WO2006095869A1 - Material of female die for barrier rib pattern formation, method of forming female die for barrier rib pattern formation, method of forming barrier rib pattern, and plasma display panel - Google Patents

Material of female die for barrier rib pattern formation, method of forming female die for barrier rib pattern formation, method of forming barrier rib pattern, and plasma display panel Download PDF

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Publication number
WO2006095869A1
WO2006095869A1 PCT/JP2006/304787 JP2006304787W WO2006095869A1 WO 2006095869 A1 WO2006095869 A1 WO 2006095869A1 JP 2006304787 W JP2006304787 W JP 2006304787W WO 2006095869 A1 WO2006095869 A1 WO 2006095869A1
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WIPO (PCT)
Prior art keywords
forming
partition wall
pattern
female
female mold
Prior art date
Application number
PCT/JP2006/304787
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French (fr)
Japanese (ja)
Inventor
Minoru Hanaoka
Keiji Oda
Takayoshi Tanabe
Katsuyuki Takase
Zen Komiya
Original Assignee
Pioneer Corporation
Jsr Corporation
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Application filed by Pioneer Corporation, Jsr Corporation filed Critical Pioneer Corporation
Publication of WO2006095869A1 publication Critical patent/WO2006095869A1/en

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Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/24Manufacture or joining of vessels, leading-in conductors or bases
    • H01J9/241Manufacture or joining of vessels, leading-in conductors or bases the vessel being for a flat panel display
    • H01J9/242Spacers between faceplate and backplate
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/02Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles
    • B29C43/021Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles characterised by the shape of the surface
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0005Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
    • G03F7/0007Filters, e.g. additive colour filters; Components for display devices
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/32Component parts, details or accessories; Auxiliary operations
    • B29C43/52Heating or cooling
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29LINDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
    • B29L2011/00Optical elements, e.g. lenses, prisms
    • B29L2011/0016Lenses

