WO2007115937A2 - Vorrichtung und verfahren zum flexiblen klassieren von polykristallinen silicium-bruchstücken - Google Patents
Vorrichtung und verfahren zum flexiblen klassieren von polykristallinen silicium-bruchstücken Download PDFInfo
- Publication number
- WO2007115937A2 WO2007115937A2 PCT/EP2007/052969 EP2007052969W WO2007115937A2 WO 2007115937 A2 WO2007115937 A2 WO 2007115937A2 EP 2007052969 W EP2007052969 W EP 2007052969W WO 2007115937 A2 WO2007115937 A2 WO 2007115937A2
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- WIPO (PCT)
- Prior art keywords
- fraction
- sorting
- parameters
- optoelectronic
- mechanical
- Prior art date
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B07—SEPARATING SOLIDS FROM SOLIDS; SORTING
- B07B—SEPARATING SOLIDS FROM SOLIDS BY SIEVING, SCREENING, SIFTING OR BY USING GAS CURRENTS; SEPARATING BY OTHER DRY METHODS APPLICABLE TO BULK MATERIAL, e.g. LOOSE ARTICLES FIT TO BE HANDLED LIKE BULK MATERIAL
- B07B1/00—Sieving, screening, sifting, or sorting solid materials using networks, gratings, grids, or the like
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B07—SEPARATING SOLIDS FROM SOLIDS; SORTING
- B07B—SEPARATING SOLIDS FROM SOLIDS BY SIEVING, SCREENING, SIFTING OR BY USING GAS CURRENTS; SEPARATING BY OTHER DRY METHODS APPLICABLE TO BULK MATERIAL, e.g. LOOSE ARTICLES FIT TO BE HANDLED LIKE BULK MATERIAL
- B07B13/00—Grading or sorting solid materials by dry methods, not otherwise provided for; Sorting articles otherwise than by indirectly controlled devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B07—SEPARATING SOLIDS FROM SOLIDS; SORTING
- B07B—SEPARATING SOLIDS FROM SOLIDS BY SIEVING, SCREENING, SIFTING OR BY USING GAS CURRENTS; SEPARATING BY OTHER DRY METHODS APPLICABLE TO BULK MATERIAL, e.g. LOOSE ARTICLES FIT TO BE HANDLED LIKE BULK MATERIAL
- B07B13/00—Grading or sorting solid materials by dry methods, not otherwise provided for; Sorting articles otherwise than by indirectly controlled devices
- B07B13/003—Separation of articles by differences in their geometrical form or by difference in their physical properties, e.g. elasticity, compressibility, hardness
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B07—SEPARATING SOLIDS FROM SOLIDS; SORTING
- B07B—SEPARATING SOLIDS FROM SOLIDS BY SIEVING, SCREENING, SIFTING OR BY USING GAS CURRENTS; SEPARATING BY OTHER DRY METHODS APPLICABLE TO BULK MATERIAL, e.g. LOOSE ARTICLES FIT TO BE HANDLED LIKE BULK MATERIAL
- B07B13/00—Grading or sorting solid materials by dry methods, not otherwise provided for; Sorting articles otherwise than by indirectly controlled devices
- B07B13/04—Grading or sorting solid materials by dry methods, not otherwise provided for; Sorting articles otherwise than by indirectly controlled devices according to size
Definitions
- the invention relates to an apparatus and method for flexibly classifying polycrystalline silicon fragments.
- High purity silicon is produced by chemical vapor deposition of a high purity chlorosilane gas on a heated substrate.
- the silicon is polycrystalline in the form of rods. These bars must be shredded for further use.
- breaking tools for example made of metal baking or roll crushers, hammers or chisel are used.
- the fractions of polycrystalline silicon obtained in this way referred to below as poly-rupture, are then classified according to defined breaking sizes.
- a targeted separation according to length and / or surface can be achieved by optoelectronic sorting.
- Such methods are for polysilicon z. B. from US 6,265,683 Bl and
- the object of the invention was to provide a device which enables a flexible classification of broken polycrystalline silicon (polysilicon), preferably according to the length and / or surface of the Polybruchs.
- the length of a fragment is defined as the longest straight line between two points on the surface of a fragment.
- the area of a fragment is defined as the largest shadow area of the fragment projected in a plane.
