WO2008007564A1 - Inkjet application device, multi-layered information recording medium, and method of producing the medium - Google Patents

Inkjet application device, multi-layered information recording medium, and method of producing the medium Download PDF

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Publication number
WO2008007564A1
WO2008007564A1 PCT/JP2007/063002 JP2007063002W WO2008007564A1 WO 2008007564 A1 WO2008007564 A1 WO 2008007564A1 JP 2007063002 W JP2007063002 W JP 2007063002W WO 2008007564 A1 WO2008007564 A1 WO 2008007564A1
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WO
WIPO (PCT)
Prior art keywords
radiation
resin
ink jet
information recording
curable resin
Prior art date
Application number
PCT/JP2007/063002
Other languages
French (fr)
Japanese (ja)
Inventor
Masahiko Tsukuda
Morio Tomiyama
Yuuko Tomekawa
Original Assignee
Panasonic Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Panasonic Corporation filed Critical Panasonic Corporation
Priority to US12/307,642 priority Critical patent/US20090309906A1/en
Priority to JP2008524756A priority patent/JPWO2008007564A1/en
Publication of WO2008007564A1 publication Critical patent/WO2008007564A1/en

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Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/26Apparatus or processes specially adapted for the manufacture of record carriers
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/2403Layers; Shape, structure or physical properties thereof
    • G11B7/24035Recording layers
    • G11B7/24038Multiple laminated recording layers

Definitions

  • the present invention relates to an information recording medium intended for reproduction or recording / reproduction, and a method of manufacturing the same.
  • the present invention relates to a multilayer information recording medium having an information recording layer of two or more layers and a method of manufacturing the same.
  • optical information recording media capable of recording information at high density such as CDs and DVDs are in widespread use.
  • Such an optical information recording medium is capable of recording metal thin films and heat on a transparent substrate on which pits representing information signals and concave and convex shape signals such as guide grooves for tracking recording / reproducing light are formed.
  • Thin film materials and the like are laminated, and a protective layer is further laminated.
  • the protective layer is composed of a resin layer, a transparent substrate or the like which protects the metal thin film, thin film material and the like by force and moisture in the air.
  • Information is reproduced by irradiating a laser beam to the metal thin film or thin film material and detecting a change in the amount of reflected light.
  • a metal thin film or thin film material is laminated on a resin substrate having a thickness of about 1.1 mm having an uneven shape indicating an information signal on one side, and then coated with an ultraviolet curing resin or the like. It is produced by forming a protective layer. Note that the reproduction of the information signal is performed by entering the laser light from the substrate side, not the protective layer side.
  • next-generation optical information recording media having higher density and larger capacity than DVDs are required.
  • a large-capacity recording medium such as a Blu-ray disc
  • a metal thin film or the like is laminated on an uneven surface on a substrate having a thickness of 1.1 mm, and a protective layer having a thickness of about 0.1 mm is further formed.
  • the track pitch of the information layer formed in a concavo-convex shape is narrower than that of the DVD, and the pit size is smaller. Therefore, it is necessary to narrow the spot of the laser for recording and reproducing information on the information layer.
  • the Blu-ray Disc uses a blue-violet laser with a short wavelength of 405 nm as the laser light, and uses an optical head with a 0.85 numerical aperture (NA) as an objective lens to narrow the laser light. .
  • NA numerical aperture
  • the optical head narrows down the spot of the laser light on the information layer.
  • the spot becomes smaller, it becomes more susceptible to the tilt of the disk, and even a slight tilt of the disk causes aberrations in the beam spot.
  • a problem occurs that distortion occurs in the narrowed beam and recording and reproduction become impossible. Therefore, with Blu-ray discs, the defect is overcome by making the thickness of the protective layer on the laser incident side of the disc as thin as 0.1 mm.
  • next-generation optical information recording medium of large capacity such as this Blu-ray disc
  • a large capacity capacity of storage capacity is proposed by multi-layering of the information layer as well as DVD.
  • FIG. 2 is a cross-sectional view of a two-layered Blu-ray disc having two information recording layers.
  • This two-layer Blu-ray disc has a metal thin film on the molded resin substrate 201 with the first information surface 202 formed on its one side by a concavo-convex shape, and a thin film material that can be thermally recorded.
  • the first information recording layer 203 is formed.
  • a resin intermediate layer 204 substantially transparent to recording and reproducing light is formed on the first information recording layer 203, and a second information surface 205 having a concavo-convex shape is formed on the resin intermediate layer 204.
  • a second information recording layer 206 is formed on the second information surface 205 by laminating a metal thin film having transmissivity for recording and reproducing light or a thin film material capable of thermal recording.
  • a protective layer 207 coated with a resin substantially transparent to recording and reproduction light is provided to cover the second information recording layer 206.
  • a laser beam is made incident from the protective layer 207 side to focus on the information recording layer to be recorded or reproduced among the first information recording layer or the second information recording layer.
  • Signal recording and reproduction can be performed.
  • the thickness of the molded resin substrate 201 is about 1.1 mm
  • the thickness of the resin intermediate layer is set to about 25 m
  • the thickness of the protective layer 207 is set to about 75 ⁇ m.
  • substantially transparent means having a transmittance of about 90% or more to the recording and reproducing light, and “translucent” refers to 10% to the recording and reproducing light. It means having a transmittance of 90% or less!
  • a method of manufacturing such a multilayer Blu-ray disc is generally performed as follows. As an example, a method of manufacturing a two-layer Blu-ray disc will be described.
  • a molded resin substrate is prepared.
  • the molded resin substrate is molded by a resin molding method such as an injection molding method using a metal stamper.
  • a substrate material materials such as polycarbonate having excellent formability are often used.
  • the resin layer is laminated by using a step of forming a resin layer using a spin coating method as shown in Patent Document 1 or the like.
  • FIGS. 4 (a) to 4 (i) are diagrams showing a process of producing a two-layer disc including a process of producing a resin intermediate layer and a protective layer using a spin coating method.
  • a molded resin substrate 401 having a thickness of about 1.1 mm is formed by a resin molding method such as an injection molding method using a metal stamper.
  • the molded resin substrate 401 has a first information surface which is formed by a pit and a guide groove which also has an uneven shape force on one side.
  • a first information recording layer 402 is formed by forming a thin metal film or a thin film material capable of thermal recording on the first information surface described above by a sputtering method, an evaporation method, or the like. .
  • a radiation curable resin A 404 is concentrically applied on the desired radius to the first information recording layer 402 on the molded resin substrate 401 fixed to the rotary stage 403 (FIG. 4). (b)).
  • the radiation curable resin A404 is stretched by spin-rotating the rotary stage 403 to form the resin layer 406 (FIG. 4 (c)).
  • the thickness of the resin layer 406 is arbitrarily set to the viscosity of the radiation curable resin A 404, the number of rotations of spin rotation, the rotation time, and the ambient atmosphere under which the spin is rotated, such as temperature and humidity. By doing Can be controlled to a desired thickness.
  • the resin layer 411 is formed on the transfer stamper 407.
  • a transfer stamper 407 for forming a second information surface is formed by injection molding using a metal stamper.
  • the transfer stamper 407 is fixed on the rotary stage 408 by vacuum suction or the like.
  • a radiation curable resin B 409 is concentrically applied on the desired radius on the transfer stanno 407 fixed to the rotary stage 408 by a dispenser (FIG. 4 (d)).
  • the radiation curable resin B409 is stretched by spin-rotating the rotary stage 408 to form the resin layer 411 (FIG. 4 (e)).
  • the thickness of the resin layer 411 can be controlled to the desired thickness as described above.
  • the resin layer 411 is cured by irradiation with radiation from the radiation irradiator 410.
  • the resin layer 411 having the second information surface is transferred from the transfer stamper 407 onto the molded resin substrate 401.
  • the radiation curable resin C is stretched and controlled to a desired thickness by spin-rotating the rotary stage 413 in a state where the molded resin substrate 401 and the transfer stamper 407 are integrated.
  • a resin layer 414 is formed.
  • a second information recording layer 416 is formed on the second information surface by depositing a metal thin film, a thin film material capable of thermal recording, or the like by a sputtering method, an evaporation method, or the like.
  • a radiation curable resin D is applied by the same spin coating method, and a protective layer 417 is formed by radiation curing (FIG. 4 (i)).
  • a hard coat layer or the like may be formed on the protective layer to prevent defects on the surface of the protective layer due to adhesion of scratches or fingerprints.
  • the radiation curable resin A 404 used herein is made of a material having good adhesion to the first information recording layer 402 and the radiation curable resin C 414.
  • the radiation curable resin B411 has good releasability from the transfer stamper 407 and good adhesion to the radiation curable resin C414. Further, these radiation curable resins A, B, C and D use those substantially transparent to the wavelength of the recording / reproducing light.
  • the process of preparing the resin intermediate layer using three types of radiation curable resin was described here, the releasability from the radiation curable resin and the like were selected by the selection of the material of the transfer stopper. There is also a simpler method of reducing the types of radiation curable resins by control.
  • a method for forming a resin layer a method by screen printing or the like which is not the only method by the spin coating method shown here has been proposed.
  • the partial force of the formation of the radiation curable resin layer is the same as the screen printing method, except for the S spin coating method.
  • Patent Document 1 Japanese Patent Application Laid-Open No. 2002-092969
  • the resin intermediate layer is formed by spin coating
  • the resin supply may be performed only in a specific region.
  • the centrifugal force used for drawing differs depending on the radial position. Due to these factors, there is a problem that it is difficult to form a radiation curable resin layer with a uniform thickness.
  • the resin reaches the outer peripheral end face of the molded resin substrate, there is a problem that the resin layer is raised at the outermost peripheral part under the influence of the surface tension of the end face.
  • the spin coating method is susceptible to the unevenness of the surface to be coated. example For example, when manufacturing a multilayer information recording medium having an information recording layer of three or four layers, or when forming a protective layer, spin coating is performed on a previously formed resin intermediate layer. In this case, since the influence of the unevenness of the resin intermediate layer of a plurality of layers is accumulated, the thickness uniformity may be further deteriorated.
  • the step of forming a resin intermediate layer by screen printing it is easier to realize a uniform thickness as compared to spin coating.
  • the screen printing method the screen contacts the information recording layer, the information surface of the transfer stamper, etc. at the time of coating, and therefore, the information recording layer may generate scratches or dust directly or indirectly. And there are some issues. Further, in the case of the screen printing method, since the force resin is supplied only to the hole portion opened in the screen, there is a problem that air bubbles are easily collected in the portion where the resin is not supplied.
  • the inkjet method is a technology for ejecting minute droplets of a volume lpL to a degree of about InL, and a nozzle used for the ejection is called an inkjet nozzle.
  • the inkjet method There are various methods for discharging the resin 1S What is common is that the viscosity of the discharge liquid can only be discharged with a low viscosity because of the structure of discharging the small diameter ink jet nozzle force and the small droplet.
  • the viscosity of the discharge liquid is low means that the viscosity of the resin in the vicinity of the discharge outlet of the ink jet nozzle is lower than the viscosity of the discharge liquid in the liquid tank at normal temperature. That is, in the ink jet method, it is necessary to lower the viscosity of the resin around the discharge port.
  • a method may be used in which the vicinity of the discharge port of the ink jet nozzle is heated by a heater or the like to reduce the viscosity of the discharge liquid and discharge it.
  • the viscosity in the vicinity of the discharge port of the dischargeable discharge liquid is about several mPa's to several tens of mPa's.
  • An object of the present invention is to solve the above-mentioned problems in the ink jet method, and for example, a resin intermediate layer having a uniform thickness is produced even in a thickness exceeding 10 ⁇ m, and a multilayer having good signal characteristics is provided.
  • a method of manufacturing an information recording medium is provided.
  • the inkjet coating apparatus is an inkjet coating apparatus that applies a radiation curable resin to the application target while relatively moving either one of the application target or the inkjet head.
  • An ink jet unit having an ink jet nozzle for discharging droplets of a radiation curable resin, and a back side of the relative movement direction of the ink jet unit with respect to the application object is provided spaced apart by a predetermined distance, and is applied to the application object Said radiation curing
  • the ink jet head comprises a radiation irradiation unit for irradiating the resin with radiation, and a drive unit for moving the ink jet head relative to the object to be coated.
  • the drive unit may move the ink jet head relative to the application target at a constant speed.
  • the radiation curable resin applied to the object to be applied such as the ink jet nozzle can be irradiated with radiation sequentially after a predetermined time after application.
  • the drive unit may move the ink jet head relative to the application object in a linear direction.
  • the inkjet head is held between the inkjet nozzle unit and the radiation irradiation unit.
  • a radiation shielding plate may be further provided to prevent irradiation of the radiation irradiated from the radiation irradiation unit before the droplets of the radiation curable resin discharged from the ink jet nozzle are applied.
  • the ink jet head includes a first radiation irradiating unit and a second radiation irradiating unit disposed at a predetermined distance from the ink jet unit at the front and the rear of the relative moving direction with the ink jet unit interposed therebetween. And a radiation irradiation unit.
  • the driving unit causes the inkjet head to reciprocate in a linear direction relative to the application object, and to relatively move the inkjet head.
  • the inkjet head When reversing the relative movement direction, the inkjet head switches from the first radiation application unit to the second radiation application unit to apply radiation.
  • ink jet heater a plurality of ink jet nozzles are arranged in the ink jet nozzle unit in a direction perpendicular to the relative movement direction and over the width of the object to be coated, Well.
  • a method of manufacturing a multilayer information recording medium comprises a substrate, a plurality of information recording layers disposed on the substrate, and a resin intermediate layer disposed between the information recording layers.
  • a method for producing a multilayer information recording medium having a protective layer provided on the information recording layer comprising: an inkjet unit having an inkjet nozzle for discharging droplets of a radiation curable resin; An ink-jetting unit provided at the back of the relative movement direction of the ink-jet unit spaced apart by a predetermined distance and irradiating the radiation-curable resin applied to the application object with radiation
  • a radiation curable resin is dropped from the ink jet unit onto the object to be coated using an ink jet coating apparatus having a head and moved relative to the object to be coated. And then, by irradiating radiation to the radiation-curable ⁇ from sequentially radiation irradiation unit, the object to be coated radiation curable ⁇ the coating and irradiation steps of forming a ⁇ intermediate layer on the
  • the above configuration enables formation of a resin intermediate layer having a uniform thickness.
  • the object to be coated in the coating and irradiation steps may be a substrate provided with an information recording layer.
  • the method may further include a transfer step of forming an information surface on the surface of the radiation curable resin formed on the substrate by transfer.
  • the application target in the application and irradiation steps may be a transfer stamper.
  • a radiation curable resin is dropped onto the radially inner inner edge and the radially outer outer edge, and the radiation curable resin is then irradiated with radiation to have a predetermined coating thickness.
  • a radiation curable resin is applied to the area surrounded by the wall surface of the inner edge and the outer edge. After dripping, irradiating the radiation curable resin with radiation to form a resin intermediate layer;
  • the radiation curable resin is applied to the area surrounded by the inner edge and the wall of the outer edge, so that a resin intermediate layer having a uniform thickness is realized even if the resin has fluidity. it can.
  • the ink jet coating apparatus is moved relative to the object to be coated at a constant speed, and a predetermined time has elapsed since the radiation curable resin is applied. It may be irradiated later.
  • the irradiation dose of the radiation in the last step of the plurality of application and irradiation steps may be smaller than the irradiation dose in the previous application and irradiation steps. Furthermore, in the last step of the plurality of application and irradiation steps, only the radiation curable resin may be applied.
  • the outermost surface of the radiation curable resin has an uncured portion, so that good information transfer can be realized.
  • a plurality of types of resins may be used as the radiation curable resin. With this configuration, it is possible to form a resin intermediate layer in which a plurality of resins having different functions are laminated.
  • a multilayer information recording medium is manufactured using the method for manufacturing the multilayer information recording medium. Furthermore, this multi-layer information recording medium is characterized in that the end face of the resin intermediate layer exhibits a zigzag shape by the droplets from the ink jet nozzle. The end face has a zigzag shape by the ink jet method.
  • the inkjet nozzle unit has an inkjet nozzle unit having an inkjet nozzle force, and a radiation irradiating unit, wherein the radiation irradiating unit scans the object to be coated relatively.
  • FIG. 1 is a schematic view showing the configuration of an inkjet coating apparatus according to Embodiment 1 of the present invention.
  • FIG. 1 is a view showing an example of a coating and irradiation process using the ink jet coating apparatus. is there.
  • FIG. 2 is a cross-sectional view showing the configuration of a two-layer Blu-ray disc.
  • FIG. 3] (a) to (f) are diagrams showing steps of producing a metal stamper.
  • FIG. 4 (a) to (i) are diagrams showing a process of producing a two-layer disc including a process of producing a resin intermediate layer and a protective layer using a spin coating method.
  • FIG. 5 (a) and (b) are cross-sectional views showing a typical configuration example of the ink jet nozzle.
  • FIG. 6 is a cross-sectional view showing a structure of a multilayer information recording medium in accordance with Embodiment 1 of the present invention.
  • FIG. 7] (a) to (c) are diagrams showing configuration examples of the ink jet nozzle unit.
  • FIG. 8 is a view showing the configuration of an ink jet nozzle unit according to Embodiment 1 of the present invention.
  • FIG. 9 (a) and (b) are diagrams showing a plurality of application and irradiation steps in the first embodiment of the present invention.
  • FIG. 10 (a) to (d) are diagrams showing an example of a process of transferring an information surface to a resin intermediate layer according to Embodiment 1 of the present invention.
  • FIG. 11 (a) and (b) are diagrams showing the relationship between a molded resin substrate and an ink jet nozzle unit.
  • FIG. 12] (a) to (c) are diagrams showing an example of a coating and an irradiation process using the ink jet coating apparatus according to Embodiment 2 of the present invention.
  • FIG. 6 is a cross-sectional view showing a structure of a multilayer information recording medium according to Embodiment 1 of the present invention.
  • This multilayer information recording medium is a four-layer information recording medium which can be recorded and reproduced from one side.
  • This four-layer information recording medium is configured by laminating four information recording layers on a molded resin substrate 601 on which an information surface of a guide groove having a concavo-convex shape is transferred and formed on one side.
  • This multi-layer information recording medium comprises a first information recording layer 602, a first resin intermediate layer 603, a second information recording layer 604, and a second information recording layer formed in order on a molded resin substrate 601.
  • the third information recording layer 606 is disposed in contact with the first information surface formed on the molded resin substrate 601.
  • the first resin intermediate layer 603 is laminated so as to be in contact with the first information recording layer 602, and has a second information surface on one side of which also has a concavo-convex shape force.
  • the second information recording layer 604 is disposed in contact with the second information surface.
  • the second resin intermediate layer 605 is laminated to be in contact with the second information recording layer 604, and has a third information surface having a concavo-convex shape on one surface.
  • the third information recording layer 606 is disposed in contact with the third information surface.
  • the third resin intermediate layer 607 is laminated so as to be in contact with the third information recording layer 606, and has a fourth information surface on one surface of which is also a concavo-convex shape force.
  • the fourth information recording layer 608 is disposed in contact with the fourth information surface.
  • a protective layer 609 is provided in contact with the fourth information recording layer 608.
  • At least one resin intermediate layer of the first resin intermediate layer 603, the second resin intermediate layer 605, and the third resin intermediate layer 607 will be described later. It is characterized in that it is manufactured by applying a radiation curable resin and irradiating a radiation by an ink jet coating apparatus. For this reason, the end face of the resin intermediate layer has a zigzag shape depending on the size of droplets discharged from the ink jet nozzle.
  • the molded resin substrate 601 may be any one as long as it can support the information recording layer, resin intermediate layer, and protective layer laminated thereon. Note that, for example, a disc having an outer diameter of ⁇ 120 mm, a central hole diameter of 15 mm, and a thickness of about 1.0 to 1.1 mm so as to be geometrically compatible with an optical disc such as a CD, DVD, or Blu-ray disc. It is preferable to have a shape.
  • the molded resin substrate 601 is preferably formed of polycarbonate or acrylic resin.
  • the molded resin substrate 601 is formed with an information surface such as a guide groove formed on one surface by concavo-convex formation by resin molding by injection molding or the like using the metal stamper shown in FIG. 3 (f). . In the first embodiment, polycarbonate is used.
  • FIGS. 3 (a) to 3 (f) are schematic views showing steps of producing a stamper which is a metal mold for producing a molded resin substrate of an information recording medium.
  • a photosensitive material such as a photoresist is coated on a master disk 301 which can be a glass disk or a silicon wafer, etc. to form a photosensitive film 302.
  • the exposed portion 304 is removed with an alkaline developer or the like to obtain a recording master 306 having a concavo-convex pattern 305 formed of a photosensitive material on the master 301 (FIG. 3 (c)).
  • a conductive thin film 307 is formed on the surface of the recording master 306 by sputtering, evaporation or the like (FIG. 3 (d)).
  • a metal plate 308 is formed by metal plating or the like using the above-mentioned conductive thin film 307 as an electrode (FIG. 3 (e)).
  • the conductive film 307 and the metal plate 308 are peeled off at the interface between the photosensitive film 302 and the conductive thin film 307. Further, the photosensitive material remaining on the surface of the conductive film 307 is removed by a removing material or the like. Thereafter, the metal stamper 309, which is a metal mold for molding of a molded resin substrate, is manufactured by performing punching forming to inner and outer diameters matched to a molding machine (FIG. 3 (f)).
  • the first information recording layer 602 may have at least a characteristic of reflecting the reproduced light. For example, Al, Ag, Au, Si, SiO, TiO etc.
  • the reflective material is formed using a method such as sputtering or vapor deposition.
  • the information recording medium is a recordable medium, it is necessary to write the information by irradiating the recording light.
  • a layer having a recording material strength such as a phase change material such as GeSbTe or an organic dye such as phthalocyanine. May be included at least.
  • a layer such as a reflective layer or an interface layer may be included to improve the recording and reproducing characteristics.
  • the second information recording layer 604, the third information recording layer 606, and the fourth information recording layer 608 can be similarly formed.
  • recording and reproduction are performed by causing recording and reproduction light to enter the respective information recording layers on the side of the protective layer 609, recording and reproduction are sequentially performed from the first information recording layer to the fourth information recording layer. It is preferred to be configured to have high transmittance to the wavelength of light.
  • the first resin intermediate layer 603 is a resin substantially transparent to recording and reproduction light, for example, an ultraviolet curable resin containing acrylic as a main component!
  • an ultraviolet curable resin containing acrylic as a main component it is possible to use a radiation curable resin such as an epoxy type ultraviolet curable resin.
  • substantially transparent as used herein means having a transmittance of 90% or more with respect to the wavelength of recording / reproducing light, and a material having a transmittance of 95% or more is more preferable.
