WO2007105716A1 - Substrate and device - Google Patents

Substrate and device Download PDF

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Publication number
WO2007105716A1
WO2007105716A1 PCT/JP2007/054924 JP2007054924W WO2007105716A1 WO 2007105716 A1 WO2007105716 A1 WO 2007105716A1 JP 2007054924 W JP2007054924 W JP 2007054924W WO 2007105716 A1 WO2007105716 A1 WO 2007105716A1
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WO
WIPO (PCT)
Prior art keywords
substrate
wiring
integrated circuit
wirings
vias
Prior art date
Application number
PCT/JP2007/054924
Other languages
French (fr)
Japanese (ja)
Inventor
Takashi Okano
Original Assignee
Daikin Industries, Ltd.
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Publication date
Application filed by Daikin Industries, Ltd. filed Critical Daikin Industries, Ltd.
Publication of WO2007105716A1 publication Critical patent/WO2007105716A1/en

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Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/0213Electrical arrangements not otherwise provided for
    • H05K1/0216Reduction of cross-talk, noise or electromagnetic interference
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/0213Electrical arrangements not otherwise provided for
    • H05K1/0216Reduction of cross-talk, noise or electromagnetic interference
    • H05K1/0218Reduction of cross-talk, noise or electromagnetic interference by printed shielding conductors, ground planes or power plane
    • H05K1/0219Printed shielding conductors for shielding around or between signal conductors, e.g. coplanar or coaxial printed shielding conductors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48245Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
    • H01L2224/48247Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/181Encapsulation
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/0296Conductive pattern lay-out details not covered by sub groups H05K1/02 - H05K1/0295
    • H05K1/0298Multilayer circuits
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/09Shape and layout
    • H05K2201/09209Shape and layout details of conductors
    • H05K2201/095Conductive through-holes or vias
    • H05K2201/09536Buried plated through-holes, i.e. plated through-holes formed in a core before lamination
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/09Shape and layout
    • H05K2201/09209Shape and layout details of conductors
    • H05K2201/095Conductive through-holes or vias
    • H05K2201/09636Details of adjacent, not connected vias
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/40Forming printed elements for providing electric connections to or between printed circuits
    • H05K3/42Plated through-holes or plated via connections
    • H05K3/429Plated through-holes specially for multilayer circuits, e.g. having connections to inner circuit layers

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Production Of Multi-Layered Print Wiring Board (AREA)
  • Structure Of Printed Boards (AREA)

Abstract

A substrate in which noise generated by a return current flowing through a multilayer substrate is reduced. The substrate has an insulation substrate (2), wirings (311, 312), signal lines (321, 322, 331, 332) and vias (323, 333, 341, 342). The wirings (311, 312) are laminated, between a surface (21a) and a surface (21b), through an insulating plate (202) which is a part of the insulation substrate (2) in a predetermined direction (90). The signal lines (321, 331) are arranged on the surface (21a) and provided oppositely to the wiring (311). The signal lines (322, 332) are arranged on the surface (21b) and provided oppositely to the wiring (312). A via (323) interconnects the signal lines (321, 322). A via (333) interconnects the signal lines (331, 332). Vias (341, 342) are provided in the insulating plate (202) and interconnect the wiring (311, 312). The via (341) is provided in proximity to the via (323), and the via (342) is provided in proximity to the via (333).

Description

明 細 書  Specification
基板及び装置  Substrate and equipment
技術分野  Technical field
[0001] 本発明は、基板及び装置に関し、特に多層積層基板に関する。  [0001] The present invention relates to a substrate and an apparatus, and more particularly to a multilayer laminated substrate.
背景技術  Background art
[0002] 集積回路が設けられる基板には、例えば多層積層基板が採用されている。多層積 層基板は、内層にグランドプレーンと電源プレーンとが積層される。多層積層基板の 積層方向についての表面には信号線が配される。  As a substrate on which an integrated circuit is provided, for example, a multilayer laminated substrate is employed. In a multilayer substrate, a ground plane and a power plane are stacked on the inner layer. Signal lines are arranged on the surface of the multilayer laminated substrate in the lamination direction.
[0003] 集積回路は、多層積層基板の上記表面に設けられる。そして、集積回路の電源端 子は一の上記信号線を介して電源プレーンに、集積回路のグランド端子は他の上記 信号線を介してグランドプレーンに、それぞれ接続される。 [0003] The integrated circuit is provided on the surface of the multilayer laminated substrate. The power supply terminal of the integrated circuit is connected to the power supply plane via one signal line, and the ground terminal of the integrated circuit is connected to the ground plane via the other signal line.
[0004] また、上記信号線が上記表面の両方に配されている場合であって、当該表面の一 方に配された信号線と他方に配された信号線とを接続する場合には、例えば多層積 層基板を当該表面の一方から他方へと貫通するビアが採用されている。 [0004] Further, in the case where the signal line is arranged on both of the surfaces, and when the signal line arranged on one side of the surface and the signal line arranged on the other side are connected, For example, a via that penetrates a multilayer substrate from one of the surfaces to the other is employed.
