WO2007137459A1 - Moteur à miroir vibrant - Google Patents

Moteur à miroir vibrant Download PDF

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Publication number
WO2007137459A1
WO2007137459A1 PCT/CN2006/001588 CN2006001588W WO2007137459A1 WO 2007137459 A1 WO2007137459 A1 WO 2007137459A1 CN 2006001588 W CN2006001588 W CN 2006001588W WO 2007137459 A1 WO2007137459 A1 WO 2007137459A1
Authority
WO
WIPO (PCT)
Prior art keywords
rotor
galvanometer motor
motor according
grating
stator
Prior art date
Application number
PCT/CN2006/001588
Other languages
English (en)
French (fr)
Inventor
Yunfeng Gao
Youyong Liao
Guangneng Wang
Xiahui Fu
Original Assignee
Shenzhen Han's Precision Mechatronics Co., Limited
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shenzhen Han's Precision Mechatronics Co., Limited filed Critical Shenzhen Han's Precision Mechatronics Co., Limited
Priority to DE112006001827T priority Critical patent/DE112006001827T5/de
Priority to US11/915,985 priority patent/US7683512B2/en
Publication of WO2007137459A1 publication Critical patent/WO2007137459A1/zh

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Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K33/00—Motors with reciprocating, oscillating or vibrating magnet, armature or coil system
    • H02K33/16—Motors with reciprocating, oscillating or vibrating magnet, armature or coil system with polarised armatures moving in alternate directions by reversal or energisation of a single coil system
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K11/00—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection
    • H02K11/20—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection for measuring, monitoring, testing, protecting or switching
    • H02K11/21—Devices for sensing speed or position, or actuated thereby

