WO2006101150A2 - Power semiconductor module - Google Patents

Power semiconductor module Download PDF

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Publication number
WO2006101150A2
WO2006101150A2 PCT/JP2006/305770 JP2006305770W WO2006101150A2 WO 2006101150 A2 WO2006101150 A2 WO 2006101150A2 JP 2006305770 W JP2006305770 W JP 2006305770W WO 2006101150 A2 WO2006101150 A2 WO 2006101150A2
Authority
WO
WIPO (PCT)
Prior art keywords
power semiconductor
capacitor
semiconductor module
electrodes
electrode
Prior art date
Application number
PCT/JP2006/305770
Other languages
French (fr)
Other versions
WO2006101150A3 (en
Inventor
Norifumi Furuta
Original Assignee
Toyota Jidosha Kabushiki Kaisha
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyota Jidosha Kabushiki Kaisha filed Critical Toyota Jidosha Kabushiki Kaisha
Priority to DE602006016247T priority Critical patent/DE602006016247D1/en
Priority to EP06729737A priority patent/EP1861878B1/en
Priority to US11/886,264 priority patent/US8269331B2/en
Publication of WO2006101150A2 publication Critical patent/WO2006101150A2/en
Publication of WO2006101150A3 publication Critical patent/WO2006101150A3/en

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
    • H01L25/16—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof the devices being of types provided for in two or more different main groups of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. forming hybrid circuits
    • H01L25/162—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof the devices being of types provided for in two or more different main groups of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. forming hybrid circuits the devices being mounted on two or more different substrates
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C3/00—Non-adjustable metal resistors made of wire or ribbon, e.g. coiled, woven or formed as grids
    • H01C3/06—Flexible or folding resistors, whereby such a resistor can be looped or collapsed upon itself
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L24/31—Structure, shape, material or disposition of the layer connectors after the connecting process
    • H01L24/33—Structure, shape, material or disposition of the layer connectors after the connecting process of a plurality of layer connectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805—Shape
    • H01L2224/4809—Loop shape
    • H01L2224/48091—Arched
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481—Disposition
    • H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48245—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
    • H01L2224/48247—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732—Location after the connecting process
    • H01L2224/73251—Location after the connecting process on different surfaces
    • H01L2224/73265—Layer and wire connectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/46—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids
    • H01L23/473—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids by flowing liquids
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10—Details of semiconductor or other solid state devices to be connected
    • H01L2924/11—Device type
    • H01L2924/13—Discrete devices, e.g. 3 terminal devices
    • H01L2924/1304—Transistor
    • H01L2924/1305—Bipolar Junction Transistor [BJT]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10—Details of semiconductor or other solid state devices to be connected
    • H01L2924/11—Device type
    • H01L2924/13—Discrete devices, e.g. 3 terminal devices
    • H01L2924/1304—Transistor
    • H01L2924/1305—Bipolar Junction Transistor [BJT]
    • H01L2924/13055—Insulated gate bipolar transistor [IGBT]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10—Details of semiconductor or other solid state devices to be connected
    • H01L2924/11—Device type
    • H01L2924/13—Discrete devices, e.g. 3 terminal devices
    • H01L2924/1304—Transistor
    • H01L2924/1306—Field-effect transistor [FET]
    • H01L2924/13091—Metal-Oxide-Semiconductor Field-Effect Transistor [MOSFET]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/30—Technical effects
    • H01L2924/301—Electrical effects
    • H01L2924/30107—Inductance

