WO2007032222A1 - Electroless plating catalyst for printed wiring board having through hole, and printed wiring board having through hole processed by using such catalyst - Google Patents

Electroless plating catalyst for printed wiring board having through hole, and printed wiring board having through hole processed by using such catalyst Download PDF

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Publication number
WO2007032222A1
WO2007032222A1 PCT/JP2006/317461 JP2006317461W WO2007032222A1 WO 2007032222 A1 WO2007032222 A1 WO 2007032222A1 JP 2006317461 W JP2006317461 W JP 2006317461W WO 2007032222 A1 WO2007032222 A1 WO 2007032222A1
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WIPO (PCT)
Prior art keywords
compound
hole
catalyst
printed wiring
electroless plating
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PCT/JP2006/317461
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French (fr)
Japanese (ja)
Inventor
Toshifumi Kawamura
Toru Imori
Original Assignee
Nippon Mining & Metals Co., Ltd.
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Application filed by Nippon Mining & Metals Co., Ltd. filed Critical Nippon Mining & Metals Co., Ltd.
Priority to JP2007535424A priority Critical patent/JP4889045B2/en
Publication of WO2007032222A1 publication Critical patent/WO2007032222A1/en

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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/18Pretreatment of the material to be coated
    • C23C18/20Pretreatment of the material to be coated of organic surfaces, e.g. resins
    • C23C18/28Sensitising or activating
    • C23C18/30Activating or accelerating or sensitising with palladium or other noble metal
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J31/00Catalysts comprising hydrides, coordination complexes or organic compounds
    • B01J31/02Catalysts comprising hydrides, coordination complexes or organic compounds containing organic compounds or metal hydrides
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J31/00Catalysts comprising hydrides, coordination complexes or organic compounds
    • B01J31/02Catalysts comprising hydrides, coordination complexes or organic compounds containing organic compounds or metal hydrides
    • B01J31/12Catalysts comprising hydrides, coordination complexes or organic compounds containing organic compounds or metal hydrides containing organo-metallic compounds or metal hydrides
    • B01J31/123Organometallic polymers, e.g. comprising C-Si bonds in the main chain or in subunits grafted to the main chain
    • B01J31/124Silicones or siloxanes or comprising such units
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J31/00Catalysts comprising hydrides, coordination complexes or organic compounds
    • B01J31/16Catalysts comprising hydrides, coordination complexes or organic compounds containing coordination complexes
    • B01J31/18Catalysts comprising hydrides, coordination complexes or organic compounds containing coordination complexes containing nitrogen, phosphorus, arsenic or antimony as complexing atoms, e.g. in pyridine ligands, or in resonance therewith, e.g. in isocyanide ligands C=N-R or as complexed central atoms
    • B01J31/1805Catalysts comprising hydrides, coordination complexes or organic compounds containing coordination complexes containing nitrogen, phosphorus, arsenic or antimony as complexing atoms, e.g. in pyridine ligands, or in resonance therewith, e.g. in isocyanide ligands C=N-R or as complexed central atoms the ligands containing nitrogen
    • B01J31/181Cyclic ligands, including e.g. non-condensed polycyclic ligands, comprising at least one complexing nitrogen atom as ring member, e.g. pyridine
    • B01J31/1815Cyclic ligands, including e.g. non-condensed polycyclic ligands, comprising at least one complexing nitrogen atom as ring member, e.g. pyridine with more than one complexing nitrogen atom, e.g. bipyridyl, 2-aminopyridine
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/11Printed elements for providing electric connections to or between printed circuits
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/40Forming printed elements for providing electric connections to or between printed circuits
    • H05K3/42Plated through-holes or plated via connections
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/40Forming printed elements for providing electric connections to or between printed circuits
    • H05K3/42Plated through-holes or plated via connections
    • H05K3/422Plated through-holes or plated via connections characterised by electroless plating method; pretreatment therefor
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2531/00Additional information regarding catalytic systems classified in B01J31/00
    • B01J2531/80Complexes comprising metals of Group VIII as the central metal
    • B01J2531/82Metals of the platinum group
    • B01J2531/824Palladium
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/07Treatments involving liquids, e.g. plating, rinsing
    • H05K2203/0703Plating
    • H05K2203/0716Metallic plating catalysts, e.g. for direct electroplating of through holes; Sensitising or activating metallic plating catalysts
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/38Improvement of the adhesion between the insulating substrate and the metal
    • H05K3/389Improvement of the adhesion between the insulating substrate and the metal by the use of a coupling agent, e.g. silane

Definitions

  • the present invention relates to an electroless plating catalyst used for a printed wiring board having a through hole, and a printed wiring board having a through hole processed using the catalyst.
  • an electroless plating such as copper or nickel
  • the electroless plating is formed in order to form the base layer uniformly on the base material.
  • a pretreatment method in which a catalyst such as palladium is applied to the surface of a base material before application.
  • a method of immersing a substrate in a Sn Pd colloid solution, a method of attaching a catalyst by vapor deposition or sputtering, and the like are used.
  • pretreatment is performed in the same manner, and a metal layer is formed by electroless plating (Patent Document 1, Patent). (Ref. 2).
  • the Sn-Pd colloid As a method of applying a catalyst, in the method of immersing a substrate in the above Sn-Pd colloid solution, the Sn-Pd colloid is large in a printed wiring board having a through hole having a diameter of 200 m or less ( Particle size 0.1 ⁇ : LO m) On the side wall of one hole, the catalyst is liable to generate voids. In addition, the plating process using Sn—Pd colloid prevents the generation of voids by performing a plurality of catalyst application steps + plating steps, which makes the process complicated and costly. In addition, in the case of vapor deposition sputtering, it is difficult to apply a catalyst uniformly to the side wall of the through hole.
