WO2006125426A8 - Vorrichtung zur reinigung von innenräumen in vakuumkammern - Google Patents

Vorrichtung zur reinigung von innenräumen in vakuumkammern

Info

Publication number
WO2006125426A8
WO2006125426A8 PCT/DE2006/000894 DE2006000894W WO2006125426A8 WO 2006125426 A8 WO2006125426 A8 WO 2006125426A8 DE 2006000894 W DE2006000894 W DE 2006000894W WO 2006125426 A8 WO2006125426 A8 WO 2006125426A8
Authority
WO
WIPO (PCT)
Prior art keywords
cleaning
interior
electrode
vacuum chambers
vacuum
Prior art date
Application number
PCT/DE2006/000894
Other languages
English (en)
French (fr)
Other versions
WO2006125426A1 (de
Inventor
Frank Loeffler
Christian May
Original Assignee
Fraunhofer Ges Forschung
Frank Loeffler
Christian May
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fraunhofer Ges Forschung, Frank Loeffler, Christian May filed Critical Fraunhofer Ges Forschung
Publication of WO2006125426A1 publication Critical patent/WO2006125426A1/de
Publication of WO2006125426A8 publication Critical patent/WO2006125426A8/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B6/00—Cleaning by electrostatic means
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
    • C23C16/4407—Cleaning of reactor or reactor parts by using wet or mechanical methods
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
    • C23G5/00—Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32798—Further details of plasma apparatus not provided for in groups H01J37/3244 - H01J37/32788; special provisions for cleaning or maintenance of the apparatus
    • H01J37/32853—Hygiene
    • H01J37/32862—In situ cleaning of vessels and/or internal parts

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
  • Cleaning In General (AREA)

Abstract

Die Erfindung betrifft eine Vorrichtung zur Reinigung von Innenräumen in Vakuumkammern, wie sie insbesondere bei Anlagentechnik zur Oberflächenmodifizierung und Vakuumbeschichtungstechnologie auf unterschiedlichen Substraten eingesetzt werden. Dabei ist es Aufgabe der Erfindung, solche Innenräume effektiv zu reinigen und auch freie Partikel zu entfernen. Die erfindungsgemäße Vorrichtung weist dabei mindestens eine Elektrode, die auf einem Träger angeordnet ist, auf. Sie ist durch eine Vakuumkammer hindurch oder einführbar. Die Elektrode(n) ist an eine Gleichspannungsquelle angeschlossen oder kann an eine solche angeschlossen werden. Dadurch können elektrisch geladene oder polare Verunreinigungen elektrostatisch an mindestens einer Elektrode fixiert und aus einer Vakuumkammer mit der Vorrichtung entfernt werden.
PCT/DE2006/000894 2005-05-27 2006-05-16 Vorrichtung zur reinigung von innenräumen in vakuumkammern WO2006125426A1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE200510025101 DE102005025101B3 (de) 2005-05-27 2005-05-27 Vorrichtung zur Reinigung von Innenräumen in Vakuumkammern
DE102005025101.3 2005-05-27

Publications (2)

Publication Number Publication Date
WO2006125426A1 WO2006125426A1 (de) 2006-11-30
WO2006125426A8 true WO2006125426A8 (de) 2007-02-08

Family

ID=36599648

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/DE2006/000894 WO2006125426A1 (de) 2005-05-27 2006-05-16 Vorrichtung zur reinigung von innenräumen in vakuumkammern

Country Status (2)

Country Link
DE (1) DE102005025101B3 (de)
WO (1) WO2006125426A1 (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008008576A1 (de) * 2008-02-11 2009-08-20 Carl Freudenberg Kg Elektrostatischer Staubfänger

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1153787A (en) * 1965-09-01 1969-05-29 Libbey Owens Ford Glass Co Method and apparatus for Glow Cleaning
JPH06192857A (ja) * 1992-12-25 1994-07-12 Nec Corp ドライエッチング方法及びドライエッチング装置
JPH07195046A (ja) * 1994-01-12 1995-08-01 Mitsubishi Electric Corp 異物除去方法及び装置
CH688333A5 (de) * 1996-03-21 1997-08-15 Wenger Ernst Verfahren zum Entstauben von Oberflaechen und Vorrichtung zur Durchfuehrung des Verfahrens.
JP3623605B2 (ja) * 1996-07-22 2005-02-23 彰 水野 除塵プレート及び除塵装置
JP2004055748A (ja) * 2002-07-18 2004-02-19 Sharp Corp パーティクル除去装置
US6786222B2 (en) * 2002-10-25 2004-09-07 Motorola, Inc. Method for removing particles from a semiconductor processing tool

Also Published As

Publication number Publication date
DE102005025101B3 (de) 2006-07-13
WO2006125426A1 (de) 2006-11-30

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