- the invention relates to a device which is characterized in that it comprises a mechanical screen and an optoelectronic sorting system, wherein the poly fraction is separated by the mechanical screen into a silicon fines and a silicon remainder and the remaining silicon over a optoelectronic sorting plants are separated into further fractions.
- the device allows a sorting of the poly rupture according to length, area, shape, morphology, color and weight in any combination.
- the sorting plant consists of a multi-stage mechanical screening plant and a multi-stage optoelectronic sorting plant.
- the mechanical and / or optoelectronic separation devices are preferably arranged in a tree structure (see FIG. 1).
- the arrangement of the screening and optoelectronic sorting system in a tree structure allows in comparison to a serial arrangement a more accurate sorting, as fewer separation stages must be run through and with each separation module, the rejection amount is lower.
- the tree structure has shorter paths, whereby the wear of the system and the regrinding of large fragments are lower and there is a lower contamination of Polybruch. All this enhances the economy of the device and associated method.
- the fine fraction of the polymer fraction to be classified is preferably first separated from the residual silicon fraction by a mechanical sieving plant and then separated into further fractions by a plurality of mechanical screening plants.
- any known mechanical screening machine can be used as a mechanical screen.
- Preference Schwingsiebmaschinen that are driven by an unbalance motor used.
- Siebbelag mesh and perforated sieves are preferred.
- the mechanical sieve system is used to separate fines in the product stream.
- the fine fraction contains grain sizes up to a maximum grain size of up to 25 mm, preferably of up to 10 mm.
- the mechanical sieve therefore preferably has a mesh size which separates the mentioned grain sizes. Since the mechanical sieves therefore only have small holes in the beginning, in order to separate only the small breakage types ( ⁇ BGL), there is less blockage of the sieve, which increases the productivity of the system.
- the problematic large poly fragments can not settle in the small Siebmaschenweiten.
- the fine fraction can be separated into further fractions.
- the screening plants can successively or in another structure, such as. B. a tree structure, be arranged.
- the sieves are preferably arranged in more than one stage, particularly preferably in three stages in a tree structure. For example, in an intended split of the poly-break into four grain fractions (eg, fraction 1, 2, 3, 4), in a first stage, fractions 1 and 2 are separated from fraction 3 and 4. In a second stage then fraction 1 of fraction 2 and a parallel third stage fraction 3 of fraction 4 are separated.
- the sorting of the polysilicon residue can after all
- an optoelectronic sorting is used. It preferably takes place according to one or more, more preferably one to three, of the criteria selected from the group length, area, shape, morphology, color and weight of the polysilicon fragments. It is particularly preferably carried out according to the length and area of the polysilicon fragments.
- the residual silicon content is separated by one or more optoelectronic sorting into further fractions.
- one or more optoelectronic sorting systems which are arranged in a tree structure, are used.
- the optical image recognition of the optoelectronic sorting system has the advantage that "real" lengths or areas are measured, which permits a more precise separation of the fragments according to the respectively desired parameters than conventional mechanical screening methods No. 6,265,683 B1 or in US Pat. No. 6,040,544 A. applies. Reference is therefore made to these documents with regard to the details of the optoelectronic sorting system.
- This optoelectronic sorting system comprises a device for separating the poly-break and a sliding surface for the poly-break, wherein the angle of the sliding surface is adjustable to the horizontal, and a radiation source through the beam path of the poly break falls and a shape detection device, which forwards the shape of the Klassierguts to a control unit, which controls a deflection device.
- the product stream is separated via an integrated vibrating conveyor trough and passed over a slide in free fall one or more CCD color line cameras, the classification of one or more sorting parameters selected from the group length, area, volume (weight), shape , Morphology and color makes.
- all known in the art electronic sensor techniques can be used for the parameter recognition of the fragments.
- the measured values are transmitted to the higher-level control and regulating device and z. B. evaluated by microprocessor. It is decided by comparison with the stored in the recipe sort criterion, whether a fragment is discharged from the product stream or transmitted.
- the discharge preferably takes place via nozzles by compressed air pulses, wherein the pressure on the recipe in the higher-level control is adjustable.
- separating channels compressed air strips
- metered pulses of compressed air which are dependent on the particle size.
- the device according to the invention is therefore provided with a higher-level control, which allows the Sorting parameters, according to which the poly-break is sorted and / or the system parameters that influence the promotion of the Polybruchs (eg the conveying speed), flexibly adjust to the individual parts of the devices.