  • Patent Document 1 Japanese Patent Laid-Open No. 2005-136316
  • Patent Document 2 U.S. Patent 6,630,743 B2 Specification
  • An object of the present invention is to provide an electroless plating catalyst capable of being attached. Means for solving the problem
  • the present inventors have used a catalyst containing a compound having a functional group capable of capturing a noble metal in the molecule and a noble metal compound as a catalyst for the substrate. We found that by attaching and electroless plating, even on printed wiring boards with through-holes with a diameter of 200 m or less, they are evenly attached to the side walls of the through-holes.
  • the present invention is as follows.
  • a catalyst for electroless plating used for a printed wiring board having a through hole comprising a compound having a functional group capable of capturing a noble metal in the molecule and a noble metal compound. Catalyst.
  • the compound having a functional group capable of capturing a noble metal in the molecule is a silane coupling agent, and is obtained by a reaction of an azole or amine compound with an epoxy silane compound.
  • the electroless plating catalyst according to (1) is a silane coupling agent, and is obtained by a reaction of an azole or amine compound with an epoxy silane compound.
  • the noble metal compound is a palladium compound V, catalyst for electroless plating according to any one of the above.
  • a diameter of 200 m or less characterized by being electrolessly plated after being treated with the electroless plating catalyst according to any one of (1) to (4) above.
  • Printed wiring board with fine through holes Printed wiring board with fine through holes.
  • a printed circuit board having a through hole that has been electrolessly plated after being treated with the electroless plating catalyst of the present invention has a through hole even if the through hole has a diameter of 200 ⁇ m or less.
  • the side walls are uniformly plated and no voids are generated. Therefore, the process can be simplified and the yield can be improved.
  • FIG. 1 is a photograph of the inside of a through hole after electroless plating in Example 1.
  • FIG. 2 is a photograph of the inside of a through hole after electroless plating in Comparative Example 1.
  • the present invention is an electroless plating catalyst used for a printed wiring board having a through-hole, and includes a compound having a functional group capable of capturing a noble metal in a molecule and a noble metal compound.
  • the noble metal catalyst is formed via a compound having a functional group capable of capturing the noble metal in the molecule with respect to the surface to be bonded. It can fix more uniformly and reliably.
  • the catalyst since the catalyst has a small molecular size, it can easily go into the small-diameter through-hole, and can be firmly and evenly fixed on the side wall of the through-hole. For this reason, when electroless plating is applied after the catalyst is deposited, uniform plating can be achieved without generating voids.
  • a preferable compound having a functional group capable of capturing a noble metal in the molecule is a silane coupling agent, which is obtained by reacting an azole compound or an amine compound with an epoxy compound. Can be mentioned.
  • azole compounds include imidazole, oxazole, thiazole, selenazole, pyrazole, isoxazole, isothiazole, triazole, oxadiazole, thiadiazole, tetrazole, oxatriazole, thiatriazole, bendazol. And indazole, benzimidazole, benzotriazole and the like. Although not limited to these, imidazole is particularly preferred.
  • amine compound examples include saturated hydrocarbon amines such as propylamine, unsaturated hydrocarbon amines such as berylamine, and aromatic amines such as phenylamine.
  • the silane coupling agent is a compound having a -SIX X X group in addition to the noble metal capturing group derived from the azole compound or the amine compound, and X, X, and X are alkyl.
  • X, X, and X may be the same or different.
  • the silane coupling agent can be obtained by reacting the azole compound or amine compound with an epoxy silane compound.
  • reaction of the azole compound and the epoxy group-containing silane compound can be carried out under the conditions described in, for example, JP-A-6-256358.
  • an epoxy group-containing silane compound for example, it can be obtained by dropping 0.1 to 10 moles of an epoxy group-containing silane compound at 80 to 200 ° C and reacting for 5 minutes to 2 hours with respect to 1 mole of an azole compound.
  • an organic solvent such as force form, dioxane, methanol, ethanol or the like, which does not particularly require a solvent, may be used.
  • R 2 is hydrogen or an alkyl group having 1 to 3 carbon atoms
  • R 3 is hydrogen or an alkyl group having 1 to 20 carbon atoms
  • R 4 is a bur group, or an alkyl group having 1 to 5 carbon atoms
  • n is 0 to 3 is shown.
  • Other examples of the compound having a functional group capable of capturing a noble metal in the molecule used in the present invention include, for example, a silane coupling agent having an amino group, a mercapto group, etc. as a functional group capable of capturing a noble metal.
  • Examples include silane and ⁇ -mercaptoprovir trimethoxysilane.
  • the noble metal compound examples include noble metal compounds such as palladium, silver, platinum, and gold, such as halides, hydroxides, sulfates, carbonates, carboxylic acids, sulfonic acids, and sulfinic acids.
  • a salt with an organic acid, a precious metal sarcophagus, etc. can be mentioned.
  • Particularly preferred is a palladium compound.
  • the palladium compound is not particularly limited as long as palladium ions are supplied, but halides, sulfates, carboxylates and the like are preferably used.
  • a conventional catalyst such as tin chloride can be contained within the scope of the object of the present invention.
  • the catalyst of the present invention is used as a solution of a compound having a functional group capable of trapping a noble metal in the molecule or a noble metal compound, but the solvent is capable of trapping the noble metal in the molecule.
  • An aqueous solution that has the ability to dissolve the compound having a functional group or a noble metal compound and has a safety point is preferable.
  • alcohol-based organic solvents such as methanol, ethanol, isopropanol and octyl alcohol, and aromatic organic solvents such as toluene and xylene may be used as appropriate.
  • the concentration of the compound having a functional group capable of capturing a noble metal in the molecule in the catalyst is not limited to this, but is preferably 0.001 to 10% by weight.
  • the amount is less than 001% by weight, the amount of the compound adhering to the surface of the substrate becomes low and it is difficult to obtain the effect immediately.