Definitions

  • the present invention relates to a semiconductor module and, more specifically, to a power semiconductor module containing a capacitor.
  • the inverter apparatus generally consists of a switching element such as an IGBT (insulated gate type bipolar transistor) and a rectifying diode element. To attain smaller size, it is sometimes provided as a module. It is often the case that a capacitor for surge absorption is placed close to the switching element. In a hybrid car that has severe cost and space restrictions, it is difficult to use a single part IGBT element and a single part capacitor element combined together, as such combination would increase cost and space.
  • IGBT insulated gate type bipolar transistor
  • Japanese Patent Laying-Open No. 2000-92847 discloses a semiconductor module apparatus with capacitor that realizes superior surge resistance performance.
  • An external case of the semiconductor module fixes a smoothing capacitor while pressing the capacitor to a cooling base. Therefore, assembly and fixing of the capacitor can be simplified, while cooling characteristic of the capacitor can be assured.
  • the shapes of the capacitor and of a power module containing power elements such as the IGBT are adapted to facilitate assembly.
  • the capacitor is still fixed by screws to terminals of the power module. Therefore, there is still a room for improvement to make shorter the physical distance between the power element and the capacitor, and to reduce inductance component of the fixing portion.
  • the technology addresses attachment of the cooler only on one side of the power element, and therefore, there is still a room for improvement in view of cooling performance.
  • a snubber circuit is for preventing a high spike voltage that generates in a state of transition at the time of switching, in a switching circuit that turns on/off the current flow.
  • the spike current results from inductance component of lines on the current flow path, and it is particularly large at the moment when the switch turns off.
  • a portion where a power semiconductor is mounted and a portion where the capacitor of a snubber circuit is placed are apart by a distance, and these portions are connected by a bus bar.
  • the bus bar has inductance component, and hence, energy stored therein would undesirably be reflected as a surge voltage.
  • An object of the present invention is to provide a power semiconductor module in which the capacitor and the power semiconductor element can be cooled satisfactorily and the surge voltage can be reduced.
  • the present invention provides a power semiconductor module including a power semiconductor element, and a capacitor connected to the power semiconductor element.
  • the power semiconductor element and the capacitor have their electrodes coupled to each other in the module.
  • the power semiconductor element is formed on a semiconductor substrate having first and second main surfaces.
  • the power semiconductor module further includes: a first electrode through which a main current flows, joined to the first main surface; a second electrode through which the main current flows, joined to the second main surface; and a resin portion sealing the semiconductor substrate, the capacitor and the first and second electrodes.
  • the capacitor includes third and fourth electrodes. The first and the third electrodes are joined to each other such that surfaces exposed through the resin portion are arranged on one, same continuous plane.
  • the power semiconductor module further includes a cooler attached to the surfaces exposed through the resin portion of the first and third electrodes.
  • the second and fourth electrodes are joined to each other such that surfaces exposed through the resin portion are arranged on one, same continuous plane.
  • the power semiconductor module further includes a cooler for cooling the capacitor and the power semiconductor element.
  • the cooler includes a first cooling portion attached commonly on the surfaces exposed through the resin portion of the first and third electrodes, and a second cooling portion attached commonly on the surfaces exposed through the resin portion of the second and fourth electrodes.
  • the first and second cooling portions are arranged to sandwich the power semiconductor element and the capacitor from opposite sides. More preferably, the power semiconductor module further includes first and second terminals respectively joined to the third and fourth electrodes, for taking out the • main current.
  • the power semiconductor module further includes a control electrode electrically connected to the semiconductor substrate and receiving as an input a control signal for controlling the main current.
  • a main advantage of the present invention is that, as the electrodes of the capacitor and the electrodes of the semiconductor element are arranged to be directly coupled to each other, the L component (inductance) and resistance component of the interconnecting lines can be reduced, and the surge voltage can also be reduced.
  • Fig. 1 is a circuit diagram illustrating a portion of a motor driving system in a car, to which the power semiconductor module of the present invention is applied.
  • Fig. 2 is a circuit diagram representing the configuration of a power semiconductor module 11 shown in Fig. 1.
