WO2007023761A1 - Procédé de séparation simultanée de gaz d’oxygène et de gaz d’azote, et système de séparation simultanée - Google Patents

Procédé de séparation simultanée de gaz d’oxygène et de gaz d’azote, et système de séparation simultanée Download PDF

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Publication number
WO2007023761A1
WO2007023761A1 PCT/JP2006/316312 JP2006316312W WO2007023761A1 WO 2007023761 A1 WO2007023761 A1 WO 2007023761A1 JP 2006316312 W JP2006316312 W JP 2006316312W WO 2007023761 A1 WO2007023761 A1 WO 2007023761A1
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Prior art keywords
gas
membrane
oxygen
nitrogen
gas separation
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PCT/JP2006/316312
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English (en)
Japanese (ja)
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Koichi Shima
Hiroaki Sasano
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Sumitomo Seika Chemicals Co., Ltd.
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Priority to JP2007532095A priority Critical patent/JP5027662B2/ja
Publication of WO2007023761A1 publication Critical patent/WO2007023761A1/fr

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/22—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by diffusion
    • B01D53/229—Integrated processes (Diffusion and at least one other process, e.g. adsorption, absorption)
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
    • B01D53/047—Pressure swing adsorption
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B13/00—Oxygen; Ozone; Oxides or hydroxides in general
    • C01B13/02—Preparation of oxygen
    • C01B13/0229—Purification or separation processes
    • C01B13/0248—Physical processing only
    • C01B13/0251—Physical processing only by making use of membranes
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B13/00—Oxygen; Ozone; Oxides or hydroxides in general
    • C01B13/02—Preparation of oxygen
    • C01B13/0229—Purification or separation processes
    • C01B13/0248—Physical processing only
    • C01B13/0259—Physical processing only by adsorption on solids
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/04—Purification or separation of nitrogen
    • C01B21/0405—Purification or separation processes
    • C01B21/0433—Physical processing only
    • C01B21/0438—Physical processing only by making use of membranes
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/04—Purification or separation of nitrogen
    • C01B21/0405—Purification or separation processes
    • C01B21/0433—Physical processing only
    • C01B21/045—Physical processing only by adsorption in solids
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2256/00—Main component in the product gas stream after treatment
    • B01D2256/10—Nitrogen
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2256/00—Main component in the product gas stream after treatment
    • B01D2256/12—Oxygen
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/10—Single element gases other than halogens
    • B01D2257/102—Nitrogen
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2259/00—Type of treatment
    • B01D2259/40—Further details for adsorption processes and devices
    • B01D2259/40001—Methods relating to additional, e.g. intermediate, treatment of process gas
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2210/00—Purification or separation of specific gases
    • C01B2210/0043—Impurity removed
    • C01B2210/0046—Nitrogen

Definitions

  • the present invention relates to a method and system for separating oxygen gas and nitrogen gas in parallel from a mixed gas containing oxygen and nitrogen (for example, air).
  • Oxygen gas and nitrogen gas obtained by aerodynamic separation are used in various applications.
  • Oxygen gas is used, for example, for raising the temperature of refuse melting furnaces, ash melting furnaces, glass melting furnaces, improving the combustion efficiency of steelmaking electric furnaces, acid-rich reactions in chemical plants, and oxygen aeration in wastewater treatment equipment.
  • nitrogen gas is used for, for example, gas sealing and purging in a garbage melting furnace, an atmosphere gas adjustment in a heat treatment furnace, and a food packaging gas seal.
  • Aerodynamic pressure As one of the practical methods for separating oxygen gas and nitrogen gas, the pressure fluctuation adsorption method (PSA method) is known.
  • PSA gas separation device including an adsorption tower filled with an adsorbent for preferentially adsorbing a predetermined component is used, and at least an adsorption process and a desorption process are performed in the adsorption tower.
  • the In the adsorption process a mixed gas is introduced into the adsorption tower, the easily adsorbed components in the mixed gas are adsorbed on the adsorbent under high pressure conditions, and the gas having the difficultly adsorbed component force is derived.
  • the pressure in the tower is lowered to desorb the easily adsorbed component from the adsorbent, and the gas mainly containing the easily adsorbed component is led out from the adsorbing tower.
  • the gas mainly containing the easily adsorbed component is led out from the adsorbing tower.
  • an adsorbent capable of preferentially adsorbing nitrogen over oxygen and introducing air as a mixed gas into the adsorption tower
  • oxygen is led out of the tower as a difficult adsorption component in the adsorption process.
  • Nitrogen is adsorbed by the adsorbent as an easily adsorbing component in the adsorption process and led out of the tower in the desorption process.
  • the gas concentration and gas of the hard-to-adsorb component gas that passes through the adsorption tower in the adsorption step is larger than the easily-adsorbed component gas that is desorbed in the desorption step and led out of the tower. Stable with respect to quantity. For this reason, in the PSA method, it is easier to acquire the target gas more efficiently by using the difficult-to-adsorb component gas than the easily-adsorbed component gas.
  • the P The adsorption column of the SA gas separator is filled with a nitrogen-adsorbing adsorbent, and the oxygen-enriched gas from which the adsorption tower force is also derived in the adsorption process is recovered as product gas.
  • nitrogen is separated and acquired by the PSA method, generally, an oxygen-adsorbing adsorbent is packed in the adsorption tower, and the nitrogen-enriched gas derived from the adsorption tower force in the adsorption process is the product. It is recovered as gas.
  • FIG. 5 shows an oxygen / nitrogen parallel separation system X5, which is an example of a conventional system for separating oxygen and nitrogen in air in parallel.
  • the oxygen / nitrogen parallel separation system X5 comprises a PSA gas separator 51, a membrane gas separator 52, a storage tank 53, compressors 54 and 55, and a vacuum pump 56, which are connected via piping. It is connected.
  • a plurality of automatic valves (not shown) are provided at predetermined locations in the piping, and when the system is in operation, the flow state of the gas in the system is switched by appropriately selecting the open / close state of each automatic valve.