  • it exceeds 10% by weight it is difficult to dry due to too much adhesion, or the balance with the trapped noble metal is lost and it takes time to develop the catalytic activity, and the effect is obtained.
  • the noble metal compound can be used in the catalyst at a concentration of 1 to: LOOOmgZL (in terms of noble metal), preferably 10 to 300 mgZL (in terms of noble metal). Although the effect is seen outside this range, the influence of post-treatment is also preferably within the above range.
  • dipping is preferable so that the substrate is uniformly applied to the side wall of the through hole.
  • a printed wiring board having a through hole of the present invention for example, after forming a through hole in a base material, a regular degreasing process and a soft etching process are performed, and then the catalyst described so far is applied by immersion, An electroless plating layer such as copper or nickel is formed by a conventional method. After applying the catalyst, it is preferable to wash with water and activate the catalyst with, for example, 10% sulfuric acid, 5% sodium hypophosphite and the like at room temperature of 70 ° C for 1 minute at 15 minutes.
  • the wiring board having a through hole according to the present invention has a printed wiring board uniformly plated with no voids even on the side wall of a through hole having a diameter of 200 ⁇ m or less, for example, a diameter of 150 m. Become.
  • a printed circuit board multilayer substrate with a 150 m diameter through hole It was immersed for 5 minutes at 40 ° C. in an aqueous solution containing 100 mg ZL of silane (the reaction product of imidazole and 3-glycidoxypropyltrimethoxysilane) and 50 mg ZL of palladium chloride (30 mg ZL in terms of Pd). This was treated with an activator (5% sodium diphosphite) at 40 ° C for 5 minutes to make Pd electroless plating activity.
  • Electroless copper plating (Cuposit 328, manufactured by R & H) was performed at room temperature for 20 minutes to form a copper layer with a thickness of 0.5 m. When the inside of the 1000-hole through hole was observed, it was found that all were attached (see Fig. 1).
  • a laminated board for printed wiring boards having a 150 m diameter through hole is placed in an aqueous solution containing aminosilane ( ⁇ -aminopropyltriethoxysilane) lOOmgZL and palladium acetate lOOmgZL (47 mgZL in terms of Pd) at 40 ° C for 5 minutes. Soaked. This was treated with an activator (5% sodium diphosphite) at 40 ° C for 5 minutes to make Pd electroless plating activity. Electroless copper plating (Cuposite 328, manufactured by R & H) was performed at room temperature for 20 minutes to form a 0.5 ⁇ m thick copper layer. When the inside of the 1000-hole through hole was observed, it was found that all were attached.
  • aminosilane ⁇ -aminopropyltriethoxysilane
  • palladium acetate lOOmgZL 47 mgZL in terms of Pd
  • a laminated board for printed wiring boards having a 150 m diameter through hole is immersed in a commercially available Sn—Pd colloid process (as a pre-dip solution, Kata Lip 404 (manufactured by R & H)). And then washed with water and treated once with AXELATOR 19E (manufactured by R & H) as an activator solution to make it electroactive. Thereafter, electroless copper plating was performed in the same manner as in Example 1. When the inside of the 1000-hole through hole was observed, voids were seen in 100 holes.
  • Figure 2 shows a cross-sectional view of the through hole where voids were observed. The part that appears black in the through hole (dark part) is the non-stick part (void).

Abstract

Provided is an electroless plating catalyst, by which uniform electroless plating can be performed without generating voids on a through hole side wall, even to a printed wiring board with a through hole having a diameter of 200μm or less due to high integration of the printed wiring board. The electroless plating catalyst to be used for printed wiring boards having through holes is characterized in that the catalyst includes a compound having a functional group which can capture a noble metal in a molecule, and a noble metal compound.

Description

スルーホールを有するプリント配線基板への無電解めつき用触媒、及び その触媒を用いて処理されたスルーホールを有するプリント配線基板  Catalyst for electroless plating on printed wiring board having through hole, and printed wiring board having through hole processed using the catalyst
技術分野  Technical field
[0001] 本発明は、スルーホールを有するプリント配線基板に用いられる無電解めつき用触 媒、およびその触媒を用いて処理されたスルーホールを有するプリント配線基板に関 する。  The present invention relates to an electroless plating catalyst used for a printed wiring board having a through hole, and a printed wiring board having a through hole processed using the catalyst.
背景技術  Background art
[0002] プリント配線基板の基材に、銅、ニッケル等の無電解めつきを施し、金属層を形成 する際に、基材にめつき層を均一に形成させるために、無電解めつきを施す前に、基 材の表面にパラジウム等の触媒を付与する前処理方法が知られている。例えば、 Sn Pdコロイド溶液中に基材を浸漬させる方法、蒸着またはスパッタリングで触媒を添 着させる方法等が用いられている。接続用のスルーホールを有するプリント配線基板 においても、スルーホールを形成した後、同様に前処理し、無電解めつきにより、金 属層を形成することが知られている (特許文献 1、特許文献 2参照)。  [0002] When an electroless plating such as copper or nickel is applied to a base material of a printed wiring board to form a metal layer, the electroless plating is formed in order to form the base layer uniformly on the base material. There is known a pretreatment method in which a catalyst such as palladium is applied to the surface of a base material before application. For example, a method of immersing a substrate in a Sn Pd colloid solution, a method of attaching a catalyst by vapor deposition or sputtering, and the like are used. Also in printed wiring boards having through holes for connection, it is known that after forming the through holes, pretreatment is performed in the same manner, and a metal layer is formed by electroless plating (Patent Document 1, Patent). (Ref. 2).
