WO2008032365A1 - Electronic device and method for manufacturing same - Google Patents

Electronic device and method for manufacturing same Download PDF

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Publication number
WO2008032365A1
WO2008032365A1 PCT/JP2006/318047 JP2006318047W WO2008032365A1 WO 2008032365 A1 WO2008032365 A1 WO 2008032365A1 JP 2006318047 W JP2006318047 W JP 2006318047W WO 2008032365 A1 WO2008032365 A1 WO 2008032365A1
Authority
WO
WIPO (PCT)
Prior art keywords
solder
pattern
electrode
substrate
electronic device
Prior art date
Application number
PCT/JP2006/318047
Other languages
French (fr)
Japanese (ja)
Inventor
Daisuke Seki
Original Assignee
Fujitsu Limited
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Limited filed Critical Fujitsu Limited
Priority to JP2008534168A priority Critical patent/JP4847535B2/en
Priority to PCT/JP2006/318047 priority patent/WO2008032365A1/en
Publication of WO2008032365A1 publication Critical patent/WO2008032365A1/en

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Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K9/00Screening of apparatus or components against electric or magnetic fields
    • H05K9/0067Devices for protecting against damage from electrostatic discharge
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/0213Electrical arrangements not otherwise provided for
    • H05K1/0254High voltage adaptations; Electrical insulation details; Overvoltage or electrostatic discharge protection ; Arrangements for regulating voltages or for using plural voltages
    • H05K1/0257Overvoltage protection
    • H05K1/0259Electrostatic discharge [ESD] protection
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/11Printed elements for providing electric connections to or between printed circuits
    • H05K1/111Pads for surface mounting, e.g. lay-out
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/09Shape and layout
    • H05K2201/09209Shape and layout details of conductors
    • H05K2201/09654Shape and layout details of conductors covering at least two types of conductors provided for in H05K2201/09218 - H05K2201/095
    • H05K2201/09781Dummy conductors, i.e. not used for normal transport of current; Dummy electrodes of components
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/30Assembling printed circuits with electric components, e.g. with resistor
    • H05K3/32Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
    • H05K3/34Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
    • H05K3/3457Solder materials or compositions; Methods of application thereof