  • the PSA gas separation device 51 includes an adsorption tower (not shown) filled with an adsorbent that preferentially adsorbs nitrogen over oxygen.
  • the membrane gas separator 52 has a gas separation membrane 52a for preferentially permeating oxygen.
  • Patent Document 1 Such an oxygen / nitrogen parallel separation system is described in Patent Document 1 below, for example.
  • Patent Document 1 Japanese Patent Laid-Open No. 5-253438
  • one cycle including the adsorption step and the desorption step is repeated in the adsorption tower of the PS A gas separation device 51 to separate and acquire the oxygen-enriched gas from the air.
  • the in the adsorption process when the compressor 54 is operated and air is supplied to the adsorption tower of the PSA gas separation device 51 and the inside of the tower rises to a predetermined pressure, the easily adsorbed component in the air (mainly Nitrogen) is adsorbed on the adsorbent, and oxygen-enriched gas is derived from the adsorption tower or PSA gas separation device 51.
  • the obtained oxygen-enriched gas is continuously used for a predetermined application, for example.
  • the oxygen concentration of the desorbed gas from the PSA gas separation device 51 is always detected by an oxygen monitor, and the desorbed gas having a relatively high oxygen concentration at the beginning of the desorption process is outside the system as indicated by an arrow G '. Discarded. Then, when the oxygen concentration of the desorption gas is reduced to a predetermined value, the disposal is stopped and the desorption gas is recovered to the storage tank 53. Such disposal and subsequent recovery of the desorbed gas is performed each time the desorbed gas is discharged from the PSA gas separation device 51.
  • the desorption gas recovered in the storage tank 53 is supplied to the membrane gas separator 52 at a predetermined pressure by the operation of the compressor 55, and passes through the gas separation membrane 52a of the membrane gas separator 52. And non-permeate gas that does not permeate. Oxygen in the desorption gas preferentially permeates through the gas separation membrane 52a, whereby nitrogen-enriched gas whose oxygen concentration is reduced and nitrogen purity is increased is passed through the membrane gas separator 52 as a non-permeate gas. Discharged. For example, the obtained non-permeating gas is continuously used for a predetermined application. Thus, according to the oxygen / nitrogen parallel separation system X5, the aerodynamic oxygen-enriched gas and the nitrogen-enriched gas are separately obtained.
  • the fluctuations in the driving force result in fluctuations in the oxygen permeation amount or oxygen non-permeation amount to the gas separation membrane 52a, and therefore, the non-permeation gas (nitrogen-enriched gas) discharged from the membrane gas separator 52.
  • the amount of variation will come. Therefore, if the desorption gas from the PSA gas separation device 51 is continuously supplied to the membrane gas separator 52 without being stored in the storage tank 53, the supply of nitrogen-enriched gas obtained as non-permeate gas In some cases, the amount becomes unstable and cannot be properly used as an inert gas.
  • the desorbed gas in a predetermined oxygen concentration region (that is, the nitrogen concentration region) is transferred to the storage tank 53.
  • the recovered desorbed gas having a substantially constant oxygen concentration is supplied from the storage tank 53 to the membrane gas separator 52.
  • a non-permeate gas nitrogen-enriched gas is emitted at a constant flow rate.
  • the switching line configuration and the storage tank 53 for separating the flow of the desorbed gas from the PSA gas separator 51 to the membrane gas separator 52 do not prevent the operation of separating and acquiring the nitrogen-enriched gas. This is not preferable because it causes continuous system complexity. In addition, such a switching line and storage tank 53 are not preferable because the system is enlarged.
  • An object of the present invention is to separate and acquire oxygen / nitrogen mixed gas power high-purity oxygen gas by a PSA gas separation device and to remove high-purity nitrogen from desorption gas continuously supplied from the PSA gas separation device.
  • An object of the present invention is to provide an oxygen / nitrogen simultaneous separation method capable of separating and obtaining gas continuously and efficiently.
  • Another object of the present invention is to obtain a high purity oxygen gas from an oxygen / nitrogen mixed gas by a PSA gas separation device and to provide a high desorption gas power continuously supplied from the PSA gas separation device.
  • the object is to provide an oxygen and nitrogen parallel separation system capable of separating and obtaining pure nitrogen gas continuously and efficiently.
  • a mixed gas power containing oxygen and nitrogen there is provided a mixed gas power containing oxygen and nitrogen.
  • a method for parallel separation of oxygen gas and nitrogen gas is provided.
  • This parallel separation method includes a pressure fluctuation adsorption gas separation step, a compression step, and a membrane gas separation step.
  • the pressure inside the adsorption tower is relatively high by the pressure fluctuation adsorption gas separation method using an adsorption tower filled with an adsorbent for preferentially adsorbing nitrogen.
  • a mixed gas is introduced into the adsorption tower so that nitrogen in the mixed gas is adsorbed by the adsorbent, the adsorption tower force oxygen-enriched gas is derived, and the inside of the adsorption tower is at a relatively low pressure.
  • nitrogen is desorbed from the adsorbent, and a desorption gas containing oxygen remaining in the adsorption tower and the nitrogen is led out from the adsorption tower.
  • the desorption gas derived from the adsorption tower is compressed.
  • a gas separation membrane for preferentially permeating oxygen separates the desorbed gas that has passed through the compression process into a permeate gas that permeates the gas separation membrane and a non-permeate nitrogen-enriched gas that does not permeate.
  • a part of the desorption gas is introduced to the permeation side of the gas separation membrane without passing through the gas separation membrane.
  • the oxygen partial pressure of the combined gas existing on the permeate side of the gas separation membrane is smaller than the oxygen partial pressure of the permeate gas that has permeated through the gas separation membrane, so that it is attached to the membrane gas separation process of the gas separation membrane.
  • the oxygen partial pressure (molar oxygen concentration) of the desorption gas fluctuates due to this sufficient difference in oxygen partial pressure, a sufficient driving force for oxygen permeation through the gas separation membrane is ensured, and gas separation is performed.