Definitions

  • Partition wall pattern forming female mold material partition wall pattern forming female mold forming method, partition wall pattern forming method, plasma display panel
  • the present invention relates to a partition wall pattern forming female mold material, a partition wall pattern forming female mold forming method, a partition wall pattern forming method, and a plasma display panel.
  • a plurality of discharge cells are formed by dividing an airtight space formed between a pair of flat substrates into a stripe shape or a matrix shape, and the plurality of discharge cells are selectively used. A discharge is generated, and the fluorescent layer formed in the discharge cell is caused to emit light by this discharge to display an image.
  • the above-described discharge cell is divided by the partition formed on the substrate (back substrate).
  • the pattern of the partition on the substrate is between the electrode (address electrode) formed on the substrate. Therefore, in order to form the partition wall on the substrate with high accuracy, various partition wall forming methods have been proposed and implemented.
  • partition wall forming methods one of the methods widely used for mass production is the sandblast method.
  • a low-melting glass paste which is a partition wall material
  • a mask pattern that cannot be shaved by the sandblasting process is formed on the substrate according to the partition pattern.
  • the partition wall is formed by cutting and removing the dry film of the partition wall material at the location, which is covered with a mask by a sandblasting process in which an abrasive is sprayed.
  • this sandblasting method forms a mask pattern by photolithography, it is possible to set the partition wall position with high accuracy, and the processing can be completed in a relatively short time. Therefore, it is widely adopted as a method suitable for mass production.
  • the shape of the discharge cell (the shape of the side wall of the partition wall) is determined by the sandblasting process, the shape of the discharge cell cannot be arbitrarily set, and the discharge cell having a depth, i.e., a high There is a problem that it is not suitable for forming a thick partition wall.
  • a partition wall forming method called an additive method (female mold forming method) is known.
  • a female pattern is formed by a photolithographic process using a photosensitive resin in a portion other than the formation of a partition on the substrate, and then a partition material paste is filled in a portion that becomes a partition between the female molds. Then, the partition pattern is formed by removing the female mold.
  • a photosensitive resin expansion 2 is formed by applying a photosensitive resin paste on a substrate [1 on which a substrate 1 & is formed, or a photosensitive resin paste ((a )). Then, a photomask M having a light opaque portion Ma corresponding to the partition wall pattern is placed on the photosensitive resin expansion 2 and exposed by irradiating reaction light (ultraviolet rays) ((b) in the figure).
  • the female 3 ⁇ 4J2A is obtained by this development process (Fig. (C)), and then the partition wall paste is filled between the formed female 3 ⁇ 4J2A (Fig. (D)), and the female J2A is removed to separate the female die J2A.
  • the step of removing the female 3 ⁇ 4J2A includes a method of immersing the substrate 3 ⁇ 41 in an alkaline aqueous solution to swell and peel the female 3 ⁇ 4J2A, and the female 3 ⁇ 4J2A and the partition material filled therebetween There is a method in which the barrier rib material is vitrified at the same time that the female J2A is released by firing together.
  • Patent Document 1 described below describes a conventional technique for forming a partition wall by this additive method, and an irradiation angle of irradiation light incident on a cross-sectional area of a photosensitive resin plate through a photomask. And forming a female die having a trapezoidal opening in the photosensitive resin plate by applying a photoresist process to the photosensitive resin plate to form a trapezoidal partition wall cross section. Yes.
  • Patent Document 1 Japanese Patent Application Laid-Open No. 2001-57147
  • the above-described additive method is expected as a partition wall forming technique corresponding to high definition and high image quality.
  • the conventional technology does not provide a photosensitive resin itself that can form a female mold having a desired height (that forms a partition wall height of 100 to 300 ⁇ m) in a single exposure.
  • a partition wall that partitions discharge cells having a large depth, and in general, the reaction at the bottom surface of the photosensitive resin film is less likely to proceed than the surface directly irradiated with reaction light.
  • the cross section of the female mold becomes an inverted trapezoid, and it is impossible to widen the bottom surface of the discharge cell to form a desired light emitting space in the discharge cell! /, And! // .
  • An object of the present invention is to deal with such a problem. That is, to provide an effective barrier rib forming method for obtaining a high-definition and high-quality image, and when adopting an additive method for barrier rib formation, it has a sufficient height in one exposure and is desired. It is an object of the present invention to be able to form partition walls (female molds for forming partition walls) having a cross-sectional shape.
  • [Claim 1] A liquid photocurable composition for forming a partition pattern of a plasma display panel by an additive method, comprising a polyfunctional radical-reactive compound and a photopolymerization initiator
  • a partition wall pattern forming female characterized by comprising a liquid photocurable composition having a light transmittance of 10 to 60% at the maximum emission wavelength of an irradiation light source used for curing a 100 m thick film. Mold material.
  • a female-type forming method for forming a partition wall pattern of a plasma display panel by an additive method comprising a polyfunctional radical reactive compound, a photopolymerization initiator, and a photosensitizer.
  • FIG. 1 is an explanatory diagram of a conventional technique.
  • FIG. 2 is an explanatory view showing a method for forming a partition pattern forming female die according to an embodiment of the present invention.
  • FIG. 3 is an explanatory view showing a method for forming a female mold for forming a partition wall pattern according to another embodiment of the present invention.
  • FIG. 4 is an explanatory view showing a method for forming a partition pattern forming female die according to another embodiment of the present invention.
  • FIG. 5 is an explanatory diagram of an example (Table 1).
  • FIG. 6 is a graph showing the relationship between light transmittance and female overhang angle in an example.
  • Embodiments of the present invention are characterized by a female material for forming a partition wall pattern for forming a partition wall pattern of a plasma display panel by an additive method, and include a polyfunctional radical reactive compound, a photopolymerization initiator, and a photosensitizer.
  • the maximum emission wavelength is the emission energy of the irradiation light source. If the light source is a UV lamp, it is usually 365 nm.
  • the light transmittance represents the transmittance of light having the maximum emission wavelength that transmits through a film obtained by coating the liquid photocurable composition to a thickness of 100 m.
  • the liquid photocurable composition used in the embodiment of the present invention contains a polyfunctional radical reactive compound and a photoinitiator as essential components.
  • the polyfunctional radical reactive compound to be used include trimethylolpropane tri (meth) acrylate, trimethylol propane pan trioxyethyl (meth) acrylate, pentaerythritol tri (meth) acrylate, ethylene glycol di ( (Meth) acrylate, triethylene glycol diatalate, tetraethylene glycol di (meth) acrylate, tricyclodecanedyl dimethanol di (meth) acrylate, polyethylene glycol di (meth) acrylate, 1, 4 butanediol di (Meth) acrylate, 1, 6 hexanediol di (meth) acrylate, neopentyl glycol di (meth) acrylate, tripropylene glycol di (meth) acrylate, neopentyl glycol glycol
  • the blending ratio of the polyfunctional radically polymerizable compound in the liquid photocurable composition which is the female material for forming a partition wall pattern of the present invention is generally 30 per 100 parts by weight of the liquid photocurable composition. Parts by weight to 99.9 parts by weight, more preferably 50 parts by weight to 99 parts by weight.
  • a monofunctional radical polymerizable compound may be added to the liquid photocurable resin composition in the embodiment of the present invention.
  • examples of such compounds include burata group-containing ratatas such as N-Buyl pyrrolidone, N-Bielcaprolatatam, isobolol (meth) acrylate, boryl (meth) acrylate, tricyclodehydrol (meth).
  • Alicyclic structures such as attalylate, dicyclopenta (meth) acrylate, 4-butylcyclohexyl (meth) acrylate, (meth) acrylate, benzyl (meth) acrylate, allyloyl morpholine, burimidazole, Butylpyridine, 2-hydroxyethyl (meth) acrylate, 2-hydroxy) acrylate, ethyl (meth) acrylate, propyl (meth) acrylate, isopropyl (meth) acrylate, butyl (meth) acrylate , Amyl (meth) acrylate, isobutyl (meth) acrylate, t-butyl ( (Meth) acrylate, pentyl (meth) acrylate, isoamyl (meth) acrylate, hexyl (meth) acrylate, heptyl (meth) acrylate, octyl (meth)
  • the amount of the monofunctional radically polymerizable compound in the liquid photocurable composition that is the female material for forming the partition wall pattern of the present invention is generally 100 parts by weight of the liquid photocurable composition.
  • the force of 0 parts by weight is also 69 parts by weight, more preferably 0 to 49 parts by weight.
  • a photopolymerization initiator is used in the liquid photocurable composition in the embodiment of the present invention.
  • the photopolymerization initiator is added to control the light transmittance of the liquid photocurable composition in addition to playing a role of initiating the photocuring reaction of the liquid photocurable composition.
  • the light transmittance of the liquid photocurable composition may be controlled only by the blending amount of the photopolymerization initiator, or the photopolymerization initiator may be used in combination with a photosensitizer described later depending on the blending amount of these two components. You may control.
  • photopolymerization initiator examples include 1-hydroxycyclohexyl phenyl ketone, 2,2-dimethoxy-2-phenylacetophenone, xanthone, fluorenone, benzaldehyde, fluorene, anthraquinone, triphenylamine, carbazole, 3-methyl Acetofenone, 4-Chronobenzophenone, 4,4'-Dimethoxybenzophenone, 4,4'-Diaminobenzophenone, Michler's ketone, benzoin propyl ether, benzoin ether, benzyl dimethyl ketal, 1 (4 isopropyl phenol) ) 2-Hydroxy 2-Methylpropane 1-one, 2-Hydroxy-2-methyl 1-Fel Propane 1-one, Thioxanthone, Jetylthioxanthone, 2-Isopropylthioxanthone, 2 Black mouth thixanthone, 2-Methyl-11 ⁇
  • the addition amount of the photopolymerization initiator is adjusted according to the light transmittance of a 100-m-thick film obtained by curing the obtained liquid photocurable composition.
  • Preferred addition of photopolymerization initiator The amount of addition varies depending on the type of photopolymerization initiator and the emission wavelength of the light source used for photocuring, but is generally 0.1 to 20 parts by weight per 100 parts by weight of the liquid photocurable composition. It is preferably 0.5 to 10 parts by weight.
  • the liquid photocurable composition it is preferable to use a photosensitizer together.
  • the photosensitizer plays a role of sensitizing the action of the photopolymerization initiator in the photocuring reaction of the liquid photocurable composition, and also controls the light transmittance of the liquid photocurable composition. Is also added.
  • photosensitizers have a larger extinction coefficient than photopolymerization initiators! / Less for photopolymerization initiator because of! The light transmittance can be controlled effectively by the blending amount.
  • the light transmittance of the liquid photocurable composition by using a photopolymerization initiator and a photosensitizer in combination.
  • a photosensitizer for example, 4-dimethylaminobenzoic acid, methyl 4-dimethylaminobenzoate, ethyl 4-dimethylaminobenzoate, isoamyl 4-dimethylaminobenzoate, thixanthone, 2,4 dimethylthioxanthone, 2,3 jetylthioxanthone, commercially available
  • the product include ubelicril P102, 103, 104, 105 (above, manufactured by UCB).
  • the amount of the photosensitizer added is adjusted in accordance with the light transmittance of the cured film in the same manner as the photopolymerization initiator.
  • the preferred amount of photosensitizer added varies depending on the photosensitizer species and the emission wavelength of the light source used for photocuring. Generally, 0.01 to 15 parts by weight per 100 parts by weight of the liquid photocurable composition. Parts, more preferably 0.05 to 10 parts by weight, even more preferably 0.1 to 5 parts by weight.
  • the viscosity of the liquid photocurable composition can be controlled by adding a solvent in order to adjust the coating film thickness.
  • Solvents for this include benzene, toluene, xylene, hexane, cyclohexane, cyclohexanone, acetone, methyl ethyl ketone, methyl isobutyl ketone, chloroform, methyl chloride, methanol, ethanol, isopropanol, butanol, Water can be used. A combination of these solvents can also be used.
  • the amount of the solvent added can be used at an arbitrary ratio for the purpose of controlling the viscosity of the liquid photocurable composition. If the amount of the solvent added is too large, it takes time to dry the solvent during coating. Mechanical properties of female mold material for partition wall pattern formation obtained without completely removing the solvent The strength may be inferior.
  • the amount of the solvent added is preferably 900 parts by weight or less per 100 parts by weight of the liquid photocurable composition.
  • the above-described light transmittance is obtained.
  • the cross-sectional shape of the partition pattern female mold can be arbitrarily set to inverted trapezoidal, rectangular or trapezoidal.
  • the bottom of the film can be reacted efficiently even when the above-mentioned liquid photocurable composition is formed thick.
  • a female mold having a high height can be formed, and a partition wall that partitions a discharge cell having a depth can be formed.
  • the partition pattern can be adjusted by this adjustment.
  • the cross-sectional shape of the forming female mold can be arbitrarily set to a trapezoidal shape, a rectangular shape, or a composite shape thereof. Then, by setting the shape of the partition formed thereby, it is possible to design the shape of the discharge cell that can obtain good light emission efficiency.
  • FIG. 2 is an explanatory view showing a method for forming a partition pattern forming female die according to an embodiment of the present invention.
  • the substrate 1 is placed on the support plate 10, the electrode 2 (address electrode) is formed, and the dielectric layer 3 (address protection layer) is formed as necessary.
  • a liquid leakage guide plate 11 is erected around the substrate 1 and the substrate 1 surrounded by the liquid leakage guide plate 11 is filled with the liquid photocurable composition described above to form a photosensitive resin film 4. ((A) in the figure).
  • the liquid leakage guide plate 11 is used to form a partition wall having a height of about 100 to 300 m.
  • the photosensitive resin film 4 having a desired thickness is obtained.
  • the present invention is not limited to this, and the liquid photocurable composition described above may be applied to the substrate 1 by an applicator or the like in the form of a resinous paste having a desired viscosity.
  • a resinous paste having a desired viscosity.
  • a photomask 12 having a light-impermeable portion 12a of a partition wall pattern is placed on the photosensitive resin film 4 made of the filled liquid photocurable composition, and reaction light (for example, , UV light having a maximum emission wavelength of 365 nm).
  • reaction light for example, UV light having a maximum emission wavelength of 365 nm.
  • the process is completed with a single exposure of parallel rays.
  • the portion irradiated with the reaction light through the opening other than the light opaque portion 12a is cured, and an uncured portion is formed under the light opaque portion 12a ((b) in the figure).
  • the uncured portion under the light-impermeable portion 12a is removed to obtain a female die 4A having a partition wall pattern (FIG. (C)).
  • the cross-sectional shape of the female die 4A can be arbitrarily set even in one parallel light exposure.
  • a liquid photocurable composition having a light transmittance of 40% or more a female die 4A having a trapezoidal cross section with a bottom surface wider than the top surface as shown in the figure can be obtained.
  • FIG. 3 is an explanatory view showing a method of forming a partition pattern forming female die according to another embodiment of the present invention.
  • the substrate 1 is placed on the support plate 10, the electrode 2 (address electrode) is formed, and the dielectric layer 3 (address protection layer) is formed as necessary.
  • a film (dry film resist) formed by drying the liquid photocurable composition described above is placed to form a photosensitive resin film 4, and a partition pattern light is formed on the photosensitive resin film 4.
  • a photomask 12 having an opaque portion 12a is placed and irradiated with reaction light (for example, ultraviolet light having a maximum emission wavelength of 365 nm) ((a) in the figure). Then, in the subsequent development processing step, the uncured portion under the light-impermeable portion 12a is removed to obtain a female die 4A having a partition pattern ((b) in the figure).
  • FIG. 4 is an explanatory view showing a method of forming a partition pattern forming female die according to another embodiment of the present invention.
  • the liquid photocurable composition having the light transmittance set to a desired value is dried and cured to form a plurality of films 40a to 40d.
  • a plurality of films 40a to 40d are laminated on the substrate 2 on which the electrode 2 or the dielectric layer 3 is formed according to the desired cross-sectional shape of the female mold to be formed. Further, as a subsequent process, a photomask 12 having a light-opaque portion 12a having a partition wall pattern is placed on the plurality of films 40a to 40d and irradiated with reaction light. The uncured part under the transmission part 12a is removed to obtain a female mold with a partition pattern
  • the above-described light transmittances in the plurality of films 40a to 40d are set to different values as appropriate, and the stacking order is set as appropriate, so that a single pass through the photomask 12 is performed.
  • the cross-sectional shape of the female mold can be arbitrarily set by exposure.
  • by increasing the number of laminated films 40a to 40d and setting appropriate light transmittances it is possible to form a female mold having a desired curved cross section as shown in the figure. According to this, in order to obtain good luminous efficiency, the shape of the discharge cell can be arbitrarily designed, and even when a highly precise discharge cell arrangement is formed, an appropriate light emitting space can be formed. And high-quality images can be obtained.
  • the partition material filling step shown in Fig. L (d) and the female die removing step shown in Fig. 1 (e) are performed. After that, the partition pattern can be formed.
  • the partition material is filled between the formed female molds, and then the female mold and the partition material are fired simultaneously.
  • the partition wall material is filled between the female molds by using a partition wall paste such as a low melting point glass paste as in the prior art and by squeegee or coating.
  • a partition wall paste such as a low melting point glass paste as in the prior art and by squeegee or coating.
  • the partition wall material adhering or splashing on the portion other than the groove portion of the female mold is cleaned by means such as polishing, and the female mold and the filled partition wall material are fired at the same time.
  • the partition material is vitrified to form a partition pattern on the substrate 1.
  • the female mold can be formed while maintaining the shape of the molded product of the partition wall, regardless of the shape of the female mold (for example, a trapezoid with a wide bottom surface). To remove Togashi.
  • the partition wall pattern forming female mold material comprising the liquid photocurable composition described above has a property of shrinking when heated, and there is no stress on the partition wall material during firing, and the partition wall forming support material during partition wall formation. In particular, it is effective in eliminating the distortion and cracking of the partition walls.
  • this female material for forming a partition wall pattern is useful from the viewpoint of environmental protection because it generates only carbon dioxide and water vapor during firing and does not generate anything harmful to the environment.
  • the discharge cells are partitioned by the barrier rib pattern formed as described above, even when the density of the discharge cells is increased in order to display a high-definition image, A sufficient emission space can be formed in the discharge cell, and the discharge cell can be designed in a desired shape so as to increase the luminous efficiency.
  • the partition wall has an inverted trapezoidal cross section, the bottom surface can be widened with respect to the opening of the discharge cell, and the light emitting space is effectively reduced. Can be spread.
  • a glass substrate that had been surface-treated with an ethanol solution of trimethoxysilylpropyl metatalylate was prepared.
  • the liquid photocurable composition was applied to the glass substrate for each of the examples shown in Table 1 using an applicator.
  • the coating thickness was adjusted to be about 220 m after curing. This is left in an oven at 80 ° C for 10 minutes to dry, and then a pattern mask is applied to the surface and UV is applied. UV irradiation was performed using a conveyor. The illuminance of UV was 20 mWZcm 2 and the amount of irradiation was 45 miZcm 2 .
  • the relationship between the light transmittance and the angle ⁇ (female overhang angle) is shown in FIG.
  • the overhang angle ⁇ can be changed within a range of about 70 to L10. That is, it becomes possible to change the female section to an inverted trapezoidal force rectangle or trapezoid.
  • a partition wall female mold for forming a partition wall having a sufficient height and a desired cross-sectional shape can be formed by one exposure.

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  • Mechanical Engineering (AREA)
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  • General Physics & Mathematics (AREA)
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  • Gas-Filled Discharge Tubes (AREA)
  • Electroluminescent Light Sources (AREA)

Abstract

In the employment of additive method in the formation of barrier rib, it is intended to form a barrier rib (female die for barrier rib formation) having satisfactory height and desirable sectional configuration by one-time exposure. Female die (4A) of trapezoidal section with broad bottom plane can be provided by forming photosensitive resin film (4) for formation of female die (4A) from a liquid photohardening composition comprising a polyfunctional compound with radical reactivity, a photopolymerization initiator and a photosensitizer, which liquid photohardening composition exhibits a light transmittance of 10 to 60% at maximum emission wavelength of an irradiation light source for use in hardening of 100 μm thick film.

