WO2006132455A1 - Vacuum gate valve - Google Patents

Vacuum gate valve Download PDF

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Publication number
WO2006132455A1
WO2006132455A1 PCT/KR2005/002827 KR2005002827W WO2006132455A1 WO 2006132455 A1 WO2006132455 A1 WO 2006132455A1 KR 2005002827 W KR2005002827 W KR 2005002827W WO 2006132455 A1 WO2006132455 A1 WO 2006132455A1
Authority
WO
WIPO (PCT)
Prior art keywords
disk
gate valve
fluid passage
vacuum
ring
Prior art date
Application number
PCT/KR2005/002827
Other languages
French (fr)
Inventor
Byoung Chun Choi
Original Assignee
Teratech Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Teratech Co., Ltd. filed Critical Teratech Co., Ltd.
Publication of WO2006132455A1 publication Critical patent/WO2006132455A1/en

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67772—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving removal of lid, door, cover
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/029—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with two or more gates
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/0254—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor being operated by particular means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/22—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with sealing faces shaped as surfaces of solids of revolution
    • F16K3/24—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with sealing faces shaped as surfaces of solids of revolution with cylindrical valve members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K35/00—Means to prevent accidental or unauthorised actuation
    • F16K35/02—Means to prevent accidental or unauthorised actuation to be locked or disconnected by means of a pushing or pulling action
    • F16K35/027—Means to prevent accidental or unauthorised actuation to be locked or disconnected by means of a pushing or pulling action the locking mechanism being actuated by pushing or pulling the valve actuator, the valve actuator being rotated subsequently to bring the valve closure element in the desired position
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations

Definitions

  • the present invention relates to a vacuum gate valve, and more particularly to a vacuum gate valve for preventing foreign substances from being accumulated at a region, in which a disk slides.
  • a vacuum gate valve is installed between a vacuum pump and an outlet of a process chamber of semiconductor and LCD manufacturing apparatuses so as to open and close piping lines when subsidiary equipment, such as pipes and the vacuum pump, is repaired and maintained.
  • Conventional vacuum gate valves are divided into manually operated gate valves and automatically operated gate valves.
  • the automatically operated gate valves include a pneumatic gate valve operated by compressed air and an electric gate valve operated by electricity.
  • the vacuum gate valve discharges by-products, such as powder generated in semiconductor and LCD manufacturing processes, as well as fluid, the by-products are accumulated in the gate valve. Particularly, when the by-products are accumulated in a region of the vacuum gate valve, in which a disk for opening and closing the gate valve slides, the vacuum gate valve cannot be smoothly opened and closed, and thus malfunctions.
  • the present invention has been made in view of the above problems, and it is an object of the present invention to provide a vacuum gate valve, which prevents malfunction caused by by-products generated during a process.
  • a vacuum gate valve comprising: a disk; an actuator for sliding the disk; a body comprising an influx portion having an inlet, an efflux portion having an outlet, a fluid passage connecting the influx portion and efflux portion, and a disk access hole, within which the disk is located when the disk slides to open the fluid passage; and a ring connected to the front end of the disk, and sliding together with the sliding of the disk so that the ring is located at the front end of the disk access hole and contacts the inner wall of the fluid passage when the disk is located within the disk access hole.
  • the disk and the ring may be installed on a single plate slid by the actuator, and a hole may be formed through a designated region, of the plate, in which an opening of the ring is located.
  • the disk may be installed on a plate slid by the actuator, and the ring may be located in a hole formed through the plate.
  • the disk may not contact the surface of the plate, and a plurality of holes may be vertically formed through a region of the plate, in which the disk is installed.
  • the vacuum gate valve may further comprises an auxiliary gate valve comprising: a body comprising an auxiliary fluid passage connecting the influx portion and the efflux portion; an auxiliary disk for opening and closing the auxiliary fluid passage; and an actuator for sliding the auxiliary disk to open and close the auxiliary fluid passage.
  • an auxiliary gate valve comprising: a body comprising an auxiliary fluid passage connecting the influx portion and the efflux portion; an auxiliary disk for opening and closing the auxiliary fluid passage; and an actuator for sliding the auxiliary disk to open and close the auxiliary fluid passage.
  • the vacuum gate valve of the present invention when it is opened, maintains the flow of a fluid, through the fluid passage, by means of the ring, and prevents by- products, generated during a process, from being accumulated therein. Since the vacuum gate valve, which consists of the main gate valve and the auxiliary gate valve, controls the suction rate of a vacuum pump, the vacuum pump is not overloaded even in the initial stage. Accordingly, the vacuum gate valve prevents the vacuum pump and incidental equipment from being damaged, drastically reduces repair and maintenance costs compared to conventional vacuum gate valves, and shortens downtime of the equipment caused by the damage to the vacuum pump, thus increasing the productivity.
  • FIG. 1 is a schematic view of a vacuum gate valve in accordance with a first embodiment of the present invention in an opened state;
  • FIG. 2 is a schematic view of the vacuum gate valve in accordance with the first embodiment of the present invention in a closed state
  • FIG. 3 is a schematic view of the vacuum gate valve in accordance with the first embodiment of the present invention in the opened state, illustrating some components of the vacuum gate valve for more clear expression;
  • FIGS. 4 to 6 are schematic views illustrating the operation of a vacuum gate valve with an auxiliary gate valve in accordance with a second embodiment of the present invention.
  • FIG. 1 is a schematic view of a vacuum gate valve in accordance with a first embodiment of the present invention in an opened state.
  • FIG. 2 is a schematic view of the vacuum gate valve in accordance with the first embodiment of the present invention in a closed state.
  • FIG. 3 is a schematic view of the vacuum gate valve in accordance with the first embodiment of the present invention in the opened state, illustrating some components of the vacuum gate valve for more clear expression.
