WO2007043166A1

WO2007043166A1 - Process for producing metal plate for metal mask, and metal mask

Info

Publication number: WO2007043166A1
Application number: PCT/JP2005/018686
Authority: WO
Inventors: Kazuhiko Kato
Original assignee: Beac Co., Ltd.
Priority date: 2005-10-11
Filing date: 2005-10-11
Publication date: 2007-04-19
Also published as: JPWO2007043166A1; WO2007043166A9

Abstract

This invention provides a process for producing a metal plate for a metal mask, comprising a first step of providing a metal plate, a second step of forming a plurality of holes in the metal plate by drilling holes one by one in the metal plate while varying the relative position between a drilling mechanism and the metal plate in such a state that, in a drilling apparatus provided with a drilling mechanism comprising a ding mold and a punching mold, the metal plate is disposed between the ding mold and the punching mold, and a third step of polishing for deburring on the ding mold-side face in the metal plate. According to the above constitution, holes having a straight wall face can be formed even in relatively thick metal plates for use in metal plates for metal masks. Further, the need to prepare a photomask can be eliminated in the production of a new metal plate for a metal mask by providing a ding mold and a punching mold corresponding to a predetermined hole diameter, and, thus, the throughput time of the metal plate for a metal mask can be reduced.

Description

Specification

Metal mask manufacturing method and metal mask technical field

The present invention relates to a method for manufacturing a metal plate for a metal mask and a metal mask.

Background art

A metal mask is a mask used when a printing paste such as a solder paste is applied to a predetermined pattern on a printed wiring board.

FIG. 11 is a diagram showing the structure of the metal mask 10. As shown in FIG. 11, the metal mask 10 includes a plate frame 20, a mesh 30 attached to the plate frame 20, and a metal plate for metal mask 40 attached to the mesh 30 and having a plurality of holes formed in a predetermined pattern. And have. The metal mask metal plate 40 is manufactured by a metal mask metal plate manufacturing method by an etching method, a metal mask metal plate manufacturing method by an electric method, or a metal mask metal plate manufacturing method by a laser coating method. RU

[0004] A method of manufacturing a metal plate for a metal mask by an etching method is to form a mask with a predetermined pattern on both sides of a metal plate such as stainless steel, and then etch both sides of the metal plate with an etching solution to form a metal plate. A metal plate for a metal mask is manufactured by forming a predetermined pattern of holes (see, for example, Patent Document 1).

[0005] In the method of manufacturing a metal plate for a metal mask by an electric method, a mask having a predetermined pattern is formed on the surface of the electric mother mold and then covered with the mask in the electric mother mold. Electrodeposited metal such as electrodeposited metal, and then the surface of the electrodeposited metal is polished by mechanical polishing or electrolytic polishing. Finally, the electrodeposited metal is peeled off from the electroplating matrix and the mask is removed. Thus, a metal plate for a metal mask having a predetermined pattern of holes is manufactured (for example, see Patent Document 2).

[0006] A metal mask metal plate manufacturing method using a laser processing method involves scanning a laser beam in accordance with a predetermined pattern on the surface of a metal plate such as stainless steel to form a predetermined pattern hole in the metal plate. A metal plate is manufactured (for example, refer to Patent Document 1). [0007] Patent Document 1: Japanese Patent Laid-Open No. 9248976

Patent Document 2: Japanese Patent Laid-Open No. 10-305670

Disclosure of the invention

Problems to be solved by the invention

[0008] FIG. 12 is a diagram for explaining a problem in the method of manufacturing a metal plate for a metal mask by an etching method. Reference numeral 740 denotes a metal plate for a metal mask, and reference numeral 744 denotes a side wall of the hole.

[0009] In the method for manufacturing a metal plate for a metal mask by an etching method, it is necessary to form a hole by etching both sides of a relatively thick metal plate, so that it has a straight wall as shown in FIG. There was a problem that the hole could not be formed. If it is not possible to form a hole having a straight wall in this way, when the printing paste is applied, the passing property of the printing paste is lowered, and the quality of the printing paste applied on the printed wiring board is reduced. It becomes.

In addition, in the method of manufacturing a metal plate for a metal mask by an etching method, it is necessary to prepare a new photomask every time a new metal plate for a metal mask is manufactured. Therefore, the manufacturing period of the metal plate for a metal mask is shortened. There was a problem that it was not easy.

[0010] FIG. 13 is a diagram for explaining a problem in the method of manufacturing a metal plate for a metal mask by the electroplating method. Reference numeral 840 indicates a metal plate for the metal mask, reference numeral 842a indicates the surface of the metal plate for the metal mask on the electrodeposition mother die side, reference numeral 842b indicates the surface of the electrodeposited metal of the metal plate for the metal mask, and reference numeral 844 indicates The side wall of the hole is shown, and reference numeral 846 denotes the hole.

