WO2007026629A1 - Photosensitive resin composition, spacer, color filter, and liquid crystal display device - Google Patents

Photosensitive resin composition, spacer, color filter, and liquid crystal display device Download PDF

Info

Publication number
WO2007026629A1
WO2007026629A1 PCT/JP2006/316829 JP2006316829W WO2007026629A1 WO 2007026629 A1 WO2007026629 A1 WO 2007026629A1 JP 2006316829 W JP2006316829 W JP 2006316829W WO 2007026629 A1 WO2007026629 A1 WO 2007026629A1
Authority
WO
WIPO (PCT)
Prior art keywords
spacer
liquid crystal
display device
crystal display
resin composition
Prior art date
Application number
PCT/JP2006/316829
Other languages
French (fr)
Japanese (ja)
Inventor
Mana Miyamoto
Kazumi Wakao
Shujiro Sadanaga
Original Assignee
Kyocera Chemical Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kyocera Chemical Corporation filed Critical Kyocera Chemical Corporation
Priority to JP2007533218A priority Critical patent/JP5313499B2/en
Publication of WO2007026629A1 publication Critical patent/WO2007026629A1/en

Links

Classifications

    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/028Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1339Gaskets; Spacers; Sealing of cells
    • G02F1/13392Gaskets; Spacers; Sealing of cells spacers dispersed on the cell substrate, e.g. spherical particles, microfibres
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/20Filters
    • G02B5/22Absorbing filters
    • G02B5/223Absorbing filters containing organic substances, e.g. dyes, inks or pigments
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1339Gaskets; Spacers; Sealing of cells
    • G02F1/13394Gaskets; Spacers; Sealing of cells spacers regularly patterned on the cell subtrate, e.g. walls, pillars
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0005Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
    • G03F7/0007Filters, e.g. additive colour filters; Components for display devices
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/032Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
    • G03F7/033Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders the binders being polymers obtained by reactions only involving carbon-to-carbon unsaturated bonds, e.g. vinyl polymers
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/038Macromolecular compounds which are rendered insoluble or differentially wettable
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1339Gaskets; Spacers; Sealing of cells
    • G02F1/13398Spacer materials; Spacer properties

Definitions

  • Photosensitive resin composition spacer, color filter and liquid crystal display
  • the present invention provides a negative photosensitive resin composition that provides a spacer for a liquid crystal display device having excellent heat resistance, chemical resistance, and strength.
  • the negative photosensitive resin composition is formed using the photosensitive resin composition.
  • the present invention relates to a spacer for a liquid crystal display device having properties, a power color filter for a liquid crystal display device including the spacer, and a liquid crystal display device using the color filter.
  • a liquid crystal panel In order to obtain the intended electrical engineering characteristics, a liquid crystal panel needs to obtain a uniform distance between two substrates over the entire display. Therefore, use spacer beads such as glass beads and plastic beads with a predetermined particle size. The distance between the glass substrates is kept constant.
  • a method of forming a spacer at a predetermined position on a color filter using a photosensitive resin has been used. This is because a photosensitive resin is applied on a color filter. It is applied to the substrate, irradiated with actinic rays such as ultraviolet rays through a predetermined mask, and then developed to form spacers in the form of dots or stripes. When the spacer is formed in this way, selectively on the black matrix of the color filter, and
  • a spacer can be formed without causing misalignment.
  • a photosensitive resin composition for forming spacers capable of forming a spacer is disclosed (for example, see Patent Document 2).
  • the spacer is deformed at the time of sealing the seal, and the gap width becomes non-uniform due to the variation in the deformation amount, resulting in a decrease in display contrast. There was a problem that occurred.
  • the amount of deformation is significantly different between the center and the edge within the substrate surface, the portion of the spacer having a uniform height is reduced, which causes a problem that the yield of the product is lowered.
  • Patent Document 1 Japanese Patent Laid-Open No. 2003-29405
  • Patent Document 2 JP 2005-292270 A
  • the present invention solves such problems in the prior art, has high sensitivity and high resolution, and can maintain a uniform cell gap even at room temperature and high temperature.
  • a photosensitive resin composition that provides a spacer for a liquid crystal display device having excellent strength, and a spacer for a liquid crystal display device having the above-mentioned properties formed by using the photosensitive resin composition, the spacer. It is an object to provide a color filter for a liquid crystal display device having a spacer and a liquid crystal display device using the color filter.
  • Invention 1 of the present invention is
  • a negative photosensitive resin composition comprising (A) an alkali-soluble resin, (B) a polymerizable polyfunctional compound, (C) a photopolymerization initiator, and (D) a solvent,
  • the glass transition temperature of the cured product is 160 ° C or higher.
  • Negative photosensitive resin composition strength (i) Alkali-soluble resin having a polymerizable functional group having a weight average molecular weight of 10,000 to 20,000 and a glass transition temperature of 110 ° C or higher 1
  • the liquid crystal display device according to (1) above comprising 00 parts by mass, (B) 50 to 250 parts by mass of a polymerizable polyfunctional compound, (C) 1 to 20 parts by mass of a photopolymerization initiator, and (D) a solvent.
  • Photosensitive resin composition for forming a spacer
  • Alkali-soluble rosin comprises (al) a carboxylic acid having an ethylenically unsaturated bond and a carboxylic acid anhydride having Z or an ethylenically unsaturated bond, and (a2) other ethylenic acid.
  • item (1) which is a resin obtained by reacting a part of a copolymer with an unsaturated compound having an ethylenically unsaturated bond with an epoxy compound having (a3) an ethylenically unsaturated bond
  • a photosensitive resin composition for forming a liquid crystal display device spacer
  • a color filter comprising a spacer for a liquid crystal display device formed by using the photosensitive resin composition according to (1) above, and
  • a liquid crystal display device comprising a spacer for a liquid crystal display device formed using the photosensitive resin composition according to the above (1),
  • Invention 2 of the present invention is
  • a spacer capable of obtaining a negative photosensitive resin composition comprising (A) an alkali-soluble resin, (B) a polymerizable polyfunctional compound, (C) a photopolymerization initiator, and (D) a solvent.
  • the variation of the total deformation in the load-unloading test measured with a micro hardness tester is (e) within the 0.25 standard deviation ( ⁇ ) at 25 ° C within the substrate surface.
  • the standard deviation ( ⁇ ) at 180 ° C is within 0.30, and
  • a spacer that can also provide a negative photosensitive resin composition comprising ( ⁇ ) an alkali-soluble resin, ( ⁇ ) a polymerizable polyfunctional compound, (C) a photopolymerization initiator, and (D) a solvent.
  • a negative photosensitive resin composition comprising ( ⁇ ) an alkali-soluble resin, ( ⁇ ) a polymerizable polyfunctional compound, (C) a photopolymerization initiator, and (D) a solvent.
  • the standard deviation ( ⁇ ) at 25 ° C is within 0.20
  • the standard deviation (180) at 180 ° C is within 0.25
  • Negative photosensitive resin composition strength (i) Alkali-soluble resin having a polymerizable functional group having a weight average molecular weight of 10,000 to 20,000 and a glass transition temperature of 110 ° C or higher. 100 parts by weight of fat, (B) 50 to 250 parts by weight of polymerizable polyfunctional compound, (C) 1 to 20 parts by weight of a photopolymerization initiator, and (D) a cured product obtained from the resin composition.
  • Alkali-soluble resin is (al) a carboxylic acid having an ethylenically unsaturated bond and a carboxylic acid anhydride having Z or an ethylenically unsaturated bond, and (a2) other ethylenically unsaturated Item (11) or (12), which is a resin obtained by reacting a part of a copolymer with an unsaturated compound having a bond with an epoxy compound having (a3) an ethylenically unsaturated bond.
  • a color filter characterized by having a spacer for a liquid crystal display device according to the above (11) or (12), and
  • a liquid crystal display device comprising the spacer for a liquid crystal display device according to the above (11) or (12),
  • the present invention has high sensitivity and high resolution, and at room temperature and high temperature! It is possible to provide a photosensitive resin composition that can maintain a uniform yap and provide a spacer for a liquid crystal display device having excellent heat resistance, chemical resistance, and strength.
  • a spacer for a liquid crystal display device having the above-mentioned properties formed by using this photosensitive resin composition, a color filter for a liquid crystal display device having the spacer, and this color filter were used.
  • a liquid crystal display device can be provided.
  • FIG. 1 is an explanatory diagram of measurement points in a loader-unloading test of a spacer.
  • FIG. 2 is an explanatory diagram of measurement points in a spacer load-unloading test.
  • FIG. 3 is a graph showing a hysteresis curve used in a loader-unloading test of a spacer.
  • FIG. 4 is a diagram showing a criterion for evaluating the cross-sectional shape of a pattern after curing in a photosensitive resin composition.
  • the photosensitive resin composition for forming a spacer of a liquid crystal display device of the present invention includes (A) an alkali-soluble resin and (B) a polymerizable resin.
  • the weight average molecular weight is 10,000 to 20,000.
  • alkali-soluble resin of component (A) in the photosensitive resin composition of the present invention examples include, for example, (al) a carboxylic acid having an ethylenically unsaturated bond and a carboxylic acid having Z or an ethylenically unsaturated bond.
  • a part of a copolymer of an anhydride and (a2) another unsaturated compound having an ethylenically unsaturated bond was reacted with (a3) an epoxy compound having an ethylenically unsaturated bond.
  • Fats can be preferably used.
  • the copolymer of (al) a carboxylic acid having an ethylenically unsaturated bond and Z or a carboxylic acid anhydride having an ethylenically unsaturated bond, and (a2) another compound having an ethylenically unsaturated bond, (al) and (a2) are radical radicals in a solvent in the presence of a polymerization initiator. It can be manufactured by combining.
  • Examples of the component (al) include monocarboxylic acids such as acrylic acid, methacrylic acid, and crotonic acid, dicarboxylic acids such as maleic acid, fumaric acid, citraconic acid, mesaconic acid, and itaconic acid, and carboxylic anhydrides thereof. Things. These can be used alone or in combination of two or more.
  • component (a2) for example, methyl metatalylate, ethyl metatalylate, n-butyl metatalylate, sec butyl metatalylate, t-butyl metatalylate, etc.
  • Alkyl esters of acrylic acid such as acrylate and isopropyl acrylate; cyclohexyl methacrylate, 2-methylcyclohexyl methacrylate, dicyclopenta-methacrylate, dicyclopenta-roxetyl methacrylate, isopololol methacrylate
  • Methacrylic acid cyclic alkyl esters such as: cyclohexyl acrylate, 2-methylcyclohexyl acrylate, dicyclopenta-butyl acrylate, dicyclopenta-luxhetyl acrylate, isopolo-butyl acrylate Steal; Metalarylic acid aryl ester such as phenol metatalylate and benzyl metatalylate; Acrylic acid aryl ester such as phenol atalylate and benzyl atallate; Jetyl maleate, Jetyl fumarate, Jetyl itaconate, etc.
  • Dicarboxylic acid diesters such as 2-hydroxyethyl methacrylate, 2-hydroxypropyl methacrylate; and styrene, ⁇ -methylstyrene, m-methylstyrene, p-methylstyrene, butyltoluene, p-methoxystyrene , Atari mouth Nitryl, Metatari mouth-tolyl, Butyl chloride, Sodium chloride vinylidene, Acrylamide, Methacrylamide, Vinyl acetate, 1,3 Butadiene, Isoprene, 2,3 Dimethyl-1,3 Butadiene and the like. These may be used alone or in combination of two or more.
  • Solvents used in the copolymerization of the component (al) and the component (a2) include, for example, alcohols such as methanol and ethanol; ethers such as tetrahydrofuran; ethylene glycolenomonomethinoleate.
  • Glycol ethers such as tenole and ethylene glycol monoethylenoate ethere; ethylene glycol alkyl ether acetates such as methyl acetate sorb acetate and ethyl acetate sorb acetate; diethylene glycol monomethyl ester Diethylene glycols such as diterene glycol, diethylene glycol monoethyl ether, diethylene glycol dimethyl etherate, diethylene glycol nole chinenoate ethere, diethylene glycol noretino methinole ether; propylene glycol methyl ether, propylene glycol noretino rea Propylene glycol monoalkyl ethers such as tenole, propylene glycolenopropenoleatenole, propylene glycol butyl ether; propylene glycolenolemethinoatenoate acetate, propylene glycolenoretinoatenoate acetate, propylene glycol propy
  • radical polymerization initiators As the polymerization initiator used in the copolymerization of the (al) component and the (a2) component, those generally known as radical polymerization initiators can be used.
  • 2' Azobisisobuty-tolyl, 2,2,1-azobis (2,4 dimethylvale-tolyl), 2,2, -azobis (4-methoxy-1,2,4 dimethylvale-tolyl), etc. Zo compounds; organic peroxides such as benzoyl peroxide, lauroyl belloxide, t-butylperoxypivalate, 1,1,1 bis (t-butylperoxy) cyclohexane; and hydrogen peroxide.
  • a peroxide As a radical polymerization initiator, use a peroxide together with a reducing agent as a redox initiator.
  • the temperature at the time of copolymerization varies depending on the type of monomer used and is usually about 40 to 150 ° C, preferably 50 to 100 ° C.
  • Examples of the component (a3) include glycidyl acrylate, glycidyl methacrylate, a glycidyl ethyl acrylate, glycidyl a-n-propyl acrylate, an butyl glycidyl acrylate, acrylic acid-3, 4-epoxybutyl, Methacrylic acid—3,4-epoxybutyl, acrylic acid 6, 7—epoxyheptyl, methacrylic acid 6,7—epoxyheptyl, ⁇ -ethylacrylic acid 6,7—epoxyheptyl, ⁇ -bulubenzylglycidyl ether, m— Examples include benzylbenzyl glycidyl ether and p-butylbenzyl glycidyl ether.
  • Examples include sidyl, methacrylic acid-6,7-epoxyheptyl, o-bulubenzyl glycidyl ether, m-bulubenzyl glycidyl ether, and p-bullbenzyl glycidyl ether. These may be used alone or in combination of two or more.
  • a catalyst can also be used to accelerate the reaction.
  • the catalyst include triethylamine, benzyldimethylamine, pyridine, triethylammochloride, Examples include benzyltrimethylammonium bromide, benzyltrimethylammonium iodide, triphenylphosphine, triphenylstibin, methyltriphenylstibin, chromium octoate, and zirconium octoate.
  • the amount used is usually about 0.1 to 10% by mass, preferably 0, based on the mass of the reaction product. . 5-5% by mass.
  • the reaction temperature is usually about 60 to 150 ° C, preferably 80 to 120 ° C, and the reaction time depends on the reaction temperature and cannot be determined in general, but usually about 5 to 60 hours is sufficient. is there.
  • the alkali-soluble coconut oil of component (A) thus obtained preferably has a weight average molecular weight Mw in the range of 10,000 to 20,000. If this Mw is 10,000 or more, the resulting film has good developability, residual film properties, pattern shape, heat resistance, etc., whereas if it is 20,000 or less, the sensitivity is lowered or the pattern shape is poor. And the storage stability of the photosensitive resin composition is also good. A more preferred Mw is 12,000-18,000.
  • the weight average molecular weight is a value in terms of polystyrene measured by a gel permeation chromatography method (GPC method).
  • the alkali-soluble coagulant of the component (A) has a solid acid value of 50 to 200 mgKOHZg. If the solid content acid value is 50 mgKOHZg or more, good developability is obtained, and if it is 200 mgKOHZg or less, the residual film ratio and pattern shape are good. A more preferable solid content acid value is 80 to 150 mgKOH / g.
  • the polymerizable polyfunctional compound of component (B) in the photosensitive resin composition of the present invention those having a functional group number of 5 or more can be preferably used.
  • a pentafunctional or higher functional compound can be preferably used as such a polymerizable polyfunctional compound.
  • examples of such polymerizable polyfunctional compounds include penta- or higher-functional (meth) acrylates, such as dipentaerythritol penta (meth) acrylate and dipentaerythritol hex (meth) acrylate.
  • polymerizable polyfunctional compound of component (B) those having a glass transition temperature (Tg) of 100 ° C or higher can be preferably used.
  • glass transition temperature (Tg) of 100 ° C or higher
  • examples of such polymerizable polyfunctional compounds include 1,3 butylene glycol di (meth) acrylate, dipropylene glycol di (meth) acrylate, and tris (2-hydroxyethyl) isocyanurate tri (meta).
  • Examples of commercially available products include SR212, SR508, SR368, SR444, SR295, CD540 (manufactured by Thermar), light atelate NP-A (manufactured by Kyoeisha), Lipoxy SP-4060, SP-4010 [Showa Polymer Co., Ltd.], Aronix M-215, M-305, M-309, M-310, M-315, M-402, M-408, M-450 , M-7100, M-8030, M 8060, M-8100, M-8050 [Toa Gosei Chemical Co., Ltd.] The These may be used alone or in combination of two or more.
  • a polymerizable compound having a pentafunctional or higher functional urethane bond can be preferably used as the polymerizable polyfunctional compound of component (B).
  • a polymerizable polyfunctional compound having a pentafunctional or higher functional urethane bond examples include aliphatic urethane (meth) acrylate and aromatic urethane (meth) acrylate.
  • the polymerizable polyfunctional compound of the component (B) is a ratio of 50 to 250 parts by mass with respect to 100 parts by mass of the alkali-soluble resin of the component (A). It is blended with. If the blending amount of the component (B) is 50 parts by mass or more, the crosslinking reaction proceeds sufficiently, and film loss due to development hardly occurs. On the other hand, if it is 250 parts by mass or less, good resolution is obtained. .
  • the amount of component (B) is preferably 80 to 200 parts by mass.
  • the photopolymerization initiator of the component (C) in the photosensitive resin composition of the present invention is efficient in i-line (365 nm) and g-line (436 nm) in ultraviolet rays as a photoreaction initiator. There is no particular limitation as long as it often generates reactive radicals.
  • Such compounds include OC-diketones such as benzyl and diacetyl, acyloines such as benzoin, acyloin ethers such as benzoin methyl ether, benzoin ethyl ether, and benzoin isopropyl ether, thixanthone, 2- Benzophenones such as methyl thioxanthone, 2-isopropyl thioxanthone, 2,4 jetyl thioxanthone, thixanthone 4-sulfonic acid, benzophenone, 4,4'-bis (dimethylamino) benzophenone, 4,4'-bis (jetylamino) benzophenone, acetophenone , P Dimethylaminoacetophenone, 2, 2'-jetoxyacetophenone, 2-hydroxy 2-methylpropiophenone and other acetophenones, anthraquinone, 1, 4 quinones such as naphthoquinone, 2, 6
  • the photopolymerization initiator of the component (C) is an alkali-soluble resin of the component (A) from the viewpoint of balance between effect and economy. 1 to 20 parts by mass, preferably 3 to 15 parts by mass with respect to parts by mass.
  • a sensitizer can be used together with the said photoinitiator as needed.
  • this sensitizer include Michler's ketone, 4, 4'-bis (jetylaminobenzophenone), 2,5 bis (4'-jetylaminobenzal) cyclopentanone, 2, 6 bis (4'-jet).
  • Tylaminobenzal) cyclohexanone 2,6-bis (4'-dimethylaminobenzal) 1-4-methylcyclohexanone, 2,6bis (4, -demethylaminobenzal) -4-methylcyclo Hexanone, 4, 4 'bis (jetylamino) chalcone, 4, 4, monobis (dimethylamino) chalcone, p-dimethylaminocinnamylidene indanone, p-dimethylaminobenzylidene indanone, 2- (p-dimethylaminophene -Rubypherene) monobenzothiazole, 2- (p dimethylaminophenol- bis-len) benzothiazole, 1,3 bis (4'-dimethylaminobenzal) acetone, 3, 3 '— Cal Borubis (7-Jetylaminocoumarin), 3-acetylyl 7-dimethylaminocoumarin, 3 Ethoxycarbonyl 7-dimethyl
  • the blending amount is selected from the viewpoints of balance between effect and economics, and the like.
  • the amount is preferably 0.1 to: L0 parts by mass, more preferably 0.3 to 8 parts by mass with respect to 100 parts by mass of the soluble resin.
  • These sensitizers can be used in accordance with the wavelength to be used and further in accordance with the required sensitivity, thereby improving the resolution at each wavelength.
  • a polymerization inhibitor can be blended as desired in order to improve the storage stability of the resin.
  • the polymerization inhibitor for example, hydroquinone derivatives such as hydroquinone, methylhydroquinone, and butylquinone can be used.
  • the compounding amount is from the point of effect and economy, and the alkali-soluble resin of the component (A). It is preferably in the range of 0.1 to: L0 parts by mass, more preferably 0.2 to 5 parts by mass with respect to 100 parts by mass.
  • the photosensitive resin composition of the present invention comprises the component (A), the component (B), the component (C), a sensitizer used as necessary, a polymerization inhibitor, and other additive components as the component (D). It is usually used after being dissolved in a solvent.
  • the solvent of the component (D) is not particularly limited as long as each component is uniformly dissolved and does not react with the component.
  • examples of such a solvent include alcohols such as methanol and ethanol, ethers such as tetrahydrofuran, glycolate ethers such as ethylene glycol monomethino ethenore, ethylene glycol monomethino enoate, and methyl cetosolve.
  • Ethylene glycol alkyl ether acetates such as acetate and ethyl acetate sorb acetate, diethylene glycol monomethyl ether, diethylene glycol Diethylene glycols such as ethylene glycol monoreino eno enoate, diethylene glucono regino methino ree enore, propylene glycol methyl ether, propylene glycol nereno enoate, propylene glycol enopropenoate enole, propylene glycol eno butyl ether, etc.
  • Propylene glycol alkyls such as propylene glycol monoalkyl ethers, propylene glycol monoremethinoleateolate acetate, propyleneglycololeretinoatenoacetate, propyleneglycololepropenolateenoleacetate, propyleneglycololebutenoateacetate
  • Aromatic hydrocarbons such as ether acetates, toluene xylene, methyl ethyl ketone, cyclohexanone , 4-hydroxy-4-methyl-2-pentanone and other ketones, methyl acetate, ethyl acetate, propyl acetate, butyl acetate, ethyl 2-hydroxypropionate, 2-hydroxy 2-methyl methyl pionate, 2-hydroxy 2-methyl
  • esters such as ethyl ethyl propionate, methyl hydroxyacetate, ethyl ethyl acetate, butyl hydroxyacetate,
  • a high boiling point solvent can be used in combination with the solvent.