Description

明 細 書  Specification
隔壁パターン形成用雌型材料、隔壁パターン形成用雌型の形成方法、 隔壁パターン形成方法、プラズマディスプレイパネル  Partition wall pattern forming female mold material, partition wall pattern forming female mold forming method, partition wall pattern forming method, plasma display panel
技術分野  Technical field
[0001] 本発明は、隔壁パターン形成用雌型材料、隔壁パターン形成用雌型の形成方法、 隔壁パターン形成方法、プラズマディスプレイパネルに関するものである。  TECHNICAL FIELD [0001] The present invention relates to a partition wall pattern forming female mold material, a partition wall pattern forming female mold forming method, a partition wall pattern forming method, and a plasma display panel.
背景技術  Background art
[0002] プラズマディスプレイパネルは、一対の平面基板間に形成された気密空間内を、ス トライプ状又はマトリクス状に区画して複数の放電セルを形成し、この複数の放電セ ル内で選択的に放電を発生させ、この放電によって放電セル内に形成した蛍光層を 発光させて画像を表示するものである。  [0002] In a plasma display panel, a plurality of discharge cells are formed by dividing an airtight space formed between a pair of flat substrates into a stripe shape or a matrix shape, and the plurality of discharge cells are selectively used. A discharge is generated, and the fluorescent layer formed in the discharge cell is caused to emit light by this discharge to display an image.
[0003] 前述した放電セルは、基板 (背面基板)上に形成される隔壁によって区画されてい る力 この隔壁の基板上でのパターンは、基板上に形成された電極 (アドレス電極)と の間に高精度な相対位置関係が求められるので、この隔壁を基板上に精度良く形成 するために、各種の隔壁形成方法が提案され、また実施されている。  [0003] The above-described discharge cell is divided by the partition formed on the substrate (back substrate). The pattern of the partition on the substrate is between the electrode (address electrode) formed on the substrate. Therefore, in order to form the partition wall on the substrate with high accuracy, various partition wall forming methods have been proposed and implemented.
[0004] この隔壁形成方法の中で、現在広く量産に採用されている方法の一つにサンドブ ラスト法がある。このサンドブラスト法は、隔壁材料となる低融点ガラスペーストを基板 上に塗布して乾燥させた後、その上に、サンドブラスト工程では削れないマスクパタ ーンを隔壁パターンに応じて形成し、微少粉体 (研磨材)を吹き付けるサンドブラスト 工程によってマスクで覆われて 、な 、箇所の隔壁材料乾燥膜を切削除去して隔壁を 形成する方法である。  [0004] Among the partition wall forming methods, one of the methods widely used for mass production is the sandblast method. In this sandblasting method, a low-melting glass paste, which is a partition wall material, is applied onto a substrate and dried, and then a mask pattern that cannot be shaved by the sandblasting process is formed on the substrate according to the partition pattern. In this method, the partition wall is formed by cutting and removing the dry film of the partition wall material at the location, which is covered with a mask by a sandblasting process in which an abrasive is sprayed.
[0005] このサンドブラスト法は、フォトリソグラフィによってマスクパターンを形成するので、 高精度な隔壁位置の設定が可能であり、比較的短時間で処理が完了するので、量 産に適した方法として広く採用されているが、放電セルの形状 (隔壁側面の形状)が サンドブラスト工程によって決められてしまうので、放電セルの形状を任意に設定す ることができず、また、奥行きのある放電セル、即ち高さのある隔壁の形成には適さな いという問題がある。 [0006] また、前述したサンドブラスト法の他に、アディティブ法 (雌型形成法)と呼ばれる隔 壁形成方法が知られている。このアディティブ法は、基板上の隔壁を形成する以外の 部分に感光性榭脂によるフォトリソグラフイエ程によって雌型のノターンを形成した後 、雌型間の隔壁となる部分に隔壁材のペーストを充填し、その後雌型を除去すること によって隔壁パターンを形成する方法である。 [0005] Since this sandblasting method forms a mask pattern by photolithography, it is possible to set the partition wall position with high accuracy, and the processing can be completed in a relatively short time. Therefore, it is widely adopted as a method suitable for mass production. However, since the shape of the discharge cell (the shape of the side wall of the partition wall) is determined by the sandblasting process, the shape of the discharge cell cannot be arbitrarily set, and the discharge cell having a depth, i.e., a high There is a problem that it is not suitable for forming a thick partition wall. [0006] In addition to the above-described sandblasting method, a partition wall forming method called an additive method (female mold forming method) is known. In this additive method, a female pattern is formed by a photolithographic process using a photosensitive resin in a portion other than the formation of a partition on the substrate, and then a partition material paste is filled in a portion that becomes a partition between the female molds. Then, the partition pattern is formed by removing the female mold.
[0007] このアディティブ法の工程を図 1によって説明する。まず、電¾1&が形成された基 ¾[1上にドライフィルムレジストを載置するカゝ、或いは感光性榭脂ペーストを塗布する ことによって、感光性榭脂膨2を形成する(同図 (a) )。そして、隔壁パターンに応じた 光不透過部 Maを有するフォトマスク Mを感光性榭脂膨2上に設置し、反応光 (紫外 線)を照射して露光を行い(同図(b)、その後の現像処理によって雌 ¾J2Aを得る(同 図 (c) )。その後、形成された雌 ¾J2A間に隔壁材ペーストを充填し(同図 (d) )、雌型 J2Aを除去することで、隔衝3のパターンを形成する。この際、雌 ¾J2Aを除去する 工程としては、基 ¾[1をアルカリ水溶液等に浸漬させて雌 ¾J2Aを膨潤剥離させる 方法と、雌 ¾J2Aとその間に充填された隔壁材を共に焼成して、雌 ¾J2Aを分解除 去すると同時に、隔壁材をガラス化させる方法がある。  [0007] The steps of this additive method will be described with reference to FIG. First, a photosensitive resin expansion 2 is formed by applying a photosensitive resin paste on a substrate [1 on which a substrate 1 & is formed, or a photosensitive resin paste ((a )). Then, a photomask M having a light opaque portion Ma corresponding to the partition wall pattern is placed on the photosensitive resin expansion 2 and exposed by irradiating reaction light (ultraviolet rays) ((b) in the figure). The female ¾J2A is obtained by this development process (Fig. (C)), and then the partition wall paste is filled between the formed female ¾J2A (Fig. (D)), and the female J2A is removed to separate the female die J2A. In this case, the step of removing the female ¾J2A includes a method of immersing the substrate ¾1 in an alkaline aqueous solution to swell and peel the female ¾J2A, and the female ¾J2A and the partition material filled therebetween There is a method in which the barrier rib material is vitrified at the same time that the female J2A is released by firing together.
[0008] また、下記特許文献 1には、このアディティブ法による隔壁形成の従来技術が記載 されており、フォトマスクを介して感光性榭脂板の断面領域へ入射される照射光の照 射角度を変化させて、感光性榭脂板にフォトレジスト加工を施すことによって、感光 性榭脂板の開口を台形状にした雌型を形成して台形状の隔壁断面を形成すること が開示されている。  [0008] Further, Patent Document 1 described below describes a conventional technique for forming a partition wall by this additive method, and an irradiation angle of irradiation light incident on a cross-sectional area of a photosensitive resin plate through a photomask. And forming a female die having a trapezoidal opening in the photosensitive resin plate by applying a photoresist process to the photosensitive resin plate to form a trapezoidal partition wall cross section. Yes.
[0009] 特許文献 1 :特開 2001— 57147号  Patent Document 1: Japanese Patent Application Laid-Open No. 2001-57147
発明の開示  Disclosure of the invention
発明が解決しょうとする課題  Problems to be solved by the invention
[0010] 表示画像の高精細化はプラズマディスプレイパネルの抱える主要な課題になって おり、 VGA, XGA、 SXGA、 QXGA、更に高精細な画像に対応するパネル形成技 術の開発が進められている。この際、設定された画面サイズにおいて画像の高精細 化を進めようとすると、個々の放電セルの開口面積或いはピッチが小さくなる力 良 好な画質を得るためには放電セル内で十分な発光空間を確保する(プラズマ発生の ためのガス占有体積を大きくして、発光効率を高める)必要があるので、放電セルの 奥行き(高さ)を大きくすること、或いは放電セルの底面を広くすること等が必要になる 。また、良好な発光効率を得るためには放電セルの形状を所望の形状に設計するこ とも必要になる。 [0010] Increasing the resolution of displayed images has become a major challenge for plasma display panels, and development of panel forming technologies that support VGA, XGA, SXGA, QXGA, and higher-definition images is underway. . At this time, if an attempt is made to increase the definition of the image with the set screen size, the opening area or pitch of each discharge cell is reduced. In order to obtain a good image quality, a sufficient light emitting space in the discharge cell. (Plasma generation Therefore, it is necessary to increase the depth (height) of the discharge cell or widen the bottom surface of the discharge cell. In order to obtain good luminous efficiency, it is necessary to design the shape of the discharge cell to a desired shape.
[0011] このように、高精細且つ高画質の画像を得るために必要な放電セルを形成するに は、放電セルを区画する隔壁の形成技術を改善する必要がある。し力しながら、前述 したサンドブラスト法では、その方法力 必然的に放電セルの開口面積に対して底面 積が小さく成らざるを得ず、また、放電セルの奥行きを大きくすることにも適さないとい う根本的な不利がある。  As described above, in order to form the discharge cells necessary for obtaining a high-definition and high-quality image, it is necessary to improve the technology for forming the partition walls that partition the discharge cells. However, the above-described sandblasting method inevitably has a small bottom area with respect to the opening area of the discharge cell, and is not suitable for increasing the depth of the discharge cell. There is a fundamental disadvantage.
[0012] そこで、高精細且つ高画質に対応する隔壁形成技術として前述したアディティブ法 に期待が寄せられている。しかしながら、従来の技術では一回の露光で所望の高さ( 100〜300 μ mの隔壁高さを形成するもの)を有する雌型を形成できる感光性榭脂 自体が得られておらず、十分な奥行きを有する放電セルを区画する隔壁を形成する ことができない問題があり、また、一般に、反応光が直接照射される表面よりも感光性 榭脂膜の底面での反応が進み難くなるので、必然的に雌型の断面が逆台形になつ てしまい、放電セルの底面を広くして、放電セル内に所望の発光空間を形成すること ができな!/、と!/、う問題がある。  [0012] Therefore, the above-described additive method is expected as a partition wall forming technique corresponding to high definition and high image quality. However, the conventional technology does not provide a photosensitive resin itself that can form a female mold having a desired height (that forms a partition wall height of 100 to 300 μm) in a single exposure. There is a problem that it is impossible to form a partition wall that partitions discharge cells having a large depth, and in general, the reaction at the bottom surface of the photosensitive resin film is less likely to proceed than the surface directly irradiated with reaction light. Inevitably, the cross section of the female mold becomes an inverted trapezoid, and it is impossible to widen the bottom surface of the discharge cell to form a desired light emitting space in the discharge cell! /, And! // .