  • Fig. 3 is a front view of power semiconductor module 11.
  • Fig. 4 is a cross-sectional view of power semiconductor module 11 taken along the line IV-IV of Fig. 3.
  • Fig. 5 shows a detailed structure of the cross-section of a capacitor 46 shown in Fig. 4.
  • Fig. 6 is a schematic perspective view illustrating the structure of capacitor 46.
  • Fig. 7 is a cross-sectional view showing the power semiconductor module with a cooler attached.
  • Fig. 8 is a circuit diagram showing a configuration of a power semiconductor module 1 IB in accordance with a modification.
  • Fig. 9 is a circuit diagram showing a configuration of a power semiconductor module 11C in accordance with another modification.
  • Fig. 1 is a circuit diagram illustrating a portion of a motor driving system in a car, to which the power semiconductor module of the present invention is applied.
  • a motor driving system is mounted, for example, on an electric car, a hybrid car and a fuel-cell-powered car.
  • the car shown in Fig. 1 includes a battery 4, a smoothing capacitor 6, an inverter apparatus 2 and a motor 8.
  • Battery 4 is, by way of example, a secondary battery such as nickel-hydride or lithium-ion battery. Smoothing capacitor 6 and inverter apparatus 2 are connected in parallel, between positive and negative electrodes of battery 4.
  • Inverter apparatus 2 receives power supply potential smoothed by smoothing capacitor 6, and drives AC motor 8. Further, inverter apparatus 2 returns the power generated by AC motor 8 to battery 4, under regenerative control.
  • AC motor 8 is for generating torque that drives a driving wheel, not shown, of the car.
  • the motor may serve as a power generator driven by an engine, and also serves as an electric motor for the engine to start the operation of the engine.
  • Inverter apparatus 2 includes a U-phase arm UA, a V-phase arm VA and a W- phase arm WA, connected in parallel between terminals of smoothing capacitor 6 to which the power supply voltage is applied.
  • the U-phase arm UA includes power semiconductor modules 11 and 12 connected in series between terminals of smoothing capacitor 6.
  • the V-phase arm VA includes power semiconductor modules 13 and 14 connected in series between terminals of smoothing capacitor 6.
  • the W-phase arm WA includes power semiconductor modules 15 and 16 connected in series between terminals of smoothing capacitor 6.
  • a connection node between power semiconductor modules 11 and 12 is connected to one end of a U-phase coil, not shown, of motor 8.
  • a connection node between power semiconductor modules 13 and 14 is connected to one end of a V-phase coil, not shown, of motor 8.
  • a connection node between power semiconductor modules 15 and 16 is connected to one end of a W-phase coil, not shown, of motor 8.
  • the U-phase coil, V-phase coil and W-phase coil each have the other end coupled together to the midpoint.
  • Fig. 2 is a circuit diagram representing the configuration of a power semiconductor module 11 shown in Fig. 1.
  • power semiconductor module 11 includes a capacitor Cl connected between nodes Nl and N2, an IGBT element Ql having its collector connected to node Nl and its emitter connected to node N2, and a diode 21. Between nodes Nl and N2, a diode 21 is connected in parallel with power semiconductor module 11. Diode 21 is connected such that the forward direction is from node N2 to Nl .
  • Capacitor Cl is a snubber capacitor, and it may have the capacitance value of about 0.1 ⁇ F. Specifically, the capacitance value may be far smaller than that of smoothing capacitor 6 of Fig. 1.
  • diode 21 may be provided outside power semiconductor module 11, as shown later in Fig. 9.
  • the power semiconductor modules 12 to 16 shown in Fig. 1 have the same structure as power semiconductor module 11, and therefore, description thereof will not be repeated.
  • Fig. 3 is a front view of power semiconductor module 11.
  • Fig. 4 is a cross-sectional view of power semiconductor module 11 taken along the line IV-IV of Fig. 3.
  • power semiconductor module 11 includes a power semiconductor element 52, and a capacitor 46 connected to power semiconductor element 52.
  • Power semiconductor element 52 and capacitor 46 have their electrodes joined to each other in the module.
  • Capacitor 46 corresponds to capacitor Cl shown in Fig. 2.
  • power semiconductor element 52 corresponds to IGBT element Ql and diode 21 of Fig. 2.
  • Power semiconductor element 52 is formed on a semiconductor substrate having first and second main surfaces.
  • Power semiconductor module 11 further includes: an electrode 48 through which the main current flows, joined to the first main surface by a solder layer 50; an electrode 60 through which the main current flows, joined to the second main surface by a solder layer 58; and a resin portion 70 sealing the semiconductor substrate, capacitor 46 and electrodes 48 and 60.
  • Electrodes 48 and 60 also serve as heat sinks, that is, heat transmitting member that effectively radiates heat from the semiconductor substrate to the outside.
