WO2006097478A1 - Rotor et pompe a vide de type a vis comprenant un corps de canal de refroidissement - Google Patents

Rotor et pompe a vide de type a vis comprenant un corps de canal de refroidissement

Info

Publication number
WO2006097478A1
WO2006097478A1 PCT/EP2006/060724 EP2006060724W WO2006097478A1 WO 2006097478 A1 WO2006097478 A1 WO 2006097478A1 EP 2006060724 W EP2006060724 W EP 2006060724W WO 2006097478 A1 WO2006097478 A1 WO 2006097478A1
Authority
WO
WIPO (PCT)
Prior art keywords
rotor
cooling
profile
coolant
kühlnutprofil
Prior art date
Application number
PCT/EP2006/060724
Other languages
German (de)
English (en)
Inventor
Klaus Rofall
Rudolf Bahnen
Original Assignee
Gebr. Becker Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Gebr. Becker Gmbh filed Critical Gebr. Becker Gmbh
Priority to DE112006000490T priority Critical patent/DE112006000490A5/de
Publication of WO2006097478A1 publication Critical patent/WO2006097478A1/fr

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/082Details specially related to intermeshing engagement type pumps
    • F04C18/084Toothed wheels
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04Heating; Cooling; Heat insulation
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00Application
    • F04C2220/10Vacuum
    • F04C2220/12Dry running
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00Components
    • F04C2240/60Shafts