- the sorting parameters by which the polybranch is sorted are preferably the abovementioned parameters, particularly preferably selected from the group length, area, morphology, color or shape of the fragments.
- the higher-level controller preferably varies one or more of the following parts of the device:
- the sizes of the sorting parameters, according to which the poly-break is sorted, are preferably stored in the form of recipes in the higher-level control, and a variation of the selection criteria in the mechanical screening device and / or the opto-electronic sorting takes place via the selection of a recipe, which then selects the associated sorting parameters in the individual parts of the device according to the invention causes.
- the apparatus according to the invention comprises, after the sorting installation, scales for determining the weight yields of the classified fractions.
- the device according to the sorting system comprises a fully automatic Kistenab spall- and box transport device.
- a preferred embodiment of the device is characterized in that the mechanical screen and / or the optoelectronic sorting system is provided with a measuring device for defined parameters of classified polysilicon fracture and this measuring device is connected to a higher-level control and regulating device, which statistically the measured parameters evaluates and compares with predetermined parameters and in a deviation between measured parameters and predetermined parameters, the setting of the sorting parameters of the optoelectronic sorting system or the entire sorting system (eg frequency of the mechanical screen or conveyor speeds of the poly fragments) or the selection of recipes can change in that the parameter then measured adjusts to the given parameter.
- the mechanical screen and / or the optoelectronic sorting system is provided with a measuring device for defined parameters of classified polysilicon fracture and this measuring device is connected to a higher-level control and regulating device, which statistically the measured parameters evaluates and compares with predetermined parameters and in a deviation between measured parameters and predetermined parameters, the setting of the sorting parameters of the optoelectronic sorting system or the entire sort
- a parameter is measured from the group length, area, shape, morphology, color and weight of the polysilicon fragments.
- the length or the area of the polysilicon fragments within the respective fraction is particularly preferably measured and evaluated in the form of lengths or area distributions (eg 5%, 50% or 95% quantile).
- the weight yields of the individual sieve fractions are determined by the scales at the sieve walkways.
- Another measuring parameter is the mass and particle throughput determined at the individual optoelectronic sorting plants.
- the conveying speed can be adjusted, for example, on the basis of the measured number of particles so as not to overload the system and / or to select a different sorting recipe.
- variable sorting parameters for example the separation limits between two fractions or the driving mode through the modules
- the control and regulating device are changed by the control and regulating device in such a way that the measured parameter adapts to the predetermined parameter.
- control device regulates the separation boundaries between the fractions, the flow rate through the conveyor troughs or the pressure at the outlet nozzles.
- magnetic separators for example plate magnets, drum magnets or strip magnets
- the individual sorting stages are arranged between the individual sorting stages in order to remove metallic foreign bodies from the polysilicon break and to reduce the metal contamination of the polysilicon break.
- the control and regulating device preferably consists of a control system in the form of a programmable logic controller (PLC) via which the controls of all units (eg mechanical and optoelectronic sorting system, automated box handling with recipe management and management of the control logic) are managed and controlled.
- PLC programmable logic controller
- the cross-plant visualization and operation is carried out by a higher-level control system.
- the fault and operating messages of all units are evaluated and visualized together in a fault or operating message database.
- the device according to the invention allows a flexible separation with different particle size distribution of the feed material.
- Both very small (length ⁇ 45 mm) and very large cubic fraction (length> 45 - 250 mm) can be classified without any mechanical modifications by simple software control.
- the function of the optoelectronic sorting in the case of an arbitrary polysilicon break is made possible only by connecting a mechanical sieve to separate the fine fraction to the required accuracy.
- a high fines content in the feed material, which is placed on the optoelectronic sorting system the accuracy of the sorting is very strong and in extreme cases even the optoelectronic sorting in question.
- the inventive device allows a higher separation accuracy with respect to length and / or area of the fragments in comparison to a purely mechanical screening.
- the device can be regulated by feedback of the sorting parameters (eg mean value of the grain fraction (BG) measured in the optoelectronic screening plant) as reference variables for the sorting plants (eg separation limits at the individual optoelectronic sorting stages).
- the control and regulation can also be adapted via the recipes.
