WO2008012734A2 - Dispositif et procédé pour modeler une surface de couche polymère - Google Patents

Dispositif et procédé pour modeler une surface de couche polymère Download PDF

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Publication number
WO2008012734A2
WO2008012734A2 PCT/IB2007/052869 IB2007052869W WO2008012734A2 WO 2008012734 A2 WO2008012734 A2 WO 2008012734A2 IB 2007052869 W IB2007052869 W IB 2007052869W WO 2008012734 A2 WO2008012734 A2 WO 2008012734A2
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WO
WIPO (PCT)
Prior art keywords
polymer layer
electrode
electrical potential
interacts
charge
Prior art date
Application number
PCT/IB2007/052869
Other languages
English (en)
Other versions
WO2008012734A3 (fr
Inventor
Urs T. Duerig
Bernd W. Gotsmann
Armin W. Knoll
Original Assignee
International Business Machines Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corporation filed Critical International Business Machines Corporation
Priority to US12/375,417 priority Critical patent/US20100059383A1/en
Priority to JP2009521398A priority patent/JP5084830B2/ja
Priority to EP07805193A priority patent/EP2047470A2/fr
Publication of WO2008012734A2 publication Critical patent/WO2008012734A2/fr
Publication of WO2008012734A3 publication Critical patent/WO2008012734A3/fr

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Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B9/00—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor
    • G11B9/12—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor
    • G11B9/14—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor using microscopic probe means, i.e. recording or reproducing by means directly associated with the tip of a microscopic electrical probe as used in Scanning Tunneling Microscopy [STM] or Atomic Force Microscopy [AFM] for inducing physical or electrical perturbations in a recording medium; Record carriers or media specially adapted for such transducing of information
    • G11B9/1463—Record carriers for recording or reproduction involving the use of microscopic probe means
    • G11B9/1472—Record carriers for recording or reproduction involving the use of microscopic probe means characterised by the form
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B11/00—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor
    • G11B11/002—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by perturbation of the physical or electrical structure
    • G11B11/007—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by perturbation of the physical or electrical structure with reproducing by means directly associated with the tip of a microscopic electrical probe as defined in G11B9/14
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B9/00—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor
    • G11B9/12—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor
    • G11B9/14—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor using microscopic probe means, i.e. recording or reproducing by means directly associated with the tip of a microscopic electrical probe as used in Scanning Tunneling Microscopy [STM] or Atomic Force Microscopy [AFM] for inducing physical or electrical perturbations in a recording medium; Record carriers or media specially adapted for such transducing of information