  • the transfer stamper 1004 uses a polyolefin material which is a material having good releasability from the radiation curable resin, and the thickness thereof is thinner than that of a molded resin substrate, for example, 0.6 mm. Are formed. The purpose of this is to make the transfer stamper warp and peel using the difference in rigidity due to the difference in thickness of the molded resin substrate having a thickness of about 1.1 mm when peeling the transfer stamper from the substrate. Because of The polyolefin material is a material capable of easily producing an information surface such as pits and guide grooves formed on one side by a method such as injection molding using a conventional metal stamper and the like like the molded resin substrate.
  • the polyolefin material has a high transmittance to radiation such as ultraviolet light, radiation irradiation through the transfer stamper can cure the radiation curable resin efficiently. Furthermore, the polyolefin material can be easily peeled off at the interface with the radiation curable resin after the adhesive is hardened when the adhesion with the cured radiation curable resin is reduced.
  • a center hole for eccentricity is provided via a molded resin substrate 1001 and a center boss 1005.
  • FIGS. 10 (a) to 10 (d) are diagrams showing an example of the process of transferring the information surface to the resin interlayer according to the first embodiment of the present invention.
  • Vacuum chamber The inside of the chamber 1007 is evacuated by a vacuum pump 1008 such as a rotary pump or a turbo molecular pump to create a vacuum atmosphere.
  • a vacuum pump 1008 such as a rotary pump or a turbo molecular pump to create a vacuum atmosphere.
  • the transfer stamper 1004 a different material such as metal may be used, for example.
  • an intermediate resin layer consisting of two or more resin layers may be formed by using two or more types of radiation curable resins.
  • radiation may be irradiated from the side of the molded resin substrate.
  • the second resin intermediate layer 605 and the third resin intermediate layer 607 can also be produced by the same method as the first resin intermediate layer 603.
  • the protective layer 609 is preferably substantially transparent to the recording and reproducing light.
  • UV curable resins mainly composed of acrylics, or radiation curable resins such as UV curable epoxy resins can be used.
  • substantially transparent as used herein means having a transmittance of 90% or more to the wavelength of recording / reproducing light, and a material having a transmittance of 95% or more is more preferable.
  • the protective layer 609 As a method of forming the protective layer 609, various methods such as a spin coating method, a screen printing method, a gravure printing method, and an ink jet method can be considered. As a method for forming the protective layer 609, it is preferable if the same method as the above-mentioned process for producing the resin intermediate layer can be used. For example, when the resin intermediate layer is applied by the ink jet method, it is most preferable to use the ink jet method also for the formation of the protective layer. Further, the method of forming the protective layer is not limited to the method of applying a radiation curable resin, and for example, a polycarbonate resin, a sheet-like material that also has a force such as an acrylic resin, may be bonded via an adhesive. May form
  • the multilayer information recording medium uses a blue-violet laser with a laser beam of 405 nm, an objective lens with an NA of 0.85, and a protective layer 609 side information.
  • the beam is narrowed to the recording layer to perform recording and reproduction.
  • the thickness from the surface of the protective layer 609 to the first information recording layer 602 is set to about 0.1 mm.
  • the thickness of the protective layer 609 is preferably set to about 40 m or more in order to reduce the influence on the recording and reproduction characteristics of each information recording layer due to dust or the like attached to the surface of the protective layer. . In addition, it is more preferable to set to 50 m or more.
  • the thicknesses of the first resin interlayer, the second resin interlayer, and the third resin interlayer may be different from each other in order to reduce the influence of crosstalk and interference from other layers. It is preferable to set.
  • each thickness was designed to be about 15 ⁇ m, about 20 m, and about 10 m.
  • the thickness of the protective layer was set to about 55 m.
  • the design value of the thickness of each resin intermediate layer is an example, and the effect of the present invention remains the same even with other thickness design values.
  • the structure of the multilayer information recording medium according to the first embodiment of the present invention and the outline of the method for manufacturing the multilayer information recording medium are briefly described. It is characterized in the method of forming the protective layer. Therefore, the scope of the present invention is not limited by the other configurations or the manufacturing method thereof.
  • a method of manufacturing a multilayer information recording medium using the ink jet coating apparatus according to the first embodiment of the present invention will be described.
  • the method for producing the resin intermediate layer constituting the multilayer information recording medium will be described in detail.
  • FIG. 1 is a schematic view showing a configuration of an ink jet coating apparatus according to Embodiment 1 of the present invention.
  • FIG. 1 is a view showing an example of a coating and irradiation process including coating of a radiation curable resin using the inkjet coating device and curing by radiation irradiation. A resin intermediate layer is formed by this application and irradiation process.
  • the inkjet coating apparatus includes an inkjet head 107 and a drive unit (not shown) for moving the inkjet head 107 relative to the application target in the direction of the arrow.
  • the ink jet nozzle unit 104 and the radiation irradiating means 106 are fixed to the ink jet head 107 with the radiation shielding plate 105 interposed therebetween.
  • the inkjet nozzle unit 104 is provided with at least one inkjet nozzle.
  • this inkjet nozzle one used for a printing machine for printing or drawing may be used.
  • the ink jet nozzle can discharge minute droplets of ink mainly composed of pigment, dye and the like.
  • development is in progress to generate droplets as small as possible, for example, droplets of about several pL, and drop the droplets with high accuracy to realize printing with higher resolution. 10 to 2 in the present invention while
  • ink jet nozzles for printing machines generally available generally have a volume of microdroplets of about 5 to 50 pL, a corresponding resin viscosity capable of discharging about 5 to 50 mPa's around the discharge part, and an operating frequency of 1 kHz. There is about 20 kHz.
  • FIGS. 5 (a) and 5 (b) are cross-sectional views of a typical configuration example of the ink jet nozzle.
  • the supply path of the discharged liquid to be discharged, the liquid tank and the like are omitted.
  • FIG. 5 (a) shows a type in which the ejection liquid 501 is ejected and ejected by a vibration element 502 such as a piezoelectric element, and is called a piezo inkjet nozzle.
  • FIG. 5 (b) is a type in which the discharge liquid is instantaneously boiled using the heater 503 and discharge is performed using the volumetric expansion of the discharge liquid 504 in the vicinity of the heater as a power source, and is called a thermal method.
  • an inkjet head using one inkjet nozzle has been described here, the present invention is not limited to this, and a plurality of inkjet nozzles may be provided.
  • a plurality of inkjet nozzles may be arranged in a line in the direction perpendicular to the scanning direction of the inkjet head, and an inkjet head array may be provided.
  • FIG. 7 (b) there is a method of arranging a plurality of lines in the scanning direction, or a method of arranging a plurality of lines while slightly shifting the positions of the nozzles as shown in FIG. 7 (c).
  • a direction perpendicular to the scanning direction can be applied so that a length of 120 mm, which is the diameter of the molded resin substrate 101 to be applied, can be applied at one time. At least one row, with a width of 120 mm or more A configuration that arranges linearly is desirable.
  • an ink jet nozzle with an ejection force force OpL of 1 droplet and a driving frequency of 7 kHz is used, as shown in FIG. 8, in the scanning direction at 70 / zm pitch.
  • an ink jet nozzle, Nore unit 802 in which 1,800 ink jet nozzles 801 were arranged in a straight line in the vertical direction, was used. If the ink jet nozzle is a resin having a viscosity of about 5 to 50 mPa's, it is possible to stably eject 40 pL of one drop.
  • FIG. 11 (a) which uses an ink jet nozzle unit as shown in FIG.
  • the ink jet head can be moved in a direction perpendicular to the scanning direction, and the entire surface can be coated by scanning the substrate several times.
  • a mechanism for moving the inkjet head in the direction perpendicular to the scanning direction is required.
  • the length in the direction perpendicular to the scanning direction of the molded resin substrate to be coated ie, the ink jet nozzle having a length longer than the diameter of the substrate. It is preferable to use Thus, the resin can be applied to the entire surface of the substrate by one scan.
  • the radiation irradiating means 106 is composed of a radiation source and an optical path for guiding the radiation generated from the radiation source to the side of the molded resin substrate 101 which is an object to be coated.
  • an ultraviolet lamp is used as a radiation source.
  • various lamps such as a metal halide lamp, a high pressure mercury lamp and a xenon lamp can be used as the ultraviolet lamp.
  • a xenon lamp is used.
  • it is necessary to select the wavelength of radiation to be applied, etc. according to the radiation curable resin used for coating, and the types of radiation source and lamp to be used are not limited to the above examples.
  • the radiation irradiating means 106 is fixed at the back of the scanning direction of the ink jet nozzle unit together with the ink jet nozzle unit 104 which scans the molded resin substrate 101 as the object to be coated. It is done. Radiation is sequentially applied to the applied radiation curable resin layer using the radiation irradiating means 106.
  • the radiation shielding plate 105 is configured so that the radiation irradiated by the radiation irradiating means 106 is an ink It prevents leakage to the nozzle 104 side. That is, the radiation shielding plate 105 can prevent irradiation of radiation emitted from the radiation irradiation unit before the droplets of the radiation curable resin discharged from the ink jet nozzle are applied.
  • the radiation curable resin 109 is applied by the ink jet nozzle set 104 constituting the ink jet head 107.
  • radiation is sequentially applied to the applied radiation curable resin 109 by radiation irradiating means 106 disposed at a predetermined interval behind the ink jet nozzle unit 104.
  • the region 110 irradiated with radiation is cured to suppress the flow of the resin.
  • the region 110 irradiated with the radiation may be completely cured, but if it is cured to a state equivalent thereto without being completely cured, the flow of the resin can be suppressed.
  • the state according to complete curing as referred to herein means a gel-like state or a state having a viscosity of 100 OO mPa's or more.
  • the drive unit moves the inkjet head 107 relative to the application target. Therefore, at least one of the application object and the inkjet head 107 may be moved by the drive unit.
  • the ink jet head 107 may be scanned linearly with respect to the molded resin substrate 101 which is the application object by the drive unit.
  • the inkjet head 107 may be scanned at a constant speed with respect to the molded resin substrate 101 by the drive unit.
  • radiation can be irradiated after a predetermined time has elapsed after the application of the radiation curable resin. Since radiation is applied after a predetermined time after application, the flowable state of the radiation curable resin can be cured in substantially the same state. For example, it can be hardened after so-called leveling, in which droplets of the radiation curable resin become overlapped with adjacent droplets. This makes it possible to improve the uniformity of the resin intermediate layer thickness.
  • the fixing method is not limited to the vacuum adsorption method, and other fixing methods may be used.
  • an inkjet head 107 having an inkjet nozzle unit 104 and radiation irradiating means 106 is disposed above the molded resin substrate 101.
  • the inkjet nozzle unit 104 is composed of at least one or more inkjet nozzles.
  • a driving unit (not shown) for moving the ink jet head 107 relative to the stage 103 to which the molded resin substrate 101 is fixed is provided.
  • the inkjet head 107 and the drive unit constitute an inkjet coating apparatus.
  • stage 103 is fixed and the inkjet head 107 is moved in parallel to perform coating is described here, the present invention is not limited thereto, and the stage 103 and the inkjet head 107 may be moved relative to each other. Conversely, the stage 103 may be moved in parallel or both may be moved.
  • radiation curable resin can be applied and radiation can be irradiated.
  • this inkjet head 107 application and radiation of three types of radiation curable resins with different viscosities were performed.
  • the scanning speed for the molded resin substrate of the ink jet head is fixed at 0.5 mZs, and the distance between the ink jet nozzle unit and the radiation irradiating means is 20 mn!
  • the application was performed by setting to 150 mm.
  • the radiation was irradiated with ultraviolet light at a setting of about 200 miZcm 2 .
  • Table 1 The results are shown in Table 1 below.
  • the resin does not cure completely at the above-mentioned irradiation intensity of radiation. However, the flow of resin itself can be suppressed to a certain extent.
  • the radiation curable resin is applied from the inkjet nozzle unit of the inkjet head, and the time until the radiation curable resin applied is sequentially irradiated with radiation from the radiation irradiating means of the inkjet head is applied. Calculated. The "time between application and irradiation” was calculated as "the distance between the nozzle and the radiation irradiating means" divided by the "scanning speed".
  • This inkjet coating apparatus is characterized in that the inkjet nozzle unit and the radiation irradiating means are disposed apart from each other at a predetermined interval in the inkjet head. That is, after the radiation curable resin is applied, it can be cured by irradiation with radiation sequentially. In this case, the droplets of the radiation curable resin that has been applied flow and overlap with the adjacent droplets, and after so-called leveling occurs, the droplets further flow and spread. After that, the thickness gradually decreases. In this inkjet coating apparatus, after coating, after the droplets are leveled, radiation is sequentially applied for curing. For this reason, the time from the application of the radiation curable resin to the irradiation of the radiation becomes important.
  • the lower end of the ink jet nozzle and the surface of the molded resin substrate to be coated are The working distance WD (m) and the discharge speed of radiation curable resin V (m / s).
  • the working distance WD (m) is approximately
  • the lower limit value of "time to irradiation after application” can be estimated to be approximately 0. Olsec.
  • the upper limit value of "time to application and irradiation” it can be seen that, according to Table 1, it is acceptable up to about 0.24 sec. Therefore, the upper limit value of "time to irradiation after application” can be estimated to be 0.25 sec from the result of the example.
  • the "time until application after application” is in the range of 0.1 sec to 0.25 sec. preferable.
  • the thickness of the resin intermediate layer in Embodiment 1 of the present invention should be in the range of 10 m to 20 m. There is no need to apply so as to make the coating thickness thicker. Therefore, when the distance between the ink jet nozzle and the radiation irradiating means is set to 50 mm using resin B having a resin viscosity of 20 mPa's, the scanning speed of the ink jet head with respect to the molded resin substrate is changed. The results are shown in Table 2 below. Table 2 shows the change in coating thickness, thickness variation, swelling of resin, and time to irradiation after coating.
  • the dropped microdroplets are applied onto the molded resin substrate in an overlapping manner.
  • the total amount of the dropped resin is inversely proportional to the scanning speed. From the results in Table 2, it was also confirmed that the coating thickness increased in inverse proportion to the scanning speed. In addition, I was not able to see the entrapment of air bubbles in particular.
  • the desired resin middle layer thickness can be obtained by finely adjusting this scanning speed. Can be realized.
  • the transfer process of the information surface of the transfer stamper is continued after the application of the radiation curable resin by the ink jet coating apparatus, the radiation dose at the time of application of the radiation curable resin is completely determined. It is necessary to use a smaller dose than the curing dose.
  • the irradiance of the radiation irradiating means was about 200 mj Zcm 2 .
  • FIGS. 9 (a) and 9 (b) are schematic views showing the configuration of an ink jet head having radiation irradiating means on the front side and the rear side of the relative movement direction of the ink jet head with respect to the object to be coated.
  • the ink jet nozzle unit may have the same configuration as that shown in FIG.
  • a thickness of 10 m to 20 m can be realized by performing multiple coats.
  • this inkjet head emits radiation to each of the front and rear sides with respect to the scanning direction of the inkjet nozzle seat 904 and the inkjet nozzle unit.
  • Irradiation means 906 is provided.
  • the route for guiding the radiation emitted from the radiation lamp 905, which is a light source, to the side of the molded resin substrate 901 is branched into two, and arranged in front and back with respect to the scanning direction of the ink jet nozzle unit.
  • the shutters 907 and 908 are provided at the two injection ports of the radiation irradiating means 906 respectively.
  • the shutter 907 of the radiation irradiating means on the front side in the direction of movement of the ink jet nozzle unit is closed, and the shutter 908 on the rear side is opened. Only the radiation irradiating means on the back side with respect to the scanning direction of the inkjet Keep it.
  • the ink jet head scans the molded resin substrate in the opposite direction to the above (Fig. 9 (b)).
  • the radiation irradiating means closes the shutter 908 on the front side with respect to the scanning direction and opens the shirt 907 on the rear side to make only the radiation irradiating means on the rear side with respect to the scanning direction of the ink jet nozzle effective. deep. By repeating this operation, it is possible to coat several times.
  • Table 3 shows the results of coating thickness when resin B having a resin viscosity of 20 mPa's is used and the distance between the ink jet nozzle unit and the radiation irradiating means disposed before and after it is set to 50 mm.
  • the experiment was carried out with a radiation dose of 200 mj Zcm 2 constant for all scans in this case, but considering the groove transfer process after application of the resin layer, it is possible to repeat this process several times.
  • the radiation dose in at least the final coating and irradiation steps may be adjusted to ensure that the radiation curable resin does not completely cure.
  • the radiation is set as lOOOiuJ / m 2 and the radiation hardening is almost completely performed.
  • the curable resin is allowed to cure.
  • the irradiation amount of Omj / cm 2 that is, radiation may not be applied. In this case, groove transfer can be facilitated because the outermost surface of the radiation curable resin remains uncured. Also in this case, the same effect as the method described above can be obtained.
  • the thickness was increased in proportion to the number of times of coating.
  • the radiation amount may not be completely cured but may be dropped to the irradiation amount. It is preferable to set the state in which the film is not completely cured as described above, since the groove transferability after that becomes good. Also, application of resin F The same effect can be obtained by setting the radiation dose to 0 mi / C m 2 , that is, without radiation, in the radiation process.
  • the present invention is not limited to this, and it may be used for the process for producing the second resin intermediate layer and the third resin intermediate layer. Good. Also in this case, the effect of the present invention is effective, and has an effect in the preparation steps of all the resin intermediate layers.
  • the process for producing the resin intermediate layer in the method for producing a multilayer information recording medium according to the second embodiment of the present invention will be described with reference to FIGS. 12 (a) to 12 (c).
  • the method of manufacturing the multilayer information recording medium includes the steps of manufacturing the resin intermediate layer,
  • the remaining steps other than the application of the resin intermediate layer and the irradiation step are substantially the same as the steps described in the first embodiment, and therefore the description thereof is omitted here. Further, the effect of the present invention is due to the process of producing the resin intermediate layer, and the other processes do not narrow the effects of the present invention regardless of the process.
  • FIGS. 12 (a) to 12 (c) show a method for producing a resin intermediate layer according to Embodiment 2 of the present invention.
  • the configuration of the ink jet head was the same as that shown in FIGS. 9 (a) and 9 (b) of the first embodiment.
  • a radioactive curable resin is discharged to a region surrounded by the wall surface 1202 of the outer peripheral portion and the wall surface 1203 of the inner peripheral portion, and a resin intermediate layer having a uniform thickness corresponding to the height of the wall surface is formed. it can.
  • Table 5 shows the thickness measurement results of the resin intermediate layer formed by this method.
  • the resin was applied twice by scanning at a scanning speed of 0.5 mZs using a resin having a viscosity of 20 mPa's.
  • the width of the wall is about 200 ⁇ m and the thickness is about 15 m.
  • the irradiation of radiation was performed in lOOOmiZcm 2.
  • the resin was applied to the entire application area at a third scan speed of 0.3 mZs. No radiation was irradiated in the third resin application.
  • the experiment was conducted only with a resin having a viscosity of 20 mPa's.
  • the coating thickness can be controlled within the viscosity range which can be discharged by the ink jet nozzle.
  • the present invention is also effective in the process of forming other resin intermediate layers. It can also be used in the step of forming a protective layer.
  • the ink jet coating apparatus of the present invention is useful as a method of forming multilayer media such as multilayer information recording media.
  • it can be used in the process of laminating resin layers such as Blu-ray discs.

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Abstract

An inkjet application device for applying a radiation curing resin to a target application object while moving either the object or an inkjet head relative to the other. The inkjet application device has the inkjet head and a drive section for moving the inkjet head relative to the target application object. The inkjet head has an inkjet unit having an inkjet nozzle for discharging liquid drops of the radiation curing resin, and also has a radiation application unit provided at a position spaced from and rearward of the inkjet unit relative to the direction of that movement of the inkjet unit that is provided relative to the target application object. The radiation application unit applies radiation to the liquid drops of the radiation curing resin applied to the target application object.

Description

明 細 書  Specification
インクジェット塗布装置、多層情報記録媒体およびその製造方法 技術分野  Ink jet coating apparatus, multilayer information recording medium, and method of manufacturing the same
[0001] 本発明は、再生または記録再生を目的とした情報記録媒体及びその製造方法に 関する。特に、 2層以上の情報記録層を有する多層情報記録媒体及びその製造方 法に関する。  The present invention relates to an information recording medium intended for reproduction or recording / reproduction, and a method of manufacturing the same. In particular, the present invention relates to a multilayer information recording medium having an information recording layer of two or more layers and a method of manufacturing the same.
背景技術  Background art
[0002] 近年、光学的な情報記録方式の研究が進められ、産業用や民生用途に広く使用さ れるようになった。特に CDや DVDなどの高密度に情報を記録することができる光情 報記録媒体が普及している。このような光情報記録媒体は、情報信号を表すピットや 、記録再生光をトラッキングするための案内溝などの凹凸形状信号が形成された透 明基板上に、金属薄膜や、熱記録が可能な薄膜材料などが積層され、さらに保護層 が積層されている。保護層は、金属薄膜や薄膜材料などを大気中の水分など力ゝら保 護する榭脂層や透明基板等によって構成されている。情報の再生はレーザ光を前記 金属薄膜や薄膜材料に照射し、反射光の光量変化を検出することなどによりなされ る。  In recent years, research on optical information recording methods has been advanced, and has become widely used in industrial and consumer applications. In particular, optical information recording media capable of recording information at high density such as CDs and DVDs are in widespread use. Such an optical information recording medium is capable of recording metal thin films and heat on a transparent substrate on which pits representing information signals and concave and convex shape signals such as guide grooves for tracking recording / reproducing light are formed. Thin film materials and the like are laminated, and a protective layer is further laminated. The protective layer is composed of a resin layer, a transparent substrate or the like which protects the metal thin film, thin film material and the like by force and moisture in the air. Information is reproduced by irradiating a laser beam to the metal thin film or thin film material and detecting a change in the amount of reflected light.
[0003] CDの場合、片面に情報信号を示す凹凸形状を有する厚み約 1. 1mmの榭脂基板 上に金属薄膜あるいは薄膜材料などを積層し、その後、紫外線硬化榭脂などをコー ティングして保護層を形成することにより作製される。なお、情報信号の再生は、保護 層側ではなく基板側からレーザ光を入射することにより行われる。  [0003] In the case of a CD, a metal thin film or thin film material is laminated on a resin substrate having a thickness of about 1.1 mm having an uneven shape indicating an information signal on one side, and then coated with an ultraviolet curing resin or the like. It is produced by forming a protective layer. Note that the reproduction of the information signal is performed by entering the laser light from the substrate side, not the protective layer side.