  • a sufficient amount of oxygen permeation through the membrane can be achieved. The greater the amount of oxygen permeated through the gas separation membrane, the smaller the amount of nitrogen permeated through the membrane.
  • the PSA gas separation device separates and acquires high-purity oxygen gas from the oxygen 'nitrogen mixed gas, and at the same time the desorption gas continuously supplied from the PSA gas separation device is high. Purify and acquire pure nitrogen gas continuously and efficiently Is possible. In the parallel separation method, it is not necessary to use a tank or the like for storing and desorbing the desorption gas from the PSA gas separation device.
  • the desorption gas introduced to the permeation side of the gas separation membrane is oxygen remaining after the oxygen-enriched gas is led out from the adsorption tower of the PSA gas separation device. Although it is a gas containing, its oxygen concentration is lower than the oxygen concentration of air. Therefore, by introducing this desorption gas to the permeation side of the gas separation membrane, the oxygen partial pressure on the permeation side of the gas separation membrane can be efficiently reduced compared to when air is introduced to the permeation side of the gas separation membrane. You can. As described above, the parallel separation method of the present invention can effectively use the desorption gas from the PSA gas separation device.
  • the desorption gas is preferably compressed to a pressure of 0.6 MPa or more.
  • Such a configuration is advantageous in providing a sufficient difference between the oxygen partial pressure of the desorption gas from the adsorption tower and the oxygen partial pressure of the permeated gas separated from the desorption gas by a gas separation membrane. is there.
  • the permeation side of the gas separation membrane is reduced to a pressure lower than atmospheric pressure.
  • a configuration relates to the oxygen partial pressure of the desorption gas from the adsorption tower and the oxygen partial pressure of the gas existing on the permeation side separated from the desorption gas by a gas separation membrane! Therefore, it is advantageous to make a sufficient difference.
  • the pressure reduction in the adsorption tower when desorbing the desorption gas from the adsorption tower in the pressure fluctuation adsorption gas separation step and the pressure reduction on the permeate side of the gas separation membrane in the membrane gas separation step are a single pressure reduction. It can be realized by means! / You can use a separate decompression means.
  • the desorption gas introduced into the permeation side of the gas separation membrane without passing through the gas separation membrane in the membrane gas separation step is configured to pass through the compression step.
  • the desorption gas can be appropriately supplied to the permeation side of the gas separation membrane.
  • a mixed gas power containing oxygen and nitrogen is provided.
  • a system for parallel separation of oxygen gas and nitrogen gas is provided.
  • This parallel separation system includes a pressure fluctuation adsorption gas separation device, a membrane gas separator, a compression means, and a bypass means.
  • the pressure fluctuation adsorption gas separation device has an adsorption tower filled with an adsorbent for preferentially adsorbing nitrogen, and by a pressure fluctuation adsorption gas separation method performed using the adsorption tower, In a state in which the inside of the adsorption tower is at a relatively high pressure, a mixed gas is introduced into the adsorption tower, nitrogen in the mixed gas is adsorbed by the adsorbent, and the adsorption tower power oxygen-enriched gas is derived, This is for desorbing nitrogen from the adsorbent in a state where the pressure in the adsorption tower is relatively low, and deriving the desorption gas containing oxygen remaining in the adsorption tower and the nitrogen from the adsorption tower.
  • the membrane gas separator has a gas separation membrane for preferentially permeating oxygen, and desorbs the desorbed gas into a permeate gas that permeates the gas separation membrane and a non-permeate nitrogen-enriched gas that does not permeate. Is for.
  • the compression means is for compressing the desorption gas before the desorption gas is supplied to the membrane gas separator.
  • the bypass means is for bypassing a part of the desorption gas and introducing it to the permeation side of the gas separation membrane without passing through the gas separation membrane.
  • the parallel separation system further includes decompression means for decompressing the permeation side of the gas separation membrane in the membrane gas separator to a pressure lower than atmospheric pressure.
  • the depressurization means also functions as a means for depressurizing the inside of the adsorption tower when desorbing the adsorption tower force desorption gas of the pressure fluctuation adsorption gas separation apparatus.
  • Such a configuration is suitable for constructing a parallel separation system in a compact manner.
  • the desorption gas introduced to the permeation side of the gas separation membrane by the bypass means is compressed by a compression means.
  • the desorption gas can be appropriately supplied to the permeation side of the gas separation membrane.
  • FIG. 1 is a schematic configuration diagram showing an oxygen / nitrogen parallel separation system according to a first embodiment of the present invention.
  • FIG. 2 is a schematic configuration diagram showing an oxygen / nitrogen parallel separation system according to a second embodiment of the present invention.
  • FIG. 3 is a schematic configuration diagram showing an oxygen / nitrogen parallel separation system according to a third embodiment of the present invention.
  • FIG. 4 is a schematic configuration diagram showing an oxygen / nitrogen parallel separation system according to a fourth embodiment of the present invention.
  • FIG. 5 is a schematic configuration diagram showing a conventional oxygen / nitrogen parallel separation system. .
  • FIG. 1 shows an oxygen / nitrogen parallel separation system XI according to the first embodiment of the present invention.
  • Oxygen / nitrogen parallel separation system XI consists of pressure fluctuation adsorption (PSA) gas separation device 1, membrane gas separator 2, raw material gas supply device 3, pump 4, silencer 5, compressor 6, A gas-liquid separator 7, an oxygen concentration control device 8, and piping connecting these elements are provided.
  • PSA pressure fluctuation adsorption
  • System XI separates oxygen enriched gas and nitrogen enriched gas from oxygen / nitrogen-containing source gas (for example, air) in parallel, pressure fluctuation adsorption gas separation process, compression process, and membrane process Configured to perform a gas separation step.
  • nitrogen-containing source gas for example, air
  • the PSA gas separation apparatus 1 is described as having at least one adsorption tower (not shown: in the following, provided with a plurality of adsorption towers) mainly filled with an adsorbent for preferentially adsorbing nitrogen.
  • the oxygen / nitrogen-containing source gas (air in this embodiment) force oxygen-enriched gas can be extracted by the pressure fluctuation adsorption gas separation method using the adsorption tower.