Definitions

  • the present invention relates to a technique for mounting an element on a substrate.
  • Discharge that is, destruction may be caused by the application of static electricity.
  • Patent Documents 1 and 2 there are techniques disclosed in Patent Documents 1 and 2 below.
  • Patent Document 1 Japanese Patent Laid-Open No. 2001-308586
  • Patent Document 2 JP 2004-342464 A
  • FIG. 15 shows a fingerprint sensor 101 arranged on the surface of a notebook computer or the like.
  • the fingerprint sensor 101 is mounted on a printed circuit board 102 by a BGA (Ball Grid Array) method, and is arranged such that a reading surface 101A is exposed outside the housing 103 for reading a fingerprint.
  • BGA Bit Grid Array
  • the surface of an electronic device such as the fingerprint sensor 101 is generally packaged (including a mold) with a material having low conductivity, and is unlikely to receive ESD. Even if this is not the case, some countermeasures have been taken, such as flowing ESD received on the device surface to the ground, and even if ESD is applied to the device surface, the possibility of damage to internal circuits is low.
  • BGA terminal for connecting the internal circuit to the outside. If the ESD reaches the BGA terminal 104 through the gap between the fingerprint sensor 101 and the housing 103, as shown in FIG. 15, if the ESD reaches the BGA terminal 104, the circuit inside the device and the periphery of the device This circuit (hereinafter also referred to simply as the internal circuit) will be applied with a voltage much higher than the rated voltage, which may cause damage.
  • a conductive member 105 may be disposed between the fingerprint sensor 101 and the housing 103 as shown in FIG. 16 and connected to the ground line 106 of the printed board 102. Thereby, since ESD is absorbed by the conductive member 105, the BGA terminal 104 can be protected.
  • FIG. 16 increases the number of conductive members 105 and increases the number of steps for connecting the conductive members 105 to the ground line 106 as compared with the configuration of FIG. This increases the manufacturing cost.
  • the present invention when manufacturing an electronic device, by forming the electrostatic discharge conductive portion with solder, the circuit on the substrate of the electronic device is protected from ESD without causing an increase in the number of parts or an increase in processes. Provide technology to do.
  • the present invention employs the following configuration.
  • the topmost part of the electrostatic discharge conductive part may be displaced from the center of the pattern width so as to be separated from the electrode.
  • a terminal of an electronic component exposed to the outside of the casing of the electronic device is joined to the electrode, and a distance between the gap between the electronic component and the casing and an electrostatic discharge conductive portion is determined by the gap and the terminal. It may be configured to be closer than the distance between.
  • the method of manufacturing an electronic device of the present invention includes:
  • a substrate forming step for forming a pattern of an electrostatic discharge protection portion on the substrate in the vicinity of the electrode
  • solder resist layer Forming a solder resist layer on the substrate surface excluding at least the pattern; a solder resist forming step;
  • solder may be applied on the substrate wider than the pattern.
  • heating of the solder for mounting the element on the electrode may be performed simultaneously with the formation of the electrostatic discharge conductive portion.
  • a circuit on the substrate of the electronic device that does not cause an increase in the number of parts or an increase in the process by forming an electrostatic discharge conductive portion with solder is provided.
  • FIG. 1 is an external view of an electronic device according to the present invention.
  • FIG. 2 Schematic diagram of the main part of the present invention
  • FIG. 1 is an external view of an electronic apparatus according to the present invention, and FIG. .
  • the electronic device 10 in this example is a notebook personal computer (notebook PC), and the fingerprint sensor 1 is mounted on the board 2 by the BGA (Ball Grid Array) method, and the reading surface of the fingerprint sensor 1 is used for reading the fingerprint. 1A is exposed outside the housing 3.
  • BGA Bit Grid Array
  • the fingerprint sensor 1 is packaged with a non-conductive material, and includes a reading surface 1A on the surface side of the package 1B.
  • a circuit (internal circuit) 1D for outputting the fingerprint information read on the reading surface 1A as an electric signal of a predetermined format is provided inside the package 1B, and the electric signal is provided on the back side of the nozzle / cage 1B.
  • Terminal 1C for output to outside is provided.
  • the terminal 1C in this example is a BGA in which solder balls are connected to pads arranged in a grid at intervals of about 50 mil on the back of the knocker 1B.
  • the substrate 2 is made of an insulating material such as ceramic or glass epoxy resin, and is omitted in the figure, but an internal wiring pattern and a via-hole conductor for forming a predetermined circuit network are formed therein.
  • a surface wiring pattern 4 including land electrodes from via-hole conductors is formed on the surface of the substrate 2.
  • a part of the surface wiring pattern 4 is an electrode 5 arranged in a grid as shown in FIG. 3 because the terminal 1C of the fingerprint sensor 1 is joined.
  • Another part of the surface wiring pattern 4 is a protective wall pattern 6 formed so as to surround the electrode 5.
  • the protective wall pattern 6 is connected to the ground via a via hole conductor (not shown) and the surface wiring pattern 4.
  • a layer of solder resist 8 is formed around the land electrode such as the electrode 5 and the protective wall pattern 6.
  • the land electrode such as the electrode 5 and the protective wall pattern 6 are opened, and a solder resist 8 is formed on the other surface wiring pattern 4.
  • the solder resist 8 is a heat-resistant coating material that covers the surface wiring pattern so that a solder does not adhere to a place where soldering is unnecessary and a short circuit or the like does not occur.
  • the solder resist 8 may be formed by screen printing, or a resist film uniformly formed by curtain coating or spray coating may be used to remove unnecessary portions through a development process or etching. Further, the material of the solder resist 8 is not particularly limited as long as it is a material to which generally used solder does not adhere.
  • carboxyl group-containing polymers such as polymers or copolymers of epoxy resin, styrene, acrylic acid, methacrylic acid, maleic acid, phenol resin, xylene resin, urea resin , Melamine series, alkyd series, vinyl series, acrylic series, salt series, rubber series, polyamide series, fatty acid or aromatic polybasic acids, Anhydrous hydroxyalkyl acrylate (or metatalylate) half ester rosin can be used.
  • a protective wall (electrostatic discharge conductive portion) 7 made of solder is formed on the protective wall pattern 6. This protective wall 7 is applied on the protective wall pattern 6 together with the electrode 5 when the fingerprint sensor 1 is mounted on the substrate 2, and the agglomerated solder is solidified by the surface tension.
  • FIG. 4 is a flowchart of the mounting method.
  • a predetermined wiring pattern is formed on the substrate 2 as shown in FIG.
  • a protective wall pattern 6 is formed so as to surround the electrode 5 to which the fingerprint sensor 1 is connected.
  • This wiring pattern can be formed by a general substrate manufacturing apparatus (Sl).
  • solder resist 8 is screen-printed on the surface of the substrate by a screen printing apparatus so as to cover other than the land electrode such as the electrode 5 and the protective wall wiring pattern 6 as shown in FIG.
  • FIG. 7 shows an example of a production line (element mounting system) for mounting the fingerprint sensor 1.
  • Solder printer 21 overlays metal mask 9 on the surface of the substrate (FIG. 8, S3), and after applying solder paste 11, on metal electrode 9 and protective wall pattern 6 as shown in FIG. Hanada paste 11 is printed (S4). At this time, the printed pattern of the metal mask 9 is formed so that the solder paste on the protective wall pattern 6 is applied with a width wider than that of the protective wall wiring pattern 6 as shown in FIGS.
  • the solder film thickness measurement device 22 measures the solder film thickness (S5). If the film thickness is appropriate, the chip mounting machine 23 causes the fingerprint sensor 1 so that the terminal 1C is in contact with the electrode 5. Place sensor 1 (Fig. 10, S6).
  • the substrate is heated to a predetermined temperature by a reflow oven 25 and subjected to a reflow process, the solder paste 11 is melted, and the terminal 1C and the electrode 5 are connected.
  • the solder paste 11 on the protective wall pattern 6 is also melted, the solder printed on the solder resist is repelled, and aggregates on the protective wall pattern 6 due to surface tension (S8).
  • the agglomerated state is naturally cooled, and the solder is solidified to form the protective wall 7 (FIG. 11, S9).
  • the protective wall 7 surrounding the connection portion (terminal 1C and electrode 5) of the fingerprint sensor 1 in this way, the gap 9 between the housing 3 and the package 1B is interposed as shown in FIG. Even if ESD enters, ESD is absorbed by the protective wall 7 connected to the ground, and is prevented from reaching the connection portion of the fingerprint sensor 1. That is, ESD power protection can be provided for internal circuits such as a circuit in the fingerprint sensor and a circuit provided around the fingerprint sensor in the casing.
  • the width of the solder paste applied onto the protective wall pattern than the width W1 of the protective wall pattern 6, that is, the width W2 of the opening of the metal mask on which the solder paste is printed is set. It is getting bigger.
  • the solder paste 11 is applied not only on the protective wall pattern 6 but also on the solder resist 8.
  • the solder resist 8 is a material to which solder does not adhere, that is, a molten state. Since the solder paste 11 on the solder resist is melted by the reflow process, the solder paste 11 on the solder resist moves onto the protective wall pattern and aggregates due to the surface tension. That is, the molten solder has a protective wall pattern 6 as a bottom surface, and the vertical cross-section rises in a mountain shape.
  • the difference between the widths W1 and W2 is increased.
  • the difference between the widths W1 and W2 is set small (however, Wl ⁇ W2 ).
  • the width W 1 of the protective wall pattern 6, the width W2 of the solder paste, the material of the solder resist 8, and the material of the solder paste 11 are set in advance so that the necessary width and height as the protective wall 7 can be obtained. To do.
  • Shortest distance L1 force The position of the wiring pattern 4 and the height of the protective wall 7 are set so as to be shorter than the distance L2 from the gap 9 to the connection 1C of the fingerprint sensor 1. As a result, the ESD force from the gap 9 is absorbed by the protective wall 7 with high accuracy.
  • the center P1 of the solder paste 11 applied onto the protective wall pattern 6 is outside the center P2 of the protective wall pattern 6, that is, the protective wall pattern. It is formed on the side opposite to the electrode 5 surrounded by 6.
  • the protective wall 7 generated from the solder paste applied in this way has the topmost portion outside the center P2. As a result, the topmost part is separated from the electrode 5 from the center P2 on the substrate surface.
  • the width WA of the solder paste 11 applied to the fingerprint sensor 1 side than the protective wall pattern 6 can be suppressed, and the topmost portion of the protective wall 7 can be reduced.
  • the electrode force of the fingerprint sensor 1 or the fingerprint sensor 1 can also be separated. Therefore, ESD to the connection 1C of the fingerprint sensor 1 can be prevented more reliably.
  • the difference ⁇ between the center PI and the center P2 can be arbitrarily set according to the distance L1, etc. In order to form the protective wall 7 closest to the fingerprint sensor 1, as shown in FIG.
  • the protective wall 6 and the solder paste 11 may be aligned with the fingerprint sensor 1 end.
  • the protective wall 7 is formed so as to surround the fingerprint sensor 1, but various forms may be considered depending on the shape of the fingerprint sensor 1 and the gap 9. If it is necessary to prevent ESD in a specific direction, the protective wall 7 may be formed only in a specific direction. In addition, a plurality of protective walls 7 that just enclose the fingerprint sensor 1 may be formed in the vicinity of the fingerprint sensor 1.