- the device according to the invention enables on-line monitoring of the quality of the feed material (eg via the statistical evaluation of the particle size distribution after breaking) in accordance with the sorting criteria (eg length distribution, weight distribution).
- the sorting criteria eg length distribution, weight distribution.
- the invention further relates to a method in which a break is classified by means of a device according to the invention.
- the poly-break is separated by a mechanical sieve into a sieved fine and a residual fraction, wherein the screened fine fraction by means of a wide is separated into a target fraction 1 and a target fraction 2 and the residual fraction is separated by means of an optoelectronic sorting into two fractions, these two fractions by means of a further optoelectronic sorting into 4 other target fractions (target fractions 3 to 6 ).
- the inventive method has a high productivity, since the set-up times are lower than in the case of known classic siervorraumen and it is less likely to constipation as mechanical sieves.
- the screened fine fraction has a particle size of less than 20 mm
- the residual fraction has a particle size of greater than 5 mm
- the target fraction 1 has a particle size of less than 10 mm
- the target fraction 2 has a particle size of from 2 mm to 20 mm
- the Target fraction 3 has a particle size of 5 mm to 50 mm
- the target fraction 4 has a particle size of 15 mm to 70 mm
- the target fraction 5 has a particle size of 30 mm to 120 mm
- the target fraction 6 has a particle size of greater than 60 mm.
- the input of the sorting parameters of the desired target fractions into a higher-level control and regulating device which causes a corresponding adjustment of the parameters of the sorting systems to achieve the desired target fractions of Polybruch.
- the setting of the parameters of the sorting systems is carried out as described for the device according to the invention.
- the fraction with the larger number of particles with respect to the respective sorting parameter is preferably rejected or blown out in each case.
- a preset recipe is selected at the higher-level control of the device according to the invention. All parameters of the sorting system and the manipulated variables of the control are stored in the recipes. The measurement of the product parameters and the classification of the polysilicon fracture are preferably carried out as described below:
- the oversize grain of the first mechanical screening stage is fed to a multi-stage optoelectronic separation plant.
- the product stream is separated via an integrated vibrating trough and passed over a slide in free fall one (or more) CCD color line camera (s), which is classified according to one or more of the parameters of length, area, volume, shape, morphology and color in any combination.
- CCD color line camera Alternatively, all known in the art electronic sensor techniques can be used for the parameter detection of the fragments.
- the measured values are transmitted to the higher-level control and regulating device and z. B. evaluated by microprocessor. In this case, it is decided by comparison with the sorting criterion stored in the recipe whether a fragment is removed from the product stream or allowed to pass through.
- the discharge is preferably carried out by compressed air pulses, wherein the pressure on the recipe in the higher-level control is adjustable.
- the pressure on the recipe in the higher-level control is adjustable.
- the discharge can also be carried out hydraulically or mechanically. Surprisingly, it has been found that a higher sorting accuracy is achieved when the respective smaller fraction is blown out for a long time, although this Fraction has a higher number of particles.
- Detection by means of a sensor preferably by means of optical image recognition, has the advantage that "real" lengths, areas or shapes of the fragments are measured, which permits a more accurate separation, for example with respect to length, than conventional mechanical sieving methods
- the overlap between two fractions to be separated is less, on the other hand, the cut-off limits can be set arbitrarily via the specified parameters (the recipe) of the higher-level control, without making any changes to the machine itself (such as changing the Due to the inventive combination of mechanical sieve and optoelectronic sorting system, it is possible for the first time to separate in small as well as in large fractional size range, irrespective of the composition of the feedstock.
- the entire plant can be controlled via the "on-line measurement", in which, for example, the separation limits are directly corrected according to the feedstock.
- the optoelectronic sorting in the device according to the invention offers the advantage that a more precise separation of the fragments according to the respective requirements (eg high cubicity of the fragments) is possible by the combination of area and length.
- the fractions of the silicon fraction classified by means of the device according to the invention are collected and preferably filled into boxes.
- the filling is automated, as described for example in EP 1 334 907 B.
- Fig. 1 shows the process principle of the device according to the invention used in the examples.
- FIG. 3 shows the influence of the sorting limits set in the optoelectronic separation plant (here length of a fragment) on the fractional size distribution of the fractions thus obtained, as described in Example 2.
- the lengths refer to the maximum length of the fragments, with 85% by weight of the fragments having a maximum length within the specified limits.