  • Capacitor 46 includes electrodes 42 and 44. Electrodes 48 and 42 are joined to each other by solder 62 such that surfaces exposed from the resin portion are arranged on one same continuous surface that allows attachment of the cooler. Electrodes 60 and 44 are joined to each other by solder 64 such that surfaces exposed from the resin portion are arranged on one same continuous surface that allows attachment of the cooler. Therefore, both surfaces of power semiconductor module 11 can easily be attached to a radiator. An example in which the one same continuous surface is flat is shown in Fig. 4. When the surface to which the radiator is attached is a curved surface, electrodes 42 and 48 may have their surfaces shaped to conform to the curve, and electrodes 42 and 48 may be joined by solder 62 such that the electrode surfaces form a continuous surface.
  • capacitor 46 By arranging capacitor 46 very close to power semiconductor element 52 and connecting without the fastening portion, the L component (inductance) of the bus bar conventionally used for connection of these components can be eliminated as much as possible and the effect of the snubber circuit for removing the surge can be improved.
  • Power semiconductor module 11 further includes: a terminal 53 joined to electrode 42 by solder 66, for taking out the main current; and a terminal 54 joined to electrode 44 by solder 68, for taking out the main current. Electrodes 53 and 54 are bus bars, which are connected to a power supply line of the inverter or to an output line.
  • Power semiconductor module 11 further includes a control electrode 55 electrically connected to the semiconductor substrate by a wire 56, for receiving as an input a control signal for controlling the main current. Electrode 48 and terminal 53 are divided, and electrode 60 and terminal 54 are divided, and therefore, capacitor 46 can be arranged to occupy the entire thickness of power semiconductor module, and hence its capacity can be increased.
  • Fig. 5 shows a detailed structure of the cross-section of a capacitor 46 shown in Fig. 4.
  • Fig. 6 is a schematic perspective view illustrating the structure of capacitor 46.
  • insulating films 46A of polyethylene terephthalate (PET) or polypropylene (PP) are laminated.
  • Evaporated metal layer 46B such as aluminum is formed on insulating film 46A.
  • two strip-shaped insulating films are laminated by winding, with the two films being slightly deviated from each other.
  • the two insulating films have margins 46C formed at different positions, that is, one has the margin 46C formed on the side of electrode 42 and the other has the margin 46C formed on the side of electrode 44.
  • electrodes 42 and 44 are formed on opposite sides, by sprayed metal referred to as "metallicon", Though an example using a film capacitor as capacitor 46 has been described with reference to Figs. 5 and 6, a capacitor of different type, such as a ceramic multiplayer capacitor may be used.
  • Fig. 7 is a cross-sectional view showing the power semiconductor module with a cooler attached.
  • power semiconductor module 1 IA includes, in addition to the configuration of power semiconductor module 11 described with reference to Figs. 3 and 4, a cooler for cooling capacitor 46 and power semiconductor element 52.
  • the cooler includes: a micro-channel cooling unit 84 formed of aluminum, attached commonly to surfaces of electrodes 42 and 48 exposed through the resin portion, with an insulating resin 82 interposed; and a micro-channel cooling unit 88 formed of aluminum, attached commonly to surfaces of electrodes 44 and 60 exposed through the resin portion, with an insulating resin 86 interposed.
  • Micro-channel cooling units 84 and 88 are arranged to hold power semiconductor element 52 and capacitor 46 therebetween.
  • Heat resistance of the film of a film capacitor is about 95 0 C and relatively low. Considering that the heat generated by the capacitor itself must be exhausted and that the capacitor receives heat as it is positioned as close as possible to the power semiconductor element to effectively serve as the snubber capacitor, cooling is indispensable. The arrangement shown in Fig. 7 enables simultaneous cooling of the power semiconductor element and the capacitor.
  • capacitor Cl and diode 21 may be changed as in a power semiconductor module 1 IB shown in Fig. 8. Specifically, in the example of Fig. 2, diode 21 is connected inside and capacitor Cl is connected outer than that, capacitor Cl may be connected inside and diode 21 may be connected outer than that as shown in Fig. 8. Further, a power semiconductor module 11C such as shown in Fig. 9 is also possible, which includes IGBT element Ql and capacitor Cl, with diode 21 connected outside. Though an IGBT element has been described as an example of a power switching element in the present embodiment, an MOS transistor or the like may be included as the power switching element.
  • the snubber capacitor is arranged very close to the power semiconductor element, whereby the L component (inductance) and resistance component of the interconnecting line portion can be reduced and the surge voltage can be reduced.
  • the snubber capacitor of which temperature increases because of self- heating and heat from the periphery of the power semiconductor element can be cooled simultaneously with the power semiconductor element.
  • the number of components is reduced and the semiconductor module becomes compact, so that handling becomes easier and mounting and packaging are facilitated.