[0003] 近年、電子機器の小型化、軽量化、高速ィ匕の要求に対応して、プリント配線基板の 高密度化が進んでいる。プリント配線基板の高密度化に伴い、スルーホールを有す るプリント配線基板においては、スルーホールの直径が従来の 200 μ m超から細径 化し、 200 m以下となっている。スルーホールを有するプリント配線基板において は、スルーホール側壁にもめつき層が均一に形成されることが望まれる力 スルーホ ールの細径ィ匕により、無電解めつきを行った際に、スルーホールの側壁にボイド (微 小無めつき部分)が発生することが問題になっている。これは、上記前処理で触媒を 付与する際に、細径ィ匕したスルーホールの側壁に触媒が均一に付与されな力つたた め生じたものと考えられる。  [0003] In recent years, in response to demands for downsizing, weight reduction, and high speed of electronic devices, the density of printed wiring boards has been increasing. Along with the increase in the density of printed wiring boards, the diameter of through holes in printed wiring boards with through-holes has been reduced from over 200 μm to 200 m or less. For printed wiring boards with through-holes, it is desirable to have an adhesive layer evenly formed on the sidewalls of the through-holes. The problem is the formation of voids (parts that are slightly unspotted) on the side walls of the steel. This is considered to have occurred because the catalyst was not uniformly applied to the sidewall of the through hole having a small diameter when the catalyst was applied in the pretreatment.
[0004] 触媒を付与する方法として、上記 Sn— Pdコロイド溶液中に基材を浸漬させる方法 においては、直径が 200 m以下のスルーホールを有するプリント配線基板では、 S n— Pdコロイドは大きい(粒径 0.1〜: LO m)ため、微小部分へ回り込みにくぐスル 一ホール側壁においては、触媒がまばらについてボイド発生しやすい。また、 Sn—P dコロイドを用いためっきプロセスは、触媒付与工程 +めっき工程を複数行うことでボ イド発生を防いでいるので、工程が複雑になり、コストもかかる。また、蒸着ゃスパッタ リング法では、スルーホール側壁に均一に触媒を付与することは難しぐコストもかか る。 [0004] As a method of applying a catalyst, in the method of immersing a substrate in the above Sn-Pd colloid solution, the Sn-Pd colloid is large in a printed wiring board having a through hole having a diameter of 200 m or less ( Particle size 0.1 ~: LO m) On the side wall of one hole, the catalyst is liable to generate voids. In addition, the plating process using Sn—Pd colloid prevents the generation of voids by performing a plurality of catalyst application steps + plating steps, which makes the process complicated and costly. In addition, in the case of vapor deposition sputtering, it is difficult to apply a catalyst uniformly to the side wall of the through hole.
特許文献 1 :特開 2005— 136316号公報  Patent Document 1: Japanese Patent Laid-Open No. 2005-136316
特許文献 2 :米国特許第 6,630,743 B2明細書  Patent Document 2: U.S. Patent 6,630,743 B2 Specification
発明の開示  Disclosure of the invention
発明が解決しょうとする課題  Problems to be solved by the invention
[0005] 本発明は、プリント配線基板の高密度化により、直径が 200 m以下であるスルー ホールを有するプリント配線基板にぉ 、ても、スルーホール側壁にボイド発生がなく、 均一に無電解めつきが可能な無電解めつき用触媒を提供することを目的とする。 課題を解決するための手段 [0005] According to the present invention, even if a printed wiring board having a through hole having a diameter of 200 m or less is formed by increasing the density of the printed wiring board, voids are not generated on the side wall of the through hole, and the electroless electrode is uniformly electroless. An object of the present invention is to provide an electroless plating catalyst capable of being attached. Means for solving the problem
[0006] 本発明者等は、上記課題について鋭意検討を行った結果、分子内に貴金属を捕 捉しえる官能基を有する化合物と貴金属化合物とを含有する触媒を用いて基材に触 媒を付着させ、無電解めつきを行うことにより、直径が 200 m以下のスルーホール を有するプリント配線基板においても、スルーホールの側壁にボイド発生がなぐ均 一にめつきされることを見出した。  [0006] As a result of intensive studies on the above problems, the present inventors have used a catalyst containing a compound having a functional group capable of capturing a noble metal in the molecule and a noble metal compound as a catalyst for the substrate. We found that by attaching and electroless plating, even on printed wiring boards with through-holes with a diameter of 200 m or less, they are evenly attached to the side walls of the through-holes.
[0007] 即ち、本発明は以下のとおりである。  That is, the present invention is as follows.
(1)スルーホールを有するプリント配線基板に用いる無電解めつき用触媒であって、 分子内に貴金属を捕捉しえる官能基を有する化合物と貴金属化合物とを含むことを 特徴とする無電解めつき用触媒。  (1) A catalyst for electroless plating used for a printed wiring board having a through hole, comprising a compound having a functional group capable of capturing a noble metal in the molecule and a noble metal compound. Catalyst.
(2)前記分子内に貴金属を捕捉しえる官能基を有する化合物が、シランカップリング 剤であり、ァゾール系またはアミンィ匕合物とエポキシシラン系化合物との反応により得 られることを特徴とする前記(1)記載の無電解めつき用触媒。  (2) The compound having a functional group capable of capturing a noble metal in the molecule is a silane coupling agent, and is obtained by a reaction of an azole or amine compound with an epoxy silane compound. (1) The electroless plating catalyst according to (1).
(3)前記分子内に貴金属を捕捉しえる官能基を有する化合物が、アミノ基を有するシ ランカップリング剤であることを特徴とする前記(1)記載の無電解めつき用触媒。 (3) The electroless plating catalyst according to (1), wherein the compound having a functional group capable of capturing a noble metal in the molecule is a silane coupling agent having an amino group.
(4)前記貴金属化合物がパラジウム化合物であることを特徴とする前記(1)〜(3)の V、ずれか一項に記載の無電解めつき用触媒。 (4) In the above (1) to (3), the noble metal compound is a palladium compound V, catalyst for electroless plating according to any one of the above.