[0005] なお、ノイズ対策に関連する技術を以下に示す。 [0005] Technologies related to noise countermeasures are shown below.
[0006] 特許文献 1 :特許第 3170797号公報 [0006] Patent Document 1: Japanese Patent No. 3170797
特許文献 2:特許第 3327714号公報  Patent Document 2: Japanese Patent No. 3327714
非特許文献 1:伊江夢、「高速 ·高密度実装時代におけるプリント板の最適 EMC設計 1 プリント板における EMC設計の基本」、 EMC、ミマツコーポレーション、 2005年 1 月、 No. 201、 p. 69- 80  Non-Patent Document 1: Yue Ie, “Optimum EMC Design of Printed Circuit Boards in the High Speed and High Density Packaging Age 1 Basics of EMC Design in Printed Circuit Boards”, EMC, Mimatsu Corporation, January 2005, No. 201, p. 69- 80
発明の開示  Disclosure of the invention
発明が解決しょうとする課題  Problems to be solved by the invention
[0007] 電流が上記信号線を上記表面の一方から他方へと接続線を介して流れた場合に は、電源プレーン及びグランドプレーンの当該信号線と対向する部分にリターン電流 が流れる。 [0007] When a current flows through the signal line from one side of the surface to the other via a connection line, a return current flows through a portion of the power plane and the ground plane facing the signal line.
[0008] しかし、電源プレーンとグランドプレーンとは絶縁板を介して積層されているので、リ ターン電流は、ビアに流れる電流に沿って流れることができなレ、。よって、リターン電 流は電源プレーン及びグランドプレーンの一方を、電源プレーンとグランドプレーンと の間に接続されたコンデンサのある位置まで一旦流れる。そして、リターン電流は、コ ンデンサを通って、電源プレーン及びグランドプレーンの他方へと流れた後、当該他 方を信号線に沿って流れる。 [0008] However, since the power plane and the ground plane are stacked via an insulating plate, the return current cannot flow along the current flowing through the via. Therefore, return power The current once flows through one of the power plane and the ground plane to a position where there is a capacitor connected between the power plane and the ground plane. Then, the return current flows through the capacitor to the other of the power plane and the ground plane, and then flows along the signal line along the other side.
[0009] このため、上記コンデンサがビア近傍にない場合には、リターン電流力 電源プレ ーン及びグランドプレーンの一方から他方へと流れる経路が長くなり、以つてノイズが 発生しやすくなつていた。  [0009] For this reason, when the capacitor is not in the vicinity of the via, the path from one of the return current force power supply plane and the ground plane to the other becomes longer, and noise is likely to occur.
[0010] 本発明は上述した事情に鑑みてなされたものであり、多層積層基板に流れるリタ一 ン電流によって発生するノイズを低減することが目的とされる。  The present invention has been made in view of the above-described circumstances, and an object thereof is to reduce noise generated by a return current flowing in a multilayer laminated substrate.
課題を解決するための手段  Means for solving the problem
[0011] この発明の基板に力かる第 1の態様は、絶縁基板(2)と、前記絶縁基板の所定の 方向(90)につレ、ての表面の一方(21a)と他方(21b)との間で、前記所定の方向に 前記絶縁基板の一部(202)を介して積層される第 1及び第 2の配線(311 , 312)と、 前記表面の前記一方及び前記他方のそれぞれに配される第 1及び第 2の信号線(3 21 , 322 ; 331 , 332)と、前記第 1及び前記第 2の配線には接続せずに、前記第 1及 び前記第 2の信号線を相互に接続する第 1のビアの複数(323 ; 333)と、前記第 1及 び前記第 2の配線を相互に接続し、前記第 1のビアの前記複数のそれぞれに近接し て設けられる第 2のビアの複数(341; 342)とを備える。  [0011] A first aspect of the present invention that works on the substrate is that the insulating substrate (2) and one of the surfaces (21a) and the other (21b) of the insulating substrate in a predetermined direction (90). Between the first and second wirings (311, 312) stacked in a predetermined direction via a part (202) of the insulating substrate, and on each of the one and the other of the surface First and second signal lines (321, 322; 331, 332) arranged without being connected to the first and second wirings, and the first and second signal lines A plurality of first vias (323; 333) that connect each other, and the first and second wirings are connected to each other and provided close to each of the plurality of first vias A plurality of second vias (341; 342).
[0012] この発明の基板に力、かる第 2の態様は、第 1の態様に力、かる基板であって、前記第 1及び前記第 2の配線には接続せずに、前記表面(21a, 21b)のいずれか少なくとも 一方に配される第 3の配線(35)を更に備える。  [0012] The second aspect of the present invention is a substrate that exerts a force on the substrate according to the first aspect, wherein the surface (21a) is not connected to the first and second wirings. , 21b) is further provided with a third wiring (35) arranged on at least one of them.