[0011] In the method for producing a metal plate for a metal mask by the electroplating method, it is necessary to form a relatively thick mask in order to form a relatively thick metal plate. For this reason, as shown in FIG. 13, the mask wall surface is tapered or streaks. As a result, there is a problem that a hole having a straight wall surface cannot be formed.

In addition, in the manufacturing method of the metal mask metal plate by the electroplating method, every time a new metal mask metal plate is manufactured, as in the case of the metal mask metal plate manufacturing method by the etching method. It is necessary to create a photomask, so metal There was a problem that it was not easy to shorten the manufacturing period of the mask metal plate.

FIG. 14 is a diagram for explaining a problem in the method of manufacturing a metal plate for a metal mask by the laser cutting method. Fig. 14 (a) is a cross-sectional view of the metal plate immediately after forming a hole in the metal plate by laser processing, and Fig. 14 (b) is a cross-sectional view of the metal plate after removing dross by the polishing process. . Reference numeral 940 indicates a metal plate for the metal mask, reference numeral 942a indicates the surface on the laser light incident side of the metal plate for the metal mask, reference numeral 942b indicates a surface on the laser light emission side of the metal plate for the metal mask, and reference numeral 944 Indicates the side wall of the hole, and reference numeral 946 indicates a dross.

[0013] In the method for producing a metal plate for a metal mask by the laser processing method, it is necessary to form a hole while melting a relatively thick metal plate by the heat of laser light, so as shown in FIG. There was a problem that holes having straight walls could not be formed because the wall surface of the hole was tapered or the surface of the hole wall was rough.

Accordingly, the present invention has been made to solve the above-described problems, and can form a hole having a straight wall surface, thereby shortening the manufacturing period of the metal plate for the metal mask. An object of the present invention is to provide a method for producing a metal plate for a metal mask that is easy to perform. Means for solving the problem

[0015] (1) A method for producing a metal plate for a metal mask according to the present invention comprises a first step of preparing a metal plate to be a starting material of a metal plate for a metal mask, a die mold and a punch mold. Drilling while changing the relative position between the punching mechanism and the metal plate in a state where the metal plate is disposed between the die die and the punching die in a punching device having a punching mechanism. And forming a plurality of holes in the metal plate by forming holes one by one in the metal plate, and polishing and polishing the surface of the metal plate on the die mold side. And a third step to be performed.

[0016] Therefore, according to the method for producing a metal plate for a metal mask of the present invention, a hole is formed in the metal plate by performing drilling using a die mold and a punch mold. Therefore, it is possible to form a hole having a straight wall surface even for a relatively thick metal plate.

[0017] By the way, the hole diameter in the hole of the metal plate for the metal mask is specified to some extent. Therefore, if multiple die dies and punch dies corresponding to such hole diameters are prepared, when a new metal mask metal plate is manufactured, the drilling pattern can be reprogrammed. It becomes possible to manufacture a metal plate for a metal mask, which is troublesome. For this reason

Therefore, it is not necessary to produce a new photomask, and the manufacturing period of the metal plate for the metal mask can be shortened.

[0018] Note that burrs may occur on the surface of the metal plate on the die mold side when drilling is performed. However, according to the method for manufacturing a metal plate for a metal mask of the present invention, Since deburring and polishing is performed in three steps, problems associated with the generation of such a sludge can be suppressed.

[0019] The deburring polishing can be performed using any one of a mechanical polishing method, an electrolytic polishing method, and a chemical polishing method.

[0020] (2) In the method for manufacturing a metal plate for a metal mask according to (1), the punching device is a punching device having a plurality of punches having different diameters. It is preferable to form a plurality of holes in the metal plate by selecting a predetermined punch and forming a hole in the metal plate one by one.

[0021] In some cases, it is necessary to form a plurality of types of holes having different diameters in the metal plate for the metal mask. For example, a plurality of types of holes may be formed as print pattern formation holes, or other types of holes such as reference holes for printing may be formed in addition to the print pattern formation holes. According to the method for manufacturing a metal plate for a metal mask of the present invention, even in such a case, the plurality of types of holes can be formed by using the same punching device and repeatedly in the punching device. Therefore, it is possible to increase the productivity when manufacturing a metal plate for a metal mask.

In this case, a punch die having a plurality of types of punches is used and a predetermined punch is selected for the punch die force, and a plurality of punch dies having a single type of punch are selected. It is also possible to use a punching mechanism with individual punches and select a punching die with a predetermined punching force! It is also possible to use a punching mechanism having a plurality of punch dies having a plurality of types of punches and to select a predetermined punch with this punching mechanism force. [0023] (3) In the method for producing a metal plate for a metal mask according to (1) or (2), in the second step, an interval between the die die and the punch die is set. 0.02mn than the thickness of the metal plate! ~ 3. It is preferable to make a hole in the metal plate by raising and lowering only the punch while enlarging it within the range of Omm.