Definitions

  • the present invention relates to a device and a method for patterning a surface of a polymer layer.
  • the present invention relates to a device and a method for forming topographic features and, more specifically, protrusions, on a surface of a polymer layer.
  • a probe-type data storage device based on the atomic force microscope (AFM) is disclosed in "The millipede - more than 1 ,000 tips for future AFM data storage" by P. Vettiger et al., IBM Journal Research Development, Vol. 44, No. 3, March 2000.
  • the storage device has a read and write function based on a mechanical x-, y-scanning of a storage medium with an array of probes each having a tip.
  • the probes operate in parallel with each probe scanning, during operation, an associated field of the storage medium.
  • the storage medium comprises a polymethylmethacrylate (PMMA) layer.
  • PMMA polymethylmethacrylate
  • the contact mode is achieved by applying forces to the probes so that the tips of the probes can touch the surface of the polymer layer.
  • the probes comprise cantilevers, which carry the tips on their end sections. Bits are represented by indentation marks, each encoding a logical "1", or non-indentation marks, each encoding a logical "0", in the polymer layer.
  • the cantilevers respond to these topographic changes while they are moved across the surface of the polymer layer during operation of the device in read/write mode.
  • Indentation marks are formed on the polymer layer by thermomechanical recording. This is achieved by heating the tip of a respective probe operated in contact mode with respect to the polymer layer. Heating of the tip is achieved via a heater dedicated to the writing/formation of the indentation marks. The polymer layer softens locally where it is contacted by the heated tip. The result is an indentation mark, for example, having a nanoscale diameter comparable to the diameter of the tip that is used in its formation, being produced on the layer. Reading of the indentation mark is also accomplished by a thermomechanical concept and may be done using the same probe as that used for writing the indentation mark. Due to the mechanical stress that is used for writing indentation marks in the polymer layer, tip and/or media wear may be typically expected to occur.
  • bits are stored as oriented domains in ferroelectric media analogous to magnetic recording. Detection of an electric dipole orientation associated to a domain may be performed by measuring the strength of a corresponding electrical stray field. However, the issues listed under (1 ) to (3) above may also need to be considered in the present case. Alternatively, detection of the electric dipole orientation may be done by measuring the piezo-electric response, which induces minute, well-localized modulations of the surface topography on the order of a fraction of a nanometer, which requires sensitive lock-in schemes for their detection. In this case, it could be that signal degradation may be avoided by the electromechanical transduction.
  • the topographic features may be comparable to or less than the roughness of the surface on which they are present.
  • the detection of such sub-nanometre dimensioned features using known detectors may typically be done with a limited data rate in the kHz range.
  • features of the indenter body are imprinted into the surface of the polymer layer, i.e. they extend in a sub-surface direction. It is a challenge to produce asperities such as, for example, protrusions, on the surface of a polymer layer using these techniques.
  • a device for forming topographic features on a surface of a polymer layer comprising: a polymer layer; a substrate comprising a conductor, a first surface of the polymer layer being provided on the substrate; and at least one electrode which, when the device is in use, interacts with a second surface of the polymer layer, wherein, when in use, the device is operable to apply a first electrical potential to the at least one electrode relative to the substrate, thereby to cause a protrusion to be formed on the second surface of the polymer layer.
  • a device embodying the present invention comprises a polymer layer, a first surface of which is provided on a substrate comprising a conductor and a second surface of which is provided so as to interact with at least one electrode.
  • a first electrical potential to the at least one electrode relative to the substrate, charge is injected onto the second surface of the polymer layer.
  • the charge injected into the second surface of the polymer material remains localized thereon by virtue of the polymer material being non-conducting. Where the charge is injected on the second surface of the polymer layer, the polymer material swells and a protrusion is formed.
  • Deformation of the topographic landscape of the second surface of the polymer layer by the formation of a protrusion thereon is in contrast to previously-proposed techniques where (and as described above), the topographic features that are formed extend in a sub-surface direction/are depressions in the surface of the polymer layer.
  • the at least one electrode interacts with the second surface of the polymer layer by being in contact therewith.
  • the at least one electrode is brought into contact with the second surface of the polymer layer, it is preferably scanned relative thereto and/or a loading force is applied to the at least one electrode.
  • the magnitude of the first electrical potential applied to the at least one electrode is relatively lower than if the second surface of the polymer layer and the at least one electrode were separated.