[0004] また、 DVDの場合、厚み約 0. 6mmの榭脂基板上の凹凸面に金属薄膜あるいは 薄膜材料などを積層した後、別に準備された厚み約 0. 6mmの榭脂基板を紫外線 硬化榭脂などにより貼り合わせることによって作製される。光情報記録媒体では大容 量ィ匕に対する要望が高まってきており、 DVD等では情報層の多層化が図られており 、凹凸形状信号と金属薄膜や薄膜材料などから形成される信号層が厚み数十 m の中間層を挟んで構成されて 、る 2層構造の光情報記録媒体などが提案されて 、る [0005] 近年、デジタルハイビジョン放送の普及に伴い、 DVDよりもさらに高密度でかつ大 容量の次世代光情報記録媒体が求められている。例えば、厚み 1. 1mmの基板上 の凹凸面に金属薄膜などを積層し、さらに厚み約 0. 1mmの保護層を形成した Blu —rayディスクなどの大容量記録媒体が提案されている。 Blu— rayディスクでは、 DV Dに比べ、凹凸形状で形成される情報層のトラックピッチも狭ぐまた、ピットの大きさ も小さくなつて 、る。このため情報の記録再生を行うレーザのスポットを情報層上で小 さく絞る必要がある。 Blu— rayディスクでは、レーザ光の波長を 405nmという短波長 の青紫レーザを使用すると共に、レーザ光を絞り込む対物レンズとして開口数 (NA) が 0. 85のものを使用した光学ヘッドを用いている。上記光学ヘッドによって、レーザ 光のスポットを情報層上で小さく絞り込んでいる。しかし、スポットが小さくなるとデイス クの傾きによる影響を大きく受けやすくなり、ディスクが少しでも傾くとビームスポットに 収差が発生する。ビームスポットに収差が生じると、絞りこんだビームに歪みが生じて 記録再生できなくなるといった課題が生じる。そのため Blu— rayディスクでは、デイス クのレーザ入射側の保護層の厚さを 0. 1mm程度と薄くすることによってその欠点を ネ甫つて ヽる。 In the case of a DVD, after laminating a metal thin film or thin film material on an uneven surface on a resin substrate having a thickness of about 0.6 mm, UV curing of the separately prepared resin substrate having a thickness of about 0.6 mm is performed. It is manufactured by pasting together with resin etc. In the case of optical information recording media, the demand for large capacity is increasing, and in DVD and the like, multi-layered information layers are achieved, and a signal layer formed of a concavo-convex shape signal and a metal thin film or thin film material is thick. An optical information recording medium with a two-layer structure is proposed, which is composed of an intermediate layer of several tens of meters. In recent years, with the spread of digital high-definition broadcasts, next-generation optical information recording media having higher density and larger capacity than DVDs are required. For example, a large-capacity recording medium such as a Blu-ray disc has been proposed, in which a metal thin film or the like is laminated on an uneven surface on a substrate having a thickness of 1.1 mm, and a protective layer having a thickness of about 0.1 mm is further formed. In the case of Blu-ray Disc, the track pitch of the information layer formed in a concavo-convex shape is narrower than that of the DVD, and the pit size is smaller. Therefore, it is necessary to narrow the spot of the laser for recording and reproducing information on the information layer. The Blu-ray Disc uses a blue-violet laser with a short wavelength of 405 nm as the laser light, and uses an optical head with a 0.85 numerical aperture (NA) as an objective lens to narrow the laser light. . The optical head narrows down the spot of the laser light on the information layer. However, as the spot becomes smaller, it becomes more susceptible to the tilt of the disk, and even a slight tilt of the disk causes aberrations in the beam spot. When an aberration occurs in the beam spot, a problem occurs that distortion occurs in the narrowed beam and recording and reproduction become impossible. Therefore, with Blu-ray discs, the defect is overcome by making the thickness of the protective layer on the laser incident side of the disc as thin as 0.1 mm.
[0006] ところで、この Blu— rayディスクのような大容量の次世代光情報記録媒体において も、 DVDと同様に情報層の多層化による記憶容量の大容量ィ匕が提案されて 、る。  [0006] Incidentally, also in the next-generation optical information recording medium of large capacity such as this Blu-ray disc, a large capacity capacity of storage capacity is proposed by multi-layering of the information layer as well as DVD.
[0007] 図 2は、情報記録層を 2層有する 2層型 Blu— rayディスクの断面図である。  FIG. 2 is a cross-sectional view of a two-layered Blu-ray disc having two information recording layers.
この 2層型 Blu— rayディスクは、片面に第 1の情報面 202が凹凸形状により形成さ れた成形榭脂基板 201上に、金属薄膜ある!/ヽは熱記録が可能な薄膜材料を積層し 、第 1の情報記録層 203が形成されている。第 1の情報記録層 203上に記録再生光 に対して略透明な榭脂中間層 204が形成され、その榭脂中間層 204上には凹凸形 状よりなる第 2の情報面 205が形成されている。第 2の情報面 205上に、記録再生光 に対して半透過性を有する金属薄膜あるいは熱記録が可能な薄膜材料を積層して 第 2の情報記録層 206が形成されている。そして、第 2の情報記録層 206を覆うように 記録再生光に対して略透明な榭脂がコーティングされた保護層 207を有する。この 2 層 Blu— rayディスクは、保護層 207側からレーザ光を入射し、第 1の情報記録層ある いは第 2の情報記録層のうち、記録再生を行う情報記録層に焦点を合わせることによ つて、信号の記録および再生などを行うことができる。なお、成形榭脂基板 201の厚 みは約 1. 1mmであり、榭脂中間層の厚みは約 25 mに設定され、保護層 207の厚 みは約 75 μ mに設定されている。 This two-layer Blu-ray disc has a metal thin film on the molded resin substrate 201 with the first information surface 202 formed on its one side by a concavo-convex shape, and a thin film material that can be thermally recorded. The first information recording layer 203 is formed. A resin intermediate layer 204 substantially transparent to recording and reproducing light is formed on the first information recording layer 203, and a second information surface 205 having a concavo-convex shape is formed on the resin intermediate layer 204. ing. A second information recording layer 206 is formed on the second information surface 205 by laminating a metal thin film having transmissivity for recording and reproducing light or a thin film material capable of thermal recording. A protective layer 207 coated with a resin substantially transparent to recording and reproduction light is provided to cover the second information recording layer 206. In this two-layer Blu-ray disc, a laser beam is made incident from the protective layer 207 side to focus on the information recording layer to be recorded or reproduced among the first information recording layer or the second information recording layer. By Signal recording and reproduction can be performed. The thickness of the molded resin substrate 201 is about 1.1 mm, the thickness of the resin intermediate layer is set to about 25 m, and the thickness of the protective layer 207 is set to about 75 μm.
[0008] なお、ここでいう略透明とは、記録再生光に対して約 90%以上の透過率を有するこ とを意味しており、また、半透明とは記録再生光に対して 10%以上 90%以下の透過 率を有することを意味して!/、る。 The term “substantially transparent” as used herein means having a transmittance of about 90% or more to the recording and reproducing light, and “translucent” refers to 10% to the recording and reproducing light. It means having a transmittance of 90% or less!
[0009] このような多層型の Blu— rayディスクの製造方法は一般的には次のようにしてなさ れる。一例として 2層型 Blu— rayディスクの製造方法にっ 、て説明する。 [0009] A method of manufacturing such a multilayer Blu-ray disc is generally performed as follows. As an example, a method of manufacturing a two-layer Blu-ray disc will be described.
[0010] まず、成形榭脂基板を用意する。成形榭脂基板は、金属スタンパを用いて射出成 形法等の榭脂成形方法により、成形される。基板材料としては成形性に優れたポリ力 ーボネートなどの材料が用いられることが多い。その後、特許文献 1に示すようなスピ ンコート法などを用いた榭脂層の形成工程を用いて榭脂層の積層を行う。 First, a molded resin substrate is prepared. The molded resin substrate is molded by a resin molding method such as an injection molding method using a metal stamper. As a substrate material, materials such as polycarbonate having excellent formability are often used. After that, the resin layer is laminated by using a step of forming a resin layer using a spin coating method as shown in Patent Document 1 or the like.
[0011] 図 4 (a)〜(i)は、スピンコート法を用いた榭脂中間層、および保護層の作製工程を 含む 2層ディスクの作製工程を示す図である。 FIGS. 4 (a) to 4 (i) are diagrams showing a process of producing a two-layer disc including a process of producing a resin intermediate layer and a protective layer using a spin coating method.
(a)厚み約 1. 1mmの成形榭脂基板 401を、金属スタンパを用いた射出成形法など の榭脂成形法により成形榭脂基板 401を形成する。この成形榭脂基板 401は、片面 に凹凸形状力もなるピットや案内溝により形成された第 1の情報面を有する。  (a) A molded resin substrate 401 having a thickness of about 1.1 mm is formed by a resin molding method such as an injection molding method using a metal stamper. The molded resin substrate 401 has a first information surface which is formed by a pit and a guide groove which also has an uneven shape force on one side.
(b)次 、で、上記の第 1の情報面上に金属薄膜や熱記録が可能な薄膜材料などをス ノッタリング法ゃ蒸着法などによって形成して、第 1の情報記録層 402を形成する。 (b) Next, a first information recording layer 402 is formed by forming a thin metal film or a thin film material capable of thermal recording on the first information surface described above by a sputtering method, an evaporation method, or the like. .
(c)この第 1の情報記録層が形成された成形榭脂基板 401を回転ステージ 403上に 真空吸着などの方法により固定する(図 4 (a) )。 (c) The molded resin substrate 401 on which the first information recording layer is formed is fixed on the rotary stage 403 by a method such as vacuum adsorption (FIG. 4 (a)).
(d)回転ステージ 403に固定された成形榭脂基板 401上の第 1の情報記録層 402に は、ディスペンサーによって放射線硬化性榭脂 A404が所望の半径上に同心円状に 塗布される(図 4 (b) )。  (d) A radiation curable resin A 404 is concentrically applied on the desired radius to the first information recording layer 402 on the molded resin substrate 401 fixed to the rotary stage 403 (FIG. 4). (b)).
(e)その後、回転ステージ 403をスピン回転させることにより放射線硬化性榭脂 A40 4の延伸を行い、榭脂層 406を形成する(図 4 (c) )。このとき榭脂層 406の厚みは、 放射線硬化性榭脂 A404の粘度やスピン回転の回転数、および回転時間、スピン回 転をさせている周囲の雰囲気、たとえば、温度や湿度などを任意に設定することによ り、所望の厚みに制御することができる。 (e) Thereafter, the radiation curable resin A404 is stretched by spin-rotating the rotary stage 403 to form the resin layer 406 (FIG. 4 (c)). At this time, the thickness of the resin layer 406 is arbitrarily set to the viscosity of the radiation curable resin A 404, the number of rotations of spin rotation, the rotation time, and the ambient atmosphere under which the spin is rotated, such as temperature and humidity. By doing Can be controlled to a desired thickness.
(f)スピン回転停止後、榭脂層 406は、放射線照射機 405の放射線照射によって硬 化される。  (f) After stopping the spin rotation, the resin layer 406 is hardened by the irradiation of the irradiation device 405.
[0012] 次に、転写スタンパ 407上に榭脂層 411を形成する。  Next, the resin layer 411 is formed on the transfer stamper 407.
(a)金属スタンパを用いて射出成形法によって、第 2の情報面を形成するための転写 スタンパ 407を形成する。  (a) A transfer stamper 407 for forming a second information surface is formed by injection molding using a metal stamper.
(b)この転写スタンパ 407を回転ステージ 408上に真空吸着等によって固定する。 (b) The transfer stamper 407 is fixed on the rotary stage 408 by vacuum suction or the like.
(c)回転ステージ 408に固定された転写スタンノ 407上にディスペンサーによって放 射線硬化性榭脂 B409を所望の半径上に同心円状に塗布する(図 4 (d) )。 (c) A radiation curable resin B 409 is concentrically applied on the desired radius on the transfer stanno 407 fixed to the rotary stage 408 by a dispenser (FIG. 4 (d)).
(d)次 、で、回転ステージ 408をスピン回転させることにより放射線硬化性榭脂 B409 の延伸を行い、榭脂層 411を形成する(図 4 (e) )。榭脂層 411の厚みは上述のように 所望の厚みに制御できる。  (d) Next, the radiation curable resin B409 is stretched by spin-rotating the rotary stage 408 to form the resin layer 411 (FIG. 4 (e)). The thickness of the resin layer 411 can be controlled to the desired thickness as described above.
(e)スピン回転停止後、放射線照射機 410の放射線照射によって榭脂層 411を硬化 する。  (e) After stopping the spin rotation, the resin layer 411 is cured by irradiation with radiation from the radiation irradiator 410.
[0013] 次に、転写スタンパ 407から成形榭脂基板 401上へ第 2の情報面を有する榭脂層 411を転写する。  Next, the resin layer 411 having the second information surface is transferred from the transfer stamper 407 onto the molded resin substrate 401.
(a)それぞれ榭脂層 406、 411が形成された成形榭脂基板 401と転写スタンパ 407と を、回転ステージ 413上で、それぞれの榭脂層 405、 411が対向するように放射線硬 化性榭脂 C412を介して重ね合わせる(図 4 (f) )。  (a) The cured resin substrate 401 on which the resin layers 406 and 411 are respectively formed and the transfer stamper 407 are radiation hardened so that the resin layers 405 and 411 face each other on the rotary stage 413. The oil is superimposed via C412 (Fig. 4 (f)).
(b)次に、成形榭脂基板 401と転写スタンパ 407とを一体化させた状態で回転ステー ジ 413をスピン回転することによって、放射線硬化性榭脂 Cは延伸され、所望の厚み に制御された榭脂層 414が形成される。  (b) Next, the radiation curable resin C is stretched and controlled to a desired thickness by spin-rotating the rotary stage 413 in a state where the molded resin substrate 401 and the transfer stamper 407 are integrated. A resin layer 414 is formed.
(c)次いで、放射線照射機 415によって放射線を照射して放射線硬化性榭脂 C412 を硬化させる(図 4 (g) )。放射線硬化性榭脂 C412によって成形榭脂基板 401と転写 スタンパ 407が一体化される。  (c) Next, radiation is applied by the radiation irradiator 415 to cure the radiation curable resin C412 (FIG. 4 (g)). The molded resin substrate 401 and the transfer stamper 407 are integrated by the radiation curable resin C412.
(d)その後、転写スタンパ 407と放射線硬化性榭脂 B411との界面で転写スタンパ 4 07を剥離する。これにより、成形榭脂基板 401の上に第 2の情報面が形成される(図 4 (h) )。 (e)この第 2の情報面上に金属薄膜や熱記録が可能な薄膜材料などをスパッタリング 法や蒸着法などにより成膜して第 2の情報記録層 416を形成する。 (d) Thereafter, the transfer stamper 407 is peeled off at the interface between the transfer stamper 407 and the radiation curable resin B411. Thereby, the second information surface is formed on the molded resin substrate 401 (FIG. 4 (h)). (e) A second information recording layer 416 is formed on the second information surface by depositing a metal thin film, a thin film material capable of thermal recording, or the like by a sputtering method, an evaporation method, or the like.
(f)その後、同様のスピンコート法により放射線硬化性榭脂 Dを塗布、放射線硬化す ることによって保護層 417を形成する(図 4 (i) )。場合によっては、保護層の上から、 傷や指紋の付着などによる保護層表面の欠陥を予防するためのハードコート層など を形成することもある。  (f) Thereafter, a radiation curable resin D is applied by the same spin coating method, and a protective layer 417 is formed by radiation curing (FIG. 4 (i)). In some cases, a hard coat layer or the like may be formed on the protective layer to prevent defects on the surface of the protective layer due to adhesion of scratches or fingerprints.
このようにして 2層型 Blu— rayディスクが完成する。  In this way, a two-layer Blu-ray disc is completed.
[0014] なお、ここで用いられて 、る放射線硬化性榭脂 A404は、第 1の情報記録層 402及 び放射線硬化性榭脂 C414との接着性が良好な材料を用いて 、る。放射線硬化性 榭脂 B411は転写スタンパ 407との剥離性が良好であって、放射線硬化性榭脂 C41 4との接着性が良好なものを用いている。また、これら放射線硬化性榭脂 A、 B、 C、 D は記録再生光の波長に対して略透明なものを用いている。また、ここでは 3種類の放 射線硬化性榭脂を用いた榭脂中間層の作製工程について説明を行ったが、転写ス タンパの材料の選定などにより放射線硬化性榭脂との剥離性などを制御することによ り、放射線硬化性榭脂の種類を減らしたより簡易な方法もある。  The radiation curable resin A 404 used herein is made of a material having good adhesion to the first information recording layer 402 and the radiation curable resin C 414. The radiation curable resin B411 has good releasability from the transfer stamper 407 and good adhesion to the radiation curable resin C414. Further, these radiation curable resins A, B, C and D use those substantially transparent to the wavelength of the recording / reproducing light. In addition, although the process of preparing the resin intermediate layer using three types of radiation curable resin was described here, the releasability from the radiation curable resin and the like were selected by the selection of the material of the transfer stopper. There is also a simpler method of reducing the types of radiation curable resins by control.
[0015] また、榭脂層の形成方法としては、ここに示したスピンコート法によるものだけでは なぐスクリーン印刷法などによるものなども提案されている。この方法では、放射線 硬化性榭脂層の形成の部分力 Sスピンコート法からスクリーン印刷法に変わっただけ でその他の工程についてはほぼ同様のプロセスを経る。  [0015] Further, as a method for forming a resin layer, a method by screen printing or the like which is not the only method by the spin coating method shown here has been proposed. In this method, the partial force of the formation of the radiation curable resin layer is the same as the screen printing method, except for the S spin coating method.
[0016] 特許文献 1 :特開 2002— 092969号公報  Patent Document 1: Japanese Patent Application Laid-Open No. 2002-092969
発明の開示  Disclosure of the invention
発明が解決しょうとする課題  Problem that invention tries to solve
[0017] しかしながら、スピンコート法によって榭脂中間層を形成する場合、榭脂の供給があ る特定の領域のみに行われる場合がある。また、延伸に利用する遠心力が半径位置 によって異なる。これらを主要因として、放射線硬化性榭脂層を均一な厚みに形成す るのが困難という課題がある。また、成形榭脂基板の外周端面まで榭脂が到達してし まうため、端面の表面張力の影響を受けて、最外周部で榭脂層が盛上ってしまうとい う課題がある。さらに、スピンコート法は、被塗布面の凹凸の影響を受けやすい。例え ば 3層や 4層の情報記録層を有する多層情報記録媒体などを製造する際や、保護層 を形成する際には、前もって形成された榭脂中間層の上にスピンコートを行う。この 場合、複数の層の榭脂中間層の凹凸の影響が累積するため、厚み均一性がさらに 悪化する可能性がある。 However, when the resin intermediate layer is formed by spin coating, the resin supply may be performed only in a specific region. In addition, the centrifugal force used for drawing differs depending on the radial position. Due to these factors, there is a problem that it is difficult to form a radiation curable resin layer with a uniform thickness. Further, since the resin reaches the outer peripheral end face of the molded resin substrate, there is a problem that the resin layer is raised at the outermost peripheral part under the influence of the surface tension of the end face. Furthermore, the spin coating method is susceptible to the unevenness of the surface to be coated. example For example, when manufacturing a multilayer information recording medium having an information recording layer of three or four layers, or when forming a protective layer, spin coating is performed on a previously formed resin intermediate layer. In this case, since the influence of the unevenness of the resin intermediate layer of a plurality of layers is accumulated, the thickness uniformity may be further deteriorated.
[0018] また、スピンコート法を用いた場合、放射線硬化性榭脂を 1回塗布するにあたって、 約 10秒前後の時間を要し、多層情報記録媒体の製造において生産効率を低下させ る要因にもなつている。また、スピンコート法の場合、基板上に滴下した榭脂を一部 振り切りながら榭脂層を形成するため、実際に基板上に形成される榭脂中間層に必 要な榭脂量よりも多くの榭脂を滴下する必要がある。さら〖こ、基板上から振り切られた 榭脂はそのまま廃棄される力 もしくはリサイクルするなどの新たなプロセスを経て、 再利用する必要がある。この振り切られた榭脂の処理も生産性の低下をまねく要因と もなつている。 In addition, when using a spin coating method, it takes about 10 seconds to apply a radiation curable resin once, which is a factor to reduce the production efficiency in the production of a multilayer information recording medium. It is also getting worse. In the case of spin coating, since the resin layer is formed while shaking off a portion of the resin dropped on the substrate, the amount of resin necessary for the resin intermediate layer actually formed on the substrate is larger than that of the resin layer. Needs to be dripped. Furthermore, it is necessary to reuse the resin that has been shaken off from above the substrate through a new process such as the ability to be discarded as it is or recycling. The treatment of this shaken off grease is also a factor that causes a decrease in productivity.
[0019] スクリーン印刷法による榭脂中間層の形成工程では、スピンコート法に比べて均一 な厚みを実現しやすい。その一方、スクリーン印刷法では、塗布時にスクリーンが情 報記録層や、転写スタンパの情報面などに接触してしまうため、直接、または間接的 に情報記録層に傷あるいはゴミなどを発生させてしまうと 、つた課題がある。またスク リーン印刷法では、スクリーンに開けられた孔の部分のみ力 樹脂が供給されるため 、榭脂が供給されない部分に気泡が嚙みやすいなどの課題もある。さらに、スクリー ン印刷法においても、所望の領域に榭脂を塗布するためには、所望の塗布領域以 外の部分をさえぎるようにマスクをする必要があり、被塗布面との機械的な位置精度 などを精度良く合わせる必要もでてくる。また、スクリーン印刷法においても、スピンコ ート法の場合と同様、実際に基板上に形成される榭脂中間層に必要な榭脂よりも多 くの榭脂を供給する必要がある。使用されな力つた樹脂については、廃棄するか、あ るいはリサイクルするなどの新たなプロセスを経て再利用する必要がある。この使用さ れな力つた樹脂の処理のため、生産性の低下をまねく要因ともなる。  [0019] In the step of forming a resin intermediate layer by screen printing, it is easier to realize a uniform thickness as compared to spin coating. On the other hand, in the screen printing method, the screen contacts the information recording layer, the information surface of the transfer stamper, etc. at the time of coating, and therefore, the information recording layer may generate scratches or dust directly or indirectly. And there are some issues. Further, in the case of the screen printing method, since the force resin is supplied only to the hole portion opened in the screen, there is a problem that air bubbles are easily collected in the portion where the resin is not supplied. Furthermore, even in the case of the screen printing method, in order to apply the resin to the desired area, it is necessary to mask so as to block the portion other than the desired application area, and the mechanical position with respect to the application surface is required. It is also necessary to match the accuracy etc with high accuracy. Also in the screen printing method, as in the spin coating method, it is necessary to supply more resin than necessary to the resin intermediate layer actually formed on the substrate. It is necessary to recycle unused resin through a new process such as disposal or recycling. The treatment of this useless resin also causes a decrease in productivity.
