WO2006100825A1 - Photocurable resin composition for forming black matrix, photosensitive film using the same, method for forming black matrix, black matrix and plasma display panel having the black matrix - Google Patents

Photocurable resin composition for forming black matrix, photosensitive film using the same, method for forming black matrix, black matrix and plasma display panel having the black matrix Download PDF

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Publication number
WO2006100825A1
WO2006100825A1 PCT/JP2006/301149 JP2006301149W WO2006100825A1 WO 2006100825 A1 WO2006100825 A1 WO 2006100825A1 JP 2006301149 W JP2006301149 W JP 2006301149W WO 2006100825 A1 WO2006100825 A1 WO 2006100825A1
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WO
WIPO (PCT)
Prior art keywords
black matrix
forming
film
resin composition
photocurable resin
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PCT/JP2006/301149
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French (fr)
Japanese (ja)
Inventor
Kiminori Oshio
Akira Kumazawa
Ryuma Mizusawa
Hitoshi Setsuda
Hiroyuki Obiya
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Tokyo Ohka Kogyo Co., Ltd.
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Application filed by Tokyo Ohka Kogyo Co., Ltd. filed Critical Tokyo Ohka Kogyo Co., Ltd.
Publication of WO2006100825A1 publication Critical patent/WO2006100825A1/en

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    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0005Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
    • G03F7/0007Filters, e.g. additive colour filters; Components for display devices
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08FMACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F2/00Processes of polymerisation
    • C08F2/46Polymerisation initiated by wave energy or particle radiation
    • C08F2/48Polymerisation initiated by wave energy or particle radiation by ultraviolet or visible light
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/0042Photosensitive materials with inorganic or organometallic light-sensitive compounds not otherwise provided for, e.g. inorganic resists
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/0045Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/0047Photosensitive materials characterised by additives for obtaining a metallic or ceramic pattern, e.g. by firing

Definitions

  • the present invention relates to a photocurable resin composition for forming a black matrix.
  • the present invention also relates to a photosensitive film using the composition, a method for forming a black matrix, a black matrix, and a plasma display panel having the black matrix.
  • flat panel displays include liquid crystal displays, electroluminescence, light emitting diodes (LEDs), fluorescent display tubes (VFD), plasma displays (PDP), field emission displays (FED), and digital micromirror devices (DMD). ) Etc. are known.
  • a color display obtained by colorizing these displays produces three primary colors of red, blue, and green light for each pixel and expresses a change in color by controlling the brightness of each pixel.
  • a black matrix is formed to prevent a decrease in contrast and color purity.
  • this black matrix is required to have excellent light shielding properties.
  • PDPs have attracted a great deal of attention because they are relatively simple in structure and easy to increase in size, are self-luminous, have high display quality, and are capable of color display. Therefore, many proposals have been made.
  • Such PDPs are generally divided into a large number of display cells by providing partition walls made of an insulating material on the surface of a substrate arranged oppositely, and a phosphor layer is formed in the cells so as to surround each cell. Is provided with a pattern electrode.
  • the screen display is realized by generating plasma discharge by applying a voltage to the pattern electrode, and causing each of the light emitting layers to emit light by the action of ultraviolet rays by the plasma discharge.
  • electrodes, resistors, dielectrics, etc. for generating plasma are provided in the substrate or cell.
  • the partition walls, electrodes, resistors, dielectrics, phosphors, color filters, and black matrix that make up these components must be made with high precision.
  • a photosensitive paste that is not intended for forming a black matrix, but that contains a low-melting glass and changes to black after firing has also been disclosed (for example, (See Patent Document 2).
  • Patent Document 1 Japanese Patent Laid-Open No. 9 160243
  • Patent Document 2 JP 2000-347394
  • Patent Document 2 the property of changing to black is achieved by using a compound that is converted into a black oxide by firing, such as an organometallic compound nickel acetyl cintonate, which is expensive and cheaper. Was demanded.
  • a compound that is converted into a black oxide by firing such as an organometallic compound nickel acetyl cintonate, which is expensive and cheaper.
  • these bivalent or higher metals such as copper, iron and cobalt are used as metal powder, they will gel with a polymer having a carboxyl group in the side chain, so that coating patterning is not possible. I got it.
  • the inventors examined a photosensitive resin having a characteristic that it does not gel even when a metal powder having an ionic valence of 2 or more is used, and further development with water is possible. We also examined the characteristic of being. As a result, the inventors have found that the above problem can be solved by combining a powder of a metal having an ionic valence of 2 or more, which is blackened by oxidation, and a specific resin component.
  • the photocurable resin composition of the present invention is a photocurable resin composition used for forming a black matrix, and comprises (A) oxidation. (B) (i) a water-soluble cellulose derivative, (ii) a photopolymerizable monomer, and (iii) an acrylic resin having a hydroxy group And (iv) a photocurable resin composition for forming a black matrix, which comprises an organic component comprising a photopolymerization initiator.
  • the photosensitive film of the present invention comprises a photosensitive paste film obtained by forming the photo-curable resin composition into a film, and a protective film for protecting the photosensitive paste film.
  • the black matrix of the present invention has an optical density (OD) of 3.0 or more obtained by curing the photosensitive paste film by baking after patterning.
  • the black matrix forming method of the present invention includes a photosensitive paste film forming step of forming a photosensitive paste film on a substrate using the photocurable resin composition, and exposing the photosensitive paste film. Then, a development process is performed with water to form a predetermined pattern on the substrate, and the pattern obtained in the pattern formation process is baked at a temperature of 1000 ° C. or less in the presence of oxygen.
  • a black matrix forming method having a pattern baking and blackening step of curing and oxidizing to blacken [0015]
  • the plasma display of the present invention has a black matrix formed by using the above black matrix forming method.
  • a photocurable resin composition for forming a black matrix capable of forming a fine black pattern that can be developed with water and capable of forming a black matrix at low cost is provided. can do.
  • the photocurable resin composition of the present invention is a photocurable resin composition used for forming a black matrix, and (A) a powder of a metal having an ionic valence of 2 or more that is blackened by oxidation; B) (i) a water-soluble cellulose derivative, (ii) a photopolymerizable monomer, (iii) an acrylic resin having a hydroxy group, and (iv) an organic component comprising a photopolymerization initiator .
  • the metal having an ionic valence of 2 or more that is blackened by oxidation used in the present invention is not particularly limited as long as it is blackened by oxidation by baking treatment after pattern formation.
  • iron and cobalt copper is more preferable.
  • copper oxide obtained by oxidation is more preferable because it is insulative.
  • copper is preferable because it is inexpensive and easy to purchase.
  • the shape of the metal powder include forces such as a granular shape, a spherical shape, and a flake shape.
  • the shape is not particularly limited to these, and other shapes may be used.
  • a metal powder having a single shape may be used, or a mixture of two or more types of metal powder may be used.
  • the average particle size of the metal powder is in the range of 0.01 to 100 ⁇ , preferably in the range of 0.0 :! to 30 zm, more preferably in the range of 0.5 to 10 to 111. If the average particle size exceeds 100 111, it becomes difficult to form a fine and highly accurate pattern, and if the average particle size is less than 0.01 ⁇ m, the light is irregularly reflected and the pattern light cannot be transmitted.
  • the organic component used in the present invention includes (i) a water-soluble cellulose derivative, (ii) a photopolymerizable monomer, (iii) an acrylic resin having a hydroxy group, and (iv) initiation of photopolymerization. It consists of an agent.
  • a water-soluble cellulose derivative known ones can be used, and are not particularly limited, and examples thereof include carboxymethyl cellulose, hydroxyethyl cellulose, hydroxy chineno metheno resenorelose, and hydroxypropino rescenole.
  • Examples thereof include rosin, ethinorehydroxyethinorenorose, canoleboxymethinoreethinoresenorelose, hydroxypropinoremethinoresenorelose and the like. These may be used alone or in admixture of two or more.
  • the above (ii) photopolymerizable monomer may be a known photopolymerizable monomer, and is not particularly limited.
  • the acrylic resin having a hydroxy group is obtained by polymerizing a monomer having a hydroxyl group as a main copolymerizable monomer and further copolymerizing with other monomers as necessary. And copolymers.
  • the monomer having a hydroxyl group is preferably a monoester product of acrylic acid or methacrylic acid and a monoalcohol having 1 to 20 carbon atoms, such as hydroxymethyl acrylate, hydroxymethyl methacrylate, 2 —Hydroxyethyl acrylate, 2-hydroxyethyl methacrylate, 2-hydroxypropyl acrylate, 2-hydroxypropyl methacrylate, 3-hydroxypropyl acrylate, 3-hydroxypropyl methacrylate, 2-hydroxy Butyl acrylate, 2-hydroxybutyl methacrylate, 3-hydroxybutyl acrylate, 3-hydroxybutyl Examples include chinoremethacrylate, 4-hydroxybutynoleatelate, 4-hydroxybutinoacrylate, and monoesterol
  • Glycerololeatalylate Glycellonoremetatalylate, Dipentaerythritolol monoatalylate, Dipentaerythritololmonometatalylate, ⁇ — Force Pro Lataton Modified Hydroxyethyl Atylate, ⁇ — Force Prolatatone
  • epoxy ester compounds such as modified hydroxyl ether methacrylate and 2-hydroxy-3phenoxypropyl acrylate.
  • Other monomers copolymerizable with the monomer having a hydroxyl group include, for example, methyl acrylate, ethyl acetate, ⁇ -propyl acrylate, isopropyl acrylate, ⁇ butyl acrylate, isobutyl acrylate, sec Butyl Atylate, Cyclohexyl Atylate, 2-Ethylhexyl Atylate, Stearyl Atylate, Methyl Metatalylate, Ethyl Metatalylate, n-Propyl Metatalylate, Isopropyl Metatalylate, sec Propyl Metatalyl , N-butyl methacrylate, sec-butyl methacrylate, sec butyl methacrylate, cyclohexyl methacrylate, 2-ethyl hexyl methacrylate, sterol methacrylate, 2, 2, 2-trifanolate romethinolate , 2
  • acrylonitrile, methacrylonitrile, attalinoleamide, methacrylolamide, vinyl acetate, glycidyl acrylate, glycidyl methacrylate, and the like can also be used. These may be used alone or in combination of two or more.
  • the photocurable resin composition of the present invention contains the above (iii) acrylic resin having a hydroxyl group, whereby the development resistance is improved and a highly accurate image can be formed.
  • the ratio of (i) the water-soluble cellulose derivative and (ii) the photopolymerizable monomer in the photocurable resin composition of the present invention is as follows: 10 to 50 parts by weight of the cellulose derivative, (ii) 90 to 50 parts by weight of the photopolymerizable monomer, preferably (i) 20 to 40 parts by weight of the water-soluble cellulose derivative, (ii) the photopolymerizable monomer It is preferable that the monomer is 80 to 60 parts by mass, more preferably (i) 25 to 35 parts by mass of the water-soluble cellulose derivative, and (ii) 75 to 65 parts by mass of the photopolymerizable monomer. Necessary pattern formation precision by each component being within the above range.
  • the photopolymerizable monomer is 50 parts by mass or more, the photopolymerization necessary for development can be obtained, and practically sufficient image forming ability can be obtained. Further, when the photopolymerizable monomer is 90 parts by mass or less, resolution of a fine image is improved.
  • the ratio of (i) the water-soluble cellulose derivative and (iii) the hydroxyl group-containing acrylic resin is such that (i) the water-soluble cellulose derivative is 30 to 90 parts by mass with respect to 100 parts by mass of the total of the two components.
  • photoinitiators As the photopolymerization initiator, generally known photoinitiators can be used. For example, benzophenones, benzoins, benzoin alkyl ethers, acetophenones, aminoacetophenones, benzyl Benzoin alkyl ethers, benzylalkylketals, anthraquinones, ketals, thixanthones and the like.
  • the above (iv) photopolymerization initiator comprises (i) a water-soluble cellulose derivative and (iv) a total of 100 parts by mass of the photopolymerizable monomer. A range of 0.2 to 5 parts by mass is preferably used.
  • the photopolymerization initiator is 0.1 part by mass or more, sufficient curability for practical use can be obtained.
  • the photopolymerization initiator is 10 parts by mass or less, poor bottom curing due to excessive absorption of the initiator can be prevented.
  • the photo-curable resin composition of the present invention does not have an oligomer or a polymer having a carboxyl group in the side chain. Therefore, even if a metal powder having an ionic valence of 2 or more is used, gelation does not occur. In addition, because it can be developed with water, it has little impact on the environment. Furthermore, it is excellent in storage stability as compared with an alkali development type photocurable resin composition. This is probably because the acid component contained in the composition is small.
  • the photocurable resin composition of the present invention may contain an ultraviolet absorber, a sensitizer, a sensitizer, a polymerization inhibitor, a plasticizer, a thickener, an organic solvent, if necessary. , Dispersant, antifoaming agent, yes Or additive components such as inorganic precipitation inhibitors can be added.
  • the above sensitizer is a force added to improve the sensitivity.
  • Specific examples thereof include 2, 4 -jetylthioxanthone, isopropyl thixanthone, 2,3_bis (4-jetylamino benzal) cyclopenta
  • a polymerization inhibitor is added to improve thermal stability during storage.
  • a polymerization inhibitor includes hydroquinone, monoester of hydroquinone, N-nitrosodiphenylamine, phenothiazine, p_t-butyl.
  • Catechol N-phenylnaphthylamine, 2,6-di_t_butyl_p_methylphenol, chloranil, pyrogallol and the like.
  • plasticizers for improving the followability to the substrate specifically, dibutyl phthalate (HDBP), dioctyl phthalate (DOP), dicyclohexyl phthalate, polyethylene glycol, glycerin, dibutyl tartrate Etc.
  • HDBP dibutyl phthalate
  • DOP dioctyl phthalate
  • dicyclohexyl phthalate polyethylene glycol
  • glycerin dibutyl tartrate Etc.
  • antifoaming agent examples include alkylene glycol-based, silicone-based and higher alcohol-based antifoaming agents such as polyethylene glycol (molecular weight 400 to 800), and bubbles in the paste or film It is possible to reduce vacancies after firing.
  • the photocurable resin composition of the present invention contains (C) glass powder as a binder. Moyore.
  • the glass powder is not particularly limited as long as it satisfies the transparency required for the exposure light source.
  • Specific examples of the glass powder include PbO_SiO, PbO
  • glass powders such as O—SiO-based lead borosilicate glass, zinc borosilicate glass, and bismuth borosilicate glass.
  • a force average particle size of 0.5 to 10 x m, preferably 1 to 8 z m is suitably used depending on the shape of the pattern to be produced. If the average particle size exceeds 10 ⁇ m, surface irregularities occur when forming a highly accurate pattern, and if the average particle size is less than 1 ⁇ m, fine cavities are formed during firing, which may cause insulation failure.