By adopting such a method, since only the punch is moved up and down to form the hole in the metal plate, it becomes possible to perform the drilling at a high speed. As a result, productivity when manufacturing a metal plate for a metal mask can be increased.

Further, since the relative position between the punching mechanism and the metal plate can be changed while keeping the distance between the die mold and the punch mold constant, drilling can be performed at high speed. As a result, productivity when manufacturing a metal plate for a metal mask can be increased.

(4) In the method for producing a metal plate for a metal mask according to (1) or (2), the punching device is a punching device having the punching die force S stripper plate, In the second step, it is also preferable to form a hole in the metal plate with the stripper plate pressed against the metal plate.

[0026] By adopting such a method, since the hole is formed in the metal plate in a state where the stripper plate is pressed against the metal plate, the hole can be formed in the metal plate with high accuracy. .

[0027] (5) The method for producing a metal plate for a metal mask according to any one of (1) to (4) above! In the third step, it is preferable that the surface of the metal plate on the punch die side is also polished.

[0028] By adopting such a method, both the surface on the die mold side and the surface on the punch mold side of the metal plate are subjected to the polishing step. It is possible to suppress the occurrence of warpage in the metal plate as much as possible.

[0029] (6) The method for producing a metal plate for a metal mask according to any one of (1) to (5) above! Preferably, the punching device further includes a pair of clampers for gripping the metal plate from both sides sandwiching the punching mechanism.

[0030] By adopting such a method, the metal plate can be stably disposed between the die mold and the punch mold. In this case, it is also preferable to give an appropriate tension to the metal plate by adjusting the distance between the pair of clampers.

[0031] Note that the relative position between the drilling mechanism and the metal plate can be changed by moving the metal plate relative to the fixed drilling mechanism by moving the pair of clampers synchronously. It can also be performed by moving the drilling mechanism relative to the fixed metal plate by moving the drilling mechanism.

[0032] (7) The method for producing a metal plate for a metal mask according to any one of (1) to (5) above! The punching device further includes a feeding mechanism for feeding the roll-shaped workpiece into a sheet shape and a winding mechanism for winding the sheet-shaped workpiece into a roll shape, and the sheet-shaped workpiece is wound at a predetermined conveyance pitch. An RTR-type punching device that intermittently conveys to a punchable region in the punching mechanism, and in the first step, a long metal sheet capable of taking a plurality of the metal plates is prepared, In the two steps, it is preferable to further include a fourth step of forming a plurality of holes in the long metal sheet and cutting the long metal sheet into a predetermined size.

[0033] By adopting such a method, a roll-shaped long metal sheet is used as a starting member.

Since it becomes possible to manufacture metal plates for metal masks using the RTR method, it becomes possible to increase productivity when manufacturing metal plates for metal masks.

(8) In the method for manufacturing a metal plate for a metal mask described in (7) above, the transport of the long metal sheet corresponds to the arrangement pitch of the metal plates in the long metal sheet. It is preferable to do so.

[0035] By adopting such a method, the entire metal plate for a metal mask can be manufactured by a single drilling operation, so that a metal plate for a metal mask with stable quality can be manufactured. It becomes possible to do.

[0036] However, in the method for manufacturing a metal plate for a metal mask described in (7) above, the long metal sheet is transported without considering the arrangement pitch of the metal plates in the long metal sheet. Can also be done. In this case, since at least some of the metal plates are perforated in two perforations, the imaging device can smoothly connect the perforations due to the two perforations. It is preferable to do it while applying feedback using. [0037] (9) In the method for producing a metal plate for a metal mask according to (7) or (8), the punching device is a vertical punching device that transports a sheet-like workpiece along the vertical direction. In the second step, it is preferable that the long metal sheet is perforated in a state in which the long metal sheet is disposed along the vertical direction.

[0038] By adopting such a method, it is possible to prevent stagnation due to the weight of the long metal sheet in the vicinity of the punching position. As a result, since it is not necessary to apply a strong tension to the long metal sheet, the long metal sheet can be prevented from expanding and contracting, and high-precision drilling can be performed on the long metal sheet. It becomes possible.

[0039] (10) A metal mask of the present invention includes a metal plate for a metal mask manufactured by the method for manufacturing a metal plate for a metal mask according to any one of (1) to (9). Characterize

[0040] Therefore, the metal mask of the present invention is an excellent quality metal mask in which a hole having a straight wall surface is formed. In addition, it is an excellent metal mask that can respond to short delivery times with a short manufacturing period.

Brief Description of Drawings

FIG. 1 is a flowchart for explaining a method for manufacturing a metal plate for a metal mask according to Embodiment 1.

FIG. 2 is a view showing a perforation apparatus 100 used in the method for manufacturing a metal plate for a metal mask according to the first embodiment.