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Image Input (AREA)
  • Shielding Devices Or Components To Electric Or Magnetic Fields (AREA)
  • Structure Of Printed Boards (AREA)
  • Elimination Of Static Electricity (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)

Abstract

Provided is a method for manufacturing an electronic device composed of a substrate having at least an electrode. A pattern of an electrostatic discharge protecting section is formed in the vicinity of the electrode, and a solder resist layer is formed on the substrate surface excluding at least the pattern. A solder is applied on the pattern, and the solder is heated and clumped by the surface tension of the solder, and an electrostatic discharge conductive section is formed on the pattern. A circuit on the substrate of the electronic device can be protected from ESD, without increasing the number of components and the number of processes, by thus forming the electrostatic discharge conductive section with the solder.

Description

明 細 書  Specification
電子機器及びその製造方法  Electronic device and manufacturing method thereof
技術分野  Technical field
[0001] 本発明は、素子を基板に実装する技術に関する。  The present invention relates to a technique for mounting an element on a substrate.
背景技術  Background art
[0002] プリント基板に実装される素子、特に IC等の電子デバイスは、 ESD(Electoric Static  [0002] Elements mounted on printed circuit boards, especially electronic devices such as ICs, are
Discharge),すなわち静電気の印加によって破壊に至ることがある。  Discharge), that is, destruction may be caused by the application of static electricity.
このため筐体内に収められる電子デバイスを筐体の開口から一定以上離して配置 すると!/、つた静電気対策が行われて 、た。  For this reason, if an electronic device that can be housed in the housing is placed more than a certain distance away from the opening of the housing, a countermeasure against static electricity has been taken.
[0003] また、本願発明に関連する先行技術として、例えば、下記の特許文献 1, 2に開示 される技術がある。 [0003] Further, as a prior art related to the present invention, for example, there are techniques disclosed in Patent Documents 1 and 2 below.
特許文献 1:特開 2001— 308586号公報  Patent Document 1: Japanese Patent Laid-Open No. 2001-308586
特許文献 2:特開 2004— 342464号公報  Patent Document 2: JP 2004-342464 A
発明の開示  Disclosure of the invention
発明が解決しょうとする課題  Problems to be solved by the invention
[0004] しかし、装置の小型化や電子デバイスの多様ィ匕に伴 、、電子デバイスを筐体表面 に配置する場合が多くなつてきて 、る。 [0004] However, with the miniaturization of devices and the variety of electronic devices, electronic devices are often placed on the surface of a casing.
例えば、図 15は、ノートパソコン等の表面に配置された指紋センサー 101を示して いる。該指紋センサー 101は、 BGA(Ball Grid Array)方式でプリント基板 102に実装 され、指紋の読み取りのため読取面 101Aが筐体 103の外に露出するように配置さ れている。  For example, FIG. 15 shows a fingerprint sensor 101 arranged on the surface of a notebook computer or the like. The fingerprint sensor 101 is mounted on a printed circuit board 102 by a BGA (Ball Grid Array) method, and is arranged such that a reading surface 101A is exposed outside the housing 103 for reading a fingerprint.
指紋センサー 101等の電子デバイスの表面は、一般に導電性の低い材質でパッケ 一ジング (モールドも含む)されている場合が多ぐ ESDを受ける可能性は低い。また そうでない場合でも、デバイス表面に受けた ESDをグランドに流す等のなんらかの対 策がなされており、仮にデバイス表面に ESDを受けても内部回路が損傷する可能性 は低い。  The surface of an electronic device such as the fingerprint sensor 101 is generally packaged (including a mold) with a material having low conductivity, and is unlikely to receive ESD. Even if this is not the case, some countermeasures have been taken, such as flowing ESD received on the device surface to the ground, and even if ESD is applied to the device surface, the possibility of damage to internal circuits is low.
しかし、デバイスの裏面側には、内部の回路を外部と接続するための端子 (BGA端 子) 104が存在しており、図 15に示すように、指紋センサー 101と筐体 103との隙間 を介して ESDが BGA端子 104に達してしまうと、当該デバイス内部の回路や当該デ バイス周辺の回路 (以下単に内部回路とも称する)に定格よりも遥かに高い電圧がか 力ることになり、損傷を招くことがある。 However, on the back side of the device, there is a terminal (BGA terminal) for connecting the internal circuit to the outside. If the ESD reaches the BGA terminal 104 through the gap between the fingerprint sensor 101 and the housing 103, as shown in FIG. 15, if the ESD reaches the BGA terminal 104, the circuit inside the device and the periphery of the device This circuit (hereinafter also referred to simply as the internal circuit) will be applied with a voltage much higher than the rated voltage, which may cause damage.
この内部回路の損傷を防ぐためには、図 16に示すように指紋センサー 101と筐体 1 03との間に導電性部材 105を配置し、プリント基板 102のグランドライン 106と接続 すればよい。これにより ESDは、導電性部材 105に吸収されるため、 BGA端子 104 を保護できる。  In order to prevent damage to the internal circuit, a conductive member 105 may be disposed between the fingerprint sensor 101 and the housing 103 as shown in FIG. 16 and connected to the ground line 106 of the printed board 102. Thereby, since ESD is absorbed by the conductive member 105, the BGA terminal 104 can be protected.
しかし、図 16の構成としたのでは、図 15の構成と比べて導電性部材 105が増加す ると共に、該導電性部材 105をグランドライン 106に接続する工程も増えるため、製 造性の悪ィ匕ゃ製造コストの増大を招くことになる。  However, the configuration of FIG. 16 increases the number of conductive members 105 and increases the number of steps for connecting the conductive members 105 to the ground line 106 as compared with the configuration of FIG. This increases the manufacturing cost.