[0020] これら、スピンコート法や、スクリーン印刷法などに関する課題を解決する一つの手 段として、所望の塗布領域に特別なマスクなどを必要とせず、非接触で塗布できるィ ンクジェット法による塗布工法が考えられる。 [0021] インクジェット法とは、体積 lpLから InL程度の微小液滴を吐出する技術であり、そ の吐出に用いるノズルをインクジェットノズルと呼ぶ。榭脂を吐出する方法は様々ある 1S 共通することは、小径のインクジェットノズル力 微小液滴を吐出する構造のため 、吐出液の粘度が低粘度のものしか吐出できないことである。なお、吐出液の粘度が 低粘度とは、常温での液タンク内の吐出液の粘度ではなぐインクジェットノズルの吐 出口周辺における榭脂粘度が低粘度であることを意味する。つまり、インクジェット法 では、吐出口周辺における榭脂粘度を低粘度とすることが必要となる。例えば、イン クジェットノズルの吐出口付近をヒータ等で加熱して、吐出液粘度を低下させて吐出 する方法などが用いられることもある。現在、一般的に用いられている、あるいは販売 されているインクジェットノズルにおいては、吐出可能な吐出液の吐出口付近での粘 度は、数 mPa' sから数十 mPa' s程度である。 [0020] As a means for solving the problems associated with spin coating and screen printing, it is possible to apply a non-contact coating by an ink jet method without requiring a special mask or the like in a desired coating area. A construction method can be considered. The inkjet method is a technology for ejecting minute droplets of a volume lpL to a degree of about InL, and a nozzle used for the ejection is called an inkjet nozzle. There are various methods for discharging the resin 1S What is common is that the viscosity of the discharge liquid can only be discharged with a low viscosity because of the structure of discharging the small diameter ink jet nozzle force and the small droplet. Here, that the viscosity of the discharge liquid is low means that the viscosity of the resin in the vicinity of the discharge outlet of the ink jet nozzle is lower than the viscosity of the discharge liquid in the liquid tank at normal temperature. That is, in the ink jet method, it is necessary to lower the viscosity of the resin around the discharge port. For example, a method may be used in which the vicinity of the discharge port of the ink jet nozzle is heated by a heater or the like to reduce the viscosity of the discharge liquid and discharge it. At present, in the ink jet nozzle generally used or sold, the viscosity in the vicinity of the discharge port of the dischargeable discharge liquid is about several mPa's to several tens of mPa's.
[0022] インクジェット法を用いて榭脂中間層を作製する場合には、インクジェットノズルから 低粘度の榭脂を吐出するため、塗布後において榭脂の流動などが生じやすい。その ため、塗布領域の端面において、榭脂の盛り上がりが生じたり、あるいは所望の塗布 領域よりも広範囲に榭脂がはみ出してしまうなどの課題がある。また、先に述べたとお り体積 lpLから InL程度の微小液滴しか吐出できないため、例えば、 10 /z mを超え るような厚みの塗布が非常に困難であるといった課題も生じる。  In the case of producing a resin intermediate layer using an ink jet method, since a low viscosity resin is discharged from an ink jet nozzle, the flow of resin tends to occur after application. Therefore, there are problems such as swelling of the resin occurring on the end face of the application area, or resin overflowing more widely than the desired application area. Further, as described above, since only minute droplets of about lnL can be discharged from the volume lpL, there arises a problem that it is very difficult to apply a thickness exceeding 10 / z m, for example.
[0023] 本発明の目的は、上記のインクジェット法における課題を解決し、例えば 10 μ mを 超えるような厚みにおいても、均一な厚みの榭脂中間層を作製し、良好な信号特性 を有する多層情報記録媒体の製造方法を提供することである。  An object of the present invention is to solve the above-mentioned problems in the ink jet method, and for example, a resin intermediate layer having a uniform thickness is produced even in a thickness exceeding 10 μm, and a multilayer having good signal characteristics is provided. A method of manufacturing an information recording medium is provided.
課題を解決するための手段  Means to solve the problem
[0024] 本発明では、上述のインクジェット法における課題を以下に示す手段によって解決 することができる。すなわち、本発明に係るインクジェット塗布装置は、塗布対象物、 又は、インクジェットヘッドのいずれか一方を相対的に移動させながら、前記塗布対 象物に放射線硬化性榭脂を塗布するインクジェット塗布装置であって、 In the present invention, the problems in the above-mentioned ink jet method can be solved by the following means. That is, the inkjet coating apparatus according to the present invention is an inkjet coating apparatus that applies a radiation curable resin to the application target while relatively moving either one of the application target or the inkjet head. ,
放射線硬化性榭脂の液滴を吐出するインクジェットノズルを有するインクジェットュ ニットと、前記インクジェットユニットの前記塗布対象物に対する相対移動方向の後方 に所定間隔だけ離間して設けられ、前記塗布対象物に塗布された前記放射線硬化 性榭脂に放射線を照射する放射線照射ユニットと、を備えたインクジェットヘッドと、 前記塗布対象物に対して、前記インクジェットヘッドを相対的に移動させる駆動部と を備えたことを特徴とする。 An ink jet unit having an ink jet nozzle for discharging droplets of a radiation curable resin, and a back side of the relative movement direction of the ink jet unit with respect to the application object is provided spaced apart by a predetermined distance, and is applied to the application object Said radiation curing The ink jet head comprises a radiation irradiation unit for irradiating the resin with radiation, and a drive unit for moving the ink jet head relative to the object to be coated.
上記の構成を用いることによって、インクジェットノズルによって低粘度の放射線硬 化性榭脂を塗布しながら、塗布後、順次に放射線硬化を行うことが可能となり、低粘 度の放射線硬化性榭脂の流動を抑制することが可能となる。  By using the above-mentioned configuration, it becomes possible to perform radiation curing sequentially after coating while applying a low viscosity radiation curable resin with an ink jet nozzle, and the flow of the low viscosity radiation curable resin. Can be suppressed.
[0025] また、前記駆動部は、前記塗布対象物に対して、前記インクジェットヘッドを一定速 度で相対移動させてもよい。この場合には、前記インクジェットノズルカゝら前記塗布対 象物に塗布された前記放射線硬化性榭脂に、塗布後から一定時間後、順次に放射 線を照射することができる。さらに、前記駆動部は、前記塗布対象物について前記ィ ンクジェットヘッドを直線方向に相対移動させてもよ 、。  Further, the drive unit may move the ink jet head relative to the application target at a constant speed. In this case, the radiation curable resin applied to the object to be applied such as the ink jet nozzle can be irradiated with radiation sequentially after a predetermined time after application. Furthermore, the drive unit may move the ink jet head relative to the application object in a linear direction.
[0026] またさらに、前記インクジェットヘッドは、前記インクジェットノズルユニットと前記放射 線照射ユニットとの間に挟持され、  Furthermore, the inkjet head is held between the inkjet nozzle unit and the radiation irradiation unit.
前記インクジェットノズルから吐出された前記放射線硬化性榭脂の液滴が塗布され る前に、前記放射線照射ユニットから照射する放射線が照射されることを防ぐ放射線 遮蔽板をさらに備えてもよい。  A radiation shielding plate may be further provided to prevent irradiation of the radiation irradiated from the radiation irradiation unit before the droplets of the radiation curable resin discharged from the ink jet nozzle are applied.
[0027] また、前記インクジェットヘッドは、前記インクジェットユニットを挟んで相対移動方向 の前方及び後方のそれぞれに前記インクジェットユニットと所定間隔だけ離間して配 置された第 1の放射線照射ユニットと第 2の放射線照射ユニットとを備えてもよい。 Further, the ink jet head includes a first radiation irradiating unit and a second radiation irradiating unit disposed at a predetermined distance from the ink jet unit at the front and the rear of the relative moving direction with the ink jet unit interposed therebetween. And a radiation irradiation unit.
[0028] さらに、前記駆動部は、前記塗布対象物につ!ヽて前記インクジェットヘッドを直線方 向に往復させて相対移動させると共に、 Furthermore, the driving unit causes the inkjet head to reciprocate in a linear direction relative to the application object, and to relatively move the inkjet head.
前記インクジェットヘッドは、前記相対移動方向を反転する場合に、前記第 1の放 射線照射ユニットから前記第 2の放射線照射ユニットに切り替えて放射線を照射して ちょい。  When reversing the relative movement direction, the inkjet head switches from the first radiation application unit to the second radiation application unit to apply radiation.
[0029] またさらに、前記インクジェットへットは、複数のインクジェットノズルが前記相対移動 方向に対して垂直方向につ!、て前記塗布対象物の幅以上にわたって前記インクジ エツトノズルユニットに配置されて 、てもよ 、。 この構成を用いることにより効率的な放射線硬化性榭脂の塗布が可能となる。 Furthermore, in the ink jet heater, a plurality of ink jet nozzles are arranged in the ink jet nozzle unit in a direction perpendicular to the relative movement direction and over the width of the object to be coated, Well. By using this configuration, efficient radiation curable resin can be applied.
[0030] 本発明に係る多層情報記録媒体の製造方法は、基板と、前記基板の上に配置さ れる複数の情報記録層と、前記情報記録層の間に配置される榭脂中間層と、前記情 報記録層上に設けられる保護層とを有する多層情報記録媒体の製造方法であって、 放射線硬化性榭脂の液滴を吐出するインクジェットノズルを有するインクジェットュ ニットと、塗布対象物に対する前記インクジヱットユニットの相対移動方向の後方に所 定間隔だけ離間して設けられ、前記塗布対象物に塗布された前記放射線硬化性榭 脂に放射線を照射する放射線照射ユニットと、を備えたインクジェットヘッドを有する インクジェット塗布装置を用い、塗布対象物に対して相対移動させて、前記インクジェ ットユニットから前記塗布対象物上に放射線硬化性榭脂を滴下した後、順次に放射 線照射ユニットから前記放射線硬化性榭脂に放射線を照射して、前記塗布対象物 の上に榭脂中間層を形成する放射線硬化性榭脂の塗布及び照射工程  A method of manufacturing a multilayer information recording medium according to the present invention comprises a substrate, a plurality of information recording layers disposed on the substrate, and a resin intermediate layer disposed between the information recording layers. A method for producing a multilayer information recording medium having a protective layer provided on the information recording layer, the method comprising: an inkjet unit having an inkjet nozzle for discharging droplets of a radiation curable resin; An ink-jetting unit provided at the back of the relative movement direction of the ink-jet unit spaced apart by a predetermined distance and irradiating the radiation-curable resin applied to the application object with radiation A radiation curable resin is dropped from the ink jet unit onto the object to be coated using an ink jet coating apparatus having a head and moved relative to the object to be coated. And then, by irradiating radiation to the radiation-curable 榭脂 from sequentially radiation irradiation unit, the object to be coated radiation curable 榭脂 the coating and irradiation steps of forming a 榭脂 intermediate layer on the
を含むことを特徴とする。  It is characterized by including.
上記の構成により均一な厚みの榭脂中間層の形成が可能となる。  The above configuration enables formation of a resin intermediate layer having a uniform thickness.
[0031] また、前記塗布及び照射工程における前記塗布対象物は、情報記録層を備えた 基板であってもよい。この場合、前記基板上に形成した前記放射線硬化性榭脂の表 面に情報面を転写によって形成する転写工程をさらに含んでもよい。  Further, the object to be coated in the coating and irradiation steps may be a substrate provided with an information recording layer. In this case, the method may further include a transfer step of forming an information surface on the surface of the radiation curable resin formed on the substrate by transfer.
[0032] さらに、前記塗布及び照射工程における前記塗布対象物は、転写スタンパであつ てもよい。この場合、前記放射線硬化性榭脂を挟持して、前記転写スタンパと前記基 板とを重ね合わせる重ね合わせ工程と、  Furthermore, the application target in the application and irradiation steps may be a transfer stamper. In this case, an overlapping step of sandwiching the radiation curable resin and overlapping the transfer stamper and the substrate;
前記放射線硬化性榭脂から前記転写スタンパを剥離する剥離工程と、 をさらに含んでもよい。  And a peeling step of peeling the transfer stamper from the radiation curable resin.
[0033] また、前記塗布及び照射工程は、  Further, in the application and irradiation steps,
半径方向内側の内縁部と半径方向外側の外縁部とに、放射線硬化性榭脂を滴 下した後、前記放射線硬化性榭脂に放射線を照射して、所定の塗布厚みを有する 前記放射線硬化性榭脂からなる前記榭脂中間層を形成する領域を囲む内縁部及び 外縁部の壁面を形成する工程と、  A radiation curable resin is dropped onto the radially inner inner edge and the radially outer outer edge, and the radiation curable resin is then irradiated with radiation to have a predetermined coating thickness. Forming wall surfaces of an inner edge portion and an outer edge portion surrounding a region forming the resin intermediate layer made of resin;
内縁部及び外縁部の前記壁面によって囲まれた領域に、放射線硬化性榭脂を 滴下した後、前記放射線硬化性榭脂に放射線を照射して榭脂中間層を形成するェ 程と、 A radiation curable resin is applied to the area surrounded by the wall surface of the inner edge and the outer edge. After dripping, irradiating the radiation curable resin with radiation to form a resin intermediate layer;
を含んでもよい。  May be included.
上記の構成により、内縁部及び外縁部の壁部で囲まれた領域に放射線硬化性榭 脂を塗布するので、榭脂が流動性を有していても均一な厚みの榭脂中間層が実現 できる。  According to the above configuration, the radiation curable resin is applied to the area surrounded by the inner edge and the wall of the outer edge, so that a resin intermediate layer having a uniform thickness is realized even if the resin has fluidity. it can.
[0034] さらに、前記塗布及び照射工程にお!ヽて、前記塗布対象物に対して前記インクジ エツト塗布装置を一定速度で相対移動させて、前記放射線硬化性榭脂の塗布後から 所定時間経過後に放射線を照射してもよ ヽ。  Furthermore, in the coating and irradiation steps, the ink jet coating apparatus is moved relative to the object to be coated at a constant speed, and a predetermined time has elapsed since the radiation curable resin is applied. It may be irradiated later.
[0035] またさらに、複数回の前記塗布及び照射工程を行ってもよい。 Furthermore, a plurality of the application and irradiation steps may be performed.
また、複数回の前記塗布及び照射工程のうち最後の工程における前記放射線の 照射量が、それまでの塗布及び照射工程における照射量に対して少なくしてもょ 、。 さらに、複数回の前記塗布及び照射工程のうち最後の工程では、前記放射線硬化 性榭脂の塗布のみを行ってもょ 、。  In addition, the irradiation dose of the radiation in the last step of the plurality of application and irradiation steps may be smaller than the irradiation dose in the previous application and irradiation steps. Furthermore, in the last step of the plurality of application and irradiation steps, only the radiation curable resin may be applied.
上記の構成によって、放射線硬化性榭脂の最表面は未硬化部分を有するので、良 好な情報面の転写が実現される。  According to the above configuration, the outermost surface of the radiation curable resin has an uncured portion, so that good information transfer can be realized.
[0036] また、前記塗布及び照射工程にお!ヽて、前記放射線硬化性榭脂として複数種類の 榭脂を用いてもよい。この構成により、機能の異なる複数の榭脂を積層した榭脂中間 層を形成できる。 Further, in the application and irradiation steps, a plurality of types of resins may be used as the radiation curable resin. With this configuration, it is possible to form a resin intermediate layer in which a plurality of resins having different functions are laminated.
[0037] さらに、本発明に係る多層情報記録媒体は、前記多層情報記録媒体の製造方法 を用いて作製されたものである。またさらに、この多層情報記録媒体は、前記榭脂中 間層の端面が前記インクジェットノズルからの液滴によるジグザグ状を呈することを特 徴とする。インクジェット法によって端面がジグザグ状を呈する。  Furthermore, a multilayer information recording medium according to the present invention is manufactured using the method for manufacturing the multilayer information recording medium. Furthermore, this multi-layer information recording medium is characterized in that the end face of the resin intermediate layer exhibits a zigzag shape by the droplets from the ink jet nozzle. The end face has a zigzag shape by the ink jet method.
発明の効果  Effect of the invention
[0038] 本発明によれば、インクジェットノズル力 なるインクジェットノズルユニットと、放射 線照射手段とを有し、前記放射線照射手段は、前記塗布対象物に対して相対的に 走査する前記インクジェットノズルユニットの後段に設けられ、  [0038] According to the present invention, the inkjet nozzle unit has an inkjet nozzle unit having an inkjet nozzle force, and a radiation irradiating unit, wherein the radiation irradiating unit scans the object to be coated relatively. Provided in the latter stage,
インクジェットノズルによって低粘度の放射線硬化性榭脂を塗布しながら、順次に放 射線硬化を行うことが可能となり、低粘度の放射線硬化性榭脂の流動を抑制し、均 一な厚みの榭脂中間層を形成できる。 While applying low viscosity radiation curable resin with ink jet nozzle, It becomes possible to perform radiation curing, suppress the flow of a low viscosity radiation curable resin, and form a resin intermediate layer of uniform thickness.
図面の簡単な説明  Brief description of the drawings
[0039] [図 1]本発明の実施の形態 1に係るインクジェット塗布装置の構成を示す概略図であ ると共〖こ、当該インクジエッド塗布装置を用いた塗布及び照射工程の一例を示す図 である。  FIG. 1 is a schematic view showing the configuration of an inkjet coating apparatus according to Embodiment 1 of the present invention. FIG. 1 is a view showing an example of a coating and irradiation process using the ink jet coating apparatus. is there.
[図 2]2層型 Blu— rayディスクの構成を示す断面図である。  FIG. 2 is a cross-sectional view showing the configuration of a two-layer Blu-ray disc.
[図 3] (a)〜 (f)は、金属スタンパの作製工程を示す図である。  [FIG. 3] (a) to (f) are diagrams showing steps of producing a metal stamper.
[図 4] (a)〜 (i)は、スピンコート法を用いた榭脂中間層、および保護層の作製工程を 含む 2層ディスクの作製工程を示す図である。  [FIG. 4] (a) to (i) are diagrams showing a process of producing a two-layer disc including a process of producing a resin intermediate layer and a protective layer using a spin coating method.
[図 5] (a)及び (b)は、インクジェットノズルの代表的な構成例を示す断面図である。  [FIG. 5] (a) and (b) are cross-sectional views showing a typical configuration example of the ink jet nozzle.
[図 6]本発明の実施の形態 1に係る多層情報記録媒体の構造を示す断面図である。  FIG. 6 is a cross-sectional view showing a structure of a multilayer information recording medium in accordance with Embodiment 1 of the present invention.
[図 7] (a)〜(c)は、インクジェットノズルユニットの構成例を示す図である。  [FIG. 7] (a) to (c) are diagrams showing configuration examples of the ink jet nozzle unit.
[図 8]本発明の実施の形態 1におけるインクジェットノズルユニットの構成を示す図で ある。  FIG. 8 is a view showing the configuration of an ink jet nozzle unit according to Embodiment 1 of the present invention.
[図 9] (a)及び (b)は、本発明の実施の形態 1における複数回の塗布及び照射工程を 示す図である。  [FIG. 9] (a) and (b) are diagrams showing a plurality of application and irradiation steps in the first embodiment of the present invention.
[図 10] (a)〜 (d)は、本発明の実施の形態 1における榭脂中間層への情報面の転写 工程の一例を示す図である。  [FIG. 10] (a) to (d) are diagrams showing an example of a process of transferring an information surface to a resin intermediate layer according to Embodiment 1 of the present invention.
[図 11] (a)及び (b)は、成形榭脂基板とインクジェットノズルユニットとの関係を示す図 である。  [FIG. 11] (a) and (b) are diagrams showing the relationship between a molded resin substrate and an ink jet nozzle unit.
[図 12] (a)〜 (c)は、本発明の実施の形態 2に係るインクジェット塗布装置を用いた塗 布及び照射工程の一例を示す図である。  [FIG. 12] (a) to (c) are diagrams showing an example of a coating and an irradiation process using the ink jet coating apparatus according to Embodiment 2 of the present invention.