FIG. 3 is a view for explaining a second step of the method for manufacturing the metal plate for a metal mask according to the first embodiment.

FIG. 4 is a view showing a photograph of a metal plate for a metal mask manufactured by the method for manufacturing a metal plate for a metal mask according to Embodiment 1.

FIG. 5 is a view for explaining a second step of the method for manufacturing the metal plate for a metal mask according to the second embodiment.

FIG. 6 is a schematic view for explaining a die mold 320 used in the method for producing a metal plate for a metal mask according to Embodiment 3.

FIG. 7 illustrates a perforation mechanism 410 used in the method for manufacturing a metal plate for a metal mask according to Embodiment 4. It is a schematic diagram shown in order to clarify.

FIG. 8 is a schematic view for explaining a punching mechanism 510 used in the method for producing a metal plate for a metal mask according to the fifth embodiment.

FIG. 9 is a side view of a perforating apparatus 600 used in the method for manufacturing a metal plate for a metal mask according to Embodiment 6.

FIG. 10 is a view for explaining a method for conveying a long metal sheet W in the method for producing a metal plate for a metal mask according to Embodiment 6.

FIG. 11 is a view showing the structure of the metal mask 10.

FIG. 12 is a view for explaining problems in the method of manufacturing a metal plate for a metal mask by an etching method.

FIG. 13 is a diagram for explaining a problem in the method of manufacturing a metal plate for a metal mask by the electric plating method.

FIG. 14 is a diagram for explaining a problem in the method of manufacturing a metal plate for a metal mask by a laser processing method.

BEST MODE FOR CARRYING OUT THE INVENTION

Hereinafter, a method for producing a metal plate for a metal mask and a metal mask according to the present invention will be described based on the embodiments shown in the drawings.

[0043] [Embodiment 1]

FIG. 1 is a flowchart for explaining a method for manufacturing a metal plate for a metal mask according to the first embodiment.

FIG. 2 is a view showing a perforation apparatus 100 used in the method for manufacturing a metal plate for a metal mask according to the first embodiment. FIG. 2A is a view of the punching device 100 as viewed from the side, and FIG. 2B is a view of the punching device 100 as viewed from above.

FIG. 3 is a view for explaining a second step of the method for manufacturing the metal plate for a metal mask according to the first embodiment. 3 (a) to 3 (c) are cross-sectional views schematically showing each step in the second step.

As shown in FIG. 1, the method for manufacturing a metal plate for a metal mask according to Embodiment 1 includes a first step (see S10) for preparing a metal plate W that is a starting member of a metal plate for a metal mask. For die A second step (see S20) for forming a plurality of holes in the metal plate W using a punching device 100 (see FIG. 2) having a punching mechanism 110 having a mold 120 and a punching mold 130; And a third step (see S30) for polishing and polishing the surface of the plate W on the die mold 120 side.

[0045] In the second step of the method for manufacturing a metal plate for a metal mask according to Embodiment 1, as shown in FIG. 2, a metal is interposed between the die mold 120 and the punch mold 130 in the punching apparatus 100. Force without changing the relative position between the punching mechanism 110 and the metal plate W with the plate W placed. Drilling holes to form one hole at a time on the metal plate W to form multiple holes on the metal plate W. To do.

[0046] In the second step of the method for manufacturing a metal plate for a metal mask according to the first embodiment, as shown in Fig. 3 (a), first, the metal plate W serving as a starting member of the metal mask is used as a die metal. Place between mold 120 and punch mold 130. Next, as shown in FIG. 3 (b), the punch 132 in the punch die 130 is lowered to perform drilling to form one hole in the metal plate W. Finally, as shown in FIG. 3 (c), the punch 132 in the punch die 130 is raised. Then, in the method for manufacturing a metal plate for a metal mask according to the first embodiment, this operation is repeated a predetermined number of times while changing the relative position between the punching mechanism 110 and the metal plate W. As a result, a metal plate for a metal mask in which a necessary number of holes are formed in the metal plate W can be formed.

[0047] Therefore, according to the method for manufacturing a metal plate for a metal mask according to Embodiment 1, a hole is formed in the metal plate W by drilling using the die mold 120 and the punch mold 130. Therefore, it is easy to form a hole having a straight wall surface even for a relatively thick metal plate used for a metal plate for a metal mask.

[0048] Further, according to the method for manufacturing a metal plate for a metal mask according to the first embodiment, if a predetermined die mold and punch mold are prepared, a new metal mask for metal mask is manufactured. At the same time, it becomes possible to manufacture a new metal mask metal mask by simply reprogramming the drilling pattern. For this reason, it is not necessary to produce a new photomask, and the manufacturing period of the metal plate for the metal mask can be shortened.