  • As the adsorbent packed in the adsorption tower Li—X type zeolite molecular sieve, Ca—X type zeolite molecular sieve, Ca—A type zeolite molecular sieve, and the like can be adopted.
  • Each adsorption tower may be filled with one kind of adsorbent or plural kinds of adsorbents.
  • the pressure fluctuation adsorption gas separation method executed in the PSA gas separation apparatus 1 one cycle including an adsorption step, a desorption step, and a regeneration step is repeated for each adsorption tower.
  • air is introduced into an adsorption tower having a predetermined high pressure inside the tower, and nitrogen and other components (carbon dioxide, moisture, etc.) in the raw material gas are adsorbed on the adsorbent, and the adsorption is performed.
  • This is a process for deriving oxygen-enriched gas from the tower.
  • the desorption step is a step for depressurizing the inside of the adsorption tower to desorb nitrogen from the adsorbent and discharging the nitrogen outside the tower.
  • the regeneration step is a step for recovering the adsorption performance of the adsorbent to nitrogen by passing a cleaning gas, for example, through which the adsorption tower is provided in the second adsorption step.
  • a cleaning gas for example, through which the adsorption tower is provided in the second adsorption step.
  • a PSA gas separator 1 a known PSA oxygen separator may be used. it can.
  • the membrane gas separator 2 includes inlets 2a and 2b and outlets 2c and 2d, and includes a gas separation membrane 2A that preferentially permeates oxygen.
  • a predetermined gas flow path (specifically not shown) is provided inside the membrane gas separator 2.
  • the inlet 2a and outlet 2c communicate with each other through part of the gas flow path, and the inlet 2b and outlet 2d communicate with each other through another part of the gas path.
  • the inlet 2a and the outlet 2c are separated from the inlet 2b and the outlet 2d with the gas separation membrane 2A interposed therebetween.
  • the gas separation membrane 2A is a porous resin membrane made of, for example, polyimide or polysulfone.
  • the gas separation membrane 2A is not limited to this.
  • a material constituting the gas separation membrane 2A either a polymer material or a ceramic material may be used.
  • the gas separation membrane 2A may be either porous or non-porous, and may be either a homogeneous membrane or an asymmetric membrane.
  • a flat membrane, a hollow fiber membrane or the like can be displaced.
  • the raw material gas supply device 3 is for supplying air, which is an oxygen / nitrogen-containing raw material gas, to the adsorption tower of the PSA gas separation device 1, and is, for example, an air blower.
  • the pump 4 is for sucking and depressurizing the inside of the adsorption tower of the PSA gas separation apparatus 1, and is, for example, a vacuum pump.
  • the silencer 5 discharges the remainder of the gas from the pump 4 to the outside of the system while guiding a part of the gas from the pump 4 to the compressor 6.
  • the silencer 5 has a gas flow path for guiding the gas from the pump 4 to the compressor 6 and a gas flow path for discharging the gas from the pump 4 to the outside of the system while silencing.
  • the compressor 6 compresses the gas that has passed through the silencer 5 and supplies it to the gas-liquid separator 7.
  • a pipe L 1 connected to the inlet 2b of the membrane gas separator 2 is connected to the suction side of the compressor 6.
  • the pipe L1 guides a part of the gas from the silencer 5 to the inlet 2b by bypassing the gas separation membrane 2A of the membrane gas separator 2 without passing through.
  • Pipe L1 is provided with a flow control valve 10 for adjusting the amount of gas flowing through pipe L1.
  • the gas-liquid separator 7 has a discharge port 7a, and separates moisture contained in the gas sent from the compressor 6 from the gas.
  • the discharge port 7a removes moisture collected in the gas-liquid separator 7. Discharge out of the liquid separator 7.
  • the oxygen concentration control device 8 includes an oxygen sensor 8a and an automatic valve 8b provided in a pipe L2 connected to the outlet 2c of the membrane gas separator 2.
  • the oxygen concentration control device 8 determines the flow rate of the gas (that is, the amount of gas that does not pass through the gas separation membrane 2A of the membrane gas separator 2) according to the oxygen concentration of the gas flowing through the pipe L2. By adjusting, the oxygen concentration of the gas is adjusted to the desired value.
  • the oxygen sensor 8a constantly detects the oxygen concentration of the gas flowing through the pipe L2.
  • the oxygen concentration control device 8 adjusts the opening degree of the automatic valve 8b according to the detection result of the oxygen sensor 8a.
  • air is subjected to a pressure fluctuation adsorption gas separation step. Specifically, in the PSA gas separation apparatus 1, one cycle including an adsorption process, a desorption process, and a regeneration process is repeated for each adsorption tower by the pressure fluctuation adsorption gas separation method.
  • adsorption step air is introduced into an adsorption tower whose inside is in a predetermined high pressure state.
  • nitrogen and other components (carbon dioxide, moisture, etc.) contained in the air are adsorbed and removed by the adsorbent, and high-purity oxygen gas (oxygen-enriched gas) is led out of the tower.
  • This high-purity oxygen gas is taken out of the oxygen / nitrogen parallel separation system XI through a predetermined pipe.
  • the adsorption tower is depressurized by the operation of the pump 4 so that the adsorbent nitrogen and other components are desorbed, and the desorption gas containing oxygen remaining in the tower and the desorption component is removed from the outside of the tower.
  • PSA gas separator 1 is discharged outside.
  • Adsorption tower force in the desorption process The oxygen concentration (volume ratio of oxygen) of the desorption gas discharged changes with the passage of time at the start of the desorption process. For example, at the start of the desorption process, a relatively large amount of oxygen remains in the column, and the oxygen concentration of the gas is about 16%.
  • the amount of nitrogen gas desorbed increases due to the adsorbent power, and the oxygen concentration of the desorbed gas decreases to about 5%.
  • desorption gas discharged outside the tower in the desorption process The average oxygen concentration is about 10-11%.
  • the cleaning gas is passed through the tower, whereby the adsorption performance of the adsorbent mainly on nitrogen is recovered.
