WO2008010303A1

WO2008010303A1 - Cutting device

Info

Publication number: WO2008010303A1
Application number: PCT/JP2006/316192
Authority: WO
Inventors: Masaaki Takita
Original assignee: Takita Research & Development Co., Ltd.
Priority date: 2006-07-20
Filing date: 2006-08-17
Publication date: 2008-01-24
Also published as: CN101489746B; TW200812924A; KR20090023678A; JP4414473B2; CN101489746A; JPWO2008010457A1; KR101069621B1

Abstract

A cutting device capable of accurately and stably cutting a cut material without impairing the quality of the cut member by preventing cracks from occurring therein. The cutting device (10) for cutting the material (W) to be cut, which is formed of a fragile material such as glass, ceramics, and semiconductor materials, comprises a cutting tool (12) disposed to come into contact with the specified cut portion (ω) of the material (W) and a displacement means for generating a relative motion between the cutting tool (12) and the material (W) along the cut portion (ω). The cutting tool (12) comprises a cutting blade part (18) having a blade tip part (20) (edge part) cutting the material (W) and a heating element heating the a cutting blade part (18) at a temperature higher than the softening point of the material (W). By generating the relative motion by a displacement means between the material (W) and the blade tip part (20) heated by the heating element, the cut portion (ω) of the material (W) can be cut off.

Description

Cutting device

Technical field

TECHNICAL FIELD [0001] The present invention relates to a cutting apparatus, and is applied to a cutting object made of a brittle material such as glass or ceramic, preferably a cutting object of a thin plate, and particularly, for example, a display of a liquid crystal or a plasma display. The present invention relates to a cutting apparatus suitable for cutting a glass substrate in a panel manufacturing process.

Background art

[0002] In the conventional technology that is the background of the present invention, there is an opposite of a scribe groove formed by a glass cutter such as a cemented carbide cutter wheel on a bonded glass plate formed by bonding two glass substrates. A laminated glass substrate characterized by pressing a rubber plate or the like from the side and applying a pressing force along the scribe line to cut the glass substrate by advancing vertical cracks in the scribe groove. There was a cutting method (see, for example, Patent Document 1).

In addition, in the prior art which is the background of the present invention, an oblique cut line (cut line) [corresponding to “Niyu”] is formed on one main surface side of a glass plate with a diamond disc. The glass plate is deformed by heating the surface with the cut line and the outside of the area surrounded by the cut line, and by this deformation, the oblique cut line instantaneously reaches the side opposite to the heating surface. There has been a glass cutting method characterized in that a portion surrounded by a cut line is separated (see, for example, Patent Document 2).

Furthermore, in the prior art as the background of the present invention, the surface of the glass sheet is irradiated with laser light such as a carbon dioxide laser, HF laser, and YAG laser to locally heat, and then rapidly cooled. There has been proposed a glass cutting method and apparatus characterized by dividing a glass sheet that does not apply bending deformation and impact to the glass sheet (see, for example, Patent Document 3).

In addition, the prior art as the background of the present invention includes at least two points near the edge of the workpiece W made of a brittle material such as glass or alumina ceramic. A laser beam such as a carbon dioxide laser or a YAG laser is simultaneously irradiated to two points in the vicinity of the Eve groove planned line) to generate an initial crack, and a unique thermal stress distribution is generated between the laser beam irradiation positions. A brittle material cleaving method has also been proposed, characterized by increasing the tensile stress compared to the case of single-point laser beam irradiation and controlling the stress generation state to enhance cleaving control. (For example, see Patent Document 4).

Furthermore, in the prior art that is the background of the present invention, the energy density in each part is uniform, and the cut portion of the glass substrate is heated by irradiating a laser beam in which the laser beam spot forms a vertically long shape in the cutting direction A glass substrate that has a heating process and a cooling process that forms a microcrack by rapidly cooling a cut portion that is heated by laser beam irradiation, thereby enabling the generation of microcracks and improving productivity. (See, for example, Patent Document 5).

In addition, in the prior art that is the background of the present invention, in the processing method of glass products or crystallized glass products, a process of forming a processed portion thinner than other portions in advance, There is also a processing method and a manufacturing method for glass products or crystallized glass products characterized by including a process of drilling or cutting by irradiating a laser (see, for example, Patent Document 6). .