  • Formation of the protrusion on the second surface of the polymer layer may be assisted by a scanning motion of the at least one electrode and/or a vertical impact motion of the at least one electrode in response to a loading force being applied thereto.
  • the loading force applied to the at least one electrode may be a pre-defined value and such that a pressure in a range of 1 MPa to 100MPa results between the at least one electrode and the second surface of the polymer layer.
  • the at least one electrode may interact with the second surface of the polymer layer by being in out of contact, i.e. with there being a separation between the at least one electrode and the second surface of the polymer layer.
  • the distance between the at least one electrode and the second surface of the polymer layer is preferably at least 1 nm.
  • neither the second surface of the polymer layer nor the at least one electrode are subjected to wear.
  • the device is operable to apply a second electrical potential to the at least one electrode, which interacts with the second surface of the polymer layer in the region where the protrusion has been formed, the second electrical potential having an opposite polarity to the first electrical potential.
  • a protrusion formed on the second surface of the polymer layer may be enhanced, reduced or the second surface of the polymer layer may even be returned to an uncharged, neutral state.
  • such reversible operation allows modification of the topographic landscape of the second surface of the polymer layer to be done sequentially.
  • the device is operable to apply heat, irradiation or a combination thereof to the polymer layer.
  • Protrusions formed on the second surface of the polymer layer may be globally removed by applying a suitable form of energy such as, for example, the application of heat, irradiating with ultra-violet radiation and/or charged particles, or a combination thereof.
  • the second surface of the polymer layer may be returned to a state where new protrusions may subsequently be written thereon in a simple and time-efficient manner.
  • the polymer layer is heated to a temperature of between 100 c C to 200 c C. Since the decay rate of the injected charge typically increases by one order of magnitude per 20 ° C change in temperature, charge could be neutralized in a timescale of seconds by heating the polymer layer to temperatures between 100 c C to 200 ° C in an embodiment of the present invention.
  • the polymer layer comprises polystyrene-r-benzocyclobutene 30% random copolymer, PS-30%-BCB.
  • the polymer layer comprises a cross- linkable and non-conducting polymer such as, for example, polystyrene-r- benzocyclobutene 30% random copolymer, PS-30%-BCB.
  • a protrusion formed on the second surface of the polymer layer remains localized thereon without substantially losing form for a period of time spanning days for storage of the polymer layer at room temperature.
  • the at least one electrode has a substantially extended configuration.
  • contact between the at least one electrode and the second surface of the polymer layer may be established selectively and in a manner reminiscent of imprint lithography.
  • the at least one electrode interacts with the second surface of the polymer layer via a surface having a patterned structure.
  • the surface having a patterned structure may be the surface of the at least one electrode by way of which interaction is established with the second surface of the polymer layer, the patterned structure being in accordance with how topographic patterning of the second surface of the polymer layer is desired. It could also be that the surface having a patterned structure is, for example, a mask.
  • a corresponding method aspect of the invention is provided, and thus in an embodiment of a second aspect of the present invention, there is provided a method for forming topographic features on a surface of a polymer layer, a first surface of the polymer layer being provided on a substrate comprising a conductor, the method comprising the steps of: interacting at least one electrode with a second surface of the polymer layer; and applying a first electrical potential to the at least one electrode relative to the substrate, thereby to cause a protrusion to be formed on the second surface of the polymer layer.
  • a polymer layer a surface of which is patterned with topographic features using a device embodying the first aspect of the present invention or a method embodying the second aspect of the present invention.
  • any of the device features may be applied to the method aspect of the invention and vice versa.
  • Features of one aspect may be applied to any other aspect.
  • Any disclosed embodiment may be combined with one or several of the other embodiments shown and/or described. This is also possible for one or more features of the embodiments.
  • FIGS. 1 a and 1 b schematically illustrate the principle of an embodiment of the present invention
  • Figure 2 shows a reversible adhesion application in which an embodiment of the present invention may be used
  • Figures 3a and 3b schematically illustrate the application of an embodiment of the present invention for the size selective separation of certain species of particles;
  • Figures 4a to 4c schematically illustrate the application of an embodiment of the present invention for a method of transferring ink in printing
  • Figures 5a to 5c schematically illustrate the application of an embodiment of the present invention for another method of transferring of ink in printing.