[0013] 更には、所望の形状の放電セルを形成しょうとすると、前述した特許文献 1に記載さ れる従来技術のように、照射光の照射角度を変化させるなど煩雑な露光処理が必要 になり、生産性の高 、隔壁形成を行うことができない問題があった。  [0013] Furthermore, in order to form a discharge cell having a desired shape, a complicated exposure process such as changing the irradiation angle of irradiation light as in the prior art described in Patent Document 1 described above is required. However, there was a problem that the partition wall could not be formed because of high productivity.
[0014] 本発明は、このような問題に対処することを課題の一例とするものである。すなわち 、高精細且つ高画質の画像を得るための有効な隔壁形成方法を提供すること、隔壁 形成にアディティブ法を採用するに際して、一回の露光で十分な高さを有し、且つ所 望の断面形状を有する隔壁 (隔壁を形成するための雌型)を形成することができるこ と、等が本発明の目的である。  [0014] An object of the present invention is to deal with such a problem. That is, to provide an effective barrier rib forming method for obtaining a high-definition and high-quality image, and when adopting an additive method for barrier rib formation, it has a sufficient height in one exposure and is desired. It is an object of the present invention to be able to form partition walls (female molds for forming partition walls) having a cross-sectional shape.
課題を解決するための手段  Means for solving the problem
[0015] このような目的を達成するために、本発明は、以下の各独立請求項に係る構成を 少なくとも具備するものである。 [0016] [請求項 1]プラズマディスプレイパネルの隔壁パターンをアディティブ法で形成す るための雌型材料であって、多官能ラジカル反応性化合物、および光重合開始剤を 含有する液状光硬化性組成物で、 100 m厚フィルムを硬化する際に用いる照射光 源の最大発光波長における光線透過率が 10〜60%である液状光硬化性組成物か らなることを特徴とする隔壁パターン形成用雌型材料。 In order to achieve such an object, the present invention includes at least the configurations according to the following independent claims. [0016] [Claim 1] A liquid photocurable composition for forming a partition pattern of a plasma display panel by an additive method, comprising a polyfunctional radical-reactive compound and a photopolymerization initiator A partition wall pattern forming female characterized by comprising a liquid photocurable composition having a light transmittance of 10 to 60% at the maximum emission wavelength of an irradiation light source used for curing a 100 m thick film. Mold material.
[0017] [請求項 5]プラズマディスプレイパネルの隔壁パターンをアディティブ法で形成する ための雌型の形成方法であって、多官能ラジカル反応性化合物、光重合開始剤、お よび光増感剤を含有する液状光硬化性組成物で、 100 m厚フィルムを硬化する際 に用いる照射光源の最大発光波長における光線透過率が 10〜60%である液状光 硬化性組成物からなることを特徴とする隔壁パターン形成用雌型の形成方法。 図面の簡単な説明  [0017] [Claim 5] A female-type forming method for forming a partition wall pattern of a plasma display panel by an additive method, comprising a polyfunctional radical reactive compound, a photopolymerization initiator, and a photosensitizer. A liquid photocurable composition containing a liquid photocurable composition having a light transmittance of 10 to 60% at the maximum emission wavelength of an irradiation light source used for curing a 100 m thick film. A method of forming a female mold for forming a partition wall pattern. Brief Description of Drawings
[0018] [図 1]従来技術の説明図である。  FIG. 1 is an explanatory diagram of a conventional technique.
[図 2]本発明の一実施形態に係る隔壁パターン形成用雌型の形成方法を示す説明 図である。  FIG. 2 is an explanatory view showing a method for forming a partition pattern forming female die according to an embodiment of the present invention.
[図 3]本発明の他の実施形態に係る隔壁パターン形成用雌型の形成方法を示す説 明図である。  FIG. 3 is an explanatory view showing a method for forming a female mold for forming a partition wall pattern according to another embodiment of the present invention.
[図 4]本発明の他の実施形態に係る隔壁パターン形成用雌型の形成方法を示す説 明図である。  FIG. 4 is an explanatory view showing a method for forming a partition pattern forming female die according to another embodiment of the present invention.
[図 5]実施例 (表 1)の説明図である。  FIG. 5 is an explanatory diagram of an example (Table 1).
[図 6]実施例における光線透過率と雌型のオーバーハング角度の関係を示すグラフ である。  FIG. 6 is a graph showing the relationship between light transmittance and female overhang angle in an example.
発明を実施するための最良の形態  BEST MODE FOR CARRYING OUT THE INVENTION
[0019] 以下、本発明の実施形態を説明する。本発明の実施形態は、プラズマディスプレイ パネルの隔壁パターンをアディティブ法で形成するための隔壁パターン形成用雌型 材料に特徴があり、多官能ラジカル反応性化合物、光重合開始剤、および光増感剤 を含有する液状光硬化性組成物で、 100 m厚フィルムを硬化する際に用いる照射 光源の最大発光波長における光線透過率が 10〜60%である液状光硬化性組成物 力もなることを特徴としている。ここで、最大発光波長とは、その照射光源の発光エネ ルギ一が最大値となる波長であり、照射光源が UVランプである場合には、通常 365 nmである。また、光線透過率は液状光硬化性組成物を 100 m厚に塗工して得ら れるフィルムを透過する最大発光波長光の透過率を表す。 Hereinafter, embodiments of the present invention will be described. Embodiments of the present invention are characterized by a female material for forming a partition wall pattern for forming a partition wall pattern of a plasma display panel by an additive method, and include a polyfunctional radical reactive compound, a photopolymerization initiator, and a photosensitizer. A liquid photocurable composition containing 100% of a film having a light transmittance of 10 to 60% at the maximum emission wavelength of an irradiation light source used for curing a 100 m thick film. Yes. Here, the maximum emission wavelength is the emission energy of the irradiation light source. If the light source is a UV lamp, it is usually 365 nm. The light transmittance represents the transmittance of light having the maximum emission wavelength that transmits through a film obtained by coating the liquid photocurable composition to a thickness of 100 m.
[0020] すなわち、本発明の実施形態で用いる液状光硬化性組成物は、多官能ラジカル反 応性化合物と光開始剤を必須成分として含有する。使用する多官能ラジカル反応性 化合物としては、例えばトリメチロールプロパントリ(メタ)アタリレート、トリメチロールプ 口パントリオキシェチル (メタ)アタリレート、ペンタエリスリトールトリ(メタ)アタリレート、 エチレングリコールジ (メタ)アタリレート、トリエチレングリコールジアタリレート、テトラ エチレングリコールジ (メタ)アタリレート、トリシクロデカンジィルジメタノールジ(メタ)ァ タリレート、ポリエチレングリコールジ(メタ)アタリレート、 1, 4 ブタンジオールジ(メタ )アタリレート、 1, 6 へキサンジオールジ (メタ)アタリレート、ネオペンチルグリコール ジ (メタ)アタリレート、トリプロピレングリコールジ (メタ)アタリレート、ネオペンチルグリ コールジ (メタ)アタリレート、ビスフエノール Aジグリシジルエーテルの両末端 (メタ)ァ クリル酸付加体、ペンタエリスリトールトリ(メタ)アタリレート、ペンタエリスリトールテトラ (メタ)アタリレート、ジペンタエリスリトールへキサ (メタ)アタリレート、ポリエステルジ (メ タ)アタリレート、トリス(2—ヒドロキシェチル)イソシァヌレートトリ (メタ)アタリレート、トリ ス(2—ヒドロキシェチル)イソシァヌレートジ (メタ)アタリレート、ビスフエノール Aのェ チレンオキサイドまたはプロピレンオキサイドの付加体であるジオールのジ (メタ)ァク リレート、水添ビスフエノール Aのエチレンオキサイドまたはプロピレンオキサイドの付 加体であるジオールのジ (メタ)アタリレート、ビスフエノール Aのジグリシジルエーテル に (メタ)アタリレートを付加させたエポキシ (メタ)アタリレート(以下、「ビスフエノール A のジエポキシ (メタ)アタリレート」ともいう。)、トリエチレングリコールジビュルエーテル 等が挙げられる。  That is, the liquid photocurable composition used in the embodiment of the present invention contains a polyfunctional radical reactive compound and a photoinitiator as essential components. Examples of the polyfunctional radical reactive compound to be used include trimethylolpropane tri (meth) acrylate, trimethylol propane pan trioxyethyl (meth) acrylate, pentaerythritol tri (meth) acrylate, ethylene glycol di ( (Meth) acrylate, triethylene glycol diatalate, tetraethylene glycol di (meth) acrylate, tricyclodecanedyl dimethanol di (meth) acrylate, polyethylene glycol di (meth) acrylate, 1, 4 butanediol di (Meth) acrylate, 1, 6 hexanediol di (meth) acrylate, neopentyl glycol di (meth) acrylate, tripropylene glycol di (meth) acrylate, neopentyl glycol cold (meth) acrylate, bisph Diol A diglycidyl ether end (meth) acrylic acid adduct, pentaerythritol tri (meth) acrylate, pentaerythritol tetra (meth) acrylate, dipentaerythritol hexa (meth) acrylate, polyester di (meth ) Atarylate, Tris (2-hydroxyethyl) isocyanurate tri (meth) acrylate, Tris (2-hydroxyethyl) isocyanurate di (meth) acrylate, Ethylene oxide of bisphenol A or Di (meth) acrylate of diol, an adduct of propylene oxide, ethylene oxide of hydrogenated bisphenol A or di (meth) acrylate of diol, an adduct of propylene oxide, diglycidyl ether of bisphenol A (Meta) aterate added to Epoxy (meth) Atari rate (hereinafter, also referred to as "diepoxy of bisphenol A (meth) Atari rate".), Triethylene glycol di Bulle ether.
[0021] これらの多官能ラジカル反応性化合物のうち、ビスフエノール Aジグリシジルエーテ ルに (メタ)アタリレートを付加させたエポキシ (メタ)アタリレート、ジペンタエリスリトー ルへキサアタリレート、トリシクロデカンジィルジメタノールジ (メタ)アタリレート、ビスフ ェノール Aのエチレンオキサイドまたはプロピレンオキサイドの付カ卩体であるジオール のジ (メタ)アタリレート、トリス(2—ヒドロキシェチル)イソシァヌレートトリ(メタ)アタリレ ートが好ましい。 [0021] Among these polyfunctional radical-reactive compounds, epoxy (meth) acrylate with bisphenol A diglycidyl ether added with (meth) acrylate, dipentaerythritol hexa acrylate, tricyclo Didecane dimethanol di (meth) acrylate, bisphenol A ethylene oxide or propylene oxide diol di (meth) acrylate, tris (2-hydroxyethyl) isocyanurate tri (meta) ) Atarire Is preferred.
[0022] 本発明の隔壁パターン形成用雌型材料である液状光硬化性組成物中の多官能ラ ジカル重合性化合物の配合割合は、一般的には液状光硬化性組成物 100重量部 あたり 30重量部から 99. 9重量部、より好ましくは 50重量部から 99重量部である。  [0022] The blending ratio of the polyfunctional radically polymerizable compound in the liquid photocurable composition which is the female material for forming a partition wall pattern of the present invention is generally 30 per 100 parts by weight of the liquid photocurable composition. Parts by weight to 99.9 parts by weight, more preferably 50 parts by weight to 99 parts by weight.