  • Examples of the shape of the (C) glass powder include a spherical shape, a block shape, a flake shape, a dendrite shape, and the like, and these can be used alone or in combination of two or more.
  • the ratio of (A) a metal powder having an ionic valence of 2 or more, which is blackened by oxidation, and (B) the organic component is the ratio of the photocurable resin composition.
  • the organic component is 10 parts by mass or more, a practically sufficient photopolymerizability can be obtained, and a sufficient image can be formed.
  • the organic component (B) is 40 parts by mass or less, the occurrence of pattern peeling after firing can be suppressed, which is preferable.
  • the photocurable resin composition of the present invention is prepared by dissolving or dispersing in a solvent.
  • a solvent As the solvent to be used, (A) Affinity with a metal powder having an ionic valence of 2 or more, which is blackened by oxidation, and (B) Solubility of organic components are good. There is no particular limitation as long as it can impart an appropriate viscosity and can be easily evaporated and removed by drying.
  • ketones such as jetyl ketone, methyl butyl ketone, dipropyl ketone, and cyclohexanone
  • alcohols such as n-pentanol, 4-methylol 2-pentanol, cyclohexanol, and diacetone alcohol.
  • Ethylene glycol monomethino ethenore ethylene glycol mono methino ree noate, ethylene glycol mono chineno ethenore, propylene glyco no mono mono chineno ethenore, propylene glycol mono methino eno enoenore, diethylene Ether-based alcohols such as glyconolemonomethinoreethenole, diethyleneglycolenomonotinoreatenore, diethyleneglycolenoresinetinoreethenole, diethyleneglycol-l-deethylether; acetic acid _ n-butyl, amyl acetate Saturated aliphatic monocarboxylic acid alkyl esters such as lactic acid ethyl ester, lactic acid _n_butyl lactic acid esters, etc .; methyl cetyl sorb acetate, ethyl cetyl sorb acetate,
  • the content of the solvent is as follows: (A) a metal powder having an ionic valence of 2 or more that is blackened by oxidation and (B) an organic component More preferably, 300 parts by mass or less is more preferable, with 10 to 70 parts by mass and 25 to 35 parts by mass being most preferable with respect to 100 parts by mass.
  • the photosensitive film of the present invention is produced as follows.
  • a photosensitive paste film is prepared by forming (applying and drying) the photocurable resin composition on a support film so as to have a dry film thickness of 10 to 50 ⁇ m.
  • the supporting film to be used include a flexible film made of a synthetic resin film such as polyethylene terephthalate, polyethylene, polypropylene, polycarbonate, and polychlorinated butyl having a film thickness of 15 to 125 zm. If necessary, this support film may be subjected to a release treatment so that transfer is easy.
  • the roll coater has excellent film thickness uniformity, and a thick film is effective. Since it can form efficiently, it is preferable.
  • a protective film is attached to obtain a photosensitive film.
  • this protective film for example, a polyethylene terephthalate film, a polypropylene film, a polyethylene film having a thickness of about 15 to 125 zm coated or baked with silicone is suitable.
  • the curable resin composition layer formed on the substrate by coating or transfer is exposed to an image by irradiating an active ray such as ultraviolet ray, excimer laser, ⁇ ray, electron beam through a mask.
  • an active ray such as ultraviolet ray, excimer laser, ⁇ ray, electron beam through a mask.
  • development processing is performed using water, and unirradiated portions are dissolved and removed to form a pattern on the substrate, followed by baking.
  • the entire surface is exposed without a mask and a pattern is formed without developing, and it is baked and blackened in the presence of oxygen to form a black matrix.
  • the above-mentioned photosensitive film is used. First, the protective film is removed from the photosensitive film, the photosensitive paste film is transferred to the substrate, and image exposure or overall exposure is performed. Remove the support film. Next, in the case of the photosensitive paste film subjected to image exposure, it is subjected to a development process to form a pattern. In the case of a photosensitive paste film that has been exposed to the entire surface, a cured film is formed without developing, and is fired in the presence of oxygen.
  • the substrate examples include a glass substrate, a substrate in which an electrode such as a bus electrode is provided on the glass substrate, and a ceramic substrate.
  • the photosensitive paste film is superposed on the substrate surface and thermocompression bonded with a hot roll laminator or the like. Thermocompression bonding is preferably performed at a substrate surface temperature of 80 to 140 ° C, roll pressure:! To 5 kg / cm 2 , and moving speed of 0.1 to 10 OmZ. .
  • the substrate may be preheated.
  • As the preheating temperature for example, a range of 40 to 100 ° C. is selected.
  • a radiation irradiation apparatus used for exposure an ultraviolet irradiation apparatus generally used in a photolithography method, an exposure apparatus used when manufacturing semiconductors and liquid crystal display devices, and the like are used. be able to.
  • the development processing is carried out with water because (i) it has a water-soluble cellulose derivative component.
  • the water temperature is preferably 10-50 ° C force S, more preferably 20-40 ° C force S. If it is out of this range, developability deteriorates and a development residue is generated.
  • development time, development temperature, development method eg, dipping method, rocking method, shower method, spray method, paddle method, etc.
  • development A device or the like can be selected as appropriate.
  • the photocurable resin composition of the present invention can be easily developed with water, and can form a black matrix having sufficient blackness without causing environmental problems or adverse effects on the human body due to organic solvents or aqueous alkali solutions.
  • the temperature used for the baking is a temperature at which (A) a metal powder having an ionic valence of 2 or more that is blackened by oxidation is sufficiently blackened, and (B) is a temperature at which the organic component is burned off. That ’s ⁇ mayyo.
  • Specific white birch ko (boiled, 400 ⁇ : 1000 o C, preferably ryoma 500 ⁇ 1000 o C, more preferably ryah 500 ⁇ 600 ° C. If less than 400 ° C, (B) organic component) This is because some metals (for example, copper, etc.) change the color of the black metal to a different color when the temperature exceeds 1000 ° C. From 10 to 120 minutes when heated at a heating rate of 10 ° C / min and calcined at 500 to 600 ° C.
  • the black matrix of the present invention obtained by the above method has an optical density (OD value) of 3.
  • the black matrix of the present invention can be suitably used for a power used as a material for producing various displays such as a plasma display panel, an organic EL, an inorganic EL, and a field emission display, particularly for a PDP.
  • the PDP of the present invention includes a black matrix obtained by the method for forming a black matrix comprising the photocurable resin composition.
  • the PDP of the present invention is manufactured by a normal PDP manufacturing method. Specifically, a constituent element selected from a partition, an electrode, a resistor, a dielectric layer, a phosphor, and a color filter is formed on a substrate such as a glass substrate by a known method, and the black matrix is the photocurable resin composition.
  • the PDP is manufactured by forming the black matrix using the method.
  • the photocurable resin composition prepared in (2) above was applied onto a support film made of polyethylene terephthalate using a lip coater, and the coating film was dried at 100 ° C for 6 minutes to completely remove the solvent.
  • a photosensitive paste film having a thickness of 16 ⁇ was formed on a support film.
  • a 25 ⁇ m thick polyethylene film was laminated on the photosensitive paste film to produce a photosensitive film.
  • a firing process was performed by heating at a heating rate of 1.0 ° C / min and holding at 580 ° C for 30 minutes. As a result, a black matrix having a good rectangular pattern shape and sufficient blackness with a D value of 3.5 was formed.
  • a photosensitive film was produced in the same manner as in Example 1 except that the copper powder was changed to iron powder (average particle size 1 ⁇ m). While peeling off the polyethylene film of the produced photosensitive film, it was laminated at 105 ° C. with a hot roll laminator on a glass substrate that had been heated to 80 ° C. in advance. The air pressure was 3 kg / cm 2 and the laminating speed was 1 ⁇ Om / min.
  • a firing process was performed by heating at a heating rate of 1.0 ° C / min and holding at 580 ° C for 30 minutes. As a result, a black matrix having a good rectangular pattern shape and sufficient blackness with a D value of 3.5 was formed.
  • a photosensitive film was produced in the same manner as in Example 1 except that the copper powder was changed to cobalt powder (average particle size 1 ⁇ m). While peeling off the polyethylene film of the produced photosensitive film, it was laminated at 105 ° C. with a hot roll laminator on a glass substrate that had been heated to 80 ° C. in advance. The air pressure was 3 kg / cm 2 and the laminating speed was 1. Om / min. Subsequently, the polyethylene terephthalate as a support film was peeled off, and the photosensitive paste film was exposed to ultraviolet rays at an irradiation dose of 500 mj / cm 2 with a super high pressure mercury lamp through a test angle pattern mask.
  • a firing process was performed by heating at a heating rate of 1.0 ° C / min and holding at 580 ° C for 30 minutes. As a result, a black matrix having a good rectangular pattern shape and sufficient blackness with a D value of 3.5 was formed.
  • the support film polyethylene terephthalate
  • the photosensitive paste film was exposed to ultraviolet light at a dose of 500 mj / cm 2 with a super high pressure mercury lamp through a test angle pattern mask.
  • a pattern was formed by spray development for 30 seconds at a spraying pressure of 3 kg / cm 2 using water at a liquid temperature of 30 ° C.
  • the minimum remaining line width was 30 / m.
  • the pattern shape was observed by SEM, a trapezoidal pattern shape was obtained.
  • the film was heated at a heating rate of 1.0 ° C / min. A baking treatment was performed for 30 minutes at ° C. As a result, a black matrix having a good rectangular pattern shape and sufficient blackness with a D value of 3.5 was formed.
  • a photosensitive film was produced in the same manner as in Example 1 except that the photocurable resin composition was adjusted by kneading. While peeling off the polyethylene film of the manufactured photosensitive film, preheat it to 80 ° C. It was laminated at 105 ° C. with a hot roll laminator on a heated glass substrate. The air pressure was 3 kg / cm 2 and the laminating speed was 1. Om / min.
  • the polyethylene terephthalate as a support film was peeled off, and the photosensitive paste film was exposed to ultraviolet rays at a dose of 500 mj / cm 2 with an ultrahigh pressure mercury lamp through a test angle pattern mask.
  • spray development was performed at a spraying pressure of 3 kg / cm 2 for 30 seconds to form a pattern.
  • the adhesion was evaluated, the remaining minimum line width was 30 zm.
  • the pattern shape was observed with SEM, a trapezoidal pattern shape was obtained.
  • a firing process was performed by heating at a heating rate of 1.0 ° C / min and holding at 580 ° C for 30 minutes. As a result, a black matrix having a good rectangular pattern shape and sufficient blackness with a D value of 3 and 5 is formed.
  • the photosensitive black paste composition prepared in (2) above was applied onto a support film made of polyethylene terephthalate using a lip coater, and the coating film was dried at 100 ° C for 6 minutes to completely remove the solvent. 16 ⁇ m thick photosensitive black paste film on support film Formed. Next, a 25 ⁇ m thick polyethylene film was laminated on the photosensitive black paste film to produce a photosensitive film.
  • the polyethylene terephthalate as a supporting film was peeled off, and the photosensitive black matrix film was exposed to ultraviolet rays at an irradiation dose of 500 mj / cm 2 with a super high pressure mercury lamp through a test angle pattern mask.
  • a pattern was formed by spray development for 30 seconds at a spraying pressure of 3 kg / cm 2 using water at a liquid temperature of 30 ° C.
  • the minimum remaining line width was 200 / im.
  • an inverted trapezoidal pattern shape with an under force was obtained.
  • the photosensitive black paste composition was prepared by kneading 50 parts by mass of the resist composition (solid content 50./o) prepared in (1) above and 75 parts by mass of copper powder (average particle size 1 ⁇ m).
  • the adjusted force S, paste yarn and composition were gelled and could not be applied.
  • Industrial applicability As described above, the photocurable resin composition of the present invention can be developed with water, can form a fine pattern, and can form a black matrix having a sufficient black color. Therefore, it can be used for various displays. it can. It is particularly useful for black matrix for PDP.

Abstract

Provided is a photocurable resin composition which can perform fine patterning and can form a black matrix exhibiting a satisfactory black color, and further can be developed with water. The above photocurable resin composition comprises (A) a powder of a metal having an ionic valence number of 2 or greater which is converted to a black material by oxidation, and (B) an organic component comprising (i) a water-soluble cellulose derivative, (ii) a photo-polymerizable monomer, (iii) an acrylic resin having a hydroxy group and (iv) a photopolymerization initiator. The above metals having an ionic valence number of 2 or greater include at least one selected from the group consisting of copper, iron and cobalt.

Description

明 細 書  Specification
ブラックマトリックス形成用光硬化性樹脂組成物、これを用いた感光性フィ ルム、ブラックマトリックスの形成方法、
Figure imgf000002_0001
Photo-curable resin composition for forming black matrix, photosensitive film using the same, method for forming black matrix,
Figure imgf000002_0001
Figure imgf000002_0002
Figure imgf000002_0002
技術分野  Technical field
[0001] 本発明は、ブラックマトリックス形成用光硬化性樹脂組成物に関する。また、該組成 物を用いた感光性フィルム、ブラックマトリックスの形成方法、ブラックマトリクス及びそ のブラックマトリックスを有するプラズマディスプレイパネルに関する。  [0001] The present invention relates to a photocurable resin composition for forming a black matrix. The present invention also relates to a photosensitive film using the composition, a method for forming a black matrix, a black matrix, and a plasma display panel having the black matrix.
背景技術  Background art
[0002] 現在、フラットパネルディスプレイとして、液晶ディスプレイ、エレクトロルミネセンス、 発光ダイオード(LED)、蛍光表示管(VFD)、プラズマディスプレイ(PDP)、フィー ルドエミッションディスプレイ(FED)、デジタルマイクロミラーデバイス(DMD)等が知 られている。  [0002] Currently, flat panel displays include liquid crystal displays, electroluminescence, light emitting diodes (LEDs), fluorescent display tubes (VFD), plasma displays (PDP), field emission displays (FED), and digital micromirror devices (DMD). ) Etc. are known.
[0003] これらのディスプレイをカラー化したカラーディスプレイは、画素ごとに赤、青、緑の 光の三原色をつくり、各画素の明暗を制御して色の変化を表現するものである。かか るカラーディスプレイにおいては、コントラストおよび色純度の低下を防止するために ブラックマトリックスが形成されている。このブラックマトリックスは、当然、遮光性に優 れていることが要求される。  [0003] A color display obtained by colorizing these displays produces three primary colors of red, blue, and green light for each pixel and expresses a change in color by controlling the brightness of each pixel. In such a color display, a black matrix is formed to prevent a decrease in contrast and color purity. Naturally, this black matrix is required to have excellent light shielding properties.