  • high-boiling solvents that can be used in combination include N-methylformamide, N, N dimethylformamide, N-methylformamide, N-methylacetamide, N, N dimethylacetamide, N-methylbivinylidone, and dimethylsulfoxide.
  • Benzylethyl ether dihexyl ether, acetonyl acetone, isophorone, caproic acid, strong prillic acid, 1-octanol, 1-nonanol, pendyl alcohol, benzyl acetate, ethyl benzoate, jetyl maleate, ⁇ -butyrolatone , Ethylene carbonate, propylene carbonate, ferrule sorb acetate and the like.
  • the amount of the solvent is suitably set so that the viscosity is suitable for coating other components in the resin composition, for example, on a glass substrate. It only has to be selected.
  • the photosensitive resin composition may contain various additives such as a leveling agent, a silane coupling agent, a filler, a colorant, and a viscosity modifier as necessary. it can.
  • a leveling agent such as a silane coupling agent, a filler, a colorant, and a viscosity modifier as necessary. it can.
  • the photosensitive resin composition of the present invention thus obtained is a negative type and is used for forming a spacer for a liquid crystal display device.
  • the sealing force is exerted by applying pressure at a temperature of about 120 to 180 ° C.
  • the spacer is plastically deformed so that the desired cell gap cannot be maintained.
  • the elastic deformation component has as little displacement as possible. From these facts, the present inventors have found that the physical properties of the spacer are defined by dynamic viscoelasticity.
  • the spacer according to the present invention is defined by the storage elastic modulus, loss tangent, and glass transition temperature based on the dynamic viscoelasticity of the cured product that also provides the photosensitive resin composition strength.
  • Storage elastic modulus at 0 ° C and storage elastic modulus at 25 ° C is 5-20%, preferably 10-18%
  • storage elastic modulus at 25 ° C and storage elastic modulus at 180 ° C are 30 to 80%, preferably 50 to 80%
  • the glass transition temperature (Tg) of the cured product is 160 ° C or higher
  • the loss tangent (tan ⁇ ) value of ⁇ 50 to 250 ° C is 0.1 or lower. It is characterized by being.
  • the upper limit of the glass transition temperature (Tg) of the cured product is not particularly limited, but is usually about 165 ° C.
  • the lower limit of the loss tangent (tan S) value of 50 to 250 ° C is not particularly limited, but is usually about 0.08.
  • the storage modulus, glass transition temperature (Tg), and loss tangent (tan ⁇ ) of dynamic viscoelasticity employ the following measuring apparatus and measuring method.
  • Sample for measurement An appropriate amount that gives a film thickness of 400 / zm after curing the photosensitive resin composition of the present invention is placed in an aluminum cup, and heated at 120 ° C. for 1 hour to drive off the solvent. Then expose to 500 mjZcm 2 and cure at 220 ° C for 1 hour. Remove the cured product from the aluminum cup and
  • Measuring device Dynamic viscoelastic device DMS6100 (manufactured by Seiko Instruments Inc.) Measuring method: A sample for measurement is set in the device, tensile mode, sine wave, frequency 1 ⁇ , amplitude 10 ⁇ m, initial load 100 mN, rising Temperature range 50 to 250 ° C at 5 ° C Zmin Measure and obtain storage modulus ( ⁇ ', GPa), glass transition temperature (Tg, ° C), and loss tangent (tan ⁇ ). In addition, the rate of change of the storage elastic modulus is obtained from the following formula.
  • the spacer of the present invention is defined by the indentation deformation amount of the spacer in which the photosensitive resin composition force is also formed.
  • the change rate of the indentation deformation at ° C is preferably 100 to 120%.
  • the following measuring device and measuring method are used for the rate of change of indentation deformation.
  • Measurement sample After the photosensitive ⁇ composition was coated on a glass substrate, and the pre-beta 3 minutes 90 ° C, followed 500NijZcm 2 was exposed, 0.10 mass 0/0 tetramethylammonium - Umuhidoro Kishido (TMAH ) Develop with aqueous solution to make a spacer with a height of 5 ⁇ m and a width of 10 ⁇ m.
  • TMAH tetramethylammonium - Umuhidoro Kishido
  • Measuring device Shimadzu Dynamic Ultra Micro Hardness Tester DUH-W201 (manufactured by Shimadzu Corporation) Measuring method: Set the sample for measurement on the device and use a flat indenter with a diameter of 50 m. 1. Spacer at a constant speed of 324 mN Zsec. Apply the load, measure the displacement of the spacer when the maximum load reaches 30mN, and calculate the rate of change using the following formula.
  • Rate of change (%) ["displacement at 180 ° C" Z "displacement at 25 ° C”] X 100
  • the spacer is defined by viscoelasticity as described above.
  • the spacer according to the present invention is formed of the photosensitive resin composition according to the present invention having such characteristics, and the color filter according to the present invention having the spacer is A colored layer and a protective layer for protecting the colored layer are provided on the substrate, an alignment film is provided on the protective layer to align the liquid crystal, and a columnar spacer is provided on the alignment film.
  • the configuration is the same as that of a known color filter provided with a.
  • a transparent electrode for driving a liquid crystal may be formed if necessary.
  • the component (A) component-soluble polyfunctional group having a polymerizable polyfunctional group and the component (B) polymerizable polyfunctional compound are polymerized by radicals generated by light irradiation.
  • contrast when it becomes insoluble in the developer, contrast can be generated and a no-turn can be formed.
  • a film is formed on the substrate intended for the photosensitive resin composition using a spin coater, and then the film is heated at about 90 to 130 ° C. Then, it passes through a mask on which a pattern is drawn on the obtained film and is irradiated with active ultraviolet rays having a wavelength of 365 nm and 436 nm.
  • this coating is applied to, for example, an inorganic aqueous alkaline solution such as sodium hydroxide, potassium hydroxide, sodium carbonate, potassium carbonate, ammonia, etc., primary amine such as n-propylamine, jetylamine, Secondary amines such as n-propylamine, tertiary amines such as triethylamine and methyldimethylamine, alcoholamines such as dimethylethanolamine and triethanolamine, quaternary amines such as tetramethylammonium hydroxide and tetraethylamine hydroxide Development is performed using an alkaline aqueous solution in which grade amin is dissolved, and only unexposed portions are dissolved and removed, followed by rinsing with pure water. As the developing method, methods such as spraying, paddle, dipping, and ultrasonic can be used.
  • primary amine such as n-propylamine, jetylamine
  • Secondary amines such as n-propylamine
  • the alkali-soluble resin having a polymerizable functional group and the polymerizable polyfunctional compound are further cross-linked, and the film has excellent film properties such as adhesion, heat resistance and chemical resistance.
  • the part can be formed at a desired position.
  • the shape of the spacer is not particularly limited, but is preferably a square, rectangle, polygon, circle, or ellipse when viewed from directly above the substrate surface.
  • the long axis direction is preferably horizontal or perpendicular to the rubbing direction.
  • a square, a rectangle, or a trapezoid is preferable.
  • the lower part of the trapezoid may be rounded even if the upper corner of the trapezoid is rounded.
  • the trapezoidal shape is particularly effective when an alignment film is applied and rubbed on the spacer, and when the alignment film is uniformly applied or rubbed.
  • the substrate examples include white plate glass, blue plate glass, and silka coated blue plate glass.
  • Transparent glass substrate polycarbonate, polyester, acrylic resin, butyl resin resin, aromatic polyamide resin, polyamideimide, polyimide resin sheet, film or plate, aluminum plate, copper plate, nickel plate And metal substrates such as stainless steel plates, other ceramic substrates, and semiconductor substrates having photoelectric conversion elements.
  • these substrates can be subjected to pretreatment such as chemical treatment such as a silane coupling agent, plasma treatment, ion plating treatment, sputtering method, gas phase reaction method, and vacuum deposition method.
  • chemical treatment such as a silane coupling agent, plasma treatment, ion plating treatment, sputtering method, gas phase reaction method, and vacuum deposition method.
  • Substrate sizes include 320 mm x 400 mm first generation boards, 370 mm x 4470 mm second generation boards, 550 mm x 650 mm third generation boards, and 680 mm x 880 mm to 730 mm x 920 mm fourth generation boards.
  • the liquid crystal display device of the present invention is characterized by having a color filter provided with the spacer, and the color filter is connected to the mating member via the spacer on the color filter. It is made to face and adhere to the liquid crystal driving substrate.
  • the liquid crystal can be injected by dropping the liquid crystal on one substrate and then sticking the other substrate together to spread the liquid crystal.Injection liquid crystal provided in the seal part is injected and the injection port is sealed. There is a way to stop. Any of the color filters provided with the spacer of the present invention can be manufactured by a known method, but the dropping injection method is more effective.
  • the spacer for a liquid crystal display device of the present invention comprises a negative photosensitive resin containing (A) an alkali-soluble resin, (B) a polymerizable polyfunctional compound, (C) a photopolymerization initiator, and (D) a solvent.
  • the negative photosensitive photosensitive resin composition obtained from the oil composition is not particularly limited.
  • the liquid crystal display device spacer of the present invention described in the above-mentioned Invention 1 The forming photosensitive resin composition can be preferably used.
  • the spacer according to the present invention has a variation in the total deformation amount in the load-unloading test measured by a microhardness meter of the spacer formed from the photosensitive resin composition.
  • the standard deviation ( ⁇ ) at 25 ° C is within 0.25, preferably within 0.20, and the standard deviation ( ⁇ ) at 180 ° C is within 0.30, preferably within 025.
  • the standard deviation ( ⁇ ) at 25 ° C is within 0.20, preferably within 0.15
  • the standard deviation ( ⁇ ) at 180 ° C is It is characterized by being within 0.25, preferably within 0.20.
  • the spacer of the present invention has a variation in the amount of plastic deformation in the load-unloading test measured with a microhardness meter of the spacer formed of the photosensitive resin composition.
  • the standard deviation ( ⁇ ) at 25 ° C within the substrate surface is within 0.20, preferably within 0.15
  • the standard deviation ( ⁇ ) at 180 ° C is within 0.25, preferably within 0.20.
  • (H) A point formed by connecting the center line of the substrate and the points on the edge side of the substrate at the point where each of the line segments connecting the center of the substrate and the plurality of edges is equally divided.
  • the standard deviation ( ⁇ ) at 25 ° C is within 0.15, preferably within 0.10, standard at 180 ° C
  • the deviation ( ⁇ ) is within 0.20, preferably within 0.15.
  • the load-unloading test with the microhardness meter according to the present invention employs the following apparatus and measuring method.
  • Measurement sample After the photosensitive ⁇ composition was coated on a glass substrate, and the pre-beta 3 minutes 90 ° C, followed 500NijZcm 2 was exposed, 0.10 mass 0/0 tetramethylammonium - Umuhidoro Kishido (TMAH ) After developing with aqueous solution, post-beta at 250 ° C for 30 minutes to produce a spacer with a height of 5 ⁇ m and a width of 10 ⁇ m.
  • TMAH tetramethylammonium - Umuhidoro Kishido
  • Measuring device Shimadzu Dynamic Ultra Hardness Tester DUH—W201 (manufactured by Shimadzu Corporation) Measuring point: (a) 5 points selected at random on the entire 370mm X 470mm substrate (see Figure 1)
  • Measurement method Place the sample for measurement on the device and apply a load to the spacer at a constant speed of 324 mN Zsec with a 50 m diameter flat indenter, and when the maximum load reaches 30 mN Measure the total deformation amount and plastic deformation amount, and determine the variation. For the total deformation amount and plastic deformation amount of the spacer, obtain the hysteresis curve force of the load and deformation amount for the spacer as shown in Fig. 3, for example.
  • the photosensitive resin composition forming the spacer preferably has a cured product having a glass transition temperature (Tg) of 160 ° C or higher.
  • Tg glass transition temperature
  • This glass transition temperature is measured by dynamic viscoelasticity measurement, and the following measuring apparatus and measuring method are employed.
  • Sample for measurement An appropriate amount that gives a film thickness of 400 / zm after curing the photosensitive resin composition of the present invention is placed in an aluminum cup, and heated at 120 ° C. for 1 hour to drive off the solvent. Then expose to 500 mjZcm 2 and cure at 220 ° C for 1 hour. Remove the cured product from the aluminum cup, cut it into 4mm width and 40mm length, and cut it into strips.
  • Measuring device Dynamic viscoelastic device DMS6100 (manufactured by Seiko Instruments Inc.) Measuring method: A sample for measurement is set in the device, tensile mode, sine wave, frequency 1 ⁇ , amplitude 10 ⁇ m, initial load 100 mN, rising Measured in the temperature range of 25-250 ° C at a temperature rate of 5 ° CZmin, and the peak position of loss tangent (tan ⁇ ) is defined as the glass transition temperature (Tg, ° C).
  • the height of the spacer in the liquid crystal injection and cell sealing process is determined by defining the spacer by a load-unloading test using a micro hardness tester as described above. Therefore, the desired cell gap can be maintained with less variation, and an improvement in manufacturing yield is expected.
  • the spacer according to the present invention has such characteristics, and the color filter according to the present invention having the spacer has a colored layer and a protective layer for protecting the colored layer on the substrate.
  • an alignment film is provided on the protective layer for aligning the liquid crystal, and a columnar spacer is provided on the alignment film.
  • a transparent electrode for driving a liquid crystal may be formed as necessary.
  • a flask equipped with a condenser and a stirrer was charged with 7 parts by mass of 2,2,1azobis (2,4-dimethylbare-tolyl) and 200 parts by mass of diethylene glycol dimethyl ether. Subsequently, 33 parts by mass of acrylic acid and 27 parts by mass of acrylic acid n-butyl ester were charged and purged with nitrogen, and then gently agitated. The temperature of the solution was raised to 70 ° C, and this temperature was maintained for 5 hours to obtain a copolymer.
  • a flask equipped with a condenser and a stirrer was charged with 7 parts by mass of 2,2,1azobis (2,4-dimethylvale-tolyl) and 200 parts by mass of diethylene glycol dimethyl ether. Subsequently, 43 parts by mass of acrylic acid and 24 parts by mass of acrylic acid n-butyl ester were charged and purged with nitrogen, and then gently agitated. The temperature of the solution was raised to 70 ° C, and this temperature was maintained for 5 hours to obtain a copolymer.
  • Example 1 Into a reaction flask equipped with a nitrogen introduction tube, 100 parts by mass of the alkali-soluble resin I obtained in Production Example 1 and 300 parts by mass of diethylene glycol dimethyl ether [Maruzen Petrochemical Co., Ltd.] were added and stirred at 60 ° C for 3 hours. And dissolved. Next, the reaction solution was cooled to room temperature, 120 parts by mass of polymerizable polyfunctional compound A and 10 parts by mass of photopolymerization initiator I were added, and stirred at room temperature to dissolve. This solution was filtered through a filter having a pore size of 0.5 m to prepare a photosensitive resin composition.
  • Example 1 The same operation as in Example 1 was carried out to prepare photosensitive resin compositions having the compositions shown in Table 1 [Table 1]
  • IRGACURE 907 [Product name, manufactured by Chinoku 'Specialty' Chemicals]
  • II IRGACURE 369 [Product name, manufactured by Chinoku 'Specialty' Chemicals] [0045] ⁇ Evaluation of various properties>
  • Each photosensitive resin composition was coated on a glass substrate using a spin coater and heated on a beta plate at 120 ° C. for 3 minutes to prepare a 6 ⁇ m coating film.
  • This coating film is set in a hot air circulating dryer, heated to 250 ° C at a speed of 100 ° C force 0.5 ° CZmin, held at 250 ° C for 30 minutes, and then at 5 ° CZmin.
  • the film was cooled to room temperature at a speed to obtain a coating film having a thickness of 5 m.
  • the surface condition of this coating film was visually observed and the film thickness uniformity was evaluated using a surface roughness meter (vertical magnification: 500 times) according to the following criteria.
  • Variation rate (%) ⁇ [(Maximum film thickness)-(Minimum film thickness)] / (Average film thickness) ⁇ X 100
  • Each photosensitive resin composition was coated on a glass substrate using a spin coater and a substrate on which a 250 nm ITO film was formed, and heated on a beta plate at 120 ° C for 3 minutes to 6 m.
  • a coating film was prepared. Set this coating film in a hot-air circulating dryer, raise the temperature to 250 ° C at a speed of 0.5 ° C Zmin at 100 ° C force, hold it at 250 ° C for 30 minutes, and then speed it at 5 ° CZmin. Was cooled to room temperature to obtain a coating film having a thickness of 5 m.
  • the surface of the obtained coating film was cut into 100 mm lmm openings based on JIS K5600, peeled off after applying a cellophane tape, and the adhesion of the coating film was evaluated according to the following criteria.
  • Each photosensitive resin composition was coated on a glass substrate using a spin coater and heated on a beta plate at 120 ° C. for 3 minutes to prepare a 6 m coating film.
  • This coating film was exposed using a test pattern. The exposure was performed with exposures of 100, 200, 300, and 500 miZcm 2 using filters that transmit only i-line (365 nm), respectively. Subsequently, paddle development was performed with a 2.38% by weight aqueous solution of tetramethylammonium hydroxide (TMAH), rinsed with pure water, and finally spin-dried.
  • TMAH tetramethylammonium hydroxide
  • the obtained negative pattern is set in a hot air circulating dryer, heated to 100 ° C at a rate of 0.5 ° CZmin to 250 ° C, held at 250 ° C for 30 minutes, then 5 ° Cooled to room temperature at a CZmin rate.
  • the obtained pattern was observed with an optical microscope, and the resolution and cross-sectional shape were evaluated according to the following criteria.
  • each photosensitive resin composition with a thickness of 400 ⁇ m after curing was placed in an aluminum cup and heated to remove the solvent at 120 ° C. for 1 hour. Thereafter, it was exposed to 500 mjZcm 2 and cured at 220 ° C. for 1 hour. The cured product was removed from the aluminum cup, cut into a width of 4 mm and a length of 40 mm, and formed into a strip shape.
  • the measurement apparatus and measurement conditions were as shown below.
  • Measuring device Dynamic viscoelastic device DMS6100 (manufactured by Seiko Instruments Inc.) Measuring method: A sample for measurement is set in the device, tensile mode, sine wave, frequency 1 ⁇ , amplitude 10 ⁇ m, initial load 100 mN, rising Measurements were made at a temperature rate of 5 ° CZmin in the temperature range of 50 to 250 ° C, and the storage elastic modulus ( ⁇ ', GPa), glass transition temperature (Tg, ° C), and loss tangent (tan ⁇ ) were determined. Moreover, the change rate of the storage elastic modulus was calculated
  • Each photosensitive resin composition was coated on a glass substrate, pre-betated at 90 ° C for 3 minutes, then exposed to 500 mjZcm 2 , developed with 0.10 wt% TMAH aqueous solution, and height 5 / ⁇ ⁇ A spacer with a width of 10 m was produced.
  • the measurement apparatus and measurement conditions were as shown below.
  • Measuring equipment Shimadzu Dynamic Ultra-Hardness Tester DUH— W201 [manufactured by Shimadzu Corporation]
  • Measuring method A measuring sample is set in the equipment and a flat indenter with a diameter of 50 m is used. When the maximum load was 30 mN, the displacement of the spacer was measured, and the rate of change was calculated using the following formula.
  • Rate of change (%) ["Displacement at 180 ° C" Z "Displacement at 25 ° C”] X 100
  • each photosensitive resin composition with a thickness of 400 ⁇ m after curing was placed in an aluminum cup and heated to remove the solvent at 120 ° C. for 1 hour. Thereafter, it was exposed to 500 mjZcm 2 and cured at 220 ° C. for 1 hour. The cured product was removed from the aluminum cup, cut into a width of 4 mm and a length of 40 mm, and formed into a strip shape.
  • the measurement apparatus and measurement conditions were as shown below.
  • Measuring device Dynamic viscoelastic device DMS6100 (manufactured by Seiko Instruments Inc.) Measuring method: A sample for measurement is set in the device, tensile mode, sine wave, frequency 1 ⁇ , amplitude 10 ⁇ m, initial load 100 mN, rising The temperature was measured at a temperature rate of 5 ° CZmin in the temperature range of 25 to 250 ° C, and the peak position of loss tangent (tan ⁇ ) was defined as the glass transition temperature (Tg, ° C).
  • TMAH tetramethylammonium - Umuhidorokishido
  • Measuring device Shimadzu Dynamic Ultra Hardness Tester DUH—W201 (manufactured by Shimadzu Corporation) Measuring point: (a) 5 points selected at random on the entire 370mm X 470mm substrate (see Figure 1)
  • Measurement method Place the sample for measurement on the device and apply a load to the spacer at a constant speed of 324 mN Zsec with a 50 m diameter flat indenter, and when the maximum load reaches 30 mN The total deformation amount and the plastic deformation amount were measured, and the variation was obtained. The total deformation amount and plastic deformation amount of the spacer were obtained from the hysteresis curve of load and deformation amount for the spacer shown in Fig. 3.
  • the photosensitive resin composition of the invention 1 has a negative pattern forming ability, a high contrast, a high sensitivity, and a negative forward taper pattern with good dimensional controllability.
  • the finally obtained cured product has good heat resistance, chemical resistance and adhesion to the substrate, and can be used as a spacer for a liquid crystal display device having excellent strength.
  • the spacer for a liquid crystal display device according to the second aspect of the present invention does not cause a display defect with a small cell gap variation when used in a liquid crystal display device, thereby realizing a high-quality liquid crystal display device. Can do.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Optics & Photonics (AREA)
  • Mathematical Physics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Liquid Crystal (AREA)
  • Macromonomer-Based Addition Polymer (AREA)
  • Materials For Photolithography (AREA)