[0023] また、本発明の実施形態における液状光硬化性榭脂組成物には、単官能ラジカル 重合性ィ匕合物を添加することもできる。そのような化合物としては、例えば N—ビュル ピロリドン、 N—ビ-ルカプロラタタムの如きビュル基含有ラタタム、イソボル-ル (メタ) アタリレート、ボル-ル (メタ)アタリレート、トリシクロデ力-ル (メタ)アタリレート、ジシク 口ペンタ-ル (メタ)アタリレート、 4ーブチルシクロへキシル (メタ)アタリレートの如き脂 環式構造含有 (メタ)アタリレート、ベンジル (メタ)アタリレート、アタリロイルモルホリン 、ビュルイミダゾール、ビュルピリジン、 2—ヒドロキシェチル(メタ)アタリレート、 2—ヒ タ)アタリレート、ェチル (メタ)アタリレート、プロピル (メタ)アタリレート、イソプロピル (メ タ)アタリレート、ブチル (メタ)アタリレート、ァミル (メタ)アタリレート、イソブチル (メタ) アタリレート、 t—ブチル (メタ)アタリレート、ペンチル (メタ)アタリレート、イソアミル (メ タ)アタリレート、へキシル (メタ)アタリレート、ヘプチル (メタ)アタリレート、ォクチル (メ タ)アタリレート、イソォクチル(メタ)アタリレート、 2—ェチルへキシル (メタ)アタリレー ト、ノ-ル (メタ)アタリレート、デシル (メタ)アタリレート、イソデシル (メタ)アタリレート、 ゥンデシル (メタ)アタリレート、ドデシル (メタ)アタリレート、ラウリル (メタ)アタリレート、 ステアリル (メタ)アタリレート、イソステアリル (メタ)アタリレート、テトラヒドロフルフリル( メタ)アタリレート、ブトキシェチル (メタ)アタリレート、エトキシジエチレングリコール (メ タ)アタリレート、フエノキシェチル (メタ)アタリレート、ポリエチレングリコールモノ(メタ) アタリレート、ポリプロピレングリコールモノ(メタ)アタリレート、メトキシエチレングリコー ル (メタ)アタリレート、エトキシェチル (メタ)アタリレート、メトキシポリエチレングリコー ル (メタ)アタリレート、メトキシポリプロピレングリコール (メタ)アタリレート、ジアセトン( メタ)アクリルアミド、イソブトキシメチル (メタ)アクリルアミド、 N, N—ジメチル (メタ)ァ クリルアミド、 t—ォクチル (メタ)アクリルアミド、ジメチルアミノエチル (メタ)アタリレート 、ジェチルアミノエチル (メタ)アタリレート、 7—ァミノ— 3, 7—ジメチルォクチル (メタ) アタリレート、 N, N ジェチル (メタ)アクリルアミド、 N, N ジメチルァミノプロピル (メ タ)アクリルアミド、ヒドロキシブチルビ-ルエーテル、ラウリルビュルエーテル、セチル ビュルエーテル、 2—ェチルへキシルビ-ルエーテルを挙げることができる。 [0023] A monofunctional radical polymerizable compound may be added to the liquid photocurable resin composition in the embodiment of the present invention. Examples of such compounds include burata group-containing ratatas such as N-Buyl pyrrolidone, N-Bielcaprolatatam, isobolol (meth) acrylate, boryl (meth) acrylate, tricyclodehydrol (meth). Alicyclic structures such as attalylate, dicyclopenta (meth) acrylate, 4-butylcyclohexyl (meth) acrylate, (meth) acrylate, benzyl (meth) acrylate, allyloyl morpholine, burimidazole, Butylpyridine, 2-hydroxyethyl (meth) acrylate, 2-hydroxy) acrylate, ethyl (meth) acrylate, propyl (meth) acrylate, isopropyl (meth) acrylate, butyl (meth) acrylate , Amyl (meth) acrylate, isobutyl (meth) acrylate, t-butyl ( (Meth) acrylate, pentyl (meth) acrylate, isoamyl (meth) acrylate, hexyl (meth) acrylate, heptyl (meth) acrylate, octyl (meth) acrylate, isooctyl (meth) acrylate 2—Ethylhexyl (meth) acrylate, Nor (meth) acrylate, Decyl (meth) acrylate, Isodecyl (meth) acrylate, Undecyl (meth) acrylate, Dodecyl (meth) acrylate, Lauryl ( (Meth) Atarylate, Stearyl (Meth) Atarylate, Isostearyl (Meth) Atarylate, Tetrahydrofurfuryl (Meth) Atarylate, Butoxychetyl (Meth) Atarylate, Ethoxydiethylene Glycol (Meth) Atalylate, Phenoxetyl (Meth) Atari Rate, polyethylene Recall mono (meth) acrylate, polypropylene glycol mono (meth) acrylate, methoxyethylene glycol (meth) acrylate, ethoxyethyl (meth) acrylate, methoxy polyethylene glycol (meth) acrylate, methoxy polypropylene glycol (meth) Atalylate, diacetone (meth) acrylamide, isobutoxymethyl (meth) acrylamide, N, N-dimethyl (meth) acrylamide, t-octyl (meth) acrylamide, dimethylaminoethyl (meth) atalylate, jetylaminoethyl ( (Meth) atallylate, 7-amino- 3, 7-dimethyloctyl (meth) Mention may be made of atarylate, N, N jetyl (meth) acrylamide, N, N dimethylaminopropyl (meth) acrylamide, hydroxybutyl butyl ether, lauryl butyl ether, cetyl butyl ether, 2-ethyl hexyl butyl ether. it can.
[0024] 本発明の隔壁パターン形成用雌型材料である液状光硬化性組成物中の単官能ラ ジカル重合性化合物の配合量は、一般的には液状光硬化性組成物 100重量部あた り 0重量部力も 69重量部、より好ましくは 0重量部から 49重量部である。  [0024] The amount of the monofunctional radically polymerizable compound in the liquid photocurable composition that is the female material for forming the partition wall pattern of the present invention is generally 100 parts by weight of the liquid photocurable composition. The force of 0 parts by weight is also 69 parts by weight, more preferably 0 to 49 parts by weight.
[0025] また、本発明の実施形態における液状光硬化性組成物には光重合開始剤が用い られる。光重合開始剤は、液状光硬化性組成物の光硬化反応を開始させる役割を 担うことに加え、液状光硬化性組成物の光線透過率を制御するためにも添加される。 液状光硬化性組成物の光線透過率は、光重合開始剤の配合量のみにより制御して もよいし、光重合開始剤に後述の光増感剤を併用してこれら両成分の配合量により 制御してもよい。この光重合開始剤としては、例えば 1—ヒドロキシシクロへキシルフェ 二ルケトン、 2, 2—ジメトキシー 2—フエニルァセトフエノン、キサントン、フルォレノン、 ベンズアルデヒド、フルオレン、アントラキノン、トリフエ-ルァミン、カルバゾール、 3— メチルァセトフエノン、 4—クロ口べンゾフエノン、 4, 4'—ジメトキシベンゾフエノン、 4, 4'ージァミノべンゾフエノン、ミヒラーケトン、ベンゾインプロピルエーテル、ベンゾイン ェチルエーテル、ベンジルジメチルケタール、 1一(4 イソプロピルフエ-ル) 2— ヒドロキシ 2—メチルプロパン一 1 オン、 2 -ヒドロキシ - 2-メチル 1—フエ-ル プロパン 1 オン、チォキサントン、ジェチルチオキサントン、 2—イソプロピルチオ キサントン、 2 クロ口チォキサントン、 2—メチルー 1一〔4 (メチルチオ)フエ-ル〕 2 モルホリノ一プロパン 1 オン、 2, 4, 6 トリメチルベンゾィルジフエニルフ ォスフィンオキサイド、ビス一(2, 6 ジメトキシベンゾィル) 2, 4, 4 トリメチルペン チルフオフフィンォキシド;また、市販品としては IRUGACURE184、 369、 651、 50 0、 907、 CGI1700, CGI1750, CGI1850, CG24— 61 (以上、チノくスぺシャリティ 一ケミカルズ (株)製); LucirinLR8728 (BASF製); Darocurel l l6、 1173 (以上 、メルク製);ュベタリル P36 (UCB製)等が挙げられる。  In addition, a photopolymerization initiator is used in the liquid photocurable composition in the embodiment of the present invention. The photopolymerization initiator is added to control the light transmittance of the liquid photocurable composition in addition to playing a role of initiating the photocuring reaction of the liquid photocurable composition. The light transmittance of the liquid photocurable composition may be controlled only by the blending amount of the photopolymerization initiator, or the photopolymerization initiator may be used in combination with a photosensitizer described later depending on the blending amount of these two components. You may control. Examples of the photopolymerization initiator include 1-hydroxycyclohexyl phenyl ketone, 2,2-dimethoxy-2-phenylacetophenone, xanthone, fluorenone, benzaldehyde, fluorene, anthraquinone, triphenylamine, carbazole, 3-methyl Acetofenone, 4-Chronobenzophenone, 4,4'-Dimethoxybenzophenone, 4,4'-Diaminobenzophenone, Michler's ketone, benzoin propyl ether, benzoin ether, benzyl dimethyl ketal, 1 (4 isopropyl phenol) ) 2-Hydroxy 2-Methylpropane 1-one, 2-Hydroxy-2-methyl 1-Fel Propane 1-one, Thioxanthone, Jetylthioxanthone, 2-Isopropylthioxanthone, 2 Black mouth thixanthone, 2-Methyl-11 〔Four (Methylthio) phenol] 2 Morpholinopropane 1-one, 2, 4, 6 Trimethylbenzoyldiphenylphosphine oxide, Bis (2,6 dimethoxybenzoyl) 2, 4, 4 Trimethylpentyl thiol In addition, commercially available products are IRUGACURE184, 369, 651, 500, 907, CGI1700, CGI1750, CGI1850, CG24-61 (above, manufactured by Chinoku Specialty One Chemicals); LucirinLR8728 (manufactured by BASF) ); Darocurel l6, 1173 (above, manufactured by Merck); and Ubetalar P36 (manufactured by UCB).
[0026] この光重合開始剤の添加量は、得られた液状光硬化性組成物を硬化して得られる 100 m厚のフィルムの光線透過率に応じて調整する。光重合開始剤の好ましい添 加量は、光重合開始剤種、光硬化に用いる光源の発光波長によっても異なるが、一 般的には液状光硬化性組成物 100重量部あたり 0. 1重量部から 20重量部、より好 ましくは 0. 5重量部から 10重量部である。 [0026] The addition amount of the photopolymerization initiator is adjusted according to the light transmittance of a 100-m-thick film obtained by curing the obtained liquid photocurable composition. Preferred addition of photopolymerization initiator The amount of addition varies depending on the type of photopolymerization initiator and the emission wavelength of the light source used for photocuring, but is generally 0.1 to 20 parts by weight per 100 parts by weight of the liquid photocurable composition. It is preferably 0.5 to 10 parts by weight.
[0027] また、本発明の実施形態における液状光硬化性組成物では光増感剤を併用する ことが好ましい。光増感剤は、液状光硬化性組成物の光硬化反応における光重合開 始剤の作用を増感する役割を担うことに加え、液状光硬化性組成物の光線透過率を 制御するためにも添加される。一般に、光増感剤は、光重合開始剤よりも吸光係数が 大き!/ヽために、光重合開始剤よりも少な!ヽ配合量で効果的に光線透過率を制御する ことができる。このため、光重合開始剤と光増感剤を併用して、液状光硬化性組成物 の光線透過率を制御することが好ましい。この光増感剤としては、例えば 4 ジメチ ルァミノ安息香酸、 4ージメチルァミノ安息香酸メチル、 4ージメチルァミノ安息香酸ェ チル、 4ージメチルァミノ安息香酸イソァミル、チォキサントン、 2, 4 ジメチルチオキ サントン、 2, 3 ジェチルチオキサントン、市販品としてはュべクリル P102、 103、 10 4、 105 (以上、 UCB製)等が挙げられる。  [0027] In the liquid photocurable composition according to the embodiment of the present invention, it is preferable to use a photosensitizer together. The photosensitizer plays a role of sensitizing the action of the photopolymerization initiator in the photocuring reaction of the liquid photocurable composition, and also controls the light transmittance of the liquid photocurable composition. Is also added. In general, photosensitizers have a larger extinction coefficient than photopolymerization initiators! / Less for photopolymerization initiator because of! The light transmittance can be controlled effectively by the blending amount. For this reason, it is preferable to control the light transmittance of the liquid photocurable composition by using a photopolymerization initiator and a photosensitizer in combination. As this photosensitizer, for example, 4-dimethylaminobenzoic acid, methyl 4-dimethylaminobenzoate, ethyl 4-dimethylaminobenzoate, isoamyl 4-dimethylaminobenzoate, thixanthone, 2,4 dimethylthioxanthone, 2,3 jetylthioxanthone, commercially available Examples of the product include ubelicril P102, 103, 104, 105 (above, manufactured by UCB).
[0028] この光増感剤の添加量は、光重合開始剤と同様に、硬化フィルムの光線透過率に 応じて調整する。光増感剤の好ましい添加量は、光増感剤種、光硬化に用いる光源 の発光波長によっても異なる力 一般的には液状光硬化性組成物 100重量部あたり 0. 01重量部から 15重量部、より好ましくは 0. 05重量部から 10重量部、更に好まし くは 0. 1重量部から 5重量部である。  [0028] The amount of the photosensitizer added is adjusted in accordance with the light transmittance of the cured film in the same manner as the photopolymerization initiator. The preferred amount of photosensitizer added varies depending on the photosensitizer species and the emission wavelength of the light source used for photocuring. Generally, 0.01 to 15 parts by weight per 100 parts by weight of the liquid photocurable composition. Parts, more preferably 0.05 to 10 parts by weight, even more preferably 0.1 to 5 parts by weight.
[0029] また、本発明の実施形態における液状光硬化性組成物には、塗布膜厚を調整する ために溶媒を加えて液状光硬化性組成物の粘性を制御することができる。そのため の溶媒としては、ベンゼン、トルエン、キシレン、へキサン、シクロへキサン、シクロへ キサノン、アセトン、メチルェチルケトン、メチルイソブチルケトン、クロ口ホルム、塩化メ チレン、メタノール、エタノール、イソプロパノール、ブタノール、水などが使用できる。 これらの溶媒を組み合わせて使用することもできる。  [0029] In addition, in the liquid photocurable composition according to the embodiment of the present invention, the viscosity of the liquid photocurable composition can be controlled by adding a solvent in order to adjust the coating film thickness. Solvents for this include benzene, toluene, xylene, hexane, cyclohexane, cyclohexanone, acetone, methyl ethyl ketone, methyl isobutyl ketone, chloroform, methyl chloride, methanol, ethanol, isopropanol, butanol, Water can be used. A combination of these solvents can also be used.