[0004] 特に PDPは、構造が比較的簡単で大型化が容易な上に、 自発光型で表示品位が 高ぐかつカラー表示も可能なことから大いに注目を集め、その大型化、高精密化が 求められており、そのため多数の提案がなされている。かかる PDPは、一般的には対 向配置された基板の表面に絶縁材料からなる隔壁が設けられて多数の表示セルに 区画され、そのセル内に蛍光体層が形成され、各セルを囲むようにパターン電極が 設けられてなる。その画面表示は、前記パターン電極への電圧印加によりプラズマ放 電を発生させ、このプラズマ放電による紫外線の作用で前記各発光体層を発光させ ることにより実現される。そのために、前記基板やセル内にはプラズマを発生させるた めの電極、抵抗体、誘電体等が設けられている。この PDPを高精密化するには、そ れを構成する隔壁、電極、抵抗体、誘電体、蛍光体、カラーフィルター、ブラックマトリ ックスを高精密に作成する必要がある。 [0004] In particular, PDPs have attracted a great deal of attention because they are relatively simple in structure and easy to increase in size, are self-luminous, have high display quality, and are capable of color display. Therefore, many proposals have been made. Such PDPs are generally divided into a large number of display cells by providing partition walls made of an insulating material on the surface of a substrate arranged oppositely, and a phosphor layer is formed in the cells so as to surround each cell. Is provided with a pattern electrode. The screen display is realized by generating plasma discharge by applying a voltage to the pattern electrode, and causing each of the light emitting layers to emit light by the action of ultraviolet rays by the plasma discharge. For this purpose, electrodes, resistors, dielectrics, etc. for generating plasma are provided in the substrate or cell. To make this PDP highly precise, The partition walls, electrodes, resistors, dielectrics, phosphors, color filters, and black matrix that make up these components must be made with high precision.
[0005] 従来、前記ブラックマトリックスの形成には、 CRTディスプレイや液晶ディスプレイパ ネル等のブラックマトリックスの形成に使用されている遮光膜形成用感光性樹脂組成 物が用いられていた。しかし、 PDPの製造においては高温焼成工程があり、このェ 程で遮光膜形成用感光性樹脂組成物中に含有されるカーボンブラックが分解し、満 足できるブラックマトリックスの形成は困難であった。そこで、遮光性材料として、銅の 酸化物と、鉄等の他の金属酸化物とを配合した遮光膜形成用感光性樹脂組成物が 提案されている (例えば、特許文献 1参照)。  [0005] Conventionally, a photosensitive resin composition for forming a light shielding film used for forming a black matrix such as a CRT display or a liquid crystal display panel has been used for forming the black matrix. However, in the production of PDP, there is a high-temperature baking step, and in this process, the carbon black contained in the photosensitive resin composition for forming a light-shielding film is decomposed and it is difficult to form a satisfactory black matrix. Therefore, a light-shielding film-forming photosensitive resin composition in which copper oxide and another metal oxide such as iron are blended as a light-shielding material has been proposed (for example, see Patent Document 1).
[0006] また、ブラックマトリックスの形成を目的としたものではなレ、が、低融点ガラスを含有 し、焼成後に黒色に変化することを特徴とする感光性ペーストも公開されている(例え ば、特許文献 2参照)。  [0006] A photosensitive paste that is not intended for forming a black matrix, but that contains a low-melting glass and changes to black after firing has also been disclosed (for example, (See Patent Document 2).
[0007] 特許文献 1 :特開平 9 160243号公報  Patent Document 1: Japanese Patent Laid-Open No. 9 160243
特許文献 2:特開 2000— 347394号公報  Patent Document 2: JP 2000-347394
発明の開示  Disclosure of the invention
発明が解決しょうとする課題  Problems to be solved by the invention
[0008] し力 ながら、技術的要求の高度化により微細なブラックマトリクスパターンを形成 する必要があり、特許文献 1のような樹脂組成物を用いてブラックマトリックスを形成 すると、すでに黒微粒子を含有しているので光透過性が低ぐ要求される微細なブラ ックマトリクスパターンを形成することは困難であった。  [0008] However, it is necessary to form a fine black matrix pattern due to the advancement of technical requirements. When a black matrix is formed using a resin composition such as Patent Document 1, it already contains black fine particles. Therefore, it is difficult to form a fine black matrix pattern that requires low light transmission.
[0009] また、特許文献 2では黒色に変化する特性を例えば有機金属化合物ニッケルァセ チルァセトナートのような焼成により黒色の酸化物に変換する化合物を用いて達成し ているので高価であり、より安価なものが求められていた。また、これらの銅、鉄、コバ ルトなどの 2価以上の金属を金属粉末として使用した場合は側鎖にカルボキシノレ基 を有するポリマーとゲルイ匕してしまうので塗布パターユングができないという問題があ つた。  [0009] Further, in Patent Document 2, the property of changing to black is achieved by using a compound that is converted into a black oxide by firing, such as an organometallic compound nickel acetyl cintonate, which is expensive and cheaper. Was demanded. In addition, when these bivalent or higher metals such as copper, iron and cobalt are used as metal powder, they will gel with a polymer having a carboxyl group in the side chain, so that coating patterning is not possible. I got it.
課題を解決するための手段  Means for solving the problem
[0010] 本発明者らは、上記課題を解決するために、まずパターユング時には透明性を有 し、微細なパターユングを形成することができ、かつ安価に入手可能な物質について 検討を行なったところ、上記有機金属化合物の替わりに酸化により黒色化する金属 粉末を使用すればよいのではなレ、かとの考察を得た。そこで、実際に実施してみたと ころ、酸化により黒色となる特性を有する銅、鉄、コバルトなどのイオン価数が 2以上 の金属の粉末は、組成物中の感光性成分として用いられるカルボキシル基を側鎖に 有するオリゴマーもしくはポリマーとゲル化して塗布パターユングができなくなるという 問題が生じた。そこで、発明者らは、イオン価数が 2以上の金属の粉末を使用した場 合であってもゲル化しないという特性を有する感光性樹脂について検討を行ない、さ らに、水による現像が可能であるという特性についても検討を行なった。その結果、 酸化により黒色化するイオン価数が 2以上の金属の粉末と特定の樹脂成分とを組み 合わせることで上記課題を解決し得ることを見出すに至った。 [0010] In order to solve the above problems, the present inventors first have transparency during patterning. However, investigations have been made on substances that can form fine patterning and are available at low cost. Instead of using the above organometallic compounds, it is not sufficient to use metal powder that becomes black by oxidation. I got a discussion of heels. Therefore, when actually carried out, metal powders having an ionic valence of 2 or more, such as copper, iron, cobalt, etc., which have the property of becoming black when oxidized, are carboxyl groups used as photosensitive components in the composition. A problem arises in that coating patterning becomes impossible due to gelation with oligomers or polymers having a side chain. Therefore, the inventors examined a photosensitive resin having a characteristic that it does not gel even when a metal powder having an ionic valence of 2 or more is used, and further development with water is possible. We also examined the characteristic of being. As a result, the inventors have found that the above problem can be solved by combining a powder of a metal having an ionic valence of 2 or more, which is blackened by oxidation, and a specific resin component.
[0011] 本発明は力かる知見に基づいてなされたもので、本発明の光硬化性樹脂組成物は 、ブラックマトリックスの形成に用いられる光硬化性樹脂組成物であって、(A)酸化に より黒色化するイオン価数が 2以上の金属の粉末と、 (B) (i)水溶性セルロース誘導 体と、(ii)光重合性単量体と、(iii)ヒドロキシ基を有するアクリル系樹脂と、 (iv)光重 合開始剤とからなる有機成分とを含有するブラックマトリックス形成用光硬化性樹脂 組成物である。 [0011] The present invention has been made on the basis of strong knowledge, and the photocurable resin composition of the present invention is a photocurable resin composition used for forming a black matrix, and comprises (A) oxidation. (B) (i) a water-soluble cellulose derivative, (ii) a photopolymerizable monomer, and (iii) an acrylic resin having a hydroxy group And (iv) a photocurable resin composition for forming a black matrix, which comprises an organic component comprising a photopolymerization initiator.
[0012] また、本発明の感光性フィルムは、上記光硬化性樹脂組成物を成膜化して得られ る感光性ペースト膜と、この感光性ペースト膜を保護する保護フィルムからなる。  [0012] The photosensitive film of the present invention comprises a photosensitive paste film obtained by forming the photo-curable resin composition into a film, and a protective film for protecting the photosensitive paste film.
[0013] また、本発明のブラックマトリックスは、上記感光性ペースト膜がパターユング後に 焼成により硬化されてなる光学密度(〇D)が 3. 0以上である。  [0013] In addition, the black matrix of the present invention has an optical density (OD) of 3.0 or more obtained by curing the photosensitive paste film by baking after patterning.
[0014] また、本発明のブラックマトリックス形成方法は、上記光硬化性樹脂組成物を用い て、基板上に感光性ペースト膜を形成する感光性ペースト膜形成工程と、上記感光 性ペースト膜を露光した後、水で現像処理を施して、上記基板上に所定のパターン を形成するパターン形成工程と、上記パターン形成工程で得られたパターンを酸素 存在下、 1000°C以下の温度で焼成することによって、硬化させるとともに酸化して黒 色化させるパターン焼成'黒色化工程と、を有するブラックマトリックス形成方法である [0015] また、本発明のプラズマディスプレイは、上記ブラックマトリックス形成方法を用いて 形成されたブラックマトリックスを有する。 [0014] In addition, the black matrix forming method of the present invention includes a photosensitive paste film forming step of forming a photosensitive paste film on a substrate using the photocurable resin composition, and exposing the photosensitive paste film. Then, a development process is performed with water to form a predetermined pattern on the substrate, and the pattern obtained in the pattern formation process is baked at a temperature of 1000 ° C. or less in the presence of oxygen. A black matrix forming method having a pattern baking and blackening step of curing and oxidizing to blacken [0015] In addition, the plasma display of the present invention has a black matrix formed by using the above black matrix forming method.
発明の効果  The invention's effect
[0016] 本発明により、水現像可能で、微細なパターンを形成することができ、かつ十分な 黒色を有するブラックマトリックスを形成することができるブラックマトリックス形成用光 硬化性樹脂組成物を安価に提供することができる。  [0016] According to the present invention, a photocurable resin composition for forming a black matrix capable of forming a fine black pattern that can be developed with water and capable of forming a black matrix at low cost is provided. can do.
発明を実施するための最良の形態  BEST MODE FOR CARRYING OUT THE INVENTION
[0017] 以下に、本発明の実施形態について説明する。  [0017] Hereinafter, embodiments of the present invention will be described.
本発明の光硬化性樹脂組成物は、ブラックマトリックスの形成に用いられる光硬化 性樹脂組成物であって、 (A)酸化により黒色化するイオン価数が 2以上の金属の粉 末と、 (B) (i)水溶性セルロース誘導体と、(ii)光重合性単量体と、(iii)ヒドロキシ基を 有するアクリル系樹脂と、 (iv)光重合開始剤とからなる有機成分とを含有する。  The photocurable resin composition of the present invention is a photocurable resin composition used for forming a black matrix, and (A) a powder of a metal having an ionic valence of 2 or more that is blackened by oxidation; B) (i) a water-soluble cellulose derivative, (ii) a photopolymerizable monomer, (iii) an acrylic resin having a hydroxy group, and (iv) an organic component comprising a photopolymerization initiator .
[0018] 本発明に用いられる酸化により黒色化するイオン価数が 2以上の金属としては、パ ターン形成後の焼成処理による酸化によって黒色化するのであれば特に限定されな レ、が、銅、鉄、コバルトが好ましぐ中でも銅がより好ましい。ブラックマトリックスは、絶 縁性であることが好ましぐ銅を用いた場合、酸化により得られた酸化銅は、絶縁性で あるためより好ましい。また、銅は低価格であり、購入しやすい点からも好ましい。これ ら (A)酸化により黒色化するイオン価数が 2以上の金属は、単独で用いてもよいし、 複数組み合わせて用レ、てもよレ、。  [0018] The metal having an ionic valence of 2 or more that is blackened by oxidation used in the present invention is not particularly limited as long as it is blackened by oxidation by baking treatment after pattern formation. Among iron and cobalt, copper is more preferable. When copper that is preferably insulated is used for the black matrix, copper oxide obtained by oxidation is more preferable because it is insulative. Also, copper is preferable because it is inexpensive and easy to purchase. These (A) metals having an ionic valence of 2 or more that are blackened by oxidation may be used alone or in combination.
[0019] 上記金属粉末の形状としては、具体的には例えば、粒状、球状、フレーク状などが 挙げられる力 特にこれらに限定されず、他の形状でもよい。上記金属粉末は、単独 の形状のみの金属粉末を用いてもよいし、 2種以上の形状の金属粉末を混合したも のを用いてもよい。上記金属粉末の粒径は、平均粒径が 0. 01〜: 100 μ ΐη、好ましく は 0.:!〜 30 z m、より好ましくは 0. 5〜10〃111の範囲でぁる。平均粒径カ 100 111 を超えると、微細で高精度のパターンを形成することが困難となり、平均粒径が 0. 01 x m未満では、光が乱反射を起こし、パターン光を通さなくなるためである。  [0019] Specific examples of the shape of the metal powder include forces such as a granular shape, a spherical shape, and a flake shape. The shape is not particularly limited to these, and other shapes may be used. As the metal powder, a metal powder having a single shape may be used, or a mixture of two or more types of metal powder may be used. The average particle size of the metal powder is in the range of 0.01 to 100 μΐη, preferably in the range of 0.0 :! to 30 zm, more preferably in the range of 0.5 to 10 to 111. If the average particle size exceeds 100 111, it becomes difficult to form a fine and highly accurate pattern, and if the average particle size is less than 0.01 × m, the light is irregularly reflected and the pattern light cannot be transmitted.
[0020] 本発明に用いられる有機成分は、(i)水溶性セルロース誘導体と、(ii)光重合性単 量体と、(iii)ヒドロキシ基を有するアクリル系樹脂と、(iv)光重合開始剤とからなる。 [0021] 上記 (i)水溶性セルロース誘導体としては、公知のものが使用でき、特に限定され ないが、例えば、カルボキシメチルセルロース、ヒドロキシェチルセルロース、ヒドロキ シェチノレメチノレセノレロース、ヒドロキシプロピノレセノレロース、ェチノレヒドロキシェチノレセ ノレロース、カノレボキシメチノレエチノレセノレロース、ヒドロキシプロピノレメチノレセノレロース 等が挙げられる。これらは単独、または 2種類以上を混合して用いてもよい。 [0020] The organic component used in the present invention includes (i) a water-soluble cellulose derivative, (ii) a photopolymerizable monomer, (iii) an acrylic resin having a hydroxy group, and (iv) initiation of photopolymerization. It consists of an agent. [0021] As the above-mentioned (i) water-soluble cellulose derivative, known ones can be used, and are not particularly limited, and examples thereof include carboxymethyl cellulose, hydroxyethyl cellulose, hydroxy chineno metheno resenorelose, and hydroxypropino rescenole. Examples thereof include rosin, ethinorehydroxyethinorenorose, canoleboxymethinoreethinoresenorelose, hydroxypropinoremethinoresenorelose and the like. These may be used alone or in admixture of two or more.