  • the vacuum gate valve in accordance with the first embodiment of the present invention comprises a body 1 10, a disk 120, an actuator 130 for sliding the disk 120, and a ring 140.
  • the body 110 comprises an influx portion (not shown) having an inlet, an efflux portion (not shown) having an outlet, a fluid passage 1 1 1 connecting the influx portion and efflux portion, and a disk access hole (not shown).
  • an influx portion (not shown) having an inlet
  • an efflux portion (not shown) having an outlet
  • a fluid passage 1 1 1 connecting the influx portion and efflux portion and a disk access hole (not shown).
  • the ring 140 is connected to the front end of the disk 120 so that the ring 140 slides together with the sliding of the disk 130.
  • the ring 140 is located at the front end of the disk access hole and contacts the inner wall of the fluid passage 11 1.
  • the ring 140 maintains the flow of a fluid through the fluid passage 1 11, and prevents by-products, generated during a process, from being accumulated in the disk access hole, i.e., the body 1 10 of the vacuum gate valve.
  • the disk 120 and the ring 140 are installed on a single plate 150. It is obvious that a hole is formed through a region, of the plate 150, in which an opening of the ring 140 is located. A hole is formed through a designated region of the plate 150, and the ring 140 is installed in the hole. Further, the disk 120 is installed on the plate 150 such that the disk 120 does not contact the plate 150 and is separated from the surface of the plate 150 by a designated gap. A plurality of holes may be formed through a region, of the plate 150, on which the disk 120 is installed.
  • a vacuum gate valve in accordance with a second embodiment of the present invention further comprises an auxiliary gate valve for preventing a system, i.e., a vacuum pump, from being momentarily overloaded when the vacuum pump is re- operated.
  • a system i.e., a vacuum pump
  • main gate valve for preventing a system, i.e., a vacuum pump
  • FIGS. 4 to 6 are schematic views illustrating the operation of a vacuum gate valve in accordance with the second embodiment of the present invention, which further comprises an auxiliary gate valve.
  • the ring 140 is installed in a hole formed through the plate 150, the disk 120 is installed on the plate
  • the disk 120 is separated from the surface of the plate 150, and a plurality of holes vertically formed through the plate 150 are formed at a region, of the plate 150, on which the disk 120 is installed.
  • the auxiliary gate valve comprises a body 210, a disk 220, and an actuator.
  • a fluid passage 211 (hereinafter, referred to as an "auxiliary fluid passage"), which is formed through the body 210 of the auxiliary gate valve, is connected to the influx portion 112 and the efflux portion 1 13 of the above-described main gate valve.
  • the body 210 of the auxiliary gate valve is separated from the main gate valve in this embodiment, the body 210 of the auxiliary gate valve may be installed in the body 1 10 of the main gate valve.
  • the vacuum gate valve in accordance with the second embodiment of the present invention comprises the main gate valve and the auxiliary gate valve, thus controlling the suction rate of the vacuum pump. Consequently, the system, such as the vacuum pump, is not overloaded even in the initial operation state, and it is possible to prevent the damage to the vacuum pump and incidental equipment.
  • the actuator of the gate valve of the present invention will be described in detail.
  • the actuator which will be described, is commonly used in the main gate valve and the auxiliary gate valve.
  • the actuator is not limited to the below configuration, and may be variously modified.
  • the actuator 130 is a pneumatic-type actuator, which is operated by compressed air.
  • the actuator 130 comprises an air cylinder 132 having a piston 131 reciprocated by compressed air supplied from the outside, and a link 133 for connecting the piston 131 and the disk 120 or 220.
  • Entrances 134 and 135, which are connected to a compressed air supplier installed outside, are formed through both ends of the air cylinder 132, between which the piston 131 is interposed.
  • the compressed air is introduced into the air cylinder 132 through the entrance 134 formed through one end of the air cylinder 132, and when the disk 120 or 220 slides to open the fluid passage formed through the body 1 10 or 210 of the main gate valve or the auxiliary gate valve, the compressed air is introduced into the air cylinder 132 through the entrance 135 formed through the other end of the air cylinder 132.
  • designated regions of the link 133 must be respectively inserted into the body 110 or 210 and the air cylinder 132.
  • designated holes are respectively formed through the body 1 10 or 210 and the air cylinder 132.
  • foreign substances may be introduced into the body 1 10 or 210 and the air cylinder 132 through the holes.
  • a bellows 136 is installed to seal a designated region of the exposed portion of the link 133.