そこで、本発明は、電子機器を製造する際、半田で静電気放電導電部を形成する ことにより、部品点数の増加や工程の増加を招くことなぐ該電子機器の基板上の回 路を ESDから保護する技術を提供する。  Therefore, according to the present invention, when manufacturing an electronic device, by forming the electrostatic discharge conductive portion with solder, the circuit on the substrate of the electronic device is protected from ESD without causing an increase in the number of parts or an increase in processes. Provide technology to do.
課題を解決するための手段  Means for solving the problem
[0005] 上記課題を解決するため、本発明は、以下の構成を採用した。 In order to solve the above-described problems, the present invention employs the following configuration.
即ち、本発明の電子機器は、  That is, the electronic device of the present invention
少なくとも基板力も構成された電子機器において、  In an electronic device that is configured with at least a substrate force,
前記基板上に形成された電極と、  An electrode formed on the substrate;
前記基板上の前記電極の近傍に形成されたパターンと、  A pattern formed in the vicinity of the electrode on the substrate;
前記パターン上に形成された、山形形状の半田からなる静電気放電導電部とを備 えることを特徴とする。  And an electrostatic discharge conductive portion made of chevron-shaped solder formed on the pattern.
[0006] 前記静電気放電導電部の最頂部は、前記電極から離れるように前記パターン幅中 央よりずれていても良い。  [0006] The topmost part of the electrostatic discharge conductive part may be displaced from the center of the pattern width so as to be separated from the electrode.
[0007] 前記電極には、前記電子機器の筐体外部に露出する電子部品の端子が接合され 前記電子部品と前記筐体との間隙と静電気放電導電部間の距離が、前記間隙と 前記端子間の距離よりも近くなるように構成しても良 、。 [0008] また、本発明の電子機器の製造方法は、 [0007] A terminal of an electronic component exposed to the outside of the casing of the electronic device is joined to the electrode, and a distance between the gap between the electronic component and the casing and an electrostatic discharge conductive portion is determined by the gap and the terminal. It may be configured to be closer than the distance between. [0008] Further, the method of manufacturing an electronic device of the present invention includes:
少なくとも電極を有する基板から構成された電子機器の製造方法において、 前記電極近傍に静電気放電保護部のパターンを基板上に形成する基板形成ステ ップと、  In a method for manufacturing an electronic device comprising at least a substrate having an electrode, a substrate forming step for forming a pattern of an electrostatic discharge protection portion on the substrate in the vicinity of the electrode;
少なくとも前記パターンを除いた前記基板面上に前記ソルダーレジスト層を形成する ソルダートレジスト形成ステップと、  Forming a solder resist layer on the substrate surface excluding at least the pattern; a solder resist forming step;
前記パターン上に半田を塗布する半田塗布ステップと、  A solder application step of applying solder on the pattern;
前記半田を加熱し、半田の表面張力により前記半田を凝集させ、前記パターン上に 静電気放電導電部を形成する加熱ステップとを備える。  Heating the solder, aggregating the solder by the surface tension of the solder, and forming an electrostatic discharge conductive portion on the pattern.
[0009] 前記半田塗布ステップにおいて、前記パターンよりも広く前記基板上に半田を塗布 しても良い。 [0009] In the solder application step, solder may be applied on the substrate wider than the pattern.
[0010] 前記加熱ステップにおいて、前記電極へ素子を装着するための半田への加熱を前 記静電気放電導電部の形成と同時に行っても良い。  [0010] In the heating step, heating of the solder for mounting the element on the electrode may be performed simultaneously with the formation of the electrostatic discharge conductive portion.
発明の効果  The invention's effect
[0011] 本発明によれば、電子機器を製造する際、半田で静電気放電導電部を形成するこ とにより、部品点数の増加や工程の増加を招くことなぐ該電子機器の基板上の回路 を ESDから保護する技術を提供できる。  [0011] According to the present invention, when an electronic device is manufactured, a circuit on the substrate of the electronic device that does not cause an increase in the number of parts or an increase in the process by forming an electrostatic discharge conductive portion with solder is provided. Can provide technology to protect against ESD.
図面の簡単な説明  Brief Description of Drawings
[0012] [図 1]本発明に係る電子機器の外観図 FIG. 1 is an external view of an electronic device according to the present invention.
[図 2]本発明の要部概略図  [Fig. 2] Schematic diagram of the main part of the present invention
[図 3]電極及び保護壁用パターンの平面図  [Figure 3] Plan view of electrode and protective wall pattern
[図 4]素子の実装方法のフローチャート  [Figure 4] Flow chart of element mounting method
[図 5]表面配線パターン作成の説明図  [Fig.5] Illustration of surface wiring pattern creation
[図 6]ソルダーレジスト作成の説明図  [Figure 6] Illustration of solder resist creation
[図 7]素子の実装システムの説明図  [Fig.7] Explanation of element mounting system
[図 8]半田ペースト印刷の説明図  [Figure 8] Illustration of solder paste printing
[図 9]半田ペースト印刷の説明図  [Figure 9] Illustration of solder paste printing
[図 10]素子の載置の説明図 [図 11]リフロー処理の説明図 [Fig.10] Explanation of element placement [Figure 11] Explanatory diagram of reflow processing
[図 12]半田ペースト印刷幅の説明図  [Figure 12] Illustration of solder paste printing width
[図 13]保護壁形成位置の説明図  [Figure 13] Explanatory drawing of protective wall formation position
[図 14]半田ペースト塗布位置の説明図  [Figure 14] Illustration of solder paste application position
[図 15]関連技術の説明図  [Figure 15] Illustration of related technology
[図 16]関連技術の説明図  [Figure 16] Illustration of related technology
発明を実施するための最良の形態  BEST MODE FOR CARRYING OUT THE INVENTION