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Inverter Devices (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)

Abstract

A power semiconductor element (52) and a capacitor (46) have their electrodes joined to each other in a module. The power semiconductor element (52) is formed on a semiconductor substrate having first and second main surfaces. A power semiconductor module (11A) includes an electrode (48) through which a main current flows, joined to the first main surface, an electrode (60) through which the main current flows, joined to the second main surface, and a resin portion (70) sealing the semiconductor substrate, the capacitor (46) and the electrodes (48, 60). The capacitor includes electrodes (42, 44). The electrode of the capacitor and the electrode of the semiconductor element are joined to each other by solder (62) such that surfaces exposed through the resin portion are arranged on one continuous surface on which a cooler can be attached. Therefore, a power semiconductor module can be provided in which the capacitor and the power semiconductor element can effectively be cooled and the surge voltage can be reduced.

Description

DESCRIPTION
Power Semiconductor Module
Technical Field
The present invention relates to a semiconductor module and, more specifically, to a power semiconductor module containing a capacitor.
Background Art Recently, cars that employ an AC motor as a power source for maneuvering the car and has an inverter apparatus mounted for driving the AC motor are becoming popular, as represented by electric cars, gas-electric hybrid cars and fuel-cell-powered cars.
For a car of such type, it is required to make smaller the driving apparatus that drives the AC motor with the inverter apparatus. The inverter apparatus generally consists of a switching element such as an IGBT (insulated gate type bipolar transistor) and a rectifying diode element. To attain smaller size, it is sometimes provided as a module. It is often the case that a capacitor for surge absorption is placed close to the switching element. In a hybrid car that has severe cost and space restrictions, it is difficult to use a single part IGBT element and a single part capacitor element combined together, as such combination would increase cost and space.
Japanese Patent Laying-Open No. 2000-92847 discloses a semiconductor module apparatus with capacitor that realizes superior surge resistance performance. An external case of the semiconductor module fixes a smoothing capacitor while pressing the capacitor to a cooling base. Therefore, assembly and fixing of the capacitor can be simplified, while cooling characteristic of the capacitor can be assured. According to the technology disclosed in Japanese Patent Laying-Open No. 2000-92847, the shapes of the capacitor and of a power module containing power elements such as the IGBT are adapted to facilitate assembly. The capacitor, however, is still fixed by screws to terminals of the power module. Therefore, there is still a room for improvement to make shorter the physical distance between the power element and the capacitor, and to reduce inductance component of the fixing portion. Further, the technology addresses attachment of the cooler only on one side of the power element, and therefore, there is still a room for improvement in view of cooling performance.
Further, better mileage is required of a hybrid car, and to meet the requirement, decrease in switching loss is essential. In order to decrease switching loss, switching at a higher speed than in the conventional art is necessary. High-speed switching, however, increases surge voltage generating at opposing ends of the switching element, making it necessary to add a snubber circuit.
A snubber circuit is for preventing a high spike voltage that generates in a state of transition at the time of switching, in a switching circuit that turns on/off the current flow. The spike current results from inductance component of lines on the current flow path, and it is particularly large at the moment when the switch turns off.
Typically, a portion where a power semiconductor is mounted and a portion where the capacitor of a snubber circuit is placed are apart by a distance, and these portions are connected by a bus bar. The bus bar, however, has inductance component, and hence, energy stored therein would undesirably be reflected as a surge voltage.
Disclosure of the Invention
An object of the present invention is to provide a power semiconductor module in which the capacitor and the power semiconductor element can be cooled satisfactorily and the surge voltage can be reduced.
In short, the present invention provides a power semiconductor module including a power semiconductor element, and a capacitor connected to the power semiconductor element. The power semiconductor element and the capacitor have their electrodes coupled to each other in the module.
Preferably, the power semiconductor element is formed on a semiconductor substrate having first and second main surfaces. The power semiconductor module further includes: a first electrode through which a main current flows, joined to the first main surface; a second electrode through which the main current flows, joined to the second main surface; and a resin portion sealing the semiconductor substrate, the capacitor and the first and second electrodes. The capacitor includes third and fourth electrodes. The first and the third electrodes are joined to each other such that surfaces exposed through the resin portion are arranged on one, same continuous plane.
More preferably, the power semiconductor module further includes a cooler attached to the surfaces exposed through the resin portion of the first and third electrodes.
More preferably, in the power semiconductor module, the second and fourth electrodes are joined to each other such that surfaces exposed through the resin portion are arranged on one, same continuous plane.
More preferably, the power semiconductor module further includes a cooler for cooling the capacitor and the power semiconductor element. The cooler includes a first cooling portion attached commonly on the surfaces exposed through the resin portion of the first and third electrodes, and a second cooling portion attached commonly on the surfaces exposed through the resin portion of the second and fourth electrodes.