- Polysilicon was deposited by the Siemens method in the form of rods.
- the rods were removed from the Siemens reactor and crushed by methods known in the art (eg, by manual comminution) to polysilicon coarse fracture.
- This rough fracture with fragments of an edge length of 0 to 250 mm was emptied via a feeder, preferably a funnel, onto a conveyor trough which conveys the material to the device according to the invention.
- the parameters for the fractions to be produced were entered into the higher-level measuring and control device. Since a particular desired particle size distribution in the different fractions is in each case given by the respective further use of the fracture to be produced, the fractions are usually stored as recipes in the higher-level measuring and control device and are selected accordingly. In the present example, the device was used for the production of 6 different fractions (BG 0, 1, 2, 3, 4 and 5).
- the recipes contain all the parameters of the optoelectronic and mechanical sorting systems and the conveyor technology.
- the fines (BG 0 and 1) of the Polybruchs was separated on a mechanical sieve with a mesh size of about 10 mm and then the separated portion with another me- 4 mm mesh size into BG 0 and 1 separated.
- the coarse fraction (BG 2, 3, 4 and 5) was conveyed via a conveyor trough whose conveying characteristics, such as, for example, B. Frequency, also stored in the recipe, fed to the optical sorting system and separated over two tree levels, or three optical stages as follows: In the first stage BG 3 & 2 was separated from BG 4 & 5. As a separation limit, the recipe has a maximum length of 55 mm. BG 3 & 2 was separated into BG 3 and 2 in a second stage or a separation limit of 27 mm stored in the recipe. The BG 4 & 5 in a third stage and a separation limit of 100 mm in the BG 4 and 5.
- the software parameters were slightly varied with respect to separation limits of the individual fractions.
- the values with respect to the maximum or minimum permissible length of the fragments in the individual fractions were changed by a few millimeters (see FIG. 3).
- the separation limit for blowing between BG 2 and 3 was changed from 27 mm to 31 mm and between BG 3 and 4 from 55 mm to 57 mm.
- This program parameter change of only a few millimeters is already evident in the product properties (eg long-distance distribution), ie. H.
- the separation boundaries between the individual fractions can be flexibly adapted to the respective specification with high accuracy by simple recipe selection, or used in the context of the online control to achieve desired target values.
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Abstract
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Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP07727441A EP2001607B1 (de) | 2006-04-06 | 2007-03-28 | Vorrichtung und verfahren zum flexiblen klassieren von polykristallinen silicium-bruchstücken |
CA2647721A CA2647721C (en) | 2006-04-06 | 2007-03-28 | Device and method for the flexible classification of polycrystalline silicon fragments |
US12/296,219 US10478860B2 (en) | 2006-04-06 | 2007-03-28 | Device and method for the flexible classification of polycrystalline silicon fragments |
CN2007800121856A CN101415503B (zh) | 2006-04-06 | 2007-03-28 | 用于将多晶硅碎片灵活分级的装置和方法 |
DE502007001136T DE502007001136D1 (de) | 2006-04-06 | 2007-03-28 | Vorrichtung und verfahren zum flexiblen klassieren |
JP2009503540A JP4988821B2 (ja) | 2006-04-06 | 2007-03-28 | 多結晶シリコンの破片を柔軟に分級するための装置および方法 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102006016324A DE102006016324A1 (de) | 2006-04-06 | 2006-04-06 | Vorrichtung und Verfahren zum flexiblen Klassieren von polykristallinen Silicium-Bruchstücken |