Definitions

  • the present invention relates to an electric machine, and more particularly to a moving magnetic galvanometer motor that can be applied to a laser marking, optical scanning or the like.
  • the galvanometer motor usually has different configurations and configurations. Traditionally, position feedback used in galvanometer motors has mostly used capacitive or inductive sensors. Due to the drift of these sensors, the accuracy, repeatability and stability of the galvanometer motor are greatly restricted. Also.
  • the galvanometer motor is a two-pole structure supported by a ball bearing. The relatively low torque/inertia ratio limits the response speed, and the lower axial stiffness also affects its accuracy.
  • the technical problem to be solved by the present invention is to provide a moving magnetic galvanometer motor controlled by a grating encoder to eliminate system instability caused by zero position and gain drift of a conventional galvanometer motor sensor, and to improve the galvanometer motor.
  • the performance of the system greatly improves the system's response speed, positional accuracy and repeatability.
  • the technical solution adopted by the present invention is: Providing a galvanometer motor comprising a stator, a rotor rotating relative to the stator, and a position feedback device for feeding back the rotational position of the rotor, the position feedback device being a grating encoder.
  • the raster encoder is a circular encoder including a raster drive disk driven by the rotor and a raster read head coupled to the raster code disk.
  • the raster encoder is a linear encoder including a linear scale attached to the side of the cylindrical base coupled to the rotor and a grating read head mated with the linear scale.
  • a raster read head includes a light emitter and a light receiver.
  • the stator includes a yoke, a bobbin, and a multi-pole winding coil disposed on the bobbin.
  • the bobbin and multi-pole winding coils are vacuum cast into the magnetic core from epoxy.
  • the rotor is a multi-pole rotor including a rotating shaft, a bearing, and a plurality of magnets of alternating polarity attached to the rotating shaft.
  • the rotating shaft includes a high magnetic permeability main shaft and a non-magnetic shaft extending on both sides of the main shaft, and a plurality of magnets are attached to the main shaft.
  • the bearing is an angular contact ball bearing disposed on the non-magnetic shaft extension.
  • one end of the rotor shaft is provided with a stop pin on the outer side of the bearing.
  • the technical effect achieved by the invention is:
  • the invention adopts a grating encoder and a multi-pole moving magnetic motor to drive the load for smooth and accurate high-speed movement, completely eliminating the drift caused by the sensor, realizing the positioning of the system and improving obviously. Its performance.
  • Figure 1 is an assembly view of a galvanometer motor of the present invention
  • FIG. 2 is a schematic view showing the structure of a stator of the galvanometer motor of the present invention
  • FIG. 3 is a schematic view showing the combination of the skeleton and the coil of the stator of the galvanometer motor of the present invention
  • FIG. 4 is a schematic structural view of a rotor of a galvanometer motor of the present invention.
  • Figure 5 is a schematic view showing the structure of the oscillating mirror motor rotor of another embodiment
  • Figure 6 is a cross-sectional view showing an embodiment of a position feedback device for a galvanometer motor of the present invention
  • Figure 7 is a cross-sectional view showing another embodiment of the position feedback device of the galvanometer motor of the present invention.
  • the galvanometer motor 1 of the present invention comprises a fixed stator 1 and a rotor 3 which rotates relative to the stator 2.
  • the stator 2 includes a coil 5, a skeleton 6 and a yoke 7.
  • the skeleton 6 is made of a non-magnetic material, and is provided with a long groove at intervals.
  • the coil 5 is shaped and placed in a long groove of the skeleton 6, and is connected in a certain order. In the multi-pole winding, the coil 5 and the bobbin 6 are vacuum-cast into the yoke 7 by epoxy resin.
  • the rotor 3 includes a magnet 8, a rotating shaft 9 and a bearing 10, and a plurality of magnets 8 having alternating polarities are attached to the magnetic rotating shaft 9 to form a multi-pole rotor.
  • the magnetic rotating shaft 9 includes a main shaft (not shown) covered by the magnet 8, which is High magnetic permeability material, two ends are respectively connected with non-magnetic shaft extensions 11, 12, the bearing 10 is an angular contact ball bearing, mounted on the non-magnetic shaft extensions 11 and 12, and the compression spring 13 is mounted on the shaft extension 12, located at the bearing 10
  • the inner side is formed to form a constant preload, and the load (galvanometer) 4 is mounted on the shaft extension 12, and the shaft extension 12 is provided with a stopper pin 14 on the outer side of the bearing 10 to control the maximum rotation range of the motor.
  • the bearing 10 is accurately positioned by the shaft 7
  • stator 2 When the stator 2 is energized, it interacts with the magnetic field of the rotor 3 to generate a torque, so that the rotor 3 drives the load 4 to rotate in the stator 2.
  • stator 1 When the stator 1 is connected with an alternating current, the rotor 3 will rotate in the stator 1 in a reciprocating motion. ..
  • the raster encoder is a circular encoder including a raster code disk 15 disposed on the shaft extension 11 and driven by the rotary shaft 9 and a grating read head 16 mated with the grating code disk 15, wherein the raster read head 16
  • the gap with the encoder disc 15 is then adjusted by the encoder base 17 and the bearing housing 20 and is protected by the end cap 18.
  • the raster barcodes are evenly distributed over the raster code disk 15.
  • the illuminator (infrared light emitting diode) on the raster read head 16 emits light onto the grating surface of the grating code disk 15, and then reflects the light into the light receiver through the transparent indicating grating.
  • a sinusoidal interference fringe synchronized with the grating pitch is generated on the detecting surface of the optical receiver, and accurate position information can be obtained by processing and subdividing the sinusoidal signal, thereby obtaining a position feedback signal of the motor rotation.
  • the closed loop system formed by the grating encoder can realize the rotor 3 or negative Vibration or scanning with 4 amplitudes and frequencies controllable.
  • Fig. 7 is a schematic cross-sectional view showing another embodiment of the position feedback device of the galvano mirror motor of the present invention.
  • the grating encoder employs a linear grating encoder including a linear scale 21 attached to the outer side surface of the cylindrical base 22 connected to the shaft extension 11 and a grating mated with the linear scale 21
  • the read head 23 measures the angular position of the rotor 3 by the raster read head 23 reading the linear position in the radial direction.
  • the use of the grating encoder eliminates system performance instability caused by the zero position and gain drift of the conventional capacitive or inductive galvanometer motor position feedback device.
  • the response speed of the galvanometer motor is improved by using a multi-pole slotless motor structure.
  • the galvanometer motor uses a multi-pole coil and a plurality of magnets to form a multi-pole stator and a multi-pole rotor.
  • the stator and the rotor may also have a two-pole structure under the condition that the technical requirements are met.