(5)前記(1)〜 (4)の 、ずれか一項に記載の無電解めつき用触媒を用いて処理され た後、無電解めつきされたことを特徴とする直径 200 m以下の微細スルーホールを 有するプリント配線基板。  (5) A diameter of 200 m or less, characterized by being electrolessly plated after being treated with the electroless plating catalyst according to any one of (1) to (4) above. Printed wiring board with fine through holes.
発明の効果  The invention's effect
[0008] 本発明の無電解めつき用触媒を用いて処理された後、無電解めつきされたスルー ホールを有するプリント基板は、スルーホールの直径が 200 μ m以下であっても、ス ルーホールの側壁にも均一にめっきされ、ボイド発生がない。したがって、工程が簡 略化でき、歩留まりを向上することができる。  [0008] A printed circuit board having a through hole that has been electrolessly plated after being treated with the electroless plating catalyst of the present invention has a through hole even if the through hole has a diameter of 200 μm or less. The side walls are uniformly plated and no voids are generated. Therefore, the process can be simplified and the yield can be improved.
図面の簡単な説明  Brief Description of Drawings
[0009] [図 1]実施例 1における無電解めつき後のスルーホール内部の写真である。  FIG. 1 is a photograph of the inside of a through hole after electroless plating in Example 1.
[図 2]比較例 1における無電解めつき後のスルーホール内部の写真である。  FIG. 2 is a photograph of the inside of a through hole after electroless plating in Comparative Example 1.
発明を実施するための最良の形態  BEST MODE FOR CARRYING OUT THE INVENTION
[0010] 本発明は、スルーホールを有するプリント配線基板に用いる無電解めつき用触媒で あって、分子内に貴金属を捕捉しえる官能基を有する化合物と貴金属化合物を含む ことを特徴とする。 [0010] The present invention is an electroless plating catalyst used for a printed wiring board having a through-hole, and includes a compound having a functional group capable of capturing a noble metal in a molecule and a noble metal compound.
[0011] 分子内に貴金属を捕捉しえる官能基を有する化合物と貴金属化合物を含む触媒 により、被めつき面に対して分子内に貴金属を捕捉しえる官能基を有する化合物を 介して貴金属触媒をより均一に、より確実に固着することができる。また、この触媒は 分子サイズが小さいため、容易に細径スルーホール内へ回り、スルーホール側壁に おいても均一に、より確実に固着することができる。そのため、この触媒付着後に無 電解めつきをするとボイド発生がなぐ均一にめっきすることができる。  [0011] With a compound having a functional group capable of capturing a noble metal in the molecule and a catalyst containing the noble metal compound, the noble metal catalyst is formed via a compound having a functional group capable of capturing the noble metal in the molecule with respect to the surface to be bonded. It can fix more uniformly and reliably. In addition, since the catalyst has a small molecular size, it can easily go into the small-diameter through-hole, and can be firmly and evenly fixed on the side wall of the through-hole. For this reason, when electroless plating is applied after the catalyst is deposited, uniform plating can be achieved without generating voids.
[0012] 前記分子内に貴金属を捕捉しえる官能基を有する化合物として好ましいものは、シ ランカップリング剤であり、ァゾール系化合物またはアミンィ匕合物とエポキシ系化合物 との反応により得られるものが挙げられる。  A preferable compound having a functional group capable of capturing a noble metal in the molecule is a silane coupling agent, which is obtained by reacting an azole compound or an amine compound with an epoxy compound. Can be mentioned.
ァゾール系化合物としては、イミダゾール、ォキサゾール、チアゾール、セレナゾー ル、ピラゾール、イソォキサゾール、イソチアゾール、トリァゾール、ォキサジァゾール 、チアジアゾール、テトラゾール、ォキサトリァゾール、チアトリァゾール、ベンダゾー ル、インダゾール、ベンズイミダゾール、ベンゾトリアゾールなどが挙げられる。これら に制限されるものではな 、が、イミダゾールが特に好ま U、。 Examples of azole compounds include imidazole, oxazole, thiazole, selenazole, pyrazole, isoxazole, isothiazole, triazole, oxadiazole, thiadiazole, tetrazole, oxatriazole, thiatriazole, bendazol. And indazole, benzimidazole, benzotriazole and the like. Although not limited to these, imidazole is particularly preferred.
[0013] また、ァミン化合物としては、例えばプロピルアミン等の飽和炭化水素ァミン、ビ- ルァミン等の不飽和炭化水素ァミン、フ ニルァミン等の芳香族アミン等を挙げること ができる。 Examples of the amine compound include saturated hydrocarbon amines such as propylamine, unsaturated hydrocarbon amines such as berylamine, and aromatic amines such as phenylamine.
[0014] また前記シランカップリング剤とは、前記ァゾール系化合物またはアミンィ匕合物由来 の貴金属捕捉基の他に、 -SIX X X基を有する化合物であり、 X、 X、 Xはアルキ  [0014] The silane coupling agent is a compound having a -SIX X X group in addition to the noble metal capturing group derived from the azole compound or the amine compound, and X, X, and X are alkyl.
1 2 3 1 2 3 ル基、ハロゲンやアルコキシ基などを意味し、被めつき物への固定が可能な官能基 であれば良い。 X、 X、 Xは同一でもまた異なっていても良い。  1 2 3 1 2 3 group, halogen, alkoxy group, etc., and any functional group that can be fixed to the object. X, X, and X may be the same or different.
1 2 3  one two Three
[0015] 前記シランカップリング剤は、前記ァゾール系化合物またはアミンィ匕合物とエポキシ シランィ匕合物を反応させることにより得ることができる。  [0015] The silane coupling agent can be obtained by reacting the azole compound or amine compound with an epoxy silane compound.