DE102006016324.9 | 2006-04-06 |
Publications (2)
Publication Number | Publication Date |
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WO2007115937A2 true WO2007115937A2 (de) | 2007-10-18 |
WO2007115937A3 WO2007115937A3 (de) | 2007-11-29 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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PCT/EP2007/052969 WO2007115937A2 (de) | 2006-04-06 | 2007-03-28 | Vorrichtung und verfahren zum flexiblen klassieren von polykristallinen silicium-bruchstücken |
Country Status (9)
Country | Link |
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US (1) | US10478860B2 (de) |
EP (1) | EP2001607B1 (de) |
JP (1) | JP4988821B2 (de) |
KR (1) | KR101068488B1 (de) |
CN (1) | CN101415503B (de) |
CA (1) | CA2647721C (de) |
DE (2) | DE102006016324A1 (de) |
ES (1) | ES2328295T3 (de) |
WO (1) | WO2007115937A2 (de) |
Cited By (2)
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---|---|---|---|---|
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WO2021121558A1 (de) * | 2019-12-17 | 2021-06-24 | Wacker Chemie Ag | Verfahren zur herstellung und klassifizierung von polykristallinem silicium |
Families Citing this family (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102008040231A1 (de) | 2008-07-07 | 2008-12-18 | Wacker Chemie Ag | Polykristalliner Siliciumbruch hoher Reinheit und Reinigungsverfahren zu seiner Herstellung |
JP5751748B2 (ja) * | 2009-09-16 | 2015-07-22 | 信越化学工業株式会社 | 多結晶シリコン塊群および多結晶シリコン塊群の製造方法 |
KR101182163B1 (ko) * | 2010-08-16 | 2012-09-12 | 한국메탈실리콘 주식회사 | 실리콘 파우더의 제조방법 및 그 제조장치 |
DE102010039754B4 (de) * | 2010-08-25 | 2013-06-06 | Wacker Chemie Ag | Verfahren zur Bestimmung der Konzentration an Feinstaub in Silicium-Schüttgütern |
WO2014091936A1 (ja) * | 2012-12-10 | 2014-06-19 | 昭和電工株式会社 | ケイ素含有アルミニウム合金鋳塊の製造方法 |
DE102013207251A1 (de) * | 2013-04-22 | 2014-10-23 | Wacker Chemie Ag | Verfahren zur Herstellung von polykristallinem Silicium |
DE102013218003A1 (de) * | 2013-09-09 | 2015-03-12 | Wacker Chemie Ag | Klassieren von Polysilicium |
TWI551399B (zh) * | 2014-01-20 | 2016-10-01 | 中國砂輪企業股份有限公司 | 高度磨料品質之化學機械研磨修整器 |
JP6420777B2 (ja) | 2014-02-14 | 2018-11-07 | 株式会社トクヤマ | 清浄化された多結晶シリコン塊破砕物の製造装置、及び該製造装置を用いた、清浄化された多結晶シリコン塊破砕物の製造方法 |
EP3208236A4 (de) | 2014-10-14 | 2017-09-06 | Tokuyama Corporation | Polykristallinsiliciumfragment, verfahren zur herstellung eines polykristallinsiliciumfragments und brechvorrichtung für polykristallinsiliciumblock |
DE102015211351A1 (de) | 2015-06-19 | 2016-12-22 | Siltronic Ag | Siebplatte für Siebanlagen zum mechanischen Klassieren von Polysilicium |
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JP7129921B2 (ja) | 2018-03-05 | 2022-09-02 | 株式会社パイロットコーポレーション | シャープペンシル |
CN109225943B (zh) * | 2018-10-30 | 2024-05-24 | 无锡欧龙宇自动化科技有限公司 | 一种硅片自动分拣计量的装置 |
WO2022123083A2 (en) | 2020-12-11 | 2022-06-16 | Zadient Technologies SAS | Method and device for producing a sic solid material |
CN116234759A (zh) | 2021-03-24 | 2023-06-06 | 瓦克化学股份公司 | 用于硅块的运输容器 |
WO2023222787A1 (en) | 2022-05-18 | 2023-11-23 | Zadient Technologies SAS | METHOD FOR PRODUCING AT LEAST ONE CRACK-FREE SiC PIECE |
DE102023102854B3 (de) | 2023-02-06 | 2024-05-02 | Alztec GmbH | Vorrichtung und Verfahren zur flexiblen Klassierung von poly- und/oder monokristallinem Silizium |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1334907B1 (de) | 2002-02-01 | 2004-04-14 | Wacker-Chemie GmbH | Verfahren und Vorrichtung zur kostengünstigen Verpackung von Polysiliciumbruch |