Definitions

  • the invention relates to a rotor, in particular for a screw pump such as a screw vacuum pump or the like, having at least one rotor profile provided on the outside of the rotor, which in particular comprises a helically circulating conveying groove for a working medium, and having a recess for rotor cooling extending in the rotor in its axial direction ,
  • DE 2110940 discloses a rotor of the type mentioned above with a rotor cooling recess provided in the interior.
  • thedenutprofil is executed directly on the inner surface of the recess and is also proposed to approximate thedenutprofil to the rotor outer profile.
  • the requirements for its cooling during operation depend on various influencing variables, so that the specification of a specific groove profile in the recess serving for rotor cooling constitutes a restriction.
  • the object of the present invention is to further advantageously develop a rotor of the type mentioned at the outset so that better internal cooling can be achieved, in particular under different operating conditions.
  • the object is achieved according to the invention initially and essentially with the features that in the particular cylindrical recess of the rotor is provided with at least one coiledménutprofil for passing a cooling mediumménut emotions.
  • a cooling fluid for example oil or water
  • a cooling fluid thus returns a flow path which is longer than the flow path which the cooling fluid would travel in the case of, for example, a pure annular flow.
  • it flows along the rotor inner surface for a comparatively longer period, which results in an overall higher heat transfer between the cooling fluid and the rotor.
  • the coiled groove profile can also increase the heat transfer coefficient, so that even with comparatively low rotor temperatures, a large amount of heat can still be removed from the rotor if the product of the heat transfer surface and coefficient is sufficiently large.
  • a cooling groove body with a desired spiral-shaped cooling groove profile can be inserted into the rotor, depending on the desired application or operating conditions.
  • the invention provides the possibility of constructively adapting the rotor internal cooling flexibly to various cooling conditions occurring during operation, which also include the rotor speeds, the type of housing accommodating the rotors, the type and throughput of the working fluid by the outer rotor profile and the type of cooling fluid are dependent.
  • a smaller need for internal rotor cooling exist as a compact housing, which is dispensed with cooling fins or other housing cooling.
  • the power requirements for internal rotor cooling increase, for example, when the rotor or rotors are to be operated at low throughput of a working fluid flowing through their outer rotor profile, since the external heat removal to the working fluid is essentially via convection, but hardly via thermal radiation.
  • the varying demands on the rotor internal cooling which are to be met flexibly according to the invention by using a suitabledenut stresses, finally also depend on the temperature at which the coolant is supplied to the rotor.
  • a helical course is understood to be any helical or helical course.
  • Thedenutprofil can be realized, for example, by one or more, introduced as depressions in a surface grooves, but on the other hand, for example.
  • thedenut endeavor is insofar also to be referred to asde Listel Sciences.
  • adenutprofil whose cooling groove or cooling grooves on thedenut endeavor to a free surface, eg. To the outer shell side are open, but alternatively is also a closeddenutprofil how this example. Can be produced by a helical tube into consideration.
  • thedenut founded in the rotor interchangeable in particular after removal of one of a free, in particular low-pressure side, the rotor end detachable lid, is added.
  • This embodiment which is also preferred in connection with possible flying support of the shaft carrying the rotor, facilitates insertion and replacement of the cooling groove body on a pump in order to adapt the rotor internal cooling to the requirements changing during operation.
  • the coiled cooling groove profile is provided on the outer surface of the cooling groove body. see and theissernut stresses itself in particular sleeve-like, for example. Made of plastic or other suitable material is formed.
  • sleeve-like is not defined to specific wall thicknesses, thus, for example, also includes a solid body with a through-hole of comparatively small cross-section.
  • Said arrangement of thedenutprofils on the outer surface is accompanied by a simple production, which allows a large variety of shapes both regarding the coiled course and the cross section of theménutprofils.
  • a direct contact of the cooling fluid for example. Oil or water, with the inner wall of the recess in the rotor housing, ie an immediate heat transfer achieved.
  • the coiled cooling groove profile has at least one cooling groove and at least one web bordering the cooling groove, the outer cross section of which is adapted to the hollow cross section of the recess in the rotor.
  • thedenut founded may also be used depending on other requirements, for example. With a clearance, transition or even interference fit in the recess in the rotor so that thedenutprofil a direct Axial- or leakage current of the cooling fluid is largely to prevent and the cooling fluid practically completely through the groove (s) flows. It is also preferable that the cooling groove profile extends in the axial direction of the rotor over the entire length of theharinut emotionss.
  • coiledménutprofil optional slopes may have the same or different signs, resulting in alternative use ofdenut emotionsn with reach different slope sign.
  • This option according to the invention is important inasmuch as, at a certain fixed pitch of the outer rotor profile for conveying a working medium in a desired direction in the pump housing (from a low pressure to a high pressure side) also the direction of rotation of the rotor profile.
  • a rotor internal cooling in DC or countercurrent can offer advantages.