[0049] It should be noted that the metal plate W has a burr on the surface on the die mold 120 side when drilling. However, according to the method for manufacturing a metal plate for a metal mask according to the first embodiment, since the deburring polishing is performed in the third step, the problems associated with the generation of such a sludge are suppressed. can do.

In the metal mask metal plate manufacturing method according to the first embodiment, in the second step, as shown in FIG. 3, the distance between the die mold 120 and the punch mold 130 is set to A hole is formed in the metal plate W by raising / lowering only the punch 132 in a state where it is larger than the thickness within a predetermined range (for example, 0.02 mm to 3. Omm).

[0051] For this reason, according to the method for manufacturing a metal plate for a metal mask according to the first embodiment, only the punch 132 is moved up and down to form a hole in the metal plate W. And become possible. As a result, productivity when manufacturing a metal plate for a metal mask can be increased.

In addition, since the relative position between the punching mechanism 110 and the metal plate W can be changed while keeping the distance between the die mold 120 and the punch mold 130 constant, drilling can be performed at high speed. Is possible. As a result, productivity when manufacturing a metal plate for a metal mask can be increased.

[0052] In the method for manufacturing a metal plate for a metal mask according to the first embodiment, the punching device 100 further includes a pair of clampers 140 and 140 that hold the metal plate W on both sides of the punching mechanism 100. I have.

[0053] Therefore, according to the metal mask metal plate manufacturing method of the first embodiment, the metal plate W can be stably disposed between the die mold 120 and the punch mold 130. become. In the method for manufacturing the metal plate for a metal mask according to the first embodiment, an appropriate tension is applied to the metal plate W by adjusting the distance between the pair of clampers 140 and 140.

FIG. 4 is a view showing a photograph of a metal plate for a metal mask manufactured by the method for manufacturing a metal plate for a metal mask according to the first embodiment. Fig. 4 (a) is a top view of the die mold side of the metal plate for the metal mask (before deburring and polishing), and Fig. 4 (b) is a view from the die die side of the metal plate for the metal mask. Fig. 4 (c) is a perspective view (before deburring and polishing), Fig. 4 (c) is a top view (after deburring and polishing) of the metal plate for the metal mask, and Fig. 4 (d) is metal. FIG. 3 is a perspective view of the mask metal plate as viewed from the die side (before deburring and polishing).

[0055] The metal mask metal plate produced by the method for producing a metal mask metal plate according to Embodiment 1 has an excellent surface state and a good hole wall surface state as shown in FIG. It can be seen that this is a metal plate for a metal mask.

[0056] The metal mask metal plate manufactured by the metal mask metal plate manufacturing method according to Embodiment 1 is then attached to the plate frame via a mesh. In this way, a metal mask can be manufactured. Since the metal mask manufactured in this way is provided with the metal plate for the metal mask manufactured by the method as described above, an excellent quality metal mask in which a hole having a straight wall surface is formed. It becomes. In addition, it is an excellent metal mask that can respond to short delivery times with a short manufacturing period.

[0057] The metal plate for the metal mask is made of stainless steel having a thickness of 30 to 150 μm, for example. The hole diameter is, for example, 80 to 300 m.

[0058] [Embodiment 2]

FIG. 5 is a view for explaining a second step of the method for manufacturing the metal plate for a metal mask according to the second embodiment. 5 (a) to 5 (e) are cross-sectional views schematically showing each step in the second step.

[0059] A method for manufacturing a metal plate for a metal mask according to Embodiment 2 is basically a manufacturing method that is very similar to the method for manufacturing a metal plate for a metal mask according to Embodiment 1, but is shown in FIG. Thus, the punch metal mold used differs from the metal mask metal plate manufacturing method according to the first embodiment. That is, in the method for manufacturing a metal plate for a metal mask according to the second embodiment, a punch die 230 having a stripper plate 234 is used. Then, in the second step, the hole is formed in the metal plate W in a state where the stripper plate 234 is pressed against the metal plate W.

As described above, the metal mask metal plate manufacturing method according to the second embodiment is different from the metal mask metal plate manufacturing method according to the first embodiment in the structure of the punch die used. As in the case of the metal mask metal plate manufacturing method according to the first embodiment, the metal plate W is formed with holes by using the die mold 220 and the punch mold 230 to form holes. Therefore, the relatively thick metal plate used for metal masks It becomes possible to form a hole having a straight wall surface.

[0061] Further, according to the method for manufacturing a metal plate for a metal mask according to the second embodiment, if a predetermined die mold and punch mold are prepared, a new metal mask metal plate is manufactured. At the same time, it becomes possible to manufacture a new metal mask metal mask by simply reprogramming the drilling pattern. For this reason, it is not necessary to produce a new photomask, and the manufacturing period of the metal plate for the metal mask can be shortened.