[0030] 溶媒の添加量は液状光硬化性組成物の粘性を制御する目的で任意の割合で用 いる事ができる力 溶剤の添加量が多すぎると塗布時に溶剤の乾燥に時間がかかり 、また完全に溶剤が除去されずに得られる隔壁パターン形成用雌型材料の機械的 強度が劣る場合がある。溶媒の添加量は液状光硬化性組成物 100重量部あたり 90 0重量部以下が好ましい。 [0030] The amount of the solvent added can be used at an arbitrary ratio for the purpose of controlling the viscosity of the liquid photocurable composition. If the amount of the solvent added is too large, it takes time to dry the solvent during coating. Mechanical properties of female mold material for partition wall pattern formation obtained without completely removing the solvent The strength may be inferior. The amount of the solvent added is preferably 900 parts by weight or less per 100 parts by weight of the liquid photocurable composition.
[0031] このような本発明の実施形態に係る隔壁パターン形成用雌型材料、或いは前述の 液状光硬化性組成物を用いる隔壁パターン形成用雌型の形成方法によると、前述 の光透過率を 10〜60%の範囲で任意に調整することで、隔壁パターン用雌型の断 面形状を逆台形,長方形,台形に任意に設定することができる。  [0031] According to such a method for forming a partition pattern forming female mold using the partition pattern forming female material according to the embodiment of the present invention or the above-described liquid photocurable composition, the above-described light transmittance is obtained. By arbitrarily adjusting in the range of 10 to 60%, the cross-sectional shape of the partition pattern female mold can be arbitrarily set to inverted trapezoidal, rectangular or trapezoidal.
[0032] 特に、前述の光透過率を 40%以上にすることで、底面が広い台形形状を有する雌 型断面を得ることができ、底面が広い放電セルを区画する隔壁を形成することが可能 になる。これによつて、高精細画面を形成するために放電セルの開口面積を小さくし た場合であっても、放電セルの底面積を広くすることで、十分な発光空間を確保する ことができ、良好な画質を得ることができる。  [0032] In particular, by setting the above-described light transmittance to 40% or more, a female cross section having a trapezoidal shape with a wide bottom surface can be obtained, and a partition wall that partitions discharge cells with a wide bottom surface can be formed. become. As a result, even when the opening area of the discharge cell is reduced in order to form a high-definition screen, a sufficient light emitting space can be secured by increasing the bottom area of the discharge cell. Good image quality can be obtained.
[0033] また、前述の光透過率を比較的高くすることで、前述した液状光硬化性組成物の 形成膜厚を厚くした場合であっても膜の底部を効率的に反応させることができるよう になるので、高さの高い雌型を形成することができ、奥行きのある放電セルを区画す る隔壁を形成することができる。  [0033] Further, by making the above-described light transmittance relatively high, the bottom of the film can be reacted efficiently even when the above-mentioned liquid photocurable composition is formed thick. As a result, a female mold having a high height can be formed, and a partition wall that partitions a discharge cell having a depth can be formed.
[0034] また、前述した光重合開始剤、又は、光重合開始剤及び光増感剤の添加量によつ て前述した光線透過率を調整することができるので、この調整によって、隔壁パター ン形成用雌型の断面形状を台形又は長方形或いはその複合形状に任意に設定す ることができる。そして、これによつて形成される隔壁形状の設定によって、良好な発 光効率が得られる放電セルの形状設計を行うことができる。  [0034] Further, since the light transmittance described above can be adjusted by the amount of the photopolymerization initiator described above or the addition amount of the photopolymerization initiator and the photosensitizer, the partition pattern can be adjusted by this adjustment. The cross-sectional shape of the forming female mold can be arbitrarily set to a trapezoidal shape, a rectangular shape, or a composite shape thereof. Then, by setting the shape of the partition formed thereby, it is possible to design the shape of the discharge cell that can obtain good light emission efficiency.
[0035] 以下、更に具体的な隔壁パターン形成用雌型の形成方法を図面に基づいて説明 する。図 2は、本発明の一実施形態に係る隔壁パターン形成用雌型の形成方法を示 す説明図である。  Hereinafter, a more specific method for forming the partition pattern forming female mold will be described with reference to the drawings. FIG. 2 is an explanatory view showing a method for forming a partition pattern forming female die according to an embodiment of the present invention.
[0036] これ〖こよると、一工程として、基板 1を支持板 10の上に設置し、電極 2 (アドレス電極 )が形成されて誘電体層 3 (アドレス保護層)が必要に応じて形成された基板 1の周囲 に液漏れガイド板 11を立設し、液漏れガイド板 11で囲まれた基板 1上に前述した液 状光硬化性組成物を充填して、感光性榭脂膜 4を形成する(同図 (a) )。ここでは、 1 00〜300 m程度の高さを有する隔壁を形成するために、液漏れガイド板 11を用い て所望の厚さの感光性榭脂膜 4を得るようにして 、る。 According to this, as a step, the substrate 1 is placed on the support plate 10, the electrode 2 (address electrode) is formed, and the dielectric layer 3 (address protection layer) is formed as necessary. A liquid leakage guide plate 11 is erected around the substrate 1 and the substrate 1 surrounded by the liquid leakage guide plate 11 is filled with the liquid photocurable composition described above to form a photosensitive resin film 4. ((A) in the figure). Here, the liquid leakage guide plate 11 is used to form a partition wall having a height of about 100 to 300 m. Thus, the photosensitive resin film 4 having a desired thickness is obtained.
[0037] また、これに限らず、前述した液状光硬化性組成物を所望の粘性を有する榭脂ぺ 一スト状にして、アプリケータ等によって基板 1上に塗布するようにしても良い。この場 合、 100〜300 /ζ πι程度の高さを有する隔壁を形成するためには、所望の厚さに塗 布する必要があるので、榭脂ペーストに所望の粘性を付与することが必要になる。  [0037] The present invention is not limited to this, and the liquid photocurable composition described above may be applied to the substrate 1 by an applicator or the like in the form of a resinous paste having a desired viscosity. In this case, in order to form a partition wall having a height of about 100 to 300 / ζ πι, it is necessary to apply a desired thickness, so it is necessary to impart a desired viscosity to the resin paste. become.
[0038] その後の工程として、この充填された液状光硬化性組成物からなる感光性榭脂膜 4 の上に隔壁パターンの光不透過部 12aを有するフォトマスク 12を載置させ反応光( 例えば、最大発光波長が 365nmである紫外線)を照射する。ここでは平行光線の一 回露光で処理を完了する。これによると、光不透過部 12a以外の開口部を介して反 応光が照射された部分が硬化し、光不透過部 12aの下に未硬化部が形成される(同 図(b) )。そして、その後の現像処理工程で、光不透過部 12a下の未硬化部を除去し て隔壁パターンの雌型 4Aを得る(同図(c) )。  [0038] As a subsequent step, a photomask 12 having a light-impermeable portion 12a of a partition wall pattern is placed on the photosensitive resin film 4 made of the filled liquid photocurable composition, and reaction light (for example, , UV light having a maximum emission wavelength of 365 nm). Here, the process is completed with a single exposure of parallel rays. According to this, the portion irradiated with the reaction light through the opening other than the light opaque portion 12a is cured, and an uncured portion is formed under the light opaque portion 12a ((b) in the figure). . Then, in a subsequent development processing step, the uncured portion under the light-impermeable portion 12a is removed to obtain a female die 4A having a partition wall pattern (FIG. (C)).
[0039] この際、前述の光線透過率を調整した液状光硬化性組成物が用いられることで、 一回の平行光線露光であっても、雌型 4Aの断面形状を任意に設定することができ、 例えば、 40%以上の光線透過率の液状光硬化組成物を用いることで、図示のように 底面が上面より広い台形断面の雌型 4Aを得ることができる。  [0039] At this time, by using the liquid photocurable composition with the light transmittance adjusted as described above, the cross-sectional shape of the female die 4A can be arbitrarily set even in one parallel light exposure. For example, by using a liquid photocurable composition having a light transmittance of 40% or more, a female die 4A having a trapezoidal cross section with a bottom surface wider than the top surface as shown in the figure can be obtained.
[0040] 図 3は、本発明の他の実施形態に係る隔壁パターン形成用雌型の形成方法を示 す説明図である。この実施形態では、基板 1を支持板 10の上に設置し、電極 2 (アド レス電極)が形成されて誘電体層 3 (アドレス保護層)が必要に応じて形成された基板 1上に、前述の液状光硬化性組成物を乾燥して形成したフィルム(ドライフィルムレジ スト)を載置して感光性榭脂膜 4を形成し、この感光性榭脂膜 4の上に隔壁パターン の光不透過部 12aを有するフォトマスク 12を載置させ、反応光 (例えば、最大発光波 長が 365nmである紫外線)を照射する(同図(a) )。そして、その後の現像処理工程 で、光不透過部 12a下の未硬化部を除去して隔壁パターンの雌型 4Aを得る(同図( b) )。  FIG. 3 is an explanatory view showing a method of forming a partition pattern forming female die according to another embodiment of the present invention. In this embodiment, the substrate 1 is placed on the support plate 10, the electrode 2 (address electrode) is formed, and the dielectric layer 3 (address protection layer) is formed as necessary. A film (dry film resist) formed by drying the liquid photocurable composition described above is placed to form a photosensitive resin film 4, and a partition pattern light is formed on the photosensitive resin film 4. A photomask 12 having an opaque portion 12a is placed and irradiated with reaction light (for example, ultraviolet light having a maximum emission wavelength of 365 nm) ((a) in the figure). Then, in the subsequent development processing step, the uncured portion under the light-impermeable portion 12a is removed to obtain a female die 4A having a partition pattern ((b) in the figure).
[0041] これによつても前述の方法と同様に、図示のような底面が上面より広い台形断面の 雌型 4Aを得ることができ、また、フィルム化した感光性榭脂膜 4を用いるので、感光 性榭脂膜 4の形成を簡略ィ匕することができる。 [0042] 図 4は、本発明の他の実施形態に係る隔壁パターン形成用雌型の形成方法を示 す説明図である。この実施形態では、一工程として、前述した光線透過率を所望の 値に設定した前記の液状光硬化性組成物を乾燥硬化して複数のフィルム 40a〜40 d等を形成する。そして、その後の工程で、形成する雌型の所望の断面形状に応じて 、複数のフィルム 40a〜40dを電極 2或 、は誘電体層 3が形成された基板 1上に積層 する。また、その後の工程として、複数のフィルム 40a〜40d上に隔壁パターンの光 不透過部 12aを有するフォトマスク 12を載置させ反応光を照射し、更に、前述の実施 形態と同様に、光不透過部 12a下の未硬化部を除去して隔壁パターンの雌型を得る [0041] According to this, similarly to the above-described method, it is possible to obtain a female die 4A having a trapezoidal cross section whose bottom surface is wider than the top surface as shown in the figure, and since the photosensitive resin film 4 formed into a film is used. Thus, the formation of the photosensitive resin film 4 can be simplified. FIG. 4 is an explanatory view showing a method of forming a partition pattern forming female die according to another embodiment of the present invention. In this embodiment, as a step, the liquid photocurable composition having the light transmittance set to a desired value is dried and cured to form a plurality of films 40a to 40d. In subsequent steps, a plurality of films 40a to 40d are laminated on the substrate 2 on which the electrode 2 or the dielectric layer 3 is formed according to the desired cross-sectional shape of the female mold to be formed. Further, as a subsequent process, a photomask 12 having a light-opaque portion 12a having a partition wall pattern is placed on the plurality of films 40a to 40d and irradiated with reaction light. The uncured part under the transmission part 12a is removed to obtain a female mold with a partition pattern