  • the supplied coolant may then preferably enter the cooling groove profile in the area of the low-pressure-side rotor end, where the rotor often produces only a relatively small amount of heating, and flow through the cooling groove profile to the often warmer high-pressure-side rotor end, wherein it likewise heats up continuously (DC cooling).
  • the coolant groove profile promotes an opposite conveyance of the cooling fluid to achieve so-called countercurrent cooling.
  • the said first alternative would be realized if the rotor outer profile and the cooling groove profile, for example, both right-handed or both are left-handed, while the second alternative is given in each case a right-handed and left-handed profile. Even if the cooling fluid is already supplied with overpressure to the rotor in order to achieve a desired direction of flow, this can still be promoted by the explained use of the cooling groove body with a correspondingly adapted pitch by reducing the flow resistance and the pressure loss.
  • the cooling groove profile is designed to be single or multi-speed, in particular two-, three- or four-speed.
  • the symmetry of the cooling can be improved by a multiple-speed embodiment by a plurality of cooling grooves in parallel parallel, ie distributed, flow along the inner rotor cooling surface in parallel.
  • An additional parameter with which the flow velocity can be influenced is also the amount of the pitch angle. It is preferred that the slope of the cooling groove or the cooling groove profile is depending on the number of gears between about 5 and 40 degrees to realize a relatively large wrap angle.
  • the cooling groove depth may preferably be in the range between 3 and 6 millimeters, wherein the cooling groove cross section is, for example, rectangular, in particular approximately square, or also, for example, semicircular or the like.
  • the invention is not limited to the aforementioned values and shape.
  • the coiledménutprofil in the axial direction of the rotor has different magnitude of the slope in order to adjust the coolant flow to the desired heat dissipation to a varying in the axial direction of the rotor outer profile heating.
  • the slope in the axial direction for example, increase or decrease.
  • the cooling groove body (or possibly a plurality of cooling groove bodies adjacent in the axial direction) has a plurality of, for example, axial section-successive cooling groove profiles which may differ in the number of flights and / or the pitch and / or the groove cross section.
  • the cooling groove body may be, for example, cone-shaped, with the cooling groove profile running helically on the cone shell, and being received in a correspondingly conical recess in the rotor, in order to vary the specific cooling groove length related to a specific axial reference length in the axial direction.
  • the invention further includes a screw pump, in particular screw vacuum pump, in which according to the invention one, preferably two rotors according to one or more of the preceding claims are present.
  • the screw vacuum pump has a coolant conveying device, in particular a coolant pump, whose flow is adjusted to the design of theharinutprofils in the rotor to achieve a turbulent coolant flow.
  • This turbulent flow has a larger compared to a laminar (ring) flow heat transfer coefficient, so that the heat transfer can be increased at the same volume flow rate ofméfizids.
  • the coiled cooling groove profile can be designed in such a way that turbulence occurs even at a very low coolant flow rate.
  • FIG. 3 in longitudinal section or -ansieht two rotors according to the invention according to a second preferred embodiment, in the delivery housing of a pump, mounted on two shafts and Fig. 4 - 13 in side views of theharinutêt according to the invention in various preferred embodiments.
  • Fig. 1 shows a longitudinal section of a rotor 1 according to the invention in a first preferred embodiment. In the construction shown, this is particularly suitable for use in pairs (in intermeshing use with opposite directions of rotation and pitches of the rotor profiles) in a screw vacuum pump.
  • the rotor 1 has on the rotor outer side a rotor profile 2 for conveying a working fluid, for example a gas.
  • the rotor profile 2, which is catchy in the example, has a helical shape, i. similar to a thread running, conveying groove 3, which is bounded by a likewise coiled revolving conveyor web 4 and forms the delivery chamber for the Häfizid.
  • the rotor profile 2 starts from a rotor body 5, in the interior of which a recess 6 running in the axial direction A of the rotor is formed.
  • a sleeve-likedenut republic 7 is used according to the invention. This has on its outer shell side for the passage of a cooling medium on a likewise coiledménutprofil 8. In the example chosen, this is also a catchy one, i. that a coiled cooling groove 9 is bounded by a web 10, which is also wound around in a spiral manner.
  • the rotor 1 is connected to a possible flying, i. one-sided storage fitted in a pump housing and has a flange 11 for attachment to a shaft.
  • the recess 6 extends in the rotor 1 as with respect to its core cross section large central cylindrical bore. It has a smooth wall 12 facing the connection for the shaft facing away from an axial stop 13 and the terminal by a radial expansion 14 for receiving a here, for example.
  • cover 15 is bordered. Between cover 15 anddenutConsequently 7, a spacer element 16 is inserted. This has, facing thedenutConsequently 7, a circular bottom 17 with a central passage opening 18.
  • Distance element 16 is supported in the axial direction A with four radial directions. running, distributed on the circumference ribs 19 on the lid 15. Opposite is an outer annular projection 20, on which the sleeve-likedenutsammlung 7 is pushed up to the stop against the circular bottom 17. At the opposite end - in the reverse position - a similar dance- dance element 16 is used, the ribs 19 are supported against the axial stop 13. This means that thedenutsammlung 7 removed after removing the holder 15 which can be held on the free, low-pressure end of the rotor 1 and replaced by adenutsammlung 7 with otherménutprofil 8 to adapt to desired operating conditions.