In addition, the prior art as the background of the present invention includes cracking means for making fine cracks at the cutting start point of the glass plate, irradiation heating means by at least one laser beam absorbed by the glass plate, and at least After irradiation heating with one laser beam, in a glass plate cutting device including a cooling means for cooling a glass plate with a cooling fluid and a braking means, an irradiation means in which the laser beam is a first carbon dioxide laser beam, and an irradiation means After the first control means for controlling the temperature within a predetermined range and the first cooling means by the cooling fluid provided at the rear of the first carbon dioxide laser beam irradiation means are arranged to generate the scribe line, the glass plate There has been proposed a glass plate cutting device or the like characterized by performing the braking process (see, for example, Patent Document 7).

Patent Document 1: JP-A-6-48755

Patent Document 2: Japanese Patent Laid-Open No. 7-223828

Patent Document 3: Japanese Patent Laid-Open No. 9-12327 Patent Document 4: JP-A-7-328781

Patent Document 5: Japanese Unexamined Patent Publication No. 2005-247603

Patent Document 6: Japanese Unexamined Patent Publication No. 2000-219528

Patent Document 7: Special Publication 2006—513121

Disclosure of the invention

Problems to be solved by the invention

However, the conventional technology as the background of the present invention described above has the following problems. In other words, in the technique of Patent Document 1, when the rubber is pressed from the opposite side of the scribe groove, an impact is applied to the glass substrate. If the quality of the product glass plate is reduced, such as by cutting! There is a defect.

In the technique of Patent Document 2, it is difficult to control the direction in which the cut lines are generated, and there is a problem that a crack is generated inside the glass plate, resulting in poor product quality.

In the technologies of Patent Document 3 and Patent Document 4, it is necessary to increase the irradiation output of the laser beam, so the distortion in the scribe groove may affect the crack in the in-plane direction of the glass plate. In addition, there is a problem that the performance of the glass plate as a product is deteriorated, such as peeling of a glass piece along the scribe groove.

Further, in the technique of Patent Document 3, when guiding a crack along the path of the laser beam, the path force of the movement of the laser beam irradiation position may cause the crack to shift and follow, which may deteriorate the processing accuracy. There is.

Furthermore, in the technique of Patent Document 4, a laser beam is irradiated and generated by a localized concentrated stress generated by a steep temperature gradient generated between the center and the periphery of the beam. When the thermal stress (tensile stress) generated varies depending on various conditions such as temperature, the scattering state on the material surface and the light absorption rate in the material, and the local concentrated stress does not exceed the allowable stress of the material. Therefore, there is a problem that the certainty of the occurrence of the initial crack is low. Moreover, as with the technique of Patent Document 3, the path force of the movement of the laser beam irradiation position when inducing cracks may cause the cracks to shift and follow, so if the processing accuracy deteriorates, the problem remains. The The technique of Patent Document 5 requires a process of forming a processed part thinner than other parts in advance before drilling or cutting a processed part by irradiating a laser. In addition, it requires a press machine to form thinly, resulting in high manufacturing costs.

In the technologies such as Patent Document 6 and Patent Document 7, the configuration of the laser device and the optical peripheral device necessary for the laser device is complicated, so that the cost of the device is very high and the cost is extremely high. There is a bug.

[0005] Therefore, a main object of the present invention is to provide a cutting device that can prevent the occurrence of cracks and accurately and stably cut a workpiece without damaging the quality of the workpiece. That is.

Means for solving the problem

[0006] The present invention according to claim 1 is a cutting device that cuts a workpiece formed of a brittle material such as glass, ceramic, or semiconductor material, and abuts on a desired cutting site of the workpiece. A cutting tool that can be arranged and a displacement means for generating a relative movement between the cutting tool and the workpiece along the cutting site, the cutting tool cutting the workpiece. And a heating element that heats the cutting edge at a temperature higher than the softening point of the object to be cut at a temperature higher than the softening point of the object to be cut, and is heated by the object to be cut and the heating element by the displacing means. The cutting device is characterized in that a relative movement is generated between the cutting blade portion and the cutting portion of the workpiece is cut and cut.