[0043] この実施形態によると、複数のフィルム 40a〜40dにおける前述した光線透過率を 適宜異なる値に設定しておき、その積層順を適宜設定することで、フォトマスク 12を 介して一回の露光で雌型の断面形状を任意に設定することができる。特に、フィルム 40a〜40dの積層数を多くしてそれぞれ適当な光線透過率を設定することで、図示 のように、所望の曲線断面を有する雌型を形成することも可能になる。これによると、 良好な発光効率を得るために、放電セルの形状を任意に設計できることになり、高精 細な放電セルの配置を形成した場合であっても、適正な発光空間を形成することが でき、高画質の画像を得ることができる。 [0043] According to this embodiment, the above-described light transmittances in the plurality of films 40a to 40d are set to different values as appropriate, and the stacking order is set as appropriate, so that a single pass through the photomask 12 is performed. The cross-sectional shape of the female mold can be arbitrarily set by exposure. In particular, by increasing the number of laminated films 40a to 40d and setting appropriate light transmittances, it is possible to form a female mold having a desired curved cross section as shown in the figure. According to this, in order to obtain good luminous efficiency, the shape of the discharge cell can be arbitrarily designed, and even when a highly precise discharge cell arrangement is formed, an appropriate light emitting space can be formed. And high-quality images can be obtained.
[0044] このような各実施形態によって隔壁パターン形成用雌型を形成した後には、図 l (d )に示した隔壁材の充填工程、図 1 (e)に示した雌型の除去工程を経て、隔壁のバタ ーンを形成することができる。本発明の実施形態に係る隔壁パターンの形成方法で は、形成された雌型間に、隔壁材を充填した後、雌型及び隔壁材を同時焼成する。  [0044] After forming the partition pattern forming female die according to each of such embodiments, the partition material filling step shown in Fig. L (d) and the female die removing step shown in Fig. 1 (e) are performed. After that, the partition pattern can be formed. In the method for forming the partition pattern according to the embodiment of the present invention, the partition material is filled between the formed female molds, and then the female mold and the partition material are fired simultaneously.
[0045] この際に隔壁材の充填は、従来技術と同様に低融点ガラスペースト等の隔壁材ぺ 一ストを採用して、スキージ或いは塗布によって雌型間に充填する。この充填工程の 後は、必要に応じて、雌型の溝部以外の部分に付着或いは飛び散った隔壁材を研 磨等の手段でクリーニングし、雌型及び充填した隔壁材を同時に焼成して、雌型を 分解除去すると同時に、隔壁材をガラス化し、基板 1上に隔壁のパターンを形成する 。この際、雌型と隔壁材を同時焼成することで、雌型がどのような形状 (例えば底面が 広い台形等)であっても、隔壁の成形物の形状を維持したままで、雌型を除去するこ とがでさる。 In this case, the partition wall material is filled between the female molds by using a partition wall paste such as a low melting point glass paste as in the prior art and by squeegee or coating. After this filling step, if necessary, the partition wall material adhering or splashing on the portion other than the groove portion of the female mold is cleaned by means such as polishing, and the female mold and the filled partition wall material are fired at the same time. At the same time that the mold is disassembled and removed, the partition material is vitrified to form a partition pattern on the substrate 1. At this time, by simultaneously firing the female mold and the partition wall material, the female mold can be formed while maintaining the shape of the molded product of the partition wall, regardless of the shape of the female mold (for example, a trapezoid with a wide bottom surface). To remove Togashi.
[0046] 前述した液状光硬化性組成物からなる隔壁パターン形成用雌型材料は、加熱する ことによって収縮する特性があり、焼成時に隔壁材へのストレスが無ぐ隔壁形成時 の隔壁成形支持材としても有効であり、特に、隔壁の歪みや割れを無くす効果もある 。また、この隔壁パターン形成用雌型材料は、焼成時には炭酸ガスと水蒸気が発生 するのみで環境に有害なものは発生しないので、環境保護の観点からも有益なもの である。  [0046] The partition wall pattern forming female mold material comprising the liquid photocurable composition described above has a property of shrinking when heated, and there is no stress on the partition wall material during firing, and the partition wall forming support material during partition wall formation. In particular, it is effective in eliminating the distortion and cracking of the partition walls. In addition, this female material for forming a partition wall pattern is useful from the viewpoint of environmental protection because it generates only carbon dioxide and water vapor during firing and does not generate anything harmful to the environment.
[0047] そして、前述したように形成された隔壁パターンによって放電セルが区画されたブラ ズマディスプレイパネルによると、高精細な画像を表示するために放電セルの密度を 高くした場合であっても、放電セル内に十分な発光空間を形成することができると共 に、発光効率を高めるように所望の形状に放電セルを設計することができる。特に、 前述したように雌型を底面が広い台形にすることで隔壁の断面を逆台形断面にした 場合には、放電セルの開口部に対して底面を広げることができ、効果的に発光空間 を広げることができる。  [0047] According to the plasma display panel in which the discharge cells are partitioned by the barrier rib pattern formed as described above, even when the density of the discharge cells is increased in order to display a high-definition image, A sufficient emission space can be formed in the discharge cell, and the discharge cell can be designed in a desired shape so as to increase the luminous efficiency. In particular, as described above, when the female die is trapezoidal with a wide bottom surface, the partition wall has an inverted trapezoidal cross section, the bottom surface can be widened with respect to the opening of the discharge cell, and the light emitting space is effectively reduced. Can be spread.
実施例  Example
[0048] 以下に、本発明の隔壁パターン形成用雌型材料の実施例を以下に示す。  [0048] Examples of the female material for forming a partition wall pattern according to the present invention are shown below.
[0049] 撹拌機を備えた反応容器に、ビスフエノール Aのジエポキシアタリレート(昭和高分 子 (株)製 VR— 90)を 50部、ジペンタエリスリトールへキサアタリレート(日本ィ匕薬 (株 )製 KAYARAD DPHA)を 12. 5部、 1—ヒドロキシシクロへキシルフエ-ルケトン( チバスべシャリティーケミカルズ (株)製 Irgacurel84)を 1部、 2, 4—ジェチルチオキ サントン(日本化薬 (株)製 KAYACURE DETEX)を表 1に示す量、メチルェチル ケトンを 50部添加した。容器中の混合物は、 50°Cで 3時間撹拌を行い、均一な溶液 を得た。 [0049] In a reaction vessel equipped with a stirrer, 50 parts of bisphenol A diepoxy acrylate (VR-90, manufactured by Showa Takao Co., Ltd.), dipentaerythritol hexa acrylate (Nippon Gyaku ( KAYARAD DPHA) (12.5 parts), 1-hydroxycyclohexylphenol ketone (Cirbus Specialty Chemicals Co., Ltd. Irgacurel84), 1 part, 2, 4-Jetylthioki Santon (Nippon Kayaku Co., Ltd.) KAYACURE DETEX) was added in the amount shown in Table 1, and 50 parts of methyl ethyl ketone was added. The mixture in the container was stirred at 50 ° C for 3 hours to obtain a uniform solution.
[0050] 得られた溶液を塗布する基板 Sとして、トリメトキシシリルプロピルメタアタリレートの エタノール溶液で表面処理を行ったガラス基板を用意した。  [0050] As a substrate S on which the obtained solution was applied, a glass substrate that had been surface-treated with an ethanol solution of trimethoxysilylpropyl metatalylate was prepared.
[0051] このガラス基板上にアプリケータを用いて表 1に示す例毎に液状光硬化性組成物 を塗布した。塗布膜厚は、硬化後に約 220 mとなるように調整した。これを 80°Cの オーブンに 10分間静置して乾燥を行った後、パターンマスクを表面に貼り付けて UV コンベアを用いて UV照射した。 UVの照度は 20mWZcm2、照射光量は 45miZc m 2とした。 [0051] The liquid photocurable composition was applied to the glass substrate for each of the examples shown in Table 1 using an applicator. The coating thickness was adjusted to be about 220 m after curing. This is left in an oven at 80 ° C for 10 minutes to dry, and then a pattern mask is applied to the surface and UV is applied. UV irradiation was performed using a conveyor. The illuminance of UV was 20 mWZcm 2 and the amount of irradiation was 45 miZcm 2 .
[0052] 得られた硬化物をメチルェチルケトン Zエタノール(lZl)の溶液に浸漬することで 現像処理を行った。  [0052] The obtained cured product was immersed in a solution of methyl ethyl ketone Z ethanol (lZl) for development processing.
[0053] 得られた雌型の断面形状を顕微鏡で観察した。雌型形状と組成物の関係を表 1〖こ 示す (表中の符号にっ 、ては図 5を参照)。  [0053] The cross-sectional shape of the obtained female mold was observed with a microscope. The relationship between the female mold shape and the composition is shown in Table 1 (refer to Fig. 5 for the symbols in the table).
[0054] [表 1] [0054] [Table 1]
Figure imgf000015_0001
Figure imgf000015_0001
[0055] この実施例の結果から、光線透過率と角度 Θ (雌型のオーバーハング角度)の関係 を図 6に示す。図示のように、光線透過率を 10〜60%の間で調整することで、ォー バーハング角度 Θを約 70〜: L 10の範囲で変化させることができる。すなわち、雌型 断面を逆台形力 長方形或いは台形に変えることが可能になる。 [0055] From the results of this example, the relationship between the light transmittance and the angle Θ (female overhang angle) is shown in FIG. As shown in the figure, by adjusting the light transmittance between 10% and 60%, the overhang angle Θ can be changed within a range of about 70 to L10. That is, it becomes possible to change the female section to an inverted trapezoidal force rectangle or trapezoid.
[0056] 以上説明したように、本発明の実施形態或いは実施例によると、高精細且つ高画 質の画像を得るための有効な隔壁形成方法を提供することができ、隔壁形成にアデ ィティブ法を採用するに際して、一回の露光で十分な高さを有し、且つ所望の断面形 状を有する隔壁 (隔壁を形成するための雌型)を形成することができる。 As described above, according to the embodiments or examples of the present invention, it is possible to provide an effective partition forming method for obtaining a high-definition and high-quality image, and it is possible to provide an additional method for partition formation. When the active method is adopted, a partition wall (female mold for forming a partition wall) having a sufficient height and a desired cross-sectional shape can be formed by one exposure.