Abstract

This invention provides a photosensitive resin composition, which has high sensitivity and high resolution and can provide a spacer for a liquid crystal display device, which can evenly keep cell gap even at room temperature and high temperature and has excellent heat resistance, chemical resistance and strength, and a spacer for a liquid crystal display device. The photosensitive resin composition is a photosensitive resin composition for the formation of a spacer for a negative-working liquid crystal display device, which, in a cured product, the percentage change in storage modulus between -20ºC and 25ºC is 5 to 20%, the percentage change in storage modulus between 25ºC and 180ºC is 30 to 80%, the glass transition temperature is 160ºC or above, and the tan δ value at -50 to 250ºC is not more than 0.1. The spacer for a liquid crystal display device is small in a variation in total deformation level or in a variation in plastic deformation level as measured with a microhardness meter by a load-unloading test.

Description

明 細 書  Specification
感光性樹脂組成物、スぺーサ一、カラーフィルター及び液晶表示装置 技術分野  Photosensitive resin composition, spacer, color filter and liquid crystal display
[0001] 本発明は、耐熱性、耐薬品性、強度に優れる液晶表示装置用スぺーサーを与える ネガ型感光性榭脂組成物、この感光性榭脂組成物を用いて形成されてなる前記性 状を有する液晶表示装置用スぺーサ一、該スぺ一サーを有する液晶表示装置用力 ラーフィルター及びこのカラーフィルターを用いた液晶表示装置に関する。  [0001] The present invention provides a negative photosensitive resin composition that provides a spacer for a liquid crystal display device having excellent heat resistance, chemical resistance, and strength. The negative photosensitive resin composition is formed using the photosensitive resin composition. The present invention relates to a spacer for a liquid crystal display device having properties, a power color filter for a liquid crystal display device including the spacer, and a liquid crystal display device using the color filter.
背景技術  Background art
[0002] 液晶パネルは、その目的とする電気工学的特性を得るために、 2枚の基板の間隔 を表示全体にわたって均一に得ることが必要である。そのため、所定の粒径を有する ガラスビーズ、プラスチックビーズ等のスぺーサービーズを用
Figure imgf000002_0001
、てガラス基板の間隔 を一定に保っている。
In order to obtain the intended electrical engineering characteristics, a liquid crystal panel needs to obtain a uniform distance between two substrates over the entire display. Therefore, use spacer beads such as glass beads and plastic beads with a predetermined particle size.
Figure imgf000002_0001
The distance between the glass substrates is kept constant.
これらのスぺーサービーズは、ガラス基板上にランダムに散布されるため、有効画 素部内にスぺーサービーズが存在してしまい、スぺーサービーズの写りこみや入射 光の散乱、光漏れ等の問題があった。また、近年、基板の大型化に伴い、液晶の注 入は真空注入法力ゝら滴下注入法へと移行しているが、滴下注入法では、液晶の注入 に伴 、スぺーサービーズが移動してしま 、、均一な配置が保たれな 、と 、う問題もあ つた o  Since these spacer beads are randomly distributed on the glass substrate, the spacer beads exist in the effective pixel area, and the spacer beads are reflected, scattered incident light, light leakage, etc. There was a problem. In recent years, with the increase in size of the substrate, liquid crystal injection has shifted to the drop injection method in addition to the force of the vacuum injection method. However, in the drop injection method, the spacer beads move as the liquid crystal is injected. There is also a problem that the uniform arrangement is not maintained.
これに対して、感光性榭脂を用いてカラーフィルター上の所定の位置にスぺーサー を形成する方法が使用されるようになってきたが、これは、感光性榭脂をカラーフィル ター上に塗布し、所定のマスクを介して紫外線などの活性光線を照射した後、現像 することにより、ドット状やストライプ状にスぺーサーを形成するものである。このように スぺーサーを形成すると、カラーフィルターのブラックマトリックス上に選択的に、かつ  On the other hand, a method of forming a spacer at a predetermined position on a color filter using a photosensitive resin has been used. This is because a photosensitive resin is applied on a color filter. It is applied to the substrate, irradiated with actinic rays such as ultraviolet rays through a predetermined mask, and then developed to form spacers in the form of dots or stripes. When the spacer is formed in this way, selectively on the black matrix of the color filter, and
、位置ずれの発生を起こすことなくスぺーサーを形成することができる。 In addition, a spacer can be formed without causing misalignment.
[0003] このスぺーサ一は、液晶材料と接触するためにパネルを組み立てた後に、スぺー サー材料力も溶出物が発生しないことが重要であり、高温で熱処理して溶剤、不純 物を十分に揮発させ、モノマー等の硬化成分がある場合には、充分に硬化させる必 要があった。この熱処理の際にパターン形状が崩れてしまわないように耐熱性が必 要である。また、パネル製造プロセスにおいては、液晶の滴下注入工程では常温で 圧力をかけて液晶を広げ、基板の貼合わせ工程では高温で圧力をかけてシールを 封着するため、常温、高温どちらにおいても大きな変形、潰れが発生してはギャップ 幅が不均一になる。このようなギャップの不均一は表示コントラストを低下させるなど、 好ましくない事態を招来する。このため、スぺーサー材料として、例えばネガ型感光 性榭脂組成物を用いる技術が開示されて ヽる (例えば、特許文献 1参照)。 In this spacer, it is important that the spacer material does not generate any eluate after the panel is assembled to come into contact with the liquid crystal material. If there is a curing component such as a monomer, it must be fully cured. There was a point. Heat resistance is required so that the pattern shape does not collapse during this heat treatment. In the panel manufacturing process, pressure is applied at room temperature to spread the liquid crystal in the liquid crystal drop injection process, and the seal is sealed at high temperature by applying pressure at the substrate bonding process. When deformation or crushing occurs, the gap width becomes non-uniform. Such a non-uniform gap leads to an undesirable situation such as a reduction in display contrast. For this reason, for example, a technique using a negative photosensitive resin composition as a spacer material is disclosed (for example, see Patent Document 1).
しカゝしながら、このような感光性榭脂組成物を用いた場合でも、シール封着温度で は変形量が大きくなるのを免れず、大型パネルのセルギャップ均一性を保持すること が難し力つた。  However, even when such a photosensitive resin composition is used, the amount of deformation is inevitable at the seal sealing temperature, and it is difficult to maintain the cell gap uniformity of a large panel. I helped.
また、柔軟で塑性変形量の小さ!/ヽスぺーサ一の形成が可能なスぺーサ一形成用 感光性榭脂組成物が開示されている (例えば、特許文献 2参照)。しかしながら、この ような感光性榭脂組成物を用いた場合でも、シール封着時にスぺーサ一が変形して しまい、その変形量のバラつきによりギャップ幅が不均一になり、表示コントラストの低 下が生じるという問題があった。また、基板面内で中心部と端部とで変形量が大きく 異なると、均一な高さのスぺーサ一部分が少なくなり、このため製品の歩留まりが低 下するという問題が生じた。  In addition, it is flexible and has a small amount of plastic deformation! A photosensitive resin composition for forming spacers capable of forming a spacer is disclosed (for example, see Patent Document 2). However, even when such a photosensitive resin composition is used, the spacer is deformed at the time of sealing the seal, and the gap width becomes non-uniform due to the variation in the deformation amount, resulting in a decrease in display contrast. There was a problem that occurred. In addition, if the amount of deformation is significantly different between the center and the edge within the substrate surface, the portion of the spacer having a uniform height is reduced, which causes a problem that the yield of the product is lowered.
[0004] 特許文献 1 :特開 2003— 29405号公報 Patent Document 1: Japanese Patent Laid-Open No. 2003-29405
特許文献 2:特開 2005 - 292270号公報  Patent Document 2: JP 2005-292270 A
発明の開示  Disclosure of the invention
発明が解決しょうとする課題  Problems to be solved by the invention
[0005] 本発明は、このような従来技術における問題点を解決し、高感度及び高解像度を 有し、かつ常温、高温においてもセルギャップを均一に保つことのできる、耐熱性、耐 薬品性、強度に優れる液晶表示装置用スぺーサーを与える感光性榭脂組成物、こ の感光性榭脂組成物を用いて形成されてなる前記性状を有する液晶表示装置用ス ぺーサ一、該スぺ一サーを有する液晶表示装置用カラーフィルター及びこのカラー フィルターを用いた液晶表示装置を提供することを目的とする。 [0005] The present invention solves such problems in the prior art, has high sensitivity and high resolution, and can maintain a uniform cell gap even at room temperature and high temperature. A photosensitive resin composition that provides a spacer for a liquid crystal display device having excellent strength, and a spacer for a liquid crystal display device having the above-mentioned properties formed by using the photosensitive resin composition, the spacer. It is an object to provide a color filter for a liquid crystal display device having a spacer and a liquid crystal display device using the color filter.
課題を解決するための手段 [0006] 本発明者らは、前記目的を達成するために、鋭意研究を重ねた結果、特定な組成 と性状を有する感光性榭脂組成物により、その目的を達成し得ることを見出した。本 発明は、力かる知見に基づいて完成したものである。 Means for solving the problem [0006] As a result of intensive studies to achieve the above object, the present inventors have found that the object can be achieved by a photosensitive resin composition having a specific composition and properties. The present invention has been completed based on powerful knowledge.
すなわち、本発明のうちの発明 1は、  That is, Invention 1 of the present invention is
(1) (A)アルカリ可溶性榭脂、(B)重合性多官能化合物、(C)光重合開始剤、及び( D)溶剤を含むネガ型感光性榭脂組成物であって、  (1) A negative photosensitive resin composition comprising (A) an alkali-soluble resin, (B) a polymerizable polyfunctional compound, (C) a photopolymerization initiator, and (D) a solvent,
(a)前記榭脂組成物力も得られる硬化物の— 20°Cにおける貯蔵弾性率と 25°Cにお ける貯蔵弾性率の変化率が 5〜20%であること、  (a) the rate of change between the storage elastic modulus at 20 ° C and the storage elastic modulus at 25 ° C of the cured product from which the composition of the resin composition is also obtained is 5 to 20%;
(b)当該硬化物の 25°Cにおける貯蔵弾性率と 180°Cにおける貯蔵弾性率の変化率 力 30〜80%であること、  (b) The rate of change of the storage elastic modulus at 25 ° C and the storage elastic modulus at 180 ° C of the cured product.
(c)当該硬化物のガラス転移温度が 160°C以上であること、及び  (c) The glass transition temperature of the cured product is 160 ° C or higher, and
(d)当該硬化物の— 50〜250°Cにおける tan δの値が 0. 1以下であること、 を特徴とする液晶表示装置スぺーサ一形成用感光性榭脂組成物、  (d) a photosensitive resin composition for forming a spacer of a liquid crystal display device, wherein the cured product has a value of tan δ at 50 to 250 ° C. of 0.1 or less,
(2)ネガ型感光性榭脂組成物力 (Α)重量平均分子量が 10, 000-20, 000で、か つガラス転移温度が 110°C以上である重合性官能基を有するアルカリ可溶性榭脂 1 00質量部、(B)重合性多官能化合物 50〜250質量部、(C)光重合開始剤 1〜20 質量部、及び (D)溶剤を含む上記(1)項に記載の液晶表示装置スぺーサ一形成用 感光性榭脂組成物、  (2) Negative photosensitive resin composition strength (i) Alkali-soluble resin having a polymerizable functional group having a weight average molecular weight of 10,000 to 20,000 and a glass transition temperature of 110 ° C or higher 1 The liquid crystal display device according to (1) above, comprising 00 parts by mass, (B) 50 to 250 parts by mass of a polymerizable polyfunctional compound, (C) 1 to 20 parts by mass of a photopolymerization initiator, and (D) a solvent. Photosensitive resin composition for forming a spacer,
[0007] (3) (A)アルカリ可溶性榭脂が、(al)エチレン性不飽和結合を有するカルボン酸及 び Z又はエチレン性不飽和結合を有するカルボン酸無水物と、 (a2)その他のェチレ ン性不飽和結合を有する不飽和化合物との共重合体の一部を、 (a3)エチレン性不 飽和結合を有するエポキシィヒ合物と反応させて得られた榭脂である上記(1)項に記 載の液晶表示装置スぺーサ一形成用感光性榭脂組成物、  [0007] (3) (A) Alkali-soluble rosin comprises (al) a carboxylic acid having an ethylenically unsaturated bond and a carboxylic acid anhydride having Z or an ethylenically unsaturated bond, and (a2) other ethylenic acid. In the above item (1), which is a resin obtained by reacting a part of a copolymer with an unsaturated compound having an ethylenically unsaturated bond with an epoxy compound having (a3) an ethylenically unsaturated bond A photosensitive resin composition for forming a liquid crystal display device spacer,
(4) (B)重合性多官能化合物が、官能基数 5以上のものである上記(1)項に記載の 液晶表示装置スぺーサ一形成用感光性榭脂組成物、  (4) The photosensitive resin composition for forming a liquid crystal display device spacer according to the above item (1), wherein the polymerizable polyfunctional compound (B) has 5 or more functional groups,
(5) (B)重合性多官能化合物が、ガラス転移温度 100°C以上のものである上記(1) 項に記載の液晶表示装置スぺーサ一形成用感光性榭脂組成物、  (5) The photosensitive resin composition for forming a liquid crystal display device spacer as described in the above item (1), wherein the polymerizable polyfunctional compound (B) has a glass transition temperature of 100 ° C or higher,
(6) (B)重合性多官能化合物が、ウレタン結合を有するものである上記(1)項に記載 の液晶表示装置スぺーサ一形成用感光性榭脂組成物、 (6) (B) The polymerizable polyfunctional compound described in the above item (1), which has a urethane bond Photosensitive resin composition for forming a liquid crystal display device spacer,
(7)形成されるスぺーサ一の 25°Cにおける押し込み変形量と 180°Cにおける押し込 み変形量の変化率が 100〜 120%である上記(1)項に記載の液晶表示装置スぺー サー形成用感光性榭脂組成物、  (7) The liquid crystal display device according to (1) above, wherein the rate of change in indentation deformation at 25 ° C and indentation deformation at 180 ° C of the formed spacer is 100 to 120%. Photosensitive resin composition for spacer formation,
(8)上記(1)項に記載の感光性榭脂組成物を用いて形成されてなる液晶表示装置 用スぺーサ一、  (8) A spacer for a liquid crystal display device formed by using the photosensitive resin composition according to the above item (1),
(9)上記(1)項に記載の感光性榭脂組成物を用いて形成されてなる液晶表示装置 用スぺーサーを有することを特徴とするカラーフィルター、及び  (9) A color filter comprising a spacer for a liquid crystal display device formed by using the photosensitive resin composition according to (1) above, and
(10)上記(1)項に記載の感光性榭脂組成物を用いて形成されてなる液晶表示装置 用スぺーサーを有することを特徴とする液晶表示装置、  (10) A liquid crystal display device comprising a spacer for a liquid crystal display device formed using the photosensitive resin composition according to the above (1),
を提供するものである。 Is to provide.
また、本発明のうちの発明 2は、  Invention 2 of the present invention is
(11) (A)アルカリ可溶性榭脂、(B)重合性多官能化合物、(C)光重合開始剤、及 び (D)溶剤を含むネガ型感光性榭脂組成物力も得られるスぺーサ一であって、微小 硬度計で測定した負荷ー徐荷試験における総変形量のバラつきが、(e)基板面内に おいて、 25°Cでの標準偏差(σ )で 0. 25以内、 180°Cでの標準偏差( σ )で 0. 30 以内であること、及び  (11) A spacer capable of obtaining a negative photosensitive resin composition comprising (A) an alkali-soluble resin, (B) a polymerizable polyfunctional compound, (C) a photopolymerization initiator, and (D) a solvent. The variation of the total deformation in the load-unloading test measured with a micro hardness tester is (e) within the 0.25 standard deviation (σ) at 25 ° C within the substrate surface. The standard deviation (σ) at 180 ° C is within 0.30, and
(f)基板の中心と複数の端部を結ぶ線分それぞれを三等分した点の、基板の中心側 の点同士及び基板の端部側の点同士を結んで形成された 2つの図形により形成され る 3つの領域各々での 2cm角内において、 25°Cでの標準偏差(σ )で 0. 20以内、 1 80°Cでの標準偏差(σ )で 0. 25以内であること、  (f) By two figures formed by connecting the points on the center side of the substrate and the points on the end side of the substrate, each of which bisects the line segment connecting the center of the substrate and the plurality of ends. Within 2 cm square in each of the three regions formed, the standard deviation (σ) at 25 ° C is within 0.20, and the standard deviation (σ) at 80 ° C is within 0.25,
を特徴とする液晶表示装置用スぺーサ一、 Spacer for liquid crystal display device, characterized by
(12) (Α)アルカリ可溶性榭脂、(Β)重合性多官能化合物、(C)光重合開始剤、及び (D)溶剤を含むネガ型感光性榭脂組成物力も得られるスぺーサ一であって、微小硬 度計で測定した負荷ー徐荷試験における塑性変形量のバラつきが、  (12) A spacer that can also provide a negative photosensitive resin composition comprising (Α) an alkali-soluble resin, (Β) a polymerizable polyfunctional compound, (C) a photopolymerization initiator, and (D) a solvent. The variation in the amount of plastic deformation in the load-unloading test measured with a microhardness meter is
(g)基板面内において、 25°Cでの標準偏差(σ )で 0. 20以内、 180°Cでの標準偏 差(σ )で 0. 25以内であること、及び  (g) Within the substrate surface, the standard deviation (σ) at 25 ° C is within 0.20, the standard deviation (180) at 180 ° C is within 0.25, and
(h)基板の中心と複数の端部を結ぶ線分それぞれを三等分した点の、基板の中心 側の点同士及び基板の端部側の点同士を結んで形成された 2つの図形により形成さ れる 3つの領域各々での 2cm角内において、 25°Cでの標準偏差(σ )で 0. 15以内 、 180°Cでの標準偏差(σ )で 0. 20以内であること、 (h) The center of the substrate at the point where each line segment connecting the center of the substrate and the plurality of ends is divided into three equal parts The standard deviation (σ) at 25 ° C is 0. within 2 cm square in each of the three regions formed by the two figures formed by connecting the points on the side and the points on the edge side of the substrate. Within 15, the standard deviation (σ) at 180 ° C is within 0.20,
を特徴とする液晶表示装置用スぺーサ一、  Spacer for liquid crystal display device, characterized by
[0009] (13)ネガ型感光性榭脂組成物力 (Α)重量平均分子量が 10, 000-20, 000で、 かつガラス転移温度が 110°C以上である重合性官能基を有するアルカリ可溶性榭脂 100質量部、(B)重合性多官能化合物 50〜250質量部、(C)光重合開始剤 1〜20 質量部、及び (D)溶剤を含み、前記榭脂組成物から得られる硬化物のガラス転移温 度が 160°C以上である上記(11)又は(12)項に記載の液晶表示装置用スぺーサー (13) Negative photosensitive resin composition strength (i) Alkali-soluble resin having a polymerizable functional group having a weight average molecular weight of 10,000 to 20,000 and a glass transition temperature of 110 ° C or higher. 100 parts by weight of fat, (B) 50 to 250 parts by weight of polymerizable polyfunctional compound, (C) 1 to 20 parts by weight of a photopolymerization initiator, and (D) a cured product obtained from the resin composition. The glass transition temperature of the liquid crystal display device according to the above (11) or (12), wherein the glass transition temperature is 160 ° C or higher.
(14) (A)アルカリ可溶性榭脂が、(al)エチレン性不飽和結合を有するカルボン酸 及び Z又はエチレン性不飽和結合を有するカルボン酸無水物と、 (a2)その他のェ チレン性不飽和結合を有する不飽和化合物との共重合体の一部を、 (a3)エチレン 性不飽和結合を有するエポキシ化合物と反応させて得られた榭脂である上記(11) 又は(12)項に記載の液晶表示装置用スぺーサ一、 (14) (A) Alkali-soluble resin is (al) a carboxylic acid having an ethylenically unsaturated bond and a carboxylic acid anhydride having Z or an ethylenically unsaturated bond, and (a2) other ethylenically unsaturated Item (11) or (12), which is a resin obtained by reacting a part of a copolymer with an unsaturated compound having a bond with an epoxy compound having (a3) an ethylenically unsaturated bond. Spacers for liquid crystal display devices
(15) (B)重合性多官能化合物が、官能基数 5以上のものである上記(11)又は(12) 項に記載の液晶表示装置用スぺーサ一、  (15) The spacer for a liquid crystal display device according to the above (11) or (12), wherein the polymerizable polyfunctional compound (B) has 5 or more functional groups,
(16) (B)重合性多官能化合物が、ガラス転移温度 100°C以上のものである上記(11 )又は(12)項に記載の液晶表示装置用スぺーサ一、  (16) The spacer for a liquid crystal display device according to the above (11) or (12), wherein the polymerizable polyfunctional compound (B) has a glass transition temperature of 100 ° C. or higher.
(17) (B)重合性多官能化合物が、ウレタン結合を有するものである上記(11)又は( 12)項に記載の液晶表示装置用スぺーサ一、  (17) The spacer for a liquid crystal display device according to the above (11) or (12), wherein the polymerizable polyfunctional compound (B) has a urethane bond,
(18)上記(11)又は(12)項に記載の液晶表示装置用スぺーサーを有することを特 徴とするカラーフィルター、及び  (18) A color filter characterized by having a spacer for a liquid crystal display device according to the above (11) or (12), and
( 19)上記( 11)又は( 12)項に記載の液晶表示装置用スぺーサーを有することを特 徴とする液晶表示装置、  (19) A liquid crystal display device comprising the spacer for a liquid crystal display device according to the above (11) or (12),
を提供するものである。  Is to provide.
発明の効果  The invention's effect
[0010] 本発明によれば、高感度及び高解像度を有し、かつ常温、高温にお!、てもセルギ ヤップを均一に保つことのできる、耐熱性、耐薬品性、強度に優れる液晶表示装置用 スぺーサーを与える感光性樹脂組成物を提供することができる。 [0010] According to the present invention, it has high sensitivity and high resolution, and at room temperature and high temperature! It is possible to provide a photosensitive resin composition that can maintain a uniform yap and provide a spacer for a liquid crystal display device having excellent heat resistance, chemical resistance, and strength.
また、この感光性榭脂組成物を用いて形成されてなる前記性状を有する液晶表示 装置用スぺーサ一、該スぺ一サーを有する液晶表示装置用カラーフィルター及びこ のカラーフィルターを用いた液晶表示装置を提供することができる。  Further, a spacer for a liquid crystal display device having the above-mentioned properties formed by using this photosensitive resin composition, a color filter for a liquid crystal display device having the spacer, and this color filter were used. A liquid crystal display device can be provided.
図面の簡単な説明  Brief Description of Drawings
[0011] [図 1]スぺーサ一の負荷ー徐荷試験における測定箇所の説明図である。  FIG. 1 is an explanatory diagram of measurement points in a loader-unloading test of a spacer.
[図 2]スぺーサ一の負荷ー徐荷試験における測定箇所の説明図である。  FIG. 2 is an explanatory diagram of measurement points in a spacer load-unloading test.
[図 3]スぺーサ一の負荷ー徐荷試験に用いるヒステリシス曲線を示すグラフである。  FIG. 3 is a graph showing a hysteresis curve used in a loader-unloading test of a spacer.
[図 4]感光性榭脂組成物にぉ 、て、硬化後のパターンの断面形状を評価するための 判定基準を示す図である。  FIG. 4 is a diagram showing a criterion for evaluating the cross-sectional shape of a pattern after curing in a photosensitive resin composition.