符号の説明  Explanation of sign
[0040] 101 成形榭脂基板 [0040] 101 molded resin substrate
102 第 1の情報記録層  102 1st information recording layer
103 ステージ  103 stages
104 インクジェットノズルユニット 105 放射線遮蔽板 104 Ink jet nozzle unit 105 radiation shield
106 放射線照射手段  106 Radiation means
107 インクジェットヘッド  107 Inkjet head
108 微小液適  108 Microfluidization
109 放射線硬化性榭脂  109 Radiation curable resin
110 硬化された放射線硬化性榭月 1 110 Cured Radiation Hardening Moonlight 1
201 成形榭脂基板 201 Molded resin substrate
202 第 1の情報面  202 First Information Plane
203 第 1の情報記録層  203 First information recording layer
204 樹脂中間層  204 resin interlayer
205 第 2の情報面  205 Second Information Plane
206 第 2の情報記録層  206 Second information recording layer
207 保護層  207 Protective layer
301 原盤  301 Master
302 感光膜  302 Photosensitive film
303 露光ビーム  303 Exposure beam
304 露光部  304 Exposure unit
305 凹凸上のパターン  305 Uneven pattern
306 記録原盤  306 Recording Master
307 導電性薄膜  307 Conductive thin film
308 金属板  308 Metal plate
309 転写スタンパ  309 Transfer stamper
401 成形榭脂基板  401 Molded resin substrate
402 第 1の情報記録層  402 First information recording layer
403 回転ステージ  403 rotation stage
404 放射線硬化性榭脂 A  404 Radiation curable resin A
405 放射線照射機  405 Irradiator
406 樹脂層 407 転写スタンパ 406 Resin layer 407 Transfer stamper
408 回転ステージ  408 rotation stage
409 放射線硬化性榭脂 B 409 Radiation curable resin B
410 放射線照射機 410 Irradiator
411 樹脂層  411 resin layer
412 放射線硬化性榭脂 C 412 Radiation curable resin C
413 回転ステージ 413 rotary stage
414 樹脂層  414 resin layer
415 放射線照射機  415 Irradiator
416 第 2の情報記録層  416 Second information recording layer
417 保護層  417 protective layer
501 吐出液  501 discharge liquid
502 振動素子  502 Vibration element
503 ヒータ  503 heater
504 吐出液  504 Ejection fluid
601 成形榭脂基板  601 Molded resin substrate
602 第 1の情報記録層  602 First information recording layer
603 第 1の榭脂中間層  603 First Resin Intermediate Layer
604 第 2の情報記録層  604 Second information recording layer
605 第 2の榭脂中間層  605 Second resin interlayer
606 第 3の情報記録層  606 Third information recording layer
607 第 3の榭脂中間層  607 Third resin interlayer
608 第 4の情報記録層  608 Fourth Information Recording Layer
609 保護層  609 protective layer
701 インクジェットノズル  701 inkjet nozzles
702 インクジェットノズルュこニット 702 Inkjet nozzle unit
801 インクジェットノズル 801 inkjet nozzles
802 インクジェットノズルュこニット 803 成形榭脂基板 802 Inkjet nozzle unit 803 Molded resin substrate
901 成形榭脂基板  901 Molded resin substrate
902 第 1の情報記録層  902 First information recording layer
903 放射線硬化性樹脂  903 Radiation curable resin
904 インクジェットノズルュ = -ッ卜 904 Ink jet nozzle = =-
905 放射線照射機 905 Irradiator
906 放射線照射手段  906 Radiation means
907、 908 シャツタ  907, 908 シ タ タ
1001 成形榭脂基板  1001 molded resin substrate
1002 情報記録層  1002 Information recording layer
1003 放射線硬化性樹脂  1003 Radiation curable resin
1004 転写スタンパ  1004 Transfer stamper
1005 センターボス  1005 Center boss
1006 加圧プレート  1006 pressure plate
1007 真空チャンノ  1007 Vacuum Channo
1008 真空ポンプ  1008 vacuum pump
1009 放射線照射装置  1009 Radiation device
1101 成形榭脂基板  1101 Molded resin substrate
1102 塗布照射された領域 1102 Application irradiated area
1103 インクジェットノズルュ:ニット1103 Inkjet Nozzle: Knit
1104 インクジェットノズルュ:ニット1104 Inkjet Nozzle: Knit
1201 成形榭脂基板 1201 Molded resin substrate
1202 外縁部の壁面  1202 Outer wall surface
1203 内縁部の壁面  1203 Inner edge wall surface
1204 放射線照射手段  1204 Radiation means
1205 インクジェットノズルュ:ニット 1205 Inkjet Nozzle: Knit
1206 放射線照射手段 1206 Radiation means
1207 榭脂中間層 発明を実施するための最良の形態 1207 Resin Intermediate Layer BEST MODE FOR CARRYING OUT THE INVENTION
[0041] 以下に、本発明の実施の形態に係るインクジエッド塗布装置、多層情報記録媒体の 製造方法について添付図面を参照して説明する。なお、図面において実質的に同 一の部材には同一の符号を付している。  Hereinafter, an ink jet coating apparatus and a method of manufacturing a multilayer information recording medium according to an embodiment of the present invention will be described with reference to the attached drawings. In the drawings, substantially the same members are denoted by the same reference numerals.
[0042] (実施の形態 1)  Embodiment 1
図 6は、本発明の実施の形態 1に係る多層情報記録媒体の構造を示す断面図であ る。この多層情報記録媒体は、片面から記録再生可能な 4層情報記録媒体である。 この 4層情報記録媒体は、片面に凹凸形状力 なる案内溝の情報面が転写形成され た成形榭脂基板 601上に 4つの情報記録層を積層して構成されて 、る。この多層情 報記録媒体は、成形榭脂基板 601上に、順に形成された第 1の情報記録層 602と、 第 1の榭脂中間層 603と、第 2の情報記録層 604と、第 2の榭脂中間層 605と、第 3 の情報記録層 606と、第 3の榭脂中間層 607と、第 4の情報記録層 608と、保護層 6 09と、力 構成される。第 1の情報記録層 602は、成形榭脂基板 601に形成された 第 1の情報面に接するように配置されている。第 1の榭脂中間層 603は、第 1の情報 記録層 602に接するように積層され、一方の面に凹凸形状力もなる第 2の情報面を 有する。第 2の情報記録層 604は、第 2の情報面に接するように配置されている。第 2 の榭脂中間層 605は、第 2の情報記録層 604に接するように積層され、一方の面に 凹凸形状力 なる第 3の情報面を有する。第 3の情報記録層 606は、第 3の情報面に 接するように配置されている。第 3の榭脂中間層 607は、第 3の情報記録層 606に接 するように積層され、一方の面に凹凸形状力もなる第 4の情報面を有する。第 4の情 報記録層 608は、第 4の情報面に接するように配置されている。保護層 609は、第 4 の情報記録層 608に接するように設けられて 、る。  FIG. 6 is a cross-sectional view showing a structure of a multilayer information recording medium according to Embodiment 1 of the present invention. This multilayer information recording medium is a four-layer information recording medium which can be recorded and reproduced from one side. This four-layer information recording medium is configured by laminating four information recording layers on a molded resin substrate 601 on which an information surface of a guide groove having a concavo-convex shape is transferred and formed on one side. This multi-layer information recording medium comprises a first information recording layer 602, a first resin intermediate layer 603, a second information recording layer 604, and a second information recording layer formed in order on a molded resin substrate 601. And the third information recording layer 606, the third resin intermediate layer 607, the fourth information recording layer 608, and the protective layer 605. The first information recording layer 602 is disposed in contact with the first information surface formed on the molded resin substrate 601. The first resin intermediate layer 603 is laminated so as to be in contact with the first information recording layer 602, and has a second information surface on one side of which also has a concavo-convex shape force. The second information recording layer 604 is disposed in contact with the second information surface. The second resin intermediate layer 605 is laminated to be in contact with the second information recording layer 604, and has a third information surface having a concavo-convex shape on one surface. The third information recording layer 606 is disposed in contact with the third information surface. The third resin intermediate layer 607 is laminated so as to be in contact with the third information recording layer 606, and has a fourth information surface on one surface of which is also a concavo-convex shape force. The fourth information recording layer 608 is disposed in contact with the fourth information surface. A protective layer 609 is provided in contact with the fourth information recording layer 608.
[0043] この多層情報記録媒体は、第 1の榭脂中間層 603、第 2の榭脂中間層 605、第 3の 榭脂中間層 607のうち、少なくとも一つの榭脂中間層は、後述するインクジェット塗布 装置によって放射線硬化性榭脂の塗布及び放射線の照射を行って作製されたことを 特徴とする。このため、榭脂中間層の端面はインクジェットノズルから吐出された液滴 の大きさに依存するジグザグ状を呈している。  In this multilayer information recording medium, at least one resin intermediate layer of the first resin intermediate layer 603, the second resin intermediate layer 605, and the third resin intermediate layer 607 will be described later. It is characterized in that it is manufactured by applying a radiation curable resin and irradiating a radiation by an ink jet coating apparatus. For this reason, the end face of the resin intermediate layer has a zigzag shape depending on the size of droplets discharged from the ink jet nozzle.
[0044] 以下に、この多層情報記録媒体の各構成部材について説明する。 く成形榭脂基板〉 Each component of the multilayer information recording medium will be described below. Molded resin substrate>
成形榭脂基板 601は、その上に積層される情報記録層、榭脂中間層、保護層を支 持できるものであればよい。なお、 CDや DVD、あるいは Blu— rayディスクなどの光 ディスクと形状的な互換を有するように、例えば、外径 φ 120mm、中心孔径 φ 15m m、厚みが 1. 0〜1. 1mm程度の円盤形状を有することが好ましい。また、成形榭脂 基板 601は、ポリカーボネートやアクリル系榭脂から形成されていることが好ましい。 この成形榭脂基板 601には、図 3 (f)に示した金属スタンパを用いた射出成形法など による榭脂成形によって、片面に凹凸で形成された案内溝などの情報面が形成され ている。本実施の形態 1においては、ポリカーボネートを用いて作製した。  The molded resin substrate 601 may be any one as long as it can support the information recording layer, resin intermediate layer, and protective layer laminated thereon. Note that, for example, a disc having an outer diameter of φ 120 mm, a central hole diameter of 15 mm, and a thickness of about 1.0 to 1.1 mm so as to be geometrically compatible with an optical disc such as a CD, DVD, or Blu-ray disc. It is preferable to have a shape. The molded resin substrate 601 is preferably formed of polycarbonate or acrylic resin. The molded resin substrate 601 is formed with an information surface such as a guide groove formed on one surface by concavo-convex formation by resin molding by injection molding or the like using the metal stamper shown in FIG. 3 (f). . In the first embodiment, polycarbonate is used.
[0045] <成形樹脂基板を作製するための金属スタンパの作製工程 > <Step of Producing Metal Stamper for Producing Molded Resin Substrate>
図 3 (a)〜 (f)は、情報記録媒体の成形榭脂基板を作製するための金属金型である スタンパの作製工程を示す概略図である。  FIGS. 3 (a) to 3 (f) are schematic views showing steps of producing a stamper which is a metal mold for producing a molded resin substrate of an information recording medium.
(a)まず、ガラス盤あるいはシリコンウェハなど力もなる原盤 301上にフォトレジスト等 の感光材料を塗布して感光膜 302を作製する。  (a) First, a photosensitive material such as a photoresist is coated on a master disk 301 which can be a glass disk or a silicon wafer, etc. to form a photosensitive film 302.
(b)次いで、レーザ光や電子線などの露光ビーム 303を用いて、ピットあるいは案内 溝等のパターンの露光を行う(図 3 (a) )。それによつて、露光部 304からなる潜像を 形成する(図 3 (b) )。  (b) Next, a pattern such as a pit or a guide groove is exposed using an exposure beam 303 such as a laser beam or an electron beam (FIG. 3 (a)). As a result, a latent image consisting of the exposure unit 304 is formed (FIG. 3 (b)).
(c)その後、アルカリ現像液などにより露光部 304を除去すると原盤 301上に感光材 により凹凸状のパターン 305が形成された記録原盤 306を得る(図 3 (c) )。  (c) Thereafter, the exposed portion 304 is removed with an alkaline developer or the like to obtain a recording master 306 having a concavo-convex pattern 305 formed of a photosensitive material on the master 301 (FIG. 3 (c)).
(d)記録原盤 306の表面にスパッタリング法や蒸着法などを用いて導電性の薄膜 30 7を形成する(図 3 (d) )。  (d) A conductive thin film 307 is formed on the surface of the recording master 306 by sputtering, evaporation or the like (FIG. 3 (d)).
(e)上記の導電性薄膜 307を電極として金属メツキなどにより金属板 308を形成する (図 3 (e) )。  (e) A metal plate 308 is formed by metal plating or the like using the above-mentioned conductive thin film 307 as an electrode (FIG. 3 (e)).
(f)次に、感光膜 302と導電性薄膜 307の界面で、導電膜 307と金属板 308とを剥 離する。さらに、導電膜 307表面に残留する感光材を除去材などで取り除く。その後 、成形機に合わせた内外径に打ち抜き成形を行うことによって、成形榭脂基板の成 形用の金属金型である金属スタンパ 309が作製される(図 3 (f) )。  (f) Next, the conductive film 307 and the metal plate 308 are peeled off at the interface between the photosensitive film 302 and the conductive thin film 307. Further, the photosensitive material remaining on the surface of the conductive film 307 is removed by a removing material or the like. Thereafter, the metal stamper 309, which is a metal mold for molding of a molded resin substrate, is manufactured by performing punching forming to inner and outer diameters matched to a molding machine (FIG. 3 (f)).
[0046] <第 1の情報記録層 > 第 1の情報記録層 602は、情報記録媒体が再生専用媒体の場合、少なくとも、再 生光を反射する特性を持てばよい。例えば、 Al、 Ag、 Au、 Si、 SiO、 TiOなどを含 <First Information Recording Layer> When the information recording medium is a read-only medium, the first information recording layer 602 may have at least a characteristic of reflecting the reproduced light. For example, Al, Ag, Au, Si, SiO, TiO etc.
2 2 む反射材料をスパッタリングや蒸着等の方法を用いて形成される。また、情報記録媒 体が記録可能媒体の場合、記録光の照射によって情報を書き込む必要があるため、 例えば、 GeSbTeなどの相変化材料や、例えば、フタロシアニンなどの有機色素など の記録材料力もなる層を少なくとも含んでもよい。さらに、必要に応じて、反射層ゃ界 面層など、記録再生特性を向上させる層を含んでいてもよい。第 2の情報記録層 60 4、第 3の情報記録層 606、第 4の情報記録層 608についても同様に形成することが できる。ただし、記録再生は、保護層 609側力もそれぞれの情報記録層に記録再生 光を入射することにより行われるため、第 1の情報記録層から第 4の情報記録層にか けて、順次記録再生光の波長に対する透過率が高くなるように構成することが好まし い。  The reflective material is formed using a method such as sputtering or vapor deposition. In addition, when the information recording medium is a recordable medium, it is necessary to write the information by irradiating the recording light. For example, a layer having a recording material strength such as a phase change material such as GeSbTe or an organic dye such as phthalocyanine. May be included at least. Further, if necessary, a layer such as a reflective layer or an interface layer may be included to improve the recording and reproducing characteristics. The second information recording layer 604, the third information recording layer 606, and the fourth information recording layer 608 can be similarly formed. However, since recording and reproduction are performed by causing recording and reproduction light to enter the respective information recording layers on the side of the protective layer 609, recording and reproduction are sequentially performed from the first information recording layer to the fourth information recording layer. It is preferred to be configured to have high transmittance to the wavelength of light.
[0047] <第 1の榭脂中間層 >  <First Resin Intermediate Layer>
第 1の榭脂中間層 603は、記録再生光に対して略透明な榭脂、例えば、アクリルを 主成分とした紫外線硬化榭脂や、ある!、はエポキシ系の紫外線硬化榭脂などの放射 線硬化性榭脂などを用いることができる。ここでいう略透明とは、記録再生光の波長 に対して 90%以上の透過率を有することを意味しており、さらに 95%以上の透過率 を有する材料がさらに好まし ヽ。  The first resin intermediate layer 603 is a resin substantially transparent to recording and reproduction light, for example, an ultraviolet curable resin containing acrylic as a main component! In the above, it is possible to use a radiation curable resin such as an epoxy type ultraviolet curable resin. The term "substantially transparent" as used herein means having a transmittance of 90% or more with respect to the wavelength of recording / reproducing light, and a material having a transmittance of 95% or more is more preferable.
[0048] この第 1の榭脂中間層 603の作製方法は、  [0048] The method for producing the first resin intermediate layer 603 is
(a)液状の放射線硬化性榭脂を第 1の情報記録層 602上に、後述するインクジェット 塗布装置を用いて放射線硬化性榭脂を塗布及び放射線を照射する工程と、 (a) applying a radiation curable resin onto the first information recording layer 602 using an ink jet coating apparatus described later and applying the radiation onto the first information recording layer 602;
(b)ピットや案内溝などの情報面を有する転写スタンパを利用して、上記放射線硬化 性榭脂の表面に上記情報面を転写する工程と、 (b) transferring the information surface to the surface of the radiation curable resin by using a transfer stamper having an information surface such as pits and guide grooves;
を含む。  including.
[0049] <転写スタンパ> <Transfer Stamper>
まず、転写スタンパ 1004について説明する。  First, the transfer stamper 1004 will be described.
転写スタンパ 1004は、放射線硬化性榭脂との剥離性が良好な材料であるポリオレ フィン材料を用いており、厚みは、例えば 0. 6mmなどのように成形榭脂基板よりも薄 く形成されている。これは、厚みが約 1. 1mmの成形榭脂基板カゝら転写スタンパを剥 離する際に基板の厚みが異なることによる剛性の差を利用し、転写スタンパを反らせ て剥離することを目的としたためである。ポリオレフイン材料は成形榭脂基板と同様に 従来の金属スタンパなどを用いて射出成形などの方法で片面に凹凸で形成されたピ ットゃ案内溝などの情報面を容易に作製できる材料である。また、ポリオレフイン材料 は紫外線などの放射線に対する透過率も高 、ため、転写スタンパを通して放射線照 射することにより放射線硬化性榭脂を効率良く硬化させることができる。さらに、ポリオ レフイン材料は硬化した放射線硬化性榭脂との密着力が小さぐ硬化後に放射線硬 化性榭脂との界面力も容易に剥離することが出来る。転写スタンパ 1004の中心には 成形榭脂基板 1001とセンターボス 1005を介して偏芯をとるための中心穴が設けら れている。 The transfer stamper 1004 uses a polyolefin material which is a material having good releasability from the radiation curable resin, and the thickness thereof is thinner than that of a molded resin substrate, for example, 0.6 mm. Are formed. The purpose of this is to make the transfer stamper warp and peel using the difference in rigidity due to the difference in thickness of the molded resin substrate having a thickness of about 1.1 mm when peeling the transfer stamper from the substrate. Because of The polyolefin material is a material capable of easily producing an information surface such as pits and guide grooves formed on one side by a method such as injection molding using a conventional metal stamper and the like like the molded resin substrate. In addition, since the polyolefin material has a high transmittance to radiation such as ultraviolet light, radiation irradiation through the transfer stamper can cure the radiation curable resin efficiently. Furthermore, the polyolefin material can be easily peeled off at the interface with the radiation curable resin after the adhesive is hardened when the adhesion with the cured radiation curable resin is reduced. At the center of the transfer stamper 1004, a center hole for eccentricity is provided via a molded resin substrate 1001 and a center boss 1005.
<転写スタンパによる転写工程 > Transfer Process by Transfer Stamper
図 10 (a)〜(d)は、本発明の実施の形態 1における榭脂中間層への情報面の転写 工程の一例を示す図である。  FIGS. 10 (a) to 10 (d) are diagrams showing an example of the process of transferring the information surface to the resin interlayer according to the first embodiment of the present invention.
(a)放射線硬化性榭脂 1003の塗布が完了した成形榭脂基板 1001を、真空チャン ノ 1007の中に搬送する。このとき転写スタンパ 1004も真空チャンバ 1007内に配置 されている(図 10 (a) )。  (a) The formed resin substrate 1001 on which the application of the radiation curable resin 1003 is completed is conveyed into a vacuum chamber 1007. At this time, the transfer stamper 1004 is also disposed in the vacuum chamber 1007 (FIG. 10 (a)).
(b)真空チャンバ 1007内は、ロータリーポンプやターボ分子ポンプなどの真空ポン プ 1008によって排気して真空雰囲気とする。  (b) Vacuum chamber The inside of the chamber 1007 is evacuated by a vacuum pump 1008 such as a rotary pump or a turbo molecular pump to create a vacuum atmosphere.
(c)真空チャンバ 1007内の圧力が lOOPa以下の真空度に達した時に、転写スタン ノ 1004を成形榭脂基板 1001に重ね合わせる(図 10 (b) )。このとき転写スタンパ 10 04の上部に設置されている加圧プレート 1006が転写スタンパ 1004を加圧し、放射 線硬化性榭脂 1003に転写スタンパ上の情報面が転写される。真空チャンバ内が真 空雰囲気であることから、放射線硬化性榭脂 1003と転写スタンパ 1004の間には気 泡が混入することなく両者を貼り合わせることができる。  (c) When the pressure in the vacuum chamber 1007 reaches a degree of vacuum of 100 Pa or less, the transfer stamper 1004 is superimposed on the molded resin substrate 1001 (FIG. 10 (b)). At this time, a pressure plate 1006 installed on the upper side of the transfer stamper 1004 presses the transfer stamper 1004 and the information surface on the transfer stamper is transferred to the radiation curable resin 1003. Since the inside of the vacuum chamber is a vacuum atmosphere, it is possible to bond the radiation curable resin 1003 and the transfer stamper 1004 together without bubbles being mixed.
(d)貼り合わされた成形榭脂基板 1001と転写スタンパ 1004とに対して、真空チャン バ内部で、もしくは取り出した後で、放射線照射装置 1009によって転写スタンパ 100 4を通して放射線を照射する(図 10 (c) )。 (e)その後、転写スタンパ 1004と成形榭脂基板 1001との間に、楔を打ち込んだり、 圧縮エアーを吹き込むなどして放射線硬化性榭脂と転写スタンパとの界面力も転写 スタンパ 1004を剥離する(図 10 (d) )。このようにして情報面が転写された第 1の榭脂 中間層が形成される。 (d) Radiation is applied to the molded resin substrate 1001 and the transfer stamper 1004 bonded to each other through the transfer stamper 1004 by the radiation irradiating apparatus 1009 inside or after the vacuum chamber is removed (FIG. 10 (FIG. c)). (e) Thereafter, the interface force between the radiation curable resin and the transfer stamper also peels off the transfer stamper 1004 by driving a wedge or blowing compressed air between the transfer stamper 1004 and the molded resin substrate 1001. Figure 10 (d). Thus, the first resin intermediate layer to which the information surface has been transferred is formed.
[0051] なお、ここで述べた以外にも、転写スタンパ 1004として、例えば金属などの異なる 材料を用いてもよい。また、 2種類以上の放射線硬化性榭脂を用いて 2層以上の榭 脂層からなる榭脂中間層を形成してもよい。さらに、成形榭脂基板側から放射線を照 射してもよい。放射線硬化性榭脂に情報面を転写させる様々な方法があるが、どの 方法を用いた場合においても、本発明の効果を制限するものではない。  In addition to the above, as the transfer stamper 1004, a different material such as metal may be used, for example. Further, an intermediate resin layer consisting of two or more resin layers may be formed by using two or more types of radiation curable resins. Furthermore, radiation may be irradiated from the side of the molded resin substrate. There are various methods of transferring the information surface to the radiation curable resin, but the use of any method does not limit the effect of the present invention.
[0052] また、第 2の榭脂中間層 605、第 3の榭脂中間層 607についても、上記第 1の榭脂 中間層 603と同様の方法で作製することができる。  The second resin intermediate layer 605 and the third resin intermediate layer 607 can also be produced by the same method as the first resin intermediate layer 603.
[0053] <保護層>  <Protective Layer>
保護層 609は、記録再生光に対して略透明であることが好ましい。例えば、アクリル を主成分とした紫外線硬化性榭脂や、ある!ヽはエポキシ系の紫外線硬化性榭脂など の放射線硬化性榭脂などを用いることができる。ここでいう略透明とは、記録再生光 の波長に対して 90%以上の透過率を有することを意味しており、 95%以上の透過率 を有する材料がさらに好まし ヽ。  The protective layer 609 is preferably substantially transparent to the recording and reproducing light. For example, UV curable resins mainly composed of acrylics, or radiation curable resins such as UV curable epoxy resins can be used. The term "substantially transparent" as used herein means having a transmittance of 90% or more to the wavelength of recording / reproducing light, and a material having a transmittance of 95% or more is more preferable.