Abstract

Disclosed is a vacuum gate valve. The vacuum gate valve comprises a disk; an actuator for sliding the disk; a body comprising an influx portion having an inlet, an efflux portion having an outlet, a fluid passage connecting the influx portion and efflux portion, and a disk access hole, within which the disk is located when the disk slides to open the fluid passage; and a ring connected to the front end of the disk, and sliding together with the sliding of the disk so that the ring is located at the front end of the disk access hole and contacts the inner wall of the fluid passage when the disk is located within the disk access hole. When the vacuum gate valve is opened, the ring maintains the flow of the fluid through the fluid passage, and prevents by-products, generated in a process, from being accumulated in the body.

Description

[DESCRIPTION]
[Invention Title]
VACUUM GATE VALVE
[Technical Field]
The present invention relates to a vacuum gate valve, and more particularly to a vacuum gate valve for preventing foreign substances from being accumulated at a region, in which a disk slides.
[Background Art]
In general, a vacuum gate valve is installed between a vacuum pump and an outlet of a process chamber of semiconductor and LCD manufacturing apparatuses so as to open and close piping lines when subsidiary equipment, such as pipes and the vacuum pump, is repaired and maintained. Conventional vacuum gate valves are divided into manually operated gate valves and automatically operated gate valves.
The automatically operated gate valves include a pneumatic gate valve operated by compressed air and an electric gate valve operated by electricity.
Since the vacuum gate valve discharges by-products, such as powder generated in semiconductor and LCD manufacturing processes, as well as fluid, the by-products are accumulated in the gate valve. Particularly, when the by-products are accumulated in a region of the vacuum gate valve, in which a disk for opening and closing the gate valve slides, the vacuum gate valve cannot be smoothly opened and closed, and thus malfunctions.
[Disclosure] [Technical Problem]
Therefore, the present invention has been made in view of the above problems, and it is an object of the present invention to provide a vacuum gate valve, which prevents malfunction caused by by-products generated during a process.
[Technical Solution]
In accordance with an aspect of the present invention, the above and other objects can be accomplished by the provision of a vacuum gate valve comprising: a disk; an actuator for sliding the disk; a body comprising an influx portion having an inlet, an efflux portion having an outlet, a fluid passage connecting the influx portion and efflux portion, and a disk access hole, within which the disk is located when the disk slides to open the fluid passage; and a ring connected to the front end of the disk, and sliding together with the sliding of the disk so that the ring is located at the front end of the disk access hole and contacts the inner wall of the fluid passage when the disk is located within the disk access hole.
Preferably, the disk and the ring may be installed on a single plate slid by the actuator, and a hole may be formed through a designated region, of the plate, in which an opening of the ring is located. Further, the disk may be installed on a plate slid by the actuator, and the ring may be located in a hole formed through the plate. Moreover, the disk may not contact the surface of the plate, and a plurality of holes may be vertically formed through a region of the plate, in which the disk is installed.
Preferably, the vacuum gate valve may further comprises an auxiliary gate valve comprising: a body comprising an auxiliary fluid passage connecting the influx portion and the efflux portion; an auxiliary disk for opening and closing the auxiliary fluid passage; and an actuator for sliding the auxiliary disk to open and close the auxiliary fluid passage.
[Advantageous Effects]
The vacuum gate valve of the present invention, when it is opened, maintains the flow of a fluid, through the fluid passage, by means of the ring, and prevents by- products, generated during a process, from being accumulated therein. Since the vacuum gate valve, which consists of the main gate valve and the auxiliary gate valve, controls the suction rate of a vacuum pump, the vacuum pump is not overloaded even in the initial stage. Accordingly, the vacuum gate valve prevents the vacuum pump and incidental equipment from being damaged, drastically reduces repair and maintenance costs compared to conventional vacuum gate valves, and shortens downtime of the equipment caused by the damage to the vacuum pump, thus increasing the productivity.
Although the preferred embodiments of the present invention have been disclosed for illustrative purposes, those skilled in the art will appreciate that various modifications, additions and substitutions are possible, without departing from the scope and spirit of the invention as disclosed in the accompanying claims.
[Description of Drawings]
The above and other objects, features and other advantages of the present invention will be more clearly understood from the following detailed description taken in conjunction with the accompanying drawings, in which:
FIG. 1 is a schematic view of a vacuum gate valve in accordance with a first embodiment of the present invention in an opened state;
FIG. 2 is a schematic view of the vacuum gate valve in accordance with the first embodiment of the present invention in a closed state;
FIG. 3 is a schematic view of the vacuum gate valve in accordance with the first embodiment of the present invention in the opened state, illustrating some components of the vacuum gate valve for more clear expression; and
FIGS. 4 to 6 are schematic views illustrating the operation of a vacuum gate valve with an auxiliary gate valve in accordance with a second embodiment of the present invention.
[Best Mode]
Now, preferred embodiments of the present invention will be described in detail with reference to the annexed drawings.
[First Embodiment]
FIG. 1 is a schematic view of a vacuum gate valve in accordance with a first embodiment of the present invention in an opened state. FIG. 2 is a schematic view of the vacuum gate valve in accordance with the first embodiment of the present invention in a closed state. FIG. 3 is a schematic view of the vacuum gate valve in accordance with the first embodiment of the present invention in the opened state, illustrating some components of the vacuum gate valve for more clear expression. With reference to FIGS. 1 to 3, the vacuum gate valve in accordance with the first embodiment of the present invention comprises a body 1 10, a disk 120, an actuator 130 for sliding the disk 120, and a ring 140.