  • FIGS 1 a and 1 b schematically illustrate the principle of an embodiment of the present invention.
  • a first surface 1 a of a polymer layer 1 is provided on a substrate 2. It may be provided directly on the substrate 2 or on a spacer layer which may, for example, be silicon oxide.
  • the polymer layer 1 comprises polystyrene-r-benzocyclobutene 30% random copolymer, PS-30%-BCB.
  • PS-30%-BCB polystyrene-r-benzocyclobutene 30% random copolymer
  • the present invention is, however, not limited to PS-30%-BCB and any other polymer that is non-conducting and, optionally, cross- linkable may be used.
  • the substrate 2 comprises silicon with an n-type doping concentration of, for example, 10 16 Cm '3 .
  • the substrate 2 is, of course, not limited to the use of silicon and any other material having an appropriate electrical conductance may be used.
  • a second surface 1 b of the polymer layer 1 is provided so as to interact with at least one electrode 3 either by being in contact with or in close proximity thereto, i.e. with there being a separation between the second surface 1 b of the polymer layer 1 and the at least one electrode 3.
  • a first electrical potential P1 to the at least one electrode 3 relative to the substrate 2 via an electrical switch S1 , charge is injected onto the second surface 1 b of the polymer layer 1.
  • the polymer layer 1 comprising a material that is non-conducting, the charge injected in the second surface 1 b of the polymer layer 1 remains localized on the surface thereof.
  • electromechanical transduction that is, the transduction of an electrical signal, which is the electrical potential applied to the at least one electrode 3, to cause the injection of charge onto the second surface 1 b of the polymer layer 1 and thereby a charge-induced swelling/protrusion to be formed on the second surface 1 b of the polymer layer 1 , is used to topographically pattern the surface of a polymer layer 1.
  • Deformation of the topographic landscape of the second surface 1 b of the polymer layer 1 by the formation of a protrusion 4 thereon is in contrast to previously-proposed techniques where (and as described above), the topographic features that are formed extend in a sub-surface direction/are depressions in the surface of the polymer layer.
  • the polarity of the charge injected onto the second surface 1 b of the polymer layer 1 , by the application of the first electrical potential P1 to the at least one electrode 3 when it interacts with the second surface 1 b of the polymer layer 1 , can be reversed. This is preferably done by arranging the at least one electrode 3 so that it interacts with the region on the second surface 1 b where charge has been injected, i.e. where a protrusion 4 has been formed, and applying a second electrical potential P2 that is of opposite polarity to the first electrical potential P1 to the at least one electrode 3. In this case, the at least one electrode 3 may, for example, be rescanned on the charged area on the second surface 1 b of the polymer layer 1.
  • a protrusion 4 formed on the second surface 1 b of the polymer layer 1 may be enhanced, reduced or the second surface 1 b may even be returned to an uncharged, neutral state. Furthermore, such reversible operation allows charge injection and, therefore, modification of the topographic landscape of the second surface 1 b of the polymer layer 1 to be done sequentially.
  • the at least one electrode 3 interacts with the second surface 1 b of the polymer layer 1 either by being in contact therewith, hereinafter referred to as the contact-mode of operation or by being in close proximity thereto, for example, being separated by at least 1 nm, hereinafter being referred to as the non-contact mode of operation.
  • the at least one electrode 3 and the second surface 1 b of the polymer layer 1 are respectively subjected to less wear than if they were maintained in contact.
  • charge densities on the order of 0.1 electron/nm ⁇ 2 may be achieved with a first electrical potential P1 of ⁇ 10V being applied to the at least one electrode 3.
  • the injection of charge onto the second surface 1 b of the polymer layer 1 may be assisted by a scanning motion of the at least one electrode 3 and/or a vertical impact motion of the at least one electrode 3 in response to a loading force being applied thereto.
  • the loading force applied to the at least one electrode 3 may be a pre-defined value and such that a pressure in a range of 1 MPa to 100MPa results between the at least one electrode 3 and the second surface 1 b of the polymer layer 1.
  • the charge injected onto the second surface 1 b of the polymer layer 1 , and therefore the topographic features/protrusions 4 created thereon, may be globally removed by applying a suitable form of energy such as, for example, the application of heat, irradiating with ultra-violet radiation and/or charged particles, or a combination thereof. Since the decay rate of the injected charge typically increases by one order of magnitude per 20 ° C change in temperature, charge could be neutralized in a timescale of seconds by heating the polymer layer 1 to temperatures between 100 c C to 200 ° C.
  • the at least one electrode 3 may have a substantially extended configuration so that contact with the second surface 1 b of the polymer layer 1 may be established selectively and in a manner reminiscent of imprint lithography.
  • the at least one electrode 3 may be provided so as to interact with the second surface 1 b of the polymer layer 1 via a surface having a patterned structure.
  • the surface having a patterned structure may be the surface of the at least one electrode
