear motion shaft powered by air pressure or hydraulic pressure by electromagnetic valve control.
  • first arm shaft 114, the second arm shaft 118, and the flange 122 are each equipped with a motor, and can be individually rotated to perform interpolation operation in the X-axis direction and operate in the Y-axis direction and the Z-axis direction. It may be possible.
  • the arm has a mechanism that can linearly interpolate the glass substrate in the X-axis direction!
  • the lifting shaft is a linear motion shaft composed of, for example, a rack and pinion or a ball screw, a linear motion shaft powered by air pressure or hydraulic pressure controlled by a solenoid valve, and the lifting shaft motor 124 and the lifting support portion in addition to the lifting shaft motor 124.
  • 126 may be equipped with a motor, rotate individually, perform interpolation in the Z-axis direction, and operate in the X-axis and Y-axis directions.
  • the lift axis only needs to have a mechanism that can perform linear interpolation in the Z-axis direction. 7, 8, 12, 13, and 14 exemplify a general device.
  • the force pivot 130 is not necessarily provided.
  • the teaching means 106 shown in FIG. 7 may be a general-purpose computer or personal computer equipped with an external storage device, for example, the force teaching means 106 provided with an external storage device (not shown). If the operation program is stored in the storage means in advance, the teaching means 106 may not be provided.
  • the cable 105 shown in FIG. 7 is shown as an electrically connected wired transmission means! /, A force that can be a wireless means using radio waves! /, For example.
  • the present invention can be applied to a robot having degrees of freedom in the horizontal direction and the vertical direction, it can be applied to, for example, a vertical 6-axis articulated robot used in many industrial robots. I can do it.
  • a workpiece must be conveyed at high speed and accurately to a pressing machine that continues to operate. Since the work entrance of the press machine is the minimum size to carry the work, it is possible that the work and the press machine may interfere with each other due to the stagnation caused by the moment of inertia when transporting at high speed.
  • the amount of stagnation that occurs during the conveyance of the workpiece is calculated, and the calculated ⁇ is the direction deviated by stagnation from the position where each part is a complete rigid body.
  • the amount of stagnation can be eliminated linearly by linear interpolation using 6 degrees of freedom.
  • the present invention is considered to generate dynamic stagnation due to a high-speed and long-stroke operation, and can be applied particularly to an operation in which one end is operated and a workpiece is conveyed at the other end.

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  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Manipulator (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)

Abstract

L'invention concerne une position d'un point de commande qui est conservée par correction d'un gauchissement provoqué par un moment d'inertie exécuté alors qu'un bras d'un robot s'étend et se rétracte. Dans un dispositif de commande (104) pour commander le fonctionnement du robot composé d'une pluralité d'axes, un gauchissement, provoqué par un moment d'inertie généré au moment de l'extension et de la rétractation du bras par suivi d'une instruction de fonctionnement donnée par un programme de fonctionnement précédemment stocké dans les moyens de stockage et d'une instruction de fonctionnement donnée à partir de moyens d'instruction (106) disposés dans le dispositif de commande (104), est corrigé par le degré de liberté du robot actionné dans la direction opposée à la direction de gauchissement.
PCT/JP2007/067028 2006-09-12 2007-08-31 Appareils de transfert de pièces à travailler WO2008032591A1 (fr)