More preferably, the first and second cooling portions are arranged to sandwich the power semiconductor element and the capacitor from opposite sides. More preferably, the power semiconductor module further includes first and second terminals respectively joined to the third and fourth electrodes, for taking out the • main current.
More preferably, the power semiconductor module further includes a control electrode electrically connected to the semiconductor substrate and receiving as an input a control signal for controlling the main current.
Therefore, a main advantage of the present invention is that, as the electrodes of the capacitor and the electrodes of the semiconductor element are arranged to be directly coupled to each other, the L component (inductance) and resistance component of the interconnecting lines can be reduced, and the surge voltage can also be reduced.
Brief Description of the Drawings
Fig. 1 is a circuit diagram illustrating a portion of a motor driving system in a car, to which the power semiconductor module of the present invention is applied.
Fig. 2 is a circuit diagram representing the configuration of a power semiconductor module 11 shown in Fig. 1.
Fig. 3 is a front view of power semiconductor module 11.
Fig. 4 is a cross-sectional view of power semiconductor module 11 taken along the line IV-IV of Fig. 3.
Fig. 5 shows a detailed structure of the cross-section of a capacitor 46 shown in Fig. 4.
Fig. 6 is a schematic perspective view illustrating the structure of capacitor 46.
Fig. 7 is a cross-sectional view showing the power semiconductor module with a cooler attached.
Fig. 8 is a circuit diagram showing a configuration of a power semiconductor module 1 IB in accordance with a modification.
Fig. 9 is a circuit diagram showing a configuration of a power semiconductor module 11C in accordance with another modification.
Best Modes for Carrying Out the Invention
In the following, embodiments of the present invention will be described in detail with reference to the figures. Throughout the figures, the same or corresponding portions are denoted by the same reference characters and description thereof will not be repeated.
Fig. 1 is a circuit diagram illustrating a portion of a motor driving system in a car, to which the power semiconductor module of the present invention is applied. Such a motor driving system is mounted, for example, on an electric car, a hybrid car and a fuel-cell-powered car.
The car shown in Fig. 1 includes a battery 4, a smoothing capacitor 6, an inverter apparatus 2 and a motor 8.
Battery 4 is, by way of example, a secondary battery such as nickel-hydride or lithium-ion battery. Smoothing capacitor 6 and inverter apparatus 2 are connected in parallel, between positive and negative electrodes of battery 4.
Inverter apparatus 2 receives power supply potential smoothed by smoothing capacitor 6, and drives AC motor 8. Further, inverter apparatus 2 returns the power generated by AC motor 8 to battery 4, under regenerative control. AC motor 8 is for generating torque that drives a driving wheel, not shown, of the car. When mounted on a hybrid car, for example, the motor may serve as a power generator driven by an engine, and also serves as an electric motor for the engine to start the operation of the engine.
Inverter apparatus 2 includes a U-phase arm UA, a V-phase arm VA and a W- phase arm WA, connected in parallel between terminals of smoothing capacitor 6 to which the power supply voltage is applied.
The U-phase arm UA includes power semiconductor modules 11 and 12 connected in series between terminals of smoothing capacitor 6. The V-phase arm VA includes power semiconductor modules 13 and 14 connected in series between terminals of smoothing capacitor 6. The W-phase arm WA includes power semiconductor modules 15 and 16 connected in series between terminals of smoothing capacitor 6.
A connection node between power semiconductor modules 11 and 12 is connected to one end of a U-phase coil, not shown, of motor 8. A connection node between power semiconductor modules 13 and 14 is connected to one end of a V-phase coil, not shown, of motor 8. A connection node between power semiconductor modules 15 and 16 is connected to one end of a W-phase coil, not shown, of motor 8. The U-phase coil, V-phase coil and W-phase coil each have the other end coupled together to the midpoint.
Fig. 2 is a circuit diagram representing the configuration of a power semiconductor module 11 shown in Fig. 1.
Referring to Fig. 2, power semiconductor module 11 includes a capacitor Cl connected between nodes Nl and N2, an IGBT element Ql having its collector connected to node Nl and its emitter connected to node N2, and a diode 21. Between nodes Nl and N2, a diode 21 is connected in parallel with power semiconductor module 11. Diode 21 is connected such that the forward direction is from node N2 to Nl .
Capacitor Cl is a snubber capacitor, and it may have the capacitance value of about 0.1 μF. Specifically, the capacitance value may be far smaller than that of smoothing capacitor 6 of Fig. 1.
Though an example in which power semiconductor module includes diode 21 is shown in Fig. 2, diode 21 may be provided outside power semiconductor module 11, as shown later in Fig. 9.
The power semiconductor modules 12 to 16 shown in Fig. 1 have the same structure as power semiconductor module 11, and therefore, description thereof will not be repeated.
Fig. 3 is a front view of power semiconductor module 11.
Fig. 4 is a cross-sectional view of power semiconductor module 11 taken along the line IV-IV of Fig. 3. Referring to Figs. 3 and 4, power semiconductor module 11 includes a power semiconductor element 52, and a capacitor 46 connected to power semiconductor element 52. Power semiconductor element 52 and capacitor 46 have their electrodes joined to each other in the module. Capacitor 46 corresponds to capacitor Cl shown in Fig. 2. Further, power semiconductor element 52 corresponds to IGBT element Ql and diode 21 of Fig. 2.
Power semiconductor element 52 is formed on a semiconductor substrate having first and second main surfaces. Power semiconductor module 11 further includes: an electrode 48 through which the main current flows, joined to the first main surface by a solder layer 50; an electrode 60 through which the main current flows, joined to the second main surface by a solder layer 58; and a resin portion 70 sealing the semiconductor substrate, capacitor 46 and electrodes 48 and 60.