In the present invention according to claim 1, heating is performed by the cutting tool force heating element disposed so as to be able to come into contact with a desired cutting site of the workpiece. In this case, the edge part of the cutting edge part is heated to a temperature higher than the soft saddle point of the workpiece. The cutting tool is moved relative to the workpiece by the displacement means. That is, the cutting edge portion of the cutting tool and Z or the object to be cut are relatively displaced along the desired cutting site. Therefore, a groove corresponding to the shape of the edge portion is formed by the edge portion of the cutting edge portion at a desired cutting site of the object to be cut. In addition, at the same time, the cutting portion is heated by the heated edge portion locally and rapidly at a temperature higher than the softening point of the object to be cut. ) The object to be cut at the site to be plastically deformed. And The part that has undergone plastic deformation becomes chips and is scraped away from the object to be cut. Finally, the object to be cut is cut along the desired cutting site.

In this way, when a hot cutting tool is locally pressed along a desired cutting site so that the object to be cut has a temperature equal to or higher than the soft saddle point, the cutting tool comes into contact due to thermal expansion. Compressive stress is generated around the contacted part and the surrounding force. In this case, since the temperature at the contact part of the cutting tool is suddenly heated above the soft saddle point of the object to be cut, the object to be cut at the contact part is plastically deformed, thereby compressing stress. Is released. Therefore, cracks such as cracks do not occur in the workpiece due to the compressive stress generated around the contact area.

Therefore, in the present invention according to claim 1, the cutting tool and the object to be cut are brought into contact with the desired cutting site of the object to be cut by bringing the edge part of the cutting edge heated to the soft saddle point or more of the object to be cut. By making a relative movement act between the two, the object to be cut can be cut accurately and stably without cutting defects.

The present invention according to claim 2 is an invention dependent on the invention according to claim 1, wherein the cutting edge is maintained at a predetermined temperature while the workpiece is being cut by the cutting tool. The cutting device further includes temperature control means for controlling the temperature of the heating element. In the present invention according to claim 2, the temperature of the cutting edge is maintained at a predetermined temperature while the workpiece is being cut by the cutting tool by the temperature control means. Therefore, it is possible to stably apply the desired thermal tension to the groove portion and the vicinity of the groove portion, and it is possible to further cut the object to be cut accurately and stably without cutting failure.

The present invention according to claim 3 is an invention dependent on the invention according to claim 2, wherein the temperature control means is disposed in the vicinity of the heating element and detects the temperature of the edge portion of the cutting edge portion. While the workpiece is being cut by the cutting tool, based on the detection signal of the temperature detection sensor force, the relative speed generated between the cutting tool and the workpiece and the Z or workpiece The cutting apparatus further includes a control unit that controls a cutting depth of the cutting blade portion with respect to the cut object.

In the present invention according to claim 3, the control unit detects the speed and Z according to the relative movement generated between the cutting tool and the workpiece in accordance with the detection signal from the temperature detection sensor. Or the cutting depth of the cutting edge part with respect to a to-be-cut object can be controlled suitably. Therefore, while cutting the workpiece with a cutting tool, the cutting of the workpiece due to the temperature conditions of the cutting blade portion of the cutting tool and the relative movement between the cutting tool and the workpiece. The conditions are always optimal, and the workpiece can be cut more accurately and stably without cutting defects.

The present invention according to claim 4 is an invention according to the invention according to any one of claims 1 to 3, wherein heating means for preliminarily heating a portion to be cut with a cutting tool is provided. Furthermore, it is a cutting device.

In the invention of the present application as claimed in claim 4, the part to be cut with the cutting tool is preliminarily heated by the heating means. Therefore, the workpiece can be heated to a temperature above the soft saddle point with a cutting tool even more easily. Accordingly, the cutting speed can be further improved and the machinability can be stabilized, so that more stable workability can be secured.

The invention's effect

[0007] According to the cutting device of the present invention, it is possible to prevent the generation of cracks and accurately and stably cut the workpiece without damaging the quality of the workpiece.

[0008] The above-mentioned object, other objects, features, and advantages of the present invention will become more apparent from the following description of the best mode for carrying out the invention with reference to the drawings.

Brief Description of Drawings

FIG. 1 is a perspective view of a principal part showing an example of an embodiment of a cutting device according to the present invention.

2 is a schematic plan view schematically showing an example of a cutting tool applied to the embodiment of FIG.

FIG. 3 shows an example of a manufacturing method of a cutting tool applied to the embodiment of FIG. 1. In particular, (A) is a perspective view showing a state in which a temperature detection sensor is formed on a ceramic substrate. (B) is an illustration of a side view.