発明を実施するための最良の形態  BEST MODE FOR CARRYING OUT THE INVENTION
[0012] <発明 1 > [0012] <Invention 1>
本発明の液晶表示装置スぺーサ一形成用感光性榭脂組成物 (以下、単に感光性 榭脂組成物と称することがある。)は、(A)アルカリ可溶性榭脂、(B)重合性多官能化 合物、(C)光重合開始剤、及び (D)溶剤を含むネガ型感光性榭脂組成物であり、好 ましくは (A)重量平均分子量が 10, 000-20, 000で、かつガラス転移温度が 110 °C以上である重合性官能基を有するアルカリ可溶性榭脂 100質量部、(B)重合性多 官能化合物 50〜250質量部、(C)光重合開始剤 1〜20質量部、及び (D)溶剤を含 むネガ型感光性榭脂組成物である。  The photosensitive resin composition for forming a spacer of a liquid crystal display device of the present invention (hereinafter sometimes simply referred to as photosensitive resin composition) includes (A) an alkali-soluble resin and (B) a polymerizable resin. A negative photosensitive resin composition containing a polyfunctional compound, (C) a photopolymerization initiator, and (D) a solvent. Preferably, (A) the weight average molecular weight is 10,000 to 20,000. And 100 parts by mass of an alkali-soluble resin having a polymerizable functional group having a glass transition temperature of 110 ° C. or higher, (B) 50 to 250 parts by mass of a polymerizable polyfunctional compound, and (C) a photopolymerization initiator 1 to A negative photosensitive resin composition containing 20 parts by mass and (D) a solvent.
本発明の感光性榭脂組成物における (A)成分のアルカリ可溶性榭脂としては、例 えば、(al)エチレン性不飽和結合を有するカルボン酸及び Z又はエチレン性不飽 和結合を有するカルボン酸無水物と、 (a2)その他のエチレン性不飽和結合を有する 不飽和化合物との共重合体の一部を、 (a3)エチレン性不飽和結合を有するェポキ シ化合物と反応させて得られた榭脂を好ましく用いることができる。  Examples of the alkali-soluble resin of component (A) in the photosensitive resin composition of the present invention include, for example, (al) a carboxylic acid having an ethylenically unsaturated bond and a carboxylic acid having Z or an ethylenically unsaturated bond. A part of a copolymer of an anhydride and (a2) another unsaturated compound having an ethylenically unsaturated bond was reacted with (a3) an epoxy compound having an ethylenically unsaturated bond. Fats can be preferably used.
前記 (al)エチレン性不飽和結合を有するカルボン酸及び Z又はエチレン性不飽 和結合を有するカルボン酸無水物と、 (a2)その他のエチレン性不飽和結合を有する 化合物との共重合体は、 (al)と (a2)を溶媒中で重合開始剤の存在下にラジカル重 合すること〖こよって製造することができる。 The copolymer of (al) a carboxylic acid having an ethylenically unsaturated bond and Z or a carboxylic acid anhydride having an ethylenically unsaturated bond, and (a2) another compound having an ethylenically unsaturated bond, (al) and (a2) are radical radicals in a solvent in the presence of a polymerization initiator. It can be manufactured by combining.
[0013] 前記(al)成分としては、例えばアクリル酸、メタクリル酸、クロトン酸などのモノカル ボン酸、マレイン酸、フマル酸、シトラコン酸、メサコン酸、ィタコン酸などのジカルボン 酸及びこれらのカルボン酸無水物が挙げられる。これらは 1種を単独で用いてもよぐ 2種以上を組み合わせて用いてもょ 、。  [0013] Examples of the component (al) include monocarboxylic acids such as acrylic acid, methacrylic acid, and crotonic acid, dicarboxylic acids such as maleic acid, fumaric acid, citraconic acid, mesaconic acid, and itaconic acid, and carboxylic anhydrides thereof. Things. These can be used alone or in combination of two or more.
一方、(a2)成分としては、例えばメチルメタタリレート、ェチルメタタリレート、 n—ブ チルメタタリレート、 sec ブチルメタタリレート、 t ブチルメタタリレートなどのメタタリ ル酸アルキルエステル;メチルアタリレート、イソプロピルアタリレートなどのアクリル酸 アルキルエステル;シクロへキシルメタタリレート、 2—メチルシクロへキシルメタクリレ ート、ジシクロペンタ-ルメタタリレート、ジシクロペンタ-ルォキシェチルメタタリレート 、イソポロ-ルメタタリレートなどのメタクリル酸環状アルキルエステル;シクロへキシル アタリレート、 2—メチルシクロへキシルアタリレート、ジシクロペンタ-ルアタリレート、 ジシクロペンタ-ルォキシェチルアタリレート、イソポロ-ルアタリレートなどのアクリル 酸環状アルキルエステル;フエ-ルメタタリレート、ベンジルメタタリレートなどのメタタリ ル酸ァリールエステル;フエ-ルアタリレート、ベンジルアタリレートなどのアクリル酸ァ リールエステル;マレイン酸ジェチル、フマル酸ジェチル、ィタコン酸ジェチルなどの ジカルボン酸ジエステル; 2—ヒドロキシェチルメタタリレート、 2 ヒドロキシプロピルメ タクリレートなどのヒドロキシアルキルエステル;及びスチレン、 α—メチルスチレン、 m —メチルスチレン、 p—メチルスチレン、ビュルトルエン、 p—メトキシスチレン、アタリ口 二トリル、メタタリ口-トリル、塩化ビュル、塩ィ匕ビユリデン、アクリルアミド、メタクリルアミ ド、酢酸ビニル、 1, 3 ブタジエン、イソプレン、 2, 3 ジメチルー 1, 3 ブタジエン などが挙げられる。これらは 1種を単独で用いてもよぐ 2種以上を組み合わせて用い てもよい。  On the other hand, as the component (a2), for example, methyl metatalylate, ethyl metatalylate, n-butyl metatalylate, sec butyl metatalylate, t-butyl metatalylate, etc. Alkyl esters of acrylic acid such as acrylate and isopropyl acrylate; cyclohexyl methacrylate, 2-methylcyclohexyl methacrylate, dicyclopenta-methacrylate, dicyclopenta-roxetyl methacrylate, isopololol methacrylate Methacrylic acid cyclic alkyl esters such as: cyclohexyl acrylate, 2-methylcyclohexyl acrylate, dicyclopenta-butyl acrylate, dicyclopenta-luxhetyl acrylate, isopolo-butyl acrylate Steal; Metalarylic acid aryl ester such as phenol metatalylate and benzyl metatalylate; Acrylic acid aryl ester such as phenol atalylate and benzyl atallate; Jetyl maleate, Jetyl fumarate, Jetyl itaconate, etc. Dicarboxylic acid diesters; hydroxyalkyl esters such as 2-hydroxyethyl methacrylate, 2-hydroxypropyl methacrylate; and styrene, α-methylstyrene, m-methylstyrene, p-methylstyrene, butyltoluene, p-methoxystyrene , Atari mouth Nitryl, Metatari mouth-tolyl, Butyl chloride, Sodium chloride vinylidene, Acrylamide, Methacrylamide, Vinyl acetate, 1,3 Butadiene, Isoprene, 2,3 Dimethyl-1,3 Butadiene and the like. These may be used alone or in combination of two or more.
[0014] 前記 (al)成分と (a2)成分との共重合の際に用いられる溶媒としては、例えばメタノ ール、エタノールなどのアルコール類;テトラヒドロフランなどのエーテル類;エチレン グリコーノレモノメチノレエーテノレ、エチレングリコーノレモノェチノレエーテノレなどのグリコ ールエーテル類;メチルセ口ソルブアセテート、ェチルセ口ソルブアセテートなどのェ チレングリコールアルキルエーテルアセテート類;ジエチレングリコールモノメチルェ 一テル、ジエチレングリコールモノェチルエーテル、ジエチレングリコールジメチルェ ーテノレ、ジエチレングリコーノレジェチノレエーテノレ、ジエチレングリコーノレェチノレメチノレ エーテルなどのジエチレングリコール類;プロピレングリコールメチルエーテル、プロ ピレングリコーノレェチノレエーテノレ、プロピレングリコーノレプロピノレエーテノレ、プロピレ ングリコールブチルエーテルなどのプロピレングリコールモノアルキルエーテル類;プ ロピレングリコーノレメチノレエーテノレアセテート、プロピレングリコーノレェチノレエーテノレ アセテート、プロピレングリコールプロピルエーテルアセテート、プロピレングリコール ブチルエーテルアセテートなどのプロピレングリコールアルキルエーテルアセテート 類;プロピレングリコールメチルエーテルプロピオネート、プロピレングリコーノレェチノレ エーテルプロピオネート、プロピレングリコールプロピノレエ一テルプロピオネート、プロ ピレングリコールブチノレエーテルプロピオネートなどのプロピレングリコーノレアノレキノレ エーテルアセテート類;トルエン、キシレンなどの芳香族炭化水素類;メチルェチルケ トン、シクロへキサノン、 4 ヒドロキシ一 4—メチル 2 ペンタノンなどのケトン類; 及び酢酸メチル、酢酸ェチル、酢酸プロピル、酢酸ブチル、 2 ヒドロキシプロピオン 酸ェチル、 2—ヒドロキシ 2—メチルプロピオン酸メチル、 2—ヒドロキシ 2—メチル プロピオン酸ェチル、ヒドロキシ酢酸メチル、ヒドロキシ酢酸ェチル、ヒドロキシ酢酸ブ チル、乳酸メチル、乳酸ェチル、乳酸プロピル、乳酸ブチル、 3—ヒドロキシプロピオ ン酸メチル、 3—ヒドロキシプロピオン酸ェチル、 3—ヒドロキシプロピオン酸プロピル、 3 ヒドロキシプロピオン酸ブチル、 2 ヒドロキシー3 メチルブタン酸メチル、メトキ シ酢酸メチル、メトキシ酢酸ェチル、メトキシ酢酸プロピル、メトキシ酢酸プチル、エト キシ酢酸メチル、エトキシ酢酸ェチル、エトキシ酢酸プロピル、エトキシ酢酸ブチル、 プロポキシ酢酸メチル、プロポキシ酢酸ェチル、プロポキシ酢酸プロピル、プロポキシ 酢酸ブチル、ブトキシ酢酸メチル、ブトキシ酢酸ェチル、ブトキシ酢酸プロピル、ブト キシ酢酸ブチル、 2—メトキシプロピオン酸メチル、 2—メトキシプロピオン酸ェチル、 2 ーメトキシプロピオン酸プロピル、 2—メトキシプロピオン酸ブチル、 2—エトキシプロピ オン酸メチル、 2—エトキシプロピオン酸ェチル、 2—エトキシプロピオン酸プロピル、 2—エトキシプロピオン酸ブチル、 2—ブトキシプロピオン酸メチル、 2—ブトキシプロ ピオン酸ェチル、 2—ブトキシプロピオン酸プロピル、 2—ブトキシプロピオン酸ブチル 、 3—メトキシプロピオン酸メチル、 3—メトキシプロピオン酸ェチル、 3—メトキシプロピ オン酸プロピル、 3—メトキシプロピオン酸ブチル、 3—エトキシプロピオン酸メチル、 3 エトキシプロピオン酸ェチル、 3—エトキシプロピオン酸プロピル、 3—エトキシプロ ピオン酸ブチル、 3—プロポキシプロピオン酸メチル、 3—プロポキシプロピオン酸ェ チル、 3—プロポキシプロピオン酸プロピル、 3—プロポキシプロピオン酸ブチル、 3— ブトキシプロピオン酸メチル、 3—ブトキシプロピオン酸ェチル、 3—ブトキシプロピオ ン酸プロピル、 3—ブトキシプロピオン酸ブチルなどのエステル類等が挙げられる。こ れらの溶媒は単独で用いてもよぐ 2種以上の混合物として用いてもょ 、。 [0014] Solvents used in the copolymerization of the component (al) and the component (a2) include, for example, alcohols such as methanol and ethanol; ethers such as tetrahydrofuran; ethylene glycolenomonomethinoleate. Glycol ethers such as tenole and ethylene glycol monoethylenoate ethere; ethylene glycol alkyl ether acetates such as methyl acetate sorb acetate and ethyl acetate sorb acetate; diethylene glycol monomethyl ester Diethylene glycols such as diterene glycol, diethylene glycol monoethyl ether, diethylene glycol dimethyl etherate, diethylene glycol nole chinenoate ethere, diethylene glycol noretino methinole ether; propylene glycol methyl ether, propylene glycol noretino rea Propylene glycol monoalkyl ethers such as tenole, propylene glycolenopropenoleatenole, propylene glycol butyl ether; propylene glycolenolemethinoatenoate acetate, propylene glycolenoretinoatenoate acetate, propylene glycol propyl ether acetate, propylene Propylene glycol alkyl ether acetate such as glycol butyl ether acetate Propylene glycol methylalenolequinol ethers such as propylene glycol methyl ether propionate, propylene glycol nole thiol ether ether propionate, propylene glycol propinole ether terpropionate, propylene glycol butinole ether propionate Acetates; Aromatic hydrocarbons such as toluene and xylene; Ketones such as methyl ethyl ketone, cyclohexanone, 4-hydroxy mono 4-methyl 2 pentanone; and methyl acetate, ethyl acetate, propyl acetate, butyl acetate, 2-hydroxypropion Ethyl acid, methyl 2-hydroxy-2-methylpropionate, 2-hydroxy 2-methylethyl ethyl propionate, methyl hydroxyacetate, ethyl ethyl acetate, hydroxybutyl acetate, methyl lactate, lactate Propyl lactate, butyl lactate, methyl 3-hydroxypropionate, ethyl 3-hydroxypropionate, propyl 3-hydroxypropionate, butyl 3-hydroxypropionate, 2-hydroxy-3-methylbutanoate, methyl methoxyacetate, methoxy Ethyl acetate, Propyl methoxyacetate, Ptyl methoxyacetate, Methyl ethoxy acetate, Ethyl acetate, Propyl ethoxy acetate, Butyl ethoxy acetate, Methyl propoxyacetate, Ethyl propoxyacetate, Propyl acetate, Propyl butyl acetate, Methyl butoxyacetate, Butoxyacetic acid Ethyl, butyl butoxyacetate, butyl butoxyacetate, methyl 2-methoxypropionate, ethyl 2-methoxypropionate, propyl 2-methoxypropionate, butyric 2-methoxypropionate 2-Methyl 2-ethoxypropionate, 2-ethyl ethoxypropionate, 2-propyl ethoxypropionate, 2-butyl ethoxypropionate, 2-butoxypropionate methyl, 2-butoxypropionate ethyl, 2-butoxypropionate Propyl, 2-butyl butoxypropionate Methyl 3-methoxypropionate, ethyl 3-methoxypropionate, propyl 3-methoxypropionate, butyl 3-methoxypropionate, methyl 3-ethoxypropionate, ethyl ethoxypropionate, propyl 3-ethoxypropionate, 3-Butyl ethoxypropionate, Methyl 3-propoxypropionate, 3-Ethyl propoxypropionate, 3-Propylpropoxypropionate, 3-Butyl propoxypropionate, Methyl 3-butoxypropionate, 3-Ethylbutoxypropionate And esters such as propyl 3-butoxypropionate and butyl 3-butoxypropionate. These solvents can be used alone or as a mixture of two or more.
[0016] また、(al)成分と (a2)成分との共重合の際に用いられる重合開始剤としては、一 般的にラジカル重合開始剤として知られているものが使用でき、例えば 2, 2'—ァゾ ビスイソブチ口-トリル、 2, 2,一ァゾビス一 (2, 4 ジメチルバレ口-トリル)、 2, 2, - ァゾビス一(4—メトキシ一 2, 4 ジメチルバレ口-トリル)などのァゾ化合物;ベンゾィ ルペルォキシド、ラウロイルベルォキシド、 t ブチルペルォキシピバレート、 1, 1,一 ビス一(t ブチルペルォキシ)シクロへキサンなどの有機過酸化物;および過酸化水 素などが挙げられる。ラジカル重合開始剤として過酸ィ匕物を用いる場合には、過酸 化物を還元剤とともに用いてレドックス型開始剤としてもょ 、。  [0016] As the polymerization initiator used in the copolymerization of the (al) component and the (a2) component, those generally known as radical polymerization initiators can be used. 2'—Azobisisobuty-tolyl, 2,2,1-azobis (2,4 dimethylvale-tolyl), 2,2, -azobis (4-methoxy-1,2,4 dimethylvale-tolyl), etc. Zo compounds; organic peroxides such as benzoyl peroxide, lauroyl belloxide, t-butylperoxypivalate, 1,1,1 bis (t-butylperoxy) cyclohexane; and hydrogen peroxide. When using a peroxide as a radical polymerization initiator, use a peroxide together with a reducing agent as a redox initiator.
この共重合の際の温度は、使用する単量体の種類によって異なる力 通常 40〜15 0°C程度、好ましくは 50〜100°Cである。  The temperature at the time of copolymerization varies depending on the type of monomer used and is usually about 40 to 150 ° C, preferably 50 to 100 ° C.
次に、このようにして得られた共重合体のカルボン酸基などの反応性官能基の一部 と、(a3)エチレン性不飽和結合を有するエポキシ化合物を反応させることにより、前 記 (A)成分のアルカリ可溶性榭脂が得られる。  Next, by reacting a part of the reactive functional group such as a carboxylic acid group of the copolymer thus obtained with an epoxy compound having (a3) an ethylenically unsaturated bond, (A3) ) Component alkali-soluble rosin is obtained.
[0017] 前記(a3)成分としては、例えばアクリル酸グリシジル、メタクリル酸グリシジル、 a ェチルアクリル酸グリシジル、 a—n—プロピルアクリル酸グリシジル、 a n ブチル アクリル酸グリシジル、アクリル酸—3, 4—エポキシブチル、メタクリル酸—3, 4—ェ ポキシブチル、アクリル酸 6, 7—エポキシへプチル、メタクリル酸 6, 7—エポキシ ヘプチル、 α ェチルアクリル酸 6, 7—エポキシへプチル、 ο ビュルベンジルグ リシジルエーテル、 m—ビュルベンジルグリシジルエーテル、 p ビュルべンジルグリ シジルエーテルなどが挙げられる。これらのうち、好ましいものとして、メタクリル酸ダリ シジル、メタクリル酸—6, 7—エポキシへプチル、 o—ビュルベンジルグリシジルエー テル、 m—ビュルベンジルグリシジルエーテル、 p—ビュルベンジルグリシジルエーテ ルなどが挙げられる。これらは 1種を単独で用いてもよぐ 2種以上を組み合わせて用 いてもよい。 [0017] Examples of the component (a3) include glycidyl acrylate, glycidyl methacrylate, a glycidyl ethyl acrylate, glycidyl a-n-propyl acrylate, an butyl glycidyl acrylate, acrylic acid-3, 4-epoxybutyl, Methacrylic acid—3,4-epoxybutyl, acrylic acid 6, 7—epoxyheptyl, methacrylic acid 6,7—epoxyheptyl, α-ethylacrylic acid 6,7—epoxyheptyl, ο-bulubenzylglycidyl ether, m— Examples include benzylbenzyl glycidyl ether and p-butylbenzyl glycidyl ether. Of these, as preferred, Examples include sidyl, methacrylic acid-6,7-epoxyheptyl, o-bulubenzyl glycidyl ether, m-bulubenzyl glycidyl ether, and p-bullbenzyl glycidyl ether. These may be used alone or in combination of two or more.
[0018] この反応は無触媒でも行うことができるが、反応を促進させるために触媒を使用す ることもでき、その触媒としては、例えばトリェチルァミン、ベンジルジメチルァミン、ピ リジン、トリェチルアンモ -ゥムクロライド、ベンジルトリメチルアンモ -ゥムブロマイド、 ベンジルトリメチルアンモ -ゥムアイオダイド、トリフエ-ルフォスフィン、トリフエ-ルス チビン、メチルトリフエ-ルスチビン、オクタン酸クロム、オクタン酸ジルコニウム等が挙 げられる。  [0018] Although this reaction can be carried out without a catalyst, a catalyst can also be used to accelerate the reaction. Examples of the catalyst include triethylamine, benzyldimethylamine, pyridine, triethylammochloride, Examples include benzyltrimethylammonium bromide, benzyltrimethylammonium iodide, triphenylphosphine, triphenylstibin, methyltriphenylstibin, chromium octoate, and zirconium octoate.
これらは 1種を単独で用いてもよいし、 2種以上を組み合わせて用いてもよぐその 使用量は、反応物の質量に対して、通常 0. 1〜10質量%程度、好ましくは 0. 5〜5 質量%である。また、反応温度は、通常 60〜150°C程度、好ましくは 80〜120°Cで あり、反応時間は、反応温度に左右され一概に定めることはできないが、通常 5〜60 時間程度で充分である。  These may be used alone or in combination of two or more. The amount used is usually about 0.1 to 10% by mass, preferably 0, based on the mass of the reaction product. . 5-5% by mass. The reaction temperature is usually about 60 to 150 ° C, preferably 80 to 120 ° C, and the reaction time depends on the reaction temperature and cannot be determined in general, but usually about 5 to 60 hours is sufficient. is there.
[0019] このようにして得られた (A)成分のアルカリ可溶性榭脂は、重量平均分子量 Mwが 10, 000〜20, 000の範囲にあることが好ましい。この Mwが 10, 000以上であれば 、得られる被膜は現像性、残膜性、パターン形状、耐熱性などが良好であり、一方 20 , 000以下であれば、感度の低下やパターン形状の不良を抑制し得ると共に、感光 性榭脂組成物の保存安定性も良好である。より好ましい Mwは 12, 000-18, 000 である。 [0019] The alkali-soluble coconut oil of component (A) thus obtained preferably has a weight average molecular weight Mw in the range of 10,000 to 20,000. If this Mw is 10,000 or more, the resulting film has good developability, residual film properties, pattern shape, heat resistance, etc., whereas if it is 20,000 or less, the sensitivity is lowered or the pattern shape is poor. And the storage stability of the photosensitive resin composition is also good. A more preferred Mw is 12,000-18,000.
なお、前記重量平均分子量は、ゲルパーミエーシヨンクロマトグラフィー法 (GPC法 )にて測定したポリスチレン換算の値である。  The weight average molecular weight is a value in terms of polystyrene measured by a gel permeation chromatography method (GPC method).
当該 (A)成分のアルカリ可溶性榭脂は、固形分酸価が、 50〜200mgKOHZgに なるように、前記 (al)、 (a2)及び (a3)成分の使用割合を選定することが好ましい。 該固形分酸価が 50mgKOHZg以上であれば良好な現像性を有し、また 200mgK OHZg以下であれば残膜率やパターン形状が良好となる。より好ましい固形分酸価 は 80〜 150mgKOH/gである。 [0020] 本発明の感光性榭脂組成物における(B)成分の重合性多官能化合物としては、官 能基数 5以上のものを好ましく用いることができる。このような重合性多官能化合物と しては、 5官能以上のものを好ましく用いることができる。このような重合性多官能化 合物としては、 5官能以上の (メタ)アタリレート、例えばジペンタエリスリトールペンタ( メタ)アタリレートゃジペンタエリスリトールへキサ (メタ)アタリレートなどが挙げられる。 その市販品としては、例えば、ァロニックス M— 402 [東亜合成化学工業 (株)製]、 K AYARADDPHA,同 DPEA—12、同 DPHA—2C、同 D— 310、同 D— 330、同 DPCA— 20、同 DPCA— 30、同 DPCA— 60、同 DPCA— 120 [日本化薬 (株)製] 、ビームセット 700 [荒川化学工業 (株)製]、 SR299E、 SR9041 (サートマ一社製) などが挙げられる。これらは 1種を単独で用いてもよぐ 2種以上を組み合わせて用い てもよい。 It is preferable to select the use ratio of the components (al), (a2) and (a3) so that the alkali-soluble coagulant of the component (A) has a solid acid value of 50 to 200 mgKOHZg. If the solid content acid value is 50 mgKOHZg or more, good developability is obtained, and if it is 200 mgKOHZg or less, the residual film ratio and pattern shape are good. A more preferable solid content acid value is 80 to 150 mgKOH / g. [0020] As the polymerizable polyfunctional compound of component (B) in the photosensitive resin composition of the present invention, those having a functional group number of 5 or more can be preferably used. As such a polymerizable polyfunctional compound, a pentafunctional or higher functional compound can be preferably used. Examples of such polymerizable polyfunctional compounds include penta- or higher-functional (meth) acrylates, such as dipentaerythritol penta (meth) acrylate and dipentaerythritol hex (meth) acrylate. Commercially available products include, for example, Alonics M-402 (manufactured by Toa Gosei Chemical Co., Ltd.), K AYARADDPHA, DPEA-12, DPHA-2C, D-310, D-330, DPCA-20 , DPCA-30, DPCA-60, DPCA-120 [manufactured by Nippon Kayaku Co., Ltd.], Beamset 700 [manufactured by Arakawa Chemical Co., Ltd.], SR299E, SR9041 (manufactured by Sartoma) It is done. These may be used alone or in combination of two or more.
[0021] また、 (B)成分の重合性多官能化合物としては、ガラス転移温度 (Tg)が 100°C以 上のものも好ましく用いることができる。このような重合性多官能化合物としては、例え ば 1, 3 ブチレングリコールジ (メタ)アタリレート、ジプロピレングリコールジ (メタ)ァク リレート、トリス(2—ヒドロキシェチル)イソシァヌレートトリ(メタ)アタリレート、ペンタエリ スリトールトリ(メタ)アタリレート、ペンタエリスリトールテトラ (メタ)アタリレート、エトキシ 化ビスフエノール Aジ (メタ)アタリレート、ネオペンチルグリコールジ (メタ)アタリレート 、クレゾ一ルノボラック型エポキシ (メタ)アタリレート、フエノールノボラック型エポキシ( メタ)アタリレート、イソシァヌル酸 EO変性トリ(メタ)アタリレート、トリメチロールプロパ ントリ(メタ)アタリレート、トリメチロールプロパン PO変性トリ(メタ)アタリレート、ジペン タエリスリトールペンタ(メタ)アタリレート、ジペンタエリスリトールへキサ(メタ)アタリレ ート、ジトリメチロールプロパンテトラ (メタ)アタリレート、ペンタエリスリトールテトラ (メタ )アタリレート、ポリエステルアタリレートなどが挙げられる。その市販品としては、例え ば、 SR212、 SR508、 SR368、 SR444、 SR295、 CD540 [サー卜マー社製]、ライ トアタリレート NP— A [共栄社ィ匕学社製]、リポキシ SP— 4060、同 SP— 4010 [昭和 高分子社製]、ァロニックス M— 215、同 M— 305、同 M— 309、同 M— 310、同 M — 315、同 M— 402、同 M— 408、同 M— 450、同 M— 7100、同 M— 8030、同 M 8060、同 M— 8100、同 M— 9050 [東亜合成化学工業 (株)製]などが挙げられ る。これらは 1種を単独で用いてもよぐ 2種以上を組み合わせて用いてもよい。 [0021] As the polymerizable polyfunctional compound of component (B), those having a glass transition temperature (Tg) of 100 ° C or higher can be preferably used. Examples of such polymerizable polyfunctional compounds include 1,3 butylene glycol di (meth) acrylate, dipropylene glycol di (meth) acrylate, and tris (2-hydroxyethyl) isocyanurate tri (meta). ) Atalylate, pentaerythritol tri (meth) acrylate, pentaerythritol tetra (meth) acrylate, ethoxylated bisphenol A di (meth) acrylate, neopentyl glycol di (meth) acrylate, cresolol novolac type epoxy (meta ) Atalylate, phenol novolac type epoxy (meth) acrylate, isocyanuric acid EO-modified tri (meth) acrylate, trimethylol propantri (meth) acrylate, trimethylol propane PO-modified tri (meth) acrylate, dipentaerythritol Rupenta (meth) Atari rate, hexa to dipentaerythritol (meth) Atarire over preparative, ditrimethylolpropane tetra (meth) Atari rate, pentaerythritol tetra (meth) Atari rate, and polyester Atari rate. Examples of commercially available products include SR212, SR508, SR368, SR444, SR295, CD540 (manufactured by Thermar), light atelate NP-A (manufactured by Kyoeisha), Lipoxy SP-4060, SP-4010 [Showa Polymer Co., Ltd.], Aronix M-215, M-305, M-309, M-310, M-315, M-402, M-408, M-450 , M-7100, M-8030, M 8060, M-8100, M-8050 [Toa Gosei Chemical Co., Ltd.] The These may be used alone or in combination of two or more.
[0022] さらに、(B)成分の重合性多官能化合物として、 5官能以上のウレタン結合を有す る重合性ィ匕合物を好ましく用いることができる。このような重合性多官能化合物として は、例えば脂肪族ウレタン (メタ)アタリレート、芳香族ウレタン (メタ)アタリレートなどが 挙げられる。その市販品としては、 CN— 968、 CN— 975 (サートマ一社製)、 NKォ リゴ U— 15HA、同 UA— 32、同 U— 324A、同 U— 6HA、同 UA— 100H、同 U— 6LPA、 U— 6 新中村化学工業 (株)製]、ビームセット 575 [荒川化学工業 (株)製 ]、ァロニックス M— 1960 [東亜合成化学工業 (株)製]などが挙げられる。これらは 1 種を単独で用いてもよぐ 2種以上を組み合わせて用いてもょ 、。 [0022] Furthermore, as the polymerizable polyfunctional compound of component (B), a polymerizable compound having a pentafunctional or higher functional urethane bond can be preferably used. Examples of such a polymerizable polyfunctional compound include aliphatic urethane (meth) acrylate and aromatic urethane (meth) acrylate. Commercially available products include CN-968, CN-975 (manufactured by Sartoma), NK Oligo U—15HA, UA—32, U—324A, U—6HA, UA—100H, U— 6LPA, U-6 Shin-Nakamura Chemical Co., Ltd.], Beam Set 575 [Arakawa Chemical Co., Ltd.], Aronix M-1960 [Toa Gosei Chemical Co., Ltd.], and the like. These can be used alone or in combination of two or more.