[0022] また、上記 (ii)光重合性単量体としては、公知の光重合性単量体でよく特に限定さ れないが、例えばエチレングリコールジアタリレート、エチレングリコールジメタクリレー ト、トリエチレングリコールジアタリレート、トリエチレングリコールジメタタリレート、トリメ チロールプロパントリアタリレート、トリメチロールプロパントリメタタリレート、トリメチロー ルェタントリアタリレート、トリメチロールェタントリメタクリレート、ペンタエリトリトールジ アタリレート、ペンタエリトリトールジメタタリレート、ペンタエリトリトールトリアタリレート、 ペンタエリトリトールトリメタタリレート、ペンタエリトリトールテトラアタリレート、ペンタエリ トリトールテトラメタタリレート、ジペンタエリトリトールテトラアタリレート、ジペンタエリトリ トールテトラメタタリレート、ジペンタエリトリトールペンタアタリレート、ジペンタエリトリト 一ルペンタメタクリレート、ジペンタエリトリトールへキサアタリレート、ジペンタエリトリト ールへキサメタタリレート、グリセロールアタリレート、グリセロールメタタリレート、力ルド エポキシジアタリレート、これら例示化合物の(メタ)アタリレートをフマレートに代えた フマル酸エステル、イタコネートに代えたィタコン酸エステル、マレエートに代えたマ レイン酸エステルなどが挙げられる。  [0022] The above (ii) photopolymerizable monomer may be a known photopolymerizable monomer, and is not particularly limited. For example, ethylene glycol ditalinate, ethylene glycol dimethacrylate, Ethylene glycol diatalylate, triethylene glycol dimetatalylate, trimethylol propane tritalylate, trimethylol propane trimethalylate, trimethylol ethane tritalylate, trimethylol ethane trimethacrylate, pentaerythritol diattalylate, pentaerythritol dimethylate Tatalylate, Pentaerythritol Tritalylate, Pentaerythritol Trimetatalylate, Pentaerythritol Tetratalylate, Pentaerythritol Tetrametatalylate, Dipentaerythritol Tet Laatalylate, Dipentaerythritol tetrametatalylate, Dipentaerythritol pentaatalylate, Dipentaerythritol Monopentamethacrylate, Dipentaerythritol Hexaatalylate, Dipentaerythritol Hexametatalylate, Glycerol Atallate, Glycerol metatalylate, hardened epoxy diatalylate, fumaric acid ester in which (meth) atalylate of these exemplified compounds is replaced with fumarate, itaconic acid ester in place of itaconate, maleic acid ester in place of maleate, etc. .
[0023] (iii)ヒドロキシ基を有するアクリル系樹脂としては、ヒドロキシル基を有するモノマー を主要な共重合性モノマーとし、さらに必要に応じてそれらと共重合可能な他のモノ マーを重合して得た共重合体が挙げられる。上記ヒドロキシル基を有するモノマーと しては、アクリル酸又はメタクリル酸と炭素数 1〜20のモノアルコールとのモノエステ ル化物が好適であり、例えばヒドロキシメチルアタリレート、ヒドロキシメチルメタクリレ ート、 2—ヒドロキシェチルアタリレート、 2—ヒドロキシェチルメタタリレート、 2—ヒドロ キシプロピルアタリレート、 2—ヒドロキシプロピルメタタリレート、 3—ヒドロキシプロピル アタリレート、 3—ヒドロキシプロピルメタタリレート、 2—ヒドロキシブチルアタリレート、 2 ーヒドロキシブチルメタタリレート、 3—ヒドロキシブチルアタリレート、 3—ヒドロキシブ チノレメタタリレート、 4—ヒドロキシブチノレアタリレート、 4—ヒドロキシブチノレメタクリレー トなどを挙げることができ、また、アクリル酸又はメタクリル酸と炭素数 1〜: 10のグリコー ノレとのモノエステノレ化物ゃグリセローノレアタリレート、グリセローノレメタタリレート、ジぺ ンタエリトリトーノレモノアタリレート、ジペンタエリトリトーノレモノメタタリレート、 ε —力プロ ラタトン変性ヒドロキシルェチルアタリレート、 ε —力プロラタトン変性ヒドロキシルェチ ルメタタリレート、 2—ヒドロキシー 3 フエノキシプロピルアタリレートなどのエポキシェ ステルイ匕合物を挙げることができる。 (Iii) The acrylic resin having a hydroxy group is obtained by polymerizing a monomer having a hydroxyl group as a main copolymerizable monomer and further copolymerizing with other monomers as necessary. And copolymers. The monomer having a hydroxyl group is preferably a monoester product of acrylic acid or methacrylic acid and a monoalcohol having 1 to 20 carbon atoms, such as hydroxymethyl acrylate, hydroxymethyl methacrylate, 2 —Hydroxyethyl acrylate, 2-hydroxyethyl methacrylate, 2-hydroxypropyl acrylate, 2-hydroxypropyl methacrylate, 3-hydroxypropyl acrylate, 3-hydroxypropyl methacrylate, 2-hydroxy Butyl acrylate, 2-hydroxybutyl methacrylate, 3-hydroxybutyl acrylate, 3-hydroxybutyl Examples include chinoremethacrylate, 4-hydroxybutynoleatelate, 4-hydroxybutinoacrylate, and monoesterolates of acrylic acid or methacrylic acid with 1- to 10-carbon glycolate. Glycerololeatalylate, Glycellonoremetatalylate, Dipentaerythritolol monoatalylate, Dipentaerythritololmonometatalylate, ε — Force Pro Lataton Modified Hydroxyethyl Atylate, ε — Force Prolatatone Examples thereof include epoxy ester compounds such as modified hydroxyl ether methacrylate and 2-hydroxy-3phenoxypropyl acrylate.
[0024] 上記ヒドロキシル基を有するモノマーと共重合可能な他のモノマーとしては、例えば 、メチルアタリレート、ェチルアタリレート、 η—プロピルアタリレート、イソプロピルアタリ レート、 η ブチルアタリレート、イソブチルアタリレート、 sec ブチルアタリレート、シ クロへキシルアタリレート、 2—ェチルへキシルアタリレート、ステアリルアタリレート、メ チルメタタリレート、ェチルメタタリレート、 n プロピルメタタリレート、イソプロピルメタ タリレート、 sec プロピルメタタリレート、 n ブチルメタタリレート、イソブチルメタクリレ ート、 sec ブチルメタタリレート、シクロへキシルメタタリレート、 2—ェチルへキシルメ タクリレート、ステ リノレメタタリレート、 2, 2, 2—トリフノレ才ロメチノレ タリレート、 2, 2, 2—トリフルォロメチルメタタリレートなどの α , β 不飽和カルボン酸エステル、スチ レン、 α—メチルスチレン、 ρ ビュルトルエンなどのスチレン類などが好ましく挙げら れる。また、アクリロニトリル、メタタリロニトリル、アタリノレアミド、メタクリノレアミド、酢酸ビ ニル、グリシジルアタリレート、グリシジルメタタリレートなども用いることができる。これ らは、単独で用いてもよいし、 2種以上を組み合わせて用いてもよい。  [0024] Other monomers copolymerizable with the monomer having a hydroxyl group include, for example, methyl acrylate, ethyl acetate, η-propyl acrylate, isopropyl acrylate, η butyl acrylate, isobutyl acrylate, sec Butyl Atylate, Cyclohexyl Atylate, 2-Ethylhexyl Atylate, Stearyl Atylate, Methyl Metatalylate, Ethyl Metatalylate, n-Propyl Metatalylate, Isopropyl Metatalylate, sec Propyl Metatalyl , N-butyl methacrylate, sec-butyl methacrylate, sec butyl methacrylate, cyclohexyl methacrylate, 2-ethyl hexyl methacrylate, sterol methacrylate, 2, 2, 2-trifanolate romethinolate , 2 Preferred examples include α, β unsaturated carboxylic acid esters such as 1,2,2-trifluoromethyl metatalylate, styrenes such as styrene, α-methyl styrene, and ρ butyltoluene. Further, acrylonitrile, methacrylonitrile, attalinoleamide, methacrylolamide, vinyl acetate, glycidyl acrylate, glycidyl methacrylate, and the like can also be used. These may be used alone or in combination of two or more.
[0025] 本発明の光硬化性樹脂組成物は、上記 (iii)ヒドロキシル基を有するアクリル系樹脂 を含有することで、耐現像性が向上し、精度の高い画像が形成できる。  [0025] The photocurable resin composition of the present invention contains the above (iii) acrylic resin having a hydroxyl group, whereby the development resistance is improved and a highly accurate image can be formed.
[0026] 本発明の光硬化性樹脂組成物中の(i)水溶性セルロース誘導体と(ii)光重合性単 量体との比率は 2つの成分の総和 100質量部に対し、(i)水溶性セルロース誘導体 が 10〜50質量部、(ii)光重合性単量体が 90〜50質量部、好ましくは(i)水溶性セ ルロース誘導体が 20〜40質量部、(ii)光重合性単量体が 80〜60質量部、さらに好 ましくは(i)水溶性セルロース誘導体が 25〜35質量部、(ii)光重合性単量体が 75〜 65質量部の範囲がよい。各成分が前記範囲内であることで必要なパターン形成精 度が得られ、活性光線に対する十分な透過性が得られる。例えば、(ii)光重合性単 量体が 50質量部以上であることで、現像時に必要な光重合性が得られ、実用上十 分な画像形成能が得られる。また、光重合性単量体が 90質量部以下であることで、 微細な画像の解像性が向上する。 [0026] The ratio of (i) the water-soluble cellulose derivative and (ii) the photopolymerizable monomer in the photocurable resin composition of the present invention is as follows: 10 to 50 parts by weight of the cellulose derivative, (ii) 90 to 50 parts by weight of the photopolymerizable monomer, preferably (i) 20 to 40 parts by weight of the water-soluble cellulose derivative, (ii) the photopolymerizable monomer It is preferable that the monomer is 80 to 60 parts by mass, more preferably (i) 25 to 35 parts by mass of the water-soluble cellulose derivative, and (ii) 75 to 65 parts by mass of the photopolymerizable monomer. Necessary pattern formation precision by each component being within the above range. Degree and sufficient permeability to actinic rays. For example, when (ii) the photopolymerizable monomer is 50 parts by mass or more, the photopolymerization necessary for development can be obtained, and practically sufficient image forming ability can be obtained. Further, when the photopolymerizable monomer is 90 parts by mass or less, resolution of a fine image is improved.
[0027] また、 (i)水溶性セルロース誘導体と(iii)ヒドロキシル基を有するアクリル系樹脂の 比率は、 2つの成分の総和 100質量部に対し、(i)水溶性セルロース誘導体が 30〜 90質量部、(iii)ヒドロキシル基を有するアクリル系樹脂が 70〜: 10質量部、好ましくは (i)水溶性セルロース誘導体が 40〜80質量部、(iii)ヒドロキシノレ基を有するアクリル 系樹脂が 60〜20質量部、さらに好ましくは(i)水溶性セルロース誘導体が 50〜70 質量部、(iii)ヒドロキシノレ基を有するアクリル樹脂が 50〜30質量部の範囲がょレ、。 各成分が前記範囲内であることで必要なパターン形成精度が得られ、活性光線に対 する十分な透過性が得られる。例えば、 (iii)ヒドロキシル基を有するアクリル系樹脂 力 S10質量部以上の場合、現像耐性が向上する。 90質量部以下の場合、現像性が 向上し、現像残渣の発生が防止できる。  [0027] The ratio of (i) the water-soluble cellulose derivative and (iii) the hydroxyl group-containing acrylic resin is such that (i) the water-soluble cellulose derivative is 30 to 90 parts by mass with respect to 100 parts by mass of the total of the two components. Parts (iii) 70 to 10 parts by mass of an acrylic resin having a hydroxyl group, preferably (i) 40 to 80 parts by mass of a water-soluble cellulose derivative, and (iii) 60 to 80 parts of an acrylic resin having a hydroxyl group. 20 parts by mass, more preferably (i) 50 to 70 parts by mass of the water-soluble cellulose derivative and (iii) 50 to 30 parts by mass of the acrylic resin having a hydroxyl group. When each component is within the above range, the necessary pattern formation accuracy can be obtained, and sufficient transparency to actinic rays can be obtained. For example, (iii) Acrylic resin having a hydroxyl group When the strength is S10 parts by mass or more, development resistance is improved. In the case of 90 parts by mass or less, developability is improved and development residue can be prevented.