[0013] 以下、図面を参照して本発明を実施するための最良の形態について説明する。以 下の実施の形態の構成は例示であり、本発明は実施の形態の構成に限定されない 図 1は、本発明に係る電子機器の外観図、図 2は本発明の要部説明図である。 本例の電子機器 10は、ノート型のパーソナルコンピュータ(ノート PC)であり、指紋 センサー 1を BGA(Ball Grid Array)方式で基板 2に実装し、指紋の読み取りのため指 紋センサー 1の読取面 1Aを筐体 3の外に露出させている。 Hereinafter, the best mode for carrying out the present invention will be described with reference to the drawings. The configuration of the following embodiment is an exemplification, and the present invention is not limited to the configuration of the embodiment. FIG. 1 is an external view of an electronic apparatus according to the present invention, and FIG. . The electronic device 10 in this example is a notebook personal computer (notebook PC), and the fingerprint sensor 1 is mounted on the board 2 by the BGA (Ball Grid Array) method, and the reading surface of the fingerprint sensor 1 is used for reading the fingerprint. 1A is exposed outside the housing 3.
[0014] 指紋センサー 1は、非導電性の材質でパッケージングされ、そのパッケージ 1Bの表 面側に読取面 1Aを備えている。また、パッケージ 1Bの内部に該読取面 1Aで読み取 つた指紋情報を所定形式の電気信号として出力するための回路(内部回路) 1Dを備 え、ノ¾ /ケージ 1Bの裏面側に該電気信号を外部へ出力する端子 1Cを備えている。 本例の端子 1Cは、ノ ッケージ 1Bの裏面に 50mil程度の間隔で格子状に並べたパッ ドに半田ボールを接続した BGAとなっている。  The fingerprint sensor 1 is packaged with a non-conductive material, and includes a reading surface 1A on the surface side of the package 1B. In addition, a circuit (internal circuit) 1D for outputting the fingerprint information read on the reading surface 1A as an electric signal of a predetermined format is provided inside the package 1B, and the electric signal is provided on the back side of the nozzle / cage 1B. Terminal 1C for output to outside is provided. The terminal 1C in this example is a BGA in which solder balls are connected to pads arranged in a grid at intervals of about 50 mil on the back of the knocker 1B.
[0015] 基板 2は、セラミック、ガラスエポキシ榭脂等の絶縁材料カゝらなり、図には省略されて いるが、その内部に所定回路網を形成するための内部配線パターン及びビアホール 導体が形成されている。また、基板 2の表面には、ビアホール導体からのランド電極 などを含む表面配線パターン 4が形成されている。この表面配線パターン 4の一部は 、指紋センサー 1の端子 1Cが接合されるため、図 3に示すように格子状に配列された 電極 5となっている。また、該表面配線パターン 4の他の一部は、電極 5を囲む形に 形成された保護壁用パターン 6となっている。該保護壁用パターン 6は、不図示のビ ァホール導体や表面配線パターン 4を介してグランドと接続している。 [0016] 該電極 5等のランド電極及び保護壁用パターン 6の周囲には、ソルダーレジスト 8の 層が形成されている。図示例では、該電極 5等のランド電極及び保護壁用パターン 6 上を開口とし、それ以外の表面配線パターン 4上には、ソルダーレジスト 8が形成され ている。該ソルダーレジスト 8は半田付けの不要な箇所に半田が付着してショート等 が起きないように表面配線パターンを被覆する耐熱性のコーティング材である。 [0015] The substrate 2 is made of an insulating material such as ceramic or glass epoxy resin, and is omitted in the figure, but an internal wiring pattern and a via-hole conductor for forming a predetermined circuit network are formed therein. Has been. A surface wiring pattern 4 including land electrodes from via-hole conductors is formed on the surface of the substrate 2. A part of the surface wiring pattern 4 is an electrode 5 arranged in a grid as shown in FIG. 3 because the terminal 1C of the fingerprint sensor 1 is joined. Another part of the surface wiring pattern 4 is a protective wall pattern 6 formed so as to surround the electrode 5. The protective wall pattern 6 is connected to the ground via a via hole conductor (not shown) and the surface wiring pattern 4. A layer of solder resist 8 is formed around the land electrode such as the electrode 5 and the protective wall pattern 6. In the illustrated example, the land electrode such as the electrode 5 and the protective wall pattern 6 are opened, and a solder resist 8 is formed on the other surface wiring pattern 4. The solder resist 8 is a heat-resistant coating material that covers the surface wiring pattern so that a solder does not adhere to a place where soldering is unnecessary and a short circuit or the like does not occur.
[0017] 該ソルダーレジスト 8は、スクリーン印刷により形成してもよいし、カーテンコートゃス プレーコートにより一様に形成したレジスト膜を現像工程或はエッチングを経て不要 部分を除去するものでも良い。また、該ソルダーレジスト 8の材質は、一般に用いられ ている半田が付着しない材質であれば良ぐ特に限定されるものではない。例えば、 エポキシ榭脂、スチレン、アクリル酸、メタクリル酸、マレイン酸等の重合体または共重 合体等のカルボキシル基含有重合体類や、フエノール榭脂類、キシレン系榭脂類、 尿素系榭脂類、メラミン系榭脂類、アルキッド系榭脂類、ビニル系榭脂類、アクリル系 榭脂類、塩ィ匕ゴム系榭脂類、ポリアミド系榭脂類、脂肪酸または芳香族の多塩基性 酸やその無水物のヒドロキシアルキルアタリレート(又はメタタリレート)ハーフエステル 榭脂類等が利用可能である。  [0017] The solder resist 8 may be formed by screen printing, or a resist film uniformly formed by curtain coating or spray coating may be used to remove unnecessary portions through a development process or etching. Further, the material of the solder resist 8 is not particularly limited as long as it is a material to which generally used solder does not adhere. For example, carboxyl group-containing polymers such as polymers or copolymers of epoxy resin, styrene, acrylic acid, methacrylic acid, maleic acid, phenol resin, xylene resin, urea resin , Melamine series, alkyd series, vinyl series, acrylic series, salt series, rubber series, polyamide series, fatty acid or aromatic polybasic acids, Anhydrous hydroxyalkyl acrylate (or metatalylate) half ester rosin can be used.
[0018] そして、保護壁用パターン 6上には、半田による保護壁 (静電気放電導電部) 7が形 成されている。この保護壁 7は、指紋センサー 1を基板 2に実装する際に、電極 5と共 に保護壁用パターン 6上に塗布され、表面張力によって凝集した半田が固化したも のである。 A protective wall (electrostatic discharge conductive portion) 7 made of solder is formed on the protective wall pattern 6. This protective wall 7 is applied on the protective wall pattern 6 together with the electrode 5 when the fingerprint sensor 1 is mounted on the substrate 2, and the agglomerated solder is solidified by the surface tension.