[0013] この発明の基板に力、かる第 3の態様は、第 1または第 2の態様に力、かる基板であつ て、前記第 2のビアの前記複数(343)は、前記所定の方向(90)から見て格子状に 配列される。  [0013] The third aspect of the present invention is a substrate that exerts a force on the substrate according to the first or second aspect, wherein the plurality of second vias (343) are in the predetermined direction. They are arranged in a grid as seen from (90).
[0014] この発明の装置にかかる第 1の態様は、第 1乃至第 3のいずれか一つの態様にか かる基板と、前記基板の前記表面(21a, 21b)のいずれか少なくとも一方に設けられ る集積回路(11)とを備え、前記集積回路は、前記集積回路側にある前記第 1及び 前記第 2の配線(311, 312)の一方に接続され、前記集積回路と当該一方の配線と の前記所定の方向(90)についての距離(d)が lmm以下である。 [0014] A first aspect of the apparatus of the present invention is provided on at least one of the substrate according to any one of the first to third aspects and the surface (21a, 21b) of the substrate. An integrated circuit (11), and the integrated circuit is connected to one of the first and second wirings (311, 312) on the integrated circuit side, and the integrated circuit and the one wiring The distance (d) in the predetermined direction (90) is lmm or less.
[0015] この発明の装置に力かる第 2の態様は、第 1乃至第 3のいずれか一つの態様にか かる基板と、前記基板の前記表面(21a, 21b)のいずれか少なくとも一方に設けられ る集積回路(11)と、前記集積回路と同じ前記表面に設けられて前記集積回路を囲 む第 4の配線とを備える。 [0015] A second aspect of the apparatus of the present invention is provided on at least one of the substrate according to any one of the first to third aspects and the surface (21a, 21b) of the substrate. Integrated circuit (11), and a fourth wiring that is provided on the same surface as the integrated circuit and surrounds the integrated circuit.
発明の効果  The invention's effect
[0016] この発明の基板に力かる第 1の態様によれば、第 1及び第 2の信号線のいずれか一 方から他方へと第 1のビアを通って電流が流れて、第 1の配線及び第 2の配線にリタ ーン電流が生じても、リターン電流は当該第 1のビアに最も近い位置にある第 2のビ ァを通って第 1の配線と第 2の配線との間を流れるので、リターン電流の流れる経路 が短くなり、以つてノイズの発生が低減される。  [0016] According to the first aspect of the present invention, the current flows from one of the first and second signal lines to the other through the first via, and the first Even if a return current is generated in the wiring and the second wiring, the return current passes between the first wiring and the second wiring through the second via closest to the first via. Therefore, the path through which the return current flows is shortened, and noise generation is reduced.
[0017] この発明の基板に力かる第 2の態様によれば、第 1及び第 2の配線に印加される電 源電位とは異なる電源電位を第 3の配線に印加することができる。  [0017] According to the second aspect of the present invention, the power supply potential different from the power supply potential applied to the first and second wirings can be applied to the third wiring.
[0018] この発明の基板に力かる第 3の態様によれば、第 2のビアが格子状に配置されるの で、第 1のビアを格子の位置以外で第 1及び第 2の配線と接触しないどの位置に設け ても、第 1のビアに対して近接する第 2のビアが存在する。  [0018] According to the third aspect of the present invention, the second vias are arranged in a grid pattern, so that the first vias are connected to the first and second wirings at positions other than the grid position. There is a second via close to the first via wherever it is not in contact.
[0019] この発明の装置に力、かる第 1の態様によれば、集積回路と配線との間の距離が小さ くなるので、集積回路及び配線のいずれか一方から他方へと流れる電界は、集積回 路と配線との間を流れやすい。よって、当該電界に起因したノイズの漏れが低減でき る。  [0019] According to the first aspect of the present invention, since the distance between the integrated circuit and the wiring is reduced, the electric field flowing from one of the integrated circuit and the wiring to the other is It is easy to flow between the integrated circuit and the wiring. Therefore, noise leakage due to the electric field can be reduced.
[0020] この発明の装置に力、かる第 2の態様によれば、集積回路で発生したノイズを第 4の 配線に流すことで、外部へのノイズの漏れが低減できる。し力、も、集積回路の周囲で 第 4の配線の面積を広くすることができるので、ノイズの外部への漏れをより低減する こと力 Sできる。  [0020] According to the second aspect of the present invention, leakage of noise to the outside can be reduced by flowing noise generated in the integrated circuit through the fourth wiring. However, since the area of the fourth wiring can be increased around the integrated circuit, it is possible to further reduce the leakage of noise to the outside.