  • the adsorption described above is performed again in the adsorption tower after the regeneration process.
  • the high-purity oxygen gas is taken out and the desorption gas is taken out.
  • the high-purity oxygen gas is used continuously for a predetermined application, for example, or stored in a predetermined tank.
  • the desorption gas discharged from the adsorption tower and the PSA gas separation apparatus 1 in the desorption process is sent to the silencer 5 through a predetermined pipe and the pump 4. A part of the desorbed gas passes through the silencer 5 and reaches the compressor 6. The remainder of the desorbed gas is discharged out of the system by the silencer 5.
  • the desorbed gas that has passed through the silencer 5 is compressed by the compressor 6 (compression process), supplied to the membrane gas separator 2 via the gas-liquid separator 7.
  • the desorption gas is compressed by the compressor 6 to a pressure of 0.6 MPa or more.
  • moisture is separated from the desorbed gas. The separated water is discharged from the gas-liquid separator 7 through the discharge port 7a.
  • the desorption gas is subjected to a membrane gas separation step.
  • the desorption gas G1 introduced into the membrane gas separator 2 from the inlet 2a permeates the gas separation membrane 2A through the gas separation membrane 2A disposed in the membrane gas separator 2. It is separated into a permeating gas G2 that does not permeate and a non-permeating gas G3 that does not permeate.
  • the permeate gas G2 is an oxygen-enriched gas whose oxygen concentration is increased based on the permeation characteristics of the gas separation membrane 2A
  • the non-permeate gas G3 is a nitrogen concentration that is increased based on the permeation characteristics of the gas separation membrane 2A.
  • High purity nitrogen gas nitrogen-enriched gas
  • a part of the desorbed gas that has passed through the silencer 5 passes through the pipe L1 and the inlet 2b, the permeate side of the membrane gas separator 2 (the outlet from the gas separation membrane 2A). (Up to 2d gas flow path). That is, a part of the desorption gas (hereinafter referred to as “oxygen partial pressure reducing gas G4”) bypasses the gas separation membrane 2A and is supplied to the permeate side of the gas separation membrane 2A.
  • oxygen partial pressure reducing gas G4 a part of the desorption gas (hereinafter referred to as “oxygen partial pressure reducing gas G4”) bypasses the gas separation membrane 2A and is supplied to the permeate side of the gas separation membrane 2A.
  • gas for reducing oxygen partial pressure to the permeation side of gas separation membrane 2A G4 The supply amount is adjusted by the flow rate adjusting valve 10.
  • joint gas G5 oxygen partial pressure reducing gas G4 joins (hereinafter, the joined gas is referred to as “joint gas G5”). 0 Joined gas G5 is led out of membrane gas separator 2 through outlet 2d, and thereafter Are discharged into the atmosphere outside the system.
  • the amount of non-permeable gas is directly adjusted by the operation of the oxygen concentration control device 8, and the oxygen concentration of the non-permeable gas G3 is maintained constant.
  • the oxygen sensor 8a of the oxygen concentration control device 8 constantly detects the oxygen concentration of the non-permeate gas G3 that is led out of the membrane gas separator 2 from the outlet 2c and passes through the pipe L2.
  • the opening degree of the automatic valve 8b is reduced, and the flow rate of the non-permeate gas G3 passing through the pipe L2 (i.e., in the membrane gas separation process in the membrane gas separator 2).
  • the amount of non-permeable gas G3 generated per unit time) is reduced.
  • the opening degree of the automatic valve 8b is increased, and the flow rate of the non-permeate gas G3 passing through the pipe L2 is increased.
  • the nitrogen purity of the non-permeate gas G3 in the membrane gas separation process (higher as the oxygen concentration is lower) can vary depending on the amount of the non-permeate gas G3 generated.
  • the oxygen concentration of the non-permeate gas G3 can be controlled by adjustment.
  • the membrane gas separator 2 the membrane gas separation process as described above is performed, whereby high-purity nitrogen gas is taken out while the oxygen concentration is controlled.
  • This high-purity nitrogen gas is used continuously for a desired application, for example, or stored in a predetermined tank.
  • high-purity oxygen gas and high-purity nitrogen gas can be separated from air in parallel as described above.
  • Oxygen / nitrogen parallel separation system In the oxygen / nitrogen parallel separation method using XI, the adsorption tower power of the PSA gas separation device 1 in which the pressure fluctuation adsorption type gas separation process is performed is discharged. A part of the gas (oxygen partial pressure reducing gas G4) can be introduced to the permeation side of the gas separation membrane 2A without passing through the gas separation membrane 2A. For this reason, the adsorption tower power is also discharged.
  • the oxygen partial pressure of the desorbed gas G1 (proportional to the molar oxygen concentration) applied to the membrane gas separation process in the membrane gas separator 2 after the compression process and the desorption gas G1 are the gas separation membrane 2A Therefore, a sufficient difference can be provided between the oxygen partial pressure of the gas (combined gas G5) existing on the permeate side separated by. That is, on the permeation side of the gas separation membrane 2A in the membrane gas separation process, a permeated gas G2 having a relatively high oxygen concentration that has permeated the gas separation membrane 2A and a relatively oxygen concentration that has not permeated the gas separation membrane 2A.
  • the oxygen concentration of the merged gas G5 is lower than the oxygen concentration of the permeate gas G2.
  • the gas existing on the permeation side of the gas separation membrane is in an uncompressed state, its pressure is substantially constant (atmospheric pressure). Therefore, the oxygen partial pressure of the combined gas G5 existing on the permeation side of the gas separation membrane is attached to the membrane gas separation process of the gas separation membrane 2A, which is smaller than the oxygen partial pressure of the permeated gas G2 that has permeated the gas separation membrane 2A.
  • a sufficient difference can be established between the oxygen partial pressure of the compressed desorbed gas G1 and the oxygen partial pressure of the uncompressed combined gas G5 existing on the permeate side of the gas separation membrane.