[0028] (iv)光重合開始剤としては、一般に知られているものを用いることができ、例えばべ ンゾフエノン類、ベンゾイン類、ベンゾインアルキルエーテル類、ァセトフエノン類、ァ ミノァセトフヱノン類、ベンジル類、ベンゾインアルキルエーテル類、ベンジルアルキ ルケタール類、アントラキノン類、ケタール類、チォキサントン類等が挙げられる。具 体的な例として 2, 4—ビス一トリクロロメチル一 6— (3—ブロモ一4—メトキシ)フエ二 ル一 s—トリァジン、 2, 4_ビス一トリクロロメチル一 6 _ (2—ブロモ _4—メトキシ)フエ ニル一 s—トリァジン、 2, 4—ビス一トリクロロメチル一 6— (3—ブロモ一4—メトキシ) スチリルフエニル一 s—トリァジン、 2, 4—ビス一トリクロロメチル一 6— (2—ブロモ一4 —メトキシ)スチリルフエニル _ s—トリァジン、 2, 4, 6 _トリメチルベンゾィルジフエ二 ルホスフィンォキシド、 1 - [4- (2—ヒドロキシエトキシ)フエ二ル〕一 2—ヒドロキシ一 2 _メチル _ 1 _プロパン _ 1 _オン、 2, 4 _ジェチルチオキサントン、 2, 4 _ジメチ ノレチォキサントン、 2 _クロ口チォキサントン、 1 _クロ口 _4 _プロポキシチォキサント ン、 3, 3—ジメチル一 4—メトキシベンゾフエノン、ベンゾフエノン、 1— (4—イソプロピ ルフエ二ル)一 2—ヒドロキシ一 2—メチルプロパン一 1—オン、 1— (4—ドデシルフェ 二ル)一 2—ヒドロキシ一 2 _メチルプロパン _ 1 _オン、 4 _ベンゾィル _4' _メチル ジメチルスルフイド、 4—ジメチルァミノ安息香酸、 4—ジメチルァミノ安息香酸メチル、 4 _ジメチルァミノ安息香酸ェチル、 4 _ジメチルァミノ安息香酸ブチル、 4 _ジメチル ァミノ安息香酸—2—ェチルへキシル、 4 -ジメチルァミノ安息香酸 _ 2 _イソァミル、 2, 2—ジェトキシァセトフェノン、ベンジルジメチルケタール、ベンジル一 β—メトキシ ェチルァセタール、 1 _フエ二ノレ一1 , 2 _プロパンジオン _ 2 _ (ο _エトキシカルボ ニル)ォキシム、 ο _ベンゾィル安息香酸メチル、ビス(4—ジメチルァミノフエニル)ケ トン、 4, 4 '—ビスジェチルァミノべンゾフエノン、ベンジル、ベンゾイン、ベンゾインメ チルエーテル、ベンゾインェチルエーテル、ベンゾインイソプロピルエーテル、ベンゾ イン η ブチルエーテル、ベンゾインイソブチルエーテル、 ρ ジメチルアミノアセト フエノン、 p— tert ブチルトリクロロアセトフエノン、 p— tert ブチルジクロロアセトフ ェノン、チォキサントン、 2—メチルチオキサントン、 2—イソプロピルチォキサントン、 ジベンゾスベロン、 α , α—ジクロロー 4 フエノキシァセトフエノン、ペンチノレ 4 ジメチルァミノべンゾエート、 2— (ο クロ口フエ二ル)一 4, 5 ジフエ二ルイミダゾリル 二量体などを挙げることができる。これらは単独でもまたは 2種以上を組合せても使用 できる。 [0028] (iv) As the photopolymerization initiator, generally known photoinitiators can be used. For example, benzophenones, benzoins, benzoin alkyl ethers, acetophenones, aminoacetophenones, benzyl Benzoin alkyl ethers, benzylalkylketals, anthraquinones, ketals, thixanthones and the like. Specific examples are 2,4-bis-trichloromethyl-6- (3-bromo-4-methoxy) phenyl s-triazine, 2,4_bis-trichloromethyl-6_ (2-bromo_4 —Methoxy) phenyl-1-s-triazine, 2,4-bis-trichloromethyl-1-6- (3-bromo-1-methoxy) styrylphenyl-s-triazine, 2,4-bis-trichloromethyl-6- (2— Bromo-4-methoxy) styrylphenyl _ s-triazine, 2, 4, 6 _Trimethylbenzoyldiphosphine oxide, 1- [4- (2-hydroxyethoxy) phenyl] -1-2-hydroxy-2- _Methyl _ 1 _Propane _ 1 _one, 2, 4 _Jetylthioxanthone, 2, 4 _Dimethinorethioxanthone, 2 _Chroochi thioxanthone, 1 _Croca _4 _Propoxy thioxanthone, 3, 3— Dimethyl mono 4-methoxybenzo Enone, benzophenone, 1- (4-isopropylidene Rufue sulfonyl) Single hydroxy one 2-methylpropan-one 1-one, 1- (4-Dodeshirufe 1) 2-hydroxy-1 2_methylpropane_1_one, 4_benzoyl_4'_methyl dimethylsulfide, 4-dimethylaminobenzoic acid, 4-dimethylmethylaminobenzoic acid, 4_dimethylaminobenzoic acid ethyl, 4 _Butyl dimethylaminobenzoate, 4 _Dimethylaminobenzoic acid-2-ethylhexyl, 4-dimethylaminobenzoic acid _2 _Isamyl, 2,2-jetoxyacetophenone, benzyldimethyl ketal, benzyl-β-methoxyethyl cetylacetal, 1 _Finole 1, 2 _Propanedione _ 2 _ (ο _Ethoxycarbonyl) oxime, ο _Methyl benzoylbenzoate, bis (4-dimethylaminophenyl) ketone, 4, 4'-bisger Tyramino benzophenone, benzyl, benzoin, benzoin methyl ether, benzoin ethyl ether, benzine Inisopropyl ether, benzoin η butyl ether, benzoin isobutyl ether, ρ dimethylaminoacetophenone, p-tert butyltrichloroacetophenone, p-tert butyldichloroacetophenone, thixanthone, 2-methylthioxanthone, 2-isopropylthioxanthone, Examples include dibenzosuberone, α, α-dichloro-4-phenoxyacetophenone, pentinore-4 dimethylaminobenzoate, 2- (ο-clophenyl) 1,4,5 diphenylimidazolyl dimer, and the like. These can be used alone or in combination of two or more.
[0029] 上記 (iv)光重合開始剤は、 (i)水溶性セルロース誘導体と(iv)光重合性単量体の 総和 100質量部に対し、 0. 1〜: 10質量部の範囲、より好ましくは 0. 2〜5質量部の 範囲が好適に用いられる。 (iv)光重合開始剤が 0. 1質量部以上の場合、実用に十 分な硬化性が得られる。また、 (iv)光重合開始剤が 10質量部以下の場合、開始剤 の過剰吸収による底部硬化不良を防止できる。  [0029] The above (iv) photopolymerization initiator comprises (i) a water-soluble cellulose derivative and (iv) a total of 100 parts by mass of the photopolymerizable monomer. A range of 0.2 to 5 parts by mass is preferably used. (Iv) When the photopolymerization initiator is 0.1 part by mass or more, sufficient curability for practical use can be obtained. In addition, (iv) when the photopolymerization initiator is 10 parts by mass or less, poor bottom curing due to excessive absorption of the initiator can be prevented.
[0030] 本発明の光硬化性樹脂組成物は、カルボキシノレ基を側鎖に有するオリゴマーもしく はポリマーを有さない。従って、イオン価数が 2以上の金属の粉末を使用した場合で あってもゲル化を引き起こさなレ、。また、水で現像可能であるため、環境に対して影 響が少ない。さらに、アルカリ現像型の光硬化性樹脂組成物に比べて保存安定性に 優れる。組成物中に含まれる酸成分が少ないためと考えられる。  [0030] The photo-curable resin composition of the present invention does not have an oligomer or a polymer having a carboxyl group in the side chain. Therefore, even if a metal powder having an ionic valence of 2 or more is used, gelation does not occur. In addition, because it can be developed with water, it has little impact on the environment. Furthermore, it is excellent in storage stability as compared with an alkali development type photocurable resin composition. This is probably because the acid component contained in the composition is small.
[0031] 上記に加えて、本発明の光硬化性樹脂組成物は、必要に応じて、紫外線吸収剤、 増感剤、増感助剤、重合禁止剤、可塑剤、増粘剤、有機溶媒、分散剤、消泡剤、有 機あるいは無機の沈殿防止剤などの添加剤成分を加えることができる。 [0031] In addition to the above, the photocurable resin composition of the present invention may contain an ultraviolet absorber, a sensitizer, a sensitizer, a polymerization inhibitor, a plasticizer, a thickener, an organic solvent, if necessary. , Dispersant, antifoaming agent, yes Or additive components such as inorganic precipitation inhibitors can be added.
[0032] 上記増感剤は、感度を向上させるために添加される力 その具体例としては、 2, 4 —ジェチルチオキサントン、イソプロピルチォキサントン、 2, 3 _ビス(4—ジェチルァ ミノベンザル)シクロペンタノン、 2, 6 _ビス(4—ジメチルァミノベンザル)シクロへキサ ノン、 2, 6 _ビス(4—ジメチルァミノベンザル) _4 メチルシクロへキサノン、ミヒラー ケトン、 4, 4 _ビス(ジェチルァミノ)一ベンゾフエノン、 4, 4 _ビス(ジメチルァミノ)力 ルコン、 4, 4_ビス(ジェチルァミノ)カルコン、 p—ジメチルァミノシンナミリデンインダ ノン、 p ジメチルァミノべンジリデンインダノン、 2— (p ジメチルァミノフエ二ルビ二 レン) イソナフトチアゾール、 1, 3—ビス(4ージメチルァミノベンザル)アセトン、 1 , 3—カルボ二ルービス(4—ジェチルァミノベンザル)アセトン、 3, 3—カルボ二ルーピ ス(7—ジェチルァミノクマリン)、 N—フエ二ルー N ェチルエタノールァミン、 N フ ェニルエタノールァミン、 N—トリルジエタノールアミン、 N—フエニルエタノールァミン 、ジメチルァミノ安息香酸イソァミル、ジェチルァミノ安息香酸イソァミル、 3—フエ二ノレ 5—ベンゾィルチオテトラゾール、 1 フエニノレー 5—エトキシカルボ二ルチオテトラ ゾールなどが挙げられ、それらを 1種または 2種以上使用することができる。 [0032] The above sensitizer is a force added to improve the sensitivity. Specific examples thereof include 2, 4 -jetylthioxanthone, isopropyl thixanthone, 2,3_bis (4-jetylamino benzal) cyclopenta Non, 2, 6_bis (4-dimethylaminobenzal) cyclohexanone, 2, 6_bis (4-dimethylaminobenzal) _4 Methylcyclohexanone, Michler's ketone, 4, 4_bis (jetylamino) ) One benzophenone, 4, 4_bis (dimethylamino) force rucon, 4, 4_bis (jetylamino) chalcone, p-dimethylaminocinnamylidene indanone, p dimethylaminobenzylidene indanone, 2- (p dimethylamino) Minophenyl rubiylene) Isonaphthothiazole, 1,3-bis (4-dimethylaminobenzal) acetone, 1,3-carborubibis (4 Jetylaminobenzal) Acetone, 3, 3-Carbonyl loops (7-Jetylaminocoumarin), N-Phenolux N-ethylethanolamine, N-phenylethanolamine, N-tolyldiethanolamine , N-phenylethanolamine, isoamyl dimethylaminobenzoate, isoamyl dimethylaminobenzoate, 3-phenenole 5-benzoylthiotetrazole, 1-phenolinole 5-ethoxycarbonylthiotetrazole, and the like. Two or more types can be used.
[0033] また、重合禁止剤は保存時の熱安定性を向上させるため添加されるが、その具体 的な例としては、ヒドロキノン、ヒドロキノンのモノエステル化物、 N ニトロソジフエ二 ノレァミン、フエノチアジン、 p_t—ブチルカテコール、 N—フエ二ルナフチルァミン、 2 , 6—ジ _t_ブチル _p_メチルフエノール、クロラニール、ピロガロールなどが挙げ られる。 [0033] In addition, a polymerization inhibitor is added to improve thermal stability during storage. Specific examples thereof include hydroquinone, monoester of hydroquinone, N-nitrosodiphenylamine, phenothiazine, p_t-butyl. Catechol, N-phenylnaphthylamine, 2,6-di_t_butyl_p_methylphenol, chloranil, pyrogallol and the like.
[0034] さらに、基板への追従性向上のための可塑剤としては、具体的にジブチルフタレー HDBP)、ジォクチルフタレート(DOP)、フタル酸ジシクロへキシル、ポリエチレング リコール、グリセリン、酒石酸ジブチルなどが挙げられる。  [0034] Further, as plasticizers for improving the followability to the substrate, specifically, dibutyl phthalate (HDBP), dioctyl phthalate (DOP), dicyclohexyl phthalate, polyethylene glycol, glycerin, dibutyl tartrate Etc.
[0035] 消泡剤の具体的な例としては、ポリエチレングリコール(分子量 400〜800)などの アルキレングリコール系、シリコーン系、高級アルコール系の消泡剤などが挙げられ、 ペーストあるいは、フィルム中の気泡を減少させ、焼成後の空孔を減少させることがで きる。  [0035] Specific examples of the antifoaming agent include alkylene glycol-based, silicone-based and higher alcohol-based antifoaming agents such as polyethylene glycol (molecular weight 400 to 800), and bubbles in the paste or film It is possible to reduce vacancies after firing.
[0036] さらに、本発明の光硬化性樹脂組成物は、結着剤として(C)ガラス粉末を含有して もよレ、。 (C)ガラス粉末は、露光光源に対して必要な透明性を満たすものであれば特 に限定はない。 (C)ガラス粉末としては、具体的には、例えば PbO_Si〇系、 Pb〇[0036] Further, the photocurable resin composition of the present invention contains (C) glass powder as a binder. Moyore. (C) The glass powder is not particularly limited as long as it satisfies the transparency required for the exposure light source. (C) Specific examples of the glass powder include PbO_SiO, PbO
— B〇一 Si〇系、 Zn〇一 Si〇系、 Zn〇一 B〇一 Si〇系、 Bi〇一 Si〇系、 Bi〇一 B— B〇Si 〇 series, Zn〇1 Si〇 series, Zn〇1 B〇1 Si〇 series, Bi〇1 Si〇 series, Bi〇1 B
O - SiO系のホウ珪酸鉛ガラス、ホウ珪酸亜鉛ガラス、ホウ珪酸ビスマスガラス等の ガラス粉末が挙げられる。 Examples thereof include glass powders such as O—SiO-based lead borosilicate glass, zinc borosilicate glass, and bismuth borosilicate glass.
[0037] (C)ガラス粉末の粒子径は、作製するパターンの形状による力 平均粒径が 0. 5〜 10 x m、好ましくは l〜8 z mが好適に用いられる。平均粒径が 10 μ mを超えると、 高精度のパターン形成時に表面凹凸が生じるため好ましくなぐ平均粒径が 1 μ m未 満では焼成時に微細な空洞が形成され絶縁不良発生の原因となり好ましくない。こ の(C)ガラス粉末の形状としては、球状、ブロック状、フレーク状、デンドライト状等が 挙げられ、その単独又は 2種類以上を組み合わせて用いることができる。  [0037] (C) As the particle size of the glass powder, a force average particle size of 0.5 to 10 x m, preferably 1 to 8 z m, is suitably used depending on the shape of the pattern to be produced. If the average particle size exceeds 10 μm, surface irregularities occur when forming a highly accurate pattern, and if the average particle size is less than 1 μm, fine cavities are formed during firing, which may cause insulation failure. . Examples of the shape of the (C) glass powder include a spherical shape, a block shape, a flake shape, a dendrite shape, and the like, and these can be used alone or in combination of two or more.