[0021] この発明の目的、特徴、局面、および利点は、以下の詳細な説明と添付図面とによ つて、より明白となる。  [0021] The objects, features, aspects, and advantages of the present invention will become more apparent from the following detailed description and the accompanying drawings.
図面の簡単な説明  Brief Description of Drawings
[0022] [図 1]本発明にかかる、基板を概念的に示す上面図である。 [図 2]図 1で示される位置 A— Aでの断面を概念的に示す図である。 FIG. 1 is a top view conceptually showing a substrate according to the present invention. FIG. 2 is a diagram conceptually showing a cross section at a position AA shown in FIG.
[図 3]基板を概念的に示す斜視図である。  FIG. 3 is a perspective view conceptually showing a substrate.
[図 4]境界面 22を所定の方向 90から見た図である。  FIG. 4 is a view of the boundary surface 22 as viewed from a predetermined direction 90.
[図 5]図 1で示される位置 B— Bでの断面を概念的に示す図である。  FIG. 5 is a diagram conceptually showing a cross section at a position BB shown in FIG. 1.
[図 6]基板の表面 21aに設けられた集積回路 11を概念的に示す上面図である。 発明を実施するための最良の形態  FIG. 6 is a top view conceptually showing an integrated circuit 11 provided on a surface 21a of a substrate. BEST MODE FOR CARRYING OUT THE INVENTION
[0023] 図 1は、本発明に力かる基板を概念的に示す上面図である。また、図 2は、図 1で示 される位置 A— Aでの断面を示す。図 3は、当該基板の斜視図であり、後述する各層 を、その積層方向に分離して示している。  FIG. 1 is a top view conceptually showing a substrate that is useful in the present invention. FIG. 2 shows a cross section at the position AA shown in FIG. FIG. 3 is a perspective view of the substrate, showing each layer described later separately in the stacking direction.
[0024] 基板は、絶縁基板 2、酉己線 311 , 312、信号線 321, 322, 331, 332及びビア 323 , 333, 341, 342を有する。基板には、例えば集積回路 11を設けることができる。図 1及び図 2では、集積回路 11及びこれに接続される端子 P11〜P14を有する素子 1 を基板の表面 21aに設けた場合が示されている。  The substrate has an insulating substrate 2, self-insulating lines 311, 312, signal lines 321, 322, 331, 332 and vias 323, 333, 341, 342. For example, an integrated circuit 11 can be provided on the substrate. FIG. 1 and FIG. 2 show the case where the element 1 having the integrated circuit 11 and the terminals P11 to P14 connected thereto is provided on the surface 21a of the substrate.
[0025] 絶縁基板 2は、絶縁板 201〜203を有する。絶縁板 203, 202, 201は、この順に 所定の方向 90について積層されている。なお、絶縁基板 2の所定の方向 90につい ての表面のうち、絶縁板 201側を符号 21aで、絶縁板 203側を符号 21bで表してい る。また、絶縁板 201と絶縁板 202との境界面 22、及び絶縁板 202と絶縁板 203との 境界面 23を、それぞれ破線で示している。なお、図 3では、表面 21a, 21b及び境界 面 22, 23が層として模式的に示されている。  The insulating substrate 2 includes insulating plates 201 to 203. The insulating plates 203, 202, 201 are laminated in the predetermined direction 90 in this order. Of the surface of the insulating substrate 2 in the predetermined direction 90, the insulating plate 201 side is indicated by reference numeral 21a, and the insulating plate 203 side is indicated by reference numeral 21b. In addition, a boundary surface 22 between the insulating plate 201 and the insulating plate 202 and a boundary surface 23 between the insulating plate 202 and the insulating plate 203 are indicated by broken lines, respectively. In FIG. 3, the surfaces 21a and 21b and the boundary surfaces 22 and 23 are schematically shown as layers.
[0026] 酉己線 311は、絶縁板 201と絶縁板 202との間に設けられてレ、る。酉己線 312は、絶縁 板 202と絶縁板 203との間に設けられてレヽる。この内容は、酉己線 311 , 312は、表面 21aと表面 21bとの間で、所定の方向 90に絶縁基板 2の一部である絶縁板 202を介 して積層されると把握することができる。配線 311 , 312には、例えばグランドプレー ンが採用できる。  [0026] The selfish wire 311 is provided between the insulating plate 201 and the insulating plate 202. The self-insulating wire 312 is provided between the insulating plate 202 and the insulating plate 203 and is connected. This content can be understood that the selfish wires 311 and 312 are laminated between the surface 21a and the surface 21b via the insulating plate 202 which is a part of the insulating substrate 2 in a predetermined direction 90. it can. For example, a ground plane can be adopted as the wirings 311 and 312.