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Brushless Motors (AREA)
  • Mechanical Optical Scanning Systems (AREA)

Description

振镜电机 技术领域
本发明涉及一种电机， 尤其涉及一种能够应用于激光标记、 光学扫描或 类似的系统中的动磁式振镜电机。
背景技术
振镜电机通常会具有不同的结构形式和配置方式。 传统上， 振镜电机所 使用的位置反馈多采用电容或电感式传感器， 由于这些传感器本身的漂移， 振镜电机的精度、 重复性和稳定性等受到很大的制约。 此外。 振镜电机为两 极结构并由球轴承支撑，相对较低的力矩 /惯量比限制了响应速度， 而且较低 的轴向刚度也影响其运行精度。
发明内容
本发明所欲解决的技术问题是提供一种由光栅编码器控制的动磁式振镜 电机， 以消除由于传统振镜电机传感器零位和增益漂移引起的系统性能不 稳定， 同时提高振镜电机的性能， 从而大幅改善系统的响应速度、 位置精度 和重复定位精度。
本发明所采用的技术方案是： 提供一种振镜电机， 包括定子、 相对定子 转动的转子以及对转子的转动位置进行反馈的位置反馈装置， 该位置反馈装 置为光栅编码器。
根据本发明一优选实施例， 光栅编码器为圆光栅编码器， 包括由转子驱 动的光栅码盘以及与光栅码盘配合的光栅读头。
根据本发明一优选实施例， 光栅编码器为线性光栅编码器， 包括贴附在 与转子连接的圆柱形基座侧面的线性光栅尺以及与线性光栅尺配合的光栅读 头。 根据本发明一优选实施例， 光栅读头包括光发射器和光接收器。
根据本发明一优选实施例， 定子包括磁轭、 骨架以及设置在骨架上的多 极绕组线圈。
根据本发明一优选实施例， 骨架和多极绕组线圈由环氧树脂真空浇注于 磁厄内。
根据本发明一优选实施例， 转子为多极转子， 包括转轴、 轴承以及贴附 在转轴上的极性交替的多个磁铁。
根据本发明一优选实施例， 转轴包括高导磁性主轴和设置在主轴两侧的 非磁性轴伸， 多个磁铁贴附在主轴上。
根据本发明一优选实施例， 轴承为设置在非磁性轴伸上的角接触球轴 承。
根据本发明一优选实施例， 转子的一端轴伸上设有挡销， 位于轴承的外 侧。
本发明所达到的技术效果是： 本发明采用光栅编码器和多极动磁式电机 驱动负载作平滑、准确的高速运动， 完全消除了由于传感器引起的漂移， 实 现了系统的定位并显箸提高其性能。
附图说明
下面参照附图结合实施方案对本发明作进一步的描述。
图 1是本发明振镜电机的装配图；
图 2是本发明振镜电机的定子结构示意图；
图 3是本发明振镜电机的定子的骨架和线圈的组合示意图；
图 4是本发明振镜电机的转子的结构示意图；
图 5是本发明振镜电机转子的另一角度的结构示意图；
图 6是本发明振镜电机的位置反馈装置一实施例的剖面示意图； 图 7是本发明振镜电机的位置反馈装置另一实施例的剖面示意图。 具体实施方式
如图 1 -图 6所示， 本发明的振镜电机 1包括固定不动的定子 1和相对 定子 2旋转的转子 3。 其中， 定子 2包括线圈 5、 骨架 6和磁轭 7 , 骨架 6由 非磁性材料构成， 其上间隔设有长槽， 线圈 5整形后置于骨架 6的长槽中， 按一定的顺序连接成多极绕组， 由环氧树脂将线圈 5、 骨架 6真空浇注于磁 轭 7内。 转子 3包括磁铁 8、 转轴 9和轴承 10 , 极性交替的多个磁铁 8粘贴 在磁性转轴 9上构成多极转子， 磁性转轴 9包括由磁铁 8所覆盖的主轴（未 图示）， 其为高导磁材料， 两端分别连接非磁性轴伸 11、 12 , 轴承 10为角接 触球轴承， 安装在非磁性轴伸 11和 12上， 压缩弹簧 13安装在轴伸 12上， 位于轴承 10的内侧， 以形成恒定预载， 而负载（振镜） 4则安装在轴伸 12 上， 轴伸 12上于轴承 10的外侧设有挡销 14 , 以控制电机的最大转动范围。 轴承 10由轴 7|座 19和 20将转子 3与定子 2准确定位。
定子 2通电时与转子 3磁场相互作用产生力矩， 使转子 3驱动负载 4在 定子 2内作旋转运动， 当定子 1通以交变电流时， 转子 3将在定子 1内作往 复旋转运动。 ..
在本实施例中，光栅编码器为圆光栅编码器，其包括设置在轴伸 11上并 由转轴 9驱动的光栅码盘 15以及光栅码盘 15配合的光栅读头 16，其中光栅 读头 16与编码器码盘 15之间的间隙则由编码器基座 17和轴承座 20来调整， 并由端盖 18保护。光栅条码在光栅码盘 15上均匀分布。 当光栅码盘 15旋转 时， 光栅读头 16上的发光器（红外发光二极管）把光发射到光栅码盘 15的 光栅面上， 然后通过透明的指示光栅将光反射到光接收器中， 这样就在光接 收器的检测面产生了与光栅间距同步的正弦干扰条紋， 对该正弦信号处理和 细分就可得到准确的位置信息， 由此获得电机旋转的位置反馈信号。 当定子 2通以交变电流时， 通过光栅编码器构成的闭环系统即可实现对转子 3或负 载 4幅值和频率都可控的振动或扫描。
如图 7所示， 图 7是本发明振镜电机的位置反馈装置另一实施例的剖面 示意图。 在本实施例中， 光栅编码器采用线性光栅编码器， 其包括贴附在与 轴伸 11相连接的圆柱形基座 22的外侧表面上的线性光栅尺 21以及与线性光 栅尺 21配合的光栅读头 23, 由光栅读头 23在径向读取线性位置来测量转子 3的角位置。
通过采用上述结构， 利用光栅编码器消除了由于传统电容或电感式振镜 电机位置反馈装置的零位和增益漂移引起的系统性能不稳定。 此外， 通过采 用多极无槽电机结构提高了振镜电机的响应速度。
上述振镜电机采用多极线圈和多个磁铁构成多极定子和多极转子 , 实际 应用中， 在满足技术要求的条件下， 定子、 转子也可以为两极结构。