[0019] この指紋センサー (電子デバイス) 1の実装方法について説明する。図 4は、該実装 方法のフローチャートである。  A method for mounting the fingerprint sensor (electronic device) 1 will be described. FIG. 4 is a flowchart of the mounting method.
先ず、図 5に示すように基板 2に所定の配線パターンを形成する。このとき基板表面 に形成される表面配線パターン 4の一部として、指紋センサー 1が接続される電極 5 を囲むように保護壁用のパターン 6を形成する。なお、この配線パターンは、一般的 な基板製造装置によって形成可能である(Sl)。  First, a predetermined wiring pattern is formed on the substrate 2 as shown in FIG. At this time, as a part of the surface wiring pattern 4 formed on the substrate surface, a protective wall pattern 6 is formed so as to surround the electrode 5 to which the fingerprint sensor 1 is connected. This wiring pattern can be formed by a general substrate manufacturing apparatus (Sl).
[0020] また、スクリーン印刷装置によって該基板表面にソルダーレジスト 8をスクリーン印刷 し、図 6のように電極 5等のランド電極及び保護壁用配線パターン 6以外を被覆する([0020] Further, a solder resist 8 is screen-printed on the surface of the substrate by a screen printing apparatus so as to cover other than the land electrode such as the electrode 5 and the protective wall wiring pattern 6 as shown in FIG.
S2)。 [0021] このように、所定の表面配線パターン 4及びソルダーレジスト 8を形成した基板 2を 用意し、該基板 2に対して指紋センサー 1を実装する。図 7は、該指紋センサー 1の実 装を行う製造ライン (素子の実装システム)の一例である。 S2). In this way, the substrate 2 on which the predetermined surface wiring pattern 4 and the solder resist 8 are formed is prepared, and the fingerprint sensor 1 is mounted on the substrate 2. FIG. 7 shows an example of a production line (element mounting system) for mounting the fingerprint sensor 1.
半田印刷機 21は、該基板表面にメタルマスク 9を重ね(図 8, S3)、半田ペースト 11 を塗布後、メタルマスク 9を除いて図 9のように電極 5及び保護壁用パターン 6上に半 田ペースト 11を印刷する(S4)。このとき保護壁用パターン 6上の半田ペーストが、図 8, 9の如く保護壁用配線パターン 6よりも広い幅で塗布されるように、メタルマスク 9の 印刷パターンが形成されて 、る。  Solder printer 21 overlays metal mask 9 on the surface of the substrate (FIG. 8, S3), and after applying solder paste 11, on metal electrode 9 and protective wall pattern 6 as shown in FIG. Hanada paste 11 is printed (S4). At this time, the printed pattern of the metal mask 9 is formed so that the solder paste on the protective wall pattern 6 is applied with a width wider than that of the protective wall wiring pattern 6 as shown in FIGS.
[0022] 半田膜厚測定装置 22により、半田の膜厚を測定し (S5)、該膜厚が適切であれば チップ搭載機 23により指紋センサー 1の端子 1Cが電極 5と接するように該指紋セン サー 1を載置する(図 10, S6)。  [0022] The solder film thickness measurement device 22 measures the solder film thickness (S5). If the film thickness is appropriate, the chip mounting machine 23 causes the fingerprint sensor 1 so that the terminal 1C is in contact with the electrode 5. Place sensor 1 (Fig. 10, S6).
[0023] また、他の素子 (不図示)についても異型部品搭載機 24により基板 2の電極上に載 置する(S7)。  [0023] Further, other elements (not shown) are placed on the electrodes of the substrate 2 by the atypical component mounting machine 24 (S7).
[0024] そして、リフローオーブン 25により、上記基板を所定温度に加熱してリフロー処理し 、半田ペースト 11を溶融させて端子 1Cと電極 5を接続する。このとき、保護壁用バタ ーン 6上の半田ペースト 11も溶融して、ソルダーレジスト上に印刷されていた半田が はじかれ、表面張力によって保護壁用パターン 6上に凝集する(S8)。この凝集した 状態で自然冷却させ、該半田を固化させて保護壁 7とする(図 11, S9)。  [0024] Then, the substrate is heated to a predetermined temperature by a reflow oven 25 and subjected to a reflow process, the solder paste 11 is melted, and the terminal 1C and the electrode 5 are connected. At this time, the solder paste 11 on the protective wall pattern 6 is also melted, the solder printed on the solder resist is repelled, and aggregates on the protective wall pattern 6 due to surface tension (S8). The agglomerated state is naturally cooled, and the solder is solidified to form the protective wall 7 (FIG. 11, S9).
[0025] このように指紋センサー 1の接続部 (端子 1Cと電極 5)を囲む保護壁 7を形成したこ とにより、図 12に示すように筐体 3とパッケージ 1Bとの隙間 9を介して ESDが入っても 、 ESDはグランドに接続された保護壁 7に吸収され、指紋センサー 1の接続部に達す ることが防止される。即ち指紋センサー内の回路及び筐体内で該指紋センサー周辺 に設けられた回路といった内部回路を ESD力 保護できる。  [0025] By forming the protective wall 7 surrounding the connection portion (terminal 1C and electrode 5) of the fingerprint sensor 1 in this way, the gap 9 between the housing 3 and the package 1B is interposed as shown in FIG. Even if ESD enters, ESD is absorbed by the protective wall 7 connected to the ground, and is prevented from reaching the connection portion of the fingerprint sensor 1. That is, ESD power protection can be provided for internal circuits such as a circuit in the fingerprint sensor and a circuit provided around the fingerprint sensor in the casing.
[0026] このとき、図 12に示すように保護壁用パターン 6の幅 W1よりも保護壁用パターン上 に塗布する半田ペーストの幅、即ち該半田ペーストを印刷するメタルマスクの開口の 幅 W2を大きくしている。  At this time, as shown in FIG. 12, the width of the solder paste applied onto the protective wall pattern than the width W1 of the protective wall pattern 6, that is, the width W2 of the opening of the metal mask on which the solder paste is printed is set. It is getting bigger.
[0027] 従って、半田ペースト 11は保護壁用パターン 6上だけでなくソルダーレジスト 8上に も塗布される。しカゝしソルダーレジスト 8は、半田が付着しない材質、即ち溶融した状 態の半田をはじく材質であるため、ソルダーレジスト上の半田ペースト 11はリフロー処 理によって溶融すると保護壁用パターン上に移動し、表面張力によって凝集すること になる。即ち、溶融した半田は、保護壁用パターン 6を底面とし、鉛直断面が山形に 盛り上がることになる。 Accordingly, the solder paste 11 is applied not only on the protective wall pattern 6 but also on the solder resist 8. The solder resist 8 is a material to which solder does not adhere, that is, a molten state. Since the solder paste 11 on the solder resist is melted by the reflow process, the solder paste 11 on the solder resist moves onto the protective wall pattern and aggregates due to the surface tension. That is, the molten solder has a protective wall pattern 6 as a bottom surface, and the vertical cross-section rises in a mountain shape.