[0027] 信号線 321は、表面 21aに配され、配線 311に対向して設けられている。信号線 3 22は、表面 21bに配され、配線 312に対向して設けられている。なお、図:!〜 3では、 信号線 321が、端子 PI 1を介して集積回路 11に接続されている。  The signal line 321 is disposed on the surface 21 a and is provided to face the wiring 311. The signal line 3 22 is disposed on the surface 21 b and is provided to face the wiring 312. In FIG .:! To 3, the signal line 321 is connected to the integrated circuit 11 via the terminal PI1.
[0028] ビア 323は、信号線 321 , 322を相互に接続する。具体的には、ビア 323は、絶縁 基板 2を表面 21a, 21bのいずれか一方から他方へと所定の方向 90に貫通し、ビア 3 23の両端がそれぞれ信号線 321 , 322に接続される。ただし、ビア 323は、配線 311 , 312には接続されなレ、。例えば、配線 311 , 312がプレーン状である場合には、図 :!〜 3に示されるように配線 311, 312にはそれぞれ、ビア 323を通すための間隙 31 la, 312baが設けられる。 The via 323 connects the signal lines 321 and 322 to each other. Specifically, via 323 is isolated The substrate 2 penetrates from one of the surfaces 21a and 21b to the other in a predetermined direction 90, and both ends of the via 323 are connected to signal lines 321 and 322, respectively. However, the via 323 is not connected to the wirings 311 and 312. For example, when the wirings 311 and 312 are plain, gaps 31 la and 312ba for passing vias 323 are provided in the wirings 311 and 312 as shown in FIGS.
[0029] 同様に、信号線 331 , 332はそれぞれ、表面 21a, 21bに配されている。ビア 333 は、配線 311, 312には接続されずに、信号線 331, 332を相互に接続する。なお、 図 1〜図 3では、配線 311 , 312にはそれぞれ、ビア 333を通すための間隙 311b, 3 12bが設けられている。また、信号線 331が、端子 P12を介して集積回路 11に接続 されている。 Similarly, the signal lines 331 and 332 are disposed on the surfaces 21a and 21b, respectively. The via 333 connects the signal lines 331 and 332 to each other without being connected to the wirings 311 and 312. In FIG. 1 to FIG. 3, the wirings 311 and 312 are provided with gaps 311b and 312b for passing the via 333, respectively. Further, the signal line 331 is connected to the integrated circuit 11 via the terminal P12.
[0030] ビア 341, 342は、絶縁板 202に設けられ、配線 311, 312を相互に接続する。そし て、ビア 341はビア 323に近接して設けられ、ビア 342はビア 333に近接して設けら れる。  The vias 341 and 342 are provided on the insulating plate 202 and connect the wirings 311 and 312 to each other. The via 341 is provided close to the via 323, and the via 342 is provided close to the via 333.
[0031] 力かる基板によれば、信号線 321 , 322 (331 , 332)のいずれか一方力 他方へと ビア 323 (333)を通って電流が流れて、配線 311 , 312にリターン電流が生じても、リ ターン電流はビア 323 (333)に最も近い位置にあるビア 341 (342)を通って配線 31 1 , 312間を流れるので、リターン電流の流れる経路が短くなり、以つてノイズの発生 が低減される。  [0031] According to the power board, current flows through the via 323 (333) to one of the signal lines 321 and 322 (331 and 332) and the other, and a return current is generated in the wiring 311 and 312. However, since the return current flows between the wirings 31 1 and 312 through the via 341 (342) located closest to the via 323 (333), the return current path is shortened, and noise is generated. Is reduced.
[0032] 上記効果を、図 3を用いて具体的に説明する。なお、電流及びリターン電流が流れ る経路及び方向を図 3では矢印で示している。電流が、信号線 321、ビア 323及び信 号線 322をこの順に流れると、これに伴って、リターン電流が配線 311 , 312及びビア 341を流れる。つまり、リターン電流は、配線 312の信号線 322に対応対向する部分 を、信号線 322の電流とは反対の方向へとビア 323の近傍の位置 rlまで流れ、その 後ビア 341へと向かって流れる。ビア 341の配線 312側の一端 341 aに到達したリタ ーン電流は、ビア 341内を配線 311側へと流れる。配線 311に到達したリターン電流 は、ビア 341の他端 341bから、配線 311の信号線 321に対向する部分であってビア 323近傍の位置 r2まで流れ、その後当該部分を信号線 321の電流とは反対の方向 へと流れる。このとき、リターン電流が流れるビア 341はビア 323の近傍にあるので、リ ターン電流が流れる経路のうち位置 rl力 位置 r2までの長さが短くなる。よって、ノィ ズの発生が低減される。 [0032] The above effect will be specifically described with reference to FIG. Note that the path and direction in which the current and return current flow are indicated by arrows in FIG. When the current flows through the signal line 321, the via 323 and the signal line 322 in this order, the return current flows through the wirings 311 and 312 and the via 341 accordingly. That is, the return current flows through the portion of the wiring 312 facing the signal line 322 in the opposite direction to the current of the signal line 322 to the position rl near the via 323, and then flows toward the via 341. . The return current that has reached one end 341 a on the wiring 312 side of the via 341 flows in the via 341 to the wiring 311 side. The return current that has reached the wiring 311 flows from the other end 341b of the via 341 to the position r2 in the vicinity of the via 323, which is opposite to the signal line 321 of the wiring 311. It flows in the opposite direction. At this time, since the via 341 in which the return current flows is in the vicinity of the via 323, the The length to position rl force position r2 in the path through which the turn current flows is shortened. Therefore, the generation of noise is reduced.