Electrodes 48 and 60 also serve as heat sinks, that is, heat transmitting member that effectively radiates heat from the semiconductor substrate to the outside.
Capacitor 46 includes electrodes 42 and 44. Electrodes 48 and 42 are joined to each other by solder 62 such that surfaces exposed from the resin portion are arranged on one same continuous surface that allows attachment of the cooler. Electrodes 60 and 44 are joined to each other by solder 64 such that surfaces exposed from the resin portion are arranged on one same continuous surface that allows attachment of the cooler. Therefore, both surfaces of power semiconductor module 11 can easily be attached to a radiator. An example in which the one same continuous surface is flat is shown in Fig. 4. When the surface to which the radiator is attached is a curved surface, electrodes 42 and 48 may have their surfaces shaped to conform to the curve, and electrodes 42 and 48 may be joined by solder 62 such that the electrode surfaces form a continuous surface.
By arranging capacitor 46 very close to power semiconductor element 52 and connecting without the fastening portion, the L component (inductance) of the bus bar conventionally used for connection of these components can be eliminated as much as possible and the effect of the snubber circuit for removing the surge can be improved.
Power semiconductor module 11 further includes: a terminal 53 joined to electrode 42 by solder 66, for taking out the main current; and a terminal 54 joined to electrode 44 by solder 68, for taking out the main current. Electrodes 53 and 54 are bus bars, which are connected to a power supply line of the inverter or to an output line.
Power semiconductor module 11 further includes a control electrode 55 electrically connected to the semiconductor substrate by a wire 56, for receiving as an input a control signal for controlling the main current. Electrode 48 and terminal 53 are divided, and electrode 60 and terminal 54 are divided, and therefore, capacitor 46 can be arranged to occupy the entire thickness of power semiconductor module, and hence its capacity can be increased.
Fig. 5 shows a detailed structure of the cross-section of a capacitor 46 shown in Fig. 4. Fig. 6 is a schematic perspective view illustrating the structure of capacitor 46.
Referring to Figs. 5 and 6, insulating films 46A of polyethylene terephthalate (PET) or polypropylene (PP) are laminated. Evaporated metal layer 46B such as aluminum is formed on insulating film 46A.
Specifically, two strip-shaped insulating films are laminated by winding, with the two films being slightly deviated from each other. The two insulating films have margins 46C formed at different positions, that is, one has the margin 46C formed on the side of electrode 42 and the other has the margin 46C formed on the side of electrode 44. After winding, electrodes 42 and 44 are formed on opposite sides, by sprayed metal referred to as "metallicon", Though an example using a film capacitor as capacitor 46 has been described with reference to Figs. 5 and 6, a capacitor of different type, such as a ceramic multiplayer capacitor may be used.
Fig. 7 is a cross-sectional view showing the power semiconductor module with a cooler attached. Referring to Fig. 7, power semiconductor module 1 IA includes, in addition to the configuration of power semiconductor module 11 described with reference to Figs. 3 and 4, a cooler for cooling capacitor 46 and power semiconductor element 52. The cooler includes: a micro-channel cooling unit 84 formed of aluminum, attached commonly to surfaces of electrodes 42 and 48 exposed through the resin portion, with an insulating resin 82 interposed; and a micro-channel cooling unit 88 formed of aluminum, attached commonly to surfaces of electrodes 44 and 60 exposed through the resin portion, with an insulating resin 86 interposed. Micro-channel cooling units 84 and 88 are arranged to hold power semiconductor element 52 and capacitor 46 therebetween.
Heat resistance of the film of a film capacitor is about 95 0C and relatively low. Considering that the heat generated by the capacitor itself must be exhausted and that the capacitor receives heat as it is positioned as close as possible to the power semiconductor element to effectively serve as the snubber capacitor, cooling is indispensable. The arrangement shown in Fig. 7 enables simultaneous cooling of the power semiconductor element and the capacitor.
It is noted that the connecting position of capacitor Cl and diode 21 may be changed as in a power semiconductor module 1 IB shown in Fig. 8. Specifically, in the example of Fig. 2, diode 21 is connected inside and capacitor Cl is connected outer than that, capacitor Cl may be connected inside and diode 21 may be connected outer than that as shown in Fig. 8. Further, a power semiconductor module 11C such as shown in Fig. 9 is also possible, which includes IGBT element Ql and capacitor Cl, with diode 21 connected outside. Though an IGBT element has been described as an example of a power switching element in the present embodiment, an MOS transistor or the like may be included as the power switching element.
As described above, in the embodiment of the present invention, the snubber capacitor is arranged very close to the power semiconductor element, whereby the L component (inductance) and resistance component of the interconnecting line portion can be reduced and the surge voltage can be reduced.
Further, the snubber capacitor of which temperature increases because of self- heating and heat from the periphery of the power semiconductor element can be cooled simultaneously with the power semiconductor element.
Further, the number of components is reduced and the semiconductor module becomes compact, so that handling becomes easier and mounting and packaging are facilitated.
Although the present invention has been described and illustrated in detail, it is clearly understood that the same is by way of illustration and example only and is not to be taken by way of limitation, the spirit and scope of the present invention being limited only by the terms of the appended claims.