  • the spacer elements 16 are dimensioned in such a way that the cooling groove body 7 is simultaneously clamped in the axial direction during the axial fixing of the cover 15, whereby at the same time a force sufficient to carry it is produced in the direction of rotation of the rotor.
  • the spacer elements 16 and thedenutêt 5 may be integrally formed in an alternative embodiment and be connected via unspecified screws with the axial stop 13.
  • the coiled web 10 of the cooling groove profile 8 is adapted with respect to its outer cross-section to the diameter of the recess 6 to achieve a virtually leak-free system.
  • each an end-side coolant flow chamber 21 is formed, each of which has four radially outwardly widening between the ribs segments and which is connected to theménutprofil 8 to the coolant flow.
  • the supply and removal of the coolant carried by the unilaterally connectable shaft.
  • the preferred embodiment of the rotor 1 described with reference to FIG. 1 is in principle also suitable for a bearing on both sides, for example by connecting a second shaft instead of the cover 15. In this case, the supply and removal of coolant could be done either via only one or each one of the two waves.
  • FIG. 2 shows two rotors 1 according to the invention of the preferred embodiment shown in FIG. 1, one of which is shown mounted in longitudinal section and in longitudinal view on a respective shaft 22.
  • the two rotors 1 each have a helical rotor profile 2 with each other except for the slope sign corresponding design.
  • the distance between the shafts 22 is dimensioned such that the rotor profiles 2 intermesh with one another.
  • the delivery chamber of the rotors 1 is enclosed by a housing 23, which may have a dividing plane parallel to the plane of the drawing, for example.
  • an inlet 24 for sucking a working fluid is indicated.
  • a lateral outlet 25 is provided, through which the working fluid can flow out after compression.
  • the inlet 24 is attached to the low pressure side and the outlet 25 is attached to the high pressure side of the housing 23.
  • seals which are familiar to the person skilled in the art can be provided, and also the bearing of the shafts 22 can be carried out in a manner known per se and therefore not shown in detail.
  • the shafts 22 each have a flange 27, which is fastened to the rotor 1, for example by means not shown with screws. Inside the shafts 22 are continuous longitudinal bores 28, each of which encloses a likewise continuous central coolant line 29 with an annular gap 30.
  • the coolant line 29 passes through a through-bore in the cooling groove body 7 or, in the chosen example, is received centering in bores 31 of the spacer elements 16. This results in that the coolant line 29 and the annular gap 30 are connected by means of the coolant flow spaces 21 and the cooling groove profile 8 for the flow of a coolant.
  • the rotor profile 2 and the cooling groove profile associated therewith have inclines of the same sign. This means that, in the upper rotor in FIG. 2, both the rotor profile 2 and the cooling groove profile 8 are increasing to the left, whereas in the case of the lower rotor they are respectively increasing to the right.
  • the driving directions of rotation of the shafts 22 are chosen in opposite directions such that a mutual effect is achieved on both rotors.
  • desired transport and desired compression of the working fluid from the inlet 24 to the outlet 25, ie in the direction indicated by the arrow axial direction F results.
  • a volume flow, in this case the coolant, preferably in the same axial direction, arises in this direction of rotation due to the slope sign respectively selected in each case for the associated rotor profiles.
  • Fig. 3 shows an arrangement of two rotors 1 according to the invention according to a second preferred embodiment.
  • the same reference numerals are used, with deviations will be described below.
  • the substratevikharm 7 is held axially between a cover 15 and the axial stop 13, although in the end openings no spacer element (see reference numeral 16 in Fig. 2), but a front cover 32 is inserted with bore 31.
  • Axially adjacent coolant flow spaces 21 are formed by ribs 33 distributed on the circumference, again leaving gaps, which on the one hand protrude from the cover 15, on the other hand from a ring element 34 with a central passage 35.
  • the rotor profiles 2 are formed as shown in FIG.
  • FIG. 2 is provided according to FIG. 3, that the rotor profile 2 and the two rotors associated coiledménutprofil 8 inclines each having opposite signs.
  • the upper rotor in FIG. 3 has a left-rising rotor profile 2 and a right-rising cooling groove profile 8, while the lower rotor has a right-rising rotor profile 2 and a left-rising cooling groove profile 8.
  • a cooling medium in the region of the cooling groove profiles 8 is preferably conveyed counter to the direction of the arrow F.
  • the inlet is connected to the annular gap 30, so that the passage of coolant through the coolant line 29 is possible in order to control the conveying action of the cooling groove profile exploit. It is obvious that, for example, starting from Fig. 2 for reversing the preferred coolant conveying direction of the local coolant body 7 could be replaced directly against the coolant body 7 of FIG. 3 and analogous, ie regardless of the axial support, and the coolant body of FIG. 2 in the rotors of FIG. 3 could be used.
  • FIGS. 4 to 13 each show a side view of further cooling groove bodies 7 in various preferred embodiments, with a right-handed and a left-handed variant being compared in each of two following figures.
  • the respective tube or tube-likeménut stresses 7 each have in the interior a continuous, simplistic not shown on opening. Instead, dashed lines a rearward circulation of a web 10 is indicated. This illustrates that thedenutprofil 8 is executed in Figures 4, 5 catchy, ie that there is only a coiled cooling groove 9 is bounded by a coiled web 10. In contrast, according to the figures 6, 7 is a saucker spicy variant.
  • FIGS. 8, 9 likewise relate to double-flighted embodiments, with respect to FIGS. 6, 7 the cross-sections of grooves 9 and webs 10 are reduced.
  • FIGS. 10, 11 and 12, 13 each relate to four-start variants with, in turn, a pairwise deviating width of the grooves.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Abstract