[0033] 電流が、信号線 331、ビア 333及び信号線 332をこの順に流れた場合にも、リタ一 ン電流は発生する。しかし、上述したのと同様に、リターン電流は、ビア 333近傍にあ るビア 342を流れるので、リターン電流が流れる経路が短くなり、以つてノイズの発生 が低減される。 [0033] When a current flows through the signal line 331, the via 333, and the signal line 332 in this order, a return current is also generated. However, as described above, the return current flows through the via 342 in the vicinity of the via 333, so the path through which the return current flows is shortened, and noise generation is reduced.
[0034] 図 4は、境界面 22を所定の方向 90から見た図である。図 4では、配線 31 1, 312を 相互に接続するビア 343の複数力 S、格子状に絶縁板 202に設けられている。  FIG. 4 is a view of the boundary surface 22 as viewed from a predetermined direction 90. In FIG. 4, a plurality of forces S of vias 343 connecting the wirings 31 1 and 312 to each other are provided on the insulating plate 202 in a lattice shape.
[0035] かかる基板では、ビア 343が格子状に配置されるので、ビア 323, 333を格子の位 置以外で配線 31 1 , 312と接触しないどの位置に設けても、ビア 323, 333に対して 近接するビア 343が存在し、以つてリターン電流の経路が短くなる。  In such a substrate, since the vias 343 are arranged in a grid pattern, the vias 323 and 333 can be provided at any position other than the grid position so as not to contact the wirings 31 1 and 312 with respect to the vias 323 and 333. There is a nearby via 343, which shortens the return current path.
[0036] 図 1に戻って、基板は配線 35, 36を更に備える。配線 35は、端子 P13を介して集 積回路 1 1に接続されている。配線 36については、一端が端子 P14を介して集積回 路 1 1に接続され、他端が、絶縁板 201に設けられたビア 335を介して配線 31 1に接 続されている。なお、図 1で示される位置 B— Bでの断面が図 5に示されている。  Returning to FIG. 1, the substrate further includes wirings 35 and 36. The wiring 35 is connected to the integrated circuit 11 through the terminal P13. One end of the wiring 36 is connected to the integrated circuit 11 via the terminal P14, and the other end is connected to the wiring 311 via the via 335 provided in the insulating plate 201. Note that FIG. 5 shows a cross-section at position BB shown in FIG.
[0037] 力かる基板によれば、ビア 341〜343によって相互に接続された配線 31 1 , 312に 印加される電源電位とは異なる電源電位を、配線 35に印加することができる。例えば 、配線 35を電源ラインとし、配線 31 1 , 312をグランドプレーンとすれば、電源ラインと グランドプレーンとの間に印加される電圧を集積回路 1 1に供給することができる。  According to the powerful substrate, a power supply potential different from the power supply potential applied to the wirings 31 1 and 312 connected to each other by the vias 341 to 343 can be applied to the wiring 35. For example, if the wiring 35 is a power line and the wirings 31 1 and 312 are ground planes, a voltage applied between the power line and the ground plane can be supplied to the integrated circuit 11.