このようなエポキシシラン化合物としては、  As such an epoxy silane compound,
[化 1]  [Chemical 1]
C H2 - C H- C H 2 O (C H2) 3 S i (O R ^ n R 2 O-n) C H2-C H- CH 2 O (C H2) 3 S i (OR ^ n R 2 On)
(式中、
Figure imgf000005_0001
R2は水素または炭素数が 1〜3のアルキル基、 nは 0〜3を示す。 ) で示されるエポキシカップリング剤が好ましい。
(Where
Figure imgf000005_0001
R 2 represents hydrogen or an alkyl group having 1 to 3 carbon atoms, and n represents 0 to 3. An epoxy coupling agent represented by
[0016] 前記ァゾール系化合物と前記エポキシ基含有シランィ匕合物との反応は、例えば特 開平 6— 256358号公報に記載されている条件で行うことができる。 [0016] The reaction of the azole compound and the epoxy group-containing silane compound can be carried out under the conditions described in, for example, JP-A-6-256358.
例えば、 80〜200°Cでァゾール系化合物 1モルに対して 0. 1〜10モルのエポキシ 基含有シランィ匕合物を滴下して 5分〜 2時間反応させることにより得ることができる。 その際、溶媒は特に不要である力 クロ口ホルム、ジォキサン、メタノール、エタノール 等の有機溶媒を用いてもよい。  For example, it can be obtained by dropping 0.1 to 10 moles of an epoxy group-containing silane compound at 80 to 200 ° C and reacting for 5 minutes to 2 hours with respect to 1 mole of an azole compound. In that case, an organic solvent such as force form, dioxane, methanol, ethanol or the like, which does not particularly require a solvent, may be used.
[0017] 特に好ま 、例としてイミダゾールイ匕合物とエポキシシラン系化合物の反応を下記 に示す。 [0017] Particularly preferred is a reaction of an imidazole compound and an epoxysilane compound as an example.
[化 2] H20(CH2)3S i (O R1),, R2 (3.n) [Chemical 2] H 2 0 (CH 2 ) 3 S i (OR 1 ), R 2 (3. N)
CH20(CH2)3 S i {OR-1) nRz (3_n)
Figure imgf000006_0001
CH 2 0 (CH 2 ) 3 S i (OR -1 ) n R z (3 _ n)
Figure imgf000006_0001
(式中、
Figure imgf000006_0002
R2は水素または炭素数が 1〜3のアルキル基、 R3は水素、または炭素数 1〜20のアルキル基、 R4はビュル基、または炭素数 1〜5のアルキル基、 nは 0〜3を 示す。)
(Where
Figure imgf000006_0002
R 2 is hydrogen or an alkyl group having 1 to 3 carbon atoms, R 3 is hydrogen or an alkyl group having 1 to 20 carbon atoms, R 4 is a bur group, or an alkyl group having 1 to 5 carbon atoms, n is 0 to 3 is shown. )
[0018] 本発明に使用する分子内に貴金属を捕捉しえる官能基を有する化合物のその他 の例としては、例えば貴金属を捕捉しえる官能基として、アミノ基、メルカプト基等を 有するシランカップリング剤である、 y—ァミノプロピルトリメトキシシラン、 y—アミノプ 口ピルトリエトキシシラン、 N— β (アミノエチノレ) γ—ァミノプロピルトリメトキシシラン、 Ν- β (アミノエチル) γ—ァミノプロピルトリエトキシシラン、 γ—メルカプトプロビルト リメトキシシラン等が挙げられる。 [0018] Other examples of the compound having a functional group capable of capturing a noble metal in the molecule used in the present invention include, for example, a silane coupling agent having an amino group, a mercapto group, etc. as a functional group capable of capturing a noble metal. Y-aminopropyltrimethoxysilane, y-aminopropyl pilltriethoxysilane, N-β (aminoethinore) γ —aminopropyltrimethoxysilane, Ν-β (aminoethyl) γ-aminopropyltriethoxy Examples include silane and γ-mercaptoprovir trimethoxysilane.
[0019] 貴金属化合物としては、パラジウム、銀、白金、金等の貴金属化合物、例えば、そ れらのハロゲン化物、水酸化物、硫酸塩、炭酸塩、カルボン酸、スルホン酸、スルフィ ン酸等の有機酸との塩、貴金属石鹼等を挙げることができる。特にパラジウム化合物 が好ましい。ノ ラジウム化合物としては、パラジウムイオンが供給されればよぐ特に 限定されるものではないが、ハロゲンィ匕物、硫酸塩、カルボン酸塩等が好ましく用い られ、例えば、塩化パラジウム、硫酸パラジウム、酢酸パラジウム等を挙げることがで きる。また、従来の塩化スズなどの触媒も本発明の目的の範囲内において含有させ ることがでさる。  [0019] Examples of the noble metal compound include noble metal compounds such as palladium, silver, platinum, and gold, such as halides, hydroxides, sulfates, carbonates, carboxylic acids, sulfonic acids, and sulfinic acids. A salt with an organic acid, a precious metal sarcophagus, etc. can be mentioned. Particularly preferred is a palladium compound. The palladium compound is not particularly limited as long as palladium ions are supplied, but halides, sulfates, carboxylates and the like are preferably used. For example, palladium chloride, palladium sulfate, palladium acetate. Etc. Further, a conventional catalyst such as tin chloride can be contained within the scope of the object of the present invention.