Claims

1. A power semiconductor module, comprising: a power semiconductor element; and a capacitor connected to said semiconductor element; wherein said power semiconductor element and said capacitor have their electrodes joined to each other in the module.
2. The power semiconductor module according to claim 1, wherein said power semiconductor element is formed on a semiconductor substrate having first and second main surfaces; said power semiconductor module further comprising: a first electrode through which a main current flows, joined to the first main surface; a second electrode through which the main current flows, joined to the second main surface; and a resin portion sealing said semiconductor substrate, said capacitor and said first and second electrodes; wherein said capacitor includes third and fourth electrodes; and said first electrode and said third electrode are joined to each other such that surfaces exposed through said resin portion are arranged on one, same continuous plane.
3. The power semiconductor module according to claim 2, further comprising a cooler attached on surfaces exposed through said resin portion of said first and third electrodes.
4. The power semiconductor module according to claim 2, wherein said second electrode and said fourth electrode are joined to each other such that surfaces exposed through said resin portion are arranged on one, same continuous plane.
5. The power semiconductor module according to claim 4, further comprising a cooler cooling said capacitor and said power semiconductor element; wherein said cooler includes a first cooling portion attached commonly on the surfaces exposed through said resin portions of said first and third electrodes, and a second cooling portion attached commonly on the surfaces exposed through said resin portions of the second and fourth electrodes.
6. The power semiconductor module according to claim 5, wherein said first and second cooling portions are arranged to sandwich said power semiconductor element and said capacitor from opposite sides.
7. The power semiconductor module according to claim 2, further comprising first and second terminals respectively joined to said third and fourth electrodes, for taking out the main current.
8. The power semiconductor module according to claim 7, further comprising a control electrode electrically connected to said semiconductor substrate and receiving as an input a control signal for controlling said main current.
PCT/JP2006/305770 2005-03-23 2006-03-16 Power semiconductor module WO2006101150A2 (en)

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DE602006016247T DE602006016247D1 (en) 2005-03-23 2006-03-16 POWER SEMICONDUCTOR MODULE
EP06729737A EP1861878B1 (en) 2005-03-23 2006-03-16 Power semiconductor module
US11/886,264 US8269331B2 (en) 2005-03-23 2006-03-16 Power semiconductor module

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JP2005-084361 2005-03-23
JP2005084361 2005-03-23
JP2006069326A JP4661645B2 (en) 2005-03-23 2006-03-14 Power semiconductor module
JP2006-069326 2006-03-14

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EP1861878B1 (en) 2010-08-18
US20080192437A1 (en) 2008-08-14
JP4661645B2 (en) 2011-03-30
JP2006303455A (en) 2006-11-02
EP1861878A2 (en) 2007-12-05
WO2006101150A3 (en) 2007-04-19
DE602006016247D1 (en) 2010-09-30
US8269331B2 (en) 2012-09-18

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