[0028] このため保護壁 7を高く形成したい場合には、幅 W1と W2の差を大きくし、保護壁 7 を低くするためには幅 W1と W2の差を少なく設定する(但し Wl < W2)。  [0028] For this reason, when the protective wall 7 is desired to be formed high, the difference between the widths W1 and W2 is increased. To reduce the protective wall 7, the difference between the widths W1 and W2 is set small (however, Wl <W2 ).
[0029] 即ち、保護壁 7として必要な幅及び高さが得られるように保護壁用パターン 6の幅 W 1や半田ペーストの幅 W2、ソルダーレジスト 8の材質、半田ペースト 11の材質を予め 設定する。  That is, the width W 1 of the protective wall pattern 6, the width W2 of the solder paste, the material of the solder resist 8, and the material of the solder paste 11 are set in advance so that the necessary width and height as the protective wall 7 can be obtained. To do.
[0030] このように指紋センサー 1を実装した基板面よりも高い保護壁 7を設けたことにより、 指紋センサー 1を接続した配線パターン 4に ESDが達することを防止し、該配線バタ ーン 4に接続している内部回路を保護することができる。また、半田の表面張力により 高さを出せるので、保護壁用パターン及び電極 5上に印刷する際、一つのメタルマス クで一度に印刷可能であり、製造性が良い。  [0030] By providing the protective wall 7 higher than the substrate surface on which the fingerprint sensor 1 is mounted in this way, ESD is prevented from reaching the wiring pattern 4 to which the fingerprint sensor 1 is connected, and the wiring pattern 4 The internal circuit connected to the can be protected. In addition, since the height can be increased by the surface tension of the solder, when printing on the protective wall pattern and the electrode 5, it is possible to print at one time with one metal mask, and the productivity is good.
[0031] また、図 13に示すように筐体 3とパッケージ 1Bとの隙間 9から保護壁 7への距離、 本例ではパッケージ 1Bの外周部(図示例では外周面 B1の下端 B2)からの最短距離 L1力 該隙間 9から指紋センサー 1の接続部 1Cへの距離 L2より短くなるように、配線 パターン 4の位置及び保護壁 7の高さを設定している。これにより隙間 9からの ESD 力 高い確度で保護壁 7へ吸収される。  Further, as shown in FIG. 13, the distance from the gap 9 between the housing 3 and the package 1B to the protective wall 7, in this example, from the outer peripheral portion of the package 1B (in the illustrated example, the lower end B2 of the outer peripheral surface B1). Shortest distance L1 force The position of the wiring pattern 4 and the height of the protective wall 7 are set so as to be shorter than the distance L2 from the gap 9 to the connection 1C of the fingerprint sensor 1. As a result, the ESD force from the gap 9 is absorbed by the protective wall 7 with high accuracy.
[0032] また、図 14に示すように鉛直断面内において、保護壁用パターン 6上に塗布された 半田ペースト 11の中心 P1を保護壁用パターン 6の中心 P2の外側、即ち保護壁用パ ターン 6が囲む電極 5と反対側に形成している。このように塗布された半田ペーストか ら生成される保護壁 7は、その最頂部が中心 P2の外側となる。この結果、最頂部は、 基板面上において中心 P2より前記電極 5から離れることになる。  Further, as shown in FIG. 14, in the vertical cross section, the center P1 of the solder paste 11 applied onto the protective wall pattern 6 is outside the center P2 of the protective wall pattern 6, that is, the protective wall pattern. It is formed on the side opposite to the electrode 5 surrounded by 6. The protective wall 7 generated from the solder paste applied in this way has the topmost portion outside the center P2. As a result, the topmost part is separated from the electrode 5 from the center P2 on the substrate surface.
[0033] これにより上記幅 W1と W2の差を大きくしても、保護壁用パターン 6よりも指紋セン サー 1側に塗布される半田ペースト 11の幅 WAが抑えられ、保護壁 7の最頂部を指 紋センサー 1あるいは指紋センサー 1の電極力も離して形成できる。従って指紋セン サー 1の接続部 1Cへの ESDをより確実に防止できるようになる。 [0034] この中心 PIと中心 P2の差 Δ Ρは、前記距離 L1等に応じて任意に設定でき、指紋 センサー 1に対し保護壁 7を最も近づけて形成するためには、図 12のように保護壁 6 及び半田ペースト 11の指紋センサー 1側の端部を一致させれば良い。 [0033] Thereby, even if the difference between the widths W1 and W2 is increased, the width WA of the solder paste 11 applied to the fingerprint sensor 1 side than the protective wall pattern 6 can be suppressed, and the topmost portion of the protective wall 7 can be reduced. The electrode force of the fingerprint sensor 1 or the fingerprint sensor 1 can also be separated. Therefore, ESD to the connection 1C of the fingerprint sensor 1 can be prevented more reliably. [0034] The difference ΔΡ between the center PI and the center P2 can be arbitrarily set according to the distance L1, etc. In order to form the protective wall 7 closest to the fingerprint sensor 1, as shown in FIG. The protective wall 6 and the solder paste 11 may be aligned with the fingerprint sensor 1 end.
なお、上記保護壁に係る設定は、可能な限り組み合わせて用いることができる。  In addition, the setting which concerns on the said protective wall can be used combining as much as possible.
[0035] 本実施例では、保護壁 7を指紋センサー 1を囲む形に形成しているが、指紋センサ 一 1や隙間 9の形状の応じて様々な形態をとることが考えられる。特定方向力 の ES Dを防ぐ必要があるならば、特定方向のみ保護壁 7を形成すればよい。また、指紋セ ンサー 1を囲う形だけでなぐ複数の保護壁 7を指紋センサー 1近傍に形成してもよい  In this embodiment, the protective wall 7 is formed so as to surround the fingerprint sensor 1, but various forms may be considered depending on the shape of the fingerprint sensor 1 and the gap 9. If it is necessary to prevent ESD in a specific direction, the protective wall 7 may be formed only in a specific direction. In addition, a plurality of protective walls 7 that just enclose the fingerprint sensor 1 may be formed in the vicinity of the fingerprint sensor 1.