[0038] 図 1では更に、配線 35が信号線 321に隣接かつ並行して配されている。この場合、 信号線 321と配線 35との間で生じる単位長さ当たりの寄生容量 C 1が、信号線 321と 配線 31 1との間で生じる単位長さ当たりの寄生容量 C2よりも小さいことが望ましい。 なぜなら、配線 321と配線 35との間での静電結合が小さぐ以つて信号線 321に載る ノイズが配線 35に与える影響が低減されるからである。なお、配線 31 1がグランドプ レーンである場合には、配線 31 1に対して当該ノイズが載っても、配線 31 1は電力容 量が大きいと把握されるグランドに接続されるので、その影響は小さい。ここで、寄生 容量 C1は、信号線 321と配線 35との間を埋める物質の誘電率 ε 1、信号線 321の 所定の方向 90についての厚み dl (図 2)及び信号線 321と配線 35との間の距離 δ 2 (図 1)を用いて、 ε l ' dl/ δ 2で表される。また、寄生容量 C2は、絶縁板 201の誘 電率 ε 2、所定の方向 90から見た信号線 321の延在方向に対する幅 hi (図 1)及び 信号線 321と配線 31 1との間の距離 δ 1 (図 2)を用いて、 ε 2 'hl/ δ 1と表される。 In FIG. 1, the wiring 35 is further arranged adjacent to and in parallel with the signal line 321. In this case, the parasitic capacitance C 1 per unit length generated between the signal line 321 and the wiring 35 is smaller than the parasitic capacitance C2 per unit length generated between the signal line 321 and the wiring 31 1. desirable. This is because the influence of noise on the signal line 321 on the wiring 35 is reduced because the electrostatic coupling between the wiring 321 and the wiring 35 is small. If the wiring 311 is a ground plane, even if the noise is placed on the wiring 311, the wiring 311 is connected to the ground that has a large power capacity. small. Here, the parasitic capacitance C1 is the dielectric constant ε 1 of the material filling the space between the signal line 321 and the wiring 35, the thickness dl of the signal line 321 in the predetermined direction 90 (FIG. 2), and the signal line 321 and the wiring 35. The distance between δ 2 Using (Fig. 1), it is expressed as ε l 'dl / δ 2. In addition, the parasitic capacitance C2 is the dielectric constant ε 2 of the insulating plate 201, the width hi (FIG. 1) with respect to the extending direction of the signal line 321 when viewed from the predetermined direction 90, and Using the distance δ 1 (Fig. 2), it is expressed as ε 2 'hl / δ 1.
[0039] 図 5に示されるように、配線 311がグランドに接続される場合には、集積回路 11と配 線 311との所定の方向 90についての距離 dは、 1mm以下であることが望ましい。な ぜなら、集積回路 11と配線 311との間の距離 dが小さいので、集積回路 11及び配線 311のレ、ずれか一方から他方へと流れる電界は、集積回路 11と配線 311との間を流 れやすぐ以つて当該電界に起因したノイズの漏れが低減できるからである。  [0039] As shown in FIG. 5, when the wiring 311 is connected to the ground, the distance d between the integrated circuit 11 and the wiring 311 in the predetermined direction 90 is preferably 1 mm or less. This is because the distance d between the integrated circuit 11 and the wiring 311 is small, so that the electric field flowing from one side of the integrated circuit 11 and the wiring 311 to the other side is between the integrated circuit 11 and the wiring 311. This is because the noise leakage due to the electric field can be reduced as soon as the current flows.
[0040] 図 6は、基板の表面 21 aに設けられた集積回路 11を概念的に示す上面図である。  FIG. 6 is a top view conceptually showing the integrated circuit 11 provided on the surface 21 a of the substrate.
基板は、集積回路 11と同じ表面 21aに設けられたグランドパターン 313を備える。グ ランドパターン 313は、集積回路 11を囲んでいる。  The substrate includes a ground pattern 313 provided on the same surface 21 a as the integrated circuit 11. The ground pattern 313 surrounds the integrated circuit 11.
[0041] 力、かる態様によれば、集積回路 11で発生したノイズをグランドパターン 313に流す ことで、外部へのノイズの漏れが低減できる。しかも、集積回路 11の周囲でグランドパ ターン 313の面積を広くすることができるので、ノイズの外部への漏れをより低減する こと力 Sできる。より望ましくは、グランドパターンの幅 h2, h3は 4mm以上である。  [0041] According to the above-described aspect, the noise generated in the integrated circuit 11 is caused to flow through the ground pattern 313, so that noise leakage to the outside can be reduced. In addition, since the area of the ground pattern 313 can be increased around the integrated circuit 11, it is possible to further reduce the leakage of noise to the outside. More preferably, the width h2 and h3 of the ground pattern is 4 mm or more.
[0042] この発明は詳細に説明された力 上記した説明は、すべての局面において、例示 であって、この発明がそれに限定されるものではない。例示されていない無数の変形 例が、この発明の範囲から外れることなく想定され得るものと解される。  The present invention has been described in detail. The above description is illustrative in all aspects, and the present invention is not limited thereto. It is understood that countless variations that are not illustrated can be envisaged without departing from the scope of the present invention.

Claims

請求の範囲 The scope of the claims
[1] 絶縁基板(2)と、  [1] Insulating substrate (2);
前記絶縁基板の所定の方向(90)につレ、ての表面の一方(21a)と他方(21b)との 間で、前記所定の方向に前記絶縁基板の一部(202)を介して積層される第 1及び 第 2の配線(311, 312)と、  Laminated between one surface (21a) and the other surface (21b) of the insulating substrate in a predetermined direction (90) of the insulating substrate via a part (202) of the insulating substrate in the predetermined direction First and second wires (311, 312) to be
前記表面の前記一方及び前記他方のそれぞれに配される第 1及び第 2の信号線( 321 , 322 ; 331 , 332)と、  First and second signal lines (321, 322; 331, 332) disposed on each of the one and the other of the surface;
前記第 1及び前記第 2の配線には接続せずに、前記第 1及び前記第 2の信号線を 相互に接続する第 1のビア(323; 333)と、  A first via (323; 333) that connects the first and second signal lines to each other without being connected to the first and second wirings;
前記第 1及び前記第 2の配線を相互に接続し、前記第 1のビアに近接して設けられ る第 2のビア(341 ; 342)と  A second via (341; 342) connected to the first and second wirings and provided close to the first via;
を備える、基板。  Comprising a substrate.