[0054] 保護層 609の形成方法としては、スピンコート法、スクリーン印刷法、グラビア印刷 法、インクジェット法などの種々の工法が考えられる。保護層 609の形成方法としては 、上述の榭脂中間層の作製工程と同じ工法を用いることができれば好ましい。例えば 榭脂中間層をインクジェット法により塗布した場合は、保護層の作成もインクジェット 法を用いることが最も好ましい。また、保護層の形成方法としては、放射線硬化性榭 脂の塗布による方法に限られず、例えばポリカーボネート榭脂や、アクリル榭脂など 力もなるシート状の材料を接着剤などを介して貼り合せることによって形成してもよい As a method of forming the protective layer 609, various methods such as a spin coating method, a screen printing method, a gravure printing method, and an ink jet method can be considered. As a method for forming the protective layer 609, it is preferable if the same method as the above-mentioned process for producing the resin intermediate layer can be used. For example, when the resin intermediate layer is applied by the ink jet method, it is most preferable to use the ink jet method also for the formation of the protective layer. Further, the method of forming the protective layer is not limited to the method of applying a radiation curable resin, and for example, a polycarbonate resin, a sheet-like material that also has a force such as an acrylic resin, may be bonded via an adhesive. May form
[0055] <各層の厚み > <Thickness of Each Layer>
また、本発明の実施の形態 1における多層情報記録媒体は、レーザ光 405nmの青 紫レーザを使用し、 NAが 0. 85の対物レンズを用いて保護層 609側力も各情報記 録層にビームを絞り込み記録再生を行う。ディスクの傾きの影響を軽減させるため、 保護層 609表面から、第 1の情報記録層 602までの厚みは約 0. 1mmに設定されて いる。 In addition, the multilayer information recording medium according to the first embodiment of the present invention uses a blue-violet laser with a laser beam of 405 nm, an objective lens with an NA of 0.85, and a protective layer 609 side information. The beam is narrowed to the recording layer to perform recording and reproduction. In order to reduce the influence of the disc tilt, the thickness from the surface of the protective layer 609 to the first information recording layer 602 is set to about 0.1 mm.
[0056] また、保護層 609の厚みは、保護層表面に付着したゴミゃ傷などにより各情報記録 層の記録再生特性に与える影響を軽減させるために、約 40 m以上に設定するの が好ましい。また、 50 m以上に設定するのがさらには好ましい。  The thickness of the protective layer 609 is preferably set to about 40 m or more in order to reduce the influence on the recording and reproduction characteristics of each information recording layer due to dust or the like attached to the surface of the protective layer. . In addition, it is more preferable to set to 50 m or more.
[0057] また第 1の榭脂中間層、第 2の榭脂中間層、第 3の榭脂中間層の厚みは、他層から のクロストークや干渉の影響を軽減させるためにそれぞれ異なる厚みに設定すること が好ましい。ここでは、それぞれの厚みを約 15 μ m、約 20 m、約 10 mに設計し た。また保護層の厚みは約 55 mに設定した。ただし、各榭脂中間層の厚みの設計 値は一例であり、別の厚み設計値においても本発明の効果には変わりはない。  In addition, the thicknesses of the first resin interlayer, the second resin interlayer, and the third resin interlayer may be different from each other in order to reduce the influence of crosstalk and interference from other layers. It is preferable to set. Here, each thickness was designed to be about 15 μm, about 20 m, and about 10 m. The thickness of the protective layer was set to about 55 m. However, the design value of the thickness of each resin intermediate layer is an example, and the effect of the present invention remains the same even with other thickness design values.
[0058] 以上、本発明の実施の形態 1における多層情報記録媒体の構成と製造方法の概 要について簡単に述べたように、本発明の多層情報記録媒体の製造方法は、榭脂 中間層または保護層の形成方法に特徴がある。そのため、その他の構成またはその 製造方法により本発明の範囲が制限されることは無い。  As described above, the structure of the multilayer information recording medium according to the first embodiment of the present invention and the outline of the method for manufacturing the multilayer information recording medium are briefly described. It is characterized in the method of forming the protective layer. Therefore, the scope of the present invention is not limited by the other configurations or the manufacturing method thereof.
[0059] <多層情報記録媒体の製造方法 >  <Method of Manufacturing Multilayer Information Recording Medium>
本発明の実施の形態 1に係るインクジヱット塗布装置を用いた多層情報記録媒体 の製造方法について説明する。特に、多層情報記録媒体を構成する榭脂中間層の 作製方法を中心に詳細に説明を行う。  A method of manufacturing a multilayer information recording medium using the ink jet coating apparatus according to the first embodiment of the present invention will be described. In particular, the method for producing the resin intermediate layer constituting the multilayer information recording medium will be described in detail.
[0060] 図 1は、本発明の実施の形態 1に係るインクジェット塗布装置の構成を示す概略図 である。また、図 1は、このインクジェット塗布装置を用いた放射線硬化性榭脂の塗布 及び放射線照射による硬化とからなる塗布及び照射工程の一例を示す図である。こ の塗布及び照射工程によって榭脂中間層を形成する。  FIG. 1 is a schematic view showing a configuration of an ink jet coating apparatus according to Embodiment 1 of the present invention. FIG. 1 is a view showing an example of a coating and irradiation process including coating of a radiation curable resin using the inkjet coating device and curing by radiation irradiation. A resin intermediate layer is formed by this application and irradiation process.
[0061] <インクジェット塗布装置の構成 >  <Configuration of Inkjet Coating Apparatus>
このインクジェット塗布装置は、図 1に示すように、インクジェットヘッド 107と、塗布 対象物に対してインクジェットヘッド 107を矢印の方向に相対移動させる駆動部(図 示せず)とからなる。インクジェットヘッド 107には、インクジェットノズルユニット 104と 放射線照射手段 106とが放射線遮蔽板 105を挟んでそれぞれ固定されている。 [0062] まず、インクジェットヘッド 107の各構成部材について説明する。 As shown in FIG. 1, the inkjet coating apparatus includes an inkjet head 107 and a drive unit (not shown) for moving the inkjet head 107 relative to the application target in the direction of the arrow. The ink jet nozzle unit 104 and the radiation irradiating means 106 are fixed to the ink jet head 107 with the radiation shielding plate 105 interposed therebetween. First, each component of the ink jet head 107 will be described.
インクジェットノズルユニット 104には、少なくとも 1つ以上のインクジェットノズルが設 けられている。このインクジェットノズルは、印字もしくは描画用の印刷機に用いられる ものを用いてもよい。インクジェットノズルは、顔料や染料などを主成分とするインクの 微小液滴を吐出することができる。このインクジェット技術では、できるだけ微小な液 滴、例えば数 pL程度の液滴を生成し、その液滴を高精度に滴下して、より解像度の 高い印刷を実現するように開発が進められている。し力しながら、本発明では 10〜2 The inkjet nozzle unit 104 is provided with at least one inkjet nozzle. As this inkjet nozzle, one used for a printing machine for printing or drawing may be used. The ink jet nozzle can discharge minute droplets of ink mainly composed of pigment, dye and the like. With this ink jet technology, development is in progress to generate droplets as small as possible, for example, droplets of about several pL, and drop the droplets with high accuracy to realize printing with higher resolution. 10 to 2 in the present invention while
0 m程度の比較的厚い榭脂層を形成する必要があるため、むしろできる限り大きな 液滴を吐出できるインクジェットノズルを用いるのが好ましい。例えば、数十 pL程度の 大きな液滴を吐出できるインクジェットノズルを用いることが好ましい。現在、一般的に 入手できる印刷機用インクジェットノズルには、微小液滴の体積が 5〜50pL程度、吐 出できる対応榭脂粘度が吐出部周辺において 5〜50mPa' s程度、動作周波数とし て lkHz〜20kHz程度のものがある。 Since it is necessary to form a relatively thick resin layer of about 0 m, it is preferable to use an ink jet nozzle capable of discharging a droplet as large as possible. For example, it is preferable to use an ink jet nozzle capable of discharging large droplets of about several tens pL. At present, ink jet nozzles for printing machines generally available generally have a volume of microdroplets of about 5 to 50 pL, a corresponding resin viscosity capable of discharging about 5 to 50 mPa's around the discharge part, and an operating frequency of 1 kHz. There is about 20 kHz.
[0063] 図 5 (a)及び (b)は、インクジェットノズルの代表的な構成例の断面図である。なお、 図では、吐出される吐出液の供給路や液タンク等は省略されている。図 5 (a)は、圧 電素子などの振動素子 502により吐出液 501を押し出して吐出を行うタイプで、ピエ ゾ方式インクジェットノズルと呼ばれる。図 5 (b)は、ヒータ 503を用いて瞬時に吐出液 を沸騰させて、ヒータ近傍の吐出液 504の体積膨張を動力源として吐出を行うタイプ で、サーマル方式と呼ばれる。  FIGS. 5 (a) and 5 (b) are cross-sectional views of a typical configuration example of the ink jet nozzle. In the figure, the supply path of the discharged liquid to be discharged, the liquid tank and the like are omitted. FIG. 5 (a) shows a type in which the ejection liquid 501 is ejected and ejected by a vibration element 502 such as a piezoelectric element, and is called a piezo inkjet nozzle. FIG. 5 (b) is a type in which the discharge liquid is instantaneously boiled using the heater 503 and discharge is performed using the volumetric expansion of the discharge liquid 504 in the vicinity of the heater as a power source, and is called a thermal method.
[0064] なお、ここでは 1つのインクジェットノズルを用いたインクジェットヘッドにつ!、て説明 したが、これに限られず、複数のインクジェットノズルを設けてもよい。例えば、図 7 (a) のように、インクジェットヘッドの走査方向に対して垂直方向に複数のインクジェットノ ズルを一列に並べ、インクジェットヘッド列を設ける構成としてもよい。また、図 7 (b)の ように、さらに走査方向に複数列並べる方法、あるいは図 7 (c)のようにノズルの位置 を少しずつずらしながら複数列並べる方法などがある。  Although an inkjet head using one inkjet nozzle has been described here, the present invention is not limited to this, and a plurality of inkjet nozzles may be provided. For example, as shown in FIG. 7A, a plurality of inkjet nozzles may be arranged in a line in the direction perpendicular to the scanning direction of the inkjet head, and an inkjet head array may be provided. Further, as shown in FIG. 7 (b), there is a method of arranging a plurality of lines in the scanning direction, or a method of arranging a plurality of lines while slightly shifting the positions of the nozzles as shown in FIG. 7 (c).
[0065] 本発明の実施の形態 1のインクジェットヘッド 107では、塗布対象物である成形榭 脂基板 101の直径である 120mmの長さを一度に塗布できるように、走査方向に対し て垂直な方向に少なくとも一列、 120mm以上の幅で複数のインクジェットノズルを直 線状に並べる構成が望ま 、。 In the inkjet head 107 according to the first embodiment of the present invention, a direction perpendicular to the scanning direction can be applied so that a length of 120 mm, which is the diameter of the molded resin substrate 101 to be applied, can be applied at one time. At least one row, with a width of 120 mm or more A configuration that arranges linearly is desirable.
[0066] そこで、本発明の実施の形態 1におけるインクジェット塗布装置では、 1滴の吐出量 力 OpL、駆動周波数 7kHzのインクジェットノズルを用い、図 8に示すように 70 /z mピ ツチで走査方向に対して垂直方向に 1800個のインクジェットノズル 801を直線状に 並べたインクジェットノス、ノレユニット 802を用いた。このインクジェットノズルは 5〜50m Pa' s程度の粘度の榭脂であれば、安定して 1滴 40pLを吐出することが可能である。  Therefore, in the ink jet coating apparatus according to the first embodiment of the present invention, an ink jet nozzle with an ejection force force OpL of 1 droplet and a driving frequency of 7 kHz is used, as shown in FIG. 8, in the scanning direction at 70 / zm pitch. On the other hand, an ink jet nozzle, Nore unit 802, in which 1,800 ink jet nozzles 801 were arranged in a straight line in the vertical direction, was used. If the ink jet nozzle is a resin having a viscosity of about 5 to 50 mPa's, it is possible to stably eject 40 pL of one drop.
[0067] なお、ここでは図 8に示すようなインクジェットノズルユニットを用いた力 図 11 (a)に 示すようなインクジェットノズルユニットを用いてもよい。この場合には、インクジェット ヘッドを走査方向に対して垂直な方向に移動させ、数回基板上を走査することによつ て全面に塗布できる。この場合には、走査方向に対して垂直方向にインクジェットへ ッドを移動させる機構が必要となる。  Here, it is also possible to use an ink jet nozzle unit as shown in FIG. 11 (a), which uses an ink jet nozzle unit as shown in FIG. In this case, the ink jet head can be moved in a direction perpendicular to the scanning direction, and the entire surface can be coated by scanning the substrate several times. In this case, a mechanism for moving the inkjet head in the direction perpendicular to the scanning direction is required.
[0068] なお、図 8や図 11 (b)に示すように、塗布対象物である成形榭脂基板の走査方向 に対して垂直方向の長さ、すなわち基板の直径よりも長いインクジェットノズルュ-ッ トを用いることが好ましい。これによつて、 1回の走査によって基板全面に榭脂を塗布 することができる。  As shown in FIG. 8 and FIG. 11 (b), the length in the direction perpendicular to the scanning direction of the molded resin substrate to be coated, ie, the ink jet nozzle having a length longer than the diameter of the substrate. It is preferable to use Thus, the resin can be applied to the entire surface of the substrate by one scan.
[0069] 次いで、放射線照射手段 106について説明する。  Next, the radiation irradiating means 106 will be described.
放射線照射手段 106は、放射線源と、放射線源から発生する放射線を、塗布対象 物である成形榭脂基板 101側へ導く光路とから構成されている。放射線源としてここ では紫外線ランプを用いる。さらに紫外線ランプとしてはメタルノヽライドランプや高圧 水銀ランプ、キセノンランプなどの種々のランプを用いることができる。ここではキセノ ンランプを用いる。ただし、塗布に用いる放射線硬化性榭脂に合わせて、照射する放 射線の波長などを選択する必要があり、使用する放射線源及びランプの種類は上記 の例に限られるものではない。  The radiation irradiating means 106 is composed of a radiation source and an optical path for guiding the radiation generated from the radiation source to the side of the molded resin substrate 101 which is an object to be coated. Here, an ultraviolet lamp is used as a radiation source. Furthermore, various lamps such as a metal halide lamp, a high pressure mercury lamp and a xenon lamp can be used as the ultraviolet lamp. Here, a xenon lamp is used. However, it is necessary to select the wavelength of radiation to be applied, etc. according to the radiation curable resin used for coating, and the types of radiation source and lamp to be used are not limited to the above examples.
[0070] また、放射線照射手段 106は、図 1に示すように、塗布対象物である成形榭脂基板 101に対して走査するインクジェットノズルユニット 104と共に、インクジェットノズルュ ニットの走査方向の後方に固定されている。この放射線照射手段 106を用いて、塗 布した放射線硬化性榭脂層に順次に放射線を照射する。  Further, as shown in FIG. 1, the radiation irradiating means 106 is fixed at the back of the scanning direction of the ink jet nozzle unit together with the ink jet nozzle unit 104 which scans the molded resin substrate 101 as the object to be coated. It is done. Radiation is sequentially applied to the applied radiation curable resin layer using the radiation irradiating means 106.
[0071] 放射線遮蔽板 105は、放射線照射手段 106によって照射される放射線が、インクジ エツトノズル 104側に漏れこむのを防いでいる。すなわち、この放射線遮蔽板 105に よって、インクジェットノズルから吐出された放射線硬化性榭脂の液滴が塗布される 前に、放射線照射ユニットから照射する放射線が照射されることを防ぐことができる。 The radiation shielding plate 105 is configured so that the radiation irradiated by the radiation irradiating means 106 is an ink It prevents leakage to the nozzle 104 side. That is, the radiation shielding plate 105 can prevent irradiation of radiation emitted from the radiation irradiation unit before the droplets of the radiation curable resin discharged from the ink jet nozzle are applied.
[0072] 以上の構成により、このインクジェットヘッド 107を構成するインクジェットノズルュ- ット 104によって放射線硬化性榭脂 109が塗布される。次いで、塗布された放射線硬 化性榭脂 109には、インクジェットノズルユニット 104の後方に所定間隔で配置された 放射線照射手段 106によって、順次に放射線が照射される。塗布された放射線硬化 性榭脂のうち、放射線が照射された領域 110は硬化され、榭脂の流動が抑制される 。なお、放射線が照射された領域 110は完全硬化させてもよいが、完全に硬化させ ずにそれに準ずる状態にまで硬化させれば榭脂の流動を抑制することが可能となる 。ここでいう完全硬化に準ずる状態とは、ゲル状もしくは lOOOOmPa' s以上の粘度と なった状態を意味して 、る。  According to the above configuration, the radiation curable resin 109 is applied by the ink jet nozzle set 104 constituting the ink jet head 107. Next, radiation is sequentially applied to the applied radiation curable resin 109 by radiation irradiating means 106 disposed at a predetermined interval behind the ink jet nozzle unit 104. Of the applied radiation curable resin, the region 110 irradiated with radiation is cured to suppress the flow of the resin. The region 110 irradiated with the radiation may be completely cured, but if it is cured to a state equivalent thereto without being completely cured, the flow of the resin can be suppressed. The state according to complete curing as referred to herein means a gel-like state or a state having a viscosity of 100 OO mPa's or more.
[0073] 次に、駆動部について説明する。  Next, the drive unit will be described.
駆動部は、塗布対象物に対してインクジェットヘッド 107を相対移動させる。したが つて、駆動部によって塗布対象物とインクジェットヘッド 107の少なくとも一方を移動さ せればよい。例えば、駆動部によって、インクジェットヘッド 107を塗布対象物である 成形榭脂基板 101に対して直線的に走査してもよい。また、駆動部によって、成形榭 脂基板 101に対してインクジェットヘッド 107を一定速度で走査してもよ 、。このように 一定速度で走査することで、放射線硬化性榭脂の塗布後、一定時間経過後に放射 線を照射できる。塗布後、一定時間後に放射線を照射するので、放射線硬化性榭脂 の流動状態がほぼ同様の状態で硬化させることができる。例えば、放射線硬化性榭 脂の液滴が隣接する液滴と重なり合うようになる、いわゆるレべリングが生じた後に硬 ィ匕させることができる。これによつて、榭脂中間層の膜厚の均一性を向上させることが できる。  The drive unit moves the inkjet head 107 relative to the application target. Therefore, at least one of the application object and the inkjet head 107 may be moved by the drive unit. For example, the ink jet head 107 may be scanned linearly with respect to the molded resin substrate 101 which is the application object by the drive unit. Further, the inkjet head 107 may be scanned at a constant speed with respect to the molded resin substrate 101 by the drive unit. By scanning at a constant speed in this way, radiation can be irradiated after a predetermined time has elapsed after the application of the radiation curable resin. Since radiation is applied after a predetermined time after application, the flowable state of the radiation curable resin can be cured in substantially the same state. For example, it can be hardened after so-called leveling, in which droplets of the radiation curable resin become overlapped with adjacent droplets. This makes it possible to improve the uniformity of the resin intermediate layer thickness.
[0074] くインクジェット塗布装置を用いた放射線硬化性榭脂の塗布及び放射線の照射 > 上記のインクジエッド塗布装置を用いた放射線硬化性榭脂の塗布及び放射線の照 射について以下に説明する。  Application of Radiation-Curable Resin Using an Inkjet Coating Apparatus and Irradiation of Radiation> The application of radiation-curable resin using the above-described ink jet application apparatus and irradiation of radiation will be described below.
(a)まず、片面に第 1の情報記録層 102が形成された成形榭脂基板 101を真空吸着 によりステージ 103に固定する。なお、固定方法は真空吸着法に限られず、他の固 定方法を用いてもよい。成形榭脂基板 101の上方には、インクジェットノズルユニット 104と放射線照射手段 106とを有するインクジェットヘッド 107が配置されている。こ のインクジェットノズルユニット 104は、少なくとも 1つ以上のインクジェットノズルから構 成されている。また、成形榭脂基板 101を固定したステージ 103に対してインクジエツ トヘッド 107を相対移動させる駆動部(図示せず)が設けられている。インクジェットへ ッド 107と駆動部とによってインクジェット塗布装置が構成される。 (a) First, vacuum adsorption of the molded resin substrate 101 having the first information recording layer 102 formed on one side It fixes to stage 103 by. The fixing method is not limited to the vacuum adsorption method, and other fixing methods may be used. Above the molded resin substrate 101, an inkjet head 107 having an inkjet nozzle unit 104 and radiation irradiating means 106 is disposed. The inkjet nozzle unit 104 is composed of at least one or more inkjet nozzles. In addition, a driving unit (not shown) for moving the ink jet head 107 relative to the stage 103 to which the molded resin substrate 101 is fixed is provided. The inkjet head 107 and the drive unit constitute an inkjet coating apparatus.
なお、ここではステージ 103を固定し、インクジェットヘッド 107を平行移動させて塗 布を行う場合について説明を行うが、これに限られず、ステージ 103とインクジェット ヘッド 107が相対的に移動させればよい。また、逆にステージ 103を平行移動させて もよぐあるいは両者をそれぞれ移動させてもよい。  Although the case where the stage 103 is fixed and the inkjet head 107 is moved in parallel to perform coating is described here, the present invention is not limited thereto, and the stage 103 and the inkjet head 107 may be moved relative to each other. Conversely, the stage 103 may be moved in parallel or both may be moved.
(b)インクジェットヘッド 107をステージ 103に対して相対的に平行移動させながら、 インクジエツトノズルュ-ット 104から微小液滴となつた放射線硬化性榭脂 108を成形 榭脂基板 101上に滴下する。続いて、インクジェットノズルユニット 104の後方に所定 間隔で配置された放射線照射手段 106によって、塗布された放射線硬化性榭脂層 に放射線を順次に照射する。  (b) While moving the inkjet head 107 in parallel with respect to the stage 103, the radiation curable resin 108 which has become minute droplets from the ink jet nozzle die 104 is dropped onto the resin substrate 101. Do. Subsequently, radiation is sequentially applied to the applied radiation curable resin layer by radiation irradiating means 106 disposed at a predetermined interval behind ink jet nozzle unit 104.
以上の工程によって、放射線硬化性榭脂を塗布し、放射線を照射することができる  By the above process, radiation curable resin can be applied and radiation can be irradiated.
[0075] <インクジェット塗布装置における条件 > <Conditions for Ink Jet Coating Apparatus>
次に、このインクジェット塗布装置における各条件について検討する。  Next, each condition in this inkjet coating device is examined.