The body 110 comprises an influx portion (not shown) having an inlet, an efflux portion (not shown) having an outlet, a fluid passage 1 1 1 connecting the influx portion and efflux portion, and a disk access hole (not shown). When the disk 120 slides to open the fluid passage 111, the disk 120 is located within the disk access hole.
The ring 140 is connected to the front end of the disk 120 so that the ring 140 slides together with the sliding of the disk 130. When the disk 120 is located within the disk access hole, that is, when the vacuum gate valve is opened, the ring 140 is located at the front end of the disk access hole and contacts the inner wall of the fluid passage 11 1.
Therefore, when the vacuum gate valve is opened, the ring 140 maintains the flow of a fluid through the fluid passage 1 11, and prevents by-products, generated during a process, from being accumulated in the disk access hole, i.e., the body 1 10 of the vacuum gate valve.
In this embodiment of the present invention, in order to cause the interlocking of the disk 120 and the ring 140 and to effectively prevent the accumulation of byproducts at a region in which the disk 120 slides, the disk 120 and the ring 140 are installed on a single plate 150. It is obvious that a hole is formed through a region, of the plate 150, in which an opening of the ring 140 is located. A hole is formed through a designated region of the plate 150, and the ring 140 is installed in the hole. Further, the disk 120 is installed on the plate 150 such that the disk 120 does not contact the plate 150 and is separated from the surface of the plate 150 by a designated gap. A plurality of holes may be formed through a region, of the plate 150, on which the disk 120 is installed.
[Second Embodiment]
A vacuum gate valve in accordance with a second embodiment of the present invention further comprises an auxiliary gate valve for preventing a system, i.e., a vacuum pump, from being momentarily overloaded when the vacuum pump is re- operated. Hereinafter, the vacuum gate valve in accordance with the first embodiment is referred to as a "main gate valve".
FIGS. 4 to 6 are schematic views illustrating the operation of a vacuum gate valve in accordance with the second embodiment of the present invention, which further comprises an auxiliary gate valve.
With reference to FIGS. 4 to 6, in the main gate valve, the ring 140 is installed in a hole formed through the plate 150, the disk 120 is installed on the plate
150 such that the disk 120 is separated from the surface of the plate 150, and a plurality of holes vertically formed through the plate 150 are formed at a region, of the plate 150, on which the disk 120 is installed.
In the same manner as the main gate valve, the auxiliary gate valve comprises a body 210, a disk 220, and an actuator. A fluid passage 211 (hereinafter, referred to as an "auxiliary fluid passage"), which is formed through the body 210 of the auxiliary gate valve, is connected to the influx portion 112 and the efflux portion 1 13 of the above-described main gate valve. Although the body 210 of the auxiliary gate valve is separated from the main gate valve in this embodiment, the body 210 of the auxiliary gate valve may be installed in the body 1 10 of the main gate valve.
Now, the operation of the vacuum gate valve in accordance with this embodiment will be described. When a system, such as a vacuum pump, is stopped in order to repair and maintain the vacuum pump or incidental equipment, such as vacuum pipes, the fluid passage of the main gate valve and the auxiliary fluid passage 21 1 of the auxiliary gate valve are closed, as shown in FIG. 4. Then, when the system, i.e., the vacuum pump, is re-operated, only the auxiliary fluid passage 21 1 of the auxiliary gate valve is opened, as shown in FIG. 5, so that the vacuum pump is not momentarily overloaded. Thereby, air in a chamber is sucked into the vacuum pump through the auxiliary fluid passage 211 and a gap between the disk 120 and the plate
150 of the main gate valve. Thereafter, when the main gate valve is opened, as shown in FIG. 6, the air in the chamber is sucked into the vacuum pump through the fluid passage of the main gate valve, and the chamber is maintained in a vacuum state.
As described above, the vacuum gate valve in accordance with the second embodiment of the present invention comprises the main gate valve and the auxiliary gate valve, thus controlling the suction rate of the vacuum pump. Consequently, the system, such as the vacuum pump, is not overloaded even in the initial operation state, and it is possible to prevent the damage to the vacuum pump and incidental equipment. Hereinafter, the actuator of the gate valve of the present invention will be described in detail. The actuator, which will be described, is commonly used in the main gate valve and the auxiliary gate valve. The actuator is not limited to the below configuration, and may be variously modified.
With reference to FIGS. 1 to 5, the actuator 130 is a pneumatic-type actuator, which is operated by compressed air. The actuator 130 comprises an air cylinder 132 having a piston 131 reciprocated by compressed air supplied from the outside, and a link 133 for connecting the piston 131 and the disk 120 or 220. Entrances 134 and 135, which are connected to a compressed air supplier installed outside, are formed through both ends of the air cylinder 132, between which the piston 131 is interposed. Accordingly, when the disk 120 or 220 slides to close the fluid passage formed through the body 1 10 or 210 of the main gate valve or the auxiliary gate valve, the compressed air is introduced into the air cylinder 132 through the entrance 134 formed through one end of the air cylinder 132, and when the disk 120 or 220 slides to open the fluid passage formed through the body 1 10 or 210 of the main gate valve or the auxiliary gate valve, the compressed air is introduced into the air cylinder 132 through the entrance 135 formed through the other end of the air cylinder 132. In order to connect the disk 120 or 220 and the piston 131, designated regions of the link 133 must be respectively inserted into the body 110 or 210 and the air cylinder 132. For this reason, designated holes are respectively formed through the body 1 10 or 210 and the air cylinder 132. Here, foreign substances may be introduced into the body 1 10 or 210 and the air cylinder 132 through the holes. In order to prevent the foreign substances from being introduced into the body 110 or 210 and the air cylinder 132 through the holes, a bellows 136 is installed to seal a designated region of the exposed portion of the link 133.