  • the gas separation membrane 2A A sufficient driving force for oxygen permeation can be ensured, and a sufficient amount of oxygen permeating through the gas separation membrane 2A can be obtained.
  • the oxygen / nitrogen parallel separation method XI according to the present invention, a large amount of non-permeated nitrogen-enriched gas can be supplied at a stable flow rate. Therefore, according to the above parallel separation method, the PSA gas separation device 1 separates and acquires the aerodynamic high purity oxygen gas, and the desorption gas power continuously supplied from the PSA gas separation device 1 continuously It is possible to separate and acquire efficiently. Therefore, according to the parallel separation method, it is not necessary to use a tank or the like for storing and storing the desorbed gas from the PSA gas separation device 1.
  • the oxygen concentration (about 5 to 16%, on average about 10 to 11%) of the oxygen partial pressure reducing gas G4 introduced to the permeation side of the gas separation membrane 2A is the oxygen concentration of air (about 21%).
  • the oxygen concentration of air about 21%).
  • the desorption gas from the PSA gas separation device 1 improves the efficiency of the membrane gas separation process (that is, increases the amount of high-purity nitrogen gas generated). Therefore, it will be used effectively.
  • the compressor 6 having a smaller capacity can be used as the compression means, which contributes to downsizing of the oxygen / nitrogen parallel separation system XI.
  • FIG. 2 shows an oxygen / nitrogen parallel separation system X2 according to a second embodiment of the present invention.
  • the oxygen / nitrogen parallel separation system X2 differs from the oxygen / nitrogen parallel separation system XI in that it includes a pipe L3 that connects the outlet 2d of the membrane gas separator 2 and the suction side of the pump 4.
  • the high-purity oxygen gas and the desorption gas are taken out by the PSA gas separation device 1 as in the first embodiment of FIG. Further, in the membrane gas separator 2, high-purity nitrogen gas is taken out by the membrane gas separation step, as in the first embodiment of FIG. 1, except that the permeation side of the gas separation membrane 2A is depressurized.
  • the membrane gas separation process in the second embodiment the inside of the adsorption tower in the adsorption process is sucked and depressurized by the operation of the pump 4, and at the same time, the permeation side of the gas separation membrane 2A is set to a pressure below atmospheric pressure. Depressurized.
  • the reduced pressure on the permeate side due to the operation of the pump 4 is, for example, 0.03 to 0.09 MPa.
  • the pressure reduction in the adsorption tower and the pressure reduction on the permeate side of the gas separation membrane 2A are performed by the single pump 4. Further, when the permeation side of the gas separation membrane 2A is depressurized, the oxygen partial pressure reducing gas G4 is stably supplied to the permeation side of the gas separation membrane 2A via the pipe L1.
  • the gas partial pressure reduction gas G4 is not only introduced into the permeation side of the gas separation membrane 2A.
  • the oxygen partial pressure of the desorption gas G1 from the adsorption tower and the oxygen content of the gas (combined gas G5) existing on the permeation side of the gas separation membrane 2A are reduced.
  • a larger difference can be provided between the pressure and the pressure than when pressure is not reduced. This Increase the driving force for oxygen permeation in the gas separation membrane 2A and increase the amount of non-permeate gas (high purity nitrogen gas) G3 generated in the membrane gas separation process! It also helps.
  • FIG. 3 shows an oxygen / nitrogen parallel separation system X3 according to a third embodiment of the present invention.
  • the oxygen / nitrogen parallel separation system X3 is different from the oxygen / nitrogen parallel separation system X2 shown in FIG. 2 in that it is provided with a pipe L1 'instead of the pipe L1 and further provided with a pressure control valve 11. .
  • the pipe L1 ′ is configured to connect the discharge side of the compressor 6 and the inlet 2b of the membrane gas separator 2.
  • Pipe L1 bypasses part of the desorbed gas (oxygen partial pressure reducing gas G4) discharged from the adsorption tower of the PSA gas separator 1 in the desorption process without passing through the gas separation membrane 2A. Therefore, it is for introduction to the permeation side of the gas separation membrane 2A.
  • the flow control valve 10 is provided in the pipe L1 ′.
  • the pressure control valve 11 is provided between the compressor 6 and the membrane gas separator 2, and is for adjusting the pressure of the desorption gas G1 introduced into the membrane gas separator 2. .
  • the PSA gas separation apparatus 1 takes out the high-purity oxygen gas and the desorption gas as in the first embodiment of FIG. Further, in the membrane gas separator 2, as in the first embodiment of FIG. 1, except that the permeation side of the gas separation membrane 2A is depressurized and the bypass path of the oxygen partial pressure reducing gas G4 is different. High purity nitrogen gas is taken out by the membrane gas separation process. In the membrane type gas separation step in the third embodiment, the inside of the adsorption tower in the adsorption step is sucked and reduced by the operation of the pump 4, and at the same time, the permeation side of the gas separation membrane 2A is reduced to a pressure lower than atmospheric pressure. Is done.
  • the pressure reduction in the adsorption tower and the pressure reduction on the permeation side of the gas separation membrane 2A are performed by a single pump 4 as in the second embodiment shown in FIG.
  • a part of the desorbed gas compressed through the compressor 6 is supplied to the permeation side of the gas separation membrane 2A through the pipe L1 as the oxygen partial pressure reducing gas G4.
  • the supply of the oxygen partial pressure reducing gas G4 is continuously and stably performed.
  • the oxygen partial pressure reducing gas G4 is introduced into the permeation side of the gas separation membrane 2A and the gas component is separated.
  • the oxygen partial pressure of the desorption gas G1 from the adsorption tower and the desorption gas G1 exist on the permeation side separated by the gas separation membrane 2A.
  • the driving force for oxygen permeation in the gas separation membrane 2A is increased, and the amount of non-permeate gas (high purity nitrogen gas) G3 generated in the membrane gas separation step can be increased.
  • the pressure reduction on the permeation side of the gas separation membrane 2A is performed by the pump 4 for depressurizing the inside of the adsorption tower of the PSA gas separation device 1.
  • the pump 4 for depressurizing the inside of the adsorption tower of the PSA gas separation device 1.