Claims

請求の範囲 The scope of the claims
[1] プラズマディスプレイパネルの隔壁パターンをアディティブ法で形成するための雌 型材料であって、  [1] A female material for forming a partition pattern of a plasma display panel by an additive method,
多官能ラジカル反応性化合物、および光重合開始剤を含有する液状光硬化性組 成物で、 100 m厚フィルムを硬化する際に用いる照射光源の最大発光波長におけ る光線透過率が 10〜60%である液状光硬化性組成物力もなることを特徴とする隔 壁パターン形成用雌型材料。  A liquid photocurable composition containing a polyfunctional radical-reactive compound and a photopolymerization initiator and having a light transmittance of 10 to 60 at the maximum emission wavelength of an irradiation light source used for curing a 100 m thick film. A female mold material for forming a partition wall pattern, which also has a liquid photocurable composition strength of%.
[2] プラズマディスプレイパネルの隔壁パターンをアディティブ法で形成するための雌 型材料であって、 [2] A female material for forming a partition pattern of a plasma display panel by an additive method,
多官能ラジカル反応性化合物、光重合開始剤、および光増感剤を含有する液状光 硬化性組成物で、 100 m厚フィルムを硬化する際に用いる照射光源の最大発光 波長における光線透過率が 10〜60%である液状光硬化性組成物力もなることを特 徴とする隔壁パターン形成用雌型材料。  A liquid photocurable composition containing a polyfunctional radical-reactive compound, a photopolymerization initiator, and a photosensitizer, and has a light transmittance of 10 at the maximum emission wavelength of an irradiation light source used for curing a 100 m thick film. A female mold material for forming a partition wall pattern, characterized by having a liquid photo-curable composition power of ˜60%.
[3] 前記光線透過率を 40%以上にすることを特徴とする請求項 1又は 2に記載された 隔壁パターン形成用雌型材料。  [3] The female material for forming a partition wall pattern according to claim 1 or 2, wherein the light transmittance is 40% or more.
[4] 前記光重合開始剤および Zまたは光増感剤の添加量は、前記光線透過率に応じ て調整されることを特徴とする請求項 1〜3のいずれかに記載された隔壁パターン形 成用雌型材料。  [4] The partition pattern shape according to any one of claims 1 to 3, wherein the addition amount of the photopolymerization initiator and Z or the photosensitizer is adjusted according to the light transmittance. Adult female material.
[5] プラズマディスプレイパネルの隔壁パターンをアディティブ法で形成するための雌 型の形成方法であって、  [5] A female mold forming method for forming a partition pattern of a plasma display panel by an additive method,
多官能ラジカル反応性化合物、および光重合開始剤を含有する液状光硬化性組 成物で、 100 m厚フィルムを硬化する際に用いる照射光源の最大発光波長におけ る光線透過率が 10〜60%である液状光硬化性組成物力もなることを特徴とする隔 壁パターン形成用雌型の形成方法。  A liquid photocurable composition containing a polyfunctional radical-reactive compound and a photopolymerization initiator and having a light transmittance of 10 to 60 at the maximum emission wavelength of an irradiation light source used for curing a 100 m thick film. A method for forming a female pattern for forming a partition wall pattern, wherein the composition also has a liquid photocurable composition strength of%.
[6] プラズマディスプレイパネルの隔壁パターンをアディティブ法で形成するための雌 型の形成方法であって、 [6] A method of forming a female mold for forming a partition pattern of a plasma display panel by an additive method,
多官能ラジカル反応性化合物、光重合開始剤、および光増感剤を含有する液状光 硬化性組成物で、 100 m厚フィルムを硬化する際に用いる照射光源の最大発光 波長における光線透過率が 10〜60%である液状光硬化性組成物力もなることを特 徴とする隔壁パターン形成用雌型の形成方法。 A liquid photo-curable composition containing a polyfunctional radical-reactive compound, a photopolymerization initiator, and a photosensitizer, and the maximum emission of the irradiation light source used when curing a 100 m thick film A method for forming a female mold for forming a partition wall pattern, characterized in that it also has a liquid photocurable composition having a light transmittance of 10-60% at a wavelength.
[7] 前記光線透過率を 40%以上にすることを特徴とする請求項 5又は 6に記載された 隔壁パターン形成用雌型の形成方法。 7. The method for forming a female mold for forming a partition wall pattern according to claim 5 or 6, wherein the light transmittance is 40% or more.
[8] 前記光重合開始剤および Z又は光増感剤の添加量は、前記光線透過率に応じて 調整されることを特徴とする請求項 5〜7のいずれかに記載された隔壁パターン形成 用雌型の形成方法。 [8] The partition pattern formation according to any one of claims 5 to 7, wherein the addition amount of the photopolymerization initiator and Z or the photosensitizer is adjusted according to the light transmittance. Forming method for female mold.
[9] 前記光線透過率を前記光重合開始剤および Z又は光増感剤の添加量によって調 整することによって、前記雌型の断面形状を台形又は長方形或いはその複合形状に 任意に設定することを特徴とする請求項 5〜8のいずれかに記載された隔壁パターン 形成用雌型の形成方法。  [9] The cross-sectional shape of the female mold is arbitrarily set to a trapezoidal shape, a rectangular shape, or a composite shape thereof by adjusting the light transmittance according to the amount of the photopolymerization initiator and Z or a photosensitizer added. A method for forming a female mold for forming a partition wall pattern according to any one of claims 5 to 8.
[10] 隔壁を形成しょうとする基板の周囲に液漏れガイド板を立設し、該液漏れガイド板 で囲まれた前記基板上に前記液状光硬化性組成物を充填する工程、 [10] A step of standing a liquid leakage guide plate around a substrate on which a partition wall is to be formed, and filling the liquid photocurable composition on the substrate surrounded by the liquid leakage guide plate;
この充填された前記液状光硬化性組成物の上に前記隔壁パターンの光不透過部 を有するフォトマスクを載置させ反応光を照射する工程、  A step of placing a photomask having a light-impermeable portion of the partition wall pattern on the filled liquid photocurable composition and irradiating with reaction light;
前記光不透過部下の未硬化部を除去して前記隔壁パターンの雌型を得る工程を 有することを特徴とする請求項 5〜9のいずれかに記載された隔壁パターン形成用雌 型の形成方法。  10. The method for forming a partition wall pattern forming female die according to claim 5, further comprising a step of removing an uncured portion under the light opaque portion to obtain a female die of the partition wall pattern. .
[11] 隔壁を形成しょうとする基板上に前記液状光硬化性組成物を乾燥して形成したフィ ルムを載置する工程、  [11] A step of placing a film formed by drying the liquid photocurable composition on a substrate on which partition walls are to be formed,
該フィルム上に前記隔壁パターンの光不透過部を有するフォトマスクを載置させ反 応光を照射する工程、  Placing a photomask having a light-impermeable portion of the barrier rib pattern on the film and irradiating reactive light;
前記光不透過部下の未硬化部を除去して前記隔壁パターンの雌型を得る工程を 有することを特徴とする請求項 5〜 10のいずれかに記載された隔壁パターン形成用 雌型の形成方法。  The method for forming a female mold for forming a partition wall pattern according to any one of claims 5 to 10, further comprising a step of obtaining a female mold of the partition wall pattern by removing an uncured portion below the light opaque portion. .
[12] 前記光線透過率を所望の値に設定した前記液状光硬化性組成物を乾燥して複数 のフィルムを形成する工程、  [12] A step of drying the liquid photocurable composition with the light transmittance set to a desired value to form a plurality of films,
前記雌型の所望の断面形状に応じて、前記複数のフィルムを隔壁を形成しようとす る基板上に積層する工程、 Depending on the desired cross-sectional shape of the female mold, the plurality of films are intended to form partition walls. Laminating on a substrate,
該複数のフィルム上に前記隔壁パターンの光不透過部を有するフォトマスクを載置 させ反応光を照射する工程、  Placing a photomask having a light-impermeable portion of the partition pattern on the plurality of films and irradiating reaction light;
前記光不透過部下の未硬化部を除去して前記隔壁パターンの雌型を得る工程を 有することを特徴とする請求項 5〜 10のいずれかに記載された隔壁パターン形成用 雌型の形成方法。  The method for forming a female mold for forming a partition wall pattern according to any one of claims 5 to 10, further comprising a step of obtaining a female mold of the partition wall pattern by removing an uncured portion below the light opaque portion. .
[13] 請求項 5〜 12のいずれかに記載された隔壁パターン形成用雌型の形成方法によ つて形成された雌型間に、隔壁材を充填した後、前記雌型及び隔壁材を同時焼成し て、隔壁のパターンを形成する隔壁パターン形成方法。  [13] After the partition wall material is filled between the female dies formed by the method for forming the partition wall pattern forming female mold according to any one of claims 5 to 12, the female mold and the partition wall material are simultaneously used. A method for forming a barrier rib pattern by firing to form a barrier rib pattern.
[14] 請求項 13の隔壁パターン形成方法によって形成された隔壁によって放電セルが 区画されたプラズマディスプレイパネル。 14. A plasma display panel in which discharge cells are partitioned by barrier ribs formed by the barrier rib pattern forming method according to claim 13.
[15] 前記隔壁は逆台形断面を有することを特徴とする請求項 14に記載されたプラズマ ディスプレイパネル。 15. The plasma display panel according to claim 14, wherein the partition wall has an inverted trapezoidal cross section.
PCT/JP2006/304787 2005-03-11 2006-03-10 Material of female die for barrier rib pattern formation, method of forming female die for barrier rib pattern formation, method of forming barrier rib pattern, and plasma display panel WO2006095869A1 (en)

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11212272A (en) * 1998-01-29 1999-08-06 Hitachi Chem Co Ltd Relief pattern, relief pattern for additive, relief pattern for forming barrier, production of relief pattern and photosensitive element used in same
JPH11306990A (en) * 1998-04-17 1999-11-05 Mitsubishi Electric Corp Ac color plasma display panel and its manufacture
JP2001006534A (en) * 1999-06-17 2001-01-12 Hitachi Chem Co Ltd Barrier rib forming element and manufacture of baririer rib using it
JP2003057818A (en) * 2001-08-20 2003-02-28 Asahi Kasei Corp Liquid photosensitive resin composition for thick film conductor circuit
JP2003178948A (en) * 2001-12-11 2003-06-27 Fuji Electric Co Ltd Method for forming photoresist film

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11212272A (en) * 1998-01-29 1999-08-06 Hitachi Chem Co Ltd Relief pattern, relief pattern for additive, relief pattern for forming barrier, production of relief pattern and photosensitive element used in same
JPH11306990A (en) * 1998-04-17 1999-11-05 Mitsubishi Electric Corp Ac color plasma display panel and its manufacture
JP2001006534A (en) * 1999-06-17 2001-01-12 Hitachi Chem Co Ltd Barrier rib forming element and manufacture of baririer rib using it
JP2003057818A (en) * 2001-08-20 2003-02-28 Asahi Kasei Corp Liquid photosensitive resin composition for thick film conductor circuit
JP2003178948A (en) * 2001-12-11 2003-06-27 Fuji Electric Co Ltd Method for forming photoresist film

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