[0038] 本発明の光硬化性樹脂組成物中の (A)酸化により黒色化するイオン価数が 2以上 の金属の粉末と (B)有機成分との比率は、光硬化性樹脂組成物の総和 100質量部 に対し、 (A)酸化により黒色化するイオン価数が 2以上の金属の粉末が 60〜90質量 部、(B)有機成分が 10〜40質量部、好ましくは (A)酸化により黒色化するイオン価 数が 2以上の金属の粉末が 65〜85質量部、(B)有機成分が 35〜: 15質量部、より好 ましくは (A)酸化により黒色化するイオン価数が 2以上の金属の粉末が 70〜80質量 部、(B)有機成分が 30〜20質量部である。 (B)有機成分が 10質量部以上であるこ とで実用上十分な光重合性が得られ、十分な画像形成ができる。一方、(B)有機成 分が 40質量部以下であることで焼成後のパターン剥離の発生を抑えられ、好ましレ、  [0038] In the photocurable resin composition of the present invention, the ratio of (A) a metal powder having an ionic valence of 2 or more, which is blackened by oxidation, and (B) the organic component is the ratio of the photocurable resin composition. To 100 parts by mass of total, (A) 60-90 parts by mass of metal powder having an ionic valence of 2 or more that is blackened by oxidation, (B) 10-40 parts by mass of organic component, preferably (A) oxidation 65 to 85 parts by mass of metal powder having an ionic valence of 2 or more due to oxidization, (B) 35 to 15 parts by mass of organic component, more preferably (A) ionic valence to be blackened by oxidation Is 70-80 parts by mass of metal powder of 2 or more, and (B) the organic component is 30-20 parts by mass. (B) When the organic component is 10 parts by mass or more, a practically sufficient photopolymerizability can be obtained, and a sufficient image can be formed. On the other hand, since the organic component (B) is 40 parts by mass or less, the occurrence of pattern peeling after firing can be suppressed, which is preferable.
[0039] 本発明の光硬化性樹脂組成物は、溶剤に溶解又は分散させて調製される。使用 する溶剤としては、 (A)酸化により黒色化するイオン価数が 2以上の金属の粉末との 親和性と、(B)有機成分の溶解性とが良好であり、硬化性樹脂組成物に適度な粘性 を付与することができ、乾燥されることによって容易に蒸発除去できるものであればと くに限定されない。力かる溶剤の具体例としては、ジェチルケトン、メチルプチルケト ン、ジプロピルケトン、シクロへキサノンなどのケトン類; n—ペンタノール、 4—メチノレ 2—ペンタノール、シクロへキサノール、ジアセトンアルコールなどのアルコール類; エチレングリコーノレモノメチノレエーテノレ、エチレングリコーノレモノェチノレエーテノレ、ェ チレングリコーノレモノブチノレエーテノレ、プロピレングリコーノレモノメチノレエーテノレ、プロ ピレングリコーノレモノェチノレエーテノレ、ジエチレングリコーノレモノメチノレエーテノレ、ジ エチレングリコーノレモノェチノレエーテノレ、ジエチレングリコーノレジメチノレエーテノレ、ジ エチレングリコ一ルジェチルエーテルなどのエーテル系アルコール類;酢酸 _ n—ブ チル、酢酸ァミルなどの飽和脂肪族モノカルボン酸アルキルエステル類;乳酸ェチル 、乳酸 _n_ブチルなどの乳酸エステル類;メチルセ口ソルブアセテート、ェチルセ口 ソルブアセテート、プロピレングリコールモノメチルエーテルアセテート、プロピレング リコールモノェチルエーテルアセテート、ェチルー 3 エトキシプロピオネート、 2—メ トキシブチノレアセテート、 3—メトキシブチノレアセテート、 4ーメトキシブチノレアセテート 、 2—メチルー 3—メトキシブチルアセテート、 3—メチルー 3—メトキシブチルァセテ ート、 3—ェチノレー 3—メトキシブチノレアセテート、 2—ェトキシブチノレアセテート、 4 エトキシプチ/レアセテート、 4 プロポキシブチノレアセテート、 2—メトキシペンチノレア セテートなどのエーテル系エステル類などを例示することができる。これらは、単独で または 2種以上を組み合わせて使用することができる。 [0039] The photocurable resin composition of the present invention is prepared by dissolving or dispersing in a solvent. As the solvent to be used, (A) Affinity with a metal powder having an ionic valence of 2 or more, which is blackened by oxidation, and (B) Solubility of organic components are good. There is no particular limitation as long as it can impart an appropriate viscosity and can be easily evaporated and removed by drying. Specific examples of powerful solvents include ketones such as jetyl ketone, methyl butyl ketone, dipropyl ketone, and cyclohexanone; alcohols such as n-pentanol, 4-methylol 2-pentanol, cyclohexanol, and diacetone alcohol. ; Ethylene glycol monomethino ethenore, ethylene glycol mono methino ree noate, ethylene glycol mono chineno ethenore, propylene glyco no mono mono chineno ethenore, propylene glycol mono methino eno enoenore, diethylene Ether-based alcohols such as glyconolemonomethinoreethenole, diethyleneglycolenomonotinoreatenore, diethyleneglycolenoresinetinoreethenole, diethyleneglycol-l-deethylether; acetic acid _ n-butyl, amyl acetate Saturated aliphatic monocarboxylic acid alkyl esters such as lactic acid ethyl ester, lactic acid _n_butyl lactic acid esters, etc .; methyl cetyl sorb acetate, ethyl cetyl sorb acetate, propylene glycol monomethyl ether acetate, propylene N-glycol monoethyl ether acetate, ethyl 3-ethoxypropionate, 2-methybutynoacetate, 3-methoxybutynoacetate, 4-methoxybutynoacetate, 2-methyl-3-methoxybutyl acetate, 3-methyl-3 —Methoxybutyl acetate, 3-ethynoleate 3-Methoxybutynoleacetate, 2-ethoxybutynoleacetate, 4 ethoxy butyl / acetate, 4 propoxybutynoleacetate, ethers such as 2-methoxypentinorea acetate Examples thereof include esters. These can be used alone or in combination of two or more.
[0040] 上記溶剤の含有割合は、硬化性樹脂組成物の粘度を好適な範囲に維持するため 、 (A)酸化により黒色化するイオン価数が 2以上の金属の粉末と(B)有機成分の総 和 100質量部に対して、 300質量部以下が好ましぐより好ましくは 10〜70質量部、 25〜35質量部が最も好ましい。  [0040] In order to maintain the viscosity of the curable resin composition within a suitable range, the content of the solvent is as follows: (A) a metal powder having an ionic valence of 2 or more that is blackened by oxidation and (B) an organic component More preferably, 300 parts by mass or less is more preferable, with 10 to 70 parts by mass and 25 to 35 parts by mass being most preferable with respect to 100 parts by mass.
[0041] 本発明の感光性フィルムは、以下のようにして作製される。  [0041] The photosensitive film of the present invention is produced as follows.
まず、上記光硬化性樹脂組成物を支持フィルム上に乾燥膜厚が 10〜50 μ mとな るように成膜化 (塗布および乾燥)して感光性ペースト膜を作成する。使用する支持 フィルムとしては、例えば、膜厚 15〜125 z mのポリエチレンテレフタレート、ポリェチ レン、ポリプロピレン、ポリカーボネート、ポリ塩化ビュルなどの合成樹脂フィルムから なる可撓性フィルム等が挙げられる。この支持フィルムには必要に応じて、転写が容 易となるように離型処理を行なってもよい。また、塗布に当たっては、アプリケーター、 バ' ~コ1 ~タ1 ~ ワイヤ" ~ノ " ~コ1 ~タ1 ~ 口" ~ノレコ1 ~タ1 ~ 力' ~テンフロ1 ~コ1 ~タ1 ~ を用いるのがよい。特にロールコーターは膜厚の均一性に優れ、厚さの厚い膜が効 率よく形成できるため好ましい。 First, a photosensitive paste film is prepared by forming (applying and drying) the photocurable resin composition on a support film so as to have a dry film thickness of 10 to 50 μm. Examples of the supporting film to be used include a flexible film made of a synthetic resin film such as polyethylene terephthalate, polyethylene, polypropylene, polycarbonate, and polychlorinated butyl having a film thickness of 15 to 125 zm. If necessary, this support film may be subjected to a release treatment so that transfer is easy. Also, when applying, applicator, bar 1 ~ 1 ~ wire 1 ~ wire "~ 1 ~ 1 ~ 1 ~ mouth" ~ Nore 1 ~ 1 ~ force '~ Tenflo 1 ~ 1 ~ 1 ~ 1 ~ In particular, the roll coater has excellent film thickness uniformity, and a thick film is effective. Since it can form efficiently, it is preferable.
[0042] 次に、この感光性ペースト膜の未使用時に感光性ペースト膜を安定に保護するた め保護フィルムを貼着し、感光性フィルムを得る。この保護フィルムとしては、例えば、 シリコーンをコーティングまたは焼き付けした厚さ 15〜: 125 z m程度のポリエチレンテ レフタレ一トフイルム、ポリプロピレンフィルム、ポリエチレンフィルムなどが好適である Next, in order to stably protect the photosensitive paste film when the photosensitive paste film is not used, a protective film is attached to obtain a photosensitive film. As this protective film, for example, a polyethylene terephthalate film, a polypropylene film, a polyethylene film having a thickness of about 15 to 125 zm coated or baked with silicone is suitable.
[0043] 次に、本発明の硬化性樹脂組成物を用いた、ブラックマトリックスの形成方法を説 明する。基板上に塗布又は転写で形成した硬化性樹脂組成物層に紫外線、エキシ マレーザー、 χ線、電子線などの活性光線をマスクを介して照射することにより画像 露光する。次いで、水を用いて現像処理を施し、未照射部を溶解除去して基板上に ノ ターンを形成し、焼成する。または、マスクなしで全面露光し現像処理することなく ノ ターンを形成し、それを酸素存在下で焼成 ·黒色化してブラックマトリックスを形成 する。 [0043] Next, a method for forming a black matrix using the curable resin composition of the present invention will be described. The curable resin composition layer formed on the substrate by coating or transfer is exposed to an image by irradiating an active ray such as ultraviolet ray, excimer laser, χ ray, electron beam through a mask. Next, development processing is performed using water, and unirradiated portions are dissolved and removed to form a pattern on the substrate, followed by baking. Alternatively, the entire surface is exposed without a mask and a pattern is formed without developing, and it is baked and blackened in the presence of oxygen to form a black matrix.
[0044] より高精度のパターンを形成する場合には、上記感光性フィルムを用い、先ず感光 性フィルムから保護フィルムを除き、基板に感光性ペースト膜を転写し、画像露光又 は全面露光した後、支持フィルムを除去する。次いで、画像露光した感光性ペースト 膜の場合は、現像処理に供してパターンを形成する。全面露光した感光性ペースト 膜の場合は、現像処理することなく硬化被膜を形成し、酸素存在下で焼成する。  [0044] In the case of forming a pattern with higher accuracy, the above-mentioned photosensitive film is used. First, the protective film is removed from the photosensitive film, the photosensitive paste film is transferred to the substrate, and image exposure or overall exposure is performed. Remove the support film. Next, in the case of the photosensitive paste film subjected to image exposure, it is subjected to a development process to form a pattern. In the case of a photosensitive paste film that has been exposed to the entire surface, a cured film is formed without developing, and is fired in the presence of oxygen.
[0045] 前記基板としては、例えば、ガラス基板、該ガラス基板上にバス電極等の電極を設 けた基板、セラミック基板などが挙げられる。また、感光性ペースト膜の転写において は、感光性ペースト膜を基板表面に重ね合わせ、ホットロールラミネーターなどにより 熱圧着するのが好ましい。熱圧着は、基板の表面温度を 80〜: 140°Cに加熱し、ロー ル圧:!〜 5kg/cm2、移動速度 0. 1~10. OmZ分の範囲で行うのが好ましレ、。前記 基板は予熱されていてもよ 予熱温度としては例えば 40〜100°Cの範囲が選択さ れる。さらに、露光で使用される放射線照射装置としては、フォトリソグラフィ一法で一 般的に使用されている紫外線照射装置、半導体および液晶表示装置を製造する際 に使用されている露光装置などを使用することができる。 [0045] Examples of the substrate include a glass substrate, a substrate in which an electrode such as a bus electrode is provided on the glass substrate, and a ceramic substrate. In the transfer of the photosensitive paste film, it is preferable that the photosensitive paste film is superposed on the substrate surface and thermocompression bonded with a hot roll laminator or the like. Thermocompression bonding is preferably performed at a substrate surface temperature of 80 to 140 ° C, roll pressure:! To 5 kg / cm 2 , and moving speed of 0.1 to 10 OmZ. . The substrate may be preheated. As the preheating temperature, for example, a range of 40 to 100 ° C. is selected. Furthermore, as a radiation irradiation apparatus used for exposure, an ultraviolet irradiation apparatus generally used in a photolithography method, an exposure apparatus used when manufacturing semiconductors and liquid crystal display devices, and the like are used. be able to.
[0046] 上述したように現像処理は、 (i)水溶性セルロース誘導体成分を有するので水で行 なうことができる。水の温度は、 10〜50°C力 S好ましく、 20〜40°C力 Sより好ましレ、。この 範囲を外れると現像性が低下し、現像残渣が発生するためである。また、現像処理に おいては、感光性ペースト膜の特性に応じて、現像時間、現像温度、現像方法 (例え ば、浸漬法、揺動法、シャワー法、スプレー法、パドル法等)、現像装置などを適宜選 択することができる。本発明の光硬化性樹脂組成物は、水で容易に現像ができ、有 機溶剤やアルカリ水溶液による環境問題や人体への悪影響がなぐかつ十分な黒色 を有するブラックマトリックスを形成することができる。 [0046] As described above, the development processing is carried out with water because (i) it has a water-soluble cellulose derivative component. Can be. The water temperature is preferably 10-50 ° C force S, more preferably 20-40 ° C force S. If it is out of this range, developability deteriorates and a development residue is generated. In the development process, depending on the characteristics of the photosensitive paste film, development time, development temperature, development method (eg, dipping method, rocking method, shower method, spray method, paddle method, etc.), development A device or the like can be selected as appropriate. The photocurable resin composition of the present invention can be easily developed with water, and can form a black matrix having sufficient blackness without causing environmental problems or adverse effects on the human body due to organic solvents or aqueous alkali solutions.
[0047] 上記焼成に使用される温度としては、(A)酸化により黒色化するイオン価数が 2以 上の金属の粉末を十分に黒色化させ、かつ(B)有機成分を焼失させる温度であれ ίまよレヽ。具体白勺 (こ (ま、 400〜: 1000oC、好ましく ίま 500〜1000oC、より好ましく ίま 500 〜600°Cの温度範囲である。 400°C未満だと(B)有機成分が消失せず、 1000°Cを 超えると金属によっては (例えば、銅など)、ー且黒色になった金属がさらに別の色に 変色するためである。焼成時間は、温度によって異なる力 例えば常温から 10°C/ minの昇温速度で加熱し 500〜600°Cで焼成する場合は 10〜: 120分間である。 [0047] The temperature used for the baking is a temperature at which (A) a metal powder having an ionic valence of 2 or more that is blackened by oxidation is sufficiently blackened, and (B) is a temperature at which the organic component is burned off. That ’s ίmayyo. Specific white birch (ko (boiled, 400 ~: 1000 o C, preferably ryoma 500 ~ 1000 o C, more preferably ryah 500 ~ 600 ° C. If less than 400 ° C, (B) organic component) This is because some metals (for example, copper, etc.) change the color of the black metal to a different color when the temperature exceeds 1000 ° C. From 10 to 120 minutes when heated at a heating rate of 10 ° C / min and calcined at 500 to 600 ° C.