FIG. 4 shows an example of a manufacturing method of a cutting tool applied to the embodiment of FIG. 1. In particular, (A) is a perspective view showing a state in which an insulating layer is formed on a temperature detection sensor. (B) is an illustration of a side view. FIG. 5 shows an example of a manufacturing method of a cutting tool applied to the embodiment of FIG. 1. In particular, (A) is a perspective schematic view showing a state where a heating element is formed, (B ) Is an illustration of the side.

FIG. 6 shows an example of a manufacturing method of a cutting tool applied to the embodiment of FIG. 1. In particular, (A) is a perspective view showing a state in which a wear-resistant layer is formed on a heating element. (B) is a schematic side view.

FIG. 7 shows an example of a manufacturing method of a cutting tool applied to the embodiment of FIG. 1. In particular, (A) is a perspective schematic view showing a state in which an electrode is formed at the end of a heating element. (B) is a schematic illustration of its side.

FIG. 8 shows an example of a manufacturing method of a cutting tool applied to the embodiment of FIG. 1. In particular, (A) is a perspective view showing a state in which a cutting edge portion is formed by blade grinding or the like. FIG. 4B is an illustration of a side view thereof.

FIG. 9 is a fragmentary perspective view showing an example of another embodiment of the cutting device according to the present invention.

Explanation of symbols

10 Cutting device

12 Cutting tools

14 Cutting tool body

16 Ceramic substrate

18 Cutting edge

20 Cutting edge

22 Temperature detection sensor

22a, 22b electrode

24 Insulation layer

26 Heating element

28 Wear-resistant layer

30a, 30b electrode

40 Groove 50 laser

52 Laser light source

54 Laser light

56 Beam spot (laser irradiation image)

ω Desired cutting site

W glass plate (object to be cut)

c Chips

BEST MODE FOR CARRYING OUT THE INVENTION

[0011] FIG. 1 is an essential part perspective view showing an example of an embodiment of a cutting device according to the present invention, and FIG. 2 is a schematic view of an example of a cutting tool applied to the embodiment of FIG. FIG. The cutting device according to the present invention can be applied to cut brittle materials such as optical glass, quartz glass, other glasses, ceramics, silicon, and semiconductor materials. In this embodiment, in particular, for example, A cutting apparatus 10 suitable for cutting a glass plate in a liquid crystal and plasma display panel manufacturing process will be described.

The cutting device 10 includes a cutting tool 12. For example, as shown in FIG. 1, the cutting tool 12 is disposed so as to be able to contact a desired cutting site ω of a rectangular glass plate W as a workpiece (workpiece). Generally speaking, the cutting tool 10 has a local portion for cutting the glass sheet W (corresponding to a cutting edge part of a cutting edge part to be described later) at a temperature higher than the softening point of the glass sheet W. In this case, for example, a temperature detection sensor and a heating element are formed on a ceramic substrate so that the temperature can be accurately and rapidly controlled at a high temperature in the range of about 600 ° C to 1000 ° C. The cutting edge portion of the glass plate W is cut and cut at the cutting edge of the cutting edge heated to a predetermined temperature.

That is, the cutting tool 12 includes a cutting tool body 14 having, for example, a pentagonal shape in plan view as shown in FIG. The cutting tool main body 14 includes, for example, a ceramic substrate 16 having a ceramic force. The ceramic substrate 16 includes, for example, a V-shaped cutting edge 18 on one end side in the longitudinal direction. The cutting edge portion 18 has a portion for cutting the glass plate W as an object to be cut, that is, a blade edge portion 20 as an edge portion. The cutting edge 20 is one main surface of the ceramic substrate 16. It is located at the top end of the cutting edge 18 on the side.

As the cutting tool body 14, for example, an insulating material such as silicon oxide, silicon oxide aluminum, zirconium oxide, titanium oxide, or mullite can be used as appropriate.

[0014] On one main surface of the ceramic substrate 16, a temperature detection sensor 22 having a U-shape in plan view is formed. An electrode 22a and an electrode 22b are connected to one end and the other end of the temperature detection sensor 22, respectively. The electrode 22a and the electrode 22b are each made of gold, gold, copper alloy, or the like. In this case, as the temperature detection sensor 22, for example, a thermocouple made of chromel'alumel, platinum'rhodium, or the like, or an electric resistor made of platinum, gold tantalum, or the like can be used as appropriate.