[0020] 本発明の触媒は、上記分子内に貴金属を捕捉しえる官能基を有する化合物、貴金 属化合物の溶液として使用されるが、その溶剤は、分子内に貴金属を捕捉しえる官 能基を有する化合物や貴金属化合物の溶解性の点および安全性の点力 水溶液が 好ましい。溶解性によってはメタノール、エタノール、イソプロパノール、ォクチルアル コールなどのアルコール系有機溶剤や、トルエン、キシレンなどの芳香族系有機溶 剤などを適宜用いても構わな 、。 [0020] The catalyst of the present invention is used as a solution of a compound having a functional group capable of trapping a noble metal in the molecule or a noble metal compound, but the solvent is capable of trapping the noble metal in the molecule. An aqueous solution that has the ability to dissolve the compound having a functional group or a noble metal compound and has a safety point is preferable. Depending on solubility, alcohol-based organic solvents such as methanol, ethanol, isopropanol and octyl alcohol, and aromatic organic solvents such as toluene and xylene may be used as appropriate.
[0021] 触媒中の分子内に貴金属を捕捉しえる官能基を有する化合物の濃度はこれに限 つたものではないが、 0. 001〜10重量%が好ましい。 0. 001重量%未満の場合、 基材の表面に付着する化合物量が低くなりやすぐ効果が得にくい。また、 10重量% を超えると付着量が多すぎて乾燥しにくかったり、捕捉貴金属とのバランスが崩れて 触媒活性発現に時間がかかり、効果が得に《なる。  [0021] The concentration of the compound having a functional group capable of capturing a noble metal in the molecule in the catalyst is not limited to this, but is preferably 0.001 to 10% by weight. When the amount is less than 001% by weight, the amount of the compound adhering to the surface of the substrate becomes low and it is difficult to obtain the effect immediately. On the other hand, if it exceeds 10% by weight, it is difficult to dry due to too much adhesion, or the balance with the trapped noble metal is lost and it takes time to develop the catalytic activity, and the effect is obtained.
[0022] また、貴金属化合物は、触媒中において、 1〜: LOOOmgZL (貴金属換算)、好まし くは 10〜300mgZL (貴金属換算)の濃度で使用することができる。この範囲外でも 効果は見られるが、後処理の影響力も上記範囲が好ましい。  [0022] The noble metal compound can be used in the catalyst at a concentration of 1 to: LOOOmgZL (in terms of noble metal), preferably 10 to 300 mgZL (in terms of noble metal). Although the effect is seen outside this range, the influence of post-treatment is also preferably within the above range.
[0023] 基材を触媒で処理する方法としては、スルーホール側壁にも均一に付与されるに は、浸漬が好ましい。  [0023] As a method of treating the substrate with a catalyst, dipping is preferable so that the substrate is uniformly applied to the side wall of the through hole.
本発明のスルーホールを有するプリント配線基板としては、例えば、基材にスルー ホールを形成した後、定法の脱脂工程、ソフトエッチング工程を行い、次にこれまで 述べてきた触媒を浸漬により付与し、常法により、銅、ニッケル等の無電解めつき層を 形成したものである。触媒を付与した後は、水洗を行い、例えば 10%硫酸、 5%次亜 リン酸ナトリウム等で、室温力も 70°Cで 1分力も 15分程度触媒を活性ィ匕することが好 ましい。  As a printed wiring board having a through hole of the present invention, for example, after forming a through hole in a base material, a regular degreasing process and a soft etching process are performed, and then the catalyst described so far is applied by immersion, An electroless plating layer such as copper or nickel is formed by a conventional method. After applying the catalyst, it is preferable to wash with water and activate the catalyst with, for example, 10% sulfuric acid, 5% sodium hypophosphite and the like at room temperature of 70 ° C for 1 minute at 15 minutes.
[0024] 本発明によるスルーホールを有する配線基板は、そのスルーホールが直径 200 μ m以下、例えば直径 150 mの微細スルーホール側壁においても、ボイド発生がなく 、均一にめっきされたプリント配線基板となる。  [0024] The wiring board having a through hole according to the present invention has a printed wiring board uniformly plated with no voids even on the side wall of a through hole having a diameter of 200 μm or less, for example, a diameter of 150 m. Become.
実施例  Example
[0025] 以下、実施例により本発明を更に詳細に説明するが、本発明は実施例により限定さ れるものではない。  Hereinafter, the present invention will be described in more detail by way of examples, but the present invention is not limited to the examples.
[0026] 実施例 1 [0026] Example 1
150 m径のスルーホールを有するプリント配線基板用積層基板を、イミダゾール シラン (イミダゾールと 3—グリシドキシプロピルトリメトキシシランの反応生成物) 100m gZLと、塩化パラジウム 50mgZL (Pd換算 30mgZL)とを含んだ水溶液に 40°Cで 5分浸漬した。これを活性化剤(5%ジ亜リン酸ナトリウム)で 40°Cで 5分処理すること で Pdを無電解めつき活性にした。無電解銅めつき(キューポジット 328、 R&H製)を 室温で 20分行い、銅層を 0. 5 m膜厚つけた。 1000穴のスルーホール内部を観察 すると、すべてめつきされていた(図 1参照)。 A printed circuit board multilayer substrate with a 150 m diameter through hole It was immersed for 5 minutes at 40 ° C. in an aqueous solution containing 100 mg ZL of silane (the reaction product of imidazole and 3-glycidoxypropyltrimethoxysilane) and 50 mg ZL of palladium chloride (30 mg ZL in terms of Pd). This was treated with an activator (5% sodium diphosphite) at 40 ° C for 5 minutes to make Pd electroless plating activity. Electroless copper plating (Cuposit 328, manufactured by R & H) was performed at room temperature for 20 minutes to form a copper layer with a thickness of 0.5 m. When the inside of the 1000-hole through hole was observed, it was found that all were attached (see Fig. 1).