このインクジェットヘッド 107を用いて、粘度の異なる 3種類の放射線硬化性榭脂の 塗布及び放射線の照射を行った。この場合において、インクジェットヘッドの成形榭 脂基板に対する走査速度を 0. 5mZsに固定して、インクジェットノズルユニットと放 射線照射手段との間隔を 20mn!〜 150mmに設定して塗布を行った。放射線の照 射は、照度が約 200miZcm2の設定で紫外線を照射した。この結果について下記 の表 1に示す。なお、上記の放射線の照射における照度では完全に榭脂は硬化しな い。しかし、榭脂の流動そのものをある程度抑制できるレベルである。 Using this inkjet head 107, application and radiation of three types of radiation curable resins with different viscosities were performed. In this case, the scanning speed for the molded resin substrate of the ink jet head is fixed at 0.5 mZs, and the distance between the ink jet nozzle unit and the radiation irradiating means is 20 mn! The application was performed by setting to 150 mm. The radiation was irradiated with ultraviolet light at a setting of about 200 miZcm 2 . The results are shown in Table 1 below. The resin does not cure completely at the above-mentioned irradiation intensity of radiation. However, the flow of resin itself can be suppressed to a certain extent.
[0076] それぞれの条件において塗布後の榭脂層の厚みの平均値と、面内の厚みばらつ き、および塗布領域の内縁部あるいは外縁部における榭脂のはみ出し程度も確認し た。なお、塗布厚みのばらつきとして、 ± 2 mを合否判定の基準値として設けた。 Under the respective conditions, the average value of the thickness of the resin layer after application and the thickness variation in the surface Also, the extent to which the resin spreads out at the inner edge or the outer edge of the coated area was also confirmed. In addition, as dispersion | variation in application | coating thickness, +/- 2 m was provided as a reference value of the pass / fail judgment.
[0077] また、インクジェットヘッドのインクジェットノズルユニットから放射線硬化性榭脂の塗 布が行われ、塗布された放射線硬化樹脂にインクジェットヘッドの放射線照射手段か ら順次に放射線が照射されるまでの時間を算出した。この「塗布後、照射までの時間 」は、「ノズルと放射線照射手段の間隔」を「走査速度」で除した値として算出した。 Also, the radiation curable resin is applied from the inkjet nozzle unit of the inkjet head, and the time until the radiation curable resin applied is sequentially irradiated with radiation from the radiation irradiating means of the inkjet head is applied. Calculated. The "time between application and irradiation" was calculated as "the distance between the nozzle and the radiation irradiating means" divided by the "scanning speed".
[0078] [表 1] [Table 1]
Figure imgf000027_0001
表 1の結果から、榭脂粘度が 5mPa' sの榭脂 Aでは、インクジェットノズルと放射線 照射手段との間隔が 150mmの条件では、塗布領域の内縁部、および外縁部ともに 塗布した榭脂がはみ出しているのを確認した。また、インクジェットノズルと放射線照 射手段との間隔が 120mm以下の条件では、厚みばらつきおよび榭脂のはみ出しと もに問題なかった。
Figure imgf000027_0001
According to the results in Table 1, in case of resin A having a resin viscosity of 5 mPa's, when the distance between the ink jet nozzle and the radiation irradiating means is 150 mm, the resin applied to both the inner edge and the outer edge of the coated area protrudes I confirmed that. Also, ink jet nozzles and radiation Under the condition of 120 mm or less, there was no problem with thickness variation and resin protrusion.
[0080] 榭脂粘度 20mPa · sの榭脂 Bでは、インクジェットノズルユニットと放射線照射手段と の間隔が 120mm以下の条件において、面内の厚みばらつきも基準値内で樹脂の はみ出しも確認されな力つた。インクジェットノズルユニットと放射線照射手段との間 隔が 150mmとなると厚みばらつきが基準値を超え、また塗布領域の外縁部に一部 榭脂のはみ出しを確認した。  For resin B having a resin viscosity of 20 mPa · s, under conditions where the distance between the ink jet nozzle unit and the irradiation means is 120 mm or less, in-plane thickness variation and resin protrusion within a reference value are also confirmed. It was When the distance between the ink jet nozzle unit and the radiation irradiating means was 150 mm, the thickness variation exceeded the reference value, and it was confirmed that a part of the resin was protruding at the outer edge of the coated area.
[0081] 榭脂粘度 50mPa · sの榭脂 Cでは、インクジェットノズルユニットと放射線照射手段と の間隔が 120mm以下の条件で、厚みばらつきも基準値内で樹脂のはみ出しも確認 されなかった。インクジェットノズルユニットと放射線照射手段との間隔が 150mmで は外周部の一部に榭脂のはみ出しが確認された力 それ以外の場合はほとんど問 題がな力つた。  In the case of resin C having a resin viscosity of 50 mPa · s, neither thickness variation nor resin protrusion was confirmed within the reference value under the condition that the distance between the ink jet nozzle unit and the irradiation means was 120 mm or less. When the distance between the ink jet nozzle unit and the radiation irradiating means was 150 mm, the force that resin protrusion was confirmed at a part of the outer periphery was hardly a problem in other cases.
[0082] 以上の結果から、インクジェットノズルで吐出可能な榭脂粘度範囲 5mPa' s〜50m Pa' sにおいて、インクジェットノズルユニットと放射線照射手段との間隔を 120mm以 下に設定することで、均一な榭脂層の塗布ができることを確認した。さらにインクジェ ットノズルユニットと放射線照射手段との間隔を 50mm以下とするとより品質が向上す るため望ましい。  From the above results, in the resin viscosity range of 5 mPa's to 50 mPa's that can be discharged by the ink jet nozzle, setting the distance between the ink jet nozzle unit and the radiation irradiating unit to 120 mm or less makes uniform. It was confirmed that the resin layer could be applied. Further, it is desirable to set the distance between the ink jet nozzle unit and the radiation irradiating means to 50 mm or less because the quality is further improved.
[0083] くインクジェットノズルユニットと放射線照射手段との間隔について >  Regarding the distance between the ink jet nozzle unit and the radiation irradiating means>
このインクジェット塗布装置では、インクジェットヘッドにインクジェットノズルユニット と放射線照射手段とを所定間隔で離間させて配置して 、ることを特徴とする。すなわ ち、放射線硬化性榭脂を塗布後、順次に放射線を照射して硬化させることができる。 この場合、塗布された放射線硬化性榭脂の液滴は、流動して隣接する液滴と重なり 合うようになる、いわゆるレべリングが生じた後、さらに流動して拡がってしまうため、そ の後は厚さが次第に減少していく。このインクジェット塗布装置では、塗布後、液滴が レべリングした後に順次に放射線を照射して硬化させる。このため、放射線硬化性榭 脂の塗布後、放射線の照射までの時間が重要となる。  This inkjet coating apparatus is characterized in that the inkjet nozzle unit and the radiation irradiating means are disposed apart from each other at a predetermined interval in the inkjet head. That is, after the radiation curable resin is applied, it can be cured by irradiation with radiation sequentially. In this case, the droplets of the radiation curable resin that has been applied flow and overlap with the adjacent droplets, and after so-called leveling occurs, the droplets further flow and spread. After that, the thickness gradually decreases. In this inkjet coating apparatus, after coating, after the droplets are leveled, radiation is sequentially applied for curing. For this reason, the time from the application of the radiation curable resin to the irradiation of the radiation becomes important.
[0084] そこで、「塗布後、照射までの時間」について検討する。  Then, “time to irradiation after application” is examined.
(a)まず、インクジェットノズルの下端カゝら塗布対象物である成形榭脂基板の表面ま での距離、すなわちワーキングディスタンス WD (m)と、放射線硬化性榭脂の吐出速 度 V (m/s)とする。なお、ワーキングディスタンス WD (m)は、およそ、 (a) First of all, the lower end of the ink jet nozzle and the surface of the molded resin substrate to be coated are The working distance WD (m) and the discharge speed of radiation curable resin V (m / s). The working distance WD (m) is approximately
0. 001 (m)≤ WD ≤0. 01 (m) 0. 001 (m) WD WD ≤ 0. 01 (m)
となる。また、放射線硬化性榭脂の吐出速度 V (mZs)は、粘度が5〜50 (111?& ' 3) の範囲にある場合には、およそ It becomes. In addition, when the viscosity V of the radiation curable resin V (mZs) is in the range of 5 to 50 (111? & '3)
1 (m/s)≤ V ≤6 (m/s) 1 (m / s) ≤ V ≤ 6 (m / s)
となる。 It becomes.
(b)上記ワーキングディスタンス WDと吐出速度 Vとにより、  (b) By the working distance WD and the discharge speed V,
Ti=WD/V (s) Ti = WD / V (s)
上記 Ti (s)が放射線硬化性榭脂を吐出してカゝら塗布対象物に付着するまでの時間 である。さらに、上記のワーキングディスタンス WD及び吐出速度 Vの範囲を用いるとIt is the time until the Ti (s) discharges the radiation curable resin and adheres to the object to be coated. Furthermore, using the above working distance WD and discharge speed V ranges
、付着までの時間 Tiは、 , Time to adhesion Ti,
0. 00017 (s)≤ Ti ≤0. 01 (s)  0. 00017 (s) ≤ Ti ≤ 0. 01 (s)
となる。 It becomes.
(c)次に、放射線硬化性榭脂が流動してレべリングするまでの時間 T1に関しては、放 射線硬化性榭脂の物性に異存するが、およそ 0. 01 (s)程度となる。  (c) Next, with regard to the time T1 until the radiation curable resin flows and leveling, it varies depending on the physical properties of the radiation curable resin, but it becomes about 0. 01 (s) or so.
(d)放射線硬化性榭脂がレべリングした後に放射線を照射して硬化させるためには、 0. 01017 (s)≤ Ti+Tl ≤0. 02 (s)  (d) In order to cure by irradiation with radiation after leveling of the radiation curable resin, 0. 01007 (s) ≤ Ti + Tl ≤ 0.2 (s)
となる。 It becomes.
(d)そこで、放射線硬化性榭脂の塗布後、放射線の照射までの時間として、レベリン グが生じるまでの時間とすると、  (d) Therefore, after application of the radiation curable resin, the time until irradiation occurs is the time until leveling occurs:
0. 01 (s)≤ (塗布後、照射までの時間) ≤0. 02 (s)  0. 01 (s) ≤ (Time to irradiation after application) ≤ 0. 02 (s)
と見積もることができる。すなわち、「塗布後、照射までの時間」の下限値としては、お よそ 0. Olsecと見積もることができる。 It can be estimated. That is, the lower limit value of "time to irradiation after application" can be estimated to be approximately 0. Olsec.
さらに、「塗布後、照射までの時間」の上限値については、表 1を参照すると、およそ 0. 24secまでは許容されることがわかる。そこで、「塗布後、照射までの時間」の上限 値は実施例の結果から、 0. 25secと見積もることができる。  Furthermore, as to the upper limit value of "time to application and irradiation", it can be seen that, according to Table 1, it is acceptable up to about 0.24 sec. Therefore, the upper limit value of "time to irradiation after application" can be estimated to be 0.25 sec from the result of the example.
以上の結果から、「塗布後、照射までの時間」は、 0. 01sec〜0. 25secの範囲が 好ましい。 From the above results, the "time until application after application" is in the range of 0.1 sec to 0.25 sec. preferable.
[0086] <成形榭脂基板に対するインクジェットヘッドの走査速度 >  <Scanning Speed of Ink Jet Head to Molded Resin Substrate>
以上の結果から、均一な榭脂層の形成ができることが分力つたが、本発明の実施の 形態 1における榭脂中間層の厚みは、 10 m〜20 mの範囲で形成しなければな らないので、より塗布厚みが厚くなるように塗布を行わなければならない。そこで、榭 脂粘度 20mPa' sの榭脂 Bを用いて、インクジェットノズルと放射線照射手段の間隔を 50mmに設定した場合にぉ ヽて、成形榭脂基板に対するインクジェットヘッドの走査 速度を変化させたときの結果を下記の表 2に示す。表 2では、塗布厚みの変化、厚み ばらつき、榭脂のはみだし、塗布後、照射までの時間について示す。  From the above results, it was found that the formation of a uniform resin layer was possible, but the thickness of the resin intermediate layer in Embodiment 1 of the present invention should be in the range of 10 m to 20 m. There is no need to apply so as to make the coating thickness thicker. Therefore, when the distance between the ink jet nozzle and the radiation irradiating means is set to 50 mm using resin B having a resin viscosity of 20 mPa's, the scanning speed of the ink jet head with respect to the molded resin substrate is changed. The results are shown in Table 2 below. Table 2 shows the change in coating thickness, thickness variation, swelling of resin, and time to irradiation after coating.
[0087] [表 2]  [Table 2]
Figure imgf000030_0001
Figure imgf000030_0001
[0088] インクジェットヘッドの成形榭脂基板に対する走査速度を遅くするにつれて、滴下さ れる微少液滴は重なり合うように成形榭脂基板上に塗布される。また、滴下される榭 脂の総量は走査速度に反比例する。表 2の結果をみても、ほぼ走査速度に反比例し て塗布厚みが大きくなつていることが確認できた。また、特に気泡の嚙み込みなども 見受けられな力つた。 As the scanning speed of the inkjet head with respect to the molded resin substrate is reduced, the dropped microdroplets are applied onto the molded resin substrate in an overlapping manner. In addition, the total amount of the dropped resin is inversely proportional to the scanning speed. From the results in Table 2, it was also confirmed that the coating thickness increased in inverse proportion to the scanning speed. In addition, I was not able to see the entrapment of air bubbles in particular.
[0089] このようにインクジェットヘッドの構成を変えずに成形榭脂基板に対するインクジエツ トヘッドの走査速度を適宜に変化させることによって、ある程度の厚み制御が可能と なる。そのため、第 1の榭脂中間層、第 2の榭脂中間層、第 3の榭脂中間層の厚み設 計に応じて、この走査速度を微調整することによって、所望の榭脂中間層厚みを実 現できる。 [0090] また、このインクジェット塗布装置による放射線硬化性榭脂の塗布の後、転写スタン パの情報面の転写工程が続くため、放射線硬化性榭脂の塗布時における放射線の 照射量は、完全に硬化する放射線照射量よりも少ない照射量を用いる必要がある。 ここでは、放射線照射手段の放射線照度を 200mjZcm2程度にした。この条件では 、塗布後の放射線硬化性榭脂層表面に軽く粘着性が残ることを確認した。また、図 1 0 (a)〜 (d)を用いて説明した転写スタンパの情報面の転写工程を用いて、溝転写を 行ったところ、元となる転写スタンパの溝深さに対して、転写された放射線硬化性榭 脂層の溝深さは約 97%であった。この値は転写性としては十分な値である。 As described above, by appropriately changing the scanning speed of the ink jet head with respect to the molded resin substrate without changing the configuration of the ink jet head, it is possible to control the thickness to some extent. Therefore, according to the thickness design of the first resin middle layer, the second resin middle layer, and the third resin middle layer, the desired resin middle layer thickness can be obtained by finely adjusting this scanning speed. Can be realized. Further, since the transfer process of the information surface of the transfer stamper is continued after the application of the radiation curable resin by the ink jet coating apparatus, the radiation dose at the time of application of the radiation curable resin is completely determined. It is necessary to use a smaller dose than the curing dose. Here, the irradiance of the radiation irradiating means was about 200 mj Zcm 2 . Under these conditions, it was confirmed that light and tackiness remained on the surface of the radiation curable resin layer after application. Further, when groove transfer is performed using the transfer process of the information surface of the transfer stamper described with reference to FIGS. 10A to 10D, the transfer is performed with respect to the groove depth of the original transfer stamper. The groove depth of the radiation curable resin layer was about 97%. This value is sufficient for transferability.
[0091] <インクジエッド塗布装置の別の構成例 >  <Another Example of Configuration of Ink Jet Coating Apparatus>
次に、本発明の実施の形態 1に係るインクジェット塗布装置の別の構成例について 、図 9 (a)及び (b)を用いて説明する。図 9 (a)及び (b)は、塗布対象物に対するイン クジェットヘッドの相対移動方向の前方側及び後方側のそれぞれに放射線照射手段 を有するインクジェットヘッドの構成を示す概略図である。なお、インクジェットノズル ユニットは図 8に示した物と同様の構成のものを用いることができる。このインクジエツ トヘッドを用いて、複数回の重ね塗りをすることで 10 m〜20 mの厚みを実現する ことができる。  Next, another configuration example of the ink jet application apparatus according to the first embodiment of the present invention will be described with reference to FIGS. 9 (a) and 9 (b). FIGS. 9 (a) and 9 (b) are schematic views showing the configuration of an ink jet head having radiation irradiating means on the front side and the rear side of the relative movement direction of the ink jet head with respect to the object to be coated. The ink jet nozzle unit may have the same configuration as that shown in FIG. By using the ink jet head, a thickness of 10 m to 20 m can be realized by performing multiple coats.
[0092] このインクジェットヘッドは、図 9 (a)及び(b)に示すように、インクジェットノズルュ- ット 904とインクジェットノズルユニットの走査方向に対して前方側及び後方側のそれ ぞれに放射線照射手段 906を有する。放射線照射手段 906は、光源である放射線ラ ンプ 905から発する放射線を成形榭脂基板 901側に導く経路が 2つに分岐し、インク ジェットノズルユニットの走査方向に対して前後に配置した。また、放射線照射手段 9 06の 2つの射出口にはそれぞれシャツタ 907、 908が設けられている。このインクジェ ットヘッドによれば、インクジェットノズルユニットの前後に放射線照射手段が配置され ているので、直線状に走査させた場合に、走査方向を反転させる際にもインクジェット ヘッド自体を回転させる必要がな 、。  As shown in FIGS. 9 (a) and 9 (b), this inkjet head emits radiation to each of the front and rear sides with respect to the scanning direction of the inkjet nozzle seat 904 and the inkjet nozzle unit. Irradiation means 906 is provided. In the radiation irradiating means 906, the route for guiding the radiation emitted from the radiation lamp 905, which is a light source, to the side of the molded resin substrate 901 is branched into two, and arranged in front and back with respect to the scanning direction of the ink jet nozzle unit. In addition, the shutters 907 and 908 are provided at the two injection ports of the radiation irradiating means 906 respectively. According to this ink jet head, since the radiation irradiating means is disposed before and after the ink jet nozzle unit, it is not necessary to rotate the ink jet head itself when reversing the scanning direction when scanning linearly. .
[0093] まず 1回目の塗布を行う際(図 9 (a) )は、インクジェットノズルユニットの進行方向の 前方側の放射線照射手段のシャツタ 907を閉じ、逆に後方側のシャツタ 908を開けて 、インクジェットノズルの走査方向に対して後方側の放射線照射手段だけを有効にし ておく。それによつて 1回目の塗布及び照射工程を行った後、インクジェットヘッドは 先程とは逆方向に成形榭脂基板を走査していく(図 9 (b) )。このとき放射線照射手段 は、走査方向に対して前方側のシャツタ 908を閉じて、後方側のシャツタ 907を開け て、インクジェットノズルの走査方向に対して後方側の放射線照射手段だけを有効に しておく。この動作を繰り返すことで、数度の重ね塗りが可能となる。 First, when the first application is performed (FIG. 9 (a)), the shutter 907 of the radiation irradiating means on the front side in the direction of movement of the ink jet nozzle unit is closed, and the shutter 908 on the rear side is opened. Only the radiation irradiating means on the back side with respect to the scanning direction of the inkjet Keep it. Thus, after the first coating and irradiation process, the ink jet head scans the molded resin substrate in the opposite direction to the above (Fig. 9 (b)). At this time, the radiation irradiating means closes the shutter 908 on the front side with respect to the scanning direction and opens the shirt 907 on the rear side to make only the radiation irradiating means on the rear side with respect to the scanning direction of the ink jet nozzle effective. deep. By repeating this operation, it is possible to coat several times.
[0094] 表 3に榭脂粘度 20mPa' sの榭脂 Bを用い、インクジェットノズルユニットとその前後 に配置した放射線照射手段との間隔をそれぞれ 50mmに設定した場合における塗 布厚みの結果を示す。  Table 3 shows the results of coating thickness when resin B having a resin viscosity of 20 mPa's is used and the distance between the ink jet nozzle unit and the radiation irradiating means disposed before and after it is set to 50 mm.
[0095] [表 3]  [Table 3]
Figure imgf000032_0001
Figure imgf000032_0001
[0096] 表 3の結果より、塗布厚みは重ねた層数分ほぼ比例して厚く塗布できていることを 確認した。また特に気泡の嚙み込みや、塗布領域の内縁部 ·外縁部における榭脂の はみ出し等もな力つた。また、厚み分布は、重ねて塗布していくので走査回数を増や す程ばらつきは大きくなる傾向にある。しかし、この条件で塗布すれば、厚み約 8 m 〜23 μ mまでの塗布は問題なく実現出来る。 From the results in Table 3, it was confirmed that the coating thickness was thick enough to be applied approximately in proportion to the number of layers stacked. In addition, the bubbles were especially absorbed, and the resin was pushed out at the inner and outer edges of the application area. In addition, thickness distribution tends to increase as the number of scans increases because coating is repeated. However, if the coating is performed under these conditions, coating to a thickness of about 8 m to 23 μm can be realized without any problem.
[0097] またここでは放射線照射手段における放射線照射量は全ての走査で 200mjZcm 2—定で実験を行ったが、榭脂層の塗布後の溝転写の工程を考慮すると、このよう〖こ 複数回の塗布及び照射工程を繰り返す場合、少なくとも最後の塗布及び照射工程 における放射線の照射量を調整して放射線硬化性榭脂が完全に硬化しない状態に すればよい。  In this case, the experiment was carried out with a radiation dose of 200 mj Zcm 2 constant for all scans in this case, but considering the groove transfer process after application of the resin layer, it is possible to repeat this process several times. When the coating and irradiation steps are repeated, the radiation dose in at least the final coating and irradiation steps may be adjusted to ensure that the radiation curable resin does not completely cure.
[0098] 例えば、 3回走査する場合、 1回目及び 2回目の塗布及び照射工程では、放射線を lOOOmiZcm2と設定し、ほぼ完全に放射線硬化性榭脂を硬化させる。一方、最後 の 3回目の塗布及び照射工程では、 200mjZcm2の照射量にして放射線硬化性榭 脂を完全に硬化させずに溝転写を容易にする方法などがある。また、この放射線照 射量は放射線出射口に設けられたシャツタの開口率で増減させるのが容易である。 [0098] For example, when scanning 3 times, in the first and second coating and irradiation steps, radiation was set to LOOOmiZcm 2, to cure the almost completely radiation-curable榭脂. Meanwhile, the last In the third coating and irradiation step, there is a method of facilitating the groove transfer without completely curing the radiation curable resin with an irradiation amount of 200 mj and Z cm 2 . Moreover, it is easy to increase / decrease this radiation exposure amount by the aperture ratio of the shirt provided at the radiation exit.