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JP2008534291A JP5120258B2 (ja) 2006-09-12 2007-08-31 ワーク搬送装置
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JP2009233789A (ja) * 2008-03-27 2009-10-15 Daihen Corp 搬送用ロボットの制御方法
JP2009233788A (ja) * 2008-03-27 2009-10-15 Daihen Corp 搬送用ロボットの制御方法
CN104942802A (zh) * 2014-03-27 2015-09-30 日本电产三协株式会社 工业用机器人
JP2015196242A (ja) * 2014-04-02 2015-11-09 ヒュンダイ ヘビー インダストリーズ カンパニー リミテッドＨｙｕｎｄａｉ Ｈｅａｖｙ Ｉｎｄｕｓｔｒｉｅｓ Ｃｏ．， Ｌｔｄ． 基板移送ロボット駆動装置及びこれを用いた基板移送方法
CN105312632A (zh) * 2014-08-05 2016-02-10 发那科株式会社 将工具按压至工件来进行作业的机器人的控制装置
JP6029709B1 (ja) * 2015-04-30 2016-11-24 カナエ工業株式会社 ワーク組付装置、ワーク組付装置の制御方法、及びワーク組付装置の制御プログラム、並びに記録媒体
WO2018073922A1 (fr) * 2016-10-19 2018-04-26 カナエ工業株式会社 Dispositif d'assemblage de pièce, procédé de commande de dispositif d'assemblage de pièce, programme de commande de dispositif d'assemblage de pièce, et support d'enregistrement
CN112171674A (zh) * 2020-09-25 2021-01-05 苏州微创畅行机器人有限公司 一种柔性机械臂的控制方法及机器人系统
TWI790731B (zh) * 2020-09-16 2023-01-21 日商芝浦機械電子裝置股份有限公司 基板搬送裝置

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KR101331368B1 (ko) * 2011-10-20 2013-11-19 현대중공업 주식회사 사행 보상 기능을 구비하는 기판 반송용 로봇 및 그의 사행 보상 방법
JP7170181B2 (ja) * 2017-09-04 2022-11-14 パナソニックＩｐマネジメント株式会社 ロボット制御装置
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Publication number Priority date Publication date Assignee Title
JP2009233788A (ja) * 2008-03-27 2009-10-15 Daihen Corp 搬送用ロボットの制御方法
JP2009233789A (ja) * 2008-03-27 2009-10-15 Daihen Corp 搬送用ロボットの制御方法
CN104942802A (zh) * 2014-03-27 2015-09-30 日本电产三协株式会社 工业用机器人
KR20150112776A (ko) 2014-03-27 2015-10-07 니혼 덴산 산쿄 가부시키가이샤 산업용 로봇
JP2015196242A (ja) * 2014-04-02 2015-11-09 ヒュンダイ ヘビー インダストリーズ カンパニー リミテッドＨｙｕｎｄａｉ Ｈｅａｖｙ Ｉｎｄｕｓｔｒｉｅｓ Ｃｏ．， Ｌｔｄ． 基板移送ロボット駆動装置及びこれを用いた基板移送方法
CN105312632B (zh) * 2014-08-05 2017-04-12 发那科株式会社 将工具按压至工件来进行作业的机器人的控制装置
CN105312632A (zh) * 2014-08-05 2016-02-10 发那科株式会社 将工具按压至工件来进行作业的机器人的控制装置
JP6029709B1 (ja) * 2015-04-30 2016-11-24 カナエ工業株式会社 ワーク組付装置、ワーク組付装置の制御方法、及びワーク組付装置の制御プログラム、並びに記録媒体
WO2018073922A1 (fr) * 2016-10-19 2018-04-26 カナエ工業株式会社 Dispositif d'assemblage de pièce, procédé de commande de dispositif d'assemblage de pièce, programme de commande de dispositif d'assemblage de pièce, et support d'enregistrement
CN109311156A (zh) * 2016-10-19 2019-02-05 鼎工业株式会社 工件组装装置、工件组装装置的控制方法以及工件组装装置的控制程序及记录介质
US11123875B2 (en) 2016-10-19 2021-09-21 Kanae Kogyo Co., Ltd. Work assembling device, control method for work assembling device, control program for work assembling device, and recording medium
TWI790731B (zh) * 2020-09-16 2023-01-21 日商芝浦機械電子裝置股份有限公司 基板搬送裝置
CN112171674A (zh) * 2020-09-25 2021-01-05 苏州微创畅行机器人有限公司 一种柔性机械臂的控制方法及机器人系统

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TW200832599A (en) 2008-08-01
TWI423377B (zh) 2014-01-11
KR101310003B1 (ko) 2013-09-24
JP5120258B2 (ja) 2013-01-16
JPWO2008032591A1 (ja) 2010-01-21

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