  • the patterned structure being in accordance with how topographic patterning of the second surface 1 b of the polymer layer 1 is desired. It could also be that the surface having a patterned structure is, for example, a mask.
  • a polymer layer 1 whose surface is patterned in accordance with an embodiment of the present invention may be exploited in a number of diverse applications of nanotechnology such as lithography, bio-engineering, life-sciences, etc., as will be described herebelow.
  • FIG. 2 shows a reversible adhesion application in which an embodiment of the present invention may be used.
  • a second surface 1 b of a polymer layer 1 is structured according to an embodiment of the present invention and as hereinbefore described with reference to Figure 1 such that a plurality of protrusions 4 are created thereon.
  • the protrusions 4 have an associated negative charge.
  • the second surface 1 b is brought into contact with a cover surface 5.
  • the bond between them may be released by supplying energy, for example, heat, to the system thereby neutralizing the charge on the second surface 1 b of the polymer layer 1 , which subsequently reverts to its initial non-functionalized state and separates from the cover surface 5.
  • energy for example, heat
  • a second surface 1 b of a polymer layer 1 is structured according to an embodiment of the present invention and as hereinbefore described with reference to Figure 1 such that a plurality of protrusions 4 are created thereon.
  • the protrusions 4 have an associated negative charge.
  • the protrusions 4 are created with a predetermined separation, which is smaller than a diameter of a negatively-charged particle 7 that is desired to be screened from another negatively- charged particle 8.
  • the larger particles 7 are unable to adhere to the second surface 1 b of the polymer layer 1 by virtue of having a larger diameter than the separation between adjacent protrusions 4 and also by being repelled by the negative charge associated to the protrusions 4.
  • An embodiment of the present invention may also find application for the transfer of ink in printing as will be described with reference to Figures 4a to 4c. Only by way of example, the application of the present invention in this domain is described with respect to ink molecules 9 having an associated positive charge. Similarly, the method would also work for molecules with higher order charge distributions such as a dipole, quadrupole, etc. Also, the method would work for uncharged molecules by virtue of the image charge effect which effectively provides dipolar electrostatic interaction.
  • the ink molecules 9 are adsorbed onto the protrusions 4 created on the second surface 1 b of a polymer layer 1 , which is patterned in accordance with an embodiment of the present invention.
  • the protrusions 4 have an associated negative charge.
  • the second surface 1 b of the polymer layer 1 modified by the adsorption of the ink molecules 9 thereon is brought into contact with a cover surface 5.
  • adhesion and/or transfer of the ink molecules 9 onto a desired surface may be controlled on the nanometer scale using a combination of topography and charge, an edge bleaching effect that is very often encountered in conventional printing schemes may be avoided.
  • the second surface 1 b of a polymer layer 1 is patterned in accordance with an embodiment of the present invention.
  • a height of the protrusions 4 is chosen to be larger than a diameter of the ink molecules 9 that are to be transferred onto a cover surface 5. In this way, the ink molecules 9 are protected from being scraped away when the cover surface 5 is aligned with the second surface 1 b of the polymer layer 1.
  • the protrusions 4 are formed at a predetermined separation.
  • the predetermined separation between adjacent protrusions 4 is chosen to be fixed and so that at least four ink molecules 9 are adsorbed in a trough between adjacent protrusions 4.
  • the separation between a pair of adjacent protrusions 4 is not restricted thereto and may also be chosen to be different from that of another pair of adjacent protrusions 4.
  • the predetermined separation between adjacent pairs of protrusions 4 provides a pattern for the adsorption of the ink molecules 9.
  • the protrusions 4 also serve to prevent leakage of the ink molecules 9 at the boundaries.
  • the surface charge on the polymer layer 1 is removed, causing the protrusions 4 to level out. Due to the levelling, the ink molecules 9 eventually come into contact with the cover surface 5, which then takes them up by adhesion.
  • the adhesion may be enhanced by charge-polarisation in the cover surface 5, which may occur in response to the charge associated to the ink molecules 9. Such adhesion may be further assisted by pre-charging the cover surface 5 before it is aligned with the second surface 1 b of the polymer layer 1.
  • the adhesion may also be enhanced by using a suitable material for cover surface 5, which provides higher adhesion, a favorable interfacial energy, to the ink particles 9 than the second surface 1 b.
  • the configuration shown therein may be used for transporting and/or storing the ink molecules 9 in a specific pattern.
  • this configuration is not limited to ink molecules 9 and other molecules, for example, proteins may also be stored and/or transported in this way. This may, for example, be useful for bio-assay applications in which proteins need to be protected against the environment during transfer of samples, such as, between assay preparation by a medical doctor or patient and subsequent analysis in a remote laboratory.