[0062] Furthermore, according to the method for manufacturing a metal plate for a metal mask according to the second embodiment, since the hole is formed in the metal plate W in a state where the stripper plate 234 is pressed against the metal plate W, high accuracy is achieved. This makes it possible to form holes in the metal plate W.

[0063] [Embodiments 3 to 5]

FIG. 6 shows a die mold for use in the method for producing a metal plate for a metal mask according to the third embodiment.

It is the schematic diagram which looked at 0 from the top. In FIG. 6, reference numeral 322 indicates a die plate, reference numeral 322 indicates a die plate, reference numerals 324a and 324b indicate die holes, reference numerals 326 and 326 indicate positioning holes, and reference numeral 328 indicates a photographing hole.

FIG. 7 is a schematic diagram for explaining a punching mechanism 410 used in the method for manufacturing a metal plate for a metal mask according to the fourth embodiment. In FIG. 7, reference numerals 420A, 420B, 420C, and 420D denote die dies.

FIG. 8 is a schematic diagram for explaining a punching mechanism 510 used in the method for manufacturing a metal plate for a metal mask according to the fifth embodiment. In FIG. 8, reference numerals 520A, 520B, 520C, and 520D indicate die dies.

[0064] The method for manufacturing a metal plate for a metal mask according to Embodiments 3 to 5 is basically a manufacturing method similar to the method for manufacturing a metal plate for a metal mask according to Embodiment 1, but Embodiment 1 This is different from the method for manufacturing a metal plate for a metal mask according to the present invention in the structure of the punch mold used (and the structure of the die mold) or the structure of the punching apparatus.

[0065] That is, in the method for manufacturing a metal plate for a metal mask according to Embodiment 3, a punch die having two types of punches (for example, a 100 m diameter punch and a 500 m diameter punch) is used. This punching die force is to select a predetermined punch. FIG. 6 shows a die die 320 corresponding to the punch die. [0066] Further, in the manufacturing method of the metal plate for a metal mask according to the fourth embodiment, there are four punch dies (each of which has, for example, two punches with a diameter of 100 m, a diameter of 120 / zm, 2 punches, 2 140 m diameter punches or 2 500 m diameter punches) are used, and this punching mechanism force also selects a predetermined punch. In FIG. 7, four die dies 420A, 420B, 420C, and 420D corresponding to these four punch dies are shown.

[0067] In addition, in the method for manufacturing a metal plate for a metal mask according to Embodiment 5, four punch dies (each of which has a 100 m diameter punch, a 110 m punch, a 120 μm diameter, for example) And a punch of 130 μm, a punch of 140 μm diameter and a punch of 150 μm or a punch of 500 μm diameter and a punch of 600 μm). A predetermined punch is selected as the punching mechanism force. In FIG. 8, four die dies 520A, 520B, 520C, and 520D corresponding to these four punch dies are shown.

As described above, the metal mask metal plate manufacturing method according to Embodiments 3 to 5 is based on the structure of the punch mold used (and the die mold) or the structure of the punching apparatus according to Embodiment 1. Unlike the metal mask metal plate manufacturing method, as in the case of the metal mask metal plate manufacturing method according to Embodiment 1, drilling is performed using a die mold and a punch mold. Since the hole is formed in the metal plate W by applying, a hole having a straight wall surface can be formed even for a relatively thick metal plate used for the metal plate for the metal mask.

[0069] Further, according to the metal mask metal plate manufacturing method according to Embodiments 3 to 5, if a predetermined die mold and punch mold are prepared, a new metal mask metal plate is obtained. When manufacturing, it becomes possible to manufacture a new metal plate for metal masks by simply reprogramming the drilling pattern. For this reason, it becomes unnecessary to produce a new photomask, and the manufacturing period of the metal plate for the metal mask can be shortened.

Furthermore, according to the method for manufacturing a metal plate for a metal mask according to Embodiments 3 to 5, in the second step, a plurality of punching forces are selected, a predetermined punch is selected, and one hole is formed in each metal plate W. Form When forming multiple types of holes in the metal plate for a metal mask (for example, forming 200,000 printing holes with a diameter of 100 m) , Even if four reference holes with a diameter of 500 m are formed.) Even if the same punching device is used, the metal plate W is not repeatedly set in the punching device. It becomes possible to increase productivity when manufacturing a metal plate for a metal mask.

[0071] [Embodiment 6]

FIG. 9 is a side view of a perforation apparatus 600 used in the method for manufacturing a metal plate for a metal mask according to the sixth embodiment. In FIG. 9, reference numeral 610 indicates a punching mechanism, and reference numerals 610a and 610b indicate punching units. In FIG. 9, the z-axis indicates the vertical direction, the y-axis indicates the direction perpendicular to the z-axis and parallel to the lifting / lowering direction of the punch, and the X-axis indicates the direction perpendicular to the z-axis and the y-axis.