Family Cites Families (38)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2612997A (en) * | 1946-05-22 | 1952-10-07 | Link Belt Co | Jig for treating materials of different specific gravities |
US4384957A (en) * | 1980-09-08 | 1983-05-24 | Amf Incorporated | Molecular separation column and use thereof |
FR2498489A1 (fr) * | 1981-01-28 | 1982-07-30 | Saint Gobain Emballage Sa | Procede et dispositif pour l'epuration du verre de recuperation |
US4492629A (en) * | 1983-01-28 | 1985-01-08 | Kinergy Corporation | Sifter stroke screening unit |
US4795651A (en) * | 1987-05-04 | 1989-01-03 | The Procter & Gamble Company | Flotation separation of aflatoxin-contaminated grain or nuts |
DE3811091A1 (de) * | 1988-03-31 | 1989-10-12 | Heliotronic Gmbh | Verfahren zum kontaminationsarmen zerkleinern von massivem stueckigem silicium |
DE4113093C2 (de) * | 1990-04-23 | 1998-08-27 | Hemlock Semiconductor Corp | Vorrichtung und Verfahren zum größenmäßigen Separieren von für Halbleiteranwendungen geeigneten Siliciumstücken |
US5165548A (en) * | 1990-04-23 | 1992-11-24 | Hemlock Semiconductor Corporation | Rotary silicon screen |
US5199574A (en) * | 1991-10-31 | 1993-04-06 | J & H Equipment, Inc. | Vibrating screen separator |
US5263591A (en) * | 1991-12-12 | 1993-11-23 | Taormina Industries, Inc. | Refuse recycling system |
WO1993025324A1 (en) * | 1992-06-08 | 1993-12-23 | Valtion Teknillinen Tutkimuskeskus | A method for manufacturing low bark content wood chips from whole-tree chips |
DE4321261A1 (de) | 1992-06-29 | 1994-02-24 | Strebel Engineering Kleindoett | Vorrichtung zum Prüfen von Formteilen |
US5699724A (en) * | 1992-12-02 | 1997-12-23 | Buhler Ag | Cleaning and sorting bulk material |
US5659624A (en) * | 1995-09-01 | 1997-08-19 | Fazzari; Rodney J. | High speed mass flow food sorting appartus for optically inspecting and sorting bulk food products |
US20010055812A1 (en) * | 1995-12-05 | 2001-12-27 | Alec Mian | Devices and method for using centripetal acceleration to drive fluid movement in a microfluidics system with on-board informatics |
US5941395A (en) * | 1996-04-17 | 1999-08-24 | Eastman Kodak Company | Method and apparatus for conveying single use camera bodies while separating loose parts therefrom |
US5921401A (en) * | 1997-04-16 | 1999-07-13 | Johnston; Rafe | Mobile screening apparatus |
DE19719698A1 (de) * | 1997-05-09 | 1998-11-12 | Wacker Chemie Gmbh | Optoelektronische Klassiervorrichtung |
FR2773736B1 (fr) * | 1998-01-22 | 2000-05-26 | Galloo Plastics | Procede et installation pour separer toutes categories de materiaux polymeres |
DE19840200A1 (de) * | 1998-09-03 | 2000-03-09 | Wacker Chemie Gmbh | Klassiervorrichtung |
DE19914998A1 (de) * | 1999-04-01 | 2000-10-12 | Wacker Chemie Gmbh | Schwingförderer und Verfahren zur Förderung von Siliciumbruch |
WO2001046458A1 (en) * | 1999-12-20 | 2001-06-28 | The Penn State Research Foundation | Deposited thin films and their use in detection, attachment, and bio-medical applications |
DE10024309A1 (de) * | 2000-05-17 | 2001-11-29 | Der Gruene Punkt Duales Syst | Verfahren und Vorrichtung zur trockenen Auftrennung von Sammelmüll mit Verpackungsabfällen |
US7351376B1 (en) * | 2000-06-05 | 2008-04-01 | California Institute Of Technology | Integrated active flux microfluidic devices and methods |
US6829753B2 (en) * | 2000-06-27 | 2004-12-07 | Fluidigm Corporation | Microfluidic design automation method and system |
WO2002029106A2 (en) * | 2000-10-03 | 2002-04-11 | California Institute Of Technology | Microfluidic devices and methods of use |
JP3924432B2 (ja) * | 2001-01-17 | 2007-06-06 | 株式会社日立製作所 | 金属の選別回収システム |