  • a separate pump may be provided to depressurize the permeate side of the gas separation membrane 2A.
  • FIG. 4 shows an oxygen / nitrogen parallel separation system X4 according to a fourth embodiment of the present invention.
  • the oxygen / nitrogen parallel separation system X4 differs from the oxygen / nitrogen parallel separation system XI shown in FIG. 1 in that it includes a dedicated pump 12 for decompressing the permeation side of the gas separation membrane 2A.
  • the pump 12 is, for example, a vacuum pump, and is connected to the outlet 2d of the membrane gas separator 2 via a predetermined pipe.
  • the permeation side of the gas separation membrane 2A is depressurized to a pressure lower than atmospheric pressure by the operation of the pump 12.
  • the combined gas G5 on the permeate side of the gas separation membrane 2A is led out of the membrane gas separator 2 from the outlet 2d, and then discharged out of the system through the pump 12.
  • the oxygen partial pressure reducing gas G4 is passed through the permeation side of the gas separation membrane 2A in the same manner as the oxygen / nitrogen parallel separation system X2 shown in FIG.
  • the oxygen partial pressure of the desorbed gas G1 from the adsorption tower and the gas existing on the permeate side of the gas separation membrane 2A (confluence) A large difference can be made between the oxygen partial pressure of gas G5).
  • Example 1 the oxygen / nitrogen parallel separation system X3 shown in FIG. 3 was used to separate oxygen gas (oxygen-enriched gas) and nitrogen gas (nitrogen-enriched gas) from air in parallel.
  • Oxygen ⁇ The specific configuration of the parallel nitrogen separation system X3 is as follows.
  • a PSA gas separation device 1 was a two-column PSA oxygen separation device.
  • Each adsorption tower of this equipment had a cylindrical shape with a diameter of 800 mm and a total length of 2038 mm, and each adsorption tower was filled with Li X-type zeolite molecular sieve at a filling height of 1025 mm.
  • the membrane gas separator 2 is a cylindrical container having an inner diameter of 50 mm and a length of 610 mm. In the container, a nitrogen fiber equipped with an asymmetric structure hollow fiber membrane module made of aromatic polyimide is used as the gas separation membrane 2A.
  • a separation membrane device (trade name: UBE N separator, model: NM—B05A, manufactured by Ube Industries) was used. Introduction of membrane gas separator 2
  • the inlets 2a and 2b are arranged so that the flow directions of the desorption gas G1 introduced through the inlet 2a and the oxygen partial pressure reducing gas G4 introduced through the inlet 2b are opposed to each other with the gas separation membrane interposed therebetween.
  • the membrane gas separator 2 was disposed at one end and the other end. Piping L3 is provided with a switching valve (not shown).
  • This switching valve connects the suction side of the pump 4 and the permeation side of the membrane gas separator 2 so that the permeation side is depressurized to below atmospheric pressure (hereinafter referred to as a depressurized state), and the pump 4
  • the suction side and the permeation side of the membrane gas separator 2 can be appropriately switched to a state where the permeation side communicates with the outside of the system via the switching valve (hereinafter referred to as a non-depressurized state). It was configured as follows.
  • air (temperature: 25 ° C., atmospheric pressure: 0.1 lOlMPa) is supplied at 485 Nm 3 / hou r as the oxygen / nitrogen-containing source gas.
  • the amount was introduced into the adsorption tower of PSA gas separator 1.
  • the pressure of the gas in the adsorption tower in the adsorption process was 0.141 MPa, and the pressure of the desorption gas in the adsorption tower in the desorption process was 0.003 MPa.
  • the oxygen-enriched gas led out of the PSA gas separator 1 in the adsorption process had an oxygen concentration of 90% and a gas amount of 62 Nm 3 / hour.
  • the desorption gas discharged to the outside of the PSA gas separation device 1 in the desorption process was compressed by the compressor 6 and then adjusted to 0.8 MPa by the pressure control valve 11.
  • the oxygen concentration of the desorption gas was about 5 to 16%, and on average about 10 to 11%.
  • This compressed desorption gas was introduced into the inlet 2a of the membrane gas separator 2.
  • the desorption gas passed through the inlet 2a.
  • the gas G1 was separated into a permeate gas G2 that permeates the gas separation membrane 2A, and a non-permeate gas G3 that does not permeate the gas separation membrane 2A (that is, a nitrogen-enriched gas that has passed through the inside of the hollow fiber).
  • the non-permeating gas G3 was appropriately adjusted by the oxygen concentration control device 8 so that the oxygen concentration was 1%, 2%, and 3%.
  • a part of the compressed desorption gas oxygen partial pressure reducing gas G4 is supplied to the permeation side of the gas separation membrane 2A via the pipe L1 and the inlet 2b of the membrane gas separator 2. It was.
  • the amount of oxygen partial pressure reduction gas G4 supplied to the permeation side of gas separation membrane 2A was adjusted by flow control valve 10 so that the oxygen concentration of combined gas G5 on the permeation side was 14.4%. .
  • the switching valve provided in the pipe L3 was switched so that the permeation side was in a depressurized state, and the permeation side of the gas separation membrane 2A was depressurized to less than atmospheric pressure.
  • Table 1 below shows the generation amount of the non-permeate gas G3 and the permeation rate of the gas separation membrane 2A when the oxygen concentration of the non-permeate gas G3 is adjusted to 1%, 2%, and 3%. The difference in oxygen partial pressure between the gas permeation side and the non-permeation side, and the oxygen concentration of the combined gas G5 on the permeation side are shown.
  • Example 2 as in Example 1, the oxygen / nitrogen parallel separation system X3 was used to separate oxygen gas and nitrogen gas from air in parallel.
  • the material gas supply mode and system operating conditions were the same as in Example 1.
  • the gas flow state in the force system was different from Example 1.
  • the switching valve provided in the pipe L3 was switched so that the permeation side of the gas separation membrane 2A was in a non-depressurized state. That is, the permeate side communicated with the outside of the system via the switching valve, and the pressure was equivalent to the atmospheric pressure.