[2] 前記第 1及び前記第 2の配線には接続せずに、前記表面(21a, 21b)のいずれか 少なくとも一方に配される第 3の配線(35)  [2] Third wiring (35) arranged on at least one of the surfaces (21a, 21b) without being connected to the first and second wirings
を更に備える、請求項 1記載の基板。  The substrate according to claim 1, further comprising:
[3] 前記第 1のビア及び前記第 2のビアは複数あって、 [3] There are a plurality of the first vias and the second vias,
前記第 2のビアの前記複数(343)は、前記所定の方向(90)から見て格子状に配 列される、請求項 1記載の基板。  The substrate according to claim 1, wherein the plurality (343) of the second vias are arranged in a lattice pattern when viewed from the predetermined direction (90).
[4] 前記第 1のビア及び前記第 2のビアは複数あって、 [4] There are a plurality of the first vias and the second vias,
前記第 2のビアの前記複数(343)は、前記所定の方向(90)から見て格子状に配 列される、請求項 2記載の基板。  The substrate according to claim 2, wherein the plurality (343) of the second vias are arranged in a lattice shape when viewed from the predetermined direction (90).
[5] 請求項 1乃至請求項 4のいずれか一つに記載の基板と、 [5] The substrate according to any one of claims 1 to 4, and
前記基板の前記表面(21a, 21b)のいずれか少なくとも一方に設けられる集積回 路(11)と  An integrated circuit (11) provided on at least one of the surfaces (21a, 21b) of the substrate;
を備え、  With
前記集積回路は、前記集積回路側にある前記第 1及び前記第 2の配線(311, 31 2)の一方に接続され、  The integrated circuit is connected to one of the first and second wirings (311, 31 2) on the integrated circuit side,
前記集積回路と当該一方の配線との前記所定の方向(90)についての距離 (d)が lmm以下である、装置。 The distance (d) between the integrated circuit and the one wiring in the predetermined direction (90) is An apparatus that is lmm or less.
請求項 1乃至請求項 4のいずれか一つに記載の基板と、  A substrate according to any one of claims 1 to 4, and
前記基板の前記表面(21a, 21b)のいずれか少なくとも一方に設けられる集積回 路(11)と、  An integrated circuit (11) provided on at least one of the surfaces (21a, 21b) of the substrate;
前記集積回路と同じ前記表面に設けられて前記集積回路を囲む第 4の配線(313) と  A fourth wiring (313) provided on the same surface as the integrated circuit and surrounding the integrated circuit;
を備える、装置。 An apparatus comprising:
PCT/JP2007/054924 2006-03-14 2007-03-13 Substrate and device WO2007105716A1 (en)

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JP2009135213A (en) * 2007-11-29 2009-06-18 Mitsubishi Electric Corp Printed wiring board
CN101960934B (en) * 2008-03-28 2013-01-23 日本电气株式会社 Multilayer printed wiring board

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JPH1174441A (en) * 1992-05-25 1999-03-16 Hitachi Ltd Module structure
JPH11261181A (en) * 1998-03-16 1999-09-24 Nec Corp Printed circuit board
JPH11330703A (en) * 1998-05-13 1999-11-30 Nec Corp Multi-layer printed wiring board
JP2000183541A (en) * 1998-12-11 2000-06-30 Toshiba Iyo System Engineering Kk Multilayer printed board
JP2003163467A (en) * 2001-05-14 2003-06-06 Fuji Xerox Co Ltd Printed wiring board and device for aiding design of printed wiring board
JP2006013010A (en) * 2004-06-23 2006-01-12 Aica Kogyo Co Ltd Multilayer printed board

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Publication number Priority date Publication date Assignee Title
JPH1174441A (en) * 1992-05-25 1999-03-16 Hitachi Ltd Module structure
JPH11261181A (en) * 1998-03-16 1999-09-24 Nec Corp Printed circuit board
JPH11330703A (en) * 1998-05-13 1999-11-30 Nec Corp Multi-layer printed wiring board
JP2000183541A (en) * 1998-12-11 2000-06-30 Toshiba Iyo System Engineering Kk Multilayer printed board
JP2003163467A (en) * 2001-05-14 2003-06-06 Fuji Xerox Co Ltd Printed wiring board and device for aiding design of printed wiring board
JP2006013010A (en) * 2004-06-23 2006-01-12 Aica Kogyo Co Ltd Multilayer printed board

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