Further, an insulating layer 24 made of, for example, silicon dioxide or silicon dioxide is formed on one main surface side of the ceramic substrate 16 so as to cover the temperature detection sensor 22. As a material for forming the insulating layer 24, in addition to silicon dioxide, for example, an insulating material such as silicon oxide, acid aluminum, zirconium oxide, titanium oxide, and mullite can be appropriately used.

Further, on the one main surface side of the ceramic substrate 16, for example, a “U” -shaped heating element 26 is disposed on the upper surface of the insulating layer 24. The heating element 26 is formed of a resistance heating element such as silicon carbide. In this case, the temperature detection sensor 22 is disposed in the vicinity of the heating element 26. In addition to silicon carbide, for example, zirconia can be used as a material for forming the heating element 26.

Further, on one main surface side of the ceramic substrate 16, a wear-resistant layer 28 is formed on the upper surface of the heating element 26 excluding the one end portion 26 a and the other end portion 26 b of the heating element 26. The wear resistant layer 28 is formed of titanium oxide, titanium nitride, or the like. In addition to titanium oxide and titanium nitride, for example, tungsten carbide, titanium carbide, boron carbide, or the like can be used as a material for forming the wear-resistant layer 28 as appropriate.

Further, on one main surface side of the ceramic substrate 16, electrodes 30a and 30b made of an alloy of gold, gold, copper, etc. are connected to the upper surfaces of one end portion 26a and the other end portion 26b of the heating element 26, respectively. .

[0015] Therefore, an example of a method for manufacturing the cutting tool 12 will be described below with reference to FIGS. 3, 4, 5, 6, 6, 7 and 8, for example. First, for example, a rectangular parallelepiped-shaped ceramic substrate 16 having a zirco-equal force is prepared. For example, as shown in FIG. For example, an electrode 22a and an electrode 22b having an alloying force of gold and copper are connected to one end and the other end of the sensor 22, respectively. The temperature detection sensor 22 and the electrodes 22a and 22b are integrally formed on the upper surface of the ceramic substrate 16 by a thin film formation method such as sputtering.

Next, on the upper surface of the ceramic substrate 16, for example, as shown in FIG. 4, an insulating layer 24 that also has a silicon dioxide-silicon power, for example, is deposited so as to cover the temperature detection sensor 22 and the electrodes 22 a and 22 b. A thin film is formed by such a method.

On the upper surface side of the ceramic substrate 16, for example, as shown in FIG. 5, a thin film is formed on the upper surface of the insulating layer 24 as a heating element 26, for example, a resistance heating element having silicon carbide power by sputtering or the like.

Further, on one main surface side of the ceramic substrate 16, for example, as shown in FIG. 6, the upper surface of the heating element 26 excluding one end portion 26 a and the other end portion 26 b of the heating element 26 is provided with a resistance against, for example, titanium nitride. The wear layer 28 is formed into a thin film by a method such as sputtering.

Further, on one main surface side of the ceramic substrate 16, as shown in FIG. 7, for example, electrodes made of an alloy of gold, gold, copper, etc. are respectively formed on the upper surfaces of the one end portion 26a and the other end portion 26b of the heating element 26. 30a and 30b are formed into a thin film by a method such as sputtering.

Thereafter, one end side in the longitudinal direction of the cutting tool main body 14 is subjected to blade polishing so that, for example, as shown in FIG. 8, a V-shaped cutting blade portion 18 is formed in a plan view. In this case, a blade edge portion 20 is formed at the top end portion of the cutting edge portion 18 on the one main surface side of the ceramic substrate 16 and serves as a portion for cutting the glass plate W that is a workpiece.

In the cutting apparatus 10 according to the present embodiment, when a direct current voltage is applied to the electrodes 30a and 30b of the cutting tool 12, for example, the resistance heating element as the heating element 26 generates heat and the surface temperature is increased. The force can be raised to a predetermined temperature, in this case a high temperature, for example in the range of about 600 ° C to 1000 ° C. Note that the temperature rise of the heating element 26 can be further increased by changing the DC voltage application to, for example, a pulse voltage application to increase the applied voltage.