  • Example 2 is substantially the same as that performed using the oxygen / nitrogen parallel separation system XI shown in FIG.
  • Table 2 below shows a case where the oxygen concentration of the non-permeating gas G3 is adjusted to 1%, 2%, and 3%. The amount of each non-permeate gas G3 generated, the difference in oxygen partial pressure between the permeate side and the non-permeate side of the gas separation membrane 2A, and the oxygen concentration of the combined gas G5 on the permeate side are shown.
  • Example 1 the oxygen / nitrogen parallel separation system X3 was used to separate oxygen gas and nitrogen gas from air in parallel.
  • the material gas supply mode and system operating conditions were the same as in Example 1.
  • the gas flow state in the force system was different from Example 1.
  • the switching valve provided in the pipe L3 was switched so that the permeation side of the gas separation membrane 2A was in a non-depressurized state. That is, the permeate side communicated with the outside of the system via the switching valve, and the pressure was equivalent to the atmospheric pressure.
  • the inlet 2b of the membrane gas separator 2 was closed, and the supply of the oxygen partial pressure reducing gas G4 to the permeation side of the gas separation membrane 2A via the pipe L1 ′ was not performed.
  • Table 3 below shows the generation amount of the non-permeate gas G3 and the permeation rate of the gas separation membrane 2A when the oxygen concentration of the non-permeate gas G3 is adjusted to 1%, 2%, and 3%. The difference in oxygen partial pressure between the gas permeation side and the non-permeation side, and the oxygen concentration of the permeation gas G2 on the permeation side are shown.
  • Example 1 the gas separation membrane 2A is introduced to the permeation side of the gas separation membrane 2A, and the permeation side is decompressed to less than atmospheric pressure to reduce the gas separation membrane as compared with Comparative Example 1.
  • the difference in oxygen partial pressure between 2A permeate side and non-permeate side is 1.36 ⁇ : L 55 times, non-permeate gas
  • the amount of G3 increased from 1.75 to 2.40 times.
  • Example 2 the pressure on the permeation side of the gas separation membrane 2A remains at atmospheric pressure, and the oxygen partial pressure reducing gas G4 is introduced to the permeation side of the gas separation membrane 2A.
  • the difference in oxygen partial pressure between the permeate side and the non-permeate side of gas separation membrane 2A was 1.01 ⁇ : L 19 times, and the amount of non-permeate gas G3 increased to 1. 05-1.66 times.

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Separation Of Gases By Adsorption (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
  • Oxygen, Ozone, And Oxides In General (AREA)

Abstract

La présente invention concerne un procédé de séparation simultanée de l'oxygène et de l'azote comprenant l'étape de séparation des gaz par adsorption modulée en pression (AMP) qui est réalisée dans un appareil de séparation de gaz par AMP (1) et l'étape de séparation des gaz à travers une membrane qui est réalisée dans un séparateur de gaz à membrane (2). Dans l'étape de séparation de gaz par AMP, un gaz riche en oxygène est éliminé d'un gaz contenant de l'oxygène et de l’azote (par exemple l’air) par un procédé de séparation des gaz par adsorption modulée en pression qui est effectué en utilisant une colonne d'adsorption remplie d'un adsorbant qui peut adsorber l'azote préférentiellement et, simultanément, un gaz désorbé qui contient principalement de l'azote mais contient également de l'oxygène est éliminé. Dans l'étape de séparation des gaz à travers une membrane, un gaz désorbé fournit à partir de l'appareil de séparation des gaz par AMP (1) est fractionné en un gaz qui peut passer à travers une membrane de séparation de gaz (2A) et un gaz qui ne peut pas (un gaz riche en azote), tout en introduisant une partie du gaz désorbé dans une fraction qui est passée à travers la membrane de séparation de gaz (2A) sans le faire passer à travers la membrane de séparation de gaz (2A).
PCT/JP2006/316312 2005-08-22 2006-08-21 Procédé de séparation simultanée de gaz d’oxygène et de gaz d’azote, et système de séparation simultanée WO2007023761A1 (fr)

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RU2443461C1 (ru) * 2010-08-25 2012-02-27 Евгений Владимирович Левин Адсорбционно-мембранный способ разделения газовых смесей
CN103101891A (zh) * 2011-11-10 2013-05-15 大阳日酸株式会社 氮气制造方法、气体分离方法和氮气制造装置
CN107399723A (zh) * 2016-05-19 2017-11-28 拜默实验设备（上海）股份有限公司 一种连续制备高纯度氮气的装置
JP2019013883A (ja) * 2017-07-07 2019-01-31 株式会社Ihi ガス分離システム
WO2023064040A1 (fr) * 2021-10-15 2023-04-20 Frito-Lay North America, Inc. Système de génération d'azote gazeux hybride

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JPH0549697A (ja) * 1991-08-22 1993-03-02 Sanyo Denshi Kogyo Kk 医療用ｐｓａ式酸素濃縮器
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Publication number Priority date Publication date Assignee Title
RU2443461C1 (ru) * 2010-08-25 2012-02-27 Евгений Владимирович Левин Адсорбционно-мембранный способ разделения газовых смесей
CN103101891A (zh) * 2011-11-10 2013-05-15 大阳日酸株式会社 氮气制造方法、气体分离方法和氮气制造装置
CN107399723A (zh) * 2016-05-19 2017-11-28 拜默实验设备（上海）股份有限公司 一种连续制备高纯度氮气的装置
CN107399723B (zh) * 2016-05-19 2023-06-13 拜默实验设备（上海）股份有限公司 一种连续制备高纯度氮气的装置
JP2019013883A (ja) * 2017-07-07 2019-01-31 株式会社Ihi ガス分離システム
WO2023064040A1 (fr) * 2021-10-15 2023-04-20 Frito-Lay North America, Inc. Système de génération d'azote gazeux hybride
US11717785B2 (en) 2021-10-15 2023-08-08 Frito-Lay North America, Inc. Hybrid nitrogen gas generation system

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