JP3749946B2 (ja) * | 2002-02-07 | 2006-03-01 | 国立大学法人 東京大学 | 関節機構、それを用いた双腕ロボットおよび二足歩行ロボット |
US8021483B2 (en) | 2002-02-20 | 2011-09-20 | Hemlock Semiconductor Corporation | Flowable chips and methods for the preparation and use of same, and apparatus for use in the methods |
EP1553214B1 (de) | 2002-02-20 | 2011-11-23 | Hemlock Semiconductor Corporation | Fliessfähige Späne und Verfahren zu iher Verwendung |
US7351929B2 (en) * | 2002-08-12 | 2008-04-01 | Ecullet | Method of and apparatus for high speed, high quality, contaminant removal and color sorting of glass cullet |
US6874713B2 (en) | 2002-08-22 | 2005-04-05 | Dow Corning Corporation | Method and apparatus for improving silicon processing efficiency |
ATE352054T1 (de) * | 2003-10-03 | 2007-02-15 | Invisia Ltd | Multifocal-linse |
US7341156B2 (en) * | 2003-11-17 | 2008-03-11 | Casella Waste Systems, Inc. | Systems and methods for sorting, collecting data pertaining to and certifying recyclables at a material recovery facility |
US20060085212A1 (en) * | 2004-08-10 | 2006-04-20 | Kenny Garry R | Optimization of a materials recycling facility |
JP4682971B2 (ja) * | 2006-02-10 | 2011-05-11 | マツダ株式会社 | 塗膜付き樹脂材の塗膜剥離選別方法及び装置 |
DE102006016323A1 (de) * | 2006-04-06 | 2007-10-11 | Wacker Chemie Ag | Verfahren und Vorrichtung zum Zerkleinern und Sortieren von Polysilicium |
US20080277319A1 (en) * | 2007-05-11 | 2008-11-13 | Wyrsta Michael D | Fine particle carbon dioxide transformation and sequestration |
-
2006
- 2006-04-06 DE DE102006016324A patent/DE102006016324A1/de not_active Withdrawn
-
2007
- 2007-03-28 KR KR1020087024377A patent/KR101068488B1/ko active IP Right Grant
- 2007-03-28 EP EP07727441A patent/EP2001607B1/de active Active
- 2007-03-28 US US12/296,219 patent/US10478860B2/en active Active
- 2007-03-28 CN CN2007800121856A patent/CN101415503B/zh active Active
- 2007-03-28 JP JP2009503540A patent/JP4988821B2/ja active Active
- 2007-03-28 CA CA2647721A patent/CA2647721C/en not_active Expired - Fee Related
- 2007-03-28 ES ES07727441T patent/ES2328295T3/es active Active
- 2007-03-28 DE DE502007001136T patent/DE502007001136D1/de active Active
- 2007-03-28 WO PCT/EP2007/052969 patent/WO2007115937A2/de active Application Filing
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1334907B1 (de) | 2002-02-01 | 2004-04-14 | Wacker-Chemie GmbH | Verfahren und Vorrichtung zur kostengünstigen Verpackung von Polysiliciumbruch |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102012204050A1 (de) * | 2012-03-15 | 2013-09-19 | Sunicon GmbH | Vorrichtung und Verfahren zum Bearbeiten von Silizium-Stücken |
DE102012204050B4 (de) * | 2012-03-15 | 2017-03-23 | Solarworld Industries Sachsen Gmbh | Vorrichtung und Verfahren zum Bearbeiten von Silizium-Stücken |
WO2021121558A1 (de) * | 2019-12-17 | 2021-06-24 | Wacker Chemie Ag | Verfahren zur herstellung und klassifizierung von polykristallinem silicium |
Also Published As
Publication number | Publication date |
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WO2007115937A3 (de) | 2007-11-29 |
DE102006016324A1 (de) | 2007-10-25 |
ES2328295T3 (es) | 2009-11-11 |
CA2647721C (en) | 2011-08-30 |
US10478860B2 (en) | 2019-11-19 |
CA2647721A1 (en) | 2007-10-18 |
DE502007001136D1 (de) | 2009-09-03 |
KR101068488B1 (ko) | 2011-09-28 |
JP4988821B2 (ja) | 2012-08-01 |
EP2001607B1 (de) | 2009-07-22 |
EP2001607A2 (de) | 2008-12-17 |
CN101415503A (zh) | 2009-04-22 |
CN101415503B (zh) | 2012-11-14 |
US20090120848A1 (en) | 2009-05-14 |
KR20080108273A (ko) | 2008-12-12 |
JP2009532319A (ja) | 2009-09-10 |
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