本発明の感光性榭脂組成物においては、この (B)成分の重合性多官能化合物は 、前記 (A)成分のアルカリ可溶性榭脂 100質量部に対して、 50〜250質量部の割 合で配合される。該 (B)成分の配合量が 50質量部以上であれば、架橋反応が充分 に進行し、現像による膜減りが生じにくぐ一方 250質量部以下であれば、良好な解 像性が得られる。該 (B)成分の好ま 、配合量は 80〜200質量部である。  In the photosensitive resin composition of the present invention, the polymerizable polyfunctional compound of the component (B) is a ratio of 50 to 250 parts by mass with respect to 100 parts by mass of the alkali-soluble resin of the component (A). It is blended with. If the blending amount of the component (B) is 50 parts by mass or more, the crosslinking reaction proceeds sufficiently, and film loss due to development hardly occurs. On the other hand, if it is 250 parts by mass or less, good resolution is obtained. . The amount of component (B) is preferably 80 to 200 parts by mass.
[0023] 本発明の感光性榭脂組成物における(C)成分の光重合開始剤にっ 、ては、光反 応開始剤として紫外線中の i線(365nm)、 g線 (436nm)において効率よく反応性ラ ジカルを発生させるものであれば特に限定されない。このような化合物としては、例え ばベンジル、ジァセチル等の OC—ジケトン類、ベンゾイン等のァシロイン類、ベンゾィ ンメチルエーテル、ベンゾインェチルエーテル、ベンゾインイソプロピルエーテル等の ァシロインエーテル類、チォキサントン、 2—メチルチオキサントン、 2—イソプロピル チォキサントン、 2, 4 ジェチルチオキサントン、チォキサントン 4ースルホン酸、 ベンゾフエノン、 4, 4'—ビス(ジメチルァミノ)ベンゾフエノン、 4, 4'—ビス(ジェチル ァミノ)ベンゾフエノン等のベンゾフエノン類、ァセトフエノン、 p ジメチルアミノアセト フエノン、 2, 2'—ジェトキシァセトフェノン、 2—ヒドロキシ 2—メチルプロピオフエノ ンなどのァセトフエノン類、アントラキノン、 1, 4 ナフトキノン等のキノン類、 2, 6 ジ (4'ージアジドベンザル)シクロへキサノン、 2, 6 ジ(4,ージアジドベンザル) -4- メチルシクロへキサノン、 2, 6—(4'ージアジドベンザル)ー4ーェチルシクロへキサノ ン、 2, 6—(4,—ジアジドベンザル)—4 ブチルシクロへキサノン、 2, 6— (4' ジ アジドベンザル) 4— (t—ブチル)シクロへキサノン等のアジド類、 1—フエ-ルー 1 , 2—ブタジオン一 2— (O ベンゾィル)ォキシム、 1—フエ-ループロパンジオン一 2 - (O—メトキシカルボ-ル)ォキシム、 1—フエ二ルー 2— (O エトキシカルボ-ル) ォキシム、 1—フエ-ループロパンジオン一 2— (O ベンゾィル)ォキシム、 1, 3 ジ フエ二ループロパントリオン一 2— (O エトキシカルボニル)ォキシム、 1—フエニル - 3—エトキシ プロパントリオン 2— (O ベンゾィル)ォキシム等のォキシム類、 N フエ-ルグリシン、 N— (p ェチル)フエ-ルグリシン、 N— (p ェチル)フエ-ル グリシン等のグリシン誘導体、フエナシルクロライド、トリブロモメチルフエ-ルスルホン 、トリス(トリクロロメチル)—s トリァジンなどのハロゲン化合物、ジ— t ブチルパー オキサイドなどの過酸ィ匕物などが挙げられる。これらの市販品としては、例えば IRGA CURE— 184、同 369、同 500、同 651、同 907、同 1700、 Darocur— 1173、同 1 116、同 2959、同 1664、同 4043 [チノく'スペシャルティ.ケミカルズ社製]、 KAYA CURE— DETX、同 MBP、同 DMBI、同 EPA、同 OA [日本化薬 (株)製]等が挙げ られる。これらは 1種を単独で用いてもよぐ 2種以上を組み合わせて用いてもよい。 本発明の感光性榭脂組成物にお!ヽては、この(C)成分の光重合開始剤は、効果 及び経済性のバランスなどの点から、前記 (A)成分のアルカリ可溶性榭脂 100質量 部に対して、 1〜20質量部、好ましくは 3〜 15質量部の割合で配合される。 [0023] The photopolymerization initiator of the component (C) in the photosensitive resin composition of the present invention is efficient in i-line (365 nm) and g-line (436 nm) in ultraviolet rays as a photoreaction initiator. There is no particular limitation as long as it often generates reactive radicals. Examples of such compounds include OC-diketones such as benzyl and diacetyl, acyloines such as benzoin, acyloin ethers such as benzoin methyl ether, benzoin ethyl ether, and benzoin isopropyl ether, thixanthone, 2- Benzophenones such as methyl thioxanthone, 2-isopropyl thioxanthone, 2,4 jetyl thioxanthone, thixanthone 4-sulfonic acid, benzophenone, 4,4'-bis (dimethylamino) benzophenone, 4,4'-bis (jetylamino) benzophenone, acetophenone , P Dimethylaminoacetophenone, 2, 2'-jetoxyacetophenone, 2-hydroxy 2-methylpropiophenone and other acetophenones, anthraquinone, 1, 4 quinones such as naphthoquinone, 2, 6 di (4 'ーDiazidobenzal) cyclohexanone, 2, 6 di (4, -diazidobenzal) -4-methylcyclohexanone, 2, 6- (4'-diazidobenzal) -4-ethylcyclohexanone, 2, 6- (4, -diazidobenzal) -4 butylcyclohexanone, 2, 6- (4 'di Azidobenzal) 4— (t-butyl) cyclohexanone and other azides, 1-phenol-1,2-butadione-2- (O benzoyl) oxime, 1-phenol-propanedione 2- (O-methoxy) (Carbonyl) oxime, 1-phenol 2-oxi (O ethoxycarbol) oxime, 1-phenol-propanedione 2- (O-benzoyl) oxime, 1,3-diphenylpropane trione 2— (O ethoxycarbonyl) oxime, 1-phenyl-3-ethoxypropanetrione 2— (O benzoyl) oxime and other oximes, N-phenylglycine, N— (p-ethyl) phenylglycine, N— (p-ethyl) phenol -Glycine derivatives such as glycine, halogenated compounds such as phenacyl chloride, tribromomethylphenol sulfone, tris (trichloromethyl) -s triazine, di-t-butyl Such as peracetic acid I 匕物 such peroxide. Examples of these commercial products include IRGA CURE-184, 369, 500, 651, 907, 1700, Darocur-1173, 1116, 2959, 1664, 4043 (Chinoku Specialty. Chemicals Co., Ltd.], KAYA CURE-DETX, MBP, DMBI, EPA, OA [Nippon Kayaku Co., Ltd.]. These may be used alone or in combination of two or more. In the photosensitive resin composition of the present invention, the photopolymerization initiator of the component (C) is an alkali-soluble resin of the component (A) from the viewpoint of balance between effect and economy. 1 to 20 parts by mass, preferably 3 to 15 parts by mass with respect to parts by mass.
また、本発明の感光性榭脂組成物においては、前記光重合開始剤と共に、必要に 応じて増感剤を併用することができる。この増感剤としては、例えばミヒラーケトン、 4, 4'—ビス(ジェチルァミノべンゾフエノン)、 2, 5 ビス(4 '―ジェチルァミノベンザル) シクロペンタノン、 2, 6 ビス(4 '―ジェチルァミノベンザル)シクロへキサノン、 2, 6 —ビス(4'—ジメチルァミノベンザル)一 4—メチルシクロへキサノン、 2, 6 ビス(4, ージェチルァミノベンザル)ー4ーメチルシクロへキサノン、 4, 4' ビス(ジェチルアミ ノ)カルコン、 4, 4, 一ビス(ジメチルァミノ)カルコン、 p ジメチルァミノシンナミリデン インダノン、 p ジメチルァミノべンジリデンインダノン、 2— (p ジメチルァミノフエ- ルビフエ-レン)一ベンゾチアゾール、 2- (p ジメチルァミノフエ-ルビ-レン)ベン ゾチアゾール、 1, 3 ビス(4'ージメチルァミノベンザル)アセトン、 3, 3 ' —カルボ- ルービス(7—ジェチルァミノクマリン)、 3—ァセチルー 7—ジメチルァミノクマリン、 3 エトキシカルボ二ルー 7—ジメチルァミノクマリン、 3—ベンジロキシカルボニル 7 ージメチルァミノクマリン、 3—メトキシカルボ二ルー 7—ジェチルァミノクマリン、 3—ェ トキシカルボ-ルー 7—ジェチルァミノクマリン、 N—フエ-ルー N, 一エタノールァミン 、 N—フエ-ルエタノールァミン、 N—p—トリルジエタノールアミン、 N—フエ-ルエタ ノールァミン、 4 モルホリノべンゾフエノン、ジメチルァミノ安息香酸イソァミル、 2—メ ルカプトべンズイミダゾール、 2—メルカプトべンゾォキサゾール、 2—メルカプトベン ゾチアゾール、 1 フエ-ルー 5 メルカプト 1H—テトラゾールなどが挙げられる。 Moreover, in the photosensitive resin composition of this invention, a sensitizer can be used together with the said photoinitiator as needed. Examples of this sensitizer include Michler's ketone, 4, 4'-bis (jetylaminobenzophenone), 2,5 bis (4'-jetylaminobenzal) cyclopentanone, 2, 6 bis (4'-jet). Tylaminobenzal) cyclohexanone, 2,6-bis (4'-dimethylaminobenzal) 1-4-methylcyclohexanone, 2,6bis (4, -demethylaminobenzal) -4-methylcyclo Hexanone, 4, 4 'bis (jetylamino) chalcone, 4, 4, monobis (dimethylamino) chalcone, p-dimethylaminocinnamylidene indanone, p-dimethylaminobenzylidene indanone, 2- (p-dimethylaminophene -Rubypherene) monobenzothiazole, 2- (p dimethylaminophenol- bis-len) benzothiazole, 1,3 bis (4'-dimethylaminobenzal) acetone, 3, 3 '— Cal Borubis (7-Jetylaminocoumarin), 3-acetylyl 7-dimethylaminocoumarin, 3 Ethoxycarbonyl 7-dimethylaminocoumarin, 3-benzyloxycarbonyl 7-dimethylaminocoumarin, 3-methoxycarbonyl7-jetylaminocoumarin, 3-ethylcarborulu 7-jetylaminocoumarin N-phenol N, monoethanolamine, N-phenolethanolamine, N-p-tolyldiethanolamine, N-phenolethanolamine, 4 morpholinobenzophenone, isoamyl dimethylaminobenzoate, 2-mercapto Examples thereof include benzimidazole, 2-mercaptobenzoxazole, 2-mercaptobenzozothiazole, 1-ferruo 5 mercapto-1H-tetrazole and the like.
[0025] これらは 1種を単独で用いてもよいし、 2種以上を組み合わせて用いてもよぐその 配合量は、効果及び経済性のバランスなどの点から、前記 (A)成分のアルカリ可溶 性榭脂 100質量部に対して、好ましくは 0. 1〜: L0質量部、より好ましくは 0. 3〜8質 量部の範囲である。また、これらの増感剤は使用する波長にあわせて、更には要求 感度に合わせて利用することで各波長における解像度を向上させることができる。 本発明の感光性榭脂組成物においては、榭脂の保存安定性を向上させるために、 所望により重合禁止剤を配合することができる。この重合禁止剤としては、例えばヒド ロキノン、メチルヒドロキノン、ブチルキノンなどのヒドロキノン誘導体を使用することが できる。これらの化合物は 1種を単独で用いてもよいし、 2種以上を組み合わせて用 いてもよぐその配合量は、効果及び経済性などの点から、前記 (A)成分のアルカリ 可溶性榭脂 100質量部に対して、好ましくは 0. 1〜: L0質量部、より好ましくは 0. 2〜 5質量部の範囲である。  [0025] These may be used singly or in combination of two or more. The blending amount is selected from the viewpoints of balance between effect and economics, and the like. The amount is preferably 0.1 to: L0 parts by mass, more preferably 0.3 to 8 parts by mass with respect to 100 parts by mass of the soluble resin. These sensitizers can be used in accordance with the wavelength to be used and further in accordance with the required sensitivity, thereby improving the resolution at each wavelength. In the photosensitive resin composition of the present invention, a polymerization inhibitor can be blended as desired in order to improve the storage stability of the resin. As the polymerization inhibitor, for example, hydroquinone derivatives such as hydroquinone, methylhydroquinone, and butylquinone can be used. These compounds may be used alone or in combination of two or more. The compounding amount is from the point of effect and economy, and the alkali-soluble resin of the component (A). It is preferably in the range of 0.1 to: L0 parts by mass, more preferably 0.2 to 5 parts by mass with respect to 100 parts by mass.
本発明の感光性榭脂組成物は、前記の (A)成分、(B)成分、(C)成分及び必要に 応じて用いられる増感剤ゃ重合禁止剤、その他添加成分を (D)成分の溶剤に溶解 することにより、通常ワニス状に調製して、使用される。  The photosensitive resin composition of the present invention comprises the component (A), the component (B), the component (C), a sensitizer used as necessary, a polymerization inhibitor, and other additive components as the component (D). It is usually used after being dissolved in a solvent.
[0026] 前記 (D)成分の溶剤については、各成分を均一に溶解し、かつ該成分と反応しな いものであれば良ぐ特に制限はない。このような溶剤としては、例えばメタノール、ェ タノールなどのアルコール類、テトラヒドロフランなどのエーテル類、エチレングリコー ノレモノメチノレエーテノレ、エチレングリコーノレモノェチノレエーテノレなどのグリコーノレエー テル類、メチルセ口ソルブアセテート、ェチルセ口ソルブアセテートなどのエチレングリ コールアルキルエーテルアセテート類、ジエチレングリコールモノメチルエーテル、ジ エチレングリコーノレモノェチノレエーテノレ、ジエチレングリコーノレジメチノレエーテノレなど のジエチレングリコール類、プロピレングリコールメチルエーテル、プロピレングリコー ノレェチノレエーテノレ、プロピレングリコーノレプロピノレエーテノレ、プロピレングリコーノレブ チルエーテルなどのプロピレングリコールモノアルキルエーテル類、プロピレングリコ 一ノレメチノレエーテノレアセテート、プロピレングリコーノレェチノレエーテノレアセテート、プ ロピレングリコーノレプロピノレエーテノレアセテート、プロピレングリコーノレブチノレエーテ ルアセテートなどのプロピレングリコールアルキルエーテルアセテート類、トルエンキ シレンなどの芳香族炭化水素類、メチルェチルケトン、シクロへキサノン、 4ーヒドロキ シー4ーメチルー 2 ペンタノンなどのケトン類、酢酸メチル、酢酸ェチル、酢酸プロ ピル、酢酸ブチル、 2—ヒドロキシプロピオン酸ェチル、 2—ヒドロキシ 2—メチルプ 口ピオン酸メチル、 2—ヒドロキシ 2—メチルプロピオン酸ェチル、ヒドロキシ酢酸メ チル、ヒドロキシ酢酸ェチル、ヒドロキシ酢酸ブチル、乳酸メチル、乳酸ェチル、乳酸 プロピル、乳酸ブチルなどのエステル類等が挙げられる。これらの溶剤は単独で用い てもよく、 2種以上の混合物として用いてもよい。 [0026] The solvent of the component (D) is not particularly limited as long as each component is uniformly dissolved and does not react with the component. Examples of such a solvent include alcohols such as methanol and ethanol, ethers such as tetrahydrofuran, glycolate ethers such as ethylene glycol monomethino ethenore, ethylene glycol monomethino enoate, and methyl cetosolve. Ethylene glycol alkyl ether acetates such as acetate and ethyl acetate sorb acetate, diethylene glycol monomethyl ether, diethylene glycol Diethylene glycols such as ethylene glycol monoreino eno enoate, diethylene glucono regino methino ree enore, propylene glycol methyl ether, propylene glycol nereno enoate, propylene glycol enopropenoate enole, propylene glycol eno butyl ether, etc. Propylene glycol alkyls such as propylene glycol monoalkyl ethers, propylene glycol monoremethinoleateolate acetate, propyleneglycololeretinoatenoacetate, propyleneglycololepropenolateenoleacetate, propyleneglycololebutenoateacetate Aromatic hydrocarbons such as ether acetates, toluene xylene, methyl ethyl ketone, cyclohexanone , 4-hydroxy-4-methyl-2-pentanone and other ketones, methyl acetate, ethyl acetate, propyl acetate, butyl acetate, ethyl 2-hydroxypropionate, 2-hydroxy 2-methyl methyl pionate, 2-hydroxy 2-methyl Examples thereof include esters such as ethyl ethyl propionate, methyl hydroxyacetate, ethyl ethyl acetate, butyl hydroxyacetate, methyl lactate, ethyl lactate, propyl lactate and butyl lactate. These solvents may be used alone or as a mixture of two or more.
さらに、前記溶剤とともに、高沸点溶剤を併用することもできる。併用できる高沸点 溶剤としては、例えば N—メチルホルムアミド、 N, N ジメチルホルムアミド、 N—メチ ルホルムァ-リド、 N—メチルァセトアミド、 N, N ジメチルァセトアミド、 N—メチルビ 口リドン、ジメチルスルホキシド、ベンジルェチルエーテル、ジへキシルエーテル、ァ セトニルアセトン、イソホロン、カプロン酸、力プリル酸、 1ーォクタノール、 1ーノナノ一 ル、ペンジルアルコール、酢酸ベンジル、安息香酸ェチル、マレイン酸ジェチル、 γ ブチロラタトン、炭酸エチレン、炭酸プロピレン、フエ-ルセ口ソルブアセテートなど が挙げられる。  Furthermore, a high boiling point solvent can be used in combination with the solvent. Examples of high-boiling solvents that can be used in combination include N-methylformamide, N, N dimethylformamide, N-methylformamide, N-methylacetamide, N, N dimethylacetamide, N-methylbivinylidone, and dimethylsulfoxide. , Benzylethyl ether, dihexyl ether, acetonyl acetone, isophorone, caproic acid, strong prillic acid, 1-octanol, 1-nonanol, pendyl alcohol, benzyl acetate, ethyl benzoate, jetyl maleate, γ-butyrolatone , Ethylene carbonate, propylene carbonate, ferrule sorb acetate and the like.
本発明の感光性榭脂組成物においては、前記溶剤の配合量は、該榭脂組成物に おける他の構成成分を、例えばガラス基板上に塗布するのに適した粘度になるように 適宣選定すればよい。  In the photosensitive resin composition of the present invention, the amount of the solvent is suitably set so that the viscosity is suitable for coating other components in the resin composition, for example, on a glass substrate. It only has to be selected.
この感光性榭脂組成物には、これらの成分の他、必要に応じてレべリング剤、シラ ンカップリング剤、充填剤、着色剤、粘度調整剤等の各種添加剤を配合することがで きる。 [0028] このようにして得られた本発明の感光性榭脂組成物はネガ型であって、液晶表示 装置スぺーサ一形成用として使用される。液晶セルを作製する際、 120〜180°C程 度の温度で圧力をかけて封着される力 その際スぺーサ一は、所望とするセルギヤッ プが維持できないほど塑性変形するものは好ましくなぐまた、弾性変形成分のでき るだけ変位が少ない方が好ましい。これらのことから、本発明者らはスぺーサ一の物 性を動的粘弾性により規定することを見出した。 In addition to these components, the photosensitive resin composition may contain various additives such as a leveling agent, a silane coupling agent, a filler, a colorant, and a viscosity modifier as necessary. it can. [0028] The photosensitive resin composition of the present invention thus obtained is a negative type and is used for forming a spacer for a liquid crystal display device. When manufacturing a liquid crystal cell, the sealing force is exerted by applying pressure at a temperature of about 120 to 180 ° C. In this case, it is not preferable that the spacer is plastically deformed so that the desired cell gap cannot be maintained. Further, it is preferable that the elastic deformation component has as little displacement as possible. From these facts, the present inventors have found that the physical properties of the spacer are defined by dynamic viscoelasticity.
また、液晶セルを作製した後に、信頼試験があるが、液晶の熱膨張に対してスぺー サ一の熱膨張率が大きいとセル内が大気圧よりも真空になり、封着部から空気が入り 発泡現象を生じることがある。そのため、感光性榭脂により形成されたスぺーサ一に は、 50〜250°C範囲内で相応した特性が必要とされる。  In addition, there is a reliability test after manufacturing the liquid crystal cell, but if the thermal expansion coefficient of the spacer is large relative to the thermal expansion of the liquid crystal, the inside of the cell is evacuated from atmospheric pressure, and air is released from the sealing part. May cause foaming phenomenon. For this reason, spacers made of photosensitive resin must have corresponding characteristics within the range of 50 to 250 ° C.
[0029] すなわち、本発明のスぺーサ一は、感光性榭脂組成物力も得られる硬化物の動的 粘弾性により貯蔵弾性率、損失正接、ガラス転移温度により規定するものであり、 -2 0°Cにおける貯蔵弾性率と 25°Cにおける貯蔵弾性率の変化率が 5〜20%、好ましく は 10〜18%、 25°Cにおける貯蔵弾性率と 180°Cにおける貯蔵弾性率の変化率が 3 0〜80%、好ましくは 50〜80%、硬化物のガラス転移温度 (Tg)が 160°C以上、—5 0〜250°Cの損失正接 (tan δ )の値が 0. 1以下であることを特徴とするものである。 前記硬化物のガラス転移温度 (Tg)の上限に特に制限はないが、通常 165°C程度 である。また、 50〜250°Cの損失正接 (tan S )の値の下限に特に制限はないが、 通常 0. 08程度である。  That is, the spacer according to the present invention is defined by the storage elastic modulus, loss tangent, and glass transition temperature based on the dynamic viscoelasticity of the cured product that also provides the photosensitive resin composition strength. Storage elastic modulus at 0 ° C and storage elastic modulus at 25 ° C is 5-20%, preferably 10-18%, storage elastic modulus at 25 ° C and storage elastic modulus at 180 ° C are 30 to 80%, preferably 50 to 80%, the glass transition temperature (Tg) of the cured product is 160 ° C or higher, and the loss tangent (tan δ) value of −50 to 250 ° C is 0.1 or lower. It is characterized by being. The upper limit of the glass transition temperature (Tg) of the cured product is not particularly limited, but is usually about 165 ° C. The lower limit of the loss tangent (tan S) value of 50 to 250 ° C is not particularly limited, but is usually about 0.08.
[0030] 動的粘弾性の貯蔵弾性率、ガラス転移温度 (Tg)、損失正接 (tan δ )は、下記の測 定装置及び測定方法を採用する。  [0030] The storage modulus, glass transition temperature (Tg), and loss tangent (tan δ) of dynamic viscoelasticity employ the following measuring apparatus and measuring method.
測定用試料:本発明の感光性榭脂組成物を硬化後の膜厚が 400 /z mになる適量 をアルミカップ内に入れ、 120°Cで 1時間溶剤を飛ばすために加熱する。その後 500 mjZcm2露光し、 220°Cで 1時間硬化させる。その硬化物をアルミカップから外し、幅Sample for measurement: An appropriate amount that gives a film thickness of 400 / zm after curing the photosensitive resin composition of the present invention is placed in an aluminum cup, and heated at 120 ° C. for 1 hour to drive off the solvent. Then expose to 500 mjZcm 2 and cure at 220 ° C for 1 hour. Remove the cured product from the aluminum cup and
4mm、長さ 40mmに切り出し、短冊状にする。 Cut out to 4mm and 40mm in length and cut into strips.
測定装置:動的粘弾性装置 DMS6100 (セイコーインスツルメンッ社製) 測定方法:測定用試料を装置にセットし、引張モード、正弦波、周波数 1Ηζ、振幅 幅 10 μ m、初期荷重 100mN、昇温速度 5°CZminで 50〜250°Cの温度範囲で 測定し、貯蔵弾性率 (Ε'、 GPa)、ガラス転移温度 (Tg、 °C)、損失正接 (tan δ )を求 める。また、下記式より貯蔵弾性率の変化率を求める。 Measuring device: Dynamic viscoelastic device DMS6100 (manufactured by Seiko Instruments Inc.) Measuring method: A sample for measurement is set in the device, tensile mode, sine wave, frequency 1Ηζ, amplitude 10 μm, initial load 100 mN, rising Temperature range 50 to 250 ° C at 5 ° C Zmin Measure and obtain storage modulus (Ε ', GPa), glass transition temperature (Tg, ° C), and loss tangent (tan δ). In addition, the rate of change of the storage elastic modulus is obtained from the following formula.
貯蔵弾性率の変化率(― 20°C→25°C) (%) = { [「― 20°Cの貯蔵弾性率」 -「25°C の貯蔵弾性率」 ] Z「- 20°C貯蔵弾性率」 } X 100  Change rate of storage elastic modulus (-20 ° C → 25 ° C) (%) = {["Storage elastic modulus at 20 ° C"-"Storage elastic modulus at 25 ° C"] Z "-20 ° C storage Elastic modulus "} X 100
貯蔵弾性率の変化率(25°C→180°C) (%)= { [「25°Cの貯蔵弾性率」 -「180°Cの 貯蔵弾性率」] Z「25°Cの貯蔵弾性率」 } X 100  Change rate of storage elastic modulus (25 ° C → 180 ° C) (%) = {["Storage elastic modulus at 25 ° C"-"Storage elastic modulus at 180 ° C"] Z "Storage elastic modulus at 25 ° C } X 100
[0031] また、本発明のスぺーサ一は、感光性榭脂組成物力も形成されたスぺーサ一の押 し込み変形量により規定するものであり、 25°Cにおける押し込み変形量と 180°Cに おける押し込み変形量の変化率が 100〜 120%であることが好ましい。押し込み変 形量の変化率は、下記測定装置、測定方法を採用する。 [0031] The spacer of the present invention is defined by the indentation deformation amount of the spacer in which the photosensitive resin composition force is also formed. The change rate of the indentation deformation at ° C is preferably 100 to 120%. The following measuring device and measuring method are used for the rate of change of indentation deformation.
測定用試料:ガラス基板上に感光性榭脂組成物を塗布した後、 90°Cで 3分間プリ ベータし、その後 500nijZcm2露光し、 0. 10質量0 /0テトラメチルアンモ-ゥムヒドロ キシド (TMAH)水溶液で現像し、高さ 5 μ m、幅 10 μ mスぺーサ一作製する。 Measurement sample: After the photosensitive榭脂composition was coated on a glass substrate, and the pre-beta 3 minutes 90 ° C, followed 500NijZcm 2 was exposed, 0.10 mass 0/0 tetramethylammonium - Umuhidoro Kishido (TMAH ) Develop with aqueous solution to make a spacer with a height of 5 μm and a width of 10 μm.
測定装置:島津ダイナミック超微小硬度計 DUH— W201〔島津製作所製〕 測定方法:測定用試料を装置にセットし、直径 50 m平面圧子により、 1. 324mN Zsecの一定速度でスぺーサ一に荷重を加え、最大荷重が 30mNになったときのス ぺーサ一の変位量を測定し、下記式により変化率を求める。  Measuring device: Shimadzu Dynamic Ultra Micro Hardness Tester DUH-W201 (manufactured by Shimadzu Corporation) Measuring method: Set the sample for measurement on the device and use a flat indenter with a diameter of 50 m. 1. Spacer at a constant speed of 324 mN Zsec. Apply the load, measure the displacement of the spacer when the maximum load reaches 30mN, and calculate the rate of change using the following formula.