L'invention concerne un rotor, utilisé en particulier pour une pompe à vis, telle qu'une pompe à vide de type à vis ou analogue, comprenant au moins un profilé de rotor, placé sur la partie extérieure du rotor et qui présente, en particulier un canal de transport entourant de manière hélicoïdale pour un support de travail, et comprenant également un renfoncement qui s'étend à l'intérieur du rotor dans le sens axial, tout en refroidissant le rotor. L'objectif de l'invention est d'améliorer la conception tout en conservant ses avantages d'utilisation, de sorte qu'un refroidissement interne amélioré soit réalisé, en particulier dans des conditions de fonctionnement différentes. A cet effet, un corps de canal (7) hélicoïdal, doté d'au moins un profilé de canal (8) de refroidissement hélicoïdal, destiné à transporter un support de refroidissement, est placé, en particulier, à l'intérieur du renfoncement cylindrique (6) du rotor (1).
PCT/EP2006/060724 2005-03-16 2006-03-15 Rotor et pompe a vide de type a vis comprenant un corps de canal de refroidissement WO2006097478A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE112006000490T DE112006000490A5 (de) 2005-03-16 2006-03-15 Rotor und Schraubenvakuumpumpe mit Kühlnutkörper

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE200510012040 DE102005012040A1 (de) 2005-03-16 2005-03-16 Rotor und Schraubenvakuumpumpe
DE102005012040.7 2005-03-16

Publications (1)

Publication Number Publication Date
WO2006097478A1 true WO2006097478A1 (fr) 2006-09-21

Family

ID=36499290

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2006/060724 WO2006097478A1 (fr) 2005-03-16 2006-03-15 Rotor et pompe a vide de type a vis comprenant un corps de canal de refroidissement

Country Status (2)

Country Link
DE (2) DE102005012040A1 (fr)
WO (1) WO2006097478A1 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103261694A (zh) * 2010-12-14 2013-08-21 格布尔.贝克尔有限责任公司 真空泵
CN105889067A (zh) * 2014-10-31 2016-08-24 英格索尔-兰德公司 旋转螺杆式压缩机
GB2596275A (en) * 2020-05-20 2021-12-29 Edwards Ltd Cooling element

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Publication number Priority date Publication date Assignee Title
DE112016007421A5 (de) * 2016-11-09 2019-08-01 Ralf Steffens Spindelkompressor

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US4073607A (en) * 1976-07-29 1978-02-14 Ingersoll-Rand Company Gas compressor system
SU883558A1 (ru) * 1978-12-11 1981-11-23 Омский политехнический институт Ротор винтовой компрессорной машины
JPH01237388A (ja) * 1988-03-18 1989-09-21 Hitachi Ltd 無給油式回転圧縮機のロータ冷却装置
US6382930B1 (en) * 1997-10-10 2002-05-07 Leybold Vakuum Gmbh Screw vacuum pump provided with rotors
DE19817351A1 (de) * 1998-04-18 1999-10-21 Peter Frieden Schraubenspindel-Vakuumpumpe mit Gaskühlung
SE517211C2 (sv) * 2000-06-07 2002-05-07 Svenska Rotor Maskiner Ab Tryckluftdriven vakuumpump av skruvrotortyp
WO2004074690A1 (fr) * 2003-02-24 2004-09-02 Rietschle Thomas Schopfheim Gmbh Pompe a pistons rotatifs

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Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103261694A (zh) * 2010-12-14 2013-08-21 格布尔.贝克尔有限责任公司 真空泵
US20130224055A1 (en) * 2010-12-14 2013-08-29 Gebr. Becker Gmbh Vacuum pump
JP2013545932A (ja) * 2010-12-14 2013-12-26 ゲーエーベーエル.ベッケル・ゲーエムベーハー 真空ポンプ
US9624927B2 (en) * 2010-12-14 2017-04-18 Gebr. Becker Gmbh Vacuum pump
CN105889067A (zh) * 2014-10-31 2016-08-24 英格索尔-兰德公司 旋转螺杆式压缩机
GB2596275A (en) * 2020-05-20 2021-12-29 Edwards Ltd Cooling element

Also Published As

Publication number Publication date
DE102005012040A1 (de) 2006-09-21
DE112006000490A5 (de) 2007-12-27

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