FIG. 10 is a view for explaining a method for conveying the long metal sheet W in the method for producing a metal plate for a metal mask according to the sixth embodiment. FIG. 10 (al) to FIG. 10 (a3) are diagrams showing each step in the method of transporting the long metal sheet W in the method for manufacturing a metal plate for a metal mask according to Embodiment 6, and FIG. FIG. 10 (b3) is a diagram illustrating each step in the method for transporting the long metal sheet W in the method for manufacturing the metal plate for a metal mask according to the modification of the sixth embodiment. In the figure, ml to m7 indicate parts that will be cut later as metal plates, and the symbol R

0 indicates the pierceable area and the symbol R

1 indicates the area to be drilled and the symbol R

2 indicates a drilling completion area.

[0073] The method for manufacturing a metal plate for a metal mask according to Embodiment 6 is basically similar to the method for manufacturing the metal plate for a metal mask according to Embodiment 1 but is shown in FIG. As described above, the method of manufacturing the metal mask metal plate according to the first embodiment is different in the structure of the drilling device used.

That is, in the method for manufacturing a metal plate for a metal mask according to Embodiment 6, a feeding mechanism 640 that feeds a roll-shaped workpiece into a sheet shape, and a winding mechanism 650 that winds the sheet-shaped workpiece into a roll shape, RTR drilling device 600 that intermittently transports a sheet-like workpiece to a punchable area in the punching mechanism 610 at a predetermined transport pitch. Is used.

As described above, the method for manufacturing the metal mask metal plate according to the sixth embodiment is different from the method for manufacturing the metal mask metal plate according to the first embodiment, although the structure of the drilling device used is different from that in the first embodiment. As in the case of the metal mask metal plate manufacturing method according to Form 1, holes are formed in the metal plate W by drilling using a die mold and a punch mold. In addition, it is possible to form a hole having a straight wall surface even for a relatively thick metal plate used for a metal plate for a metal mask.

[0076] Further, according to the method for manufacturing a metal plate for a metal mask according to Embodiment 6, a new metal plate for a metal mask is manufactured if a predetermined die mold and a punch mold are prepared. At the same time, it becomes possible to manufacture a new metal mask metal mask by simply reprogramming the drilling pattern. For this reason, it is not necessary to produce a new photomask, and the manufacturing period of the metal plate for the metal mask can be shortened.

[0077] Furthermore, according to the method for manufacturing a metal plate for a metal mask according to Embodiment 6, in the first step, a long metal sheet W capable of taking a plurality of metal plates W is prepared, The second step further includes a fourth step of forming a plurality of holes in the long metal sheet W and cutting the long metal sheet W into a predetermined size.

Therefore, according to the method for manufacturing a metal plate for a metal mask according to the sixth embodiment, the metal plate for a metal mask is manufactured by the RTR method using the roll-like long metal sheet W as a starting member. This makes it possible to increase productivity when manufacturing metal plates for metal masks.

[0079] In the method for manufacturing a metal plate for a metal mask according to Embodiment 6, the punching device 600 is a vertical punching device that transports a sheet-like workpiece along the vertical direction. In the process, the long metal sheet W is perforated in the state where the long metal sheet W is arranged along the vertical direction.

[0080] For this reason, according to the method for manufacturing a metal plate for a metal mask according to the sixth embodiment, no stagnation occurs due to its own weight in the long metal sheet W near the perforation position. As a result, it is not necessary to apply a strong tension to the long metal sheet W, so that the long metal sheet W is prevented from expanding and contracting, and the long metal sheet W is highly accurately perforated. Processing can be performed.

In the method for manufacturing a metal plate for a metal mask according to Embodiment 6, as shown in FIGS. 10 (al) to 10 (a3), the long metal sheet W is conveyed by the long metal sheet. This is performed according to the arrangement pitch of the metal plates (ml to m5) in W.

[0082] Therefore, according to the method for manufacturing a metal plate for a metal mask according to Embodiment 6, it becomes possible to manufacture one metal plate for a metal mask by a single drilling operation, so that the quality is stable. This makes it possible to manufacture a metal plate for a metal mask.

However, in the method for producing a metal plate for a metal mask of the present invention, as shown in FIGS. 10 (bl) to 10 (b3), the long metal sheet W is conveyed in the long metal sheet W. It can also be performed without considering the arrangement pitch of the metal plates (ml to m7) (hereinafter, this method is referred to as a method for producing a metal plate for a metal mask according to a modification of the embodiment 6). In this case, the drilling is performed in two drilling operations at a ratio of one metal plate to at least two metal plates. For this reason, it is preferable to perform the feedback while using the imaging device so that the drilling by the two drilling operations is smoothly connected.

[0084] While the method for manufacturing a metal plate for a metal mask according to the present invention has been described based on the above embodiments !, the present invention is not limited to each of the above embodiments. The present invention can be implemented in various modes without departing from the scope, and for example, the following modifications are possible.