変化率(%) = [「180°Cにおける変位量」 Z「25°Cにおける変位量」] X 100 本発明の液晶表示装置は、前述のようにスぺーサーを粘弾性により規定することに より、セル封着工程での変形が少なぐ所望のセルギャップを維持でき、かつ低温泡 現象を抑制することのできるものである。  Rate of change (%) = ["displacement at 180 ° C" Z "displacement at 25 ° C"] X 100 In the liquid crystal display device of the present invention, the spacer is defined by viscoelasticity as described above. Thus, a desired cell gap with less deformation in the cell sealing step can be maintained, and the low-temperature bubble phenomenon can be suppressed.
[0032] 本発明のスぺーサ一は、このような特性を有した本発明の感光性榭脂組成物により 形成されることを特徴とし、このスぺーサーを有する本発明のカラーフィルタ一は、着 色層、着色層を保護する保護層を基板上に有し、その保護層上には液晶を配向させ るために配向膜が設けられ、さらに配向膜の上には柱状スぺーサ一が設けられてな る公知のカラーフィルターと同様の構成をとつている。保護膜上には、必要に応じて 液晶駆動用の透明電極が形成されて 、てもよ 、。 [0032] The spacer according to the present invention is formed of the photosensitive resin composition according to the present invention having such characteristics, and the color filter according to the present invention having the spacer is A colored layer and a protective layer for protecting the colored layer are provided on the substrate, an alignment film is provided on the protective layer to align the liquid crystal, and a columnar spacer is provided on the alignment film. The configuration is the same as that of a known color filter provided with a. On the protective film, a transparent electrode for driving a liquid crystal may be formed if necessary.
次に、本発明のスぺーサ一の製造方法について説明する。 本発明の感光性榭脂組成物における (A)成分の重合性多官能基を有するアル力 リ可溶性榭脂と、(B)成分の重合性多官能化合物は、光照射により発生したラジカル により重合し、現像液に対して不溶になることでコントラストを発生させ、ノターンを形 成することができる。ガラス基板への適用を考えた場合、まずこの感光性榭脂組成物 を対象とする基板上にスピンコーターなどを用いて被膜を形成し、次にその被膜を 9 0〜130°C程度で加熱し、得られた被膜上にパターンが描画されているマスクを通過 させて 365nm、 436nmと ヽつた活性紫外線を照射する。 Next, a method for manufacturing the spacer according to the present invention will be described. In the photosensitive resin composition of the present invention, the component (A) component-soluble polyfunctional group having a polymerizable polyfunctional group and the component (B) polymerizable polyfunctional compound are polymerized by radicals generated by light irradiation. In contrast, when it becomes insoluble in the developer, contrast can be generated and a no-turn can be formed. When considering application to a glass substrate, first, a film is formed on the substrate intended for the photosensitive resin composition using a spin coater, and then the film is heated at about 90 to 130 ° C. Then, it passes through a mask on which a pattern is drawn on the obtained film and is irradiated with active ultraviolet rays having a wavelength of 365 nm and 436 nm.
[0033] 次いで、この被膜を、例えば水酸ィ匕ナトリウム、水酸ィ匕カリウム、炭酸ナトリウム、炭 酸カリウム、アンモニア等の無機アルカリ水溶液ゃェチルァミン、 n—プロピルアミン 等の一級ァミン、ジェチルァミン、ジー n—プロピルアミン等の二級ァミン、トリェチル ァミン、メチルジメチルァミン等の三級ァミン、ジメチルエタノールァミン、トリエタノー ルァミン等のアルコールァミン、テトラメチルアンモ-ゥムヒドロキシド、テトラエチルァ ンモ-ゥムヒドロキシド等の四級ァミンを溶解したアルカリ水溶液を使用して現像処理 し、未露光部のみを溶解除去したのち、純水によってリンス洗浄する。現像方式とし てはスプレー、パドル、浸漬、超音波等の方式を用いることができる。 [0033] Next, this coating is applied to, for example, an inorganic aqueous alkaline solution such as sodium hydroxide, potassium hydroxide, sodium carbonate, potassium carbonate, ammonia, etc., primary amine such as n-propylamine, jetylamine, Secondary amines such as n-propylamine, tertiary amines such as triethylamine and methyldimethylamine, alcoholamines such as dimethylethanolamine and triethanolamine, quaternary amines such as tetramethylammonium hydroxide and tetraethylamine hydroxide Development is performed using an alkaline aqueous solution in which grade amin is dissolved, and only unexposed portions are dissolved and removed, followed by rinsing with pure water. As the developing method, methods such as spraying, paddle, dipping, and ultrasonic can be used.
この操作によって対象基板上に所望するネガ型パターンを得ることができる。更に この被膜を熱処理させることによって、重合性官能基を有するアルカリ可溶性榭脂と 重合性多官能化合物とが更に架橋し、密着性、耐熱性、耐薬品性等の膜特性に優 れたスぺーサ一を所望の位置に形成することができる。  By this operation, a desired negative pattern can be obtained on the target substrate. Furthermore, by heat-treating this film, the alkali-soluble resin having a polymerizable functional group and the polymerizable polyfunctional compound are further cross-linked, and the film has excellent film properties such as adhesion, heat resistance and chemical resistance. The part can be formed at a desired position.
[0034] このスぺーサ一の形状は、特に制限はないが、基板面に対して真上から見た場合 、正方形、長方形、多角形、円形、楕円形であることが好ましぐ長方形、楕円形の場 合、長軸方向がラビング方向と水平又は直行していることが好ましい。また、基板面 に対して真横力 見た場合、正方形、長方形、台形であることが好ましぐ特に順テ 一パーの台形であることが好ましい。さらに、台形の上部の角が丸まってもよぐ台形 の下部が裾を引いても良い。台形の形状はスぺーサー上に配向膜を塗布、ラビング 処理する際、均一に配向膜を塗布する又は均一なラビング処理をする際に特に有効 である。 [0034] The shape of the spacer is not particularly limited, but is preferably a square, rectangle, polygon, circle, or ellipse when viewed from directly above the substrate surface. In the case of an ellipse, the long axis direction is preferably horizontal or perpendicular to the rubbing direction. In addition, when looking at the lateral force with respect to the substrate surface, a square, a rectangle, or a trapezoid is preferable. In addition, the lower part of the trapezoid may be rounded even if the upper corner of the trapezoid is rounded. The trapezoidal shape is particularly effective when an alignment film is applied and rubbed on the spacer, and when the alignment film is uniformly applied or rubbed.
前記の基板としては、例えば、白板ガラス、青板ガラス、シルカコート青板ガラス等 の透明ガラス基板、ポリカーボネート、ポリエステル、アクリル榭脂、塩化ビュル榭脂、 芳香族ポリアミド榭脂、ポリアミドイミド、ポリイミド等の合成樹脂製のシート、フィルム又 は板状体、アリミニゥム板、銅板、ニッケル板、ステンレス板等の金属基板、その他セ ラミックス基板、光電変換素子を有する半導体基板等が挙げられる。 Examples of the substrate include white plate glass, blue plate glass, and silka coated blue plate glass. Transparent glass substrate, polycarbonate, polyester, acrylic resin, butyl resin resin, aromatic polyamide resin, polyamideimide, polyimide resin sheet, film or plate, aluminum plate, copper plate, nickel plate And metal substrates such as stainless steel plates, other ceramic substrates, and semiconductor substrates having photoelectric conversion elements.
[0035] これらの基板には所望により、シランカップリング剤等の薬品処理、プラズマ処理、 イオンプレーティング処理、スパッタリング法、気相反応法、真空蒸着法等の前処理 を行うことができる。  [0035] If necessary, these substrates can be subjected to pretreatment such as chemical treatment such as a silane coupling agent, plasma treatment, ion plating treatment, sputtering method, gas phase reaction method, and vacuum deposition method.
基板サイズとしては、 320mm X 400mmの第一世代基板、 370mm X 4470mmの 第二世代基板、 550mm X 650mmの第三世代基板、 680mm X 880mm〜730m m X 920mmの第四世代基板等が挙げられる。  Substrate sizes include 320 mm x 400 mm first generation boards, 370 mm x 4470 mm second generation boards, 550 mm x 650 mm third generation boards, and 680 mm x 880 mm to 730 mm x 920 mm fourth generation boards.
また、本発明の液晶表示装置は、このスぺーサ一が設けられたカラーフィルターを 有すること特徴とするものであり、このカラーフィルターを、カラーフィルター上のスぺ 一サーを介して、相手部材である液晶駆動基板と対向させ張り合わせる。液晶の注 入方法は、一方の基板上に液晶を滴下した後にもう一方の基板を張り合わせて液晶 を押し広げる滴下注入法と、シール部に設けられた注入ロカ 液晶を注入し、注入 口を封止する方法がある。本発明のスぺーサ一が設けられたカラーフィルターを用い た場合はいずれも公知の方法により製造することができるが、滴下注入法がより有効 である。  The liquid crystal display device of the present invention is characterized by having a color filter provided with the spacer, and the color filter is connected to the mating member via the spacer on the color filter. It is made to face and adhere to the liquid crystal driving substrate. The liquid crystal can be injected by dropping the liquid crystal on one substrate and then sticking the other substrate together to spread the liquid crystal.Injection liquid crystal provided in the seal part is injected and the injection port is sealed. There is a way to stop. Any of the color filters provided with the spacer of the present invention can be manufactured by a known method, but the dropping injection method is more effective.
[0036] <発明 2 > [Invention 2]
本発明の液晶表示装置用スぺーサ一は、(A)アルカリ可溶性榭脂、(B)重合性多 官能化合物、(C)光重合開始剤、及び (D)溶剤を含むネガ型感光性榭脂組成物か ら得られるものであって、このネガ型感光性榭脂組成物にっ 、ては特に制限はな 、 力 前述の発明 1において説明した、本発明の液晶表示装置スぺーサ一形成用感 光性榭脂組成物を好ましく使用することができる。  The spacer for a liquid crystal display device of the present invention comprises a negative photosensitive resin containing (A) an alkali-soluble resin, (B) a polymerizable polyfunctional compound, (C) a photopolymerization initiator, and (D) a solvent. The negative photosensitive photosensitive resin composition obtained from the oil composition is not particularly limited. The liquid crystal display device spacer of the present invention described in the above-mentioned Invention 1 The forming photosensitive resin composition can be preferably used.
液晶パネル製造工程において、液晶の滴下注入工程では、常温で圧力をかけて 液晶を広げ、基板の貼り合わせ工程では高温でシール封着するため、感光性榭脂 により形成されたスぺーサ一には、常温(25°C)と封着温度(180°C)で相応した特性 が必要とされる。 すなわち、本発明のスぺーサ一は、感光性榭脂組成物で形成されるスぺーサ一の 、微小硬度計で測定した負荷ー徐荷試験における総変形量のバラつきが、(e)基板 面内において、 25°Cでの標準偏差(σ )で 0. 25以内、好ましくは 0. 20以内、 180 °Cでの標準偏差( σ )で 0. 30以内、好ましくは 025以内であること、及び (f)基板の 中心と複数の端部を結ぶ線分それぞれを三等分した点の、基板の中心側の点同士 及び基板の端部側の点同士を結んで形成される 2つの図形により形成される 3つの 領域各々での 2cm角内において、 25°Cでの標準偏差( σ )で 0. 20以内、好ましくは 0. 15以内、 180°Cでの標準偏差(σ )で 0. 25以内、好ましくは 0. 20以内であること 、を特徴とする。 In the liquid crystal panel manufacturing process, in the liquid crystal dropping and injection process, pressure is applied at room temperature to spread the liquid crystal, and in the substrate bonding process, the seal is sealed at a high temperature. Therefore, it is necessary to have appropriate characteristics at normal temperature (25 ° C) and sealing temperature (180 ° C). That is, the spacer according to the present invention has a variation in the total deformation amount in the load-unloading test measured by a microhardness meter of the spacer formed from the photosensitive resin composition. Within the plane, the standard deviation (σ) at 25 ° C is within 0.25, preferably within 0.20, and the standard deviation (σ) at 180 ° C is within 0.30, preferably within 025. And (f) two points formed by connecting the points on the center side of the substrate and the points on the end side of the substrate of the points obtained by dividing the line segment connecting the center of the substrate and the plurality of ends into three equal parts. Within 2 cm square in each of the three areas formed by the figure, the standard deviation (σ) at 25 ° C is within 0.20, preferably within 0.15, and the standard deviation (σ) at 180 ° C is It is characterized by being within 0.25, preferably within 0.20.
また、本発明のスぺーサ一は、感光性榭脂組成物で形成されるスぺーサ一の、微 小硬度計で測定した負荷—徐荷試験における塑性変形量のバラつきが、 (g)基板面 内における 25°Cでの標準偏差(σ )で 0. 20以内、好ましくは 0. 15以内、 180°Cで の標準偏差(σ )で 0. 25以内、好ましくは 0. 20以内であること、及び (h)基板の中 心と複数の端部を結ぶ線分それぞれを三等分した点の、基板の中心側の点同士及 び基板の端部側の点同士を結んで形成される 2つの図形により形成される 3つの領 域各々での 2cm角内において、 25°Cでの標準偏差( σ )で 0. 15以内、好ましくは 0 . 10以内、 180°Cでの標準偏差(σ )で 0. 20以内、好ましくは 0. 15以内であること、 を特徴とする。  Further, the spacer of the present invention has a variation in the amount of plastic deformation in the load-unloading test measured with a microhardness meter of the spacer formed of the photosensitive resin composition. The standard deviation (σ) at 25 ° C within the substrate surface is within 0.20, preferably within 0.15, and the standard deviation (σ) at 180 ° C is within 0.25, preferably within 0.20. (H) A point formed by connecting the center line of the substrate and the points on the edge side of the substrate at the point where each of the line segments connecting the center of the substrate and the plurality of edges is equally divided. Within 2 cm square in each of the three areas formed by the two figures, the standard deviation (σ) at 25 ° C is within 0.15, preferably within 0.10, standard at 180 ° C The deviation (σ) is within 0.20, preferably within 0.15.
本発明における微小硬度計による負荷ー徐荷試験は、下記の装置及び測定方法 を採用する。  The load-unloading test with the microhardness meter according to the present invention employs the following apparatus and measuring method.
測定用試料:ガラス基板上に感光性榭脂組成物を塗布した後、 90°Cで 3分間プリ ベータし、その後 500nijZcm2露光し、 0. 10質量0 /0テトラメチルアンモ-ゥムヒドロ キシド (TMAH)水溶液で現像した後、 250°Cで 30分間かけてポストベータし、高さ 5 μ m、幅 10 μ mのスぺーサーを作製する。 Measurement sample: After the photosensitive榭脂composition was coated on a glass substrate, and the pre-beta 3 minutes 90 ° C, followed 500NijZcm 2 was exposed, 0.10 mass 0/0 tetramethylammonium - Umuhidoro Kishido (TMAH ) After developing with aqueous solution, post-beta at 250 ° C for 30 minutes to produce a spacer with a height of 5 μm and a width of 10 μm.
測定装置:島津ダイナミック超微小硬度計 DUH— W201〔島津製作所製〕 測定箇所: (a) 370mm X 470mmの基板全体においてランダムに選択した 5箇所( 図 1参照)  Measuring device: Shimadzu Dynamic Ultra Hardness Tester DUH—W201 (manufactured by Shimadzu Corporation) Measuring point: (a) 5 points selected at random on the entire 370mm X 470mm substrate (see Figure 1)
(b) 370mm X 470mmの基板の中心と端部を結ぶ線分を三等分した点を 結ぶ四角形により形成された 3つの領域(Center、 Middle, Edge)各々における 2c m角内のランダムに選択した 5箇所(図 2参照) (b) A point obtained by dividing the line connecting the center and end of a 370mm x 470mm board into three equal parts. Randomly selected 5 points within 2 cm square in each of the three areas (Center, Middle, Edge) formed by the connecting rectangle (see Figure 2)
測定方法:測定用試料を装置にセットし、直径 50 m平面圧子により、 1. 324mN Zsecの一定速度でスぺーサ一に荷重を加え、最大荷重が 30mNになったときのス ぺーサ一の総変形量及び塑性変形量を測定し、そのバラつきを求める。スぺーサー の総変形量及び塑性変形量は、例えば図 3に示すような、スぺーサ一に対する荷重 と変形量のヒステリシス曲線力 求める。  Measurement method: Place the sample for measurement on the device and apply a load to the spacer at a constant speed of 324 mN Zsec with a 50 m diameter flat indenter, and when the maximum load reaches 30 mN Measure the total deformation amount and plastic deformation amount, and determine the variation. For the total deformation amount and plastic deformation amount of the spacer, obtain the hysteresis curve force of the load and deformation amount for the spacer as shown in Fig. 3, for example.
[0038] また、スぺーサーを形成する感光性榭脂組成物は、その硬化物のガラス転移温度( Tg)が 160°C以上であることが好ましい。このガラス転移温度は動的粘弾性測定によ り測定されるものであり、下記の測定装置及び測定方法を採用する。 [0038] Further, the photosensitive resin composition forming the spacer preferably has a cured product having a glass transition temperature (Tg) of 160 ° C or higher. This glass transition temperature is measured by dynamic viscoelasticity measurement, and the following measuring apparatus and measuring method are employed.
測定用試料:本発明の感光性榭脂組成物を硬化後の膜厚が 400 /z mになる適量 をアルミカップ内に入れ、 120°Cで 1時間溶剤を飛ばすために加熱する。その後 500 mjZcm2露光し、 220°Cで 1時間硬化させる。その硬化物をアルミカップから外し、幅 4mm、長さ 40mmに切り出し、短冊状にする。 Sample for measurement: An appropriate amount that gives a film thickness of 400 / zm after curing the photosensitive resin composition of the present invention is placed in an aluminum cup, and heated at 120 ° C. for 1 hour to drive off the solvent. Then expose to 500 mjZcm 2 and cure at 220 ° C for 1 hour. Remove the cured product from the aluminum cup, cut it into 4mm width and 40mm length, and cut it into strips.
測定装置:動的粘弾性装置 DMS6100 (セイコーインスツルメンッ社製) 測定方法:測定用試料を装置にセットし、引張モード、正弦波、周波数 1Ηζ、振幅 幅 10 μ m、初期荷重 100mN、昇温速度 5°CZminで 25〜250°Cの温度範囲で測 定し、損失正接 (tan δ )のピーク位置をガラス転移温度 (Tg、 °C)と規定する。  Measuring device: Dynamic viscoelastic device DMS6100 (manufactured by Seiko Instruments Inc.) Measuring method: A sample for measurement is set in the device, tensile mode, sine wave, frequency 1Ηζ, amplitude 10 μm, initial load 100 mN, rising Measured in the temperature range of 25-250 ° C at a temperature rate of 5 ° CZmin, and the peak position of loss tangent (tan δ) is defined as the glass transition temperature (Tg, ° C).
[0039] 本発明の液晶表示装置は、前述のようにスぺーサーを微小硬度計による負荷ー徐 荷試験により規定することにより、液晶注入及びセル封着工程でのスぺーサ一の高さ のバラつきが少なぐ所望のセルギャップを維持でき、かつ製造歩留まりの向上が期 待されるちのである。 In the liquid crystal display device of the present invention, the height of the spacer in the liquid crystal injection and cell sealing process is determined by defining the spacer by a load-unloading test using a micro hardness tester as described above. Therefore, the desired cell gap can be maintained with less variation, and an improvement in manufacturing yield is expected.
本発明のスぺーサ一は、このような特性を有するものであり、このスぺーサーを有す る本発明のカラーフィルタ一は、着色層、着色層を保護する保護層を基板上に有し、 その保護層上には液晶を配向させるために配向膜が設けられ、さらに配向膜の上に は柱状スぺーサ一が設けられてなる公知のカラーフィルターと同様の構成をとつてい る。保護膜上には、必要に応じて液晶駆動用の透明電極が形成されていてもよい。 本発明のスぺーサ一の製造方法、スぺーサ一の形状及び基板等については、発 明 1と同じであるので、その説明を省略する。 The spacer according to the present invention has such characteristics, and the color filter according to the present invention having the spacer has a colored layer and a protective layer for protecting the colored layer on the substrate. In addition, an alignment film is provided on the protective layer for aligning the liquid crystal, and a columnar spacer is provided on the alignment film. . On the protective film, a transparent electrode for driving a liquid crystal may be formed as necessary. The manufacturing method of the spacer of the present invention, the shape of the spacer, the substrate, etc. The explanation is omitted because it is the same as Matter 1.
実施例  Example
[0040] 次に、本発明を実施例により、さらに詳細に説明するが、本発明は、これらの例によ つてなんら限定されるものではな!/、。  [0040] Next, the present invention will be described in more detail with reference to examples, but the present invention is not limited to these examples! /.
製造例 1 アルカリ可溶性榭脂 Iの製造  Production Example 1 Manufacture of alkali-soluble rosin I
冷却管、攪拌機を備えたフラスコに、 2, 2,一ァゾビス(2, 4—ジメチルバレ口-トリ ル) 7質量部、ジエチレングリコールジメチルエーテル 200質量部を仕込んだ。引き続 きアクリル酸 33質量部、アクリル酸 n—ブチルエステル 27質量部を仕込み窒素置換 した後、ゆるやかに攪拌を始めた。溶液の温度を 70°Cに上昇させ、この温度を 5時間 保持し共重合体を得た。得られた共重合体溶液を室温に戻した後、グリシジルメタク リレート 40質量部、及びピリジンを 2質量部仕込み、 100°Cに加熱して攪拌し、反応 溶液の酸価が 0. 5mgKOHZg以下になるまで反応させた。得られた重合体の重量 平均分子量を GPC [HLC - 8020 (東ソ一 (株)製)〕を用いて測定したところ、ポリス チレン換算で 18, 000であった。また、固形分酸価を測定したところ、 102. 8mgKO HZgであった。  A flask equipped with a condenser and a stirrer was charged with 7 parts by mass of 2,2,1azobis (2,4-dimethylbare-tolyl) and 200 parts by mass of diethylene glycol dimethyl ether. Subsequently, 33 parts by mass of acrylic acid and 27 parts by mass of acrylic acid n-butyl ester were charged and purged with nitrogen, and then gently agitated. The temperature of the solution was raised to 70 ° C, and this temperature was maintained for 5 hours to obtain a copolymer. After the obtained copolymer solution is returned to room temperature, 40 parts by mass of glycidyl methacrylate and 2 parts by mass of pyridine are charged, heated to 100 ° C and stirred, and the acid value of the reaction solution is 0.5 mgKOHZg or less. The reaction was continued until When the weight average molecular weight of the obtained polymer was measured using GPC [HLC-8020 (manufactured by Tosohichi Co., Ltd.)], it was 18,000 in terms of polystyrene. Further, when the solid content acid value was measured, it was 102.8 mgKO HZg.
[0041] 製造例 2 アルカリ可溶性榭脂 IIの製造  [0041] Production Example 2 Production of alkali-soluble rosin II
冷却管、攪拌機を備えたフラスコに、 2, 2,一ァゾビス (2, 4—ジメチルバレ口-トリ ル) 7質量部、ジエチレングリコールジメチルエーテル 200質量部を仕込んだ。引き続 きアクリル酸 43質量部、アクリル酸 n—ブチルエステル 24質量部を仕込み窒素置換 した後、ゆるやかに攪拌を始めた。溶液の温度を 70°Cに上昇させ、この温度を 5時間 保持し共重合体を得た。得られた共重合体溶液を室温に戻した後、グリシジルメタク リレート 33質量部、及びトリフエ-ルホスフィンを 1. 6質量部仕込み、 100°Cに加熱し て攪拌し、反応溶液の酸価が 0. 5mgKOHZg以下になるまで反応させた。得られ た重合体の重量平均分子量を GPC [HLC— 8020〔東ソ一 (株)製〕を用いて測定し たところ、ポリスチレン換算で 24, 000であった。また、固形分酸価を測定したところ、 196. lmgKOHZgであった。  A flask equipped with a condenser and a stirrer was charged with 7 parts by mass of 2,2,1azobis (2,4-dimethylvale-tolyl) and 200 parts by mass of diethylene glycol dimethyl ether. Subsequently, 43 parts by mass of acrylic acid and 24 parts by mass of acrylic acid n-butyl ester were charged and purged with nitrogen, and then gently agitated. The temperature of the solution was raised to 70 ° C, and this temperature was maintained for 5 hours to obtain a copolymer. After the obtained copolymer solution is returned to room temperature, 33 parts by mass of glycidyl methacrylate and 1.6 parts by mass of triphenylphosphine are charged, heated to 100 ° C and stirred, and the acid value of the reaction solution is increased. The reaction was continued until 0.5 mg KOHZg or less. When the weight average molecular weight of the obtained polymer was measured using GPC [HLC-8020 (manufactured by Tosohichi Co., Ltd.)], it was 24,000 in terms of polystyrene. Moreover, it was 196.lmgKOHZg when the solid content acid value was measured.
