WO2007128387A3 - Mikrowellen-positionsmessvorrichtung und positionsmessverfahren - Google Patents

Mikrowellen-positionsmessvorrichtung und positionsmessverfahren Download PDF

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Publication number
WO2007128387A3
WO2007128387A3 PCT/EP2007/003396 EP2007003396W WO2007128387A3 WO 2007128387 A3 WO2007128387 A3 WO 2007128387A3 EP 2007003396 W EP2007003396 W EP 2007003396W WO 2007128387 A3 WO2007128387 A3 WO 2007128387A3
Authority
WO
WIPO (PCT)
Prior art keywords
position measurement
microwave
measurement apparatus
actuator
microwaves
Prior art date
Application number
PCT/EP2007/003396
Other languages
English (en)
French (fr)
Other versions
WO2007128387A2 (de
Inventor
Thomas Reininger
Marcus Maier
Zeppelin Matthias Von
Original Assignee
Festo Ag & Co Kg
Thomas Reininger
Marcus Maier
Zeppelin Matthias Von
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Festo Ag & Co Kg, Thomas Reininger, Marcus Maier, Zeppelin Matthias Von filed Critical Festo Ag & Co Kg
Priority to EP07724333A priority Critical patent/EP2016374A2/de
Publication of WO2007128387A2 publication Critical patent/WO2007128387A2/de
Publication of WO2007128387A3 publication Critical patent/WO2007128387A3/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/48—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using wave or particle radiation means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B15/00—Fluid-actuated devices for displacing a member from one position to another; Gearing associated therewith
    • F15B15/20—Other details, e.g. assembly with regulating devices
    • F15B15/28—Means for indicating the position, e.g. end of stroke
    • F15B15/2815—Position sensing, i.e. means for continuous measurement of position, e.g. LVDT
    • F15B15/2869—Position sensing, i.e. means for continuous measurement of position, e.g. LVDT using electromagnetic radiation, e.g. radar or microwaves

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Electromagnetism (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Toxicology (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)

Abstract

Die Erfindung betrifft ein Positionsmessverfahren und eine Mikrowellen-Positionsmessvorrichtung (30) zur Positionserfassung eines in einem Bewegungsraum (12) eines Aktor-Gehäuses (13) beweglich angeordneten Aktorglieds (14) eines Aktors (11), mit einer Hochfrequenz-Mikrowellen-Antennenanordnung (34) zum Senden von Mikrowellen (43) mit mindestens zwei voneinander verschiedenen Frequenzen in den Bewegungsraum und zum Empfangen von durch zumindest teilweise Reflexion der gesendeten Mikrowellen (43) an dem Aktorglied gebildeten Reflexions-Mikrowellen (44) aus dem Bewegungsraum, und mit Auswertemitteln (42) zur Bildung eines die jeweilige Position (x) des Aktorglieds repräsentierenden Positionssignals (52) anhand eines anhand der Reflexions-Mikrowellen (44) gebildeten Messsignals (50). Bei der Mikrowellen- Positionsmessvorrichtung (30) ist vorgesehen, dass die Auswertemittel (42) zur Bildung des Positionssignals von den mindestens zwei voneinander verschiedenen Frequenzen abhängige Anteile an dem Messsignal abhängig von einer jeweiligen Position (x) des Aktorglieds (14) gewichten.
PCT/EP2007/003396 2006-05-06 2007-04-18 Mikrowellen-positionsmessvorrichtung und positionsmessverfahren WO2007128387A2 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP07724333A EP2016374A2 (de) 2006-05-06 2007-04-18 Mikrowellen-positionsmessvorrichtung und positionsmessverfahren

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102006021206.1 2006-05-06
DE200610021206 DE102006021206A1 (de) 2006-05-06 2006-05-06 Mikrowellen-Positionsmessvorrichtung und Positionsmessverfahren

Publications (2)

Publication Number Publication Date
WO2007128387A2 WO2007128387A2 (de) 2007-11-15
WO2007128387A3 true WO2007128387A3 (de) 2008-12-18

Family

ID=38263721

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2007/003396 WO2007128387A2 (de) 2006-05-06 2007-04-18 Mikrowellen-positionsmessvorrichtung und positionsmessverfahren

Country Status (4)

Country Link
EP (1) EP2016374A2 (de)
CN (1) CN101460812A (de)
DE (1) DE102006021206A1 (de)
WO (1) WO2007128387A2 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007003389B4 (de) 2007-01-23 2011-03-03 Festo Ag & Co. Kg Aktor mit Positionsmessvorrichtung
EP3076030A1 (de) * 2015-04-02 2016-10-05 SICK STEGMANN GmbH Positionsmesssystem
CN105352457B (zh) * 2015-11-30 2017-12-29 西北工业大学 具有截止波导辐射口的点频高速微波近距测量方法
CN106524933A (zh) * 2016-10-13 2017-03-22 厦门乃尔电子有限公司 一种辐射端口加载金属反射面的微波探头
EP3483567A1 (de) * 2017-11-08 2019-05-15 Siemens Aktiengesellschaft Winkelsensor mit ringförmigem hohlleiter als massverkörperung
EP3957868A1 (de) * 2020-08-20 2022-02-23 Precision Nanosensors Inc Kolben-zylinder-einheit mit kolbenpositionserfassungseinheit und kollimator

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19833220A1 (de) * 1997-12-15 1999-06-17 Mikrowellen Technologie Und Se Abstandsmeßvorrichtung und Verfahren zur Bestimmung eines Abstandes
WO2003069269A2 (de) * 2002-02-13 2003-08-21 Mikrowellen-Technologie Und Sensoren Gmbh Abstandsmessvorrichtung und verfahren zur bestimmung eines abstands

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19833220A1 (de) * 1997-12-15 1999-06-17 Mikrowellen Technologie Und Se Abstandsmeßvorrichtung und Verfahren zur Bestimmung eines Abstandes
WO2003069269A2 (de) * 2002-02-13 2003-08-21 Mikrowellen-Technologie Und Sensoren Gmbh Abstandsmessvorrichtung und verfahren zur bestimmung eines abstands

Also Published As

Publication number Publication date
EP2016374A2 (de) 2009-01-21
CN101460812A (zh) 2009-06-17
DE102006021206A1 (de) 2007-11-15
WO2007128387A2 (de) 2007-11-15

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