[0085] (1) In the method for producing a metal plate for a metal mask according to the first embodiment, the force for performing deburring polishing on the surface of the metal plate W on the die mold 120 side in the third step The present invention is not limited to this. For example, in the third step, the surface of the metal plate W on the punch die 130 side may also be polished.

By doing so, both the surface on the die mold 120 side and the surface on the punch mold 130 side of the metal plate W are subjected to the polishing process, so that the warp in the metal plate for the metal mask is performed. Can be suppressed as much as possible.

[0086] (2) In the method for manufacturing a metal plate for a metal mask according to the first embodiment, the force for performing the drilling operation in a state where the metal plate W is gripped by the pair of clampers 140, 140. There is no limit. For example, a metal plate for a metal mask is passed through a mesh. After attaching to the metal mask plate frame, the punching operation can be carried out while the plate frame is held by a pair of clampers.

Explanation of symbols

10 ··· Moleore mask, 20 ··· Frame, 30 ··· Mesh, 40 ··· Metal plate for methanol mask, 100, 60 0 ··· Punch device, 110, 210, 410, 510, 610 Mechanism, 120, 220, 320, 420A, 420B, 420C, 420D, 520A, 520B, 520C, 520D ... Mold for die, for 130 inch, 132, 232 ... inch, 140 ... 234 ··· Stritzno «Plate, 640 ·······································································

0 Drilling possible area, R ... Planned drilling area, R ... Drilling completion area, W ... Metal as workpiece

1 2

Plate or long metal sheet

Claims

The scope of the claims

[1] a first step of preparing a metal plate as a starting member of the metal mask metal plate;

The punching mechanism and the metal plate in a state where the metal plate is disposed between the die die and the punch die in a punching device having a punching mechanism having a die die and a punch die. A second step of forming a plurality of holes in the metal plate by performing perforation while changing the relative position of the metal plate and forming one hole in the metal plate;

And a third step of deburring and polishing the surface of the metal plate on the die mold side. A method for producing a metal plate for a metal mask, comprising:

[2] A method for producing a metal plate for a metal mask according to claim 1, wherein:

The punching device is a punching device having a plurality of punches having different diameters. In the second step, a predetermined punch is selected from the plurality of punches, and one hole is formed in the metal plate. Forming a plurality of types of holes in the metal plate by forming a metal mask.

[3] In the method of manufacturing a metal plate for a metal mask according to claim 1 or 2,

In the second step, only the punch is moved up and down in a state where the distance between the die mold and the punch mold is larger than the thickness of the metal plate by a range of 0.02 mm to 3. Omm. And forming a hole in the metal plate. A method for manufacturing a metal plate for a metal mask.

[4] In the method for producing a metal plate for a metal mask according to claim 1 or 2,

The punching device is a punching device having a punch die force S stripper plate, and in the second step, a hole is formed in the metal plate in a state where the stripper plate is pressed against the metal plate. A method for producing a metal plate for a metal mask, comprising:

[5] In the method for manufacturing a metal plate for a metal mask according to any one of claims 1 to 4, in the third step, the surface of the metal plate on the punch die side is also polished. A method for producing a metal plate for a metal mask.

[6] In the method for manufacturing a metal plate for a metal mask according to any one of claims 1 to 5, the punching device further includes a pair of clampers for gripping the metal plate from both sides sandwiching the punching mechanism. A method for producing a metal plate for a metal mask.

[7] In the method for manufacturing a metal plate for a metal mask according to any one of claims 1 to 5, the punching device includes a feeding mechanism for feeding the roll-shaped workpiece into a sheet shape, and the sheet-shaped workpiece into a roll shape. An RTR-type punching device that further includes a winding mechanism for winding and intermittently transports a sheet-like workpiece to a punchable area in the punching mechanism at a predetermined transport pitch;

In the first step, a long metal sheet capable of taking a plurality of the metal plates is prepared,

In the second step, a plurality of holes are formed in the long metal sheet,

A method for producing a metal plate for a metal mask, further comprising a fourth step of cutting the long metal sheet into a predetermined size.

[8] In the method for manufacturing a metal plate for a metal mask according to claim 7,

The method for producing a metal plate for a metal mask, characterized in that the transport of the long metal sheet is performed corresponding to an arrangement pitch of the metal plates in the long metal sheet.

[9] In the method for producing a metal plate for a metal mask according to claim 7 or 8,

The punching device is a vertical punching device that conveys a sheet-like workpiece along the vertical direction,

In the second step, the long metal sheet is drilled in the long metal sheet in a state in which the long metal sheet is arranged in the vertical direction. .

[10] A metal mask comprising the metal plate for a metal mask manufactured by the method for manufacturing a metal plate for a metal mask according to any one of [1] to [9].