[0048] 上記方法によって得られた本発明のブラックマトリックスは、光学密度(OD値)が 3.  [0048] The black matrix of the present invention obtained by the above method has an optical density (OD value) of 3.
0以上であることを特徴とする。  It is 0 or more.
[0049] 本発明のブラックマトリックスは、プラズマディスプレイパネル、有機 EL、無機 EL、フ ィールドエミッションディスプレイ等の各種のディスプレイを作成する材料として用いら れる力 特に PDPに好適に使用できる。  [0049] The black matrix of the present invention can be suitably used for a power used as a material for producing various displays such as a plasma display panel, an organic EL, an inorganic EL, and a field emission display, particularly for a PDP.
[0050] 本発明の PDPは、上記光硬化性樹脂組成物からなるブラックマトリックス形成方法 により得られたブラックマトリックスを含む。本発明の PDPは通常の PDP製造方法で 製造される。具体的にはガラス基板などの基板上に隔壁、電極、抵抗体、誘電体層、 蛍光体、カラーフィルターから選ばれる構成要素を公知方法で形成し、ブラックマトリ ックスは上記光硬化性樹脂組成物からなるブラックマトリックス形成方法により形成す ることで PDPを製造する。 [0050] The PDP of the present invention includes a black matrix obtained by the method for forming a black matrix comprising the photocurable resin composition. The PDP of the present invention is manufactured by a normal PDP manufacturing method. Specifically, a constituent element selected from a partition, an electrode, a resistor, a dielectric layer, a phosphor, and a color filter is formed on a substrate such as a glass substrate by a known method, and the black matrix is the photocurable resin composition. The PDP is manufactured by forming the black matrix using the method.
実施例  Example
[0051] 以下、実施例に基づき、本発明についてさらに詳細に説明する。なお、本発明は下 記実施例に限定されるものではない。 [0052] 〔実施例 1〕 [0051] Hereinafter, the present invention will be described in more detail based on examples. The present invention is not limited to the following examples. [Example 1]
(1)水現像型レジスト組成物の調整  (1) Preparation of water-developable resist composition
(i)水溶性セルロース誘導体としてヒドロキシプロピルセルロース 22質量部、アタリ ル樹脂としてスチレン Zヒドロキシェチルメタタリレート = 55Z45 (質量%)共重合体( Mw = 40000) 14質量部、光重合単量体として 2—メタクリロイロキシェチル 2—ヒドロ キシプロピルフタレート(商品名: HO_MPP、共栄社化学 (株)社製) 63質量部、光 重合開始剤として 2, 2—ジメトキシ一 2—フエ二ルァセトフヱノン(商品名 IR— 651、 チバガイギ一社製) 1. 0質量部及び溶剤として 3—メトキシ 3—メチルブタノール 100 質量部を力きまぜ機で 3時間混合することにより、水現像型レジスト組成物を調整した  (i) Hydroxypropyl cellulose 22 parts by weight as water-soluble cellulose derivative, Styrene Z hydroxyethyl methacrylate = 55 Z45 (mass%) copolymer (Mw = 40000) 14 parts by weight, photopolymerization monomer 2-Methacryloyloxetyl 2-Hydroxypropyl phthalate (trade name: HO_MPP, manufactured by Kyoeisha Chemical Co., Ltd.) 63 parts by mass, 2,2-dimethoxy-1-2-phenylacetophenone (product) Name IR-651, manufactured by Ciba Gaigi Co., Ltd.) 1. A water-developing resist composition was prepared by mixing 0 parts by mass and 100 parts by mass of 3-methoxy 3-methylbutanol as a solvent with a force stirrer for 3 hours.
[0053] (2)光硬化性樹脂組成物の調整 [0053] (2) Preparation of photocurable resin composition
上記(1)で調整した水現像型レジスト組成物(固形分 50%) 50質量部と銅粉末 (平 均粒径 1 μ m) 75質量部とを混練りすることで光硬化性樹脂組成物を調整した。  A photocurable resin composition obtained by kneading 50 parts by mass of the water-developable resist composition (solid content 50%) prepared in (1) above and 75 parts by mass of copper powder (average particle size 1 μm). Adjusted.
[0054] (3)感光性フィルムの製造 [0054] (3) Production of photosensitive film
上記(2)で調整した光硬化性樹脂組成物をポリエチレンテレフタレートからなる支 持フィルム上にリップコーターを用いて塗布し、塗膜を 100°Cで 6分間乾燥して溶剤 を完全に除去し、厚さ 16 μ ΐηの感光性ペースト膜を支持フィルム上に形成した。次に 感光性ペースト膜上に 25 μ m厚みのポリエチレンフィルムを張り合わせ感光性フィル ムを製造した。  The photocurable resin composition prepared in (2) above was applied onto a support film made of polyethylene terephthalate using a lip coater, and the coating film was dried at 100 ° C for 6 minutes to completely remove the solvent. A photosensitive paste film having a thickness of 16 μΐη was formed on a support film. Next, a 25 μm thick polyethylene film was laminated on the photosensitive paste film to produce a photosensitive film.
[0055] (4)感光性フィルムの評価 [0055] (4) Evaluation of photosensitive film
上記(3)で製造した感光性フィルムのポリエチレンフィルムを剥がしながら、予め 80 °Cに加熱しておいたガラス基板にホットロールラミネーターにより 105°Cでラミネートし た。エア圧力は 3kg/cm2とし、ラミネート速度は 1. Om/minとした。 While peeling the polyethylene film of the photosensitive film produced in (3) above, it was laminated at 105 ° C. with a hot roll laminator on a glass substrate that had been heated to 80 ° C. in advance. The air pressure was 3 kg / cm 2 and the laminating speed was 1. Om / min.
続レ、て支持フィルムであるポリエチレンテレフタレートを剥離し、感光性ペースト膜 に試験角パターンマスクを介して、超高圧水銀灯により 500mj/cm2の照射量で紫 外線露光を行った。液温 30°Cの水を用いて 3kg/cm2の噴射圧で 30秒間のスプレ 一現像を行い、パターンを形成した。密着性を評価したところ、残った最小線幅は 30 μ ΐηであった。また、 SEMでパターン形状を観察したところ、台形のパターン形状が 得られた。 Subsequently, polyethylene terephthalate as a support film was peeled off, and ultraviolet light exposure was performed on the photosensitive paste film through a test angle pattern mask with an ultrahigh pressure mercury lamp at an irradiation dose of 500 mj / cm 2 . A pattern was formed by performing spray development for 30 seconds at a spraying pressure of 3 kg / cm 2 using water at a liquid temperature of 30 ° C. When the adhesion was evaluated, the remaining minimum line width was 30 μΐη. Also, when the pattern shape was observed with SEM, the trapezoidal pattern shape was Obtained.
パターン焼成後の形状安定性と黒色度を評価するため、昇温スピード 1. 0°C/mi nで加熱し、 580°Cで 30分間保持する焼成処理を行った。その結果、矩形の良好な パターン形状を有し、〇D値 3. 5の充分な黒さを有するブラックマトリックスが形成さ れた。  In order to evaluate the shape stability and blackness after pattern firing, a firing process was performed by heating at a heating rate of 1.0 ° C / min and holding at 580 ° C for 30 minutes. As a result, a black matrix having a good rectangular pattern shape and sufficient blackness with a D value of 3.5 was formed.
[0056] 〔実施例 2〕 [Example 2]
銅粉末を鉄粉末 (平均粒径 1 β m)に変更した以外は実施例 1と同様にして感光性 フィルムを製造した。製造した感光性フィルムのポリエチレンフィルムを剥がしながら、 予め 80°Cに加熱しておいたガラス基板にホットロールラミネーターにより 105°Cでラミ ネートした。エア圧力は 3kg/cm2とし、ラミネート速度は 1 · Om/minとした。 A photosensitive film was produced in the same manner as in Example 1 except that the copper powder was changed to iron powder (average particle size 1 β m). While peeling off the polyethylene film of the produced photosensitive film, it was laminated at 105 ° C. with a hot roll laminator on a glass substrate that had been heated to 80 ° C. in advance. The air pressure was 3 kg / cm 2 and the laminating speed was 1 · Om / min.
続レ、て支持フィルムであるポリエチレンテレフタレートを剥離し、感光性ペースト膜 に試験角パターンマスクを介して、超高圧水銀灯により 500mj/cm2の照射量で紫 外線露光を行った。液温 30°Cの水を用いて 3kg/cm2の噴射圧で 30秒間のスプレ 一現像を行い、パターンを形成した。密着性を評価したところ、残った最小線幅は 30 μ ΐηであった。また、 SEMでパターン形状を観察したところ、台形のパターン形状が 得られた。 Subsequently, polyethylene terephthalate as a support film was peeled off, and ultraviolet light exposure was performed on the photosensitive paste film through a test angle pattern mask with an ultrahigh pressure mercury lamp at an irradiation dose of 500 mj / cm 2 . A pattern was formed by performing spray development for 30 seconds at a spraying pressure of 3 kg / cm 2 using water at a liquid temperature of 30 ° C. When the adhesion was evaluated, the remaining minimum line width was 30 μΐη. When the pattern shape was observed with SEM, a trapezoidal pattern shape was obtained.
パターン焼成後の形状安定性と黒色度を評価するため、昇温スピード 1. 0°C/mi nで加熱し、 580°Cで 30分間保持する焼成処理を行った。その結果、矩形の良好な パターン形状を有し、〇D値 3. 5の充分な黒さを有するブラックマトリックスクが形成さ れた。  In order to evaluate the shape stability and blackness after pattern firing, a firing process was performed by heating at a heating rate of 1.0 ° C / min and holding at 580 ° C for 30 minutes. As a result, a black matrix having a good rectangular pattern shape and sufficient blackness with a D value of 3.5 was formed.
[0057] 〔実施例 3〕 [Example 3]
銅粉末をコバルト粉末(平均粒径 1 μ m)に変更した以外は実施例 1と同様にして感 光性フィルムを製造した。製造した感光性フィルムのポリエチレンフィルムを剥がしな がら、予め 80°Cに加熱しておいたガラス基板にホットロールラミネーターにより 105°C でラミネートした。エア圧力は 3kg/cm2とし、ラミネート速度は 1. Om/minとした。 続レ、て支持フィルムであるポリエチレンテレフタレートを剥離し、感光性ペースト膜に 試験角パターンマスクを介して、超高圧水銀灯により 500mj/cm2の照射量で紫外 線露光を行った。液温 30°Cの水を用いて 3kg/cm2の噴射圧で 30秒間のスプレー 現像を行い、パターンを形成した。密着性を評価したところ、残った最小線幅は 30 μ mであった。また、 SEMでパターン形状を観察したところ、台形のパターン形状が得 られた。 A photosensitive film was produced in the same manner as in Example 1 except that the copper powder was changed to cobalt powder (average particle size 1 μm). While peeling off the polyethylene film of the produced photosensitive film, it was laminated at 105 ° C. with a hot roll laminator on a glass substrate that had been heated to 80 ° C. in advance. The air pressure was 3 kg / cm 2 and the laminating speed was 1. Om / min. Subsequently, the polyethylene terephthalate as a support film was peeled off, and the photosensitive paste film was exposed to ultraviolet rays at an irradiation dose of 500 mj / cm 2 with a super high pressure mercury lamp through a test angle pattern mask. Spray for 30 seconds at an injection pressure of 3 kg / cm 2 using a water solution temperature 30 ° C Development was performed to form a pattern. When the adhesion was evaluated, the remaining minimum line width was 30 μm. When the pattern shape was observed with SEM, a trapezoidal pattern shape was obtained.
パターン焼成後の形状安定性と黒色度を評価するため、昇温スピード 1. 0°C/mi nで加熱し、 580°Cで 30分間保持する焼成処理を行った。その結果、矩形の良好な パターン形状を有し、〇D値 3. 5の充分な黒さを有するブラックマトリックスクが形成さ れた。  In order to evaluate the shape stability and blackness after pattern firing, a firing process was performed by heating at a heating rate of 1.0 ° C / min and holding at 580 ° C for 30 minutes. As a result, a black matrix having a good rectangular pattern shape and sufficient blackness with a D value of 3.5 was formed.
[0058] 〔実施例 4〕 [Example 4]
アクリル樹脂としてイソブチルメタタリレート/ヒドロキシェチルアタリレート = 90/10 (質量%)共重合体 (Mw= 70000)を用いた以外は実施例 1と同様にして感光性フ イルムを製造した。製造した感光性フィルムのポリエチレンフィルムを剥がしながら、 予め 80°Cに加熱しておいたガラス基板にホットロールラミネーターにより 105°Cでラミ ネートした。エア圧力は 3kg/cm2とし、ラミネート速度は 1. Om/minとした。続いて 支持フィルムであるポリエチレンテレフタレートを剥離し、感光性ペースト膜に試験角 ノ ターンマスクを介して、超高圧水銀灯により 500mj/cm2の照射量で紫外線露光 を行った。液温 30°Cの水を用いて 3kg/cm2の噴射圧で 30秒間のスプレー現像を 行レ、、パターンを形成した。密着性を評価したところ、残った最小線幅は 30 / mであ つた。また、 SEMでパターン形状を観察したところ、台形のパターン形状が得られた パターン焼成後の形状安定性と黒色度を評価するため、昇温スピード 1. 0°C/mi nで加熱し、 580°Cで 30分間保持する焼成処理を行った。その結果、矩形の良好な パターン形状を有し、〇D値 3. 5の充分な黒さを有するブラックマトリックスクが形成さ れた。 A photosensitive film was produced in the same manner as in Example 1 except that isobutyl methacrylate / hydroxyethyl acrylate = 90/10 (mass%) copolymer (Mw = 70000) was used as the acrylic resin. While peeling off the polyethylene film of the produced photosensitive film, it was laminated at 105 ° C. with a hot roll laminator on a glass substrate that had been heated to 80 ° C. in advance. The air pressure was 3 kg / cm 2 and the laminating speed was 1. Om / min. Subsequently, the support film, polyethylene terephthalate, was peeled off, and the photosensitive paste film was exposed to ultraviolet light at a dose of 500 mj / cm 2 with a super high pressure mercury lamp through a test angle pattern mask. A pattern was formed by spray development for 30 seconds at a spraying pressure of 3 kg / cm 2 using water at a liquid temperature of 30 ° C. When the adhesion was evaluated, the minimum remaining line width was 30 / m. In addition, when the pattern shape was observed by SEM, a trapezoidal pattern shape was obtained. To evaluate the shape stability and blackness after pattern firing, the film was heated at a heating rate of 1.0 ° C / min. A baking treatment was performed for 30 minutes at ° C. As a result, a black matrix having a good rectangular pattern shape and sufficient blackness with a D value of 3.5 was formed.