Claims

权 利 要 求
1. 一种振镜电机， 包括定子、相对所述定子转动的转子以及对所述转子 的转动位置进行反馈的位置反馈装置， 其特征在于： 所述位置反馈装置为光 栅编码器。
2. 如权利要求 1所述的振镜电机，其特征在于： 所述光栅编码器为圆光 栅编码器， 包括由所述转子驱动的光栅码盘以及与所述光栅码盘配合的光栅 读头。
3. 如权利要求 1所述的振镜电机，其特征在于： 所述光栅编码器为线性 光栅编码器， 包括贴附在与所述转子连接的圆柱形基座侧面的线性光栅尺以 及与所述线性光栅尺配合的光栅读头。
4. 如权利要求 2或 3所述的振镜电机，其特征在于： 所述光栅读头包括 光发射器和光接收器。
5. 如权利要求 4所述的振镜电机， 其特征在于： 所述定子包括磁轭、 骨 架以及设置在所述骨架上的多极绕组线圈。
6 如权利要求 5所述的振镜电机， 其特征在于： 所述骨架和所述多极绕 组线圈由环氧树脂真空浇注于所述磁轭内。
7. 如权利要求 6所述的振镜电机， 其特征在于： 所述转子为多极转子， 包括转轴、 轴承以及贴附在所述转轴上的极性交替的多个磁铁。
8. 如权利要求 7所述的振镜电机， 其特征在于： 所述转轴包括高导磁性 主轴和设置在所述主轴两侧的非磁性轴伸，所述多个磁铁贴附在所述主轴上。
9. 如权利要求 8所述的振镜电机， 其特征在于： 所述轴承为设置在所述 非磁性轴伸上的角接触球轴承。
10. 如权利要求 9所述的振镜电机， 其特征在于： 所述转子的一端轴伸 上设有挡销， 位于所述轴承的外侧。
PCT/CN2006/001588 2006-05-29 2006-07-06 Moteur à miroir vibrant WO2007137459A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
DE112006001827T DE112006001827T5 (de) 2006-05-29 2006-07-06 Motor zum Antreiben optischer Elemente
US11/915,985 US7683512B2 (en) 2006-05-29 2006-07-06 Motor used to drive optical elements

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN200610035684 2006-05-29
CN200610035684.4 2006-05-29

Publications (1)

Publication Number Publication Date
WO2007137459A1 true WO2007137459A1 (fr) 2007-12-06

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US (1) US7683512B2 (zh)
DE (1) DE112006001827T5 (zh)
WO (1) WO2007137459A1 (zh)

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US7683512B2 (en) 2010-03-23
DE112006001827T5 (de) 2008-05-08

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