Claims

[CLAIMS]
[Claim 1 ] A vacuum gate valve comprising: a disk; an actuator for sliding the disk; a body comprising an influx portion having an inlet, an efflux portion having an outlet, a fluid passage connecting the influx portion and efflux portion, and a disk access hole, within which the disk is located when the disk slides to open the fluid passage; and a ring connected to the front end of the disk, and sliding together with the sliding of the disk so that the ring is located at the front end of the disk access hole and contacts the inner wall of the fluid passage when the disk is located within the disk access hole.
[Claim 2] The vacuum gate valve as set forth in claim 1 , wherein the disk and the ring are installed on a single plate slid by the actuator, and a hole is formed through a designated region, of the plate, in which an opening of the ring is located.
[Claim 3 ] The vacuum gate valve as set forth in claim 1, wherein the disk is installed on a plate slid by the actuator, and the ring is located in a hole formed through the plate.
[Claim 4] The vacuum gate valve as set forth in claim 2 or 3, wherein the disk does not contact the surface of the plate, and a plurality of holes are vertically formed through a region of the plate, in which the disk is installed.
[Claim 5] The vacuum gate valve as set forth in claim 1 , further comprising an auxiliary gate valve comprising: a body comprising an auxiliary fluid passage connecting the influx portion and the efflux portion; an auxiliary disk for opening and closing the auxiliary fluid passage; and an actuator for sliding the auxiliary disk to open and close the auxiliary fluid passage.
PCT/KR2005/002827 2005-06-08 2005-08-26 Vacuum gate valve WO2006132455A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020050048939A KR100539691B1 (en) 2005-06-08 2005-06-08 Vacuum gate valve
KR10-2005-0048939 2005-06-08

Publications (1)

Publication Number Publication Date
WO2006132455A1 true WO2006132455A1 (en) 2006-12-14

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Family Applications (1)

Application Number Title Priority Date Filing Date
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Country Status (2)

Country Link
KR (1) KR100539691B1 (en)
WO (1) WO2006132455A1 (en)

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KR20230136954A (en) 2022-03-21 2023-10-04 주식회사 아스트로텍 Vacuum gate valve and vacuum system having the same
KR20240015983A (en) 2022-07-28 2024-02-06 고병혁 Sensor-integrated vacuum valve for pressure control and vacuum system having the same

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JPS62242184A (en) * 1986-04-09 1987-10-22 Hitachi Zosen Corp Cleaning method for valve plate whole surface seal type gate valve
JPH01254373A (en) * 1988-04-01 1989-10-11 Stopinc Ag Lower immobile plate of three plate type gate valve for metallurgical vessel
US6681790B2 (en) * 2001-10-03 2004-01-27 Itt Manufacturing Enterprises, Inc. Ported slide gate valve with gate motion to break scale build up

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US4010928A (en) * 1974-12-27 1977-03-08 Xomox Corporation Piston-operated parallel-slide gate valve
JPS62242184A (en) * 1986-04-09 1987-10-22 Hitachi Zosen Corp Cleaning method for valve plate whole surface seal type gate valve
JPH01254373A (en) * 1988-04-01 1989-10-11 Stopinc Ag Lower immobile plate of three plate type gate valve for metallurgical vessel
US6681790B2 (en) * 2001-10-03 2004-01-27 Itt Manufacturing Enterprises, Inc. Ported slide gate valve with gate motion to break scale build up

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WO2009057513A1 (en) * 2007-11-02 2009-05-07 V-Tex Corporation Vacuum gate valve, and gate opening/closing method using the gate valve
US8448917B2 (en) 2007-11-02 2013-05-28 V-Tex Corporation Vacuum gate valve and a method of opening and closing gate using the same
CN101849130B (en) * 2007-11-02 2013-06-26 株式会社V泰克斯 Vacuum gate valve, and gate opening/closing method using the gate valve

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