Claims

請求の範囲 The scope of the claims
[1] 少なくとも基板力 構成された電子機器において、  [1] At least board power In the configured electronic equipment,
前記基板上に形成された電極と、  An electrode formed on the substrate;
前記基板上の前記電極の近傍に形成されたパターンと、  A pattern formed in the vicinity of the electrode on the substrate;
前記パターン上に形成された、山形形状の半田からなる静電気放電導電部とを備 えることを特徴とする電子機器。  An electronic device comprising: an electrostatic discharge conductive portion made of chevron-shaped solder formed on the pattern.
[2] 前記静電気放電導電部の最頂部は、前記電極から離れるように前記パターン幅中 央よりずれていることを特徴とする請求項 1記載の電子機器。  [2] The electronic device according to [1], wherein an uppermost part of the electrostatic discharge conductive part is shifted from a center of the pattern width so as to be separated from the electrode.
[3] 前記電極には、前記電子機器の筐体外部に露出する電子部品の端子が接合され 前記電子部品と前記筐体との間隙と静電気放電導電部間の距離が、前記間隙と 前記端子間の距離よりも近いことを特徴とする請求項 1もしくは 2に記載の電子機器。 [3] A terminal of an electronic component exposed to the outside of the casing of the electronic device is joined to the electrode, and a distance between the gap between the electronic component and the casing and an electrostatic discharge conductive portion is determined by the gap and the terminal. The electronic device according to claim 1, wherein the electronic device is closer than a distance between the electronic devices.
[4] 少なくとも電極を有する基板から構成された電子機器の製造方法において、 [4] In a method of manufacturing an electronic device composed of a substrate having at least an electrode,
前記電極近傍に静電気放電保護部のパターンを基板上に形成する基板形成ステ ップと、  A substrate forming step for forming an electrostatic discharge protection portion pattern on the substrate in the vicinity of the electrode;
少なくとも前記パターンを除いた前記基板面上に前記ソルダーレジスト層を形成する ソルダートレジスト形成ステップと、  Forming a solder resist layer on the substrate surface excluding at least the pattern; a solder resist forming step;
前記パターン上に半田を塗布する半田塗布ステップと、  A solder application step of applying solder on the pattern;
前記半田を加熱し、半田の表面張力により前記半田を凝集させ、前記パターン上に 静電気放電導電部を形成する加熱ステップとを備える製造方法。  A heating method comprising: heating the solder; aggregating the solder by a surface tension of the solder; and forming an electrostatic discharge conductive portion on the pattern.
[5] 前記半田塗布ステップにおいて、前記パターンよりも広く前記基板上に半田を塗布 することを特徴とする請求項 4記載の製造方法。 5. The manufacturing method according to claim 4, wherein in the solder application step, solder is applied on the substrate wider than the pattern.
[6] 前記加熱ステップにおいて、前記電極へ素子を装着するための半田への加熱を前 記静電気放電導電部の形成と同時に行うことを特徴とする請求項 4記載の製造方法 6. The manufacturing method according to claim 4, wherein, in the heating step, heating of the solder for mounting the element on the electrode is performed simultaneously with the formation of the electrostatic discharge conductive portion.
PCT/JP2006/318047 2006-09-12 2006-09-12 Electronic device and method for manufacturing same WO2008032365A1 (en)

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JP2019054216A (en) * 2017-09-19 2019-04-04 東芝メモリ株式会社 Semiconductor device
CN109727932A (en) * 2017-10-27 2019-05-07 株式会社日立功率半导体 Power semiconductor modular

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JP2004342464A (en) * 2003-05-15 2004-12-02 Sony Corp Electronic equipment and circuit substrate

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JPH098488A (en) * 1995-06-14 1997-01-10 Canon Inc Method of designing circuit board and circuit board
JP2004342464A (en) * 2003-05-15 2004-12-02 Sony Corp Electronic equipment and circuit substrate

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Publication number Priority date Publication date Assignee Title
JP2019054216A (en) * 2017-09-19 2019-04-04 東芝メモリ株式会社 Semiconductor device
CN109727932A (en) * 2017-10-27 2019-05-07 株式会社日立功率半导体 Power semiconductor modular
CN109727932B (en) * 2017-10-27 2022-09-16 株式会社日立功率半导体 Power semiconductor module

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