[0042] <発明 1 >  [0042] <Invention 1>
実施例 1 窒素導入管を備えた反応フラスコに、製造例 1で得たアルカリ可溶性榭脂 I 100質 量部、ジエチレングリコールジメチルエーテル [丸善石油化学社製] 300質量部を投 入し、 60°Cで 3時間攪拌して溶解させた。次に反応液を室温まで冷却し、重合性多 官能化合物 Aを 120質量部、光重合開始剤 Iを 10質量部添加し、室温で攪拌して溶 解させた。この溶液を孔径 0. 5 mのフィルターで濾過し、感光性榭脂組成物を調 製した。 Example 1 Into a reaction flask equipped with a nitrogen introduction tube, 100 parts by mass of the alkali-soluble resin I obtained in Production Example 1 and 300 parts by mass of diethylene glycol dimethyl ether [Maruzen Petrochemical Co., Ltd.] were added and stirred at 60 ° C for 3 hours. And dissolved. Next, the reaction solution was cooled to room temperature, 120 parts by mass of polymerizable polyfunctional compound A and 10 parts by mass of photopolymerization initiator I were added, and stirred at room temperature to dissolve. This solution was filtered through a filter having a pore size of 0.5 m to prepare a photosensitive resin composition.
実施例 2 6及び比較例 1 6 Example 2 6 and Comparative Example 1 6
実施例 1と同様な操作を行い、表 1に示す組成の各感光性榭脂組成物を調製した [表 1]  The same operation as in Example 1 was carried out to prepare photosensitive resin compositions having the compositions shown in Table 1 [Table 1]
Figure imgf000024_0001
[0044] [注]
Figure imgf000024_0001
[0044] [Note]
1)アルカリ可溶性榭脂  1) Alkali soluble fat
I:製造例 1で得られたもの  I: Obtained in Production Example 1
II:製造例 2で得られたもの  II: Obtained in Production Example 2
2)重合性多官能化合物  2) Polymerizable polyfunctional compound
A:KAYARAD DPHA [日本化薬 (株)製、商品名]  A: KAYARAD DPHA [Nippon Kayaku Co., Ltd., trade name]
B:リポキシ SP— 4060 [昭和高分子 (株)製、商品名]  B: Lipoxy SP-4060 [Showa Polymer Co., Ltd., trade name]
C : CN- 975 [サートマ一社製、商品名]  C: CN- 975 [Product name, manufactured by Sartoma Company]
D:KAYARAD TMPTA [日本化薬 (株)製、商品名]  D: KAYARAD TMPTA [Nippon Kayaku Co., Ltd., trade name]
E :KAYARAD UX—4101 [日本化薬 (株)製、商品名]  E: KAYARAD UX-4101 [Nippon Kayaku Co., Ltd., trade name]
3)光重合開始剤  3) Photopolymerization initiator
I :IRGACURE 907 [チノく'スペシャルティ'ケミカルズ社製、商品名] II :IRGACURE 369 [チノく'スペシャルティ'ケミカルズ社製、商品名] [0045] <諸特性の評価 >  I: IRGACURE 907 [Product name, manufactured by Chinoku 'Specialty' Chemicals] II: IRGACURE 369 [Product name, manufactured by Chinoku 'Specialty' Chemicals] [0045] <Evaluation of various properties>
実施例 1〜6及び比較例 1〜6で調製した各感光性榭脂組成物にっ ヽて、以下に 示す特性の評価を行った。その結果を表 2及び表 3に示す。  The characteristics shown below were evaluated for each photosensitive resin composition prepared in Examples 1 to 6 and Comparative Examples 1 to 6. The results are shown in Tables 2 and 3.
(1)塗膜性  (1) Coating properties
各感光性榭脂組成物を、スピンコーターを用いてガラス基板上にコートし、 120°C のベータ板上で 3分間加熱して 6 μ mの塗膜を作製した。この塗膜を温風循環式乾 燥機にセットし、 100°C力 0. 5°CZminの速度で 250°Cまで昇温し、 250°Cで 30分 間保持した後、 5°CZminの速度で室温まで冷却し、膜厚 5 mの塗膜を得た。この 塗膜を目視による表面状態の観察及び表面粗さ計 (縦倍率 500倍)による膜厚均一 性評価を、下記の判定基準に従って行った。  Each photosensitive resin composition was coated on a glass substrate using a spin coater and heated on a beta plate at 120 ° C. for 3 minutes to prepare a 6 μm coating film. This coating film is set in a hot air circulating dryer, heated to 250 ° C at a speed of 100 ° C force 0.5 ° CZmin, held at 250 ° C for 30 minutes, and then at 5 ° CZmin. The film was cooled to room temperature at a speed to obtain a coating film having a thickness of 5 m. The surface condition of this coating film was visually observed and the film thickness uniformity was evaluated using a surface roughness meter (vertical magnification: 500 times) according to the following criteria.
,目視 (表面状態)  , Visual (surface condition)
〇:平滑  Y: Smooth
X:平滑でなく不均一な格子状の模様や波状の模様がある  X: There is a non-smooth and uneven grid pattern or wavy pattern
•表面粗さ計 (膜厚均一性)  • Surface roughness meter (film thickness uniformity)
下記式よりばらつき率(%)を求める ばらつき率 (%) = { [ (最大膜厚) - (最小膜厚) ] / (平均膜厚) } X 100 Obtain the variation rate (%) from the following formula. Variation rate (%) = {[(Maximum film thickness)-(Minimum film thickness)] / (Average film thickness)} X 100
〇:ばらつき率が 10%以下  ○: Variation rate is 10% or less
X:ばらつき率が 10%超  X: Variation rate exceeds 10%
(2)ガラス基板及び ITO膜との密着性 (2) Adhesion with glass substrate and ITO film
各感光性榭脂組成物を、スピンコーターを用いてガラス基板上及びガラス基板に 2 50nmの ITOを成膜した基板上にコートし、 120°Cのベータ板上で 3分間加熱して 6 mの塗膜を作製した。この塗膜を温風循環式乾燥機にセットし、 100°C力も 0. 5°C Zminの速度で 250°Cまで昇温し、 250°Cで 30分間保持した後、 5°CZminの速度 で室温まで冷却し、膜厚 5 mの塗膜を得た。得られた塗膜表面を JIS K5600に基 づき lmm口 X 100個の碁盤目にカットし、セロハンテープを貼った後に引き剥がし、 塗膜の接着性を、下記の判定基準に従って評価した。  Each photosensitive resin composition was coated on a glass substrate using a spin coater and a substrate on which a 250 nm ITO film was formed, and heated on a beta plate at 120 ° C for 3 minutes to 6 m. A coating film was prepared. Set this coating film in a hot-air circulating dryer, raise the temperature to 250 ° C at a speed of 0.5 ° C Zmin at 100 ° C force, hold it at 250 ° C for 30 minutes, and then speed it at 5 ° CZmin. Was cooled to room temperature to obtain a coating film having a thickness of 5 m. The surface of the obtained coating film was cut into 100 mm lmm openings based on JIS K5600, peeled off after applying a cellophane tape, and the adhesion of the coating film was evaluated according to the following criteria.
〇:剥離なし  ○: No peeling
X:剥離あり  X: With peeling
(3)硬化後の解像性及びパターンの断面形状 (3) Resolution after curing and cross-sectional shape of pattern
各感光性榭脂組成物を、スピンコーターを用いてガラス基板上へコートし、 120°C のベータ板上で 3分間加熱して 6 mの塗膜を作製した。この塗膜に対してテストパ ターンを用いて露光した。露光は、 i線(365nm)のみを透過させるフィルターを用い て、それぞれ 100、 200、 300、 500miZcm2の露光量で行った。続いてテ卜ラメチル アンモ-ゥムヒドロキシド (TMAH) 2. 38質量%水溶液によってパドル現像を行!、、 純水にてリンスし、最後にスピン乾燥を行った。得られたネガ型パターンを温風循環 乾燥機にセットし、 100°Cカゝら 0. 5°CZminの速度で 250°Cまで昇温し、 250°Cで 30 分間保持した後、 5°CZminの速度で室温まで冷却した。得られたパターンを光学顕 微鏡にて観察し、解像性及び断面形状を下記の判定基準に従って評価した。 Each photosensitive resin composition was coated on a glass substrate using a spin coater and heated on a beta plate at 120 ° C. for 3 minutes to prepare a 6 m coating film. This coating film was exposed using a test pattern. The exposure was performed with exposures of 100, 200, 300, and 500 miZcm 2 using filters that transmit only i-line (365 nm), respectively. Subsequently, paddle development was performed with a 2.38% by weight aqueous solution of tetramethylammonium hydroxide (TMAH), rinsed with pure water, and finally spin-dried. The obtained negative pattern is set in a hot air circulating dryer, heated to 100 ° C at a rate of 0.5 ° CZmin to 250 ° C, held at 250 ° C for 30 minutes, then 5 ° Cooled to room temperature at a CZmin rate. The obtained pattern was observed with an optical microscope, and the resolution and cross-sectional shape were evaluated according to the following criteria.
'解像性  'Resolution
◎: 10 m未満のスぺーサ一形成  ◎: Spacer formation of less than 10 m
〇: 10〜12 μ m未満のスぺーサ一形成  ○: Spacer formation of less than 10-12 μm
△: 12〜14 m未満のスぺーサ一形成  Δ: Spacer formation of 12-14 m
Χ : 14 μ m以上のスぺーサ一形成 断面形状 Χ: Spacer formation of 14 μm or more Cross-sectional shape
〇、△、 X:図 4に従って評価  ○, △, X: Evaluation according to Figure 4
(4)耐薬品性 (4) Chemical resistance
前記(3)の硬化後の解像性試験にぉ 、て、 300mjZcm2照射して形成されたサン プルのパターンについて、 N—メチルー 2—ピロリドン(薬品 A)、 y ブチロラタトン( 薬品 B)、剥離液 104 (東京応化社製)(薬品 C)に常温で 30分間それぞれ浸潰させ、 パターンの膨潤、剥離等の外観上の観察、及び浸漬後のパターンについてのテー プ剥離試験を行!ヽ、それぞれ外観及び接着性を下記の判定基準に従って評価した The resolution test Nio after curing of the (3), Te, a pattern of sample formed by 300MjZcm 2 irradiation, N- methyl-2-pyrrolidone (drug A), y Buchirorataton (drug B), peeling Liquid 104 (manufactured by Tokyo Ohka Co., Ltd.) (Chemical C) is each immersed for 30 minutes at room temperature, and the appearance of the pattern such as swelling and peeling of the pattern is observed, and the tape peeling test is performed on the pattern after immersion!ヽ Each appearance and adhesion were evaluated according to the following criteria
'外観 'Appearance
〇:膨潤、剥離などの外観上の変化なし  ○: No change in appearance such as swelling or peeling
X:膨潤、剥離などの外観上の変化あり  X: Appearance changes such as swelling and peeling
'接着性  'Adhesiveness
〇:剥離なし  ○: No peeling
X:剥離あり  X: With peeling
(5)硬化物の熱物性 (5) Thermophysical properties of cured products
各感光性榭脂組成物を硬化後の膜厚が 400 μ mになる適量をアルミカップ内に入 れ、 120°Cで 1時間溶剤を飛ばすために加熱した。その後 500mjZcm2露光し、 22 0°Cで 1時間硬化させた。その硬化物をアルミカップから外し、幅 4mm、長さ 40mm に切り出し、短冊状とした。測定装置、測定条件は下記に示した通りで行った。 An appropriate amount of each photosensitive resin composition with a thickness of 400 μm after curing was placed in an aluminum cup and heated to remove the solvent at 120 ° C. for 1 hour. Thereafter, it was exposed to 500 mjZcm 2 and cured at 220 ° C. for 1 hour. The cured product was removed from the aluminum cup, cut into a width of 4 mm and a length of 40 mm, and formed into a strip shape. The measurement apparatus and measurement conditions were as shown below.
測定装置:動的粘弾性装置 DMS6100 (セイコーインスツルメンッ社製) 測定方法:測定用試料を装置にセットし、引張モード、正弦波、周波数 1Ηζ、振幅 幅 10 μ m、初期荷重 100mN、昇温速度 5°CZminで 50〜250°Cの温度範囲で 測定し、貯蔵弾性率 (Ε'、 GPa)、ガラス転移温度 (Tg、 °C)、損失正接 (tan δ )を求 めた。また、下記式より貯蔵弾性率の変化率を求めた。  Measuring device: Dynamic viscoelastic device DMS6100 (manufactured by Seiko Instruments Inc.) Measuring method: A sample for measurement is set in the device, tensile mode, sine wave, frequency 1Ηζ, amplitude 10 μm, initial load 100 mN, rising Measurements were made at a temperature rate of 5 ° CZmin in the temperature range of 50 to 250 ° C, and the storage elastic modulus (Ε ', GPa), glass transition temperature (Tg, ° C), and loss tangent (tan δ) were determined. Moreover, the change rate of the storage elastic modulus was calculated | required from the following formula.
貯蔵弾性率の変化率 [― 20°C→25°C] (%) = { [「— 20°Cの貯蔵弾性率」―「25 °Cの貯蔵弾性率」 ] Z「- 20°Cの貯蔵弾性率」 } X 100  Rate of change in storage modulus [― 20 ° C → 25 ° C] (%) = {[“Storage modulus at 20 ° C” − “Storage modulus at 25 ° C”] Z “-20 ° C Storage modulus "} X 100
貯蔵弾性率の変化率 [25°C→180°C] (%) = { [「25°Cの貯蔵弾性率」―「180°C の貯蔵弾性率」] Z「25°Cの貯蔵弾性率」 } X 100 Change rate of storage modulus [25 ° C → 180 ° C] (%) = {["Storage modulus at 25 ° C"-"180 ° C Storage modulus ”] Z“ storage modulus at 25 ° C ”} X 100
(6)スぺーサ一の押込み変位量  (6) Spacer push-in displacement
ガラス基板上に各感光性榭脂組成物を塗布した後、 90°Cで 3分間プリベータし、そ の後 500mjZcm2露光し、 0. 10質量%TMAH水溶液で現像し、高さ 5 /ζ πι、幅 10 mのスぺーサーを作製した。測定装置、測定条件は下記に示した通りで行った。 測定装置:島津ダイナミック超微小硬度計 DUH— W201 [島津製作所製] 測定方法:測定用試料を装置にセットし、直径 50 mの平面圧子により、 1. 324mN Zsecの一定速度でスぺーサ一に荷重を加え、最大荷重が 30mNになったときのス ぺーサ一の変位量を測定し、下記式により変化率を求めた。 Each photosensitive resin composition was coated on a glass substrate, pre-betated at 90 ° C for 3 minutes, then exposed to 500 mjZcm 2 , developed with 0.10 wt% TMAH aqueous solution, and height 5 / ζ πι A spacer with a width of 10 m was produced. The measurement apparatus and measurement conditions were as shown below. Measuring equipment: Shimadzu Dynamic Ultra-Hardness Tester DUH— W201 [manufactured by Shimadzu Corporation] Measuring method: A measuring sample is set in the equipment and a flat indenter with a diameter of 50 m is used. When the maximum load was 30 mN, the displacement of the spacer was measured, and the rate of change was calculated using the following formula.
変化率(%) = [「180°Cにおける変位量」 Z「25°Cにおける変位量」] X 100  Rate of change (%) = ["Displacement at 180 ° C" Z "Displacement at 25 ° C"] X 100
[0048] [表 2] [0048] [Table 2]
表 2  Table 2
Figure imgf000028_0001
Figure imgf000028_0001
[0049] [表 3] 表 3 [0049] [Table 3] Table 3
Figure imgf000029_0001
Figure imgf000029_0001
<発明 2>  <Invention 2>
実施例 7〜 12及び比較例 7〜 14 Examples 7-12 and Comparative Examples 7-14
実施例 1と同様な操作を行い、表 4に示す組成の各感光性榭脂組成物を調製した [表 4] The same operation as in Example 1 was performed to prepare photosensitive resin compositions having the compositions shown in Table 4. [Table 4]
Figure imgf000030_0001
Figure imgf000030_0001
[注] [note]
1)アルカリ可溶性榭脂  1) Alkali soluble fat
I:製造例 1で得られたもの  I: Obtained in Production Example 1
II:製造例 2で得られたもの  II: Obtained in Production Example 2
2)重合性多官能化合物  2) Polymerizable polyfunctional compound
A:KAYARAD DPHA [日本化薬 (株)製、商 Β:リポキシ SP— 4060 [昭和高分子 (株)製、商 C:CN-975 [サートマ一社製、商品名] D:KAYARAD TMPTA [日本化薬 (株)製、商品名] A: KAYARAD DPHA [manufactured by Nippon Kayaku Co., Ltd., quotient: Lipoxy SP-4060 [manufactured by Showa Polymer Co., Ltd., quotient C: CN-975 [trade name, manufactured by Sartoma Co., Ltd.] D: KAYARAD TMPTA [Nippon Kayaku Co., Ltd., trade name]
E :KAYARAD R—130 [日本化薬 (株)製、商品名]  E: KAYARAD R—130 [Nippon Kayaku Co., Ltd., trade name]
3)光重合開始剤  3) Photopolymerization initiator
I :IRGACURE 907 [チノく'スペシャルティ'ケミカルズ社製、商品名] [0053] <諸特性の評価 >  I: IRGACURE 907 [Product name, manufactured by Chinoku 'Specialty' Chemicals] [0053] <Evaluation of various properties>
実施例 7〜 12及び比較例 7〜 14で調製した各感光性榭脂組成物につ ヽて、以下 に示す特性の評価を行った。その結果を表 5〜表 9に示す。なお、表 6〜表 9におい て、 MAXは最大値、 MINは最小値、 Ave.は平均値、 S. D.は標準偏差を示す。 The characteristics shown below were evaluated for each photosensitive resin composition prepared in Examples 7 to 12 and Comparative Examples 7 to 14. The results are shown in Tables 5-9. In Tables 6 to 9, MAX is the maximum value, MIN is the minimum value, Ave. is the average value, and S. D. is the standard deviation.
(1)塗膜性 (1) Coating properties
前述した方法により評価した。  Evaluation was performed by the method described above.
(2)ガラス基板及び ITO膜との密着性  (2) Adhesion with glass substrate and ITO film
前述した方法により評価した。  Evaluation was performed by the method described above.
(3)硬化後の解像性及びパターンの断面形状  (3) Resolution after curing and cross-sectional shape of pattern
前述した方法により評価した。  Evaluation was performed by the method described above.
(4)耐薬品性  (4) Chemical resistance
前述した方法により評価した。  Evaluation was performed by the method described above.
(5)硬化物の熱物性  (5) Thermophysical properties of cured products
各感光性榭脂組成物を硬化後の膜厚が 400 μ mになる適量をアルミカップ内に入 れ、 120°Cで 1時間溶剤を飛ばすために加熱した。その後 500mjZcm2露光し、 22 0°Cで 1時間硬化させた。その硬化物をアルミカップから外し、幅 4mm、長さ 40mm に切り出し、短冊状とした。測定装置、測定条件は下記に示した通りで行った。 An appropriate amount of each photosensitive resin composition with a thickness of 400 μm after curing was placed in an aluminum cup and heated to remove the solvent at 120 ° C. for 1 hour. Thereafter, it was exposed to 500 mjZcm 2 and cured at 220 ° C. for 1 hour. The cured product was removed from the aluminum cup, cut into a width of 4 mm and a length of 40 mm, and formed into a strip shape. The measurement apparatus and measurement conditions were as shown below.
測定装置:動的粘弾性装置 DMS6100 (セイコーインスツルメンッ社製) 測定方法:測定用試料を装置にセットし、引張モード、正弦波、周波数 1Ηζ、振幅 幅 10 μ m、初期荷重 100mN、昇温速度 5°CZminで 25〜250°Cの温度範囲で測 定し、損失正接 (tan δ )のピーク位置をガラス転移温度 (Tg、 °C)とした。  Measuring device: Dynamic viscoelastic device DMS6100 (manufactured by Seiko Instruments Inc.) Measuring method: A sample for measurement is set in the device, tensile mode, sine wave, frequency 1Ηζ, amplitude 10 μm, initial load 100 mN, rising The temperature was measured at a temperature rate of 5 ° CZmin in the temperature range of 25 to 250 ° C, and the peak position of loss tangent (tan δ) was defined as the glass transition temperature (Tg, ° C).
[0054] (6)微小硬度計によるスぺーサ一の負荷ー徐荷試験 [0054] (6) Spacer load-unloading test with micro hardness tester
ガラス基板上に感光性榭脂組成物を塗布した後、 90°Cで 3分間プリベータし、その 後 500nijZcm2露光し、 0. 10質量0 /0テトラメチルアンモ-ゥムヒドロキシド (TMAH) 水溶液で現像した後、 250°Cで 30分間かけてポストベータし、高さ 5 μ m、幅 10 μ m のスぺーサーを作製した。得られたスぺーサ一について、下記の測定装置、測定条 件により負荷—徐荷試験を行った。 After the photosensitive榭脂composition was coated on a glass substrate, and pre-beta 3 minutes 90 ° C, 500nijZcm 2 exposed after its, 0.10 mass 0/0 tetramethylammonium - Umuhidorokishido (TMAH) After developing with an aqueous solution, postbeta was performed at 250 ° C. for 30 minutes to produce a spacer having a height of 5 μm and a width of 10 μm. The obtained spacer was subjected to a load-unloading test with the following measuring device and measurement conditions.
測定装置:島津ダイナミック超微小硬度計 DUH— W201〔島津製作所製〕 測定箇所: (a) 370mm X 470mmの基板全体においてランダムに選択した 5箇所( 図 1参照)  Measuring device: Shimadzu Dynamic Ultra Hardness Tester DUH—W201 (manufactured by Shimadzu Corporation) Measuring point: (a) 5 points selected at random on the entire 370mm X 470mm substrate (see Figure 1)
(b) 370mm X 470mmの基板の中心と端部を結ぶ線分を三等分した点を 結ぶ四角形により形成された 3つの領域(Center、 Middle, Edge)各々における 2c m角内のランダムに選択した 5箇所(図 2参照)  (b) Random selection within 2 cm square in each of three areas (Center, Middle, Edge) formed by quadrilaterals connecting points obtained by dividing the line connecting the center and edge of a 370mm X 470mm board into three equal parts 5 locations (see Figure 2)
測定方法:測定用試料を装置にセットし、直径 50 m平面圧子により、 1. 324mN Zsecの一定速度でスぺーサ一に荷重を加え、最大荷重が 30mNになったときのス ぺーサ一の総変形量及び塑性変形量を測定し、そのバラつきを求めた。スぺーサー の総変形量及び塑性変形量は、図 3に示す、スぺーサ一に対する荷重と変形量のヒ ステリシス曲線から求めた。  Measurement method: Place the sample for measurement on the device and apply a load to the spacer at a constant speed of 324 mN Zsec with a 50 m diameter flat indenter, and when the maximum load reaches 30 mN The total deformation amount and the plastic deformation amount were measured, and the variation was obtained. The total deformation amount and plastic deformation amount of the spacer were obtained from the hysteresis curve of load and deformation amount for the spacer shown in Fig. 3.
[表 5] [Table 5]
表 5  Table 5
耐藥品性  Durability
塗膜性 密着性 硬化後の特性 熱物性  Film properties Adhesion Properties after curing Thermophysical properties
(外観/接漦性)  (Appearance / welding)
ITO膜 解像性 Tg  ITO film Resolution Tg
形状 薬品 A 薬品 B 薬品 c  Shape Chemical A Chemical B Chemical c
/均一性 /ガラス (。c) / Uniformity / Glass (.c)
7 o/o o/o o o o/o o/o o/o 1657 o / o o / o o o o / o o / o o / o 165
8 〇/〇 o/o o 〇 o/o o/o o/o 164 実 9 〇/〇 o/o o 〇 o/o 〇ズ o o/o 168 施 8 ○ / ○ o / o o ○ o / o o / o o / o 164 Actual 9 ○ / ○ o / o o ○ o / o ○ z o o / o 168
例 10 o/o o/o o 〇 o/o o/o o/o 160  Example 10 o / o o / o o ○ o / o o / o o / o 160
11 o/o o/o o 〇 o/o o/o o/o 162 11 o / o o / o o ○ o / o o / o o / o 162
12 o/o o/o o 〇 O/O o/o o/o 17612 o / o o / o o ○ O / O o / o o / o 176
7 o/o o/o ◎ X o/o o/o o/o 1467 o / o o / o ◎ X o / o o / o o / o 146
8 X / X o/o X Δ O/ x O/ x O/ x 1748 X / X o / o X Δ O / x O / x O / x 174
9 o/o o/o Δ 〇 o/o o/o o/o 160 比 10 o/o o/o Δ 〇 O/ x O/ x O/ x 159 較 9 o / o o / o Δ ○ o / o o / o o / o 160 ratio 10 o / o o / o Δ ○ O / x O / x O / x 159 comparison
例 11 〇/0 o/o ◎ X o/o o/o o/o 152  Example 11 ○ / 0 o / o ◎ X o / o o / o o / o 152
12 o/o X / X ◎ X O/ x O/ x O/ x 149 12 o / o X / X ◎ X O / x O / x O / x 149
13 o/o o/o 厶 〇 o/o o/o o/o 17313 o / o o / o 〇 〇 o / o o / o o / o 173
14 X / X X / X X X O/ x O/ x O/ x 179 表1 14 X / XX / XXXO / x O / x O / x 179 Table 1
Figure imgf000033_0001
Figure imgf000033_0001
s 〔sffi005 表 7 s 〔sffi005 Table 7
§s §S
Figure imgf000034_0001
Figure imgf000034_0001
表 8 Table 8
〔¾〔005[¾ [005
Figure imgf000035_0001
Figure imgf000035_0001
Figure imgf000036_0001
産業上の利用可能性
Figure imgf000036_0001
Industrial applicability
発明 1の感光性榭脂組成物は、ネガ型のパターン形成能を持ち、高いコントラストを 有し、高感度でかつ寸法制御性が良好なネガ型順テーパー形状のパターンを得るこ とができる。最終的に得られる硬化物は、耐熱性、耐薬品性、基板との密着性が良好 であり、強度に優れた液晶表示装置用のスぺーサ一として使用することができる。 また、発明 2の液晶表示装置用のスぺーサ一は、液晶表示装置に用いたときにセ ルギャップバラつきが少なぐ表示不良を起こすことがないため、高品質の液晶表示 装置を実現することができる。  The photosensitive resin composition of the invention 1 has a negative pattern forming ability, a high contrast, a high sensitivity, and a negative forward taper pattern with good dimensional controllability. The finally obtained cured product has good heat resistance, chemical resistance and adhesion to the substrate, and can be used as a spacer for a liquid crystal display device having excellent strength. In addition, the spacer for a liquid crystal display device according to the second aspect of the present invention does not cause a display defect with a small cell gap variation when used in a liquid crystal display device, thereby realizing a high-quality liquid crystal display device. Can do.