[0059] 〔実施例 5〕 [Example 5]
実施例 1の(1)で調整した水現像型レジスト組成物(固形分 50%) 50質量部と銅粉 末(平均粒径 1 μ m) 75質量部と、ガラスフリット 10重量部とを混練りすることで光硬 化性樹脂組成物を調整した以外は、実施例 1と同様にして感光性フィルムを製造し た。製造した感光性フィルムのポリエチレンフィルムを剥がしながら、予め 80°Cに加 熱しておいたガラス基板にホットロールラミネーターにより 105°Cでラミネートした。ェ ァ圧力は 3kg/cm2とし、ラミネート速度は 1. Om/minとした。続いて支持フィルム であるポリエチレンテレフタレートを剥離し、感光性ペースト膜に試験角パターンマス クを介して、超高圧水銀灯により 500mj/cm2の照射量で紫外線露光を行った。液 温 30°Cの水を用いて 3kg/cm2の噴射圧で 30秒間のスプレー現像を行レ、、パター ンを形成した。密着性を評価したところ、残った最小線幅は 30 z mであった。また、 S EMでパターン形状を観察したところ、台形のパターン形状が得られた。 50 parts by weight of the water-developable resist composition (solid content 50%) prepared in Example 1 (1), 75 parts by weight of copper powder (average particle size 1 μm), and 10 parts by weight of glass frit were mixed. A photosensitive film was produced in the same manner as in Example 1 except that the photocurable resin composition was adjusted by kneading. While peeling off the polyethylene film of the manufactured photosensitive film, preheat it to 80 ° C. It was laminated at 105 ° C. with a hot roll laminator on a heated glass substrate. The air pressure was 3 kg / cm 2 and the laminating speed was 1. Om / min. Subsequently, the polyethylene terephthalate as a support film was peeled off, and the photosensitive paste film was exposed to ultraviolet rays at a dose of 500 mj / cm 2 with an ultrahigh pressure mercury lamp through a test angle pattern mask. Using water at a liquid temperature of 30 ° C, spray development was performed at a spraying pressure of 3 kg / cm 2 for 30 seconds to form a pattern. When the adhesion was evaluated, the remaining minimum line width was 30 zm. When the pattern shape was observed with SEM, a trapezoidal pattern shape was obtained.
パターン焼成後の形状安定性と黒色度を評価するため、昇温スピード 1. 0°C/mi nで加熱し、 580°Cで 30分間保持する焼成処理を行った。その結果、矩形の良好な パターン形状を有し、〇D値 3 · 5の充分な黒さを有するブラックマトリックスクが形成さ れ /こ  In order to evaluate the shape stability and blackness after pattern firing, a firing process was performed by heating at a heating rate of 1.0 ° C / min and holding at 580 ° C for 30 minutes. As a result, a black matrix having a good rectangular pattern shape and sufficient blackness with a D value of 3 and 5 is formed.
[0060] 〔比較例 1〕  [Comparative Example 1]
( 1 )水現像型レジスト組成物の調整  (1) Preparation of water-developable resist composition
水溶性セルロース誘導体としてヒドロキシプロピルセルロース 22質量部、アクリル榭 脂としてスチレン/ヒドロキシェチルメタタリレート = 55/45 (質量0 /0)共重合体 (Mw =40000) 14質量部、光重合単量体として 2—メタクリロイロキシェチル 2—ヒドロキシ プロピルフタレート(商品名 HO— MPP、共栄社化学 (株)社製) 63質量部、光重合 開始剤として 2, 2—ジメトキシ一 2—フエニルァセトフエノン(商品名 IR— 651、チバ ガイギ一社製) 1. 0質量部及び溶剤として 3—メトキシ 3—メチルブタノール 100質量 部を力きまぜ機で 3時間混合することにより、水現像型レジスト組成物を調整した。 Hydroxypropyl cellulose 22 parts by weight water-soluble cellulose derivatives, styrene / hydroxyethyl E chill meth Tari rate = 55/45 (mass 0/0) copolymer acrylic榭fat (Mw = 40000) 14 parts by weight of a photopolymerization monomer 2-Methacryloyloxetyl 2-hydroxypropyl phthalate (trade name HO-MPP, manufactured by Kyoeisha Chemical Co., Ltd.) 63 parts by mass, 2,2-dimethoxy-1-phenylacetofu as a photopolymerization initiator Enon (trade name IR-651, manufactured by Ciba Gaigi Co., Ltd.) 1. Water development resist composition by mixing 0 parts by mass and 100 parts by mass of 3-methoxy 3-methylbutanol as a solvent with a force stirrer for 3 hours. I adjusted things.
[0061] (2)感光性ブラックペースト組成物の調整 [0061] (2) Preparation of photosensitive black paste composition
上記(1 )で調整した水現像型レジスト組成物(固形分 50%)の 50質量部と黒色微 粒子である四三酸化コバルト(Co O ) (平均粒径 l x m)の 75質量部を混練りするこ  50 parts by mass of the water-developable resist composition (solid content 50%) prepared in (1) above and 75 parts by mass of black fine particles of cobalt trioxide (Co 2 O 3) (average particle size lxm) were kneaded. To do
3 4  3 4
とにより、感光性ブラックペースト組成物を調整した。  Thus, a photosensitive black paste composition was prepared.
[0062] (3)感光性フィルムの製造 [0062] (3) Production of photosensitive film
上記(2)で調整した感光性ブラックペースト組成物をポリエチレンテレフタレートか らなる支持フィルム上にリップコーターを用いて塗布し、塗膜を 100°Cで 6分間乾燥し て溶剤を完全に除去し、厚さ 16 μ mの感光性ブラックペースト膜を支持フィルム上に 形成した。次に感光性ブラックペースト膜上に 25 μ m厚みのポリエチレンフィルムを 張り合わせ感光性フィルムを製造した。 The photosensitive black paste composition prepared in (2) above was applied onto a support film made of polyethylene terephthalate using a lip coater, and the coating film was dried at 100 ° C for 6 minutes to completely remove the solvent. 16 μm thick photosensitive black paste film on support film Formed. Next, a 25 μm thick polyethylene film was laminated on the photosensitive black paste film to produce a photosensitive film.
[0063] (4)感光性フィルムの評価 [0063] (4) Evaluation of photosensitive film
上記(3)で製造した感光性フィルムのポリエチレンフィルムを剥がしながら、予め 80 °Cに加熱しておいたガラス基板にホットロールラミネーターにより 105°Cでラミネートし た。エア圧力は 3kg/cm2とし、ラミネート速度は 1. Om/minとした。 While peeling the polyethylene film of the photosensitive film produced in (3) above, it was laminated at 105 ° C. with a hot roll laminator on a glass substrate that had been heated to 80 ° C. in advance. The air pressure was 3 kg / cm 2 and the laminating speed was 1. Om / min.
続レ、て支持フィルムであるポリエチレンテレフタレートを剥離し、感光性ブラックマト リクス膜に試験角パターンマスクを介して、超高圧水銀灯により 500mj/cm2の照射 量で紫外線露光を行った。液温 30°Cの水を用いて 3kg/cm2の噴射圧で、 30秒間 のスプレー現像を行い、パターンを形成した。密着性を評価したところ、残った最小 線幅は 200 /i mであった。また、 SEMでパターン形状を観察したところ、アンダー力 ットした逆台形のパターン形状が得られた。 Subsequently, the polyethylene terephthalate as a supporting film was peeled off, and the photosensitive black matrix film was exposed to ultraviolet rays at an irradiation dose of 500 mj / cm 2 with a super high pressure mercury lamp through a test angle pattern mask. A pattern was formed by spray development for 30 seconds at a spraying pressure of 3 kg / cm 2 using water at a liquid temperature of 30 ° C. When the adhesion was evaluated, the minimum remaining line width was 200 / im. In addition, when the pattern shape was observed by SEM, an inverted trapezoidal pattern shape with an under force was obtained.
パターンの焼成後の形状安定性及び黒色度を評価するため、昇温スピード 1. 0°C /minで加熱し、 580°Cで 30分間保持する焼成処理を行った。その結果、 OD値 3. 5と十分な黒さは得られたが、焼成後パターン形状を SEMで観察したところ、部分的 にパターン端部が剥離し、微細なパターンを形成することができなかった。  In order to evaluate the shape stability and blackness after baking of the pattern, a baking treatment was performed by heating at a heating rate of 1.0 ° C./min and holding at 580 ° C. for 30 minutes. As a result, an OD value of 3.5 and sufficient blackness were obtained, but when the pattern shape after firing was observed by SEM, the pattern edge partly peeled off and a fine pattern could not be formed. It was.
[0064] 〔比較例 2〕 [Comparative Example 2]
(1)水現像型レジスト組成物の調整  (1) Preparation of water-developable resist composition
(i)水溶性セルロース誘導体及び (iii)アクリル系樹脂の代わりに側鎖にカルボキシ ル基を有する感光性ポリマーとして、メタクリノレ酸 40%、メチルメタタリレート 30%およ びスチレン 30%からなる共重合体のカルボキシル基に対して 0. 4当量のグリシジル メタタリレートを付加反応させたポリマー(重量平均分子量 40, 000 酸価 95) 36質 量部を用いた以外は実施例 1と同様にしてレジスト組成物を調整した。  (i) a water-soluble cellulose derivative and (iii) a photopolymer having a carboxyl group in the side chain instead of an acrylic resin, a copolymer comprising 40% methacrylolic acid, 30% methyl methacrylate and 30% styrene. Resist composition in the same manner as in Example 1 except that a polymer obtained by addition reaction of 0.4 equivalent of glycidyl metatalylate with respect to the carboxyl group of the polymer (weight average molecular weight 40,000 acid value 95) 36 parts by mass was used. I adjusted things.
[0065] (2)感光性ブラックペースト組成物の調整 [0065] (2) Preparation of photosensitive black paste composition
上記(1)で調整したレジスト組成物(固形分 50。/o)の 50質量部と銅粉末 (平均粒径 1 μ m) 75質量部を混練りすることにより、感光性ブラックペースト組成物を調整した 力 S、ペースト糸且成物がゲルィ匕して塗布不可能であった。 産業上の利用可能性 以上のように、本発明の光硬化性樹脂組成物は、水現像可能で、微細なパターン を形成することができ、かつ十分な黒色を有するブラックマトリックスを形成できるため 、各種ディスプレイに用いることができる。特に PDP用のブラックマトリックスに有用で ある。 The photosensitive black paste composition was prepared by kneading 50 parts by mass of the resist composition (solid content 50./o) prepared in (1) above and 75 parts by mass of copper powder (average particle size 1 μm). The adjusted force S, paste yarn and composition were gelled and could not be applied. Industrial applicability As described above, the photocurable resin composition of the present invention can be developed with water, can form a fine pattern, and can form a black matrix having a sufficient black color. Therefore, it can be used for various displays. it can. It is particularly useful for black matrix for PDP.

Claims

請求の範囲 The scope of the claims
[1] ブラックマトリックスの形成に用いられる光硬化性樹脂組成物であって、  [1] A photocurable resin composition used for forming a black matrix,
(A)酸化により黒色化するイオン価数が 2以上の金属粉末と、  (A) a metal powder having an ionic valence of 2 or more that is blackened by oxidation;
(B) (i)水溶性セルロース誘導体と、 (ii)光重合性単量体と、(iii)ヒドロキシ基を有 するアクリル系樹脂と、 (iv)光重合開始剤とからなる有機成分と、  (B) (i) a water-soluble cellulose derivative, (ii) a photopolymerizable monomer, (iii) an acrylic resin having a hydroxy group, and (iv) an organic component comprising a photopolymerization initiator,
を含有するブラックマトリックス形成用光硬化性樹脂組成物。  A photocurable resin composition for forming a black matrix.
[2] 前記酸化により黒色化するイオン価数が 2以上の金属粉末が、銅である請求項 1に 記載のブラックマトリックス形成用光硬化性樹脂組成物。 2. The photocurable resin composition for forming a black matrix according to claim 1, wherein the metal powder having an ionic valence of 2 or more that is blackened by oxidation is copper.
[3] 請求項 1に記載のブラックマトリックス形成用光硬化性樹脂組成物を成膜化して得 られる感光性ペースト膜と、この感光性ペースト膜を保護する保護フィルムからなるブ ラックマトリックス形成用感光性フィルム。 [3] A photosensitive material for forming a black matrix comprising a photosensitive paste film obtained by forming a film of the photocurable resin composition for forming a black matrix according to claim 1, and a protective film for protecting the photosensitive paste film. Sex film.
[4] 請求項 1に記載のブラックマトリックス形成用光硬化性樹脂組成物を用いて、基板 上に感光性ペースト膜を形成する感光性ペースト膜形成工程と、 [4] Using the photocurable resin composition for forming a black matrix according to claim 1, a photosensitive paste film forming step of forming a photosensitive paste film on a substrate;
前記感光性ペースト膜を露光した後、水で現像処理を施して、前記基板上に所定 のパターンを形成するパターン形成工程と、  A pattern forming step of exposing the photosensitive paste film to a development process with water to form a predetermined pattern on the substrate;
前記パターン形成工程で得られたパターンを酸素存在下、 1000°C以下の温度で 焼成することによって、硬化させるとともに酸化して黒色化させるパターン焼成 '黒色 化工程と、  By baking the pattern obtained in the pattern formation step in the presence of oxygen at a temperature of 1000 ° C. or lower, the pattern is fired and oxidized to blacken, a blackening step,
を有するブラックマトリックス形成方法。  A method for forming a black matrix.
[5] 請求項 4に記載のブラックマトリックス形成方法により得られる光学密度(OD)が 3. [5] The optical density (OD) obtained by the black matrix forming method according to claim 4 is 3.
0以上であるブラックマトリックス。  Black matrix that is 0 or more.
[6] 請求項 4に記載のブラックマトリックス形成方法を用いて形成されたブラックマトリック スを有するプラズマディスプレイパネル。 [6] A plasma display panel having a black matrix formed by using the black matrix forming method according to claim 4.
PCT/JP2006/301149 2005-03-18 2006-01-25 Photocurable resin composition for forming black matrix, photosensitive film using the same, method for forming black matrix, black matrix and plasma display panel having the black matrix WO2006100825A1 (en)

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