[0017] In the cutting device 10 according to the present embodiment, by an appropriate displacement means (not shown), A relative movement occurs between the cutting tool 12 and the glass plate W (workpiece). That is, the displacing means (not shown) is constituted by a drive mechanism (not shown) including, for example, a motor (not shown) and an actuator (not shown), and the cutting blade portion 18 of the cutting tool 12 and Z or glass plate W (object to be cut) is relatively displaced along the desired cutting site. In this embodiment, for example, a glass plate W (object to be cut) is fixed to a mounting table (not shown) or the like, and the cutting tool 12 is moved along a desired cutting site ω.

[0018] Therefore, the desired cutting site ω of the glass plate W (object to be cut) is provided at the cutting edge portion 20 by the cutting edge portion 20 of the cutting blade portion 18 heated to a predetermined temperature, for example, as shown in FIG. For example, a V-shaped groove portion 40 corresponding to the shape of 20 is formed, and at the same time, the cutting site ω is locally and rapidly heated by the heated blade edge portion 20 with the glass plate W (object to be cut). ) Is heated above the soft saddle point. Therefore, the glass plate W (object to be cut) at the part where the cutting edge portion 20 contacts (contacts) is plastically deformed, and the plastically deformed portion becomes chip c and becomes the glass plate W (cut object). The glass plate W (object to be cut) is finally cut along the desired cutting site ω.

In this case, the contact (contact) portion where the blade edge portion 20 is pressed is subjected to thermal expansion, and compressive stress is generated toward the periphery around the portion where the blade edge portion 20 is in contact. The part where 20 is in contact is heated to a temperature higher than the softening point of the glass plate W (object to be cut), so that the glass plate W (object to be cut) in the contact part is plastically deformed. , The compressive stress is released. In addition, since the glass plate W (the object to be cut) itself has a strong compressive force, the glass plate W (the object to be cut) is cracked by the compressive stress generated around the contact area. That's also true.

Therefore, according to the cutting apparatus 10 according to the present embodiment, the generation of cracks is prevented and the glass plate W (cut object) is accurately and stably prevented from deteriorating the quality of the glass plate W (cut object). Can be cut off.

In the cutting device 10 according to the present embodiment, the temperature detection sensor 22 is controlled by a temperature control means (not shown), and the glass plate W is cut by the cutting tool 12 by this temperature control means. During cutting of the workpiece, the temperature of the cutting edge 18 of the cutting edge 18 is maintained at a predetermined temperature. It is configured to be. In this case, the glass plate W (object to be cut) has different physical properties depending on the type of glass material, and also has different soft saddle points. Therefore, the blade edge portion is appropriately selected according to the softening point of the object to be cut. 20 temperature settings are made.

[0020] Further, in the cutting device 10 according to the present embodiment, the cutting tool 12 and the galley are separated based on the detection signal from the temperature detection sensor 22 while the cutting tool 12 is cutting the glass plate W (cut object). A control unit (not shown) is configured to control the speed related to the relative movement generated between the steel plate W (the workpiece) and Z or the cutting depth of the cutting blade relative to the workpiece. . In this embodiment, the control unit can appropriately control the moving speed of the cutting tool 14 and the depth of the groove 40.

[0021] Therefore, in the cutting apparatus 10 according to the present embodiment, the cutting edge portion 20 heated to a soft spot or higher of the glass plate W (object to be cut) is desired for the glass plate W (object to be cut). The desired cutting site ω of the glass plate W (cut object) is brought into contact with the cutting site ω and a relative movement is applied between the cutting tool 12 and the glass plate W (cut object). Accordingly, the glass plate W (object to be cut) can be cut accurately and stably without being subjected to an impact.

[0022] Further, the temperature of the cutting edge portion 18 of the cutting edge portion 18 is maintained at a predetermined temperature while the cutting tool 12 is cutting the glass plate W (object to be cut) by the temperature control means. Thus, plastic deformation can be caused stably, and the glass plate W (object to be cut) can be cut and cut so as to be accurate and stable with no cutting failure.