Abstract

La présente invention concerne un dispositif permettant de façonner des caractéristiques topographiques sur une surface de couche polymère comprenant : une couche polymère (1); un substrat (2) comprenant un conducteur, une première surface (1a) de la couche polymère (1) étant disposée sur le substrat (2); et au moins une électrode (3) qui, lorsque le dispositif est service, interagit avec une deuxième surface (1b) de la couche polymère (1). En service, le dispositif s'utilise pour appliquer un premier potentiel électrique (P1) à la/les électrode(s) (3) par rapport au substrat (2), pour former une saillie (4) sur la deuxième surface (1b) de la couche polymère (1).
PCT/IB2007/052869 2006-07-28 2007-07-18 Dispositif et procédé pour modeler une surface de couche polymère WO2008012734A2 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
US12/375,417 US20100059383A1 (en) 2006-07-28 2007-07-18 Device and method for patterning a surface of a polymer layer
JP2009521398A JP5084830B2 (ja) 2006-07-28 2007-07-18 ポリマー層の表面をパターニングするための装置および方法
EP07805193A EP2047470A2 (fr) 2006-07-28 2007-07-18 Dispositif et procédé pour modeler une surface de couche polymère

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP06118094 2006-07-28
EP06118094.9 2006-07-28

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Publication Number Publication Date
WO2008012734A2 true WO2008012734A2 (fr) 2008-01-31
WO2008012734A3 WO2008012734A3 (fr) 2008-04-03

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US (1) US20100059383A1 (fr)
EP (1) EP2047470A2 (fr)
JP (1) JP5084830B2 (fr)
CN (1) CN101496106A (fr)
WO (1) WO2008012734A2 (fr)

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Publication number Priority date Publication date Assignee Title
ES2927610T3 (es) * 2016-03-23 2022-11-08 Li & Co AG Elemento de revestimiento de pared o suelo
CN112895408B (zh) * 2020-12-28 2022-05-20 杭州电子科技大学 基于相场模型的聚合物表面微结构可控成形机理研究方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02153365A (ja) * 1988-12-06 1990-06-13 Dainippon Printing Co Ltd 原版複製方法
US20030178316A1 (en) * 2000-06-30 2003-09-25 President And Fellows Of Harvard College Electric microcontact printing method and apparatus
US6713238B1 (en) * 1998-10-09 2004-03-30 Stephen Y. Chou Microscale patterning and articles formed thereby
WO2004049323A1 (fr) * 2002-11-26 2004-06-10 Griffith University Dispositif de stockage de donnees nano-fabrique et procedes de fonctionnement et de production associes
WO2004063815A2 (fr) * 2001-05-16 2004-07-29 Board Of Regents, The University Of Texas System Procede et systeme de fabrication de motifs a nano-echelle dans des compositions durcissables a la lumiere au moyen d'un champ electrique

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04143942A (ja) * 1990-10-04 1992-05-18 Canon Inc トラック形成方法
US6964793B2 (en) * 2002-05-16 2005-11-15 Board Of Regents, The University Of Texas System Method for fabricating nanoscale patterns in light curable compositions using an electric field

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02153365A (ja) * 1988-12-06 1990-06-13 Dainippon Printing Co Ltd 原版複製方法
US6713238B1 (en) * 1998-10-09 2004-03-30 Stephen Y. Chou Microscale patterning and articles formed thereby
US20030178316A1 (en) * 2000-06-30 2003-09-25 President And Fellows Of Harvard College Electric microcontact printing method and apparatus
WO2004063815A2 (fr) * 2001-05-16 2004-07-29 Board Of Regents, The University Of Texas System Procede et systeme de fabrication de motifs a nano-echelle dans des compositions durcissables a la lumiere au moyen d'un champ electrique
WO2004049323A1 (fr) * 2002-11-26 2004-06-10 Griffith University Dispositif de stockage de donnees nano-fabrique et procedes de fonctionnement et de production associes

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JP5084830B2 (ja) 2012-11-28
JP2009544498A (ja) 2009-12-17
WO2008012734A3 (fr) 2008-04-03
CN101496106A (zh) 2009-07-29
US20100059383A1 (en) 2010-03-11
EP2047470A2 (fr) 2009-04-15

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