[0099] また、例えば、 3回走査して 3回の塗布及び照射工程を行う場合、 1回目及び 2回目 の塗布及び照射工程では、放射線を lOOOiuJ/m2と設定し、ほぼ完全に放射線硬 化性榭脂を硬化させておく。一方、最後の 3回目の塗布及び照射工程では、 Omj/c m2の照射量、すなわち放射線を照射しないようにしてもよい。この場合、放射線硬化 性榭脂の最表面が未硬化のままであるので溝転写を容易にすることができる。この場 合にも上述の方法と同様の効果が得られる。 Also, for example, in the case of performing three coating operations and three application processes and irradiation processes, in the first and second application and irradiation processes, the radiation is set as lOOOiuJ / m 2 and the radiation hardening is almost completely performed. The curable resin is allowed to cure. On the other hand, in the third application and irradiation step, the irradiation amount of Omj / cm 2 , that is, radiation may not be applied. In this case, groove transfer can be facilitated because the outermost surface of the radiation curable resin remains uncured. Also in this case, the same effect as the method described above can be obtained.
[0100] また、複数回の塗布及び照射工程を行って複数種類の榭脂の塗布を行ってもよ!ヽ 例えば、成形榭脂基板ある!ヽは第 1の情報記録層に対して良好な密着性を有する 榭脂 Eと、転写スタンパに対して良好な剥離性を有する榭脂 Fで重ね塗りを行った。 この層構成にすると、その後の溝転写工程が容易となり好ましい。この場合の塗布結 果を表 4に示す。  Also, it is possible to carry out a plurality of coating and irradiation steps to apply a plurality of types of resin! For example, there is a molded resin substrate! The film is better than the first information recording layer Overcoating was performed with resin E having adhesiveness and resin F having good releasability with respect to the transfer stamper. This layer configuration is preferable because it facilitates the subsequent groove transfer process. The application results in this case are shown in Table 4.
[0101] [表 4] [0101] [Table 4]
Figure imgf000033_0001
以上の結果から、放射線硬化性榭脂として 2種類の榭脂を用いても、複数回の塗 布でほぼ比例して厚みが増えていることが確認された。また、複数回の塗布及び照 射工程のうち、最後の榭脂 Fの塗布及び照射工程において、放射線照射量を完全 に硬化しな 、照射量まで落として塗布を行ってもょ 、。このように完全硬化させな ヽ 状態とすることで、その後の溝転写性が良好となるため好ましい。また、榭脂 Fの塗布 及び照射工程で、放射線照射量を 0mi/Cm2、すなわち放射線を照射しないように しても同様の効果が得られる。
Figure imgf000033_0001
From the above results, it was confirmed that even if two types of resins were used as the radiation curable resin, the thickness was increased in proportion to the number of times of coating. In the last coating and irradiation steps of the coating and irradiation steps, the radiation amount may not be completely cured but may be dropped to the irradiation amount. It is preferable to set the state in which the film is not completely cured as described above, since the groove transferability after that becomes good. Also, application of resin F The same effect can be obtained by setting the radiation dose to 0 mi / C m 2 , that is, without radiation, in the radiation process.
[0103] また、ここでは第 1の榭脂中間層の作製工程について説明してきたが、これに限ら れず、第 2の榭脂中間層、第 3の榭脂中間層の作製工程に用いてもよい。この場合 にも本発明の効果は有効であり、全ての榭脂中間層の作製工程で効果を有する。  Furthermore, although the process for producing the first resin intermediate layer has been described here, the present invention is not limited to this, and it may be used for the process for producing the second resin intermediate layer and the third resin intermediate layer. Good. Also in this case, the effect of the present invention is effective, and has an effect in the preparation steps of all the resin intermediate layers.
[0104] (実施の形態 2)  Second Embodiment
本発明の実施の形態 2に係る多層情報記録媒体の製造方法における榭脂中間層 の作製工程について、図 12 (a)〜(c)を用いて説明を行う。この多層情報記録媒体 の製造方法では、実施の形態 1に係る多層情報記録媒体の製造方法と比較すると、 榭脂中間層の作製工程にぉ 、て、  The process for producing the resin intermediate layer in the method for producing a multilayer information recording medium according to the second embodiment of the present invention will be described with reference to FIGS. 12 (a) to 12 (c). Compared to the method of manufacturing the multilayer information recording medium according to the first embodiment, the method of manufacturing the multilayer information recording medium includes the steps of manufacturing the resin intermediate layer,
(a)榭脂中間層を形成する領域を囲む内周部と外周部とに放射線硬化性榭脂から なる壁部を形成する工程と、  (a) forming a wall portion of a radiation curable resin on an inner peripheral portion and an outer peripheral portion surrounding a region for forming a resin intermediate layer;
(b)内周部と外周部の壁部に囲まれた領域に放射線硬化性榭脂を塗布し、塗布後、 順次に放射線の照射を行う塗布及び照射工程と、  (b) applying a radiation curable resin to a region surrounded by the inner peripheral portion and the wall portion of the outer peripheral portion, and applying and irradiating the radiation sequentially after the application;
を含むことを特徴とする。  It is characterized by including.
[0105] なお、榭脂中間層の塗布及び照射工程を除ぐその他の工程に関しては、実施の 形態 1に説明した各工程と実質的に同じであるためここでは説明を省略する。また、 本発明の効果は榭脂中間層の作製工程によるものであって、その他の工程はどのよ うな工程であっても本発明の効果を狭めるものではない。 The remaining steps other than the application of the resin intermediate layer and the irradiation step are substantially the same as the steps described in the first embodiment, and therefore the description thereof is omitted here. Further, the effect of the present invention is due to the process of producing the resin intermediate layer, and the other processes do not narrow the effects of the present invention regardless of the process.
[0106] 図 12 (a)〜(c)に本発明の実施の形態 2に係る榭脂中間層の作製方法を示す。な お、インクジェットヘッドの構成は、実施の形態 1の図 9 (a)及び (b)における構成と同 じ構成のものを用いた。 FIGS. 12 (a) to 12 (c) show a method for producing a resin intermediate layer according to Embodiment 2 of the present invention. The configuration of the ink jet head was the same as that shown in FIGS. 9 (a) and 9 (b) of the first embodiment.
(a)上記インクジェットヘッドを用いて、成形榭脂基板 1201上に形成する榭脂中間 層の塗布領域の内周部及び外周部についてリング状に囲む部分に放射線硬化性榭 脂の塗布及び照射工程を行う(図 12 (a) )。なお、リング状の壁面 1202、 1203の構 成は、塗布領域で所望の厚みとなるように、インクジェットヘッドの走査速度を調整す る力、あるいは複数回の重ね塗りを行うことで実現できる。本発明の実施の形態 1に おけるインクジェットヘッドの構成を用いると榭脂の流動が生じる前に硬化をすること が可能であり、均一な厚みの壁面を作製することが可能である。 (a) A step of applying and irradiating a radiation curable resin to a portion surrounding the inner and outer peripheral portions of the application region of the resin intermediate layer formed on the molded resin substrate 1201 in a ring shape using the above-mentioned ink jet head Do (Figure 12 (a)). The configuration of the ring-shaped wall surfaces 1202 and 1203 can be realized by a force for adjusting the scanning speed of the ink jet head or by performing coating multiple times so as to obtain a desired thickness in the application region. Using the configuration of the inkjet head according to the first embodiment of the present invention, curing before resin flow occurs. It is possible to make wall surfaces of uniform thickness.
(b)その後、外周部の壁面 1202と内周部の壁面 1203とに囲まれた領域に放射性 硬化性榭脂を吐出し、壁面の高さに相当する均一な厚みの榭脂中間層が形成でき る。  (b) Thereafter, a radioactive curable resin is discharged to a region surrounded by the wall surface 1202 of the outer peripheral portion and the wall surface 1203 of the inner peripheral portion, and a resin intermediate layer having a uniform thickness corresponding to the height of the wall surface is formed. it can.
表 5にこの方法により形成した榭脂中間層の厚み測定結果を示す。  Table 5 shows the thickness measurement results of the resin intermediate layer formed by this method.
[0107] [表 5] [0107] [Table 5]
Figure imgf000035_0001
Figure imgf000035_0001
[0108] 榭脂は粘度 20mPa' sの榭脂を用いて、走査速度 0. 5mZsで 2回走査して壁面の 塗布を行った。壁面の幅は約 200 μ mで、厚みは約 15 mを目標とした。また、放射 線の照射は lOOOmiZcm2で行った。さらに、 3回目に走査速度 0. 3mZsで塗布領 域全体に榭脂を塗布した。 3回目の榭脂の塗布では放射線の照射は行っていない。 The resin was applied twice by scanning at a scanning speed of 0.5 mZs using a resin having a viscosity of 20 mPa's. The width of the wall is about 200 μm and the thickness is about 15 m. The irradiation of radiation was performed in lOOOmiZcm 2. In addition, the resin was applied to the entire application area at a third scan speed of 0.3 mZs. No radiation was irradiated in the third resin application.
[0109] 通常、榭脂粘度 20mPa' sの榭脂を 15 m厚みに塗布した場合、榭脂が流動する ことによって、外周端面に盛り上がりが発生するため、面内の厚み分布に大きな変動 が現れる。しかし、実施の形態 2においては、放射線の照射を行わない状態におい ても、表 5に示すように、面内でばらつき ± 1. 5 mと良好な厚み分布の結果を得た  In general, when a resin having a resin viscosity of 20 mPa's is applied to a thickness of 15 m, swelling of the outer peripheral end surface occurs when the resin flows, so that a large variation appears in the in-plane thickness distribution. . However, in the second embodiment, as shown in Table 5, even when radiation was not applied, the result of a good thickness distribution with a variation of ± 1.5 m was obtained.
[0110] ここでは粘度 20mPa' sの榭脂でのみ実験を行った力 実施の形態 1で行ったよう にインクジェットノズルで吐出できる粘度範囲にぉ 、て、塗布厚みは制御可能でありHere, the experiment was conducted only with a resin having a viscosity of 20 mPa's. As described in the first embodiment, the coating thickness can be controlled within the viscosity range which can be discharged by the ink jet nozzle.
、本発明の実施の形態 2においてもそれは同様である。 The same applies to the second embodiment of the present invention.
[0111] また、ここでは第 1の榭脂中間層の作製にのみ言及しているが、その他の榭脂中間 層の作製工程にも本発明は有効である。また、保護層の形成工程にも用いることが できる。 産業上の利用可能性 Further, although only the preparation of the first resin intermediate layer is mentioned here, the present invention is also effective in the process of forming other resin intermediate layers. It can also be used in the step of forming a protective layer. Industrial applicability
本発明のインクジェット塗布装置は、多層情報記録媒体などの多層メディアの工法 として有用である。特に Blu— rayディスクなどの榭脂層積層プロセスなどにぉ ヽて用 、ることが出来る。  The ink jet coating apparatus of the present invention is useful as a method of forming multilayer media such as multilayer information recording media. In particular, it can be used in the process of laminating resin layers such as Blu-ray discs.

Claims

請求の範囲 The scope of the claims
[1] 塗布対象物、又は、インクジェットヘッドのいずれか一方を相対的に移動させながら [1] While relatively moving either one of the application object or the inkjet head
、前記塗布対象物に放射線硬化性榭脂を塗布するインクジェット塗布装置であって、 放射線硬化性榭脂の液滴を吐出するインクジェットノズルを有するインクジェットュ ニットと、前記インクジェットユニットの前記塗布対象物に対する相対移動方向の後方 に所定間隔だけ離間して設けられ、前記塗布対象物に塗布された前記放射線硬化 性榭脂に放射線を照射する放射線照射ユニットと、を備えたインクジェットヘッドと、 前記塗布対象物に対して、前記インクジェットヘッドを相対的に移動させる駆動部と を備えたことを特徴とするインクジエッド塗布装置。 An inkjet coating device for applying a radiation curable resin to the application object, the inkjet unit having an inkjet nozzle for discharging droplets of the radiation curable resin, and the application object of the inkjet unit An inkjet head comprising: a radiation irradiating unit provided behind the relative moving direction at a predetermined interval and irradiating the radiation curable resin applied to the application object with radiation; And a driving unit for moving the ink jet head relatively.
[2] 前記駆動部は、前記塗布対象物に対して、前記インクジェットヘッドを一定速度で 相対移動させて、  [2] The drive unit moves the inkjet head relative to the application target at a constant speed,
前記インクジェットノズルから前記塗布対象物に塗布された前記放射線硬化性榭 脂に、塗布後から一定時間後、順次に放射線を照射することを特徴とする請求項 1に 記載のインクジェット塗布装置。  The radiation is applied to the radiation curable resin applied from the ink jet nozzle to the object to be coated in a given time after application, and the radiation is sequentially irradiated.
[3] 前記駆動部は、前記塗布対象物につ!、て前記インクジェットヘッドを直線方向に相 対移動させることを特徴とする請求項 2に記載のインクジェット塗布装置。 [3] The inkjet coating device according to claim 2, wherein the drive unit moves the inkjet head relative to the application object in a linear direction.
[4] 前記インクジェットヘッドは、前記インクジェットノズルユニットと前記放射線照射ュ- ットとの間に挟持され、 [4] The ink jet head is held between the ink jet nozzle unit and the radiation irradiation unit.
前記インクジェットノズルから吐出された前記放射線硬化性榭脂の液滴が塗布され る前に、前記放射線照射ユニットから照射する放射線が照射されることを防ぐ放射線 遮蔽板をさらに備えたことを特徴とする請求項 1に記載のインクジェット塗布装置。  The radiation shielding plate may further include a radiation shielding plate for preventing irradiation of radiation emitted from the radiation irradiation unit before the droplets of the radiation curable resin discharged from the ink jet nozzle are applied. The inkjet coating device according to claim 1.
[5] 前記インクジェットヘッドは、前記インクジェットユニットを挟んで相対移動方向の前 方及び後方のそれぞれに前記インクジェットユニットと所定間隔だけ離間して配置さ れた第 1の放射線照射ユニットと第 2の放射線照射ユニットとを備えたことを特徴とす る請求項 1に記載のインクジェット塗布装置。 [5] The ink jet head includes a first radiation irradiating unit and a second radiation arranged at predetermined intervals from the ink jet unit at the front and the back of the relative movement direction with the ink jet unit interposed therebetween. The inkjet coating device according to claim 1, comprising: an irradiation unit.
[6] 前記駆動部は、前記塗布対象物につ!ヽて前記インクジェットヘッドを直線方向に往 復させて相対移動させると共に、 前記インクジェットヘッドは、前記相対移動方向を反転する場合に、前記第 1の放 射線照射ユニットから前記第 2の放射線照射ユニットに切り替えて放射線を照射する ことを特徴とする請求項 5に記載のインクジェット塗布装置。 [6] The drive unit is connected to the application object. The ink jet head is moved back and forth in a straight line direction to move relative to each other. The inkjet head according to claim 5, wherein when the relative movement direction is reversed, the first radiation irradiation unit is switched to the second radiation irradiation unit to emit radiation. Coating device.
[7] 前記インクジェットへットは、複数のインクジェットノズルが前記相対移動方向に対し て垂直方向にっ 、て前記塗布対象物の幅以上にわたって前記インクジェットノズル ユニットに配置されて 、ることを特徴とする請求項 1に記載のインクジェット塗布装置。  [7] The inkjet head is characterized in that a plurality of inkjet nozzles are disposed in the inkjet nozzle unit in a direction perpendicular to the relative movement direction and over the width of the object to be coated. The inkjet coating device according to claim 1.
[8] 基板と、前記基板の上に配置される複数の情報記録層と、前記情報記録層の間に 配置される榭脂中間層と、前記情報記録層上に設けられる保護層とを有する多層情 報記録媒体の製造方法であって、  [8] A substrate, a plurality of information recording layers disposed on the substrate, a resin intermediate layer disposed between the information recording layers, and a protective layer provided on the information recording layer A method of manufacturing a multilayer information recording medium, comprising:
放射線硬化性榭脂の液滴を吐出するインクジェットノズルを有するインクジェットュ ニットと、塗布対象物に対する前記インクジヱットユニットの相対移動方向の後方に所 定間隔だけ離間して設けられ、前記塗布対象物に塗布された前記放射線硬化性榭 脂に放射線を照射する放射線照射ユニットと、を備えたインクジェットヘッドを有する インクジェット塗布装置を用い、塗布対象物に対して相対移動させて、前記インクジェ ットユニットから前記塗布対象物上に放射線硬化性榭脂を滴下した後、順次に放射 線照射ユニットから前記放射線硬化性榭脂に放射線を照射して、前記塗布対象物 の上に榭脂中間層を形成する放射線硬化性榭脂の塗布及び照射工程  An ink jet unit having an ink jet nozzle for discharging droplets of a radiation curable resin, and an ink jet unit provided at a predetermined interval behind the relative moving direction of the ink jet unit with respect to the object to be coated, A radiation irradiation unit for irradiating the radiation curable resin applied to the object with radiation, and an ink jet application apparatus having an ink jet head including the ink jet head, wherein the ink jet unit is moved relative to the object to be coated to A radiation curable resin is dropped onto the object to be coated, and then the radiation curable resin is sequentially irradiated with radiation from a radiation irradiation unit to form a resin intermediate layer on the object to be coated. Coating and irradiation process of curable resin
を含むことを特徴とする多層情報記録媒体の製造方法。  A method of manufacturing a multilayer information recording medium, comprising:
[9] 前記塗布及び照射工程における前記塗布対象物は、情報記録層を備えた基板で あって、  [9] The object to be coated in the coating and irradiation steps is a substrate provided with an information recording layer,
前記基板上に形成した前記放射線硬化性榭脂の表面に情報面を転写によって形 成する転写工程をさらに含むことを特徴とする請求項 8に記載の多層情報記録媒体 の製造方法。  9. The method according to claim 8, further comprising a transfer step of forming an information surface on the surface of the radiation curable resin formed on the substrate by transfer.
[10] 前記塗布及び照射工程における前記塗布対象物は、転写スタンパであって、 前記放射線硬化性榭脂を挟持して、前記転写スタンパと前記基板とを重ね合わせ る重ね合わせ工程と、  [10] The application target in the application and irradiation steps is a transfer stamper, and the step of overlaying the transfer stamper and the substrate by sandwiching the radiation curable resin, and overlaying the substrate;
前記放射線硬化性榭脂から前記転写スタンパを剥離する剥離工程と、 をさらに含むことを特徴とする請求項 8に記載の多層情報記録媒体の製造方法。 The method according to claim 8, further comprising: a peeling step of peeling the transfer stamper from the radiation curable resin.
[11] 前記塗布及び照射工程は、 [11] The application and irradiation steps are
半径方向内側の内縁部と半径方向外側の外縁部とに、放射線硬化性榭脂を滴 下した後、前記放射線硬化性榭脂に放射線を照射して、所定の塗布厚みを有する 前記放射線硬化性榭脂からなる前記榭脂中間層を形成する領域を囲む内縁部及び 外縁部の壁面を形成する工程と、  A radiation curable resin is dropped onto the radially inner inner edge and the radially outer outer edge, and the radiation curable resin is then irradiated with radiation to have a predetermined coating thickness. Forming wall surfaces of an inner edge portion and an outer edge portion surrounding a region forming the resin intermediate layer made of resin;
内縁部及び外縁部の前記壁面によって囲まれた領域に、放射線硬化性榭脂を 滴下した後、前記放射線硬化性榭脂に放射線を照射して榭脂中間層を形成するェ 程と、  A step of applying a radiation curable resin to the region surrounded by the wall surface of the inner edge portion and the outer edge portion and thereafter irradiating the radiation curable resin with radiation to form a resin intermediate layer;
を含むことを特徴とする請求項 8に記載の多層情報記録媒体の製造方法。  A method of manufacturing a multilayer information recording medium according to claim 8, comprising:
[12] 前記塗布及び照射工程において、前記塗布対象物に対して前記インクジェット塗 布装置を一定速度で相対移動させて、前記放射線硬化性榭脂の塗布後から所定時 間経過後に放射線を照射することを特徴とする請求項 8に記載の多層情報記録媒体 の製造方法。 [12] In the applying and irradiating steps, the ink jet coating apparatus is moved relative to the object to be applied at a constant speed, and radiation is applied after a predetermined time has elapsed after the application of the radiation curable resin. The manufacturing method of the multilayer information recording medium of Claim 8 characterized by the above-mentioned.
[13] 複数回の前記塗布及び照射工程を行うことを特徴とする請求項 8に記載の多層情 報記録媒体の製造方法。  [13] The method for producing a multilayer information recording medium according to claim 8, wherein the application and irradiation steps are performed a plurality of times.
[14] 複数回の前記塗布及び照射工程のうち最後の工程における前記放射線の照射量[14] The irradiation dose of the radiation in the last step of the plurality of application and irradiation steps
1S それまでの塗布及び照射工程における照射量に対して少な 、ことを特徴とする 請求項 13に記載の多層情報記録媒体の製造方法。 The method for producing a multilayer information recording medium according to claim 13, wherein 1S is smaller than the irradiation amount in the coating and irradiation steps up to that time.
[15] 複数回の前記塗布及び照射工程のうち最後の工程では、前記放射線硬化性榭脂 の塗布のみを行うことを特徴とする請求項 13に記載の多層情報記録媒体の製造方 法。 [15] The method for producing a multilayer information recording medium according to claim 13, wherein in the final step of the plurality of application and irradiation steps, only the radiation curable resin is applied.
[16] 前記塗布及び照射工程にお!ヽて、前記放射線硬化性榭脂として複数種類の榭脂 を用いることを特徴とする請求項 11に記載の多層情報記録媒体の製造方法。  [16] The method for producing a multilayer information recording medium according to claim 11, wherein a plurality of types of resins are used as the radiation curable resin in the coating and irradiation steps.
[17] 請求項 8から 16のいずれか一項に記載の前記多層情報記録媒体の製造方法を用[17] A method of producing the multilayer information recording medium according to any one of claims 8 to 16 is used.
Vヽて作製されたことを特徴とする多層情報記録媒体。 A multilayer information recording medium characterized by being produced by V-stabilization.
[18] 前記多層情報記録媒体は、前記榭脂中間層の端面が前記インクジェットノズルから の液滴によるジグザグ状を呈することを特徴とする請求項 17に記載の多層情報記録 媒体。 [18] The multilayer information recording medium according to claim 17, wherein in the multilayer information recording medium, an end face of the resin intermediate layer exhibits a zigzag shape by droplets from the ink jet nozzle.
PCT/JP2007/063002 2006-07-10 2007-06-28 Inkjet application device, multi-layered information recording medium, and method of producing the medium WO2008007564A1 (en)

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