[0023] Further, according to the detection signal from the temperature detection sensor 22 by the control unit, the speed and soot or glass relating to the relative movement generated between the cutting tool 12 and the glass plate W (object to be cut). Since the cutting depth of the cutting edge portion 18 of the cutting edge portion 18 with respect to the plate W (workpiece) can be appropriately controlled, the cutting tool 12 can cut the glass plate W (workpiece) while cutting the glass plate W (workpiece). The cutting conditions of the glass plate W (cutting object) are always optimal due to the temperature conditions of the cutting edge part 20 of the blade part 18 and the relative movement of the cutting tool 12 and the glass plate W (cutting object). Further, the glass plate W (object to be cut) can be cut and cut accurately and stably so that there is no cutting failure.

[0024] In the embodiment described above, the wear-resistant layer 28 of the cutting tool 12 is made of titanium oxide, nitride. Since it is formed of titanium or the like, when the glass plate W (object to be cut) is cut with the cutting tool 12, it becomes possible to prevent the glass material at the cut site from adhering to the blade edge portion 20. As a method for preventing the glass material from adhering to the blade edge portion 20, for example, a release oil may be applied to the portion of the blade edge portion 20 to form a release layer.

Further, in this cutting tool 12, the edge part 201 forming the edge part as a part for cutting the object to be cut is partly formed on the cutting edge part 18 as a part for cutting the object to be cut. Even if it forms an edge part.

FIG. 9 is a perspective view of relevant parts showing an example of another embodiment of the cutting device according to the present invention.

In the embodiment shown in FIG. 9, the cutting tool is used when cutting the glass plate W (to-be-cut object) with the cutting tool 12 and cutting it, as compared with the above-described embodiment shown in FIGS. Prior to the twelve cutting paths, the portion to be cut with the cutting tool 12 is preliminarily heated in advance by a heating means such as a laser. Note that the cutting tool 12 used in the cutting device 10 that works on the embodiment shown in FIG. 9 has the same structure as the cutting tool 12 shown in the above-described embodiment, and has the same effect. It is.

[0026] That is, the cutting device 10 according to this embodiment shown in FIG. 9 is based on the configuration of the cutting device 10 according to the above-described embodiment, and a laser such as a carbon dioxide laser is used as a heating means. Further includes vessel 50. The laser device 50 uses a cylindrical lens (not shown) or a cylindrical mirror (not shown) to output a laser beam on a glass plate W (object to be cut) (beam spot). For example, has a laser light source 52 which is oblong. In this case, the laser light 54 emitted from the laser light source 52 forms an oblong beam spot 56 in front of the cutting tool 12 as shown in FIG. 9, and the beam spot 56 is preliminarily heated. It becomes an area.

[0027] Therefore, in the embodiment shown in FIG. 9, the part to be cut by the cutting tool 12 is preliminarily heated by the beam spot 56, which is much easier than in the above-described embodiment. The cutting tool 12 can heat the glass plate W (the object to be cut) to a temperature above the soft saddle point. Therefore, in the cutting device 10 that works on the present embodiment shown in FIG. Compared with the embodiment shown in FIGS. 1 to 8, the cutting speed can be further improved and the machinability can be stabilized, and a more stable force property can be secured.

Claims

The scope of the claims

[1] A cutting device for cutting an object formed of a brittle material such as glass, ceramic, or semiconductor material,

A cutting tool disposed so as to be able to contact a desired cutting site of the workpiece, and a displacement for generating a relative movement between the cutting tool and the workpiece along the cutting site. Including means,

The cutting tool is

A cutting edge portion provided with an edge portion for cutting the workpiece, and

A heating element that heats the cutting edge at a temperature higher than the softening point of the workpiece;

By causing the displacement means to generate a relative movement between the object to be cut and the cutting edge heated by the heating element, the cutting portion of the object to be cut is cut. A cutting device characterized by being cut.

[2] It further includes temperature control means for controlling the temperature of the heating element so that the temperature of the cutting edge portion is maintained at a predetermined temperature while cutting the workpiece with the cutting tool. The cutting device according to claim 1.

[3] The temperature control means includes a temperature detection sensor that is disposed in the vicinity of the heating element and detects the temperature of the edge portion of the cutting blade portion,

Based on the detection signal from the temperature detection sensor while cutting the workpiece with the cutting tool,

And further comprising a control unit for controlling a speed related to a relative movement generated between the cutting tool and the workpiece and Z or a cutting depth of the cutting edge portion with respect to the workpiece. The cutting device according to claim 2.

[4] The cutting device according to any one of [1] to [3], further comprising heating means for preliminarily heating a portion to be cut with the cutting tool.