[0027] 実施例 2 [0027] Example 2
150 m径のスルーホールを有するプリント配線基板用積層基板を、アミノシラン( γ—ァミノプロピルトリエトキシシラン) lOOmgZLと、酢酸パラジウム lOOmgZL (Pd 換算 47mgZL)とを含んだ水溶液に 40°Cで 5分浸漬した。これを活性化剤(5%ジ 亜リン酸ナトリウム)で 40°Cで 5分で処理することで Pdを無電解めつき活性にした。無 電解銅めつき(キューポジット 328、 R&H製)を室温で 20分行い、銅層を 0. 5 μ m膜 厚つけた。 1000穴のスルーホール内部を観察すると、すべてめつきされていた。  A laminated board for printed wiring boards having a 150 m diameter through hole is placed in an aqueous solution containing aminosilane (γ-aminopropyltriethoxysilane) lOOmgZL and palladium acetate lOOmgZL (47 mgZL in terms of Pd) at 40 ° C for 5 minutes. Soaked. This was treated with an activator (5% sodium diphosphite) at 40 ° C for 5 minutes to make Pd electroless plating activity. Electroless copper plating (Cuposite 328, manufactured by R & H) was performed at room temperature for 20 minutes to form a 0.5 μm thick copper layer. When the inside of the 1000-hole through hole was observed, it was found that all were attached.
[0028] 比較例 1 [0028] Comparative Example 1
150 m径のスルーホールを有するプリント配線基板用積層基板を、市販の Sn— Pdコロイドプロセス(プレディップ液としてキヤタプリップ 404 (R&H製)に浸漬、その 後キヤタリスト液としてキヤタブリップ 44 (Pd換算 200mgZL、 R&H製)に浸漬、水洗 後ァクチベータ液としてァクセラレータ 19E (R&H製)に浸漬)で 1回処理して、無電 解めつき活性にした。その後、実施例 1と同様に無電解銅めつきを行った。 1000穴 のスルーホール内部を観察すると、 100穴にボイドが見られた。図 2にボイドが見られ たスルーホールの断面図を示す。スルーホール中で黒く見えるところ(暗部)が無め つき部分 (ボイド)である。図 1で示す実施例 1のスルーホール内には暗部は見当たら ず無めつき部分がないが、図 2で示す比較例 1では、図 2におけるスルーホールの上 力も 1Z4まではめつきされている(暗部は見当たらない)が、 1Z4を過ぎると黒い部 分が次第に濃くなり、下 1Z4程度は黒ぐほとんど無めつき部分であることがわかる。  A laminated board for printed wiring boards having a 150 m diameter through hole is immersed in a commercially available Sn—Pd colloid process (as a pre-dip solution, Kata Lip 404 (manufactured by R & H)). And then washed with water and treated once with AXELATOR 19E (manufactured by R & H) as an activator solution to make it electroactive. Thereafter, electroless copper plating was performed in the same manner as in Example 1. When the inside of the 1000-hole through hole was observed, voids were seen in 100 holes. Figure 2 shows a cross-sectional view of the through hole where voids were observed. The part that appears black in the through hole (dark part) is the non-stick part (void). In the through hole of Example 1 shown in Fig. 1, the dark part is not found and there is no uncovered part, but in Comparative Example 1 shown in Fig. 2, the upper force of the through hole in Fig. 2 is also fitted to 1Z4 ( The dark part is not found), but after 1Z4, the black part gradually becomes darker, and the lower 1Z4 is almost black.

Claims

請求の範囲 The scope of the claims
[1] スルーホールを有するプリント配線基板に用いる無電解めつき用触媒であって、分 子内に貴金属を捕捉しえる官能基を有する化合物と貴金属化合物とを含むことを特 徴とする無電解めつき用触媒。  [1] A catalyst for electroless plating used for a printed wiring board having a through hole, characterized in that it contains a compound having a functional group capable of capturing a noble metal in the molecule and a noble metal compound. Catalyst for plating.
[2] 前記分子内に貴金属を捕捉しえる官能基を有する化合物が、シランカップリング剤 であり、ァゾール系またはアミンィ匕合物とエポキシシラン系化合物との反応により得ら れることを特徴とする請求の範囲第 1項に記載の無電解めつき用触媒。  [2] The compound having a functional group capable of capturing a noble metal in the molecule is a silane coupling agent, and is obtained by a reaction of an azole or amine compound with an epoxy silane compound. 2. The electroless plating catalyst according to claim 1.
[3] 前記分子内に貴金属を捕捉しえる官能基を有する化合物が、アミノ基を有するシラ ンカップリング剤であることを特徴とする請求の範囲第 1項に記載の無電解めつき用 触媒。  [3] The electroless plating catalyst according to claim 1, wherein the compound having a functional group capable of capturing a noble metal in the molecule is a silane coupling agent having an amino group. .
[4] 前記貴金属化合物がパラジウム化合物であることを特徴とする請求の範囲第 1項〜 第 3項の 、ずれか一項に記載の無電解めつき用触媒。  [4] The electroless plating catalyst according to any one of claims 1 to 3, wherein the noble metal compound is a palladium compound.
[5] 請求の範囲第 1項〜第 4項のいずれか一項に記載の無電解めつき用触媒を用いて 処理された後、無電解めつきされたことを特徴とする直径 200 m以下の微細スルー ホールを有するプリント配線基板。 [5] A diameter of 200 m or less, characterized by being electrolessly plated after being treated with the electroless plating catalyst according to any one of claims 1 to 4. Printed wiring board with fine through holes.
PCT/JP2006/317461 2005-09-15 2006-09-04 Electroless plating catalyst for printed wiring board having through hole, and printed wiring board having through hole processed by using such catalyst WO2007032222A1 (en)

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JPH11204943A (en) * 1998-01-08 1999-07-30 Hitachi Ltd Electronic circuit board and manufacture thereof
JP2000212754A (en) * 1999-01-22 2000-08-02 Sony Corp Plating method, its device and plated structure
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KR20080048043A (en) 2008-05-30
JP4889045B2 (en) 2012-02-29

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