Claims

請求の範囲 The scope of the claims
[1] (A)アルカリ可溶性榭脂、 (B)重合性多官能化合物、 (C)光重合開始剤、及び (D )溶剤を含むネガ型感光性榭脂組成物であって、  [1] A negative photosensitive resin composition comprising (A) an alkali-soluble resin, (B) a polymerizable polyfunctional compound, (C) a photopolymerization initiator, and (D) a solvent,
(a)前記榭脂組成物力も得られる硬化物の— 20°Cにおける貯蔵弾性率と 25°Cにお ける貯蔵弾性率の変化率が 5〜20%であること、  (a) the rate of change between the storage elastic modulus at 20 ° C and the storage elastic modulus at 25 ° C of the cured product from which the composition of the resin composition is also obtained is 5 to 20%;
(b)当該硬化物の 25°Cにおける貯蔵弾性率と 180°Cにおける貯蔵弾性率の変化率 力 30〜80%であること、  (b) The rate of change of the storage elastic modulus at 25 ° C and the storage elastic modulus at 180 ° C of the cured product.
(c)当該硬化物のガラス転移温度が 160°C以上であること、及び  (c) The glass transition temperature of the cured product is 160 ° C or higher, and
(d)当該硬化物の— 50〜250°Cにおける tan δの値が 0. 1以下であること、 を特徴とする液晶表示装置スぺーサ一形成用感光性榭脂組成物。  (d) A photosensitive resin composition for forming a spacer for a liquid crystal display device, wherein the cured product has a value of tan δ at −50 to 250 ° C. of 0.1 or less.
[2] ネガ型感光性榭脂組成物力 (Α)重量平均分子量が 10, 000-20, 000で、 つガラス転移温度が 110°C以上である重合性官能基を有するアルカリ可溶性榭脂 1 00質量部、(B)重合性多官能化合物 50〜250質量部、(C)光重合開始剤 1〜20 質量部、及び (D)溶剤を含む請求項 1に記載の液晶表示装置スぺーサ一形成用感 光性榭脂組成物。  [2] Negative photosensitive resin composition strength (i) Alkali-soluble resin having a polymerizable functional group having a weight average molecular weight of 10,000 to 20,000 and a glass transition temperature of 110 ° C or higher. The liquid crystal display device spacer according to claim 1, comprising: (B) a polymerizable polyfunctional compound (50) to 250 parts by mass; (C) a photopolymerization initiator 1 to 20 parts by mass; and (D) a solvent. Forming photosensitive resin composition.
[3] (A)アルカリ可溶性榭脂が、(al)エチレン性不飽和結合を有するカルボン酸及び [3] (A) Alkali-soluble rosin comprises (al) a carboxylic acid having an ethylenically unsaturated bond and
Z又はエチレン性不飽和結合を有するカルボン酸無水物と、 (a2)その他のエチレン 性不飽和結合を有する不飽和化合物との共重合体の一部を、 (a3)エチレン性不飽 和結合を有するエポキシィヒ合物と反応させて得られた榭脂である請求項 1に記載の 液晶表示装置スぺーサ一形成用感光性榭脂組成物。 Z or a part of a copolymer of a carboxylic acid anhydride having an ethylenically unsaturated bond and (a2) another unsaturated compound having an ethylenically unsaturated bond, (a3) an ethylenically unsaturated bond 2. The photosensitive resin composition for forming a spacer of a liquid crystal display device according to claim 1, which is a resin obtained by reacting with an epoxy resin compound.
[4] (B)重合性多官能化合物が、官能基数 5以上のものである請求項 1に記載の液晶 表示装置スぺーサ一形成用感光性榭脂組成物。  [4] The photosensitive resin composition for forming a spacer for a liquid crystal display device according to [1], wherein the (B) polymerizable polyfunctional compound has 5 or more functional groups.
[5] (B)重合性多官能化合物が、ガラス転移温度 100°C以上のものである請求項 1に 記載の液晶表示装置スぺーサ一形成用感光性榭脂組成物。  [5] The photosensitive resin composition for forming a spacer for a liquid crystal display device according to claim 1, wherein the polymerizable polyfunctional compound (B) has a glass transition temperature of 100 ° C or higher.
[6] (B)重合性多官能化合物が、ウレタン結合を有するものである請求項 1に記載の液 晶表示装置スぺーサ一形成用感光性榭脂組成物。  [6] The photosensitive resin composition for forming a liquid crystal display device spacer according to claim 1, wherein the polymerizable polyfunctional compound (B) has a urethane bond.
[7] 形成されるスぺーサ一の 25°Cにおける押し込み変形量と 180°Cにおける押し込み 変形量の変化率が 100〜 120%である請求項 1に記載の液晶表示装置スぺーサー 形成用感光性榭脂組成物。 [7] The spacer of the liquid crystal display device according to claim 1, wherein a change rate of the indentation deformation amount at 25 ° C and the indentation deformation amount at 180 ° C of the formed spacer is 100 to 120%. Forming photosensitive resin composition.
[8] 請求項 1に記載の感光性榭脂組成物を用いて形成されてなる液晶表示装置用ス へ1 ~~ "サ1 ~~ -[8] 1 ~~ "Sa 1 ~~ to photosensitive榭脂composition comprising formed by using a liquid crystal display device for scan of claim 1 -
[9] 請求項 1に記載の感光性榭脂組成物を用いて形成されてなる液晶表示装置用ス ぺーサ一を有することを特徴とするカラーフィルター。 [9] A color filter comprising a spacer for a liquid crystal display device formed by using the photosensitive resin composition according to claim 1.
[10] 請求項 1に記載の感光性榭脂組成物を用いて形成されてなる液晶表示装置用ス ぺーサ一を有することを特徴とする液晶表示装置。 [10] A liquid crystal display device comprising a spacer for a liquid crystal display device formed using the photosensitive resin composition according to claim 1.
[11] (A)アルカリ可溶性榭脂、(B)重合性多官能化合物、(C)光重合開始剤、及び (D )溶剤を含むネガ型感光性榭脂組成物カゝら得られるスぺーサ一であって、微小硬度 計で測定した負荷ー徐荷試験における総変形量のバラつきが、(e)基板面内におい て、 25°Cでの標準偏差(σ )で 0. 25以内、 180°Cでの標準偏差( σ )で 0. 30以内 であること、及び [11] A negative photosensitive resin composition containing (A) an alkali-soluble resin, (B) a polymerizable polyfunctional compound, (C) a photopolymerization initiator, and (D) a solvent. The variation of the total deformation in the load-unloading test measured with a microhardness meter is (e) within the 0.25 standard deviation (σ) at 25 ° C within the substrate surface, The standard deviation (σ) at 180 ° C is within 0.30, and
(f)基板の中心と複数の端部を結ぶ線分それぞれを三等分した点の、基板の中心側 の点同士及び基板の端部側の点同士を結んで形成された 2つの図形により形成され る 3つの領域各々での 2cm角内において、 25°Cでの標準偏差(σ )で 0. 20以内、 1 80°Cでの標準偏差(σ )で 0. 25以内であること、  (f) By two figures formed by connecting the points on the center side of the substrate and the points on the end side of the substrate, each of which bisects the line segment connecting the center of the substrate and the plurality of ends. Within 2 cm square in each of the three regions formed, the standard deviation (σ) at 25 ° C is within 0.20, and the standard deviation (σ) at 80 ° C is within 0.25,
を特徴とする液晶表示装置用スぺーサ一。  A spacer for a liquid crystal display device.
[12] (Α)アルカリ可溶性榭脂、 (Β)重合性多官能化合物、 (C)光重合開始剤、及び (D )溶剤を含むネガ型感光性榭脂組成物カゝら得られるスぺーサ一であって、微小硬度 計で測定した負荷ー徐荷試験における塑性変形量のバラつきが、 [12] A negative photosensitive resin composition containing (Α) an alkali-soluble resin, (Β) a polymerizable polyfunctional compound, (C) a photopolymerization initiator, and (D) a solvent. The variation in the amount of plastic deformation in the load-unloading test measured with a microhardness meter
(g)基板面内において、 25°Cでの標準偏差(σ )で 0. 20以内、 180°Cでの標準偏 差(σ )で 0. 25以内であること、及び  (g) Within the substrate surface, the standard deviation (σ) at 25 ° C is within 0.20, the standard deviation (180) at 180 ° C is within 0.25, and
(h)基板の中心と複数の端部を結ぶ線分それぞれを三等分した点の、基板の中心 側の点同士及び基板の端部側の点同士を結んで形成された 2つの図形により形成さ れる 3つの領域各々での 2cm角内において、 25°Cでの標準偏差(σ )で 0. 15以内 (h) By two figures formed by connecting the points on the center side of the substrate and the points on the end side of the substrate at the points obtained by dividing each line segment connecting the center of the substrate and the plurality of ends into three equal parts. Within 2cm square in each of the three areas formed, the standard deviation (σ) at 25 ° C is within 0.15
、 180°Cでの標準偏差(σ )で 0. 20以内であること、 The standard deviation (σ) at 180 ° C is within 0.20,
を特徴とする液晶表示装置用スぺーサ一。  A spacer for a liquid crystal display device.
[13] ネガ型感光性榭脂組成物力 (Α)重量平均分子量が 10, 000-20, 000で、か つガラス転移温度が 110°C以上である重合性官能基を有するアルカリ可溶性榭脂 1 00質量部、(B)重合性多官能化合物 50〜250質量部、(C)光重合開始剤 1〜20 質量部、及び (D)溶剤を含み、前記榭脂組成物から得られる硬化物のガラス転移温 度が 160°C以上である請求項 11又は 12に記載の液晶表示装置用スぺーサ一。 [13] Negative photosensitive resin composition power (ii) Weight average molecular weight is 10,000-20,000, 100 parts by mass of an alkali-soluble resin having a polymerizable functional group having a glass transition temperature of 110 ° C. or higher, (B) 50 to 250 parts by mass of a polymerizable polyfunctional compound, (C) a photopolymerization initiator 1 to 20 13. The spacer for a liquid crystal display device according to claim 11 or 12, wherein the glass transition temperature of the cured product obtained from the resin composition containing 160 parts by mass and (D) a solvent is 160 ° C or higher.
[14] (A)アルカリ可溶性榭脂が、(al)エチレン性不飽和結合を有するカルボン酸及び Z又はエチレン性不飽和結合を有するカルボン酸無水物と、 (a2)その他のエチレン 性不飽和結合を有する不飽和化合物との共重合体の一部を、 (a3)エチレン性不飽 和結合を有するエポキシィ匕合物と反応させて得られた榭脂である請求項 11又は 12 に記載の液晶表示装置用スぺーサ一。  [14] (A) Alkali-soluble resin is (al) a carboxylic acid having an ethylenically unsaturated bond and a carboxylic acid anhydride having Z or an ethylenically unsaturated bond, and (a2) other ethylenically unsaturated bonds The liquid crystal according to claim 11 or 12, which is a resin obtained by reacting a part of a copolymer with an unsaturated compound having an epoxy compound having (a3) an ethylenically unsaturated bond. Spacer for display device.
[15] (B)重合性多官能化合物が、官能基数 5以上のものである請求項 11又は 12に記 載の液晶表示装置用スぺーサ一。  [15] The spacer for liquid crystal display device according to [11] or [12], wherein (B) the polymerizable polyfunctional compound has 5 or more functional groups.
[16] (B)重合性多官能化合物が、ガラス転移温度 100°C以上のものである請求項 11又 は 12に記載の液晶表示装置用スぺーサ一。  [16] The spacer for a liquid crystal display device according to [11] or [12], wherein the polymerizable polyfunctional compound (B) has a glass transition temperature of 100 ° C. or higher.
[17] (B)重合性多官能化合物が、ウレタン結合を有するものである請求項 11又は 12に 記載の液晶表示装置用スぺーサ一。  [17] The spacer for a liquid crystal display device according to [11] or [12], wherein the polymerizable polyfunctional compound (B) has a urethane bond.
[18] 請求項 11又は 12に記載の液晶表示装置用スぺーサーを有することを特徴とする カラーフイノレター。  [18] A color finolet having the spacer for a liquid crystal display device according to [11] or [12].
[19] 請求項 11又は 12に記載の液晶表示装置用スぺーサーを有することを特徴とする 液晶表示装置。  [19] A liquid crystal display device comprising the spacer for a liquid crystal display device according to [11] or [12].
PCT/JP2006/316829 2005-08-30 2006-08-28 Photosensitive resin composition, spacer, color filter, and liquid crystal display device WO2007026629A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007533218A JP5313499B2 (en) 2005-08-30 2006-08-28 Photosensitive resin composition, spacer, color filter, and liquid crystal display device

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2005249354 2005-08-30
JP2005-249354 2005-08-30

Publications (1)

Publication Number Publication Date
WO2007026629A1 true WO2007026629A1 (en) 2007-03-08

Family

ID=37808721

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2006/316829 WO2007026629A1 (en) 2005-08-30 2006-08-28 Photosensitive resin composition, spacer, color filter, and liquid crystal display device

Country Status (3)

Country Link
JP (1) JP5313499B2 (en)
KR (1) KR20080044253A (en)
WO (1) WO2007026629A1 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009084435A (en) * 2007-09-28 2009-04-23 Fujifilm Corp Photosensitive resin composition, method for producing photo spacer, substrates for liquid crystal display device, liquid crystal display element, and liquid crystal display device
CN101520603A (en) * 2008-02-25 2009-09-02 富士胶片株式会社 Photosensitive resin compound, transfer printing material, optical spacer and preparation thereof, display device and substrate thereof
JP2011137879A (en) * 2009-12-25 2011-07-14 Asahi Kasei E-Materials Corp Photosensitive resin composition and laminate of the same

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11323057A (en) * 1998-05-15 1999-11-26 Fuji Photo Film Co Ltd Radiation-hardenable composition
JP2000171804A (en) * 1998-12-05 2000-06-23 Dainippon Printing Co Ltd Liquid crystal display device and its manufacture
JP2000171809A (en) * 1998-12-04 2000-06-23 Sekisui Chem Co Ltd Spacer for liquid crystal display device
JP2002040440A (en) * 2000-07-27 2002-02-06 Jsr Corp Radiation sensitive composition, spacer and color liquid crystal display device
JP2002303976A (en) * 2001-04-04 2002-10-18 Jsr Corp Radiation sensitive composition, spacer and color liquid crystal display
JP2003228075A (en) * 2002-02-05 2003-08-15 Nippon Shokubai Co Ltd Composition for wet-scattering spacer particle
JP2005003930A (en) * 2003-06-12 2005-01-06 Jsr Corp Spacer for display panel, radiation-sensitive resin composition and liquid crystal display element
JP2005062621A (en) * 2003-08-18 2005-03-10 Sekisui Chem Co Ltd Photocurable resin composition, pillar spacer, and liquid crystal display element
JP2005126699A (en) * 2003-09-30 2005-05-19 Chisso Corp Photocurable polymer composition and display element given by using the same
JP2005227516A (en) * 2004-02-12 2005-08-25 Chisso Corp Polymerizable composition and display component using the same

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11133600A (en) * 1997-10-30 1999-05-21 Jsr Corp Radiation-sensitive resin composition for display panel spacer

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11323057A (en) * 1998-05-15 1999-11-26 Fuji Photo Film Co Ltd Radiation-hardenable composition
JP2000171809A (en) * 1998-12-04 2000-06-23 Sekisui Chem Co Ltd Spacer for liquid crystal display device
JP2000171804A (en) * 1998-12-05 2000-06-23 Dainippon Printing Co Ltd Liquid crystal display device and its manufacture
JP2002040440A (en) * 2000-07-27 2002-02-06 Jsr Corp Radiation sensitive composition, spacer and color liquid crystal display device
JP2002303976A (en) * 2001-04-04 2002-10-18 Jsr Corp Radiation sensitive composition, spacer and color liquid crystal display
JP2003228075A (en) * 2002-02-05 2003-08-15 Nippon Shokubai Co Ltd Composition for wet-scattering spacer particle
JP2005003930A (en) * 2003-06-12 2005-01-06 Jsr Corp Spacer for display panel, radiation-sensitive resin composition and liquid crystal display element
JP2005062621A (en) * 2003-08-18 2005-03-10 Sekisui Chem Co Ltd Photocurable resin composition, pillar spacer, and liquid crystal display element
JP2005126699A (en) * 2003-09-30 2005-05-19 Chisso Corp Photocurable polymer composition and display element given by using the same
JP2005227516A (en) * 2004-02-12 2005-08-25 Chisso Corp Polymerizable composition and display component using the same

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009084435A (en) * 2007-09-28 2009-04-23 Fujifilm Corp Photosensitive resin composition, method for producing photo spacer, substrates for liquid crystal display device, liquid crystal display element, and liquid crystal display device
CN101520603A (en) * 2008-02-25 2009-09-02 富士胶片株式会社 Photosensitive resin compound, transfer printing material, optical spacer and preparation thereof, display device and substrate thereof
JP2009199019A (en) * 2008-02-25 2009-09-03 Fujifilm Corp Photosensitive resin composition, photo spacer and method of manufacturing the same, and substrate for display and display
JP2011137879A (en) * 2009-12-25 2011-07-14 Asahi Kasei E-Materials Corp Photosensitive resin composition and laminate of the same

Also Published As

Publication number Publication date
KR20080044253A (en) 2008-05-20
JPWO2007026629A1 (en) 2009-03-05
JP5313499B2 (en) 2013-10-09

Similar Documents

Publication Publication Date Title
KR101084384B1 (en) Radiation-sensitive resin composition, spacer, and method of forming the same
JP4518089B2 (en) Photosensitive resin composition for optical waveguide, dry film, optical waveguide and method for producing the same
KR101265319B1 (en) Photosensitive Resin Composition for Optical Waveguides, and Optical Waveguide and Manufacturing Method thereof
JP5315106B2 (en) Alkali-soluble resin, method for producing the same, and photosensitive resin composition using alkali-soluble resin
US20090208854A1 (en) Photosensitive Resin Composition for Forming Column Spacer of Liquid Crystal Display, Method for Forming Column Spacer Using the Composition, Column Spacer Formed by the Method, and Display Device Comprising the Column Spacer
JPH11133600A (en) Radiation-sensitive resin composition for display panel spacer
JP2008076768A (en) Radiation-curable resist resin composition for glass etching and method for producing glass substrate using the same
JP2000081701A (en) Radiation sensitive resin composition for protective coat of color filter
JP5449666B2 (en) Alkali-soluble resin and method for producing the same, and photosensitive resin composition, cured product, and color filter using alkali-soluble resin
KR20090085582A (en) Method for manufacturing molding die and method for manufacturing molded product
JP2008116522A (en) Curable resin composition for forming antireflection film for microlens and antireflection film for microlens
JP2007291317A (en) Photocurable liquid resin composition for fine molding, manufacturing method of 3-dimensional structural object using this, and metal mold
JP2009163080A (en) Radiation-curable resist resin composition for glass etching and method for producing glass substrate using the same
JP2012173678A (en) Negative photosensitive resin composition, transparent insulation film, and method for manufacturing semiconductor substrate
JP2012053180A (en) Photosensitive resin composition for forming transparent insulating protective film and transparent insulating film
TW200921278A (en) Negative-working resist for formation of protrusions for liquid crystal alignment
WO2007026629A1 (en) Photosensitive resin composition, spacer, color filter, and liquid crystal display device
JP4910810B2 (en) Radiation curable resin composition
JP4660990B2 (en) Radiation-sensitive resin composition, projection material and spacer formed therefrom, and liquid crystal display device comprising the same
JP4016893B2 (en) Radiation sensitive resin composition and liquid crystal display element used for forming spacer for display panel
JP4750577B2 (en) Photosensitive resin composition
KR100839300B1 (en) Radiation Sensitive Resin Composition, Spacer for Display Panel, and Display Panel
JP2007304544A (en) Negative resist for forming protrusion for liquid crystal alignment, protrusion for liquid crystal alignment, color filter, liquid crystal display element and manufacturing method of liquid crystal display element
JP2006039154A (en) Photosensitive resin composition, optical waveguide and method for manufacturing the same
JP2009288544A (en) Photosensitive resin composition

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application
ENP Entry into the national phase

Ref document number: 2007533218

Country of ref document: JP

Kind code of ref document: A

WWE Wipo information: entry into national phase

Ref document number: KR

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 06796863

Country of ref document: EP

Kind code of ref document: A1